WO1999008498A1 - Kontaktanordnung zur verbindung zweier substrate sowie verfahren zur herstellung einer derartigen kontaktanordnung - Google Patents

Kontaktanordnung zur verbindung zweier substrate sowie verfahren zur herstellung einer derartigen kontaktanordnung Download PDF

Info

Publication number
WO1999008498A1
WO1999008498A1 PCT/DE1998/002067 DE9802067W WO9908498A1 WO 1999008498 A1 WO1999008498 A1 WO 1999008498A1 DE 9802067 W DE9802067 W DE 9802067W WO 9908498 A1 WO9908498 A1 WO 9908498A1
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
metallizations
contact
spacing
spacer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/DE1998/002067
Other languages
German (de)
English (en)
French (fr)
Inventor
Jürgen SCHREDL
Thomas Oppert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pac Tech Packaging Technologies GmbH
Smart Pac GmbH Technology Services
Original Assignee
Pac Tech Packaging Technologies GmbH
Smart Pac GmbH Technology Services
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19822559A external-priority patent/DE19822559A1/de
Application filed by Pac Tech Packaging Technologies GmbH, Smart Pac GmbH Technology Services filed Critical Pac Tech Packaging Technologies GmbH
Priority to JP2000506809A priority Critical patent/JP2003509833A/ja
Priority to DE59806066T priority patent/DE59806066D1/de
Priority to EP98945031A priority patent/EP1002452B1/de
Publication of WO1999008498A1 publication Critical patent/WO1999008498A1/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistors
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits
    • H05K3/321Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits by conductive adhesives
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04Mounting of components, e.g. of leadless components
    • H05K13/046Surface mounting
    • H05K13/0469Surface mounting by applying a glue or viscous material
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10621Components characterised by their electrical contacts
    • H05K2201/10674Flip chip
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10621Components characterised by their electrical contacts
    • H05K2201/10734Ball grid array [BGA]; Bump grid array
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10954Other details of electrical connections
    • H05K2201/10977Encapsulated connections
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10954Other details of electrical connections
    • H05K2201/10984Component carrying a connection agent, e.g. solder, adhesive
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10954Other details of electrical connections
    • H05K2201/10992Using different connection materials, e.g. different solders, for the same connection
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/03Metal processing
    • H05K2203/0338Transferring metal or conductive material other than a circuit pattern, e.g. bump, solder, printed component
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistors
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/341Surface mounted components
    • H05K3/3431Leadless components
    • H05K3/3436Leadless components having an array of bottom contacts, e.g. pad grid array or ball grid array components
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/01Manufacture or treatment
    • H10W72/012Manufacture or treatment of bump connectors, dummy bumps or thermal bumps
    • H10W72/01215Manufacture or treatment of bump connectors, dummy bumps or thermal bumps forming coatings
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/01Manufacture or treatment
    • H10W72/012Manufacture or treatment of bump connectors, dummy bumps or thermal bumps
    • H10W72/01221Manufacture or treatment of bump connectors, dummy bumps or thermal bumps using local deposition
    • H10W72/01225Manufacture or treatment of bump connectors, dummy bumps or thermal bumps using local deposition in solid form, e.g. by using a powder or by stud bumping
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • H10W72/072Connecting or disconnecting of bump connectors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • H10W72/072Connecting or disconnecting of bump connectors
    • H10W72/07231Techniques
    • H10W72/07237Techniques using a polymer adhesive, e.g. an adhesive based on silicone or epoxy
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/20Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H10W72/221Structures or relative sizes
    • H10W72/222Multilayered bumps, e.g. a coating on top and side surfaces of a bump core
    • H10W72/223Multilayered bumps, e.g. a coating on top and side surfaces of a bump core characterised by the structure of the outermost layers, e.g. multilayered coatings
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/20Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H10W72/241Dispositions, e.g. layouts
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/20Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H10W72/241Dispositions, e.g. layouts
    • H10W72/245Dispositions, e.g. layouts of outermost layers of multilayered bumps, e.g. bump coating being only on a part of a bump core
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/20Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H10W72/251Materials
    • H10W72/252Materials comprising solid metals or solid metalloids, e.g. PbSn, Ag or Cu
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/20Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H10W72/251Materials
    • H10W72/255Materials of outermost layers of multilayered bumps, e.g. material of a coating
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/20Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H10W72/261Functions other than electrical connecting
    • H10W72/263Providing mechanical bonding or support, e.g. dummy bumps
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/20Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H10W72/261Functions other than electrical connecting
    • H10W72/267Multiple bump connectors having different functions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/20Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H10W72/29Bond pads specially adapted therefor
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/90Bond pads, in general
    • H10W72/941Dispositions of bond pads
    • H10W72/9415Dispositions of bond pads relative to the surface, e.g. recessed, protruding
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/90Bond pads, in general
    • H10W72/951Materials of bond pads
    • H10W72/952Materials of bond pads comprising metals or metalloids, e.g. PbSn, Ag or Cu
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/10Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/15Encapsulations, e.g. protective coatings characterised by their shape or disposition on active surfaces of flip-chip devices, e.g. underfills
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/721Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • H10W90/724Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL

