WO1999028942A1 - Tube a rayons x - Google Patents
Tube a rayons x Download PDFInfo
- Publication number
- WO1999028942A1 WO1999028942A1 PCT/JP1998/005486 JP9805486W WO9928942A1 WO 1999028942 A1 WO1999028942 A1 WO 1999028942A1 JP 9805486 W JP9805486 W JP 9805486W WO 9928942 A1 WO9928942 A1 WO 9928942A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- stem
- metallized layer
- focus electrode
- ray tube
- pin
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/16—Vessels; Containers; Shields associated therewith
- H01J35/165—Vessels; Containers; Shields associated therewith joining connectors to the tube
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
- H01J5/50—Means forming part of the tube or lamps for the purpose of providing electrical connection to it
- H01J5/52—Means forming part of the tube or lamps for the purpose of providing electrical connection to it directly applied to or forming part of the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
- H01J9/32—Sealing leading-in conductors
Definitions
- the present invention relates to an X-ray tube, and more particularly, to an X-ray tube in which a ceramic valve, a ceramic stem, and an output window are welded through a brazing material.
- the X-ray tube 100 described in these publications is, as shown in FIG. 10, fixed to a ceramic valve 101 via a brazing material P at one end open side of the valve 101.
- a sealed container 104 is formed by the cooperation of the ceramic stem 102 made in this way and the output window 103 fixed to the other end open side of the valve 101 via the brazing material R.
- a low-voltage side power source pin 105 and a high-voltage side cathode pin 106 are fixed to the stem 102, and are hermetically sealed so as to bridge the power source pins 105 and 106.
- An electron emitting filament 107 is arranged in the container 104.
- a cylindrical focus electrode 108 is arranged in the sealed container 104 so as to surround the filament 107. Then, the lower end portion 108a of the cylindrical focus electrode 108 is sandwiched between the knob 101 and the stem 102 with the brazing material P interposed therebetween, and The stem 102 is fixed. As described above, the connection between the parts with the brazing materials P and R interposed therebetween helps to improve the workability of assembling the X-ray tube. Also, the focus electrode 108 and the low-voltage side cathode Since the wires 105 need to be at the same potential, they are connected by a post-mounting operation of soldering the wires 109.
- the conventional X-ray tube is configured as described above, the following problems exist. That is, since the electrical connection between the focus electrode 108 and the low-voltage side force pin 105 is performed via the wire 109, the wiring work of the wire 109 is performed after assembling the X-ray tube. Separately required, and since the wire 109 was exposed outside the X-ray tube, it had to be carefully handled.
- the present invention has been made in order to solve the above-mentioned problems, and has as its object to provide an X-ray tube having good assembling workability and handleability. Disclosure of invention
- the present invention provides a valve having one end and the other end open, a stem fixed to one end open side of the valve, and a stem fixed to the other end open side of the valve.
- a sealed container is formed in cooperation with the output window, and a filament for electron emission is provided in the sealed container so as to bridge a low-voltage cathode pin and a high-voltage cathode pin erected on the stem.
- a focus electrode is arranged in the sealed container so as to surround the filament, and electrons emitted from the filament are converged by the focus electrode and made incident on the output window, thereby obtaining the output.
- a lower end portion of the focus electrode is sandwiched between the bulb and the stem, and a conductive medalizing layer is provided on a surface of the stem.
- the mask layer extends at least from the lower end of the focus electrode to the cathode pin on the low voltage side, and has a brazing material between the mask layer and the lower end of the focus electrode.
- the metallized layer is provided between the stem and the lower end of the focus electrode when manufacturing the X-ray tube.
- the heat sealability of the brazing material is improved.
- the metallized layer extends from the lower end of the focus electrode to the cathode pin on the low voltage side, electrical continuity between the focus electrode and the cathode pin on the low voltage side is achieved on the stem surface.
- the conductive metallized layer is formed on the entire surface side of the stem facing the output window side except for the periphery of the high-voltage side power source pin. It is preferable that a separation groove is formed around the force sword pin on the high voltage side, and the conductive metallization layer is excluded from the separation groove surface.
