A 7 如 4640__^_____ 五、發明説明（/ ) (讀先閱讀背面之注意事項再填寫本页) 發明背景 1 ·發明之領域 本發明一般係關於一機械閂鎖以供固定一門或一蓋子 至一容器。尤其，本發明係關於一真空驅動式櫬械問鎖’ 其鎖固門至容器’令門保持於一密封的位置。振動或撞擊 容器將不會令閂鎖由容器上脫離或脫開° 2.相鼸前技之說明 用Μ生產半導體的材料污染的敏感性係半導體製造所 要面對的很大的一個問題。標準化機械界面（SMiF) 系铳已經設計Μ於這些敏感材料的加工、運输或儲存過程 中滅少由懸浮於空氣中的粒子和煙霧傳播的污染。一標準 化機械界面（SM IF)系统包括一用以運輸由敏感材料 製成之半導體基片的可密封容器。一標準化機械界面（S M IF)箱係一般用K將半専體基片密閉於標準化機械界 面（SMIF)内。該半導體基體可包括一晶圓、液晶顯 示器、平面控制顯示器和或記憶磁碟。為討論目的而無 限制之意，Κ下將參照半専體晶圓來說明。 於半導體晶圓的加工、運輸和儲存過程中，半導體晶 圓與破壞粒子的隔雜必須為嚴格的。該對半導體晶圓產生 破壊的粒子之尺寸係藉由半導體之外形尺寸決定。當該半 導趲之外形尺寸減少，將被分離的粒子的尺寸亦同揉滅少 -3 - 本紙张尺度適用中國國家標车（CNs ) a4規格（210Χ297公釐） A7 B7 五、發明説明 ( > ) 1 1 I 〇 於 環 境 中 存 在 之 蒸 氣 或 靜 態 的 釋 放 亦 損 害 包 括 晶 圓 自 身 1 1 1 之 半 導 體 的 製 造 0 是 以 期 望 所 使 用 之 材 料 具 有 低 漏 氣 特 1 I 請 1 I 激 Q 先 閱 1 I 讀 1 可 Μ 發 現 對 包 含 半 導 體 晶 圓 的 標 準 化 機 械 界 面 ( S Μ 背 1 之 1 I F ) 系 統 輕 MiL· 微 的 磨 損 會 產 生 破 壞 粒 子 〇 靜 電 可 吸 引 該 磨 注 I 意 I 損 之 破 壊 粒 子 至 標 準 化 機 械 界 面 ( S Μ I F ) 容 器 之 内 部 事 項 1 | 再 1 I 表 面 或 至 半 導 體 晶 圓 自 身 0 當 粒 子 被 吸 至 標 準 化 機 械 界 面 填 寫 本 ( S Μ I F ) 内 表 面 時 作 動 容 器 可 令 粒 子 懸 浮 於 空 氣 中 页 、- 1 I 落 於 半 導 體 上 並 随 之 損 壞 半 導 體 晶 圓 0 於 標 準 化 m 械 界 1 1 面 ( S Μ I F ) 容 器 内 循 環 或 過 瀘 空 氣 或 其 它 氣 體 不 會 真 1 1 正 令 粒 子 由 該 標 準 化 機 械 界 面 ( S Μ I F ) 容 器 之 内 表 面 1 訂 1 I 去 除 0 儘 管 可 >λ 清 m 但 將 吸 附 於 容 器 内 表 面 之 粒 子 完 全 清 除 乾 淨 係 為 困 難 的 0 1 1 於 半 専 體 的 運 輸 加 工 和 儲 存 過 程 中 保 持 一 充 分 清 1 1 的 環 境 係 極 為 關 鐽 的 0 動 加 工 設 備 已 經 發 展 為 令 半 導 體 1 晶 圓 與 败 壊 粒 子 的 接 觸 和 暴 露 減 為 最 低 程 度 0 同 樣 保 護 Ί | 晶 圓 之 容 器 或 絕 緣 结 構 亦 已 發 展 且 得 Η 藉 由 加 工 設 備 遙 1 1 控 0 一 般 該 隔 絕 機 構 或 標 準 化 機 械 界 面 ( S Μ I F ) 容 1 1 器 係 藉 由 一 擋 門 或 蓋 子 與 外 界 隔 離 且 僅 當 藉 由 一 加 工 工 具 1 I 之 排 氣 門 與 — 清 潔 的 較 小 環 境 接 觸 時 係 為 開 放 的 〇 Μ 如 此 1 1 之 方 式 被 污 染 的 風 險 顯 著 減 少 〇 藉 此 標 準 化 機 械 界 面 1 1 ( S Μ I F ) 容 器 門 保 持 密 封 態 係 為 重 要 的 除 非 其 藉 由 1 I 加 工 設 備 於 清 潔 環 境 中 被 脫 4- 離 〇 1 1 1 1 本纸張尺度適用中國國家標準（CNS ) A4規格（210X 29?公釐） A7 294640_B7_ 五、發明说明（）） (請先閱讀背面之注意事項再填寫本页) 一旦一密封已經形成，該摟門必須保挎固定於容器。 各種閂鎖設置已發展Μ固設擋門於容器上，而將機構作動 和粒子產生的數量減至最小。一如此裝置於美國專利第5 ，29 1 ，923號藉由Gallagher et al.揭示。此專利 揭示了一塑性的、可折叠之隔膜或水泡型密封圈。一真空 狀態經由一導管被施加於用Μ密封一標準化機喊界面（S M IF)容器之一閉合元件的內部。當該真空狀態被施加 時，該密封圈折叠Μ此允許該容器門作動。當該真空狀態 被釋放時*該密封圈慢慢膨脹至其原來形吠。為減少該密 封圈膨脹至其原有形狀並封密該門至容器的時間，可施加 一正向颳力。 藉由Gallagher e t a 1 ·揭示之構造已經證實可有效用 於各種環境。然而•剌烈的振動或撞擊可令容器門由容器 上脫離，污染髄存於容器内的半導體晶圓。如此之振動和 撞擊於一般的製造工廠内經常發生。亦，該真空構造提升 了以供加工設備將擋門嚙合於容器或由容器脫離的必須時 間。藉此，需要存在一閂鎖元件其可以快速噛合或脫離並 不會藉由振動或撞擊而輕易脫離。 各種機械閂鎖，諸如於美國專利第4，7 2 4 . 8 7 4號藉由Parikh et al.揭示之閂鎖已經較為成功的使用。 然而，如此之閂鎖設計於閂鎖嚙合和脫離時消除粒子的產 生之作用係為失敗的。如上所提及，任何數1之粒子的產 生可Κ ί員埭半導體晶圓。 -5 - 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） 204640 五、發明説明（f) 是Μ，需要存在一閂鎖，其具有以下特激：鏟可以藉 由加工設餚有效嚙合和脫離；鏃藉由振動或撞擊容器不輕 易脫離；鏈於該閂鎖的驅動過程中令污染粒子的產生減至 最少；和鏜由閂鎖隔離和除去磨損之粒子以此該等粒子不 會污染容器中所存放之物質。本發明提供如此一閂鎖。 本發明提一真空驅動式機械門鎖其可用以固設一擋門 至一容器的開口處。該閂鎖被設計為當門鎖被驅動時將粒 子之產生減至最少。該閂鎖亦被設計為藉由閂鎖隔離和除 去已產生的粒子，以此該等粒子不會污染容器內部或周圍 環境。該真空驅動式機械閂鎖適於使用於任何密封容器， 然而為說明之目的將參照使用於一標準化機械界面（SM IF)容器。那些熟識此項技藝之人士將認識到該真空驅 動式機械閂鎖可K適用於其它類型或尺寸之容器。 於較佳實施例中，該真空驅動式櫬械閂鎖包括一殻體 ，一柱塞和一壓縮彈簧。該殻體具有一設置於其中之榫槽 ，藉此該柱塞得以於一第一鎖定位置和一第二收回位置間 可滑動地嚙合於榫槽内。該榫樓延伸通過殼體之外表面以 界定一進入殼體之開口。該榫漕终止於殻體內以形成該榫 榷之一封閉端。當該柱塞係位於第一鎖定位置時，該柱塞 之一部分經由該毅體之開口延伸超出殺體。該壓縮强簧用 Μ經由該榫槽偏置柱塞朗向第一鎖定位置。一導管延伸進 入榫槽經由該導管一真空狀態可被施加以克服強簧力，藉 此驅動該柱塞由第一鎖定位置至第二收回位置。 本紙張尺度逋用中國國家標準（CNS ) Α4規格（210Χ 297公釐） ，心 訂 (請先閱讀背面之注意事項再填寫本页) A7 B7 五、發明説明（< ) (請先閱讀背面之注意事項再填寫本頁) 該閂鎖係連接至密封於一容器之容器門底部外表面。 該容器具有四封閉側邊、一封閉頂部和一開通底部。該開 通底部藉由一蓋子環繞。凹槽形成於容器蓋子一内表面上 。當該柱塞位於第一鎖定位置時，各者凹槽匹配一相應問 鎖之柱塞，藉此固設該擂門至容器上。當然，該閂鎖可被 與容器内一體成型閂合至形成於門内之凹槽的閂鎖代替。 於一較佳實施例中，隔離閂鎖嚙合容器之各者内側。那些 熟識此項技藝之人士將認識到當該容器或箱室偽為圓往形 時•例如相等間隔的三個閂鎖將足Μ保持該門密封於該容 器上。 當該門固設於容器上時，一真空狀態被施加於該閂鎖 Μ由該凹槽拉回閂鎖。當該閂鎖藉由真空狀態拉回時*任 何閂鎖内之粒子藉由真空狀態被抽離閂鎖·Μ此該等粒子 不會污染容器内部或外部環境。當該真空狀態被減少以此 該彈簧偏置柱塞朝向鎖定位置，一較低程度的真空狀態可 施加以創造一負向壓力，當該柱塞經由榫槽滑動唯合時， 該負向壓力可除去產生的粒子。 該真空狀態經由延伸入榫槽並接近榫槽的封閉端之導 管施加。經由導管施加之一真空狀態足夠強烈以抵消壓縮 彈簧之壓力，藉此牽引柱塞並以頭部進入榫槽。當該柱塞 頭部凸出於殺體·該柱塞係位於第一鎖定位置，而當柱塞 頭部拉回至榫槽内時，該柱塞係位於第二收回位置。該藉 由壓縮彈簧施加的壓力應足Μ令柱塞保持於鎖定位置，甚 本纸伕尺度適用中國國家標準（CNS ) Α4規格（210Χ 297公釐） A7 B7 五、發明説明（心） 至當該容器被振動或撞擊時。 (請先閱讀背面之注意事項再填寫本頁) 於該較佳實施例中，該柱塞和榫樓具有相互匹配的形 狀。該柱塞包括一具有一頭部形成於一端而一座體形成於 另一端之隔板。該壓縮彈簧位於柱塞座體和榫槽封合端之 間。該隔板具有一由遠端至頭部縱向延伸之突肩，該突肩 由一較大的第一直徑至一較小的第二直徑逐漸遞減。該维 塊作為一擋塊防止柱塞由殻體中完全滑出。 該柱塞可具有沿隔板部分之縱向軸線延伸進入柱塞之 一凹槽。該壓縮彈簧之一部分可位於該凹槽内。另，一環 形通道可形成於座體之内平面内。一墊圈或0形環設置於 形成於座體内之通道。當該柱塞藉由真空狀態被牽引至第 二開啟位置時，該0形環密封嚙合於榫槽之封合端。 當該柱塞密封於榫槽之閉合端時，該真空態壓力改變 。此壓力之改變可作為一加工設備之指示器用以指示該Η 鎖折合至第二開啟位置。於柱塞密封於榫槽封閉端之前* 任何藉由閂鎖產生之粒子藉由真空装置吸入，進一步令半 導體晶圓與任何破壞粒子隔離開。 於一變換較佳實施例中，該閂鎖形成於容器門自身内 。該容器門作為殼體以供容納四個閂鎖。一榫槽提供於容 器門之每一側，藉此該柱塞於一第一鎖定位置與一第二收 回位置間滑動哨合於榫槽內。一導管由容器門之底部表面 延伸至各者榫懵。以如此之方式，加工工具之出氣口擋板 可封閉容器門之外部，創造一集氣管其連接幾個閂鎖所有 -8 ~ 本紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ 297公釐） A7 B7 五、發明説明（/ ) 導管至一中心真空導入管。 於另一變換較佳實施例中，該閂鎖包括連接至該柱塞 之頭部之一塑性彈性體密封圈。該密封圈於榫槽之小室内 設立了一真空小室且進而令柱塞和彈簧與外界環境隔離。 不限制但至少有三個重要優點藉由如此之真空驅動式 機械閂鎖提供。首先，該擋門和容器係牢固的保持於一起 。第二，當該閂鎖被驅動時* 一氣墊存在於榫槽和柱塞之 間Μ令拄塞浮動於榫槽内，藉此當該柱塞滑入榫槽時，減 少榫懵與柱塞間的摩擦。第三，該真空狀態用Κ將任何可 以產生之粒子牽引離開閂鎖。藉此•該設計提供幾個獨特 之優點。 本發明之基本目的係為提供二真空驅動式機械閂鎖以 供固設一擋門至一容器。 本發明之另一目的係為提供一用Μ—標準化機械界面 (SM IF)容器之閂鎖其不會藉由振動或撞擊力而脫離 0 本發明之再一目的係為提供一機械閂鎖其將產生的粒 子減至最少並藉由閂鎖將此些粒子隔離。 本發明之又一目的係為提供一閂鎖其藉由自動加工設 備較易有效的嚙合和脫離。 本發明之還一目的係為提供一閂鎖系統其包括一機構 用Μ指示加工設備該閂鎖已位於一開啟位置。 本發明之堪一目的係為提供一閂鎖系统其隔絕容置於 本紙伕尺度適用中國國家標準（CNS ) Α4規格（210Χ 297公釐） (請先閏讀背面之注意事項再填寫本页)A 7 Such as 4640 __ ^ _____ V. Description of the invention (/) (Read the precautions on the back before filling in this page) Background of the invention 1 · Field of the invention The present invention generally relates to a mechanical latch for fixing a door or a lid to A container. In particular, the present invention relates to a vacuum-driven mechanical lock that locks the door to the container and keeps the door in a sealed position. Vibration or impact The container will not disengage or disengage the latch from the container. 