Definitions

  • the present invention relates to a contact arrangement for connecting two substrates according to the preamble of claim 1 and a substrate arrangement produced using such a contact arrangement according to the preamble of claim 4 and a method for producing such a contact arrangement according to claim 5.
  • the present invention is based on the object of proposing a contact arrangement using elevated contact metallizations for the connection of two substrates, in which the spacing function of the contact metallizations is not impaired by the connection process.
  • Spacer metallization to the second substrate is an electrically conductive
  • the spacing metallization only serves to form a spacer which is defined in terms of its height and which enables an electrically conductive contact between the substrates.
  • the mechanical holding forces required to secure the conductive electrical contact are not formed by a cohesive connection between the material of the spacer or by formation of surface forces due to wetting, as is the case with the known remelting, but rather by an arrangement in between an adhesive mass.
  • this adhesive composition is designed to be electrically conductive, for example by adding electrically conductive particles.
  • the contact arrangement according to the invention makes it possible to arrange the volume and / or shape of the material volume used for the formation of the spacing metallization in such a way that it appears suitable for achieving the pure spacing function without being influenced by a subsequent melting process.
  • the spacing metallization is formed from a solder material, in addition to the spacing function, it is also advantageously possible to benefit from the plastic deformation behavior of the solder material for the reduction of stresses between the substrates, which are generally thermal.
  • connection surface of the first substrate If an intermediate metallization is advantageously provided between the connection surface of the first substrate and the spacing metallization, it is possible to choose materials to form the spacing metallization that cannot be contacted directly with the connection surface of the first substrate.
  • the use of an alloy containing nickel and gold to form the intermediate metallization offers the advantageous one Possibility of using a conventional solder material, such as a lead / tin alloy, to form the spacer metal layer, the direct contact of which would result in inadequate mechanical holding forces on an aluminum connection surface of the first substrate.
  • a conventional solder material such as a lead / tin alloy
  • the contact arrangements are formed in part between connection surfaces of the first substrate and connection surfaces in the second substrate, and in another part between
  • Pads of the first substrate and electrically inactive surface areas of the second substrate are formed.
  • the contact arrangements assigned to the electrically inactive surface areas serve as pure spacers and have no electrical function.
  • the substrate arrangement according to the invention thus offers the advantage of being able to use all of the connection surfaces of the first substrate for forming spacing metallizations without the connection surfaces of the first substrate having to be assigned a connection surface of the second substrate.
  • mechanical support or the formation of a spacer is also possible in regions of the second substrate in which no connection surfaces are provided and which are accordingly electrically inactive.
  • the method according to the invention enables a mechanical connection to be established between the two substrates, regardless of whether each contact surface of the first substrate is on the contact surface of the a corresponding pad is assigned to the second substrate or not. If there is no assignment of a corresponding connection area on the contact surface of the second substrate, an at least mechanical connection can be made to the contact surface of the second substrate in the same way as when contacting two opposite connection areas.
  • the pads are provided with an intermediate metallization before the solder material is applied to the pads, it is also possible to use those solder materials for the formation of the spacer metallizations with which there is otherwise insufficient wetting of the pad surface for the formation of adhesive forces between the pads and the spacer metallizations it is possible.
  • the electrically conductive adhesive material can be applied either to the spacer metal coatings of the first substrate or to the contact areas or surface areas of the second substrate provided for contacting the spacer metal coatings. You can use an application device that - in the case of Application of the adhesive material to the spacer metallizations - can be designed to be movable relative to the spacer metallizations.
  • Such an application can be carried out, for example, using a movable dispensing device for adhesive material, with which adhesive points can be applied to the spacing metallizations.
  • the application can also be carried out by transferring a surface wetted with adhesive material, for example the tip of an application needle.
  • the adhesive volume can be such that a uniform surface is available for the immersion process of all spacer metallizations, or that individual volumes of the adhesive material are provided which are assigned to each spacer metallization.
  • immersion is to be understood here to mean a process in which, by handling the first substrate and carrying out a relative movement with respect to the adhesive volume or volumes, wetting at least a portion of the surface of the Spacer metallization is done with the adhesive material.
