WO1999044282A1 - Dispositif de commande de moteur ultrasonique - Google Patents

Dispositif de commande de moteur ultrasonique Download PDF

Info

Publication number
WO1999044282A1
WO1999044282A1 PCT/JP1999/000890 JP9900890W WO9944282A1 WO 1999044282 A1 WO1999044282 A1 WO 1999044282A1 JP 9900890 W JP9900890 W JP 9900890W WO 9944282 A1 WO9944282 A1 WO 9944282A1
Authority
WO
WIPO (PCT)
Prior art keywords
signal
phase
ultrasonic motor
rotor
drive
Prior art date
Application number
PCT/JP1999/000890
Other languages
English (en)
Japanese (ja)
Inventor
Makoto Masuda
Original Assignee
Star Micronics Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP10047964A external-priority patent/JP2935688B1/ja
Priority claimed from JP10101339A external-priority patent/JPH11299271A/ja
Application filed by Star Micronics Co., Ltd. filed Critical Star Micronics Co., Ltd.
Publication of WO1999044282A1 publication Critical patent/WO1999044282A1/fr

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163—Motors with ring stator
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14—Drive circuits; Control arrangements or methods
    • H02N2/142—Small signal circuits; Means for controlling position or derived quantities, e.g. speed, torque, starting, stopping, reversing

