WO1999066346A1 - Plaque de scintillateurs, capteur d'image radiologique et procede de fabrication - Google Patents

Plaque de scintillateurs, capteur d'image radiologique et procede de fabrication Download PDF

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Publication number
WO1999066346A1
WO1999066346A1 PCT/JP1999/003262 JP9903262W WO9966346A1 WO 1999066346 A1 WO1999066346 A1 WO 1999066346A1 JP 9903262 W JP9903262 W JP 9903262W WO 9966346 A1 WO9966346 A1 WO 9966346A1
Authority
WO
WIPO (PCT)
Prior art keywords
scintillator
light
film
image sensor
light receiving
Prior art date
Application number
PCT/JP1999/003262
Other languages
English (en)
Japanese (ja)
Inventor
Takuya Homme
Toshio Takabayashi
Hiroto Sato
Original Assignee
Hamamatsu Photonics K.K.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics K.K. filed Critical Hamamatsu Photonics K.K.
Priority to AU41679/99A priority Critical patent/AU4167999A/en
Publication of WO1999066346A1 publication Critical patent/WO1999066346A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/202—Measuring radiation intensity with scintillation detectors the detector being a crystal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors

Definitions

  • X-ray photosensitive films have been used in medical and industrial X-ray photography, but radiation imaging systems using radiation detection elements have become widespread in terms of convenience and preservation of imaging results.
  • pixel data based on two-dimensional radiation is acquired as an electric signal by a radiation detecting element, and this signal is processed by a processing device and displayed on a monitor.
  • the scintillation plate of the present invention of the light generated by the columnar structure of the scintillation tube facing the portion other than the light receiving portion of the image sensor, the light traveling toward the tip of the scintillation tube is
  • the crosstalk component can be reduced and the resolution of the scintillator plate can be improved.
  • FIG. 9 is a sectional view of a radiation image sensor according to a fifth embodiment of the present invention.
  • FIG. 1 is a sectional view of a radiation image sensor 2 according to the exemplary embodiment.
  • the radiation image sensor 2 is composed of a thin-film transistor (TFT) and a photodiode array (imaging device) 10.
  • An A1 (black A1) film (light absorbing film) 14 is provided on the surface of the tip of the scintillator 12 formed on the other part, and the entire scintillator 12 is designed to improve moisture resistance.
  • the first polyparaxylylene film (organic film) 16 is covered with a first polyparaxylylene film 16, and an A1 film 18 for improving moisture resistance is provided on the first polyparaxylylene film 16. It has a structure in which a second polyparaxylylene film 20 for preventing peeling of the A1 film 18 is provided.
  • FIG. 5 shows a radiation image sensor provided with a scintillation panel provided with a light absorbing film 34a on a portion of the substrate 30 which does not correspond to FIG.
  • the portion of the A1 substrate 32 where the light absorbing film 34a is not provided reflects light because the A1 substrate is a light-reflective substrate. This makes it possible to realize a resolution equal to or higher than that of the scintillator panel of the second embodiment described above.
  • a light absorbing film for example, a black A1 film and carbon black are formed on a part of the surface.

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Measurement Of Radiation (AREA)

Abstract

La présente invention concerne des scintillateurs (12) dotés d'une structure en colonnes, qui sont formés sur la face de photodétection d'un champ de photodiodes (10) dans un capteur d'image radiologique. Une pellicule en Al absorbant la lumière (14) est formée à la surface de l'extrémité de chaque scintillateur (12), à l'exception des scintillateurs (12) se trouvant dans les parties de photodétection (10b). Une première pellicule de polyparaxylène (16) destinée à améliorer la résistance à l'humidité recouvre entièrement les scintillateurs (12) et une pellicule en Al (18) est formée sur la première pellicule en polyparaxylène (16) afin de renforcer encore la résistance à l'humidité. En outre, une deuxième pellicule de polyparaxylène (20) permet d'empêcher que la pellicule en Al (18) se détache.
PCT/JP1999/003262 1998-06-18 1999-06-18 Plaque de scintillateurs, capteur d'image radiologique et procede de fabrication WO1999066346A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU41679/99A AU4167999A (en) 1998-06-18 1999-06-18 Scintillator plate, radiation image sensor, and method for manufacturing the same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP10/171194 1998-06-18
JP17119498 1998-06-18

Publications (1)

Publication Number Publication Date
WO1999066346A1 true WO1999066346A1 (fr) 1999-12-23

Family

ID=15918764

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP1999/003262 WO1999066346A1 (fr) 1998-06-18 1999-06-18 Plaque de scintillateurs, capteur d'image radiologique et procede de fabrication

Country Status (2)