  • the adhesive composition can take place, for example, in a template application process or by means of screen printing.
  • the first substrate that is to say, for example, the chip
  • a flexible second substrate that is to say, for example, a substrate with a film carrier.
  • the filling material filled in the space between the two substrates serves not only to support or stiffen the substrate arrangement, but also to produce a mechanical holding bond between the two substrates, it is possible to use only temporarily effective adhesive material or adhesive material for the conductive adhesive material , which has only low, if necessary releasable adhesion forces, as is the case, for example, with so-called pressure-sensitive adhesives, which are used to produce temporary adhesive bonds that are easily detachable.
  • 1 shows a contact arrangement between a chip and a coil substrate for forming a transponder
  • 2 shows a substrate arrangement consisting of a chip and a chip carrier for producing a chip module
  • 3 to 5 show a method for producing the substrate arrangement shown in FIG. 2;
  • FIGS. 3 to 5 a variation of the method shown in FIGS. 3 to 5 for producing the substrate arrangement shown in FIG. 2.
  • FIG. 1 shows the formation of a contact arrangement 10 in the case of a substrate arrangement formed from a chip 11 and a coil substrate 12 to form a transponder 13.
  • Such transponders 13 are used for contactless data transmission and have the chip 11 and the essential functional elements the antenna coil 14 formed on the coil substrate 12.
  • the antenna coil 14 is formed in the present case as a wire coil with coil wire ends 15, which are each connected via a contact arrangement 10 to an associated chip pad 16, both electrically conductive and mechanically holding.
  • contact ends of etched or printed coils can be contacted in the above manner. Only one of a plurality of contact arrangements 10 is shown in FIG. 1.
  • the chip 11 has further test connections 17, of which only one test connection 17 is shown in FIG. 1 and which is used for the electrical check of the chip 11 before contacting serve the antenna coil 14 and which after contacting the chip 1 1 with the antenna coil 14 no longer has a function.
  • the contact arrangement 10 between the chip connection area 16 and the coil wire end 15 is constructed from three components, namely an intermediate metallization 18, a spacing metallization 19 and a conductive adhesive mass 20.
  • an intermediate metallization 18 a spacing metallization 19 and a conductive adhesive mass 20.
  • a spacing metallization 19 a conductive adhesive mass 20.
  • Chips 1 1 applied intermediate metallization 18 uses an alloy containing nickel and gold, which can be adhered to the chip pad 16 in an electroless metal deposition process, for example.
  • the spacing metallization 19 is formed from a conventional solder alloy, for example a low-melting lead / tin alloy.
  • both the electrically conductive contacting of the spacer metallization 19 with the coil wire end 15 and the mechanical connection between the spacer metallization 19 and the coil wire end 15 takes place via the adhesive compound 20.
  • the electrical connection is made in the adhesive compound 20 contained electrically conductive particles and the mechanical connection via the adhesive forces effective in the adhesive mass.
  • FIG. 1 also shows that, due to the combination of the adhesive mass 20 with the spacer metallization 19, a mechanically holding, electrically conductive connection between the spacer metallization 19 and the coil wire end 15 without influencing the spacer metallization 19 designed in the present case as a ball is made possible.
  • a distance a made possible by the spacing metallization 19 between a contact surface 21 of the chip 11 and a contact surface 22 of the coil substrate 12 formed in the present case by the surface of the coil wire end 15 can essentially be equated with the diameter d of the spherically shaped spacing metallization 19.
  • This simplified assumption can be assumed in the present case, since the intermediate metallization 18, as will be explained in more detail below, only serves to form a surface 24 that can be wetted with the solder material 23 used to produce the spacer metallization 19.
  • FIG. 2 shows a substrate arrangement in the form of a chip module 25 with a chip 26 and a chip carrier 27.
  • the chip carrier 27 is provided with a conductor track structure (not shown here) which starts out of chip contacts 28 of the chip carrier 27 on a Ch 'iputtonseite 33, which serve to make contact with the chip terminals 29 of the chip 26, a
  • Chip carrier 27 allows.
  • the chip module 25 has a total of six contact arrangements 10 which, as already described above with reference to FIG. 1, consist of three components, namely the intermediate metallization 18, the spacing metallization 19 and the adhesive composition 20 , are built.
  • the contact arrangements 10 extending between the chip connections 29 of the chip 26 and the chip contacts 28 of the chip carrier 27 are used both for establishing an electrically conductive connection and for establishing a connection that mechanically holds the chip module 25 together.
  • the contact arrangements 10 extending between the test connections 3 1 of the chip 26 and electrically inactive surface areas 32 of the chip contact surface 33 of the chip carrier 27 serve only to establish a mechanical connection that holds the chip module 25 together.

