200307635 玫、發明說明· 【發明所屬之技術領域】 本發明係關於保存或運送用於製造半導體元件或液晶顯 示元件等之光罩基板時於盒内可確實地定位載置之固定件 ，不會與光罩基板表面接觸地，具有可防止光罩之破損或 因移位而產生靜電之固定件之光罩各。 【先前技術】 由先w使用於半導體積體電路等之製造步驟之光罩基板 ，關於例如使用於為製造半導體元件或液晶顯示元件等之 曝光顯影步驟等之光罩基板’其保存或運送時使用收納此 之光罩盒，為防止於光罩基板上附著塵埃者。 即，光罩基板為細微的照相製版品，由於因塵埃的附著 會帶來重大的損傷故厭惡會弄髒照相原板之任何污染物， 有極力防止塵埃附著之必要。 又，光罩基板為玻璃基板，於光罩盒内伴隨著運送等時 〈衝擊之光罩基板與其固定件之光罩支持體之偏移之摩擦 而產生靜電而有塵埃附著於光罩基板之虞，於照相製版: 附著塵埃，有帶來重大的損傷之虞。 因此， 體有例如 者。 作為將光罩基板載置於盒内之固定件之光罩支持 ，特開平2001-301877之第7圖及第8圖所示之構成 孩固定件之光罩支持 ' μ T肢久蛊體内面突出 要數量的保持枝部以該部分載置光罩基板者，關於該保\ 枝邵於幹部具有擁有傾斜平面之台板部之保持枝部或於4 83330 200307635 邵具有帽子 【發明内容 义保持枝部被揭 示 發明所欲解決之課題 如前述於光罩内放入光罩 地厭惡光罩本身的污染，因 下表面之接觸污染。 時，該光罩基板之使用上極端 此有必要極力避免關於光罩上 口此首先關於丽述之特開平2〇〇1_3〇1877所示之幹部有帽 =《保持枝部為，將該接觸面僅限定為帽子#，以極力 、、#接觸面者’惟關於該帽子部無論如何將與光罩之上下 表面接觸，無法避免該部分之污染。 又由於以帽子部之點支持，將光罩放人光罩盒内運送時 内光罩被搖晃，t由前述保持枝部偏移，不僅會附 著伴隨偏移之$染亦有破損之虞，進—步則該帽子部盘光 罩之接觸面之偏移而摩擦產生靜電使盒内之塵埃附著於光 罩表面者。 因此’有對光罩帶來很大的損傷之虞。 其次關於示於特開平厕-301 877之幹部具有擁有傾斜平 面之台板部之保持枝部，係成於該傾斜平面支持光罩之角 那即稜線’不與光罩之上下表面接觸。 關於该點雖極為有用，惟單僅具有傾斜平面，僅以兮面 支持光罩時雖可防止光罩向傾斜之上部方 ^ 以抑 1乃同又偏移，惟光 罩卻會簡單地向傾斜之下部方向偏移， 、 ^ 人尤罩會向傾斜平 面之水平的平面方向即幹部與垂線方向偏移。 例如於特開平2〇〇1 _301 877之圖5所示之你 〜休待枝邵之配置 83330 200307635 狀怨’於圖面上得合、 ，合以来置、;下万向偏移者，示於圖6之情形則 二本t 部分作為軸心簡單地向旋轉方向偏移。 > 放入光罩盒内運送時，内部之 述同樣地由保持枯却厄〃 > 早i搖晃，與則 、、斗偏私，有破損《虞，再者因該傾斜平 m〈接觸面偏移使光罩之棱線部分被摩擦而於光罩 之虞：電使麈埃附著於表面I，有對光罩帶來甚大的損傷 ♦再者’為不產纟偏移地將光罩以該等之保持枝部支持， 而要於保持枝部施以極高的壓力將光罩以本體與蓋體押住 ，而有因此傷及光罩之虞。 。又，亦有由於夾入光罩而於本體與蓋體之間產生間隙之 虞有助長塵埃侵入盒内的可能性。 如以上於盒内將光罩，不偏移地正確且安全 困難。 疋直狂為 本發明之目的為有鑑於所關觀點，將上述問題點解決提 供具有將光罩不觸及其上下表面地正確且安全地定置，即 使於運运時等之衝擊亦可防止光罩之偏移之固定部之光罩 盒。 