WO1998050938A2 - Dispositif d'imagerie et/ou de balayage a compensation des degradations d'image dues aux facteurs environnementaux - Google Patents

Dispositif d'imagerie et/ou de balayage a compensation des degradations d'image dues aux facteurs environnementaux Download PDF

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Publication number
WO1998050938A2
WO1998050938A2 PCT/DE1998/001186 DE9801186W WO9850938A2 WO 1998050938 A2 WO1998050938 A2 WO 1998050938A2 DE 9801186 W DE9801186 W DE 9801186W WO 9850938 A2 WO9850938 A2 WO 9850938A2
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WO
WIPO (PCT)
Prior art keywords
image
filter
signal
actuator
calibration
Prior art date
Application number
PCT/DE1998/001186
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German (de)
English (en)
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WO1998050938A3 (fr
Inventor
Peter Heiland
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Peter Heiland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Peter Heiland filed Critical Peter Heiland
Priority to JP54760698A priority Critical patent/JP4232913B2/ja
Priority to EP98932028A priority patent/EP1018136B1/fr
Priority to US09/423,155 priority patent/US6884992B1/en
Priority to DE59811722T priority patent/DE59811722D1/de
Publication of WO1998050938A2 publication Critical patent/WO1998050938A2/fr
Publication of WO1998050938A3 publication Critical patent/WO1998050938A3/fr

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/0216—Means for avoiding or correcting vibration effects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes