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Wire Bonding (AREA)
  • Structures For Mounting Electric Components On Printed Circuit Boards (AREA)
PCT/DE1998/002067 1997-08-08 1998-07-23 Kontaktanordnung zur verbindung zweier substrate sowie verfahren zur herstellung einer derartigen kontaktanordnung Ceased WO1999008498A1 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2000506809A JP2003509833A (ja) 1997-08-08 1998-07-23 2つの基板を接続する接触構造物及びこの接触構造物を作る方法
DE59806066T DE59806066D1 (de) 1997-08-08 1998-07-23 Kontaktanordnung zur verbindung zweier substrate sowie verfahren zur herstellung einer derartigen kontaktanordnung
EP98945031A EP1002452B1 (de) 1997-08-08 1998-07-23 Kontaktanordnung zur verbindung zweier substrate sowie verfahren zur herstellung einer derartigen kontaktanordnung

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE19734442.9 1997-08-08
DE19734442 1997-08-08
DE19822559.8 1998-05-20
DE19822559A DE19822559A1 (de) 1997-08-08 1998-05-20 Kontaktanordnung zur Verbindung zweier Substrate sowie Verfahren zur Herstellung einer derartigen Kontaktanordnung

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US09485426 A-371-Of-International 2000-02-08
US10/020,594 Division US20020040923A1 (en) 1997-08-08 2001-12-13 Contact structure for connecting two substrates and also process for producing such a contact structure

Publications (1)

Publication Number Publication Date
WO1999008498A1 true WO1999008498A1 (de) 1999-02-18

Family

ID=26038985

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE1998/002067 Ceased WO1999008498A1 (de) 1997-08-08 1998-07-23 Kontaktanordnung zur verbindung zweier substrate sowie verfahren zur herstellung einer derartigen kontaktanordnung

Country Status (3)

Country Link
EP (1) EP1002452B1 (https=)
JP (1) JP2003509833A (https=)
WO (1) WO1999008498A1 (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7230309B2 (en) 2003-10-02 2007-06-12 Infineon Technologies Ag Semiconductor component and sensor component for data transmission devices
WO2015175554A3 (en) * 2014-05-12 2016-01-07 Invensas Corporation Forming a conductive connection by melting a solder portion without melting another solder portion with the same melting point and a corresponding conductive connection
US9793198B2 (en) 2014-05-12 2017-10-17 Invensas Corporation Conductive connections, structures with such connections, and methods of manufacture

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4569305A (en) * 1981-10-09 1986-02-11 Ferco S.R.L. Apparatus to provide the application of glue on preselected zones of printed circuit boards
DE4109363A1 (de) * 1991-03-22 1992-09-24 Bosch Gmbh Robert Klebverbindung zwischen einem elektronischen bauteil und einem substrat sowie verfahren zur herstellung der klebverbindung
DE4138779A1 (de) * 1991-11-26 1993-07-29 Lcd Mikroelektronik Dr Hampel Methode zur kontaktierung elektronischer bauelemente
US5611884A (en) * 1995-12-11 1997-03-18 Dow Corning Corporation Flip chip silicone pressure sensitive conductive adhesive

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4569305A (en) * 1981-10-09 1986-02-11 Ferco S.R.L. Apparatus to provide the application of glue on preselected zones of printed circuit boards
DE4109363A1 (de) * 1991-03-22 1992-09-24 Bosch Gmbh Robert Klebverbindung zwischen einem elektronischen bauteil und einem substrat sowie verfahren zur herstellung der klebverbindung
DE4138779A1 (de) * 1991-11-26 1993-07-29 Lcd Mikroelektronik Dr Hampel Methode zur kontaktierung elektronischer bauelemente
US5611884A (en) * 1995-12-11 1997-03-18 Dow Corning Corporation Flip chip silicone pressure sensitive conductive adhesive