- the metallization layer can be formed all over the entire surface of the stem, so that the metallization layer can electrically connect the lower end of the focus electrode to the low-voltage side power source pin.
- the layer forming work can be performed efficiently and easily.
- a separation groove is formed around the high-voltage side power source pin, so that the high-voltage side power source pin and the low-voltage side power source pin can be insulated on the surface of the stem. Furthermore, since the high-voltage side power sword pins are arranged inside the separation groove, even when the molten brazing material flows along the metallized layer, excess brazing material is poured into the separation groove.
- the conductive metallized layer is formed on a surface of the stem facing the output window, and has a ring-like shape that follows the surface shape of the lower end of the focus electrode. It is preferable to have one metallized layer and a linear second metallized layer extending inward in the radial direction from the inner edge of the first metallized layer to the force sword pin on the low voltage side.
- the conductive metallized layer is formed in a substantially U-shape continuously on a front side facing the output window side of the stem and a back side opposite to the front side.
- the metallized layer on the front side is formed at a position in contact with at least a part of the lower end of the force electrode, and the metallized layer on the back side is formed up to the low voltage side power source pin.
- FIG. 1 is a sectional view showing one embodiment of an X-ray tube according to the present invention.
- FIG. 2 is a plan view showing a stem applied to the X-ray tube of FIG.
- FIG. 3 is a cross-sectional view taken along the line III_ I in FIG.
- FIG. 4 is a cross-sectional view showing an arrangement relationship of each component before assembling the X-ray tube.
- FIG. 5 is a plan view showing a second embodiment relating to the stem.
- FIG. 6 is a sectional view taken along the line VI-VI of FIG.
- FIG. 7 is a plan view showing a third embodiment relating to the stem.
- FIG. 8 is a bottom view of the stem shown in FIG.
- FIG. 9 is a sectional view taken along the line IX-IX in FIG.
- FIG. 1 is a sectional view showing a conventional X-ray tube.
- the X-ray tube 1 shown in FIG. 1 has an electrically insulating bulb 2 made of a cylindrical ceramic.
- An electrically insulating stem 3 made of a disc-shaped ceramic is fixed to one end open side of the valve 2, and a disc-shaped output window 4 is fixed to the other end open side of the valve 2.
- an evening get metal 4a made of W, Ti or the like is deposited on the inner surface of the window 4.
- a force sword filament 6 for electron emission is fixed so as to bridge the tip of the force sword pin 5b.
- valve 2 and the stem 3 and the sealed container 7 by the output window 4 cooperation is configured, in this sealed container 7, a high vacuum state (for example, l X 1 0- 6 T orr ) is maintained in, The cathode filament 6 is placed under this high vacuum.
- 3a is the inner surface side of the stem 3
- 11 is a metallized layer
- 13 is a separation groove
- 14a and 14b are insertion holes for force sword pins 5a and 5b.
- the X-ray tube 1 has a cylindrical focus electrode 8 made of Kovar metal in a sealed container 7.
- a donut-shaped flange portion 8a formed so as to protrude in the radial direction is provided, and this flange portion 8a is sandwiched between the bulb 2 and the stem 3. This ensures that the focus electrode 8 is fixed within the bulb 2.
- a ring-shaped skirt portion 8b is formed on the outer peripheral edge of the flange portion 8a, and the inner diameter of the skirt portion 8b is formed slightly larger than the outer diameter of the disc-shaped stem 3. , Surrounding the stem 3. Therefore, when assembling the X-ray tube 1, only by disposing the stem 3 in the scat portion 8b, The positional relationship between the stem 3 and the focus electrode 8 can be easily and reliably determined.
- the X-ray tube 1 has a conductive metal cap 9 disposed on the output window 4, and a circular opening 9 a through which the output window 4 can be seen is formed at the center of the cap 9. ing.