2. Description of Phase Techniques The susceptibility to contamination of materials used in the production of semiconductors with Μ is a major issue facing semiconductor manufacturing. The Standardized Mechanical Interface (SMiF) system has been designed to eliminate the contamination of particles and smoke suspended in the air during the processing, transportation or storage of these sensitive materials. A standardized mechanical interface (SM IF) system includes a sealable container for transporting semiconductor substrates made of sensitive materials. A standardized machine interface (SMIF) box system generally uses K to seal the semi-substrate substrate within the standardized machine interface (SMIF). The semiconductor substrate may include a wafer, a liquid crystal display, a plane control display, and / or a memory disk. For the purpose of discussion without limitation, KK will be explained with reference to half-wafer wafers. During the processing, transportation and storage of semiconductor wafers, the separation of semiconductor wafers and destroying particles must be strict. The size of the particles that produce cracks in the semiconductor wafer is determined by the semiconductor profile size. When the outer size of the semi-conductor is reduced, the size of the particles to be separated is also reduced -3-This paper scale is applicable to the Chinese national standard car (CNs) a4 specification (210Χ297mm) A7 B7 V. Invention description ( >) 1 1 I 〇 The presence of vapor or static release in the environment also damages the manufacture of semiconductors including the wafer itself 1 1 1 0 It is expected that the materials used have low leakage characteristics 1 I Please 1 I excited Q First read 1 I read 1 can be found that the standard mechanical interface containing semiconductor wafers (S Μ back 1 of 1 IF) system light MiL · micro-wear will produce damage particles. Static electricity can attract the grinding I intention I damage Breaking particles to standardized mechanical interface (S Μ IF) container internal matters 1 | Re 1 I surface or to the semiconductor wafer itself 0 when The particles are sucked to the inner surface of the standardized mechanical interface (S Μ IF). When the container is actuated, the particles can be suspended in the air.-1 I falls on the semiconductor and damages the semiconductor wafer. 0 In the standardized machine 1 1 Surface (S Μ IF) Air or other gases circulating or passing through the container will not be true 1 1 Let the particles be removed from the inner surface of the container by the standardized mechanical interface (S Μ IF) 1 Set 1 I remove 0 Although it can be > λ clear m However, it is difficult to completely remove the particles adsorbed on the inner surface of the container. 0 1 1 Maintain a sufficiently clear environment during the transportation, processing and storage of the half-grain body. 1 1 The environment is extremely close. The dynamic processing equipment has been developed. In order to minimize the contact and exposure of semiconductor 1 wafers and damaged particles 0, the same protection Ί | The container or insulating structure of the wafer has also been developed and obtained by processing equipment 1 1 Control 0 Generally, the isolation mechanism or standardized mechanical interface (S Μ IF) container 1 1 is isolated from the outside world by a shutter or cover and only by a processing tool 1 I exhaust valve and-clean It is open when exposed to small environments. The risk of contamination is significantly reduced in such a way as 1 1. It is therefore important to standardize the mechanical interface 1 1 (S Μ IF). It is important that the container door remains sealed unless it passes 1 I The processing equipment is stripped in a clean environment. 4- 1 1 1 1 This paper scale is applicable to the Chinese National Standard (CNS) A4 specification (210X 29? Mm) A7 294640_B7_ V. Description of invention ()) (Please read the back first Please fill in this page again) Once a seal has been formed, the door must be secured to the container. Various latching arrangements have been developed to secure the door to the container while minimizing the number of mechanism movements and particle generation. One such device is disclosed in U.S. Patent No. 5,291,923 by Gallagher et al. This patent discloses a plastic, foldable diaphragm or blister seal. A vacuum state is applied via a conduit to the inside of a closure element that seals a standardized machine interface (SMIF) container with M. When the vacuum state is applied, the sealing ring folds to allow the container door to actuate. When the vacuum is released * the sealing ring slowly expands to its original shape. To reduce the time the seal ring expands to its original shape and seals the door to the container, a positive scraping force can be applied. The structure revealed by Gallagher e t a 1 · has proved to be effective in various environments. However, violent vibration or impact can cause the container door to detach from the container, contaminating the semiconductor wafers stored in the container. Such vibrations and impacts often occur in general manufacturing plants. Also, the vacuum structure is raised for the necessary time for the processing equipment to engage or disengage the shutter from the container. Thereby, there is a need for a latch element that can snap or disengage quickly and will not disengage easily by vibration or impact. Various mechanical latches, such as those disclosed by Parikh et al. In U.S. Patent No. 4, 7 2 4. 8 7 4, have been used successfully. However, such a latch design fails to eliminate the generation of particles when the latch is engaged and disengaged. As mentioned above, the production of any number of 1 particles can produce semiconductor wafers. -5-This paper scale is applicable to the Chinese National Standard (CNS) Α4 specification (210X297 mm) 204640 V. Description of the invention (f) It is Μ, there needs to be a latch, which has the following special features: the shovel can be set by processing Effective engagement and disengagement; the vibrating or striking container is not easily disengaged; the chain drives the latch to minimize the generation of contaminated particles; and the boring is used to isolate and remove worn particles by the latch Will not contaminate the substances stored in the container. The present invention provides such a latch. The invention provides a vacuum-driven