Definitions

  • the present invention relates to a control device for an ultrasonic motor.
  • a conventional ultrasonic motor is described in Japanese Patent Application Laid-Open No. 7-154,981.
  • a vibrator is provided on both the moving element and the stator, and the rotor as the moving element rotates according to the vibration state of the vibrating element. Disclosure of the invention
  • the present invention has been made to solve such a problem, and an object of the present invention is to provide an ultrasonic motor control device capable of performing sufficient rotation control.
  • the control device for an ultrasonic motor is configured to apply a first drive signal to one of vibrators provided on a stator and a mover opposed to each other, and to vibrate the vibrator by applying a second drive signal to the other.
  • a controller for the ultrasonic motor in which the movable element moves in accordance with the vibration of the transducer, wherein the phase of the second drive signal is relatively shifted with respect to the phase of the first drive signal, and It is characterized in that the moving amount of the moving element is controlled according to the shift amount.
  • each traveling wave is generated by applying first and second drive signals to each of the oscillators.
  • the shift phase signal generation section shifts the phase of the second drive signal relatively to the phase of the first drive signal. Therefore, the combined position of the traveling wave moves due to the phase difference between these drive signals. Therefore, the moving amount of the moving element is controlled in accordance with the phase shift amount, so that the moving element can be sufficiently controlled.
  • the total amount of phase shift is proportional to the amount of movement of the mover.
  • the control circuit preferably stops the application of the first and second drive signals or stops the shift of the phase by the shift phase signal generator when the total amount of the phase shift reaches a desired value. Can be stopped at the desired position.
  • control device generates a pulse signal whose phase shift amount changes according to the number of output pulses, and measures the number of pulses or a signal that changes in proportion to the number of pulses. In this case, the amount of phase shift can be detected according to the number of pulses.
  • the ultrasonic motor functions as a rotary motion type ultrasonic motor in which the movable element is a rotor when the movable element has an annular shape, and the ultrasonic motor operates when the movable element has a long plate shape. Functions as a linear motion type ultrasonic motor using a slider as a slider.
  • the first drive signal is applied to one of the transducers provided on the stator and the oscillator which are opposed to each other, and the second drive signal is applied to the other.
  • a value corresponding to a relative position between the stator and the movable element is stored, and the stored value is stored.
  • the application start time of the first and second drive signals to the vibrator may be adjusted according to the above.
  • the valley of the ultrasonic surface of the moving element that is supposed to match this position is not necessarily located at the peak of the ultrasonic surface of the stator.
  • the movable element moves so as to be combined (hereinafter referred to as initial movement).
  • the first and second drive signals are applied to the oscillator.
  • a surface is formed by ultrasonic waves on the opposing surfaces of both the stator and the mover, and a value corresponding to the relative position between the stator and the mover is stored.
  • FIG. 1 is a configuration diagram showing an ultrasonic motor according to an embodiment.
  • FIG. 2 is a plan view of one side of the piezoelectric vibrator 5 V or 6 V.
  • FIG. 3 is a plan view of the other side of the piezoelectric vibrator 5 V or 6 V.
  • FIG. 4 is a cross-sectional view of the stay / rotor contact portion along the circumferential direction when a traveling wave is generated.
  • FIG. 5 is a system configuration diagram of the electric control unit 2.
  • FIG. 6 is a circuit diagram of the pulse thinning and additional circuit 16 D11, 16 D12.
  • 7A, 7B, 7C, 7D, 7E, 7F, and 7G are timing charts of voltage waveforms at points a to g of the circuit shown in FIG.
  • FIG. 8 is a system configuration diagram of the electric control unit 2 according to another embodiment.
  • FIG. 9 is a configuration diagram showing an ultrasonic module according to still another embodiment.
  • FIG. 10 is a longitudinal sectional view of the ultrasonic motor main body obtained by cutting the ultrasonic motor main body by a plane passing through the axial center thereof.
  • FIG. 11 is a partially exploded perspective view showing a main part of the ultrasonic motor main body 101.
  • Fig. 12 is a plan view of the stage 105 or the row 106 when a standing wave of five wavelengths (indicated by a two-dot chain line) is generated.
  • FIGS. 13A and 13B are cross-sectional views taken along the circumferential direction of the stay / mouth / night contact portion when a traveling wave is generated on the opposing surface of the elastic body.
  • FIG. 14 is a system configuration diagram of a control device connected to the stay and the mouth.
  • FIG. 15 is a circuit diagram of the clock shift circuit.
  • Figures 16A, 16B, 16C, and 16D are timing charts for explaining the operation of the clock shift circuit.
  • FIG. 17 is a system configuration diagram of another control device 102 connected to the stay 105 and the low 106.
  • FIG. 1 is a configuration diagram showing an ultrasonic motor according to the present embodiment.
  • the ultrasonic motor is composed of an ultrasonic motor main body 1 composed of a mechanical drive mechanism and an electric control unit 2 as a control device for controlling the driving of the ultrasonic motor main body 1.
  • the ultrasonic motor main body 1 has a circular outer stay 5 and a mouth 6 provided on a rotating shaft 4 penetrating the center of the fixing base 3 so as to face each other.
  • the mouth 6 is rotated by displacing the phase of one traveling wave from the other while the traveling waves traveling in the circumferential direction of the opposing contact surfaces of the stay 5 and the rotor 6 are combined.
  • the fixing base 3 is for fixing the ultrasonic motor to a fixed side of a main device such as a camera to which the ultrasonic motor is applied.
  • a through hole 3h is formed in the center of the fixing base 3 so as to penetrate the fixing base 3 in the vertical direction.
  • the stay 5 includes an annular vibrator 5 V made of a ceramic piezoelectric element, and an annular elastic body 5 ⁇ made of a metal with the vibrator 5 V adhered to the outer periphery of the back surface.
  • the inner peripheral portion 5 i of the elastic body 5 e is fixed to the fixing base 3 by, for example, screwing, and the annular intermediate portion 5 m between the outer peripheral portion 5 o and the inner peripheral portion 5 i is thin,
  • the intermediate portion 5 m facilitates vibration of the outer peripheral portion and suppresses transmission of vibration between the inner peripheral portion 5 i and the outer peripheral portion 50.
  • a through hole 5 h is formed in the center of the station 5 in the vertical direction.
  • the rotor 6 has the same structure as the stay 5 and has an annular shape made of a ceramic piezoelectric element.
  • the vibrator 6v includes a vibrator 6v, and an annular elastic body 6e made of metal and attached to the outer peripheral portion of the upper surface of the vibrator 6v.
  • the inner peripheral portion 6i of the elastic body 6e is fixed to the rotating shaft 4, and the elastic body 6e has an annular thin intermediate portion 6m between the outer peripheral portion 6o and the inner peripheral portion 6i.
  • the rotating shaft 4 is inserted through the fixing base 3 and the through holes 3 h and 5 h of the stay 5.
  • the rotating shaft 4 is rotatably supported by a bearing 7 fitted and fixed in the through hole 3 h of the fixing base 3.
  • a boss 8 having a larger diameter than the rotating shaft 4 is provided above the bearing position of the bearing 7 on the rotating shaft 4.
  • the inner peripheral portion 6i of the mouth-side elastic body 6e is located between the boss 8 and the stay-side elastic body 5e, and is press-fitted and fixed to the boss 8.
  • a snap ring 9 such as a C-ring is attached to the lower part of the rotating shaft 4.
  • a compression spring is provided between the snap ring 9 and the bearing 7 via a spacer 10. 1 1 is inserted.
  • the rotating shaft 4 and the boss 8 are constantly urged downward by the compression spring 11.
  • annular mass body pair having the pair of elastic bodies 5 e and 6 e positioned therebetween is fixed to the rotation axis 4 so that the center axis thereof coincides with the rotation axis 4, and the elastic bodies 5 e and 6 e May be suppressed.
  • the stay-side elastic body 5 e has a narrow annular convex part 5 p on the outer peripheral part 5 o upper surface
  • the mouth overnight-side elastic body 6 e has a narrow annular convex part on the outer peripheral part 6 o back surface.
  • the part has 6 p.
  • An annular cushioning friction member 12 made of, for example, resin is interposed between the rotor-side protrusion 6p and the stay-side protrusion 5p, and the cushioning friction member 12 is in pressure contact with them. That is, the convex portion 6 p of the low pressure side presses the convex portion 5 p of the stay side via the buffer friction member 12 by the elastic force of the compression panel 11.
  • the cushioning friction member 12 is fixed to one of the protrusions 5p and the protrusions 6p with, for example, an adhesive or the like.
  • the vibration on the stay side elastic body 5e and the rotor side elastic body 6 Prevents mutual interference of vibrations on the e side to generate normal traveling waves for both, Avoid direct contact between each other (protrusions 5p, 6p) to prevent the generation of abnormal noise and further improve the durability of the press-contact part.
  • the cushioning friction member 12 may be configured so as not to be fixed to any of the convex portions 5p and 6p but to be interposed between the convex portions 5p and 6p.
  • a slip ring 13 composed of three rings 13a, 13b, and 13c, which cut off conduction from each other, is fixed to the upper portion of the rotating shaft 4. These brushes 13a, 13b, 13c are brought into contact with the brushes 15a, 15b, 15c, respectively, which are provided on the upper part of the fixing base 1 and are provided with brushes.
  • the energizing brushes 15a and 15b are a brush for supplying a sine wave signal, a brush for supplying a cos wave signal, and the energizing brush 13c is a brush for grounding.
  • the phase of one traveling wave is displaced from the other while the traveling waves of the stay-side elastic body 5 e and the rotor-side elastic body 6 e are combined. Then, the rotor-side elastic body 6 e and the rotating shaft 4 are rotated. The details are described below.
  • FIG. 2 is a plan view of one surface of the piezoelectric vibrator 5 V or 6 V described above.
  • the vibrators 5 V and 6 v are composed of an annular piezoelectric ceramic plate CM, and four sin-side electrode portions S 1 to S 4 and a cos-side electrode portion C 1 formed on one surface of the piezoelectric ceramic plate CM, respectively. ⁇ C4.
  • the sin-side electrode sections S1 to S4 and the cos-side electrode sections C1 to C4 have a mechanical angle of 36 ° so that the vibrator can generate standing waves of 5 wavelengths (5 mm) in the entire circumferential direction. Are evenly distributed.
  • the sin-side electrode portions S1 to S4 and the cos-side electrode portions C1 to C4 are preliminarily polarized so that the polarization directions in the thickness direction are opposite to each other (see +-in the drawing) in adjacent regions. ing.
  • FIG. 3 is a plan view of the other surface of the transducer 5 V or 6 V.
  • Annular piezoelectric ceramic On the other surface of the backing plate CM, there are provided a sin-side electrode portion SS on one side of the piezoelectric ceramic plate CM, which faces the entire formation region of the sin-side electrode portions S1 to S4, and a cos-side electrode portion C1 to A cos-side electrode portion CC is provided to face the entire formation region of C4.
  • the one surface of the stay-side vibrator 5 V is entirely bonded to the lower surface of the metal elastic body 5 e using an adhesive.
  • the metal elastic body 5 e is electrically connected to the fixing base 3 and has electrodes S 1 to S 4, FB, C 1 to 1 formed on one surface of the stay side vibrator 5 V. C4 is connected to ground.
  • the sine side electrode portion SS and the cos side electrode portion CC of the stay side oscillator 5 V are connected to the drive circuit 16.
  • the drive circuit 16 applies a sinusoidal voltage signal (sine wave voltage signal) between the ground and the sinusoidal electrode SS of the 5 V side oscillator 5 V, and applies a voltage between the ground and the cos side electrode CC.
  • a sinusoidal voltage signal (cos-wave voltage signal) having a phase difference of 90 ° with this is applied, and a traveling wave is generated in the circumferential direction of the stay side vibrator 5 V and the elastic body 5 e attached thereto. generate.