課題解決之手段 為達成上述目的關於申請專利範圍第丨項之發明為具有 本體與關閉本體之開口部的蓋體而為收納光罩之光罩盒， 於本體之内部之本體開口部方向及裡面方向具有為載置光 罩之傾斜面之固定部，於蓋體關閉時對應該等固定部之蓋 體内邵具有為押住光罩之傾斜面之固定部之光罩盒，本體 83330 200307635 <開口 4方向心固疋邵係將其傾斜面向盒中心部漸漸地變 低地配設，本體之裡面方向之固定部係將其傾斜面向盒開 口邵方向漸漸地變低地配設’蓋體之開口部方向之固定部 係將㈣斜面向盒裡面方向漸漸地變低地配設，蓋體之裡 面万向〈固疋部係將其傾斜面向盒中心部方向漸漸地變低 地配設1關閉蓋體時，本體之固定部與蓋體之開口部方 向之固定部分別藉由傾斜面將光罩之焱線部分由上下方向 押住的同時可由前後方向押住之光罩盒，藉此發明達成前 述課題。 又關於申請專利範圍第2項之發明之略四角形狀之光罩 盒本體之内部具有4個分別由角部略向中心部方向分別為 載置光罩之具有傾斜面的固定部的同時對應於此於蓋體内 邵具有4個為押住光罩之具有傾斜面的时部之光罩盒，其 中本體之開π部方向的2個固定部係將其傾斜面向盒中心 邛漸漸地又低地配设，本體之裡面方向的2個固定部係相對 ，將其傾斜面相互向盒開口部方向漸漸地變低地配設，蓋 U开1 口 4万向的2個固定部係將其傾斜面向盒裡面方向 漸漸地夂低地n蓋體之裡面方向之2鋪定部係相互面 對，將其傾斜面相$ /*7 2 、 向益中心邵万向漸漸地變低地配設， 當關閉蓋體時，本體之固定部與蓋體之開口部方向之固定 部藉由分別之傾斜面將光罩之棱線部分由上下方向押住的 同時可由前後左右方向押住之光罩盒亦可達成。 或者關万、申请專利範圍第3項之發明之蓋體之固定部係 万、’、兩杨#万向具有固定基部，中央部以傾斜面所成之 83330 -10- 200307635 略橋形狀之固定部之光罩盒亦可。 進一步關於申請專利範圍第4項之發明於蓋體之固定部 之固定部基部具有大小分別相異之孔，於另—邊蓋體之固 足崢配汉處汉對應則述孔之兩個大小相異之突出部，藉由 万、妁述口疋4基邯之孔嵌入突出部可決定固定部之配設 之位置之光罩盒亦可。 此外關於申請春责I r ， v ’〗執圍弟5項之發明之蓋體之固定部 用有彈性之PP塊狀共聚麵十#甘 ^ ^ 4 ”永肢或虱基甲酸酯樹脂之光罩盒亦 同 〇 又關万；申睛專利範图楚、 视圍罘6項 < 發明之本體之固定部之 定部基部具有大小分別如田、 J相兴 < 兩個孔，於另一邊本體之 定部配设處設對應前诚 ^孔 < 兩個大小相異之突出部，葬 於前述固定部基部之孔旗 曰 之位置之光罩盒亦可。 ^ 又如關於申請專利笳 乾圍罘7項之發明於本體内 部插入口側裡面方向之固定部之附近，具有 ^ 漸漸地變高成固定部傾斜^ 万, Τ囬又鞋度又傾斜邊之辅助受台； 片，可於押入光罩時# σ 1 、、 f "耆傾斜邊可將光罩之棱線部引導： 固足邠又傾斜面之光罩盒亦可。 … 此外如關於申請專划閣# 乾圍弟8项之發明並且古私 之内面開D部侧，有較 ^ 义由本骨] 中到本體之開口部方向之固金 之傾斜面之該傾斜面稍高 又口疋Η 罩之載置吏的nn 輔 置決定肋彳，可控制并 罩之載置處的r時猎由辅助位置決定肋 定部之傾斜面之光罩向 止載置万；固 π側偏移之光罩盒亦相同。 83330 200307635 或者如關於申請專利範圍第9項之發明具有由蓋體之内 面之連接部插入口侧，延伸到蓋體之裡面方向之固定部之 傾斜面之肋片的同時具有較該傾斜面之高度稍高的肋片， 藉由肋片可阻止載置於固定部之傾斜面之光罩向裡面方向 偏移之光罩盒亦可。 此外如關於申請專利範圍第丨〇項之發明具有由蓋體之内 面之開口部側，延伸到蓋體之開口方向之固定部之傾斜面 之肋片的同時有較該傾斜面之高度稍高的肋片，藉由肋片 可阻止載置於固定部之傾斜面之光罩向開口方向偏移之 罩盒亦可。 