WO1997013947A1 - Pene mecanique actionne par le vide - Google Patents

Pene mecanique actionne par le vide Download PDF

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Publication number
WO1997013947A1
WO1997013947A1 PCT/US1995/012513 US9512513W WO9713947A1 WO 1997013947 A1 WO1997013947 A1 WO 1997013947A1 US 9512513 W US9512513 W US 9512513W WO 9713947 A1 WO9713947 A1 WO 9713947A1
Authority
WO
WIPO (PCT)
Prior art keywords
container
plunger
latch
door
mortise
Prior art date
Application number
PCT/US1995/012513
Other languages
English (en)
Inventor
Barry Gregerson
Original Assignee
Empak, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Empak, Inc. filed Critical Empak, Inc.
Priority to PCT/US1995/012513 priority Critical patent/WO1997013947A1/fr
Priority to CA002218185A priority patent/CA2218185C/fr
Priority to EP95936214A priority patent/EP0854964B1/fr
Priority to DE69533628T priority patent/DE69533628T2/de
Priority to JP51500297A priority patent/JP3672929B2/ja
Priority to US08/913,228 priority patent/US5967571A/en
Priority to KR1019970707188A priority patent/KR100418107B1/ko
Priority to TW084111086A priority patent/TW294640B/zh
Publication of WO1997013947A1 publication Critical patent/WO1997013947A1/fr

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67373—Closed carriers characterised by locking systems
    • E—FIXED CONSTRUCTIONS
    • E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05B—LOCKS; ACCESSORIES THEREFOR; HANDCUFFS
    • E05B51/00—Operating or controlling locks or other fastening devices by other non-mechanical means
    • E05B51/02—Operating or controlling locks or other fastening devices by other non-mechanical means by pneumatic or hydraulic means
    • E—FIXED CONSTRUCTIONS
    • E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05C—BOLTS OR FASTENING DEVICES FOR WINGS, SPECIALLY FOR DOORS OR WINDOWS
    • E05C1/00—Fastening devices with bolts moving rectilinearly
    • E05C1/02—Fastening devices with bolts moving rectilinearly without latching action
    • E05C1/06—Fastening devices with bolts moving rectilinearly without latching action with operating handle or equivalent member moving otherwise than rigidly with the bolt
    • E—FIXED CONSTRUCTIONS
    • E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05B—LOCKS; ACCESSORIES THEREFOR; HANDCUFFS
    • E05B63/00—Locks or fastenings with special structural characteristics
    • E05B63/14—Arrangement of several locks or locks with several bolts, e.g. arranged one behind the other
    • E05B63/143—Arrangement of several locks, e.g. in parallel or series, on one or more wings