- the cap 9 has a ring-shaped body 9 b surrounding the output window 4 and the end of the valve 2. The free end of the body 9 b is bent outward to form the cap 9. The collar 9c is created. As described above, by providing the body 9 b on the cap 9, the positional relationship between the output window 4, the cap 9, and the valve 2 can be easily and reliably determined when assembling the X-ray tube 1.
- the components of the X-ray tube 1 thus configured are joined and fixed via a brazing material mainly composed of silver (Ag) and melting at about 800 ° C.
- a brazing material mainly composed of silver (Ag) and melting at about 800 ° C.
- the contact portion between the stem 3 and the flange portion 8a of the focus electrode 8 is joined and fixed by melting the ring-shaped first brazing material A, and the contact between the other end of the valve 2 and the output window 4 is made.
- the part is joined and fixed by melting the ring-shaped second brazing material B, and the contact portion between the one end of the bulb 2 and the flange portion 8a of the focus electrode 8 is melted by the ring-shaped third brazing material C
- the contact portion between the output window 4 and the cap 9 is joined and fixed by melting the fourth ring-shaped brazing material D.
- a getter 10 activated at a brazing temperature (about 800 ° C.) is provided, and the getter 10 is fixed to the force sword pin 5a. Therefore, the residual gas in the sealed container 7 assembled by the brazing operation can be adsorbed on the gas container 10, and by further increasing the degree of vacuum in the sealed container 7, a higher quality X-ray tube 1 can be obtained. Can be obtained.
- the electrons emitted from the force sword filament 6 enter the output window 4 so that the X It emits light and is widely used for medical and industrial purposes, as well as for use in air purifiers.
- the inner surface 3a of the stem 3 is metallized.
- Layer 11 is provided.
- the metallized layer 11 is made of a conductive metal material, and is formed over substantially the entire inner surface 3a by pattern printing using, for example, Mn and Cu as main components.
- the stem 3 is formed with a pin insertion hole 14a for inserting the low-voltage cathode pin 5a.
- the metallization layer 11 extends to the position of the flange 8 a of the focus electrode 8 because the metallization layer 11 is formed up to the periphery of the inner surface 3 a of the stem 3. As a result, the force source pin 5a and the focus electrode 8 can be electrically connected via the metallization layer 11 and the brazing material A (see FIG. 1).
- the stem 3 is formed with a pin insertion hole 14b for inserting the high voltage side force sword pin 5b.
- an annular separating groove 13 having a concave cross section is formed.
- the pin inserting hole 14b is formed by the metallization layer 11 described above. Insulation from is achieved.
- an auxiliary metallization layer 11A is formed inside the separation groove 13 to improve the brazing property between the force sword pin 5b and the stem 3, and a brazing material is formed on the auxiliary metallization layer 11A.
- the cathode bin 5b is fixed to the stem 3 via F.
- the metallized layer 11 can be formed by printing all over the entire surface of the stem 3, so that the metallized layer 11 can be formed. It becomes extremely simple and contributes to improving work efficiency.
- the auxiliary metallized layer 11 A is also formed inside the separation groove 13, which is electrically insulated by the separation groove 13. Will be.
- extra brazing is left in the separation groove 13.
- the high-voltage side power pin 5b cannot be electrically connected to the low-voltage side cathode bin 5a or the focus electrode 8, so that X-rays can be made using brazing material. Workability in assembling the pipe 1 ⁇ High yield can be ensured.
- the third brazing material C, the focus electrode 8, the first brazing material A, and the stem assembly S are sequentially stacked on one end side of the bulb 2.
- the first brazing material A is provided with four standing claws 12A.
- the second brazing material B, the output window 4, the fourth brazing material D, and the cap 9 are sequentially stacked on the other end side of the valve 2. Then, this state is set in a desired jig (not shown), and while maintaining this state, the temporarily assembled X-ray tube 1 is carried into a vacuum brazing furnace (not shown), and the cap 9 is put down. Set in the condition. At this time, a gap for exhaust is formed between the stem 3 and the flange portion 8a of the focus electrode 8 by the four standing claws 12A provided on the first brazing material A. After maintaining such a tentatively assembled state in a vacuum brazing furnace (hereinafter simply referred to as a “furnace”), the inside of the furnace is evacuated.