mechanical door lock which can be used to fix a stop door to an opening of a container. The latch is designed to minimize the generation of particles when the door lock is driven. The latch is also designed to isolate and remove particles that have been generated by the latch, so that the particles do not contaminate the interior of the container or the surrounding environment. The vacuum-actuated mechanical latch is suitable for use in any sealed container, however, for illustration purposes, reference will be made to a standardized mechanical interface (SM IF) container. Those who are familiar with this skill will realize that the vacuum-driven mechanical latch can be applied to other types or sizes of containers. In a preferred embodiment, the vacuum-driven mechanical latch includes a housing, a plunger, and a compression spring. The housing has a tongue and groove provided therein, whereby the plunger is slidably engaged in the tongue and groove between a first locked position and a second retracted position. The tenon floor extends through the outer surface of the shell to define an opening into the shell. The tenon ends in the housing to form a closed end of the tenon. When the plunger is in the first locked position, a part of the plunger extends beyond the killing body through the opening of the body. The compression spring M biases the plunger to the first locked position via the tongue and groove. A duct extends into the tongue and groove through the duct. A vacuum state can be applied to overcome the strong spring force, thereby driving the plunger from the first locked position to the second retracted position. This paper uses the Chinese National Standard (CNS) Α4 specification (210Χ 297mm). Please order (please read the precautions on the back before filling out this page) A7 B7 5. Description of the invention (<) (please read the back Please pay attention to this page before filling this page) The latch is connected to the outer surface of the bottom of the container door sealed in a container. The container has four closed sides, a closed top and an open bottom. The opening bottom is surrounded by a cover. The groove is formed on an inner surface of the container lid. When the plunger is in the first locking position, each groove matches a correspondingly interlocking plunger, thereby fixing the knocking door to the container. Of course, the latch can be replaced by a latch integrally formed with the container and latched into a groove formed in the door. In a preferred embodiment, the isolation latch engages the inside of each of the containers. Those who are familiar with this skill will recognize that when the container or box is pseudo-circular, for example, three equally spaced latches will keep the door sealed to the container. When the door is fixed on the container, a vacuum state is applied to the latch M to pull the latch back from the groove. When the latch is pulled back by the vacuum state * any particles in the latch are pulled out of the latch by the vacuum state. These particles will not contaminate the inside or outside of the container. When the vacuum state is reduced so that the spring biases the plunger toward the locked position, a lower degree of vacuum state can be applied to create a negative pressure. When the plunger slides through the tongue and groove only, the negative pressure The generated particles can be removed. This vacuum state is applied via a conduit extending into the tongue and groove and close to the closed end of the tongue and groove. A vacuum applied through the catheter is strong enough to counteract the pressure of the compression spring, thereby pulling the plunger and entering the tongue and groove with the head. When the plunger head protrudes out of the body, the plunger is in the first locked position, and when the plunger head is pulled back into the tongue and groove, the plunger is in the second retracted position. The pressure applied by the compression spring should be sufficient to keep the plunger in the locked position, even the paper size is applicable to the Chinese National Standard (CNS) Α4 specification (210Χ 297 mm) A7 B7 V. Invention description (heart) When the container is vibrated or hit. (Please read the precautions on the back before filling in this page) In the preferred embodiment, the plunger and the tenon building have matching shapes. The plunger includes a partition having a head formed at one end and a base formed at the other end. The compression spring is located between the plunger seat and the sealing end of the tongue and groove. The partition has a shoulder extending longitudinally from the distal end to the head, the shoulder gradually decreasing from a larger first diameter to a smaller second diameter. The block acts as a stop to prevent the plunger from sliding out of the housing completely. The plunger may have a groove extending into the plunger along the longitudinal axis of the partition portion. A part of the compression spring may be located in the groove. In addition, a ring-shaped channel can be formed in the inner plane of the seat body. A washer or O-ring is provided in the channel formed in the seat body. When the plunger is pulled to the second open position by vacuum, the O-ring seal engages the sealing end of the tongue and groove. When the plunger is sealed at the closed end of the tongue and groove, the vacuum pressure changes. This change in pressure can be used as an indicator of a processing device to indicate that the H lock is folded to the second open position. Before the plunger is sealed at the closed end of the tongue and groove * Any particles generated by the latch are sucked in by the vacuum device, further isolating the semiconductor wafer from any destructive particles. In an alternative preferred embodiment, the latch is formed in the container door itself. The container door serves as a housing to accommodate four latches. A tongue and groove is provided on each