  • the driving circuit 16 receives a piezoelectric voltage signal generated between the feedback electrode sections FB and FB 'in response to the vibration of the transducer 5 V, and based on the inputted piezoelectric voltage signal, the driving side transducer Maintain a constant frequency and phase of the sinusoidal voltage signal supplied to 5 V.
  • the entire surface of the one side of the mouth-side vibrator 6 V is bonded to the upper surface of the metal elastic body 6 e using a bonding agent.
  • the metal elastic body 6 e is electrically connected to the fixing base 3 via the internal wiring 14 c, the ring 13 c, and the energizing brush 15 c which are electrically connected to the metal elastic body 6 e.
  • 6 electrode formed on one surface of the V S 1 ⁇ S 4, FB S C 1 ⁇ C4 is connected to ground.
  • the rotor side oscillator 6 V sin side electrode section SS is electrically connected to this It is connected to the drive circuit 16 via the internal wiring 14a, the ring 13a, and the energizing brush 15a.
  • the cos-side electrode section CC of the low-side vibrator 6 V is connected to the drive circuit 16 via the internal wiring 14 b, ring 13 b, and energizing brush 15 b that are electrically connected to it sequentially. Have been.
  • the drive circuit 16 applies a sinusoidal voltage signal (sinusoidal voltage signal) between the ground and the sinus-side electrode section SS of the rotor-side vibrator 6 V, and applies this between the ground and the cos-side electrode section CC.
  • a sinusoidal voltage signal (cos-wave voltage signal) having a phase difference of 90 ° and 90 ° is applied to generate a traveling wave in the circumferential direction of the rotor-side vibrator 6 V and the elastic body 6 e attached to the rotor 6 V.
  • the feedback piezoelectric voltage signal from the stay side vibrator 5 V is used to adjust the frequency and phase of the drive signal to the stay side vibrator 5 V to the rotor side vibrator 6 V.
  • the piezoelectric voltage signal generated between the feedback electrode sections FB and FB 'according to the vibration of the low-side vibrator 6 V can be used instead.
  • Figure 4 shows the circle of the stay / rotor contact area when such a traveling wave is generated. It is sectional drawing cut
  • Two-phase drive that supplies one phase of the two-phase drive signal (sine wave and cos wave) supplied from the drive circuit 16 to the stay side oscillator 5 V to the low side oscillator 6 V
  • the control circuit 17 controls the drive circuit 16 so as to match the phase of one of the signals so that no phase difference occurs in the drive signal between the stay and the mouth
  • the stay side elastic body 5 e The rotor 6 is stopped because the traveling wave A generated at the convex portion 5p of the rotor 6 and the traveling wave B generated at the convex portion 6p of the rotor-side elastic body 6e match and lock as if the gears meshed. Becomes
  • One of the phases of the two-phase drive signal supplied from the drive circuit 16 to the stay-side vibrator 5 V becomes one of the phases of the two-phase drive signal supplied to the mouth-side vibrator 6 V.
  • the control circuit 17 controls the drive circuit 16 so as to move forward, the traveling wave A of the stay-side vibrator 5 V of the traveling waves A and B, In order to move relatively forward with respect to the traveling wave B of V, the stationary lock position of the traveling waves A and B advances in the traveling direction of the traveling wave while the stay 6 is stationary, and the rotor 6 rotates forward. I do.
  • One of the phases of the two-phase drive signal supplied from the drive circuit 16 to the stay-side vibrator 5 V is one phase of the two-phase drive signal supplied to the rotor-side vibrator 6 V.
  • the control circuit 17 controls the drive circuit 16 so as to be relatively delayed, the traveling wave A of the staying-side vibrator 5 V of the traveling waves A and B, In order to relatively delay with respect to the traveling wave B of 6 V, the stationary lock position of the traveling waves A and B moves in the opposite direction to the traveling direction of the traveling wave with the stationary state. Rotor 6 reverses.
  • the rotation speed of the rotor 6 is increased or decreased.
  • FIG. 5 includes a drive circuit 16 connected to the stay 5 and the mouth 6, a control circuit 17 for controlling the drive circuit 16, and an input device 18 for inputting rotation position instruction information and the like.
  • FIG. 2 is a system configuration diagram of an electric control unit 2 as a control device.
  • the drive circuit 16 applies a drive voltage signal to the stay side vibrator 5 V to generate the traveling wave A on the opposite surface of the stay side elastic body 5 e, and outputs the drive voltage signal to the rotor side vibrator.
  • 6 V the traveling wave B is generated on the opposing surface of the row-side elastic body 6 e, and the rotor 6 is rotated by continuously expanding the phase difference between the two drive voltage signals. .
  • the drive circuit 16 generates a shift phase for generating a second drive signal whose phase is shifted by a predetermined phase shift amount per unit time with respect to the first drive signal applied to the stay side oscillator 5 V.
  • Oscillator section 16 A includes a frequency N ⁇ f (N is a natural number) voltage controlled oscillator (VC0) 16 A1 for outputting a signal, are cascade to the voltage controlled oscillator 16 A1, the frequency division ratio of the frequency N ⁇ f 1 It consists of a 1 / N divider 16 A2 that divides frequency by / N.
  • the frequency f is the natural frequency of the stay 5 in the circumferential direction, and is the frequency at which the stay 5 resonates most.
  • Signal of a frequency f output from the oscillator section 16 A is input to the drive signal generating unit 16 B.
  • Drive signal generating unit 16 B includes an amplifier 16 B1 for amplifying the sin wave voltage signal is applied between the sin side electrode portion SS and the ground stearyl Isseki side transducer 5 V, the phase of the sin wave voltage No. signal 90 ° phase shift circuit 16 B2 for generating c 0 s wave voltage signal Consisting amplifier 16 B3 Metropolitan applied to amplify the cos wave voltage signal output from the circuit 16 B2 between cos side electrode portion CC and ground stearyl Isseki side vibrator 5 v.
  • Phase difference monitoring unit 16 C is a phase comparator or phase detector and (PD) 16 C1, a low-pass fill evening 16 C2 in cascade in the phase ratio ⁇ 16 C1, a limiter circuit 16 C3, which is a pair of diodes
  • the phase comparator 16 C1 frequencies a feedback signal from the drive signal and the transducers 5 V of a frequency f is a voltage applied to the vibrator 5 v; feedback signal f 'is input. That is, the sinusoidal piezoelectric voltage signal of frequency f, which is a feedback signal output from the stage 5 in response to the vibration of the transducer 5 V, is converted into a square wave voltage signal of frequency f 'by the limiter circuit 16C3 .
  • the voltage controlled oscillator 16A1 varies the output frequency according to the input voltage.
  • the voltage-controlled oscillator 16A1 determines the output signal frequency N ⁇ f according to the phase difference between the frequency f, which is the reference signal, and the feedback signal f ,. If the feedback signal 'is delayed with respect to the reference signal f, the output signal frequency N ⁇ f is increased to increase the drive signal frequency f, and vice versa, the output signal frequency N ⁇ f is decreased.
  • Drive signal Lower the frequency f.
  • higher than the level of the reference value of the direct current voltage signal output from the pass filter 16 C2 in the former case and is set to a low Kunar so in the latter case.
  • the circuit 16 A 16 c constitute a phase-locked loop, input frequency: ff 'controls the output frequency N ⁇ f so as to have a predetermined phase difference, the drive signal frequency: Lock ⁇ beauty phase I do.
  • Phase shifted signal generator 1 6 D a high frequency pulse signal of a frequency N ⁇ f generated by the oscillator 16 A1 is input, the pulse number adjustment unit 16 adjusts the number of pulses per unit of input signal time m And a second frequency divider 16D2 that divides the signal output from the pulse number adjusting unit 16D1 and generates a square wave voltage signal having a period of every predetermined number of pulses (for example, 256 pulses).
  • the output of the 16 D2 is inputted to the drive signal generator 16 E via the Inba Isseki I.
  • the pulse number adjustment unit 16 D1 is a pulse thinning circuit 16 D11 that thins out an appropriate number of pulses from the input signal pulse train per unit time, and a pulse addition circuit that adds an appropriate number of pulses to the input signal pulse train per unit time 16 D12, and a selector circuit 16 m3 for selecting the output of the Luth thinning circuit 16 D11 and the pulse addition circuit 16 D12 .
  • Drive signal generating unit 1 6 E is - amplifies the sin wave voltage signal and the amplifier 16 E1 applied between cos side electrode portion CC and the ground of the rotor-side transducer 6 V, the phase of -sin wave voltage signal 90 ° Shift the phase shift circuit 16 E2 to generate a cos-wave voltage signal, and amplify the cos-wave voltage signal output from the phase shift circuit 16 E2 to a sinus-side electrode section SS of the rotor-side vibrator 6 V and ground. And an amplifier 16 E3 applied between them. When these sine-wave voltage signals and c0s-wave voltage signals were applied to the vibrator 6 V, the vibrator 6 V vibrated at approximately its natural frequency and was integrally attached to the vibrator 6 V.
  • the traveling wave B is generated in the elastic body 6 e.
  • one sin signal and —cos signal are input because the rotor has just 180 ° out of phase with the traveling wave generated on the stay. This is to generate the displacement and combine the peak and valley of the traveling wave.
  • Pulse number adjuster 16 When the number of pulses of the output signal of D1 increases or decreases due to thinning or addition of pulses, the rising or falling timing of the pulse signal output from the second frequency divider 16D2 changes, and the drive is performed. phase of the second drive signal is shifted relative to the phase of the first drive signal applied to the rotor side transducer 6 V via the signal generator 16 E. That is, the pulse rise or fall evening timing of the second driving signal is an amount corresponding output signal of the second frequency divider 16 D2 of the number of increased or decreased pulse by the pulse number adjustment unit 16 D1 is shifted, the first and A phase difference occurs between the second drive signals.
  • the pulse number adjusting unit 16 D1 continuously thins out or increases or decreases the number of additional pulses in time, the rising or falling timing of the second drive signal is continuously shifted, and the time between the first and second drive signals is changed.
  • the phase difference increases continuously, and the rotor 6 rotates continuously.
  • the phase shift amount instruction section 16 F the phase shift amount per unit time those have enough by the shift phase signal generating unit 16 D, i.e., instructs the pulse thinning or adding timing, controls the rotational speed of the low evening 6.
  • the phase shift amount instruction section 16 F includes an oscillator 16 A1 divider output signal (division ratio: 1 / N) 16 divider for low speed instruction output signal divided by e dividing (min Frequency ratio: 1 / nA) 16 F1 and frequency divider for dividing the output signal of frequency divider 1 for high-speed rotation (frequency division ratio: l / n B , where n A > n B ) 16 F2 When, and a selector circuit 16 F3 for outputting selection of the frequency divider 16 F1 and 16 F2.
  • Pulse thinning circuit 16 D11 and the pulse add circuit 16 D12 the more the period of the pulse signal inputted instruction from the phase shift amount instruction section 1 6 F is short, a phase shift amount per unit time of the output signal increases It is configured as follows.
  • the amount of phase shift is proportional to the rotation speed of the mouth 6.
  • Divider for low speed instruction (division ratio: output pulse signal of the l / nj 1 6 F1, because the period of their long, which is input to the pulse decimation circuit 1 6 D11 or pulse adding circuit 16 D12
  • the phase shift amount connexion rotor 6 of smaller per unit time is rolling slow times also dividers for high speed rotation instruction.: output Pal (dividing ratio l / n B) 1 6 F2 Since the pulse signal has a short period, when it is input to the pulse thinning circuit 16D11 or the pulse adding circuit 16D12 , the phase shift amount per unit time increases and the mouth 6 rotates at high speed.
  • the mouth rotation speed is controlled by switching the output of the selector circuit 16F3 by the control circuit 17.
  • Various configurations are being considered in the interpulse circumventive path 16 D11 and pulse adding circuit 16 D12 which operates in this way.
  • Figure 6 is a circuit diagram showing a preferred circuit configuration of the pulse thinning circuit 16 D11 and the pulse add circuit 16 D12, these circuits D- flip-flop D 1 to D 8 and various logic circuits OR L ⁇ OR3, AND1 to AND3, NAND1, XNOR1 to XNOR2 are connected as shown in the figure.
  • the pulse thinning circuit 16 D11 and a pulse adding circuit 1 6 D12 of the present embodiment by dividing the output pulse signal of the oscillator 16 A1 shown in FIG. 5 at a division ratio of 1/2, the divided pulse An appropriate number of pulses are decimated or added from the signal. Therefore, in the case of using the pulse decimation circuit 16 D11 and the pulse add circuit 16 D12 in this example, the division ratio of the subsequent stage of the frequency divider 16 D2 and 2 / N, results in the transducer 5 v, 6v The frequency of the drive signal applied to the power supply is made substantially equal.