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7230309B2 (en) 2003-10-02 2007-06-12 Infineon Technologies Ag Semiconductor component and sensor component for data transmission devices
WO2015175554A3 (en) * 2014-05-12 2016-01-07 Invensas Corporation Forming a conductive connection by melting a solder portion without melting another solder portion with the same melting point and a corresponding conductive connection
US9437566B2 (en) 2014-05-12 2016-09-06 Invensas Corporation Conductive connections, structures with such connections, and methods of manufacture
US9793198B2 (en) 2014-05-12 2017-10-17 Invensas Corporation Conductive connections, structures with such connections, and methods of manufacture
US10049998B2 (en) 2014-05-12 2018-08-14 Invensas Corporation Conductive connections, structures with such connections, and methods of manufacture
US10090231B2 (en) 2014-05-12 2018-10-02 Invensas Corporation Conductive connections, structures with such connections, and methods of manufacture

Also Published As

Publication number Publication date
EP1002452A1 (de) 2000-05-24
EP1002452B1 (de) 2002-10-23
JP2003509833A (ja) 2003-03-11

Similar Documents

Publication Publication Date Title
DE69535629T2 (de) Montage von elektronischen komponenten auf einer leiterplatte
DE19781558B4 (de) Schaltungskomponente für ein IC-Gehäuse und Verfahren zu deren Herstellung
DE69401233T2 (de) Kapillar für ein Drahtschweissgerät und Verfahren zum Formen von elektrischen Verbindungshöckern mittels Kapillares
EP0944922B1 (de) Verfahren zur Herstellung eines Chip-Moduls
DE69635083T2 (de) Herstellung von verbindungen und ansatzstücken unter verwendung eines opfersubstrats
DE69024669T2 (de) Elektrische Verbinderstruktur und Verfahren, einen elektrischen Verbindungsaufbau zu erhalten
DE10163799B4 (de) Halbleiterchip-Aufbausubstrat und Verfahren zum Herstellen eines solchen Aufbausubstrates
DE10045043B4 (de) Halbleiterbauteil und Verfahren zu dessen Herstellung
DE102005059224B4 (de) SiC-Halbleitervorrichtung und Herstellungsverfahren dafür
DE69113187T2 (de) Verfahren zur Herstellung einer elektronische Dünnschichtanordnung.
DE19848834A1 (de) Verfahren zum Montieren eines Flipchips und durch dieses Verfahren hergestellte Halbleiteranordnung
DE102005034485A1 (de) Verbindungselement für ein Halbleiterbauelement und Verfahren zu dessen Herstellung
DE102005028951A1 (de) Anordnung zur elektrischen Verbindung einer Halbleiter-Schaltungsanordnung mit einer äusseren Kontakteinrichtung und Verfahren zur Herstellung derselben
DE19522338B4 (de) Chipträgeranordnung mit einer Durchkontaktierung
DE19500655B4 (de) Chipträger-Anordnung zur Herstellung einer Chip-Gehäusung
DE10223738B4 (de) Verfahren zur Verbindung integrierter Schaltungen
DE19541039A1 (de) Chip-Modul sowie Verfahren und Vorrichtung zu dessen Herstellung
DE4424831C2 (de) Verfahren zur Herstellung einer elektrisch leitenden Verbindung
DE10212742A1 (de) Verfahren zum Löten von Kontaktstiften und Kontaktstifte dazu
EP1002452A1 (de) Kontaktanordnung zur verbindung zweier substrate sowie verfahren zur herstellung einer derartigen kontaktanordnung
DE102004003275B4 (de) Halbleiterbauteil mit Verbindungselementen auf Halbleiterchips und Verfahren zur Herstellung derselben
DE102004005361B4 (de) Verfahren zur Herstellung von metallischen Leitbahnen und Kontaktflächen auf elektronischen Bauelementen
DE102022110838B3 (de) Verfahren zum Herstellen einer Chipanordnung, Verfahren zum Herstellen einer Chipkarte
EP1116180B1 (de) Verfahren zur kontaktierung eines schaltungschips
DE19822559A1 (de) Kontaktanordnung zur Verbindung zweier Substrate sowie Verfahren zur Herstellung einer derartigen Kontaktanordnung

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): CA JP KR SG US

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE

121 Ep: the epo has been informed by wipo that ep was designated in this application
DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
WWE Wipo information: entry into national phase

Ref document number: 1998945031

Country of ref document: EP

NENP Non-entry into the national phase

Ref country code: KR

WWE Wipo information: entry into national phase

Ref document number: 09485426

Country of ref document: US

WWP Wipo information: published in national office

Ref document number: 1998945031

Country of ref document: EP

NENP Non-entry into the national phase

Ref country code: CA

WWG Wipo information: grant in national office

Ref document number: 1998945031

Country of ref document: EP