side of the container door, whereby the plunger slides into the tongue and groove between a first locked position and a second retracted position. A duct extends from the bottom surface of the container door to each tenon. In this way, the air outlet baffle of the processing tool can close the outside of the container door, creating a gas collecting tube which connects several latches all -8 ~ This paper size is applicable to China National Standard (CNS) Α4 specification (210Χ 297 mm ) A7 B7 V. Description of the invention (/) From the catheter to a central vacuum introduction tube. In another alternate preferred embodiment, the latch includes a plastic elastomer sealing ring connected to the head of the plunger. The sealing ring sets up a vacuum chamber in the small chamber of the tongue and groove and further isolates the plunger and spring from the external environment. Not limited but at least three important advantages are provided by such vacuum driven mechanical latches. First of all, the door and the container are firmly held together. Second, when the latch is driven * An air cushion exists between the tongue and groove and the plunger floats in the tongue and groove, thereby reducing the tenon and the plunger when the plunger slides into the tongue and groove Friction. Third, this vacuum state uses K to pull any particles that can be generated away from the latch. With this • The design offers several unique advantages. The basic object of the present invention is to provide two vacuum-driven mechanical latches for fixing a shutter to a container. Another object of the present invention is to provide a latch using a M-Standardized Mechanical Interface (SM IF) container which will not break away by vibration or impact force. Another object of the present invention is to provide a mechanical latch which Minimize the generated particles and isolate them by latching. Another object of the present invention is to provide a latch that is easier and more effective to engage and disengage by automatic processing equipment. A further object of the present invention is to provide a latch system which includes a mechanism to indicate to the processing equipment that the latch is in an open position. The purpose of the present invention is to provide a latching system whose insulation is accommodated in this paper. The Chinese standard (CNS) Α4 specification (210Χ 297mm) is applicable (please read the notes on the back before filling this page)
A 、-» A7 SO 4640 B7 五、發明说明（分） 閂鎖内之移動機械之一較大部分之外界環境。 本發明之堪一目的係為提供一問鎖糸統其滅少驅動問 鎖所需外部真空數董。 這些和另一目的及本發明之這些和另一些持徵及優點 將令那些熟識此技藝之人士配合附屬圖式和權項及由下列 較佳實施例的詳细描述更確實的了解。 圖式簡單說明 第一圖係為提升於加工設備之一部分一方之容器和門 的分解立趙圈； 第二圖係為閂鎖由門上移去之立體圖； 第三圖係為第二鼷所示類型之閂鑌殻體之底部半邊之 頂部平面圖，其中柱塞位於第一鎖定位置； 第四圖係為第二圖所示類型之閂鎖毅«之頂部半邊之 底部平面®; 第五圖係為第二圖所示類型之閂鎖殼體之底部半邊之 頂部平面圓，該毅體具有柱塞位於第二收回位置； 第六圖係為第三圖所示類型之柱塞的立涠端視圖； 第t圖係為第三圖所示類型之柱塞的頂部平面圖，其 中壓縮彈簧已經移去； 第八圖係為提升於加工設備之一變化較佳實施例之上 之—麥化較佳容器和容器門之部分分解剖視圖； 第九圖係為閂鎖毅體之底部半邊之一變化較佳實施例 之頂部平面圈，其中柱塞位於第一鎖定位置； -1 0 - 本紙乐尺度適_用中困®家橾準（CNS)六4規格（21QX 297公慶) ~ ~ (請先閱讀背面之VX意Ϋ項再填寫本页)A,-»A7 SO 4640 B7 V. Description of the invention (minutes) One of the larger parts of the mobile machinery inside the latch is outside the environment. The first object of the present invention is to provide an external vacuum system for driving the interlock. These and other objects and these and other features and advantages of the present invention will enable those familiar with the art to cooperate with the accompanying drawings and rights and to understand more accurately from the following detailed description of the preferred embodiments. Brief description of the drawings. The first picture is the exploded view of the container and door lifted on one side of the processing equipment; the second picture is a perspective view of the latch removed from the door; the third picture is the second post The top plan view of the bottom half of the type of bolt-on housing shown, where the plunger is in the first locking position; It is the top flat circle of the bottom half of the latch housing of the type shown in the second figure, the body has the plunger in the second retracted position; the sixth figure is the standing pole of the plunger of the type shown in the third figure End view; Figure t is a top plan view of a plunger of the type shown in Figure 3, where the compression spring has been removed; Figure 8 is a modification of a preferred embodiment of the processing equipment-Maihua Partially anatomical view of a part of the preferred container and the container door; the ninth image is a top flat ring of one preferred embodiment of the bottom half of the latch body, with the plunger in the first locked position; -1 0-Ben Zhile Appropriate scale 4Specifications (21QX 297 gala) ~ ~ (Please read the VX meaning Ϋ on the back and then fill in this page)
A7 B7 五、發明説明 ( 1 ) 1 1 1 第 十 圖 係 為 閂 鎖 毅 體 之 底 部 半 邊 之 另 —· 赛 化 較 佳 S 腌 1 1 I 例 之 頂 部 平 面 圖 其 中 柱 塞 位 於 第 一 鎖 定 位 置 0 1 I 請 1 較 佳 實 施 洌 詳 细 說 明 先 閱 1 1 t# 1 I 首 先 參 昭 /WS 第 — 圖 其 中 — 般 所 示 提 升 於 半 導 體 晶 圓 加 背 ιδ 1 I 之 1 X 工 具 1 4 之 出 氣 □ 門 上 的 — 容 器 1 0 和 一 擋 門 1 2 0 注 意 1 該 容 器 1 〇 具 有 — 封 閉 頂 部 1 6 和 側 壁 1 8 〇 蓋 子 2 0 窶 1 I 再 1 I 環 繞 容 器 1 〇 周 緣 延 伸 界 定 容 器 1 〇 之 開 □ 端 2 2 〇 —· 密 填 寫 本 封 表 面 2 4 形 成 於 該 蓋 子 2 0 之 内 部 2 6 上 〇 於 該 較 佳 實 页 ν_-· 1 1 胞 例 中 一 閂 鎖 凹 懵 2 8 形 成 於 密 封 表 面 2 4 下 方 之 蓋 子 1 1 2 〇 内 部 2 6 内 並 形 成 於 容 器 1 0 之 各 者 内 側 〇 1 I 該 擋 門 1 2 係 為 平 面 形 狀 且 尺 寸 定 為 密 封 容 器 1 0 之 1 1 訂 密 封 表 面 2 4 0 壓 縮 密 封 圈 3 0 ( 不 可 見 ) 係 匹 配 於 嚙 1 合 於 蓋 子 2 0 封 密 表 面 2 4 之 播 門 1 2 之 上 表 面 外 緣 3 2 1 1 0 需 要 大 致 五 磅 之 魔 縮 力 將 擋 門 1 2 密 封 至 容 器 1 0 0 1 1 閂 鎖 3 4 係 m 由 已 知 櫬 構 連 接 至 擋 門 1 2 且 匹 配 於 相 1 1 應 之 閂 鎖 凹 槽 2 8 0 當 擋 門 1 2 密 封 嚙 合 於 容 器 1 0 時 * ί 1 於 近 U 五 磅 之 壓 縮 力 下 t 各 者 閂 鎖 3 4 嚙 合 於 容 器 1 0 之 1 1 相 應 凹 槽 2 8 藉 此 防 止 擋 門 1 2 移 動 〇 該 嚙 合 閂 m 3 4 1 1 亦 防 止 擋 門 1 2 由 於 移 動 或 振 動 由 密 封 嚙 合 於 容 器 1 0 上 1 1 脫 離 0 該 閂 鎖 防 止 播 門 1 2 由 容 器 1 0 上 脫 離 甚 至 容 器 1 I 被 誤 操 作 或 倒 置 時 〇 1 1 於 半 専 體 製 造 加 工 過 程 中 使 用 之 各 種 装 置 應 具 有 滅 少 1 1 環 境 中 小 粒 子 煙 或 靜 電 釋 放 的 數 量 之 持 性 0 不 限 剌 > 1 I - 1 1 - 1 1 I 本紙張尺度適用中國國家標準（CNS ) A4说格（210X 297公釐） "--- 1 A7 B7 五、發明説明 ( (^) 1 1 1 伯 η 器 1 0 最 好 係 Μ 聚 碳 酸 脂 和 藉 由 近 似 1 0 — 3 0 % 真 1 1 1 空 態 之 聚 四 氣 乙 烯 組 合 鑣 模 擋 門 I 2 係 最 好 以 聚 碳 酸 脂 1 I 請 1 I 鑲 模 而 閂 鎖 3 4 最 好 由 一 低 漏 氣 N 低 磨 擦 係 數 和 高 介 電 先 閱 1 I 讀 1 常 數 之 材 料 製 造 〇 一 如 此 之 材 料 係 為 DE LR IN 由 背 1 之 1 E . I . d u P0 NT d e e in 0 U Γ S C 〇 . 