  • 7A, 7B, 7C, 7D, 7E, 7F, and 7G are timing charts of voltage waveforms at points a to g of the circuit shown in FIG.
  • Pulse thinning circuit 1 6 D11 is configured to generate a reference pulse signal from a to the master pulse signal b outputted from the oscillator 1 6 A1, the speed instruction pulse signal c inputted from the phase shift Bok amount instruction section 16 F Generates a mask signal d that is L level for a predetermined period according to the cycle, and outputs a thinned pulse signal e with a reduced number of pulses per unit time by taking the logical product of the master pulse signal b and the mask signal d. I do.
  • Pulse Add circuit 16 D12 is configured to generate a mass evening pulse signal b from the reference pulse signal a, the mask made L level for a predetermined time period in accordance with the period of the speed instruction pulse signal c inputted from the phase shift amount instruction section 16 F Signal: f is generated, and the logical product of the mask signal f and the master signal b and the logical product of the negation of the mask signal f and the reference pulse signal a
  • the additional pulse signal g with the increased number of pulses per unit time is output by taking the logical sum of
  • the control circuit 17 inputs the H-level enable signal to the terminals X and Y when stopping the rotation of the mouth 6 and the pulse is applied to the pulse decimating circuit 16 D11 and the pulse adding circuit 16 D12 . Avoid thinning and adding.
  • the ultrasonic motor includes an input device 18 including a keyboard, a mouth encoder, and the like.
  • the input device 18 When the input device 18 is operated, the rotation speed instruction information and the rotation position instruction information are input to the control circuit 17.
  • the control circuit 17 adjusts the phase shift amount so that the rotor 6 rotates at the input rotation speed.
  • the rotational speed is changed in two stages, but may be a circuit configuration shown, when the rotational speed of multiple stages, different divider of dividing ratio which constitutes the phase shift amount instruction section 1 6 F Are connected in parallel in multiple stages, or the frequency division ratio of the frequency divider is made variable.
  • the period of the phase shift amount indicating pulse can take an arbitrary value, so that an arbitrary rotation speed can be set.
  • Phase shift amount indicating section 16 Another oscillator may be used.
  • the mask signal output from the pulse thinning circuit 16D11 and the pulse adding circuit 16D12 is input to the control circuit 17, and the control circuit 17 counts the number of pulses of the mask signal. That is, at this time, the control circuit 17 detects the total amount of phase shift of the drive signal.
  • the number k of pulses of the mask signal is proportional to the amount of movement of the rotor 6, that is, the rotation angle. When the number of pulses is k, it is assumed that row 6 rotates k ⁇ 0 degrees.
  • the rotation stop signal is The supply of the drive signal to the TV 5 may be stopped.
  • the input device 18 is formed of an optical rotary encoder that outputs a pulse signal in accordance with the rotation
  • the pulse signal corresponding to the rotation is input to the control circuit 17.
  • the control circuit 17 detects the rotational speed of the rotary encoder from the pulse interval of the pulse signal, detects the rotational position from the number of pulses of the pulse signal, and outputs the rotational speed instruction information and the rotational position instruction information. Accordingly, it functions in the same manner as when these pieces of information are input to the keyboard, rotates the mouth 6 at the indicated rotation speed, and stops the rotor 6 at the indicated rotation position.
  • the mouth encoder may be a resistance division type in which the output voltage signal changes according to the rotation.
  • the rotation speed instruction information can be detected from the rate of change of the output voltage signal
  • the rotation position instruction information can be detected from the level of the output voltage signal.
  • the present invention is not limited to the above-described embodiment, and in the ultrasonic motor according to the former embodiment, the divider 16 e is removed and the divider 16 A2 is replaced.
  • the output may be used.
  • 6 can be rotated.
  • FIG. 8 is a system configuration diagram of an electric control unit 2 including a drive circuit 16 and a control circuit 17 connected to a stay 5 and a rotor 6 of an ultrasonic motor according to another embodiment.
  • the control circuit 1 7, controllable oscillator such position phase shift to the phase shift amount instruction section 1 6 F consists, namely, providing the speed instruction information.
  • Phase shift amount indicator From 16 F Number of pulses per unit time of the outputted signal, the pulse decimation circuit 1 6 D "smell to determine the number of pulses to be thinned-out per unit time Te.
  • Frequency N ⁇ f from the voltage controlled oscillator 1 6 A1 A pulse signal is output
  • the pulse decimating circuit 16 D11 determines the number specified from the pulse signal of frequency N ⁇ f in accordance with the speed instruction information input from the phase shift amount instruction section 16 F.
  • the pulse decimating circuit 16 The decimated signal N ⁇ f "output from D11 or the non-decimated signal N ⁇ output from the voltage controlled oscillator 16 A1 is switched by the switching switch S. 1 or through the S 2 dividers 1 6 D2, 1 6 D2, are input to.
  • the switching switches S 1 and S 2 are controlled by the control circuit 17.
  • neither switch S l or S 2 is connected to the pulse skipping circuit 16 D11 .
  • the same phase signal can be applied to the mouth 6 and the station 5 .
  • non-thinning signal N ⁇ to dividers 1 6 D2 are input, so that the divider 1 6 D2 'to the thinning signal N ⁇ f "is inputted, the control circuit 17 is switch 31, S 2 is supplied to station 5 and row 6 Since the phase difference is generated in the driving signal, the rotor 6 rotates.
  • the control circuit 17 switches S 1 and S 2 so that the decimated signal N ⁇ f "is input to the frequency divider 16 D2 and the non-decimated signal N ⁇ f is input to the frequency divider 16 D2 ′.
  • S2 is controlled, a phase difference occurs in the drive signal supplied to the stay 5 and the drive 6 in the opposite direction, and the rotor 6 rotates in the opposite direction.
  • the ultrasonic motor according to the present embodiment includes an input device 18 including a keyboard, a rotary encoder, and the like, similarly to the ultrasonic motor according to the above-described embodiment.
  • the input device 18 When the input device 18 is operated, the rotation speed instruction information and the rotation position instruction information are input to the control circuit 17.
  • the control circuit 17 shifts the phase so that the rotation 6 rotates at the input rotation speed. controlling the amount instruction section 1 6 F.
  • the mask signal output from the pulse thinning circuit 16 D11 is input to the control circuit 17, and the control circuit 17 counts the number of pulses of the mask signal.
  • a signal that is, a signal for switching the switch S1 or S2 is output to the pulse thinning circuit 16 D11 , and the rotor 6 is stopped.
  • the rotation stop signal may be a signal for stopping the supply of the drive signal to the rotor 6 and the stay 5. The same applies to the case where the input device 18 is formed of a mouth encoder.
  • the shift phase signal generation unit 16 D ′ is configured without using the pulse addition circuit, and the pulse thinning circuit 16 G It constitutes a number adjusting unit.
  • the circuit scale is reduced by not using a pulse addition circuit.
  • Other circuit operations are the same as those of the above-described embodiment. Therefore, the description is omitted here.
  • a reference signal generation circuit that adjusts the phase and level of the output signal as necessary may be provided between the input of the phase detector 16C1 and the output of the frequency divider 16D2 '.
  • the resonance drive frequency of the row 6 and the step 5 is 50 kHz.
  • the oscillation frequency N'f of the signal output from VCO 16 A1 is 12.8 kHz. This oscillation frequency is related to the minimum resolution of rotation.However, if the frequency is increased too much, the analog PLL cannot support it, and the number of frequency divider stages increases and the circuit scale becomes larger, so that the oscillation frequency is set to 12.8 MHz. .
  • the PLL used was 74HC4046. Of course, the output frequency can be further increased by using a digital PLL or the like.
  • the ultrasonic motor according to the present embodiment has such high-precision rotation control performance
  • the ultrasonic motor according to the present invention is restricted by the accuracy of the ultrasonic motor according to the present embodiment. Not something.
  • this resolution is higher when the output frequency of VCO is This can be further improved, for example, when the polarization pattern of the piezoelectric element is set so that a wave of more than ⁇ can be generated on the circumference of the night 5.
  • the minimum resolution of this mode does not depend on the resonance frequency of the rotor stage, the resolution does not fluctuate even if the resonance drive frequency fluctuates due to disturbance such as temperature fluctuation.
  • the SPEED signal generates a two-step phase delay in one cycle compared to the circuit in FIG.
  • the rotor 6 rotates at one rotation per second, that is, at a rotation speed of 60 rpm. Assuming that the output of the variable oscillator is 1 Hz, the rotor 6 makes one rotation in about 10 minutes.
  • the control device for the ultrasonic motor includes a vibrator 5 V, 6 V provided on the stator 5 and the mover 6 facing each other.
  • An ultrasonic motor control device in which one drive signal is applied and the other is applied with a second drive signal to vibrate the vibrators 5v and 6v, and the mover moves according to the vibrations of the vibrators 5v and 6v. in, the when the phase shifted signal generating unit 1 6 F for relatively shifting a phase of the second drive signal to the phase of the first drive signal, the total phase shift amount becomes the desired value 1 and a control circuit 1 7 to stop shift in phase due to the application or phase shifted signal generator 1 6 F of the second drive signal.
  • the pulse signal is converted to a direct current through an integrator, and the rotor is adjusted to the level of the direct current signal. It is also possible to perform stop control.
  • the above-described control is performed by measuring the time elapsed with the phase shift. May be performed.
  • the control of the movement amount of the mouth 6 is performed by shifting the phase. This includes control to apply the first and second drive signals or stop the phase shift by the shift phase signal generation unit when the total amount of the shift amount reaches a desired value. If the amount of movement is in accordance with the amount of phase shift, not only the stop control in the above case, but also a delay in the stop time of the mover 6 in consideration of a signal delay or the like, and anticipation control may be performed.
  • the shift phase signal generating unit shifts the phase of the second drive signal relative to the phase of the first drive signal to generate the traveling wave.
  • the moving position is moved to move the mover, and the move amount of the mover is controlled according to the phase shift amount, so the move speed, move amount, and move position of the mover can be freely and extremely accurately controlled. It becomes possible.
  • FIG. 9 is a configuration diagram showing an ultrasonic motor according to still another embodiment.
  • This ultrasonic motor includes an ultrasonic motor main body 101 composed of a mechanical drive mechanism, and a control device 102 that controls the driving of the ultrasonic motor main body 101.
  • the ultrasonic motor main body 101 includes a cylindrical housing 103 constituting a side wall, and a circular lid member 103 hermetically sealing an upper end and a lower end opening of the housing 103S. L, and a rotating shaft 104 that penetrates both central openings of the lid members 103U and 103L, and the rotating shaft 104 is controlled by a control signal from the control device 102. Rotate around an axis.
  • FIG. 10 is a longitudinal sectional view of the ultrasonic motor main body 101 obtained by cutting the ultrasonic motor main body 101 along a plane passing through the center of its axis.
  • the annular annular stay 105 and the rotor 106 are arranged so as to be coaxial with the rotation axis 104. ing.
  • the stay 105 is fixed to the lower lid member 103 by bolts 100 B inserted through the outer surface of the lower lid member 103 L. 6 is fixed to a rotating shaft 104 via a substantially annular pedestal 107 and a disc spring 108. Therefore, when the mouth 106 rotates relative to the stay 105, the rotating shaft 104 provided on the mouth 106 rotates downward.
  • the rotating shaft 104 is used for the inner race of the ball bearings 110 U, 109 L with the outer race fixed to the inner surface of the central opening of the lid member 103 U, 103 L. It is fixed and is rotatably supported by ball bearings 109 U and 109 L.