Definitions

  • This invention relates generally to a mechanical latch for securing a door or lid to a container. More specifically, this invention relates to a vacuum actuated mechanical latch, which latches the door to the container, retaining the door in a hermetically sealed position. Jarring or bumping the container will not disengage or release the latch from the container.
  • a SMIF system includes a hermetically sealable container used to transport a semiconductor substrate made from the sensitive materials.
  • a SMIF cassette is typically used to confine the semiconductor substrate within the SMIF container.
  • the semiconductor substrate may include a wafer, LCD, flat panel display, and or memory disks. For discussion purposes, and without limitation, reference will be made to semiconductor wafers.
  • the size of the particulate that is damaging to the semiconductor wafer is determined by the geometry of the semiconductor. As the geometry of the semiconductor decreases, the size of the particulate to be eliminated likewise decreases. The presence of vapors or static discharge in the environment also impairs the production of semiconductors, including the wafers themselves. Hence, use of materials having low outgassing characteristics is desired.
  • the isolation structure or SMIF container is hermetically sealed from the external environment by a door or lid and is opened only when engaged in a clean mini- environment by the port door of a processing tool. In this way, risk of contamination is substantially reduced. Thus, it is important that the door of the SMIF container remain hermetically sealed, unless disengaged by the processing equipment in a clean environment.
  • a need exists for a latch which, among other things: (1) may be engaged and disengaged efficiently by processing equipment; (2) is not easily overcome by bumping or jarring the container; (3) minimizes generation of contaminating particulate during actuation of the latch; and (4) isolates and removes particles abraded from the latch so such particles do not contaminate the contents of the container.
  • the present invention provides such a latch.
  • the present invention provides a vacuum actuated mechanical latch that may be used to secure a door to the opening of a container.
  • the latch is designed to minimize generation of particulate as it is actuated.
  • the latch is also designed to isolate and remove particulate generated by the latch, so that such particulate does not contaminate the interior of the container or surrounding environment.
  • the vacuum actuated mechanical latch is adapted to be used on any hermetically sealed container, however, for illustrative purposes reference will be made to a SMIF container. Those skilled in the art will recognize that the vacuum actuated mechanical latch may be adapted for use on other type or sized containers.
  • the vacuum actuated mechanical latch comprises a housing, a plunger, and a compression spring.
  • the housing has a mortise provided therein, whereby the plunger is slidable within the mortise between a first locking position and a second retracted position.
  • the mortise extends from an outer surface of the housing, defining an opening into the housing.
  • the mortise terminates within the housing, forming a closed end of the mortise.
  • the compression spring serves to bias the plunger through the mortise, toward the first locking position.
  • a duct extends into the mortise through which a vacuum can be applied to overcome the force of the spring, thereby actuating the plunger from the first locking position to the second retracted position.
  • the latch is attached to the outer bottom surface of the door which is hermetically sealed to a container.
  • the container has four enclosed sides, an enclosed top, and an open bottom. The open bottom is surrounded by a lip. Recesses are formed on an inner surface of the lip of the container. When the plunger is in the first locking position, each recess mates with the plunger of a corresponding latch, thereby securing the door to the container.
  • the latch may instead be formed integral within the container, latching to a recess formed within the door. In a preferred embodiment, separate latches engage each interior side of the container.
  • the vacuum is applied through the duct which extends into the mortise proximate the closed end of the mortise.
  • a vacuum is applied through the duct strong enough to counteract the force of the compression spring, thereby drawing the plunger and head into the mortise.
  • the plunger and mortise have distinct compatible shapes.
  • the plunger consists of a barrel having a head formed on one end of the barrel and a seat formed on the other end of the barrel.
  • the compression spring is positioned between the seat of the plunger and the closed end of the mortise.
  • the barrel has a shoulder extending longitudinally from the end distal to the head, which tapers from a larger first diameter to a smaller second diameter. This taper serves as a stop which prevents the plunger from sliding completely out of the housing.
  • the plunger may have a recess extending into the plunger along the longitudinal axis of the barrel portion. A portion of the compression spring may be positioned within this recess. Additionally, an annular channel may be formed within the planar surface of the seat. A gasket or o-ring is positioned within the channel formed in the seat .
  • the latches are formed within the door itself .
  • the door serves as the housing for all four latches.
  • a mortise is provided on each side of the door, whereby the plunger is slidable within the mortise between a first locking position and a second retracted position.
  • a duct extends from the bottom surface of the door into each mortise. In this manner, a port door of the processing tool may seal to the outer perimeter of the door, creating a manifold which links all the ducts of the several latches to a central vacuum line.
  • the latch in another alternate preferred embodiment, includes a flexible elastomeric seal attached to the head of the plunger.
  • the seal creates a vacuum chamber within a cavity of the mortise and further isolates the plunger and spring from the external environment.
  • at least three important advantages are provided by such vacuum actuated mechanical latches.
  • the vacuum serves to draw out of the latch any particles that may be generated.