供 應 〇 注 | 意 I 再 參 照 第 二 圖 該 閂 鎖 3 4 係 一 般 於 此 圖 中 所 示 0 該 桌 1 I 再 1 I 閂 鎖 3 4 包 括 殼 體 3 6 、 — 柱 塞 3 8 和 —* 壓 縮 彈 簧 0 如 填 寫 本 第 三 至 第 七 圖 中 所 示 該 往 塞 3 8 之 形 狀 顯 示 該 骰 體 3 6 页 、—- 1 I 包 含 一 頂 部 元 件 和 底 部 元 件 4 2 和 4 4 〇 热 来 /Civ 此 技 藝 之 人 1 1 士 將 認 識 到 柱 塞 之 形 狀 可 改 變 Μ 此 該 骰 體 可 由 一 單 一 之 元 1 1 件 構 成 〇 該 頂 部 和 底 部 元 件 4 2 和 4 4 可 經 由 鎖 定 孔 4 6 1 1 丁 一 起 緊 固 於 自 攻 螺 絲 或 可 藉 由 另 — 些 已 知 構 件 — 起 連 接 0 1 1 該 衛 鎖 3 4 之 特 殊 組 合 琨 將 較 為 詳 细 討 論 0 1 1 再 參 昭 八、、 第 三 和 第 四 圖 該 頂 部 和 底 部 之 骰 體 元 件 4 2 1 1 和 4 4 於 其 圖 中 更 詳 细 所 示 0 該 頂 部 骰 體 4 2 具 有 形 成 於 1 k 其 中 之 — 上 部 榫 槽 5 〇 而 該 底 部 骰 體 4 4 具 有 形 成 於 其 Ί I 中 之 — 下 部 榫 槽 5 2 〇 當 該 頂 部 和 底 部 殺 體 4 2 和 4 4 對 1 I 準 和 嚙 合 時 該 上 部 和 下 部 榫 槽 5 〇 和 5 2 將 對 準 並 一 般 1 1 形 成 穀 體 之 榫 槽 4 8 0 該 上 部 和 下 部 之 榫 槽 5 0 和 5 2 係 1 I — 致 的 〇 1 1 一 般 該 榫 槽 部 分 延 伸 入 殻 體 3 6 至 榫 槽 之 — 封 閉 端 1 1 5 4 〇 榫 槽 之 一 開 通 端 5 6 形 成 於 殻 體 3 6 之 外 端 表 面 5 1 1 8 上 0 於 第 三 至 第 七 ISI _ 所 示 之 較 佳 實 施 例 中 該 榫 槽 4 8 1 | - 12 - J 1 1 本紙張尺度適用中國國家標率（CNS ) A4規格（210X 297公釐） A7 B7 五、發明説明 ( " ) 1 1 I 具 有 柱 塞 3 8 之 綜 合 形 狀 0 該 榫 漕 4 8 包 括 一 第 一 圓 柱 部 1 1 1 1 分 6 0 由 第 一 圓 柱 部 分 6 0 漸 縮 至 一 第 二 較 小 圓 柱 部 分 1 I 請 1 I 之 一 錐 形 部 分 6 2 0 該 第 二 圓 柱 部 分 6 4 延 伸 至 一 開 P 於 先 閱 1 1 η 1 骰 體 3 6 之 外 端 表 面 5 8 之 小 室 6 6 ( 參 閱 第 四 圖 ) 一 背 面 1 I 之 1 真 空 導 管 6 8 由 底 部 毅 體 4 4 之 底 部 表 面 7 〇 延 伸 入 榫 槽 注 1 意 I 4 8 之 封 閉 端 5 4 0 事 項 1 I 再 1 | 現 參 照 第 - 和 第 七 圖 該 柱 塞 3 8 係 於 圖 中 所 示 〇 使 填 寫 本 用 中 該 柱 塞 3 8 係 安 装 於 榫 槽 4 8 内 以 於 —· 第 封 合 鎖 定 页 •w- 1 I 位 置 7 2 ( 第 二 圖 中 所 示 ) 和 一 第 二 開 啟 位 置 7 4 ( 第 五 1 1 圖 中 所 示 ) 間 滑 動 0 該 柱 塞 3 8 包 括 一 柱 體 或 — 本 體 7 6 1 1 具 有 —. 頭 部 7 8 形 成 於 其 上 —. 端 和 —^· 座 體 形 成 於 另 一 端 0 1 1 丁 一 錐 形 突 肩 8 2 由 近 U 於 柱 塞 3 8 之 座 體 8 〇 起 始 處 之 一 1 I 較 大 直 徑 8 4 逐 漸 縮 減 至 沿 柱 體 7 6 縱 向 軸 線 之 一 第 二 較 1 1 小 直 徑 8 6 0 該 柱 塞 3 8 之 頭 部 7 8 具 有 — 傾 斜 専 入 表 面 1 1 8 8 當 該 柱 塞 被 迫 入 容 器 1 0 之 凹 槽 2 8 時 該 導 入 表 面 1 令 摩 擦 力 減 至 最 小 〇 1 I 該 柱 塞 3 8 之 座 體 8 〇 具 有 一 凹 槽 9 0 其 沿 柱 體 7 6 1 1 之 縱 向 軸 線 延 伸 進 入 柱 體 7 6 0 壓 縮 彈 簧 4 0 插 入 此 凹 槽 1 1 9 〇 藉 此 允 許 一 較 長 壓 縮 彈 簧 的 使 用 〇 如 第 三 和 第 五 圖 1 1 所 示 該 壓 縮 彈 簧 4 0 係 位 於 榫 槽 4 8 之 封 閉 端 5 4 和 柱 \ 1 I 塞 3 8 之 間 0 該 壓 縮 彈 簧 4 0 設 定 尺 寸 偏 置 柱 塞 3 8 朝 1 1 向 第 — 鎖 定 位 置 7 2 〇 1 1 於 該 較 佳 實 施 例 中 沿 座 體 8 〇 平 面 之 周 緣 形 成 一 環 1 I - 13 - 1 1 1 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） 五、發明説明（/> 形通道 之通道 ◦形環 7 4時 热識此 之外部 管6 8 二開啟 該 設定尺 2時， 藉此限 該 放端5 該柱塞 緣9 6 第四圖 —阻塞 榫播4 雄時· 热 置力被 發明中 7 2 〇 一 9 2内。 之內徑為 ’該0形 技轾之人 表面延伸 進入榫槽 位置7 4 往塞3 8 寸以此當 該突肩作 制柱塞3 柱塞3 8 6略小。 頭部7 8 接觸榫槽 )Μ阻塞 位置時， 8内。當 該真空吠 識此技藝 克服時· ，一真空 可替換 該真空 小。當 環9 4 士將認 進入榫 4 8之 所須之 之突肩 壓縮彈 為一擋 8之移 之頭部 一蓋子 經由殺 4 8開 開通端 任何由 該真空 態吸去 之人士 該柱塞 狀態經 A7 B7 之墊圈 導管6 該柱塞 緊貼榫 識到該 懵4 8 封閉端 真空數 8 2和 簧4 0 塊緊靠 動距離 7 8係 9 6形 體3 6 或◦形 8之直 3 8被 槽4 8 真空専 之另外 5 4將 量減至 榫槽4 迫使柱 榫槽4 (參閱 設定尺 成於柱 之開通 通端5 6之~ 5 6。當頭部 柱塞3 8滑動 狀態被施加Κ 任何容納於榫 將立即認識到 3 8將僅移至 由真空専管6 -1 4 - 環可嚙 徑較座 拉回至 之封閉 管6 8 部分。 令拉回 最少。 8之錐 塞3 8 0之錐 第三圖 寸為較 塞之頭 端5 6 内緣表 7 8之 產生之 令閂鎖 榷4 8 如果該 收回位 8被ife 合於座體8 0 體8 0外徑和 第二開啟位置 端5 4密封。 可由骰體3 6 然面|延伸導 往塞3 8至第 形部分 至鎖定 形部分 和第五 榫槽4 部7 8 迫入時 面9 8 蓋子9 粒子被 由容器 内之粒 彈簧4 置7 4 加以克 6 2係 位置7 6 2， 圖）〇 8之開 上。當 ，該凸 (參閱 6位於 阻擋於 10脫 子。 0之偏 。於本 服彈簧 ---------'4 ! (請先¾讀背面之注意事項再填寫本页) 卷紙张尺度適用中國國家標準（CNS ) A4说格（210X297公釐） A7 B7 五、發明説明（丨矽） 1 1 I 力 4 〇 0 使 用 一 真 空 狀 態 以 移 動 柱 塞 3 8 亦 提 供 於 柱 塞 3 1 1 1 | 8 和 榫 懵 4 8 間 創 造 一 氣 墊 Η 減 少 摩 擦 之 優 點 0 施 加 如 此 1 I 請 1 I — 真 空 狀 態 亦 可 經 由 該 真 空 狀 態 牽 引 任 何 形 成 於 閂 鎖 3 4 先 閱 1 1 讀 1 内 之 粒 子 0 當 該 柱 塞 由 — 收 回 位 置 7 4 偏 置 至 一 鎖 定 位 置 背 ιέ 1 I 之 1 時 7 2 一 較 小 的 真 空 狀 態 可 施 加 足 Μ 創 造 氣 墊 且 經 由 閂 >主 | 意 1 鎖 3 4 牽 引 粒 子 離 開 導 管 6 8 但 不 足 以 克 服 彈 簧 4 0 之 事 項 1 I 再 1 I 偏 置 力 〇 填 寫 本 再 參 昭 第 八 圖 * 變 換 較 佳 實 施 例 於 其 中 所 示 其 中 頁 1 1 擋 門 1 2 具 有 形 成 於 擋 門 1 2 本 身 内 之 閂 鎖 3 4 〇 該 擋 門 1 1 1 2 作 為 毅 體 3 6 以 容 置 全 部 四 個 閂 鎖 3 4 〇 — 榫 槽 4 8 1 1 提 供 於 擋 門 1 2 之 每 一 端 上 藉 此 該 柱 塞 3 8 可 於 榫 槽 4 1 訂 1 I 8 内 於 第 — 鎖 定 位 置 7 2 和 一 第 二 收 回 位 置 7 4 間 滑 動 〇 各 者 真 空 導 管 6 8 由 擋 門 1 2 之 底 部 表 面 1 0 〇 延 伸 進 入 1 1 各 者 榫 槽 4 8 之 封 閉 端 5 4 0 一 已 知 结 構 之 可 替 換 密 封 圈 1 1 1 〇 2 ‘镜 加 工 設 備 1 4 之 出 氣 口 擋 門 1 〇 4 之 外 緣 設 置 0 1 / >λ 如 此 方 式 該 加 工 設 備 1 4 之 出 氣 Ρ 擋 門 1 0 4 密 封 擋 ’丨 I 門 1 2 之 外 底 面 表 面 1 〇 〇 Η 創 造 一 集 氣 管 其 連 接 幾 個 閂 1 1 鎖 3 4 所 有 的 真 空 導 管 6 8 經 由 中 心 導 管 1 〇 8 至 一 中 心 1 1 真 空 蓄 氣 茼 0 1 I 現 參 眧 第 九 圓 — 變 換 較 佳 閂 鎖 之 底 部 半 邊 於 此 ΙΒΙ tfi) 中 1 1 所 示 0 接 近 榫 槽 4 8 之 封 閉 端 5 4 一 真 空 小 室 1 1 2 形 1 1 成 於 榫 槽 内 0 該 小 室 具 有 一 開 □ 1 1 4 經 由 該 開 □ 柱 塞 1 1 柱 體 7 6 可 滑 入 〇 一 可 替 換 伸 縮 軟 管 1 1 6 之 一 端 連 接 至 1 I - 15 - 1 1 1 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） 304640 五、發明説明（ι中） (讀先閱讀背面之注意事項再填寫本页) 真空小室1 1 2之外側上榫槽内之一溝槽1 1 8。該伸縮 軟管之另一端連接至柱塞3 8之頭部7 8 |藉此令柱塞3 8之較大部分與外界環境相隔離。只要真空狀態被施加， 該大氣壓力將保持伸縮軟管1 1 6向内推。該伸縮钦管1 1 6最好由一塑性彈性體聚合物製成，Μ此當該柱塞3 8 於第一鎖定位置7 2和第二收回位置7 4間作動時，該伸 縮軟管簡單的收折至其上。該伸縮軟管亦增強加工設餚真 空狀態之抽吸能力。 第十圖亦所示閂鎖3 4之另一變換較佳實拖洌。於此 實施例中，一單一收折伸縮軟管具有一端藉由已知機構連 接至柱塞3 8之頭部7 8，藉此令柱塞3 8之較大部分與 外界環境相隔離。該榫槽48之小室6 6之作用相當於真 空小室1 1 2。熟識此技藝之人士將認識到該伸縮軟管之 塑性具有彈性之特徵可省去壓縮彈簧的需要，藉此當施加 真空的數量減少時，迫使柱塞至第一鎖定位置。是以，沒 有任何附加的限制，該熟悉此技藝之人士將認識到伸縮軟 管1 1 6和彈簧都可作為一機構Μ迫使柱塞進入第一鎖定 位置，其中彈簧和伸縮軟管兩者被拉回至第二開啟位置。 亦，由於該柱塞38藉由伸縮軟管1 1 6密封於般體36 内，是以該0形環94可不須。已知结構之一定位環1 2 0可使用以保持該伸縮軟管1 16緊靠殻體3 6外端表面 5 8 。 已描述了本發明之结構特徴•現將討論使用模式。於 -1 6 - 本紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ297公釐） A7 B7 五、發明説明 (( 1 1 I 第 一 圖 所 示 之 較 佳 實 施 例 中 使 用 者 令 擋 門 1 2 之 中 心 對 1 1 1 | 準 加 工 設 備 1 4 之 出 氣 □ 擋 門 1 〇 4 中 心 上 >λ 此 各 者 閂 鎖 1 I 請 1 I 3 4 對 準 加 工 設 備 1 4 之 一 吸 □ 1 1 〇 〇 於 該 較 佳 實 施 例 先 閱 1 1 讀 1 中 — 負 壓 真 空 狀 態 經 由 各 者 吸 □ 1 1 〇 施 加 藉 此 牽 動 背 ιέ 1 1 之 1 柱 塞 3 8 由 第 一 鎖 定 位 置 7 2 至 一 第 二 開 啟 位 置 7 4 0 熟 注 I 意 I 悉 此 技 藝 之 人 士 將 認 識 到 一 真 空 蓄 氣 茼 1 〇 6 可 今 創 造 — 事 項 1 I 再 1 | 足 夠 之 吸 力 Μ 供 牽 拉 柱 塞 3 8 至 第 二 開 啟 位 置 7 4 之 必 須 填 寫 本 時 間 減 至 最 小 0 亦 該 蓄 氣 茼 可 用 Η 顯 示 閂 鎖 3 4 何 時 位 页 1 I 於 開 啟 位 置 7 4 〇 一 旦 該 〇 形 環 9 4 緊 貼 榫 槽 之 封 合 端 5 1 1 4 密 封 時 表 示 該 閂 鎖 已 經 完 全 收 合 了 〇 . 