  • the stage 105 includes an annular oscillator 105 V made of a ceramic piezoelectric element, and an annular elastic body 105 made of a metal with the oscillator 105 V adhered to the outer peripheral portion of the back surface. e.
  • the thick inner peripheral portion 105i of the elastic body 105e is fixed to the lower lid member 103L by bolts 100B.
  • the annular intermediate portion 105 m between the outer peripheral portion 105 o and the inner peripheral portion 105 i is thin, and the intermediate portion 105 m facilitates vibration of the outer peripheral portion 105 o. And transmission of vibration between the inner peripheral portion 105 i and the outer peripheral portion 105 o is suppressed.
  • the rotor 106 has the same structure as the stay 105, and has an annular vibrator 106 V made of a ceramic piezoelectric element and a vibrator 106 V adhered to the outer peripheral portion of the upper surface.
  • An annular elastic body 106 e made of metal is provided.
  • the thick inner peripheral portion 106 i of the elastic body 106 e is fixed to the rotating shaft 104 as described above, and the elastic body 106 e has the outer peripheral portion 106 o and the inner peripheral portion 106 i.
  • an annular thin intermediate portion 106 m When the first and second drive signals as control signals are applied to the respective oscillators 105 v and 106 v from the control device 102 shown in FIG.
  • a surface is formed on the facing surface of the rotor 5 and the rotor 106 by ultrasonic waves.
  • a phase difference is given between the respective drive signals in a state where these ultrasonic surfaces are babbling, one of the ultrasonic surfaces rotates relative to the other. Rotates relative to the stage.
  • the pedestal 107, to which the rotor 106 is fixed, is fixed by a counter panel 1 ⁇ 8, the inner edge of which is fixed to the rotating shaft 104, so that the ultrasonic surfaces are joined by a predetermined urging force. Mouth-Energized to the side of 106, the opposing surface of rotor 106 is pressed against the opposing surface of stay 105.
  • the side elastic body 105 e has a narrow annular convex part 105 ⁇ on the outer peripheral part 105 ⁇ on the upper surface, and the mouth elastic body 106 e has a narrow annular convex part 106 p on the outer peripheral part 106 o on the back surface.
  • the friction buffering member 110 is an annular sheet made of a resin material or the like, prevents mutual interference between the convex portions 105p and 106p, and normally generates a traveling wave as an ultrasonic wave surface for both. In addition, the direct contact between the metals is avoided to prevent the generation of abnormal noise, and the durability of the press contact portions 105p and 106p is further improved.
  • a space with a thickness of several mm is formed between the inner circumference 105i and the middle 105m of the stay and the inner circumference 106i and the middle 106m of the row.
  • a power supply mechanism 1 1 1 for supplying power to the side vibrator 106 V is arranged. Although a power supply mechanism using a rotary transformer or the like may be used as the power supply mechanism, it is assumed here that a brush and a slip ring are used for simplicity.
  • the power supply mechanism 111 is a brush formed by bending a part of three annular conductive rings arranged concentrically with respect to the rotating shaft 104 toward the mouth 5 side, respectively.
  • Slip ring 1 1 1 A concentrically arranged with respect to the rotating shaft 104 so that the tips of the brushes 1 1 1 a, 1 1 1 b, and 1 1 1 c are in contact with each other.
  • 1 1 1 B and 1 1 1 C The base ends of brushes 1 1 1a, 1 1b, and 1 1c are fixed to stay 105, and sleep rings 1 11 A, 1 1B, and 1 1C are fixed to mouth 106. Have been.
  • the vibrators 105 v and 106 v connected to these conductive wires move by ultrasonic vibration on the opposing surfaces of the elastic bodies 105 e and 106 e by applying drive signals each including a sin wave component and a cos wave component.
  • the wave that is, the ultrasonic wave surface is formed.
  • the oscillators 105 v and 106 V and the elastic bodies 105 e and 106 e will be described in detail.
  • FIG. 11 is a partially exploded perspective view showing a main part of the ultrasonic motor main body 101.
  • the annular stay-side vibrator 105 V is composed of an annular piezoelectric ceramic plate CM, four sin-side electrodes S1 to S4 formed on one side of the piezoelectric ceramic plate CM, and four cos sides.
  • An electrode group including electrodes C1 to C4 and one feedback electrode FB.
  • the sin-side electrodes S 1 to S 4 and c 0 s-side electrodes C 1 to C 4 have a mechanical angle such that the oscillator 105 V can generate a standing wave of 5 wavelengths (5 persons) in the entire circumferential direction. At 36 ° (E / 2).
  • FIG. 1 is a partially exploded perspective view showing a main part of the ultrasonic motor main body 101.
  • the annular stay-side vibrator 105 V is composed of an annular piezoelectric ceramic plate CM, four sin-side electrodes S1 to S4 formed on one side of the pie
  • FIG. 12 shows the stay 105 and the mouth 106 when a standing wave of five wavelengths (indicated by a two-dot chain line) is generated.
  • the standing wave indicated by the two-dot chain line indicates an amplitude in the radial direction.
  • the circumferential amplitude generated by the s in side electrode is shown in the radial direction.
  • the arc part bulging outside the circumference indicated by the two-dot chain line indicates an upward bulge (mountain), and the arc part entering the inside of the circumference indicates a subsidence (valley) downward.
  • the feedback electrode FB is located between the sin-side electrode S1 and the cos-side electrode C1, has a circumferential length of 18 ° (person / 4) in mechanical angle, and this portion of the ceramic plate CM has a thickness. Polarized in the direction.
  • the sin side electrode S 4 and the cos side electrode C 4 are separated by 54 ° (3/4) in mechanical angle.
  • the sin-side electrodes S1 to S4 and the cos-side electrodes C1 to C4 of the ceramic plate CM are polarized so that the polarization directions in the thickness direction are opposite to each other in the adjacent areas (see +-in the figure). Is being processed.
  • the annular piezoelectric ceramic plate CM On the other surface of the annular piezoelectric ceramic plate CM, there are a sin-side electrode SS facing the entire formation area of the sin-side electrodes S1 to S4 on one surface of the piezoelectric ceramic plate CM, and a cos-side electrode C1 to The cos side electrode CC facing the entire formation area of C4 A feedback electrode FB ′ is formed opposite to the feedback electrode FB.
  • the structure of the rotor-side vibrator 106 V is the same as the structure of the stay-side vibrator 105 V, and a description thereof will be omitted.
  • Each of the vibrators 105 v and 106 V has one surface, that is, the surface on which the sin-side electrodes S 1 to S 4, the cos-side electrodes C 1 to C 4, and the feedback electrode FB are formed.
  • e is attached to the elastic members 105 e and 106 e via a conductive or electrically conductive thin insulating adhesive so as to be in contact with the surface opposite to the opposing surface of e.
  • 106 V ultrasonic vibration can be directly transmitted to the elastic bodies 105 e, 106 e.
  • the elastic bodies 105 e and 106 e are connected to the ground, so that the respective sin-side electrodes S 1 to S 4, the cos-side electrodes C 1 to C 4 and the feedback electrode FB are connected to the elastic body 105 e , 106 e connected to ground.
  • a two-phase drive signal having a 90 ° phase difference is applied so that each of the oscillators 105 v and 106 V generates a traveling wave.
  • a drive consisting of a two-phase sinusoidal voltage signal (sine wave and cos wave) with a 90 ° phase difference between the sinus side electrode SS and the cos side electrode CC of the 105 V oscillator 105 V
  • a traveling wave traveling in the circumferential direction of the oscillator 105 V is generated in the oscillator 105 V.
  • the principle of traveling wave generation of the 106 V rotor-side vibrator is the same.
  • the oscillators 105 V and 106 V are attached to the elastic bodies 105 e and 106 e, the ultrasonic vibration is directly transmitted to the elastic bodies 105 e and 106 e, and the elastic bodies 105 e and 106 e A traveling wave by an ultrasonic wave, that is, an ultrasonic wave surface is formed on the opposing surface of e.
  • the power supply to these vibrators 105 V and 106 V is performed via the conductive wires.
  • the stator side oscillator 105 V sin side electrode SS and cos side electrode CC The drive signal is supplied from the control device 102 described above, and the vibrator 105 V vibrates according to the supply.
  • the piezoelectric voltage signal output from the feedback electrode FB ′ in response to the vibration is input to the control device 102.
  • the control device 102 changes the oscillation frequency based on the input piezoelectric voltage signal so that the phase difference between this signal and the reference signal generated in the control device 102 becomes constant, Controls the drive signal supplied to the child 105v.
  • the drive signal is supplied to the sin-side electrode SS and the cos-side electrode CC of the rotor-side vibrator 106 V from the control device 102 via the brushes 11 a and 11 b.
  • Vibrator 106 V vibrates.
  • the piezoelectric voltage signal output from the feed knock electrode FB, in response to this vibration is input to the control device 102 via the brush 11 lc.
  • This piezoelectric voltage signal can be used for maintaining the frequency difference and phase difference of the vibration in the same manner as described above.
  • FIG. 13A and 13B are cross-sectional views taken along the circumferential direction of the stay / mouth / mouth contact area when traveling waves are generated on the opposing surfaces of the elastic bodies 105 e and 106 e. It is.
  • FIG. 13A shows a state in which the valley (crest) of row 106 is located above the position of the hill (valley) in step 105
  • FIG. 13B shows a state in which a position (phase) shift has occurred.
  • the convex portion 105p and the mouth of the stay side elastic body 105e respond to the ultrasonic vibration of the vibrators 105v and 106V.
  • Traveling waves A and B are generated at the convex portion 106p of the evening elastic body 106e.
  • the traveling waves A and B respectively constitute a pupil plane by ultrasonic waves, and these ultrasonic planes A and B combine.
  • the mouth 106 Since the ultrasonic surface A generated at p and the ultrasonic surface B generated at the convex portion 106p of the mouth-side elastic body 106e advance at the same speed, the mouth 106 is stopped. On the other hand, when a phase difference is given to the drive signals supplied to the transducers 105 v and 106 v from the above-described controller 102, one of the ultrasonic babies A and B that had been babbling together was obtained. However, because of the relative advance with respect to the other direction, the engagement lock positions of the ultrasonic surfaces A and B move in the traveling direction of the traveling wave while the stage is stationary, and the rotor 106 Turn forward.
  • one of the ultrasonic planes A and B is relatively delayed with respect to the other.
  • the engagement lock position of the surfaces A and B advances in the direction opposite to the traveling direction of the traveling wave, and the rotor 106 reverses. Further, when the shift amount of the phase per unit time is increased or decreased, the rotation speed of the rotor 106 increases or decreases.
  • a value corresponding to a relative position between the stay 105 and the rotor 106 is stored in advance, and a value corresponding to the stored value is stored.
  • the application start time of the first and second drive signals to the oscillators 105 V and 106 V is adjusted. That is, according to the present driving method, by applying the first and second drive signals to the vibrator, the ultrasonic wave is applied to the surfaces A and A on the facing surfaces of both the step 105 and the mouth 106 by ultrasonic waves.
  • FIG. 14 is a system configuration diagram of the control device 102 connected to the stay 105 and the rotor 106. First, a configuration in which the mouth 106 is rotated in a desired direction at a desired speed will be described.
  • the control device 1 ⁇ 2 outputs a sinusoidal piezoelectric voltage signal that is fed back from the feedback electrode FB ′ in response to the oscillation of the oscillator 105 V into a square wave, and a limiter circuit 102a.
  • a phase comparator or phase detector (PD) 102b that compares the phase difference between the square wave voltage signal and the drive signal of the square wave applied to the oscillator 105V, and the amount of phase shift between them, that is, the duty between the square waves
  • a single pass filter (LPF) 102c that smoothes the square wave signal output from the phase detector 102b according to the ratio, and an output according to the level of the DC voltage signal output from the single pass filter 102c It has a frequency controlled voltage controlled oscillator (VCO) 102d, which constitutes a phase locked loop (PLL). That is, the phase locked loop controls the phase of the drive signal so that the frequency difference and the phase difference between the drive signal and the sinusoidal piezoelectric voltage signal do not increase.