進-步如關於申請專利範圍第u項之發明於本體及/或蓋 體之内面之兩側面，具有於由該側面部分延伸到收納光罩 時之光罩之邊緣部分之肋片’可控制光罩之載置處的同時 藉由肋片可阻止載置之光罩向橫方向偏移之光罩盒亦可。 【實施方式】 圖1為顯示關於本發明之光罩夕 疋皁<光罩盒<一實施狀態之 圖，以略四角形狀作為基盤之光罩各 光皁本體1與為覆蓋該本 體之開口部之光罩盒之蓋體2所成。 藉由蓋體2覆蓋本體1，可關閉光罩人^ 該當於將該本體1藉由蓋體2關 關閉時〈接缝之本體1之開 口周緣11及蓋體2之開口周緣21分 刀刀」具有笑出壁110、210, 藉由該等相互嵌合而成套合，私關Μ 1 备口於關閉時提高密封的程度。 其次將本體1與蓋體2兩者谏垃 接，且作為可將兩者開關自 在地折曲之軸片部分，藉由連接部3連接。 83330 -12- 200307635 該連接邵3，於略U字型之連接部本體3丨之兩端部具有插 入本體1及盖體2之連接邵插入口 12、22之舌片部32，於u字 型之連接邵本體3 1之開口側之舌片部分別具有接觸片3 5之 軸片形狀而成。 該接觸片35於分別之舌片部32作為水平狀態時維持1;字 型之連接部本體31之開口，接觸片35之一侧邊之接觸側面 351相互成接觸狀態。 因此，可將該接觸片3 5以面向盒内部方向的狀態將連接 邯3之分別之設片部32分別插入本體1及蓋體2之連接部插 入口 12、22，使本體1與蓋體2成關閉之狀態時如前述地舌 片邵32成水平狀態，接觸片35之接觸侧面351相互成接觸狀 態，可提高該部分之密封度。 其次由如此之狀態開啟蓋體2時u字型之連接部本體3 1的 部分折曲而可開啟。 與配設如此之連接部3之位置為對向方向之本體1與蓋體 2之開啟邵分具有本體1及蓋體2之凹部丨3、23，於該凹部13 、23内具有關閉滑板4。 關閉滑板4為藉由本體1之水平部1 3 〇或突出導通片1 3 1等 控制可動方向的同時藉由關閉滑板4將蓋體2之關閉塊23 1 等夹入以固定本體1與蓋體2而可鎖住，相反地藉由將該關 閉滑板4作為可動，解除該夾入而可開啟蓋體2。 如此之關閉滑板4為，配置於向本體1及蓋體2之分別之内 部方向設置之凹部1 3、3 3内者，以配置關閉滑板4之狀態， 將關閉滑板4以不由本體1及蓋體2之外表面向外部突出之 83330 -13- 200307635 狀態配置。 如以上連接部3及關閉 外周側片大致同一平面h 為分別可位於與本光罩盒之 之接縫套合時可使之於同：::將光罩盒之本體1與蓋體: 因此例如於該部分捲以 盥苫耆恥咿時，可使光罩盒之本體1 ，、皿把2又接缝於同一緩 維梏柘古、， ，且可將全部當作平面捲之，可 維待極回的密封性，可上 入。 極向的機率防止塵埃對盒内的侵 再者，斫可因應需要於太两曲 卜 甘a 、 1舁盍之接縫配設密封墊。 具’人，本體1於其内周而—，t 侧面設有肋片14，蓋體2亦同 褕也万；其内周面之侧面設有肋片24。 、以此，防止盒的變形，可防止伴隨本體ι及蓋體2之變形 # 逢偏私，可防止兩者之間隙之發生，且可增加本體1及 盍體2之強度。 並且^肋片14、24之内光罩盒之兩側邊部分配設之肋 片14、24 ’為防止收納光罩時光罩之橫方向偏移而延伸至 光罩兩側邊的附近。 特別是如示於圖地於蓋體2之盒内部有由蓋體2之内部之 周面之底部向開口部突出之肋片，與設於蓋體2之外周緣。 之又出壁21 〇之間有間隙地立設有定位肋片25。 此為，防止因盍體2覆蓋時設於本體ι之内周緣丨ι之突出壁 110與設於蓋體2之外周緣21之突出壁210套合之偏移者，防 止本體1之内周緣之突出壁Π0向盒内部方向偏移掉下以防 止套合之偏移。 83330 -14 - 200307635 其次，於本體1之内部由略四角形狀之盒之分別的角部稍 向中心部方向4處，分別有固定載置光罩之固定邵1 6，於該 部分定位載置光罩，可收納於盒内。 