Definitions

  • the invention relates to an imaging device and / or a device scanning in a raster mode and a method for operating such a device with a device for compensating for environmental influences that can cause image deterioration.
  • Imaging devices and / or devices scanning in a scanning mode for example scanning electron microscopes, force microscopes and light scanning microscopes, have become very important in many test methods for samples.
  • An influencing variable which reduces the imaging quality can be, for example, an electromagnetic interference field in scanning electron microscopes which influences the electron trajectories. Air and / or ground vibrations in the vicinity of the microscope can also be considered, due to the location blurs when illuminating the sample or when detecting the electrons caused.
  • the described influence of electromagnetic interference fields or air and / or ground vibrations on the imaging quality applies in principle to all imaging devices and / or devices scanning in a raster mode.
  • One method for eliminating air and / or floor vibrations is, for example, to place the device on a vibration damping or vibration isolation device.
  • a vibration damping or vibration isolation device is very expensive.
  • these devices continue to offer only limited protection against the above-mentioned environmental influences.
  • a first signal which is dependent on the environmental influences, then passes through an adjustable digital electrical filter and controls an actuator and / or an actuator which acts on the image and / or on the image representation, the calibrated state of the device being adjusted the Transfer parameters, ie the transfer characteristic of the filter is realized, the image deterioration is greatly reduced or substantially compensated.
  • By adjusting the filter it can be ensured that the compensation of the environmental influences interfering with the image, in contrast to devices according to the prior art, takes place “at the actual place of occurrence”.
  • the invention can be used in a variety of embodiments. The effort can be made dependent on the degree of compensation for the environmental influences required.
  • the digital filter for calibrating the device can have a calibration input to which a second signal for setting the transmission parameters of the filter is applied, or the filter can have a device for manually setting the transmission parameters. Is there an output signal from the
  • the transmission parameters of the filter can be adjusted in dependence on the detected image errors in such a way that exactly the interference that acts on the image is compensated and not the interference at a location near the device.
  • the first signal which is dependent on the environmental influences and is present at the signal input of the filter, can either be emitted by a sensor for detecting at least one physical variable outside the device, or an output of the image processing device is connected to the calibration input of the filter, so that the calibration signal, for example depends on an image analysis. If a sensor is used to deliver the first signal, electromagnetic and / or magnetic fields, air vibrations and / or body or ground vibrations can be detected.
  • one disturbance variable can be recorded at the same time and the imaging errors caused by the disturbance variable can be compensated for by controlling one or more actuators.
  • the high flexibility of the invention is also evident in the fact that the action according to the invention on the image and / or the image can take place in a variety of ways depending on the disturbance variables.
  • actuators that are assigned to the scanning device
  • there is also the possibility of realizing the compensation of the imaging errors by controlling an actuator in an image processing device without influencing the incorrect imaging itself. This actuator in the
  • Image processing direction includes, for example, an adjustable parameter for a calculation in the image processing device.
  • the use of multi-axis sensors and actuators advantageously enables the interference to be compensated for in several spatial directions.
  • the calibration signal on the filter can vary depending on the sampling location and / or the time.
  • the device for example a microscope, is operated in a calibration mode and subsequently in an image mode, in the calibration mode environmental influences which worsen the image, by imaging a predetermined reference object and comparing the image with the real structure of the reference object detected and greatly reduced or substantially compensated for by adjustment, and the imaging errors being compensated for by changing the environmental influences by maintaining the adjustment in the imaging operation.
  • the compensation of the disturbing environmental influences on the basis of the objective imaging error By comparing the image with the real structure of a reference object, the compensation of the disturbing environmental influences on the basis of the objective imaging error.
  • systematic imaging errors of the device can also be detected and eliminated. While smaller fluctuations in the disturbance variable are automatically compensated for, greatly changed environmental conditions, for example caused by a new location of the microscope, can easily be taken into account by a calibration cycle in which a new adjustment of the device adapted to the changed conditions is carried out.
  • the device can be recalibrated at predetermined time intervals, which automatically takes into account non-obvious changes in the environmental conditions.
  • the calibration operation is distinguished by the fact that a correlation is established between the imaging error detected in each case and the interference influence detected by a sensor. Conversely, this means that from an interference detected by a sensor outside the device, the imaging error caused by this interference can be inferred and this imaging error can be compensated for. Furthermore, a selected section of the reference object, e.g. B. along a circle, be recorded several times at intervals. In this way, temporally variable imaging errors, for example caused by a building vibration, are recognized. By varying the scanning path, for example by changing the scanning radius, location-dependent imaging errors, i. H. Imaging errors that depend on the scanning location of the exemplary scanning microscope are detected. The device according to the invention is thus set up for detecting and compensating location-dependent and time-dependent imaging errors.
  • the second signal for Setting the transmission characteristic of the filter is advantageously derived on the basis of the data determined during the calibration operation.
  • the device is set up to automatically calibrate the filter during image operation.
  • the calibration is carried out during the normal image mode.
  • the device responds directly to a possibly unnoticed change in the disturbance variable and recalibrates itself by adjusting the transmission characteristic of the filter, the signal applied to the calibration input of the filter being derived from an image analysis in the image processing device.
  • a line-by-line image analysis can be used, for example, to recursively determine the shift in the center of gravity of successive image lines within the overall image and to calculate a second signal from this time shift for actuating the calibration input of the filter.
  • the pixel shifts of the line center of gravity thus serve as the amplitude of the image disturbance.
  • the line frequency allows an assignment of time and frequency for one
  • Correlation analysis when actively activating a compensation signal that is dependent on the disturbance variable ie when activating an actuator and / or a manipulated variable that act on the image and / or the image display. If, parallel to the determined interference amplitude, a sensor arranged outside the device for detecting an environmental influence, which deteriorates the image, is read in at the beginning of each line, this enables the simultaneous recording of image interference and the external interference causing it. This method thus allows a direct calculation of the transfer function of the filter, which is needed to get the To compensate for the disturbance.