壓 力 計 可 連 接 1 1 並 與 加 工 設 備 1 4 連 通 其 中 一 旦 壓 力 變 化 到 達 一 預 定 1 訂 1 | 臨 界 值 加 工 機 械 或 使 用 者 可 推 斷 該 閂 鎖 3 4 係 位 於 第 二 開 啟 位 置 7 4 0 1 1 一 旦 該 加 工 設 備 或 使 用 者 確 定 該 閂 鎖 3 4 係 位 於 開 啟 1 1 位 置 ( 藉 由 監 測 真 空 蓄 氣 筒 內 之 壓 力 ) 一 盒 装 半 導 體 晶 1 圓 置 於 擋 門 1 2 頂 部 且 該 容 器 1 〇 係 随 之 放 下 至 擂 門 上 〇 ’丨 1 為 壓 下 密 封 圈 3 〇 並 令 容 器 和 擋 門 Η 密 封 態 固 定 一 迫 緊 1 1 力 施 加 於 擋 門 1 2 〇 該 真 空 被 充 足 的 釋 放 以 允 許 該 彈 簧 4 1 1 〇 偏 置 柱 塞 3 8 〇 該 壓 縮 彈 簧 迫 使 柱 塞 3 8 經 由 榫 槽 4 8 1 I 開 P 端 5 6 進 入 第 一 鎖 定 位 置 7 2 0 該 壓 迫 容 器 1 0 之 壓 1 1 1 縮 力 可 随 之 釋 放 0 該 容 器 保 持 鎖 固 且 密 封 至 擋 門 〇 1 1 為 由 容 器 1 0 移 去 擋 門 1 2 使 用 者 對 準 吸 □ 1 1 〇 1 1 至 各 者 閂 鎖 3 4 施 加 一 負 向 真 空 狀 態 至 閂 鎖 3 4 〇 該 真 1 I - 17 - 1 1 1 本紙伕尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） A7 B7 五、發明説明（I Μ ---------^ — (請先閱讀背面之注意事項再填寫本页) 空狀態拉引柱塞3 8進入收回第二開啟位置74。該擋門 1 2可隨之由容器1 0上移去。 本發明已於此處Μ相當程度之细節描述，以符專利法 規且提供那些熟識此項技藝之人士應用此新穎原則和建搆 和使用這些必要的特定化構件。然而，可Μ理解本發明可 藉由不同装置實現，但那些各式變化設計，不論是就設備 细節或操作過程可在不脫離本發明之範圍下達成。 _ 1 8 _ 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X 297公釐）A7 B7 5. Description of the invention (1) 1 1 1 The tenth figure is the other half of the bottom half of the latch body-· Saihua better S pickled 1 1 I top plan view of the example where the plunger is in the first locked position 0 1 I Please 1 For a detailed description of the preferred implementation, please read first 1 1 t # 1 I First of all, please refer to the Zhao / WS section-in which-generally shown to improve on the semiconductor wafer and back ι 1 I 1 X tool 1 4 out of gas □ On the door — container 1 0 and a blocking door 1 2 0 Note 1 The container 1 〇 has — closed top 16 and side walls 1 8 〇 lid 2 0 窭 1 I then 1 I surrounds the container 1 〇 The peripheral edge defines the container 1 〇 的 开 □ End 2 2 □ —Fill in the surface of the seal 2 4 Formed on the inside 2 6 of the cover 2 0 On the preferred real page ν_- · 1 1 A latch recess in the cell example 2 8 Formed in dense The cover 1 2 2 below the sealing surface 2 4 ○ inside 2 6 and formed inside each of the containers 1 0 〇 1 I The door 1 2 is planar and dimensioned to seal the container 1 0 1 1 order seal Surface 2 4 0 Compression seal ring 3 0 (not visible) is matched to bite 1 Closed to the lid 2 0 Sealing surface 2 4 Broadcast door 1 2 Upper surface outer edge 3 2 1 1 0 Requires approximately five pounds of shrink Seal the door 1 2 to the container 1 0 0 1 1 Latch 3 4 Series m is connected to the door 1 2 by a known structure and matches the corresponding latch groove 1 1 2 8 0 When the door 1 2 When the seal is engaged with the container 1 0 * ί 1 Under a compression force of approximately five pounds t t each latch 3 4 Engage the container 1 0 of the 1 1 corresponding groove 2 8 to thereby prevent the shutter 1 2 from moving. Engagement latch m 3 4 1 1 also prevents the door 1 2 from engaging with the container 1 0 by the seal due to movement or vibration 1 1 disengagement 0 The latch To prevent the broadcast door 1 2 from escaping from the container 1 0 or even the container 1 I being mishandled or inverted 〇1 1 The various devices used in the manufacturing process of the half-body should have the amount of small particles or static discharge in the environment 1 1 Persistence 0 No limitation> 1 I-1 1-1 1 I This paper scale is applicable to the Chinese National Standard (CNS) A4 specification (210X 297mm) " --- 1 A7 B7 V. Description of invention ( (^) 1 1 1 The primary device 1 0 is preferably a polycarbonate and a polytetrafluoroethylene combination lock gate I 2 that is approximately 1 0-3 0% true 1 1 1 Polycarbonate 1 I Please 1 I mold and latch 3 4 It is best to be made of a material with low air leakage N, low friction coefficient and high dielectric reading 1 I read 1 constant. One such material is DE LR IN From back 1 to 1 E. I. du P0 NT dee in 0 U Γ SC 〇. Supply 〇 Note | Italian I and then refer to the second figure the latch 3 4 is generally shown in this figure 0 The table 1 I then 1 I latch 3 4 includes Shell 3 6, — plunger 3 8 and — * compression spring 0 As shown in the third to seventh figures, the shape of the plug 3 8 shows the dice 3 6 pages, — 1 I contains a top Components and Bottom Components 4 2 and 4 4 〇Relais / Civ One of this skill will recognize that the shape of the plunger can be changed. This dice can be composed of a single element 1 1 The top and bottom components 4 2 and 4 4 can be fastened to the self-tapping screws together through the locking holes 4 6 1 1 or can be connected by another-some known components 0 1 1 The special combination of the guard lock 3 4 will be more detailed Discuss 0 1 1 Refer to Zhaoba, 3rd and 4th The top and bottom dice elements 4 2 1 1 and 4 4 are shown in more detail in their figures. 0 The top dice 4 2 has one of them formed in 1 k-the upper tongue and groove 5. The bottom dice 4 4 has one formed in its Ί I-lower tongue and groove 5 2 〇 When the top and bottom killing bodies 4 2 and 4 4 are aligned and engaged with 1 I the upper and lower tongue and groove 5 〇 and 5 2 will be aligned and Generally 1 1 the tongue and groove forming the valley body 4 8 0 The upper and lower tongue and groove 5 0 and 5 2 are 1 I — consistent 〇1 1 Generally the tongue and groove part extends into the housing 3 6 to the tongue and groove — closed End 1 1 5 4 〇 One of the tongue and groove opening end 5 6 is formed on the outer end surface of the housing 3 6 5 1 1 8 on 0 in the third to seventh ISI_ the preferred embodiment shown in the tongue and groove 4 8 1 |-12-J 1 1 This paper scale is applicable to China ’s national standard rate (CNS) A4 specification (210X 297mm) A7 B7 5. Description of invention (& qu ot;) 1 1 I with the integrated shape of the plunger 3 8 0 The tenon 4 8 includes a first cylindrical portion 1 1 1 1 minute 6 0 tapered from the first cylindrical portion 6 0 to a second smaller cylindrical portion 1 I please 1 I One of the tapered part 6 2 0 The second cylindrical part 6 4 extends to a first P 1 1 η 1 Dice 3 6 Outer end surface 5 8 Cell 