Country Link
AU (1) AU4167999A (fr)
WO (1) WO1999066346A1 (fr)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002086540A1 (fr) * 2001-04-23 2002-10-31 Siemens Aktiengesellschaft Convertisseur de rayonnement avec couche de substance luminescente
US6753531B2 (en) 1999-04-09 2004-06-22 Hamamatsu Photonics K.K. Scintillator panel and radiation image sensor
US6833548B2 (en) 2000-05-19 2004-12-21 Hamamatsu Photonics K.K. Radiation detector and method of producing the same
US6867418B2 (en) * 2000-01-13 2005-03-15 Hamamatsu Photonics K.K. Radiation image sensor and scintillator panel
US6919569B2 (en) 2000-05-19 2005-07-19 Hamamatsu Photonics K.K. Radiation detector and method of manufacture thereof
US7034306B2 (en) 1998-06-18 2006-04-25 Hamamatsu Photonics K.K. Scintillator panel and radiation image sensor
US7151263B2 (en) 2000-05-19 2006-12-19 Hamamatsu Photonics K.K. Radiation detector and method of manufacture thereof
JP2008082852A (ja) * 2006-09-27 2008-04-10 Toshiba Corp 放射線検出装置
WO2011152194A1 (fr) 2010-06-04 2011-12-08 浜松ホトニクス株式会社 Panneau de scintillateur et capteur d'image de rayonnement
JP2012127735A (ja) * 2010-12-14 2012-07-05 Fujifilm Corp 放射線検出装置及びシンチレータパネルの製造方法
JP2012181108A (ja) * 2011-03-01 2012-09-20 Canon Inc 放射線検出装置、シンチレータパネル、それらの製造方法、および放射線検出システム
US9136029B2 (en) 2010-06-04 2015-09-15 Hamamatsu Photonics K.K. Scintillator panel, and radiographic image sensor
CN108796441A (zh) * 2018-06-06 2018-11-13 中国科学院宁波材料技术与工程研究所 一种光吸收镀膜、其制备方法及应用
US11415712B2 (en) 2018-09-04 2022-08-16 Canon Electron Tubes & Devices Co., Ltd. Radiation detector, method and apparatus of manufacturing the same, scintillator panel and method and apparatus of manufacturing the same

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05107362A (ja) * 1991-10-16 1993-04-27 Hamamatsu Photonics Kk Ｘ線検出素子の製造方法
JPH05203755A (ja) * 1991-09-23 1993-08-10 General Electric Co <Ge> 光収集効率を高めた光検出器シンチレータ放射線撮像装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05203755A (ja) * 1991-09-23 1993-08-10 General Electric Co <Ge> 光収集効率を高めた光検出器シンチレータ放射線撮像装置
JPH05107362A (ja) * 1991-10-16 1993-04-27 Hamamatsu Photonics Kk Ｘ線検出素子の製造方法

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7705315B2 (en) 1998-06-18 2010-04-27 Hamamatsu Photonics K.K. Scintillator panel and radiation image sensor
US7408177B2 (en) 1998-06-18 2008-08-05 Hamamatsu Photonics K.K. Scintillator panel and radiation image sensor
US7034306B2 (en) 1998-06-18 2006-04-25 Hamamatsu Photonics K.K. Scintillator panel and radiation image sensor
US6753531B2 (en) 1999-04-09 2004-06-22 Hamamatsu Photonics K.K. Scintillator panel and radiation image sensor
US6911658B2 (en) 1999-04-09 2005-06-28 Hamamatsu Photonics K.K. Scintillator panel and radiation image sensor
US7064335B2 (en) 2000-01-13 2006-06-20 Hamamatsu Photonics K.K. Radiation image sensor and scintillator panel
US6867418B2 (en) * 2000-01-13 2005-03-15 Hamamatsu Photonics K.K. Radiation image sensor and scintillator panel
US7151263B2 (en) 2000-05-19 2006-12-19 Hamamatsu Photonics K.K. Radiation detector and method of manufacture thereof
US6919569B2 (en) 2000-05-19 2005-07-19 Hamamatsu Photonics K.K. Radiation detector and method of manufacture thereof
US6833548B2 (en) 2000-05-19 2004-12-21 Hamamatsu Photonics K.K. Radiation detector and method of producing the same
WO2002086540A1 (fr) * 2001-04-23 2002-10-31 Siemens Aktiengesellschaft Convertisseur de rayonnement avec couche de substance luminescente
JP2008082852A (ja) * 2006-09-27 2008-04-10 Toshiba Corp 放射線検出装置
WO2011152194A1 (fr) 2010-06-04 2011-12-08 浜松ホトニクス株式会社 Panneau de scintillateur et capteur d'image de rayonnement
US9136029B2 (en) 2010-06-04 2015-09-15 Hamamatsu Photonics K.K. Scintillator panel, and radiographic image sensor
JP2012127735A (ja) * 2010-12-14 2012-07-05 Fujifilm Corp 放射線検出装置及びシンチレータパネルの製造方法
JP2012181108A (ja) * 2011-03-01 2012-09-20 Canon Inc 放射線検出装置、シンチレータパネル、それらの製造方法、および放射線検出システム
CN108796441A (zh) * 2018-06-06 2018-11-13 中国科学院宁波材料技术与工程研究所 一种光吸收镀膜、其制备方法及应用
CN108796441B (zh) * 2018-06-06 2020-03-03 中国科学院宁波材料技术与工程研究所 一种光吸收镀膜、其制备方法及应用
US11415712B2 (en) 2018-09-04 2022-08-16 Canon Electron Tubes & Devices Co., Ltd. Radiation detector, method and apparatus of manufacturing the same, scintillator panel and method and apparatus of manufacturing the same

Also Published As

Publication number Publication date
AU4167999A (en) 2000-01-05

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