  • Another object of the present invention is to provide a latch for a SMIF container that is not overcome by jarring or bumping forces.
  • a further object of the present invention is to provide a latching system that includes a means for indicating to the processing equipment that the latch is in an open position.
  • Still a further object of the present invention is to provide a latching system that seals from the external environment a major portion of the moving mechanisms contained within the latch.
  • Yet a further object of the present invention is to provide a latching system that reduces the amount of external vacuum required to actuate the latch.
  • FIG. 1 is an exploded perspective view of the container and door which are elevated above a portion of the processing equipment.
  • Figure 2 is a perspective view of the latch removed from the door.
  • Figure 3 is a top planar view of the bottom half of the latch housing of the type shown in Figure 2 with the plunger in the first locking position.
  • Figure 4 is a bottom planar view of the top half of the latch housing of the type shown in Figure 2.
  • Figure 5 is a top planar view of the bottom half of the latch housing of the type shown in Figure 2 with the plunger in the second retracted position.
  • Figure 6 is a perspective end view of the plunger of the type shown in Figure 3.
  • Figure 7 is a top planar view of the plunger of the type shown in Figure 3 with the compression spring removed.
  • Figure 8 is an exploded partial sectional side elevational view of an alternate preferred container and door elevated above an alternate preferred embodiment of the processing equipment.
  • Figure 9 is a top planar view of an alternate preferred embodiment of the bottom half of the latch housing with the plunger in the first locking position.
  • Figure 10 is a top planar view of still another alternate preferred embodiment of the bottom half of the latch housing with the plunger in the first locking position.
  • FIG. 1 there is shown generally a container 10 and door 12 elevated above a port door of the semiconductor wafer processing tool 14.
  • the container 10 has an enclosed top 16 and sidewalls 18.
  • a lip 20 extends around the perimeter of the container 10, defining the open end 22 of the container 10.
  • a sealing surface 24 is formed on an interior portion 26 of the lip 20.
  • a latching recess 28 is formed within the interior portion 26 of the lip 20 below the sealing surface 24, on each interior side of the container 10.
  • the door 12 is planar in shape and dimensioned to seal against sealing surface 24 of the container 10.
  • a compressible seal 30 (not visible) is aligned on the upper surface perimeter 32 of the door 12 which engages with the sealing surface 24 of the lip 20.
  • Approximately five pounds of compressive force is necessary to hermetically seal the door 12 to the container 10.
  • Latches 34 are attached by known means to the door 12 and aligned to correspond with the latch recesses 28.
  • each latch 34 engages the corresponding recess 28 of the container 10, thereby preventing removal of the door 12.
  • the engaged latch 34 also inhibits the door 12 from moving or jarring out of sealable engagement with the container 10.
  • the latch inhibits removal of the door 12 from the container 10, even in situations where the container is mishandled or inverted.
  • the container 10 is preferably molded of a combination of polycarbonate and approximately 10-30% by volume polytetrafluoroethylene (PTFE)
  • the door 12 is preferably molded of polycarbonate
  • latch 34 is preferably manufactured from a low outgassing, low coefficient of friction, and high dielectric constant material.
  • DELRIN ® available from E.I. duPont de Nemours & Co. (Inc. ) .
  • the latch 34 is generally shown.
  • the latch 34 comprises a housing 36, plunger 38 and a compression spring 40.
  • the shape of the plunger 38 dictates that the housing 36 consist of a top and bottom member 42 and 44.
  • the shape of the plunger may vary such that the housing may be constructed of one singular member.
  • the top and bottom members 42 and 44 may be fastened together through bores 46 with self tapping screws or may be bonded together by other known means.
  • the specific components of the latch 34 will now be discussed in greater detail.
  • top and bottom housing members 42 and 44 are shown in greater detail.
  • the top housing 42 has an upper mortise 50 formed therein
  • the bottom housing 44 has a lower mortise 52 formed therein.
  • the upper and lower mortise 50 and 52 align and form generally the mortise 48 of the housing 36.
  • the upper and lower mortise 50 and 52 are identical.
  • the mortise 48 extends partially into the housing 36 to a closed end 54 of the mortise.
  • An open end 56 of the mortise is formed on an outer end surface 58 of the housing 36.
  • the mortise 48 has the overall shape of the plunger 38.
  • the mortise 48 includes a first cylindrical section 60, a tapered section 62 tapering from the first cylindrical section 60 to a second smaller cylindrical section 64.
  • the second cylindrical section 64 extends to a cavity 66 which opens to the outer end surface 58 of the housing 36 (see Figure 4) .
  • a vacuum duct 68 extends from a bottom surface 70 of the bottom housing 44 into the closed end 54 of the mortise 48.
  • the plunger 38 is generally shown. In use the plunger 38 is mounted within the mortise 48 for slidable movement between a first closed locking position 72 (shown in Figure 3) and a second open position 74 (shown in Figure 5) .
  • the plunger 38 comprises a barrel or body 76 having a head 78 formed on one end and a seat 80 formed on the other.
  • a tapered shoulder 82 tapers from a larger diameter 84 starting proximate the seat 80 of the plunger 38 to a second smaller diameter 86 along the longitudinal axis of the barrel 76.
  • the head 78 of the plunger 38 has an angled lead-in surface 88, which minimizes friction when the plunger is forced into the recess 28 of the container 10.
  • the seat 80 of the plunger 38 has a recess 90 that extends into the barrel 76 along the longitudinal axis of the barrel 76.
  • the compression spring 40 is inserted into this recess 90, thereby allowing the use of a longer compression spring.
  • the compression spring 40 is positioned between the closed end 54 of the mortise 48 and the plunger 38.