6 6 (see fourth Figure) A back side 1 I 1 1 vacuum tube 6 8 extends from the bottom surface 7 of the bottom body 4 4 into the tongue and groove Note 1 I 4 8 closed end 5 4 0 Matter 1 I re 1 | Now refer to-and In the seventh figure, the plunger 3 8 is shown in the figure. The plunger 3 8 is installed in the tongue and groove 4 8 for the purpose of filling in. The first seal lock page • w- 1 I position 7 2 (Shown in the second picture) and a second Opening position 7 4 (fifth 1 1 shown in the figure) sliding between 0 The plunger 3 8 includes a cylinder or — the body 7 6 1 1 has — a head 7 8 is formed on it — end and — ^ · The seat body is formed at the other end 0 1 1 D-one tapered shoulder 8 2 from the U near the plunger 3 8 of the seat body 8 〇 One of the starting point 1 I The larger diameter 8 4 gradually reduced to along the cylinder 7 6 One of the longitudinal axes is the second smaller than 1 1 with a small diameter 8 6 0 The head 7 8 of the plunger 3 8 has an inclined surface 1 1 8 8 when the plunger is forced into the groove 2 8 of the container 1 8 The lead-in surface 1 minimizes frictional forces. I The seat 8 of the plunger 3 8 has a groove 9 0 that extends along the longitudinal axis of the cylinder 7 6 1 1 into the cylinder 7 6 0 compression spring 4 0 Insert this groove 1 1 9 〇 thereby allowing the use of a longer compression spring. The compression as shown in the third and fifth figures 1 1 The spring 4 0 is located between the closed end 5 4 of the tongue and groove 4 8 and the post \ 1 I plug 3 8 0 The compression spring 4 0 sets the size to offset the plunger 3 8 towards 1 1 to the first-locked position 7 2 〇1 1 In the preferred embodiment, a ring is formed along the periphery of the plane of the base 8 〇 1 I-13-1 1 1 The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X 297 mm) V. Description of the invention (/ > The channel of the shaped channel ◦The ring 7 is an external tube that recognizes the heat 6 at 4 o 8 When the setting ruler 2 is opened, this limits the release end 5 The plunger edge 9 6 4th figure—Block tenon 4 male The time and heat retention force are invented within 7 2 0 to 9 2. The inner diameter is ‘the 0-shaped skilled person ’s surface extends into the tongue-and-groove position 7 4 toward the plug 3 8 inches so that the shoulder is made as a plunger 3 The plunger 3 8 6 is slightly smaller. When the head 7 8 contacts the tongue and groove) M blocking position, 8 inside. When the vacuum is overcome by this skill, a vacuum can replace the vacuum. When the ring 9 4 warrior recognizes the shoulder compression needed to enter the tenon 4 8 as a block 8 moving head, a lid is opened by killing 4 8 anyone who is sucked by the vacuum state the plunger The state is through A7 B7 washer catheter 6 The plunger is close to the tenon to recognize the mud 4 8 The closed end vacuum number 8 2 and the spring 4 0 The block is close to the moving distance 7 8 series 9 6 shape 3 6 or ◦ shape 8 straight 3 8 The groove 4 8 The other 5 of the vacuum level 4 4 Reduce the amount to the tongue and groove 4 Force the column tongue and groove 4 (see setting the ruler at the open end 5 6 ~ 5 6 of the column. When the head plunger 3 8 is in sliding state Applying Κ any contained in the tenon will immediately recognize that 3 8 will only move to the part of the closed tube 6 8 to which the ring can be pulled back from the vacuum tube 6 -1 4-the ring can be pulled back. Minimize the pull back. 8 Cone plug 3 The third dimension of the 8 0 cone is the tip of the plug 5 6 The inner edge of the table 7 8 The resulting latch latch 4 8 If the retracted position 8 is ife closed to the seat body 8 0 body 8 0 outer diameter and Two open position end 5 4 seal. Can be from the dice body 3 6 natural surface | extending to the plug 3 8 to the first part to the lock-shaped part and the fifth tongue and groove 4 part 7 8 face 9 8 when forced The particles of the lid 9 are removed by the particles in the container. The spring 4 is set to 7 4 and 6 2 is placed at the position 7 6 2 (figure). 8 is opened. When, the convex (refer to 6 is located at 10 to block off. 0 bias. In this service spring --------- '4! (Please read the precautions on the back before filling this page) The Zhang scale applies to the Chinese National Standard (CNS) A4 said grid (210X297mm) A7 B7 5. Description of the invention (Silicon) 1 1 I Force 4 〇0 Use a vacuum to move the plunger 3 8 Also available on the plunger 3 1 1 1 | 8 and mortise 4 8 create an air cushion Η Advantages of reducing friction 0 Apply so 1 I please 1 I — vacuum state can also draw any formed in the latch through the vacuum state 3 4 Read 1 1 Read 1 Particles inside 0 When the plunger is biased from a retracted position 7 4 to a locked position 1 1 of 1 7 7 2 A small vacuum state can be applied to create a cushion of air and pass through the latch> Master | Intention 1 Lock 3 4 draws particles away from the catheter 6 8 but not enough to overcome Item 4 of the spring 4 0 1 I 1 I biasing force again. Fill in this and refer to the eighth figure * The preferred embodiment of the transformation is shown therein. Page 1 1 The door 1 2 has a door formed in the door 1 2 itself Latch 3 4 〇 The stop door 1 1 1 2 as a body 3 6 to accommodate all four latches 3 4 〇-tongue and groove 4 8 1 1 is provided on each end of the stop door 1 2 by the plunger 3 8 can be set in the tongue and groove 4 1 1 I 8 slide in the first-locked position 7 2 and a second retracted position 7 4 〇 each vacuum tube 6 8 extends from the bottom surface 1 0 of the door 1 2 〇 1 1 The closed end 5 4 0 of each tongue and groove 4 8 A replaceable sealing ring of a known structure 1 1 1 〇2 'Outlet gate 1 〇4 of mirror processing equipment 1 4 Outer edge setting 0 1 / > λ In this way the gas outlet of the processing equipment 1 4 Ρ block door 1 0 4 sealed block '丨 I door 1 2 Outer bottom surface 1 〇〇Η Create a gas collector which connects several latches 1 1 Lock 3 4 All vacuum ducts 6 8 Via the central