  • VCO
  • the output signal (master clock signal) from the voltage controlled oscillator 102d is divided into two, and the divided master clock signal is divided and divided by the dividers 102e and 102f, respectively.
  • the respective signals are passed through oscillators 105v and 106v via a drive signal generation circuit composed of a phase shift circuit 102g, 102h for providing a 90-degree phase difference and amplifiers 102i, 102j, 102k, 1021 respectively.
  • the sinusoidal voltage signal obtained by dividing the master clock signal is applied to the electrodes SS of the oscillator 105 V and the 106 v of the oscillator 105 of the stay 105 and the rotor 106, and the electrode CC has a 90 ° phase difference with respect to this.
  • a cos-wave voltage signal is applied, and the ultrasonic waves travel along the circumferential direction on the opposing surfaces of the oscillators 105 V and 106 V and the elastic bodies 105 e and 106 e according to the application. Waves are generated.
  • one of the mass clock signals after the branch is divided by a clock shift circuit 102 m per unit time. The number of pulses is adjustable.
  • FIG. 15 is a circuit diagram showing a configuration of the clock shift circuit 102m of the present example.
  • This clock shift circuit 102 m is formed by connecting logic circuits composed of D flip-flops D 1, D 2, XNOR 1, and AND 1 as shown in the figure.
  • FIG. 16A shows the master clock signal of the clock shift circuit 102 m in this example.
  • FIG. 16B is a timing chart showing a rotation speed instruction signal
  • FIG. 16D is a timing chart showing a mask signal and a thinned pulse signal.
  • the clock shift circuit 102m generates a mask signal (FIG. 16C) in synchronization with the rising and falling timing of the pulse of the rotation speed instruction signal (FIG. 16C) input from the variable frequency divider 102n.
  • a predetermined number of pulses are culled from the master clock signal (Fig. 16A), and a decimated pulse signal (Fig. 16D) with a reduced number of pulses per unit time is output.
  • the variable frequency divider 102 n divides the master clock signal (FIG. 16A) to generate a rotation speed instruction signal.
  • the number of pulses per unit time of the rotation speed instruction signal from the variable frequency divider 102 n is proportional to the frequency, if this frequency is increased, that is, the frequency division ratio of the variable frequency divider 102 n is reduced. If, for example, the amount of the phase shift per unit time increases, the rotation speed of the mouth 106 increases, and if it decreases, the rotation speed of the mouth 106 decreases.
  • the control device 102 includes a control circuit 102p that performs at least the rotor rotation control.
  • the control circuit 102p is composed of a central processing unit (CPU), etc., and controls the frequency division ratio of the variable frequency divider 102n for performing the above-mentioned rotation speed control. It outputs a rotation direction instruction signal (shown as forward / reverse in Fig. 14) and a rotor stop instruction signal (shown as STOP in Fig. 14).
  • the rotor 106 rotates, and when no phase difference is given, the rotor 106 stops.
  • the output switching circuit 102 ⁇ based on an instruction signal from the control circuit 102 ⁇ , generates a frequency divider 100 2 e, Select the signal to be input to 10 2 f.
  • the output switching circuit 102 ⁇ inputs the master clock signal to the frequency divider 102 e on the station side and divides the frequency on the row side. Input the thinned pulse signal to the unit 102 f.
  • the rotor rotation direction instruction signal input from the control circuit 102 p to the output switching circuit 102 o is set to the rotor reverse rotation (the signal at this time).
  • State is set to F (forward rotation)), and the rotor stop instruction signal does not instruct to stop the mouth overnight (F (stop)).
  • the output switching circuit 102o inputs the pulse signal to the frequency divider 102e on the station side, Input the master clock signal to frequency divider 102 f.
  • the rotor stop instruction signal input from the control circuit 102 p to the output switching circuit 102 o indicates the rotor stop (at this time, Signal state is T (stop).)
  • the output switching circuit 102 ⁇ inputs the master clock signal to both the frequency dividers 102 e and 102 f. .
  • the position 102 stores a value corresponding to the relative position between the stay 105 and the rotor 106, and the first and the second to the oscillators 105V and 106V according to the stored value.
  • the initial movement of the rotor 106 when the power is turned on is suppressed by adjusting the application start time of the second drive signal.
  • This stored value may be an output signal from a detector that detects a relative position between the stay 105 and the mouth 106, but here, a detector as a separate component is used. Instead, a stored value corresponding to the relative position is obtained from the phase difference between the drive signals, thereby reducing the number of parts and thereby reducing the size of the ultrasonic motor itself.
  • the phase difference between the first and second drive signals is used as the stored value.
  • the stored values indicate the relative positions of the ultrasonic planes of the stay 105 and the rotor 106 within a predetermined wavelength.
  • the control circuit 102 p When the power of this ultrasonic motor is turned on, the control circuit 102 p outputs a power-on signal (indicated by POWER in FIG. 14) and outputs a power supply signal from the voltage-controlled oscillator 102 d. Controls the output prohibition circuit 1 0 2 q that prohibits the supply of the clock signal, the clock shift circuit 10 2 m, the variable frequency divider 10 2 n, the output switching circuit 10 2 o, and the subtraction counter 10 0 2 Stop supplying the master clock signal to r.
  • control circuit 102 p accesses a nonvolatile memory 102 s such as an E 2 PROM in which the relative position information between the station 105 and the mouth 106 is stored as a storage value. This stored value is input to the UP / DOWN ring counter 102 t and the subtraction counter 102 r.
  • a nonvolatile memory 102 s such as an E 2 PROM in which the relative position information between the station 105 and the mouth 106 is stored as a storage value.
  • This stored value is input to the UP / DOWN ring counter 102 t and the subtraction counter 102 r.
  • the control circuit 102p controls the output prohibition circuit 102q, the clock shift circuit 102m, the variable frequency divider 102n, the output switching circuit 102o, and the subtraction counter.
  • the supply of the master clock signal to 102r is started. It is assumed that a rotation stop signal in a state T (stop) for instructing stop of the rotor 106 is input to the output switching circuit 102 o.
  • the master clock signal is input to both frequency dividers 102 e and 102 f, and the oscillator 1 5 5 V and 106 v are output after 2-3 msec.
  • the motion rises, and an ultrasonic wave surface is formed on the surfaces of both elastic bodies 105 e and 106 e.
  • relative position information between the stay 105 and the rotor 106 is stored in advance as a stored value.
  • the supply start time of one master clock signal (drive signal) is set relatively to the supply start time of the other master clock signal (drive signal) by the amount of deviation of the relative position.
  • the ultrasonic wave surface is formed in accordance with the relative displacement amount, and the initial movement of the rotor 106 can be suppressed.
  • the position of the valley of the drive signal of the rotor 106 reaches the peak position of the drive signal at the moment when the drive signal is supplied to the station 105.
  • the displacement of the ultrasonic screen is eliminated.
  • the ultrasonic wave surface is formed 2-3 msec after the start of the drive signal supply, if the time to shift the drive signal supply start time is less than this time, the ultrasonic wave is generated before the initial movement occurs. ⁇
  • the surface can be formed in accordance with the relative displacement.
  • the difference in the supply start time of the drive signal is assumed to be on the order of several hundreds // sec at the maximum.
  • the drive frequency is set to 50 kHz and the maximum is 20 ⁇ sec, that is, 1 It is assumed to be the time of the wavelength minutes.
  • the drive signal supply start time is set to a certain period after the start of supply of one master clock signal, that is, the master clock signal supplied to the frequency divider 102 f, while the other master clock signal, that is, the frequency divider 10 2 Supply of master clock signal supplied to e Is adjusted by stopping by the output inhibit circuit 102 u.
  • This fixed period is proportional to the stored value, that is, the relative position between the stay 105 and the rotor 106.
  • the stored value that is, the relative position between the stay 105 and the rotor 106 is input to the UP / DOWN ring counter 102 t and the subtraction counter 102 r.
  • the output prohibition circuit 102 u stops supplying the master clock signal to the frequency divider 102 e until the output prohibition cancellation instruction is issued from the subtraction counter 102 r.
  • the decrement counter 102r issues an instruction to release the output inhibition to the output inhibit circuit 102u, and the master clock signal is supplied to the frequency divider 102e. Be started.
  • the master clock is calculated from the number (stored value) indicating the relative position input to the subtraction counter 102r. This is the period until the number of pulses of the signal is subtracted and the subtracted number becomes 0.
  • detection of a value (measured value) to be stored in the memory 102 s as a stored value corresponding to the relative position will be described.
  • the measured value is proportional to the phase difference between the drive signals.
  • the phase difference between the drive signals within the electrical angle of 360 ° is proportional to the relative position within one wavelength of the mechanical vibration between the stay 105 and the mouth 106. Therefore, the measured value is proportional to the relative position between the stator 105 and the rotor 106. Therefore, in this example, the measured value as the relative position is detected by measuring the phase difference between the drive signals.
  • the phase difference between the drive signals is proportional to the relative position when the rotation is started from a state where the ultrasonic surfaces of both the stay 105 and the rotor 106 are combined.
  • the stored phase difference and the relative position are not proportional, and the head swings.
  • the ultrasonic plane is combined, and the phase difference and the relative position are proportional.
  • the phase difference between the signals is shifted by two steps, the phase difference between the drive signals is proportional to the integrated value of the number of pulses of the rotation speed instruction signal. Therefore, the measured value can also be obtained by counting the number of pulses of the rotation speed instruction signal, but here, the output from the clock shift circuit 102 m is in proportion to the number of pulses. Measure the number of pulses of the mask signal (see Fig. 15 and Fig. 16 to Fig. 16D) with the UP / DO WN ring counter 102t to detect the measured value.
  • the UP / DO WN ring counter 102 t outputs the rotor stop instruction signal (ST ⁇ P) in state F (stop) and the rotor rotation direction in state T (forward) to the output switching circuit 102 o.
  • ST ⁇ P rotor stop instruction signal
  • T forward
  • the pulse number of the input mask signal is added (counted up), and the rotor rotation direction instruction signal in state F (forward) is input.
  • the number of pulses is subtracted (counted down), and a phase difference between the drive signals, that is, a measured value corresponding to the relative position is detected.
  • the rotor stop instruction signal and the rotation direction instruction signal output from the control circuit 102 p are also input to the UP / DO WN ring counter 102 t, and the UP / DO WN ring counter 102t performs the above-described counting operation according to the input signal.
  • One pulse from the master clock signal is thinned out per one pulse of the mask signal.
  • the phase of the drive signal is shifted by one pulse of the master clock signal, and the rotor 106 rotates one step. I do. The rotation angle of one step will be described later.
  • the drive signal of the same phase is supplied to the stay 105 and the rotor 106, so the mouth 106 does not rotate.
  • a traveling wave as an ultrasonic wave surface traveling in the same direction and at the same speed is formed.
  • the UP / DOWN ring counter 102 t does not count the number of pulses, but the UP / DOWN ring counter 102 t
  • a power-on signal (POWER) is input from the control circuit 102p to the subtraction counter 102r and the UP / DOWN ring counter 102t and the subtraction counter 102r are in an activated state.
  • the UP / D OWN ring counter 102t retains the stored value corresponding to the current relative position between the stage and the rotor, and the control is performed when the rotation of the rotor 106 is started again.
  • the rotation stop instruction signal and the rotation direction instruction signal in the state F (stop) from the circuit 102p are input to the output switching circuit 102o, and the counting operation is performed following the UP / DOWN ring counter 102t.