  • the compression spring 40 is dimensioned to bias the plunger 38 toward the first locking position 72.
  • an annular channel 72 is formed along the perimeter of the seat's 80 planar surface.
  • a replaceable gasket or o-ring 94 may be engaged within the channel 92 of the seat 80.
  • the diameter of vacuum duct 68 is smaller than the outer diameter of the seat 80 and inner diameter of the o-ring 94.
  • the o-ring 94 seals against the closed end 54 of the mortise 48.
  • the vacuum duct 68 may extend from an outer surface of the housing 36 into other portions of the mortise 48. However, extending the duct 68 into the closed end 54 of the mortise 48, minimizes the amount of vacuum necessary to retract the plunger 38 to the second open position 74.
  • the shoulder 82 of the plunger 38 and the tapered section 62 of the mortise 48 are dimensioned so that, when the compression spring 40 forces the plunger 38 to P T/US95/12S13
  • the shoulder 82 acts as a stop against the tapered section 62 of the mortise 48, thereby restricting the travel distance of the plunger 38 (see Figures 3 and 5) .
  • the head 78 of the plunger 38 is dimensioned slightly smaller than the open end 56 of the mortise 48.
  • a lip 96 is formed on the plunger's head 78. When the plunger's head 78 is forced through the opening 56 of the housing 36, the lip 96 contacts an inner perimeter surface 98 (see Figure 4) of the open end 56 of the mortise 48, blocking the open end 56. When the lip 96 of the head 78 is in a blocking position, any particulate generated from the sliding movement of the plunger 38 is trapped within the mortise 48.
  • the vacuum is applied to disengage the latch 34 from the container 10, the vacuum suctions away any particulate contained within the mortise 48.
  • a vacuum is applied through vacuum duct 68 to overcome the spring 40.
  • Using a vacuum to move the plunger 38 also offers the advantage of creating a cushion of air between the plunger 38 and mortise 48 to reduce scrapping. Applying such a vacuum also serves to draw through the vacuum any particulate which may be formed within the latch 34.
  • a slight vacuum may be applied sufficient to create the air cushion and draw particle through the latch 34 and out the duct 68, but not sufficient to overcome the biasing force of the spring 40.
  • FIG. 8 an alternate preferred embodiment is shown, wherein the door 12 has latches 34 formed within the door 12 itself.
  • the door 12 serves as the housing 36 for all four latches 34.
  • a mortise 48 is provided on each end of the door 12, whereby the plunger 38 is slidable within the mortise 48 between the first locking position 72 and a second retracted position 74.
  • Each vacuum duct 68 extends from the bottom surface 100 of the door 12 into the closed end 54 of each mortise 48.
  • a replaceable seal 102 of known construction is positioned around the perimeter of the port door 104 of the processing equipment 14. In this manner, the port door 104 of the processing 14 seals the outer bottom surface 100 of the door 12, creating a manifold which links all the vacuum ducts 68 of the several latches 34 to a central vacuum reservoir 106 through central line 108.
  • a vacuum cavity 112 is formed within the mortise.
  • the cavity has an opening 114 through which the plunger barrel 76 slides.
  • One end of a replaceable bellow 116 is attached in a groove 118 within the mortise 48 on an external side of the vacuum cavity 112.
  • the other end of the bellow 116 is attached to the head 78 of the plunger 38, thereby sealing a major portion of plunger 38 from the external environment.
  • the atmospheric pressure will keep the bellow 116 pushed inward as long as the vacuum is being applied.
  • the bellow 116 is preferably made from a flexible elastomeric polymer, such that as the plunger 38 moves between the first locking position 72 and the second retracted position 74, the bellow simply folds back onto itself. The bellow also enhances the suctioning ability of the processing equipment vacuum.
  • Figure 10 illustrates yet another alternate preferred embodiment of the latch 34.
  • a single fold bellow has one end attached by known means to the housing 36 and the other end is attached to the head 78 of the plunger 38, thereby sealing a major portion of plunger 38 from the external environment.
  • the cavity 66 of the mortise 48 serves as the vacuum cavity 112.
  • the flexible elastomeric properties of the bellow may eliminate the need for the compression spring 40, thereby forcing the plunger to the first locking position when the amount of applied vacuum is decreased.
  • bellow 116 or spring 40 may act as a means for forcing the plunger into the first locking position, wherein both the spring and bellow are retractable to the second open position.
  • the o-ring 94 may not be necessary since the plunger 38 is sealed within the housing 36 by the bellow 116.
  • a retainer ring 120 of known construction may be used to retain the bellow 116 against the outer end surface 58 of the housing 36.
  • the user centers the door 12 over the port door 104 of the processing equipment 14 such that each latch 34 is aligned with a suction 110 of the processing equipment 14.
  • a negative vacuum is applied through each suction 110, thereby drawing the plunger 38 from the first locking position 72 to a second open position 74.
  • a vacuum reservoir 106 may be necessary to minimize the amount of time necessary to create a suction sufficient to draw the plunger 38 to the second open position 74.
  • the reservoir may be used as an indication of when the latches 34 are in the open position 74.
  • a pressure gauge may be linked in communication with the processing equipment 14, wherein, once the change in pressure reaches a predetermined threshold the processor or user may deduce that the latch 34 is in the second open position 74.
  • a force is applied to the door 12 in order to compress the seal 30 and hermetically seal the container and door.
  • the vacuum is released enough to allow the spring 40 to bias the plunger 38.
  • the compression spring 40 forces the plunger 38 through the mortise 48 open end 56 to the first locking position 72.
  • the compressive force against the container 10 may then be released.
  • the container remains latched and hermetically sealed to the door.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Pressure Vessels And Lids Thereof (AREA)

