WO1998052101B1 - Technique de transfert de masque d'echelle de gris et de motif de profondeur utilisant un verre de chalcogenure inorganique - Google Patents

Technique de transfert de masque d'echelle de gris et de motif de profondeur utilisant un verre de chalcogenure inorganique

Info

Publication number
WO1998052101B1
WO1998052101B1 PCT/US1998/009373 US9809373W WO9852101B1 WO 1998052101 B1 WO1998052101 B1 WO 1998052101B1 US 9809373 W US9809373 W US 9809373W WO 9852101 B1 WO9852101 B1 WO 9852101B1
Authority
WO
WIPO (PCT)
Prior art keywords
layer
chalcogenide glass
gray scale
substrate
resist
Prior art date
Application number
PCT/US1998/009373
Other languages
English (en)
Other versions
WO1998052101A1 (fr
Filing date
Publication date
Priority claimed from US08/857,324 external-priority patent/US5998066A/en
Application filed filed Critical
Priority to JP10549320A priority Critical patent/JP2000514933A/ja
Priority to EP98923353A priority patent/EP0914629A1/fr
Publication of WO1998052101A1 publication Critical patent/WO1998052101A1/fr
Publication of WO1998052101B1 publication Critical patent/WO1998052101B1/fr
Priority to US09/228,910 priority patent/US6033766A/en

Links

Abstract

La présente invention se rapporte à un procédé de production d'un masque haute résolution d'échelle de gris dilatée analogique. En utilisant un verre de chalcogénure inorganique, tel que du germanium de sélénium, revêtu d'une fine couche d'argent, on peut produire un masque d'échelle de gris avec une commande précise de la taille, de l'uniformité et de la variance des pixels. Le verre de germanium de sélénium est composé de structures en colonnes disposées perpendiculairement au substrat permettant d'obtenir une précision de bord de 100 Å. Les structures en colonnes empêchent également les attaques latérales pendant le procédé d'attaque, ce qui permet de placer les pixels de façon rapprochée. Par conséquent, le germanium de sélénium peut être utilisé comme un masque d'échelle de gris haute résolution avec une échelle de gris analogique dilatée. Le masque d'échelle de gris peut aussi être utilisé pour imprimer des informations grâce à la modulation de l'épaisseur, sur une couche photorésist de germanium de sélénium sur un substrat inorganique. La couche photorésist de germanium de sélénium peut transférer ensuite l'échelle de gris vers le substrat.
PCT/US1998/009373 1997-05-16 1998-05-15 Technique de transfert de masque d'echelle de gris et de motif de profondeur utilisant un verre de chalcogenure inorganique WO1998052101A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP10549320A JP2000514933A (ja) 1997-05-16 1998-05-15 無機カルコゲナイドガラスを用いたグレースケールマスク及び深さパターン転写技術
EP98923353A EP0914629A1 (fr) 1997-05-16 1998-05-15 Technique de transfert de masque d'echelle de gris et de motif de profondeur utilisant un verre de chalcogenure inorganique
US09/228,910 US6033766A (en) 1997-05-16 1999-01-11 Gray scale mask and depth pattern transfer technique using inorganic chalcogenide glass

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/857,324 US5998066A (en) 1997-05-16 1997-05-16 Gray scale mask and depth pattern transfer technique using inorganic chalcogenide glass
US08/857,324 1997-05-16

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
US08/857,324 Continuation-In-Part US5998066A (en) 1997-04-11 1997-05-16 Gray scale mask and depth pattern transfer technique using inorganic chalcogenide glass

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US09/228,910 Continuation US6033766A (en) 1997-05-16 1999-01-11 Gray scale mask and depth pattern transfer technique using inorganic chalcogenide glass

Publications (2)

Publication Number Publication Date
WO1998052101A1 WO1998052101A1 (fr) 1998-11-19
WO1998052101B1 true WO1998052101B1 (fr) 1998-12-30

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1998/009373 WO1998052101A1 (fr) 1997-05-16 1998-05-15 Technique de transfert de masque d'echelle de gris et de motif de profondeur utilisant un verre de chalcogenure inorganique

Country Status (4)

Country Link
US (2) US5998066A (fr)
EP (1) EP0914629A1 (fr)
JP (1) JP2000514933A (fr)
WO (1) WO1998052101A1 (fr)

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