  • the control circuit 102p When the ultrasonic motor is turned on again after the power is turned off, as described above, the control circuit 102p outputs a power-on signal (indicated by POWER) and is output from the voltage control oscillator 102d. Controls the output prohibition circuit 102 q that prohibits the supply of the master clock signal, and sets the master clock to the clock shift circuit 102 m, variable frequency divider 102 n, output switching circuit 102 o, and subtraction counter 102 r. The supply of the signal is stopped. Subsequently, the memory 102 s storing the stored value is accessed, and the stored value is stored. Input to UP / D OWN ring counter 102 t and subtraction counter 102 r.
  • POWER power-on signal
  • the UP / DO WN ring counter 102 t retains the current value before the power is turned off. Even when the next low speed rotation is stopped, the current number of rotor rotation steps Then, the value obtained by adding the number of mouth rotation steps up to the previous time, that is, the phase difference between the drive signals is detected as a measured value. More specifically, the drive signal is shifted in supply start time by the subtraction counter 102 r so that the drive signal can be shifted by the amount of the physical phase difference between step 105 and rotor 106 before turning off the power.
  • the phase difference that occurred at this time is added to the phase difference newly generated by the time of the stop, so that the physics of the stay 105 and rotor 106 vibrations at the second stop
  • the phase difference (relative position) matches the phase difference between the drive signals.
  • the measured value is stored in the memory 102 s as a stored value. Since the ring counter is 256 counts / 1 wavelength, the measured value does not exceed 255. The count of 256 means that it matches the next wave.
  • the rotor stop instruction signal is obtained by counting the number of pulses of the mask signal, that is, the number of rotation steps of the mouth in the control circuit 102p, and obtaining the desired value. Output when the target rotation angle is reached.
  • what is counted is the number of pulses of the mask signal when the mouth is rotating. What counts during the phase difference adjustment described above is the number of pulses of the master clock signal.
  • FIG. 17 shows the system of another control device 102 connected to the stator 105 and the rotor 106. It is a block diagram. Compared to the control device shown in Fig. 14, the control device 102 switches the output destination of the mask signal according to the forward / reverse rotation instead of the UP / D OWN ring count 102t.
  • Non-volatile memory storage device 1 0 2 1 0 2 s 2 that stores the measured value of 2 t 2 is provided, and a subtraction counter that reads each stored value when the power is turned on 1 0 2 r ⁇ , 10 2 r 2 to provide the stored value, And controls the output disable circuit 102 102u 2 for outputting prohibition of the master clock signal after the branch (driving Doshingo) in accordance with the relative position between the evening 105 / rotor 106, that adjusts the driving signal supply start time is different .
  • the control circuit 102 p timer 102 q predetermined time to stop the output of the mass evening clock signal from the control to the voltage controlled oscillator 102 d and during this time the ring counter evening 102 102 t 2 and the subtraction counter evening 102
  • the stored value stored in the storage device 102 102 s 2 is input to 102 r 2 .
  • the memorized values indicate the number of rotation steps of the mouth 106 in the positive direction and the number of rotation steps of the rotor 106 in the negative direction, and the difference between these stored values is the relative position between the rotor and the stay. That is, it indicates the phase difference between the drive signals.
  • the master clock signal to the clock shift circuit 102 m, the variable frequency divider 102 n, the output switching circuit 102 o, and the subtraction counter 102 r 102 r 2 Is started, and after 2-3 ms ec, an ultrasonic wave surface is formed on the surface of the elastic bodies 105 e and 106 e.
  • the output switching circuit 102o is supplied with a row stop instruction signal in a state T (stop) for instructing the stop of the mouth 106, and thereafter, when rotating, the rotor stop instruction signal is output.
  • the status is F (stop).
  • the control circuit 102p When the control circuit 102p outputs the rotation direction instruction signal in the state T (forward rotation), —Even as the evening 106 rotates forward, the mask signal is input to the forward rotation detection ring counter 1021 ⁇ via the switch 102t, and the number of pulses of the mask signal, that is, the number of rotation steps in the forward direction of the rotor, is measured as a measured value. This measurement value is counted in the forward direction in synchronization with the input of the output switching circuit 102 o, switch 102 t ′, and storage device 102 102 s 2 of the row stop instruction signal (STOP) in the state T (stop). Is stored in the storage device 102 Sl as a storage value indicating the number of rotation steps of.
  • STOP row stop instruction signal
  • the control circuit 102p When the control circuit 102p outputs the rotation direction indication signal in the state F (forward rotation), the mouth 106 rotates in the reverse direction, and the mask signal is transmitted through the switch 102t 'to the reverse rotation detection ring counter 102t.
  • the number of pulses of the mask signal that is, the number of rotation steps in the negative direction of the rotor, is counted as a measurement value, and the output switching circuit 102o of the rotor stop instruction signal in the state T (stop), the switch 102t ', and the storage
  • this measured value is stored in the storage device 102 s 2 as a stored value indicating the number of rotation steps in the negative direction.
  • the difference between these stored values indicates the relative position between the stay 105 and the rotor 106, that is, the phase difference between the drive signals.
  • the other configuration is the same as that of the control device 102 shown in FIG. 14, and the description is omitted here.
  • the natural frequencies F of the mouth 106 and the stay 105 are respectively 50 kHz.
  • the oscillation frequency Nf of the signal output from the VCO 102 d is related to the minimum resolution of rotation. However, if this oscillation frequency is too high, the analog PLL cannot handle it. The frequency was increased and the circuit scale increased, so the frequency was set to 12.8 MHz. The PLL used was 74HC 4046. Of course, the output frequency can be further increased by using a digital PLL or the like.
  • the frequency dividers 102 e and 102 f are configured using a channel of 813: 11:
  • one wavelength (e) of the mechanical vibration of the step 105 and the rotor 106 generated by the one-wavelength drive signal corresponds to 256 pulses of the master clock signal.
  • the drive signal after frequency division is delayed by one pulse compared to the drive signal that is not thinned out.
  • one wavelength ( ⁇ ) of the mechanical vibration is composed of 256 pulses of the master clock signal, so that one pulse 105 or one of the surfaces of the rotor 106 is removed by thinning out one pulse.
  • the rotor 106 rotates one step, being delayed by X 1/256 with respect to the other.
  • This rotation angle is the minimum resolution of the present ultrasonic motor.
  • the rotational resolution d is further improved when the frequency division ratio N is increased, or when the number k of waves formed on the circumference of the mouth 106 and the station 105 is increased.
  • the minimum resolution of this motor does not depend on the resonance frequency of the rotor or the stay, the resolution does not change even if the resonance drive frequency fluctuates due to disturbances such as temperature fluctuations.
  • the rotation speed instruction signal generates a two-step phase delay in one cycle.
  • the rotator 106 rotates at one rotation per second, that is, at a rotation speed of 60 rpm. Also, assuming that the output of the variable frequency divider 102 n is 1 Hz, the rotor 106 makes one revolution in about 10 minutes.
  • a rotary motor having a movable element as a mouth is described.
  • the present invention is not limited to a rotary motor, and is applicable to a linear motor. . That is, when this ultrasonic motor is applied to a linear motor, it can be understood by reading “low” to “slider” and “rotation” to “movement”.
  • the control device for the ultrasonic motor includes the oscillators 105 V and 106 V provided on the stator 105 and the movable member 106 facing each other.
  • the first drive signal is applied to one side and the second drive signal is applied to the other side to vibrate the oscillators 105 V and 106 V, and move according to the vibrations of the oscillators 105 V and 106 V
  • An ultrasonic motor control device in which the element 106 moves, which stores a value corresponding to the relative position between the stator 105 and the element 106, and sends the value to the transducer according to the stored value.
  • the application of the first and second drive signals to the oscillators 105v and 106v forms a ⁇ plane by ultrasonic waves on the opposing surfaces of both the stator and the moving element.
  • the first and second driving to the oscillators 105 V and 106 V are performed according to the stored value.
  • Adjusting the signal application start time that is, preferably adjusting the application time so that the positions of the ridges and valleys of both ultrasonic wave surfaces coincide, the initial movement of the movable element 106 at power-on is reduced. Can be suppressed.
  • the stored value may be an output signal from a detector that detects a relative position between the stator 105 and the movable member 106, but the drive signal may be used without using a detector as a separate component. If a stored value corresponding to the relative position is obtained from the phase difference between the two, the number of parts can be reduced and the size of the ultrasonic motor itself can be reduced.
  • the stored value is preferably a phase difference between the first and second drive signals.
  • the stored value is an ultrasonic wave between the stator 105 and the mover 106. Shows a relative position within a predetermined wavelength.
  • the above stored value does not need to be the relative position itself between the stator 105 and the movable element 106, and if the initial movement of the movable element is consequently suppressed, the stored value is relative. It may be slightly shifted from the position. Even if the relative position at any time is stored, if the initial movement of the mover 106 is suppressed as a result, the amount of movement from this time to when the mover stops moving Are further stored, and finally, by adding these, a value corresponding to the relative position is obtained, or the application start time is adjusted in accordance with these values, thereby suppressing the initial movement of the movable element 106. You may do it.
  • the clock pulse signal (master clock signal) output from the same oscillation source 102 d is branched and divided by the frequency dividers 102 e and 102 f.
  • the relative timing between the first and second drive signals can be controlled with high precision, and the initial movement of the movable element 106 can be further suppressed. Can be.
  • each pulse signal is The first and second drive signals were generated by dividing the frequency by the frequency dividers 102 e and 102 f. In this case, a phase difference is generated between the first and second drive signals after the frequency division by the frequency dividers 102 e and 102 f by the adjusted number of pulses, and the mover 106 moves according to the phase difference. .
  • the number of pulses increased or reduced amount of, or the number of pulses proportional to the count in counter evening 102 t, 1021 13 1 02 t 2 as the phase difference. Since the mover 106 moves according to the phase difference, that is, the number of pulses, the relative position based on the movement can be accurately stored.
  • the storing is performed by storing the number of pulses counted in the counts 102 t, 102 t 15 and 102 t 2 in the nonvolatile memories 102 s and 102 s 102 s 2 .
  • the number of counted pulses is deleted from the counters 102 t and 1021 15 102 t 2.
  • the number of pulses stored in the nonvolatile memory 102 s, 102 s, or 102 s 2 was input to the counter. In this case, there is no need to supply power to the counters 102 t and 1021 15 102 t 2 , so that the power consumption can be further reduced.
  • the storage is performed when the time change rate of the phase difference between the first and second drive signals applied to the oscillators 105 V and 106 V becomes zero.
  • 106 V when the application of the first and second drive signals is stopped, that is, for example, when the power supply to the amplifiers 102 i to 1021 is stopped. At these times, the movement of the mover 106 stops. In such a case, the above phase Since the paired position is fixed without changing over time, if the above storage is performed at this time, the application start time can be easily adjusted according to the stored value.
  • This invention can be used for the control apparatus of the ultrasonic motor which can perform sufficient rotation control.