  • the image analysis can also include the recursive determination of the shift in the center of gravity of successive images. This is useful, for example, for transmission electron microscopes or light microscopes that use a camera system to display an object.
  • the image errors in two mutually perpendicular directions can be corrected by controlling corresponding actuators and / or actuators by means of a corresponding correlation with the disturbance variables.
  • the camera systems mentioned usually work between 25 and 70 Hz.Although the evaluation and thus the compensation due to digitization is reduced to half the refresh rate, with a basic knowledge of the transfer function between disturbance variable and image interference by extrapolation, the actual transfer function can also go beyond the specified frequency frame be determined. This enables compensation by applying the compensation size even at frequencies that are greater than the image frequency of the camera system used.
  • the forward switched sensor can be dispensed with and only the displacements in two to one another obtained from the image analysis Suitable actuator / actuators are returned to orthogonal directions, which, as in all previous advantageous embodiments, can be assigned to the scanning device and / or the image processing device or can also be further actuators.
  • the invention can be used in a multiplicity of imaging devices and / or devices scanning in a raster mode, which are suitable for producing or viewing or measuring surfaces, for example raster electron microscopes, force microscopes, surface roughness measuring devices, optical scanning microscopes, light microscopes, transmission electron microscopes or lithography systems.
  • FIGS. 1 to 4 show different embodiments of the invention in the form of block diagrams
  • FIG. 2 schematically shows a scanning microscope according to the invention
  • FIG. 3 shows an exemplary one Reference object represents how it can be used for the calibration operation of the microscope of FIG. 2
  • FIG. 4 shows an exemplary signal S of
  • Imaging device shows when the microscope of FIG. 2 scans and detects a reference object in a predetermined way 9 in accordance with the coordinate x at different times in the calibration operation
  • FIG. 5 shows the exemplary correlation between the
  • FIG. 7 shows the time course 17 of the shift of the line
  • FIG. 8 shows an exemplary embodiment of an optical
  • FIG. 1 a shows an exemplary embodiment of the imaging device 1 according to the invention and / or scanning in a raster mode in the form of a
  • the number 1 designates the device without the compensation device for compensating for environmental influences, which can deteriorate the image.
  • the device comprises a sensor 4 outside the device, this sensor 4 emitting a first signal, which depends on the electromagnetic interference field at the location of the sensor, to a digital filter 5, the
  • Transfer characteristic of the filter is set manually.
  • the disturbance U affects both the sensor and the device 1, which is indicated here, but also in FIGS. 1b to 1d, by the arrows emanating from U.
  • the signal After passing through the filter and amplification in a downstream control amplifier 6, the signal is at the deflection coils (3) of the electron beam
  • the control amplifier 6 is used to adapt the output signal of the filter to the actuator and / or to the actuator.
  • a compensation signal ie a signal that depends on the disturbance variable, that is to say the electromagnetic interference field, is thus applied to the actual control signal of the deflection coils.
  • the arrangement of the sensor outside of the device is to be understood according to the invention in such a way that the sensor is arranged in such a way that the activation of the Actuator and / or the actuator has no significant influence on the measurement signal from the sensor 4.
  • the filter 5 By calibrating the filter 5 it is achieved that the applied compensation signal for image acquisition corresponds precisely to an opposite effect, which causes the electromagnetic interference field at the device 1 and thus the effect of the compensation signal activation and the effect of the disturbing electromagnetic field on the image in essentially cancel. If the scanning electron microscope changes location, the filter must be recalibrated to model the transfer function.
  • FIG. 1b shows a block diagram of a device 1 according to the invention, in which the calibration of the filter 5 and thus the calibration of the device is carried out by means of a second signal from an image processing device enclosed by or connected to the image acquisition device 2.
  • Image capture device 7 captures at least one image point of the object and feeds the image processing device 2. As in the first embodiment, the signal from the sensor is fed forward to the deflection coils. A signal for actuating the calibration input of the filter is generated in the image processing device 2. The calibration of the filter 5 and thus the device is described below with reference to two different embodiments.
  • the microscope is set up for operation in a calibration mode and an image mode
  • environmental influences which reduce the imaging quality being achieved in the calibration mode by imaging one
  • comparison of the image with the real structure of the reference object are detected and essentially canceled out by adjusting the microscope and the imaging errors are greatly reduced or substantially compensated for by changing the environmental influences by maintaining the adjustment in the image mode.
  • the input signal of the calibration input of the filter 5 either depends on the imaging error measured (calibration mode) or is obtained using the data stored during the calibration mode (image mode). You can switch back and forth between calibration and image operation.
  • the calibration mode is used to measure environmental influences, i.e. H. in this case, to detect the electromagnetic interference field, which reduces the imaging quality, by imaging a predetermined section of a reference object and comparing the image with the real structure of the reference object and to align the device in such a way that systematic and / or apparatus-related, caused by external environmental conditions Imaging errors are essentially compensated.
  • This adjustment of the microscope is carried out according to the invention by setting the transmission characteristic of the filter.
  • FIG. 3 shows how the scanning device scans a selected section of a reference object in the calibration mode, a stored signal associated with the reference object being compared in the digital image processing device with the image signal of the reference object received from the image recording device and a signal associated with the difference being formed, which is delivered to the calibration input of the filter.
  • the calibration procedure in calibration mode can be described by the following steps: - Determination of a first signal, which depends on the electromagnetic interference field at the location of the sensor, by a sensor 4;
  • this data for generating the determined transfer function of the filter 5 for image operation is stored in a memory assigned to the image processing device 2.
  • the Filter 5 set up to store this data.
  • the devices for compensating the imaging errors are switched off during the determination of the imaging error.
  • the microscope according to the invention is then compared using the method described above, ie the feed-forward coupling for the measurement signal from the sensor is set as a measure of the disturbance variable.