Abstract

Pêne mécanique (34) actionné par le vide pouvant se fixer à un réceptacle (10) se fermant hermétiquement. Le pêne (34) est fixé, formé ou intégré dans la porte (12) du réceptacle. Le pêne s'engage et se désengage facilement par un outillage de fabrication (14). Il (34) est également conçu pour réduire la quantité de matières particulaires abrasives et assure en outre l'isolation de n'importe quelle matière particulaire générée. De plus, lorsque la porte (12) est enclenchée sur le réceptacle (10), le pêne (34) résiste aux secousses ou aux coups. La surface d'attaque (88) du pêne (34) est à l'oblique de façon à réduire la friction lorsque celui-ci (34) est poussé dans une première position de verrouillage.
PCT/US1995/012513 1995-10-13 1995-10-13 Pene mecanique actionne par le vide WO1997013947A1 (fr)

Priority Applications (8)

Application Number Priority Date Filing Date Title
PCT/US1995/012513 WO1997013947A1 (fr) 1995-10-13 1995-10-13 Pene mecanique actionne par le vide
CA002218185A CA2218185C (fr) 1995-10-13 1995-10-13 Pene mecanique actionne par le vide
EP95936214A EP0854964B1 (fr) 1995-10-13 1995-10-13 Pene mecanique actionne par le vide
DE69533628T DE69533628T2 (de) 1995-10-13 1995-10-13 Vakuumangetriebener mechanischer riegel
JP51500297A JP3672929B2 (ja) 1995-10-13 1995-10-13 真空駆動機械ラッチ
US08/913,228 US5967571A (en) 1995-10-13 1995-10-13 Vacuum actuated mechanical latch
KR1019970707188A KR100418107B1 (ko) 1995-10-13 1995-10-13 진공작동형기계식래치및그래치를구비한컨테이너
TW084111086A TW294640B (en) 1995-10-13 1995-10-20 Vacuum actuated mechanical latch

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/US1995/012513 WO1997013947A1 (fr) 1995-10-13 1995-10-13 Pene mecanique actionne par le vide
CA002218185A CA2218185C (fr) 1995-10-13 1995-10-13 Pene mecanique actionne par le vide

Publications (1)

Publication Number Publication Date
WO1997013947A1 true WO1997013947A1 (fr) 1997-04-17

Family

ID=25679714

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1995/012513 WO1997013947A1 (fr) 1995-10-13 1995-10-13 Pene mecanique actionne par le vide

Country Status (3)