duct 1 〇8 to a center 1 1 Vacuum gas storage 0 1 I Present ✧ Ninth circle-change the bottom half of the better latch in this ΙΒΙ tfi) 1 1 shown 0 close to the closed end of the tongue and groove 4 8 5 4 a vacuum chamber 1 1 2 shape 1 1 formed in the tongue and groove 0 The chamber has an opening □ 1 1 4 through which the plunger 1 1 cylinder 7 6 can be slid in. A replaceable telescopic hose 1 1 6 is connected at one end to 1 I-15-1 1 1 This paper size is suitable for China National Standard (CNS) A4 specification (210X 297mm) 304640 V. Description of the invention (ι middle) (Read the precautions on the back side and fill in this page) Vacuum chamber 1 1 2 A groove in the tongue and groove on the outer side 1 1 8. The other end of the telescopic hose is connected to the head 7 8 of the plunger 38 | thereby isolating a larger part of the plunger 38 from the external environment. As long as the vacuum is applied, this atmospheric pressure will keep the expansion hose 116 pushed inward. The telescopic tube 1 16 is preferably made of a plastic elastomer polymer. When the plunger 38 moves between the first locking position 72 and the second retracting position 74, the telescopic hose is simple Folds on it. The telescopic hose also enhances the suction capacity in processing the vacuum state. The tenth figure also shows another modification of the latch 34, which is preferably dragged. In this embodiment, a single collapsible telescopic hose has one end connected to the head 78 of the plunger 38 by a known mechanism, thereby isolating a larger portion of the plunger 38 from the external environment. The cell 6 6 of the tongue and groove 48 functions as a vacuum cell 1 1 2. Those skilled in the art will recognize that the elasticity of the flexible hose can eliminate the need for a compression spring, thereby forcing the plunger to the first locked position when the amount of vacuum applied is reduced. Therefore, without any additional restrictions, those skilled in the art will recognize that both the flexible hose 116 and the spring can act as a mechanism M to force the plunger into the first locked position, where both the spring and the flexible hose are Pull back to the second open position. Also, since the plunger 38 is sealed in the body 36 by the telescopic hose 116, the O-ring 94 is not necessary. A positioning ring 1 2 0 of one of the known structures can be used to keep the telescopic hose 1 16 against the outer end surface 5 8 of the housing 36. The structural features of the present invention have been described. The mode of use will now be discussed. On -1 6-This paper scale is applicable to the Chinese National Standard (CNS) Α4 specification (210Χ297 mm) A7 B7 5. Description of the invention ((1 1 I In the preferred embodiment shown in the first picture, the user orders the door 1 Center of 2 1 1 1 | Out of quasi-processing equipment 1 4 Outlet □ Door 1 〇4 Center> λ Each of these latches 1 I Please 1 I 3 4 Align with the processing equipment 1 4 One suction □ 1 1 〇〇 In this preferred embodiment, first read 1 1 read 1-negative pressure vacuum state is sucked through each one □ 1 1 〇 is applied to thereby pull the back of the plunger 1 1 1 3 8 from the first locking position 7 2 to A second open position 7 4 0 familiar with I Italian I Anyone who knows this skill will realize that a vacuum accumulator 1 0 6 can be created today-Matter 1 I re 1 | Sufficient suction M for pulling plunger 3 8 To the second open position 7 4 This time must be filled to a minimum of 0 and the gas reservoir can be used. Η Shows the latch 3 4 when the page 1 1 is in the open position 7 4 〇Once the 〇-ring 9 4 is close to the sealing end of the tongue and groove 5 1 1 4 The seal indicates that the latch has been completely closed. The pressure gauge can be connected to 1 1 and communicate with the processing equipment 1 4 where once the pressure change reaches a predetermined 1 order 1 | critical value processing machinery or the user can infer the latch 3 4 is in the second open position 7 4 0 1 1 Once the processing equipment or user determines that the latch 3 4 is in the open 1 1 position (by monitoring the pressure in the vacuum cylinder) a box of semiconductor crystals 1 round Place it on the top of the blocking door 1 2 and the container 1 is then lowered onto the knocking door. The 1 is to press the sealing ring 3 and fix the container and the blocking door Η in a sealed state. Gate 1 2 〇The vacuum is sufficiently released to allow the spring 4 1 1 〇 to bias the plunger 3 8 〇The compression spring forces the plunger 3 8 through the tongue and groove 4 8 1 I open the P end 5 6 into the first lock Position 7 2 0 The pressure of the pressing container 1 0 1 1 1 The contraction force can be released accordingly 0 The container remains locked and sealed to the door 〇1 1 The container 1 0 is removed from the door 1 2 The user aligns the suction □ 1 1 〇1 1 to each of the latches 3 4 Apply a negative vacuum to the latches 3 4 〇The true 1 I-17-1 1 1 The size of the paper is applicable to the Chinese National Standard (CNS) A4 specification (210X 297 Mm) A7 B7 5. Description of the invention (I Μ --------- ^ — (please read the precautions on the back before filling in this page) pull the plunger 3 in the empty state 8 enter the retracted second open position 74. The shutter 12 can then be removed from the container 10. The present invention has been described in considerable detail here to comply with patent laws and provide those who are familiar with this skill to apply this novel principle and construct and use these necessary specialized components. However, it can be understood that the present invention can be implemented by different devices, but those various design changes, whether in terms of device details or operation processes, can be achieved without departing from the scope of the present invention. _ 1 8 _ This paper scale is applicable to China National Standard (CNS) Α4 specification (210X 297mm)