  • the quality of the compensation is measured by scanning the reference object several times and comparing the image with the real structure of the reference object. By determining the quality of the compensation and the corresponding change in the transfer function of the filter, the feedforward is changed iteratively in such a way that the imaging errors of the scanning electron microscope are minimized.
  • the microscope can be adjusted with regard to location and / or time-varying imaging errors.
  • a reference object is scanned in a predetermined way in the calibration mode.
  • the illustrated reference object comprises circular gold deposits deposited on a base, which are arranged in a predetermined manner.
  • a selected section of the reference object is detected by external control of the scanning device of the microscope.
  • This path can be closed, for example, like that shown by curve 9.
  • Individual objects 8 lie on this closed path, to which the image capturing device 2 responds and generates a signal other than zero.
  • FIG. 4 shows schematically and by way of example in FIG. 4, in which the signal curve 10 recorded at a given point in time t ⁇ is shown when passing through the closed curve 9.
  • Time-dependent disturbances can be time-dependent
  • the closed curve was traversed four times at intervals.
  • the resulting four signal curves 10 are therefore also a measure of the temporal Dependence of the disturbance.
  • the curve traversed is varied by varying the radius R, with which location-dependent aberrations can be detected.
  • the time and / or location-dependent imaging error is determined according to the invention.
  • the time-dependent aberration is represented by curve 11.
  • Image operation is the mode of operation of the inventive scanning electron microscope in which the actual sample is measured.
  • the transmission characteristic of the filter determined in the calibration mode cannot be changed during the subsequent image operation with respect to the characteristic defined in the calibration operation. However, as stated above, it can vary in time and depending on the sampling location.
  • the output signal of the filter 5 is passed through to the deflection unit 3 of the electron beam after passing through the control amplifier 6, so that image errors even when the ambient influences change, i.e. the strength of the electromagnetic interference field, are essentially compensated.
  • air vibrations and / or ground vibrations are also detected by appropriate sensors, the signals emitted pass through filters which can be calibrated and assigned to the respective disturbances and have adjustable transmission characteristics and, after an additional adjustment in the control amplifier 6 of the deflection unit, are used as a further control signal and / or other actuators, so that also caused by air vibrations and / or Aberrations caused by ground vibrations can be greatly reduced or substantially compensated for.
  • the device is set up to automatically calibrate the filter during image operation.
  • this embodiment is again described with reference to a scanning electron microscope, but it is not restricted to this.
  • the device essentially comprises the components of the previously described scanning electron microscope, with the exception that the captured image is analyzed in the image processing device and a signal dependent on the analysis is applied as a second signal to the calibration input of the filter.
  • this image analysis comprises the recursive determination of the shift of the center of gravity of successive image lines within the overall image. The analysis is based on the knowledge that images of objects in imaging and / or scanning devices are generally not stable over time due to the influence of the disturbance variables on the image.
  • FIG. 5 illustrates the course of the brightness within four selected image lines, the focal points of the brightness distribution being marked with a circle in each line and curve 15 illustrating the shift of this center of gravity of the lines scanned one after the other.
  • the amount of an exemplary disturbance variable which causes the corresponding pixel shift of the center of gravity within the lines is plotted as curve 14 on the left-hand side in accordance with the respective line detection times. In this way, a correlation can be established between the disturbance variable and the imaging error caused by this disturbance variable.
  • the pixel shift of the line center of gravity from one image line to the next serves as the amplitude of the image disturbance.
  • the line frequency allows an assignment of time and frequency for the correlation in the active compensation signal application of the feedforward signal.
  • the image disturbance and the disturbing influence causing this disturbance can be recorded simultaneously or simultaneously.
  • the direct calculation of the transfer function to be set on the filter 5 is thus possible in order to essentially compensate for the image interference.
  • basic assumptions are made regarding the poles and zeros of the transfer function of the filter and the individual parameters of the variably designed functions are optimized iteratively.
  • d n + 1 (t) d n (t + ⁇ n + 1 - ⁇ n ) + e n (t + ⁇ n + 1 ).
  • a ⁇ pulse can be calculated depending on the line shifts ⁇ n + 1 and ⁇ n :
  • D n ( ⁇ ) is the Fourier transform of the disturbed intensity d n (t).
  • This ⁇ function depends on the difference in the center of gravity of adjacent lines.
  • the center of gravity shift within the lines of an image can thus be recursively calculated, since ( ⁇ n + 1 ⁇ ⁇ n ), as explained above, is known from the image analysis.
  • a signal is generated using a vector correlation, which signal is proportional to the correlation function of the measured disturbance variable and the calculated center of gravity shifts in the individual lines. This correlation is carried out in the digital filter, a second signal being present at the calibration input of the filter, which signal depends on the calculated time shift.
  • a further embodiment of the invention is suitable, for example, for transmission electron microscopes (TEM) or light microscopes or related devices that use a camera system 20 to display the object.
  • the device shown in the block diagram in FIG. 1c corresponds to the optical microscope 18 shown in FIG. 8 in the embodiment described below.
  • the external sensor 4 is designed as a multi-axis vibration sensor, the signal of which via an adjustable filter 5 and an amplifier 6 to an actuator is guided, which in the present embodiment is directly assigned to the image processing device 21 and acts on the image in the latter.
  • the filter, the amplifier and the actuator are not explicitly listed, but are included in the image processing device 21 integrally.
  • an actuator which influences the image, a compensation signal is applied, but instead directly influences the image display.
  • the camera system comprises a CCD camera 19 with a monitor, with an image frequency of 25 Hz.
  • the image processing device 21 is set up for storing successive images.
  • the image shift of the focus of successive images in two mutually orthogonal directions is calculated by image analysis and used to set the transfer function of the digital filter 5 in a manner similar to that in the previously described embodiment.
  • An illustrative representation of this shift in the focus of successive images is shown in FIGS. 6 and 7.
  • Curve 17 of FIG. 7 shows the course of the coordinate x of the center of gravity over time. The differences between two sampling points, e.g. B. t 0 and t 17 thus corresponds to the refresh rate.
  • the transfer function which is defined by the resonance points in the mechanical structure of the microscope, is implemented as a filter 5.
  • a base point vibration X generates a relative movement ⁇ x on the microscope.
  • the general transfer function is thus completely determined by the actual sensitivity ⁇ x / X, the resonance frequency f R and by the parameter Q, which defines the asymptotic drop from ⁇ x / X to high frequencies.