Country Link
EP (1) EP0854964B1 (fr)
CA (1) CA2218185C (fr)
WO (1) WO1997013947A1 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1544122A2 (fr) * 2003-12-18 2005-06-22 Miraial Co., Ltd. Dispositif de couvercle pour un récipient de plaques minces
EP1589565A1 (fr) * 2004-04-21 2005-10-26 Alcatel Dispositif pour le transport de substrats sous atmosphère controlée
EP1646082A1 (fr) * 2004-10-09 2006-04-12 Power Geode Technology Co., Ltd. Un conteneur de stockage pour un conteneur de transport de plaquettes
KR100545427B1 (ko) * 1997-09-01 2006-07-25 신-에쓰 한도타이 가부시키가이샤 수송용기
US7735648B2 (en) 2004-04-21 2010-06-15 Alcatel Transport pod with protection by the thermophoresis effect

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US4674939A (en) * 1984-07-30 1987-06-23 Asyst Technologies Sealed standard interface apparatus
US4674936A (en) * 1985-08-26 1987-06-23 Asyst Technologies Short arm manipulator for standard mechanical interface apparatus
US4724874A (en) 1986-05-01 1988-02-16 Asyst Technologies Sealable transportable container having a particle filtering system
US4995430A (en) * 1989-05-19 1991-02-26 Asyst Technologies, Inc. Sealable transportable container having improved latch mechanism
US5291923A (en) 1992-09-24 1994-03-08 Internatinal Business Machines Corporation Door opening system and method
US5370491A (en) * 1990-11-01 1994-12-06 Asyst Technologies, Inc. Method and apparatus for transferring articles between two controlled environments

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Publication number Priority date Publication date Assignee Title
GB191100657A (en) * 1911-01-10 1912-01-04 Ernest Walter Bon An Improved Method of and Means for Bolting and Unbolting the Doors of Railway Carriages and Wagons and the like.
GB191414662A (en) * 1914-06-18 1914-12-17 William Thompson A New or Improved Door Lock.
US2530628A (en) * 1947-10-20 1950-11-21 Frank T Pivero Automatic door locking device

Patent Citations (6)

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Publication number Priority date Publication date Assignee Title
US4674939A (en) * 1984-07-30 1987-06-23 Asyst Technologies Sealed standard interface apparatus
US4674936A (en) * 1985-08-26 1987-06-23 Asyst Technologies Short arm manipulator for standard mechanical interface apparatus
US4724874A (en) 1986-05-01 1988-02-16 Asyst Technologies Sealable transportable container having a particle filtering system
US4995430A (en) * 1989-05-19 1991-02-26 Asyst Technologies, Inc. Sealable transportable container having improved latch mechanism
US5370491A (en) * 1990-11-01 1994-12-06 Asyst Technologies, Inc. Method and apparatus for transferring articles between two controlled environments
US5291923A (en) 1992-09-24 1994-03-08 Internatinal Business Machines Corporation Door opening system and method

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP0854964A4 *

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100545427B1 (ko) * 1997-09-01 2006-07-25 신-에쓰 한도타이 가부시키가이샤 수송용기
EP1544122A2 (fr) * 2003-12-18 2005-06-22 Miraial Co., Ltd. Dispositif de couvercle pour un récipient de plaques minces
EP1544122A3 (fr) * 2003-12-18 2009-04-01 Miraial Co., Ltd. Dispositif de couvercle pour un récipient de plaques minces
US7784640B2 (en) 2003-12-18 2010-08-31 Miraial Co., Ltd. Lid attaching mechanism with camming unit for thin-plate supporting container
EP1589565A1 (fr) * 2004-04-21 2005-10-26 Alcatel Dispositif pour le transport de substrats sous atmosphère controlée
FR2869452A1 (fr) * 2004-04-21 2005-10-28 Alcatel Sa Dispositif pour le transport de substrats sous atmosphere controlee
US7694700B2 (en) 2004-04-21 2010-04-13 Alcatel Apparatus for transporting substrates under a controlled atmosphere
US7735648B2 (en) 2004-04-21 2010-06-15 Alcatel Transport pod with protection by the thermophoresis effect
EP1646082A1 (fr) * 2004-10-09 2006-04-12 Power Geode Technology Co., Ltd. Un conteneur de stockage pour un conteneur de transport de plaquettes

Also Published As

Publication number Publication date
CA2218185A1 (fr) 1997-04-17
EP0854964B1 (fr) 2004-10-06
EP0854964A1 (fr) 1998-07-29
EP0854964A4 (fr) 2000-11-15
CA2218185C (fr) 2005-12-27

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