- a vacuum brazing furnace hereinafter simply referred to as a “furnace”
- the air inside the valve 2 becomes Air is continuously exhausted from the gap formed by the vertical claws 12A. Then, sure to allow time for the furnace is equal to or greater than 1 X 1 0- 5 T orr, heating was started in the furnace, Ru warmed in the furnace to near 8 0 0 ° C. At this time, at the same time as the first to fourth brazing materials A to D are melted, each of the standing claws 12A is also melted, and the brazing operation between the parts is performed while maintaining the inside of the sealed container 7 in a high vacuum state. Are achieved at once. Furthermore, by adsorbing the residual gas in the sealed container 7 to the gas 10, the degree of vacuum in the sealed container 7 is increased, and a higher quality X-ray tube 1 can be obtained in the furnace.
- an X-ray tube 1 in which sealing and evacuation have already been completed is obtained. If such a manufacturing method is adopted, what is removed from the furnace already has the form of a product, and it can be said that this method is suitable for mass production.
- the X-ray tube 1 taken out of the furnace does not require any separate wiring work.
- the wiring between the focus electrode 8 and the low voltage side cathode bin 5a is performed. Can be completed.
- the inner surface 20a of the stem 20 extends from the position of the flange portion 8a (Fig. 1) of the focus electrode 8 to the pin insertion hole 22a for inserting the low-voltage side power source pin 5a.
- Existing metallization layer 21 is provided.
- the metallized layer 21 has a ring-shaped first metallized layer 21 a substantially conforming to the shape of the flange portion 8 a of the focus electrode 8, and a pin inward from a part of the first metallized layer 21 a.
- a substantially linear second metallized layer 21b extending to the insertion hole 22a. Therefore, pin insertion Inserting the low-voltage side power source pin 5a (Fig.
- the two metallized layers 21 a and 2 lb can electrically connect the force source pin 5 a and the focus electrode 8.
- a circular auxiliary metallized layer 21A is formed around the pin insertion hole 22b for inserting the high voltage side cathode bin 5b, and the auxiliary metallized layer 21A is formed of a metallized layer. 21 It is formed by pattern printing so as not to be electrically connected to 1.
- the stem 30 extends straight from the position of the flange portion 8a of the focus electrode 8 (FIG. 1) to the pin insertion hole 32a for inserting the low-voltage-side force sword pin 5a.
- a metallization layer 31 is provided. Specifically, one end of the metallized layer 31 is positioned so as to contact the flange portion 8a on the inner surface 30a of the stem 30 and the other end is formed on the outer surface 30b of the pin insertion hole 3a. 2 is located to contact a. This is merely an example.
- a metallized layer 31 extending linearly from the position of the flange portion 8a to the pin insertion hole 32a is formed only on the inner surface 30a of the stem 30. You may.
- Reference numeral 32b denotes a pin insertion hole for inserting the high-voltage side power source pin 5b
- reference numeral 33 denotes an exhaust port connected to the exhaust pipe 34.
- the metallized layers 11, 21, and 31 described above are formed on the surfaces of the stems 3, 20, and 30 by printing, coating, or vapor-depositing a material with good conductivity. Needless to say, it may be made to have been made. Industrial applicability
- the X-ray tube according to the present invention can be used for ICs, films, powders, It is widely used in industrial and medical applications, such as static elimination of static electricity, neutralization of static electricity, and static elimination when removing plastic molds, and is also used in air purifiers.