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  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
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  • Microscoopes, Condenser (AREA)
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Abstract

La présente invention porte sur un système d'imagerie et/ou de balayage, plus particulièrement sur un microscope à balayage doté d'un dispositif de compensation des influences environnementales susceptibles de dégrader la qualité de l'image, comprenant un dispositif de collecte d'images, un dispositif de traitement de l'image placé en aval du dispositif de collecte d'images, un dispositif d'imagerie, au moins un filtre électrique et un actionneur et/ou un organe de commande. Avec ce système, un premier signal variant en fonction des influences environnementales traverse le filtre et active un actionneur et/ou un organe de commande, lequel influe sur la représentation et/ou l'imagerie de telle manière que, à l'état calibré du dispositif, caractérisé par le réglage de la courbe de transmission du filtre, la dégradation de l'image s'en trouve nettement atténuée.
PCT/DE1998/001186 1997-05-03 1998-04-29 Dispositif d'imagerie et/ou de balayage a compensation des degradations d'image dues aux facteurs environnementaux WO1998050938A2 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP54760698A JP4232913B2 (ja) 1997-05-03 1998-04-29 周囲により引き起こされた結像悪化を補償する、描写および／または走査装置
EP98932028A EP1018136B1 (fr) 1997-05-03 1998-04-29 Dispositif d'imagerie et/ou de balayage ligne par ligne dote d'un dispositif de compensation des degradations d'image dues aux facteurs environnementaux
US09/423,155 US6884992B1 (en) 1997-05-03 1998-04-29 Imaging and/or raster-mode scanning system provided with a device for compensating the image degradations resulting from environmental factors
DE59811722T DE59811722D1 (de) 1997-05-03 1998-04-29 Abbildende und/oder abtastende vorrichtung mit einer kompensierung von, durch die umgebung verursachter abbildungsverschlechterungen