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

Selon l'invention, des premier et second signaux d'attaque sont appliqués à des vibreurs (5v, 6v), afin de changer les surfaces opposées les unes aux autres du stator et du dispositif d'entraînement et de faire s'imbriquer ces surfaces les unes dans les autres, sous l'action de l'onde ultrasonore. Etant donné que des valeurs correspondant aux positions relatives du stator (5) et du dispositif d'entraînement (6) sont conservées, les minutages auxquels commence l'application des premier et second signaux d'attaque sont réglés de telle manière que les crêtes et les creux des surfaces couplées du stator (5) et du dispositif d'entraînement (6) s'imbriquent de manière exacte les unes dans les autres, supprimant ainsi le décalage initial du dispositif d'entraînement (6) lors du branchement de l'alimentation.
PCT/JP1999/000890 1998-02-27 1999-02-25 Dispositif de commande de moteur ultrasonique WO1999044282A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP10/47964 1998-02-27
JP10047964A JP2935688B1 (ja) 1998-02-27 1998-02-27 超音波モータの制御装置
JP10101339A JPH11299271A (ja) 1998-04-13 1998-04-13 超音波モータの駆動方法
JP10/101339 1998-04-13

Publications (1)

Publication Number Publication Date
WO1999044282A1 true WO1999044282A1 (fr) 1999-09-02

Family

ID=26388172

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP1999/000890 WO1999044282A1 (fr) 1998-02-27 1999-02-25 Dispositif de commande de moteur ultrasonique

Country Status (1)

Country Link
WO (1) WO1999044282A1 (fr)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02179281A (ja) * 1988-12-29 1990-07-12 Miki Puurii Kk 超音波モータ
JPH07154981A (ja) * 1993-07-30 1995-06-16 Crouzet Automat Sa 表面弾性波モータ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02179281A (ja) * 1988-12-29 1990-07-12 Miki Puurii Kk 超音波モータ
JPH07154981A (ja) * 1993-07-30 1995-06-16 Crouzet Automat Sa 表面弾性波モータ

Similar Documents

Publication Publication Date Title
JPH01283073A (ja) 振動型アクチュエーター装置
JP3789017B2 (ja) 位置制御装置
JPH05273361A (ja) 超音波モータ付電子機器
WO1999044282A1 (fr) Dispositif de commande de moteur ultrasonique
JPH0690574A (ja) 超音波モータ及び超音波モータ付電子機器
EP0424141A2 (fr) Circuit de commande pour un moteur pas-à-pas à ultrason
JP4604167B1 (ja) モータ用位相同期回路及びそれを用いたスピンドルモータ
JPH07154981A (ja) 表面弾性波モータ
JP2935688B1 (ja) 超音波モータの制御装置
JP3090903B2 (ja) 超音波モータ
JPH11299271A (ja) 超音波モータの駆動方法
JP2003014495A (ja) 位置検出手段を具備した電子機器
JPH11252946A (ja) 超音波モータの駆動方法
WO1999044280A1 (fr) Moteur a ultrasons
JP2000253679A (ja) 超音波モータの駆動方法
JP2000253680A (ja) 超音波モータの駆動方法
JP2877792B1 (ja) 超音波モータ
JPH04138084A (ja) 超音波モータ用振動体および超音波モータ
JP2010226883A (ja) 超音波アクチュエータ
JP5621662B2 (ja) 圧電モーターの制御方法及び圧電モーター
JPH03243180A (ja) 振動波モータ
JP2000078866A (ja) 超音波モータ
JP2018160969A (ja) 静電モータ
JP2000078865A (ja) 超音波モータの駆動方法
JP2000078864A (ja) 位置検出方法並びに装置及び超音波モータ

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): US

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE

DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
121 Ep: the epo has been informed by wipo that ep was designated in this application
122 Ep: pct application non-entry in european phase