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/555,451 US6351520B1 (en) | 1997-12-04 | 1998-12-04 | X-ray tube |
AU13522/99A AU1352299A (en) | 1997-12-04 | 1998-12-04 | X-ray tube |
DE69837013T DE69837013T2 (de) | 1997-12-04 | 1998-12-04 | Röntgenröhre |
EP98957176A EP1037248B1 (en) | 1997-12-04 | 1998-12-04 | X-ray tube |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9/334370 | 1997-12-04 | ||
JP33437097A JP4043571B2 (ja) | 1997-12-04 | 1997-12-04 | X線管 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1999028942A1 true WO1999028942A1 (fr) | 1999-06-10 |
Family
ID=18276617
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP1998/005486 WO1999028942A1 (fr) | 1997-12-04 | 1998-12-04 | Tube a rayons x |
Country Status (6)
Country | Link |
---|---|
US (1) | US6351520B1 (ja) |
EP (1) | EP1037248B1 (ja) |
JP (1) | JP4043571B2 (ja) |
AU (1) | AU1352299A (ja) |
DE (1) | DE69837013T2 (ja) |
WO (1) | WO1999028942A1 (ja) |
Cited By (1)
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---|---|---|---|---|
EP1100110A1 (en) * | 1998-07-30 | 2001-05-16 | Hamamatsu Photonics K.K. | X-ray tube |
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US7428298B2 (en) * | 2005-03-31 | 2008-09-23 | Moxtek, Inc. | Magnetic head for X-ray source |
US7382862B2 (en) * | 2005-09-30 | 2008-06-03 | Moxtek, Inc. | X-ray tube cathode with reduced unintended electrical field emission |
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US20110121179A1 (en) * | 2007-06-01 | 2011-05-26 | Liddiard Steven D | X-ray window with beryllium support structure |
US7737424B2 (en) * | 2007-06-01 | 2010-06-15 | Moxtek, Inc. | X-ray window with grid structure |
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FR3069100B1 (fr) * | 2017-07-11 | 2019-08-23 | Thales | Source generatrice de rayons ionisants compacte, ensemble comprenant plusieurs sources et procede de realisation de la source |
KR101966794B1 (ko) * | 2017-07-12 | 2019-08-27 | (주)선재하이테크 | 전자 집속 개선용 엑스선관 |
JP6753498B1 (ja) * | 2019-09-19 | 2020-09-09 | 株式会社明電舎 | エミッタ支持構造及び電界放射装置 |
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JP3580879B2 (ja) * | 1995-01-19 | 2004-10-27 | 浜松ホトニクス株式会社 | 電子管デバイス |
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1997
- 1997-12-04 JP JP33437097A patent/JP4043571B2/ja not_active Expired - Fee Related
-
1998
- 1998-12-04 US US09/555,451 patent/US6351520B1/en not_active Expired - Fee Related
- 1998-12-04 AU AU13522/99A patent/AU1352299A/en not_active Abandoned
- 1998-12-04 WO PCT/JP1998/005486 patent/WO1999028942A1/ja active IP Right Grant
- 1998-12-04 DE DE69837013T patent/DE69837013T2/de not_active Expired - Fee Related
- 1998-12-04 EP EP98957176A patent/EP1037248B1/en not_active Expired - Lifetime
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JPH04133245A (ja) * | 1990-09-25 | 1992-05-07 | Matsushita Electron Corp | マグネトロン用陰極構体 |
JPH09180660A (ja) * | 1995-12-25 | 1997-07-11 | Hamamatsu Photonics Kk | 透過型x線管 |
JPH09180630A (ja) * | 1995-12-25 | 1997-07-11 | Hamamatsu Photonics Kk | X線管の製造方法 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1100110A1 (en) * | 1998-07-30 | 2001-05-16 | Hamamatsu Photonics K.K. | X-ray tube |
EP1100110A4 (en) * | 1998-07-30 | 2003-01-08 | Hamamatsu Photonics Kk | X-RAY TUBE |
Also Published As
Publication number | Publication date |
---|---|
EP1037248A1 (en) | 2000-09-20 |
DE69837013T2 (de) | 2007-08-30 |
US6351520B1 (en) | 2002-02-26 |
JPH11167887A (ja) | 1999-06-22 |
JP4043571B2 (ja) | 2008-02-06 |
EP1037248B1 (en) | 2007-01-31 |
AU1352299A (en) | 1999-06-16 |
EP1037248A4 (en) | 2006-04-05 |
DE69837013D1 (de) | 2007-03-22 |
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