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19718799.4 1997-05-03
DE19718799A DE19718799A1 (de) 1997-05-03 1997-05-03 Abbildende und/oder in einem Rastermodus abtastende Vorrichtung mit einer Einrichtung zur Kompensation von Abbildungsverschlechterungen, die durch Umgebungseinflüsse verursacht werden

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Publication Number Publication Date
WO1998050938A2 true WO1998050938A2 (fr) 1998-11-12
WO1998050938A3 WO1998050938A3 (fr) 1999-04-29

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US (1) US6884992B1 (fr)
EP (1) EP1018136B1 (fr)
JP (1) JP4232913B2 (fr)
DE (2) DE19718799A1 (fr)
WO (1) WO1998050938A2 (fr)

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CN103794451B (zh) * 2012-10-31 2016-03-16 中芯国际集成电路制造(上海)有限公司 监测扫描电子显微镜的电子束状态的方法和装置
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PATENT ABSTRACTS OF JAPAN vol. 014, no. 065 (E-0884), 6. Februar 1990 & JP 01 286244 A (HITACHI LTD), 17. November 1989 *
PATENT ABSTRACTS OF JAPAN vol. 017, no. 412 (P-1583), 30. Juli 1993 & JP 05 079811 A (NIKON CORP), 30. März 1993 *
PATENT ABSTRACTS OF JAPAN vol. 018, no. 475 (E-1601), 5. September 1994 & JP 06 162982 A (HITACHI LTD), 10. Juni 1994 *
PATENT ABSTRACTS OF JAPAN vol. 097, no. 004, 30. April 1997 & JP 08 321274 A (HITACHI LTD), 3. Dezember 1996 *

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US6884992B1 (en) 2005-04-26
JP4232913B2 (ja) 2009-03-04
DE19718799A1 (de) 1998-11-05
EP1018136A2 (fr) 2000-07-12
EP1018136B1 (fr) 2004-07-28
JP2001523379A (ja) 2001-11-20
DE59811722D1 (de) 2004-09-02
WO1998050938A3 (fr) 1999-04-29

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