該固定部16具有固定部基部161及與光罩接觸之上面部 之傾斜面1 62，藉由於該傾斜面1 62抵接光罩下面侧之侧邊 之角部之棱線部分定位。 此時，固定部1 6之中，位於本體1之凹部1 3侧之兩個固定 邵1 6，其傾斜面1 62之傾斜低的端部1 62a在於本體1之内側方 向，高的端部1 62b在於本體1之外侧方向，傾斜面1 62之傾 斜與本體1之凹部1 3侧之侧邊平行地將外侧方向之端部提 高漸漸地向内側方向變低地分別配設。 又，於固定部16之中，位於本體1之連接部插入口 12侧之 兩個固定部16,其傾斜面162之傾斜低的端部i62a在於本體1 之内侧方向，高的在端部162b於蓋體2之外侧方向，傾斜面 162之傾斜與沒有本體1之凹部13及連接部插入口 12之兩側 邊平行地將外侧方向之端部提向漸漸地向内侧方向變低地 分別配設。 再者，支持該等固定部16之傾斜面162之固定部基部161 ’具有為維持載置光罩應有的高度之特定高度。 0此糸本^ 1内載置光罩時由本體1之凹部1 3侧之開口 邵分插入光罩時，位於本體丨之連接部插入口12側之兩個固 定部16之傾斜面162之傾斜，由於本體丨之裡面側高，開口 :側低，光罩之插入裡面側之下面侧之侧邊之棱線部分， 藉由該傾斜面162押止於特定位置，將光罩押止於載置位置 83330 -15- 200307635 可防止向本體裡面側押入一定以上，可防止光罩插入方向 之偏移。 於此狀態光罩之靠近側即位於本體丨之開口部侧之端部 下降將光罩載置於固定部16時，位於該本體侧之 兩個固定部16之傾斜面162之傾斜，由於本體〗之兩侧面側 高，本體1之内部侧低，為光罩兩侧部之下面側之側邊之角 邯之棱線部分將成載置於該傾斜面162，可由光罩之橫方向 進行押住，可防止對光罩之插入方向橫方向之偏移。σ 该等固足邵16之傾斜面162並非與光罩之上下面之表面 接觸者，係為接觸所謂棱線部分者，不會因接觸光罩面而 弄髒。 又，本體1之裡面方向之兩個固定部16之傾斜面162之傾 斜万向，與本體1之開口方向之兩個固定部16之傾斜面Μ〕 <万向，以所謂對向方向兩者面對交叉方向，可將光罩載 置於定位置的同時可防止偏移，且於收納光罩時即使由定 位置有若干偏移地收納時亦可容易地修正定置到定位置。 再者，固定部16之傾斜面162以多用於半導體相 類所構成為宜。 關之烯烴 又，該等固定部16為，於本體丨一體成形配設者之外，例 如=本體具有突出部，對此於固定部基部161具有將該突出 邯嵌合之孔’藉由將前述突出部嵌合於具有傾斜面162之固 疋部16之固定部基部16丨之孔嵌著於將本體丨者亦可。 例如於固定部基部161具有兩個孔，只要於本體！且有適 合於此之兩個突出m易地控制於配設時之頻斜面162 83330 -16 - 200307635 之方向。 /，於位於本體1之連接部插人部12側之兩個固定部16之 具有辅助受台肋片151於稍微本體i中心部方向。 +2万、本"1〈開口部方向低，而隨著向裡面變高地傾 斜 < 辅助受台肋片151。 、 為將光罩收納於本體1由開口部方向向本體1之連 接部插入口 1 2摘士 m a二， 、 、 ’、固疋部放置時，可控制光罩之裡面方向 (下面之棱線部分，沿著該辅助受台肋片i5i押入本體丄之 裡面方向時之方向。 彳疋知光罩沿著具有傾斜之辅助受台肋片1 5 1押入，則 斤也達到接近固疋部16之傾斜面162之高度附近，就此可 抵接固定部16之傾斜面162。 因此’載置光罩時可圖方便，可確實地定置於定位置。 者辅助文台肋片1 5 1由於開口部側低，將光罩載置於 4仏之固疋邵，則再也不與光罩接觸。 又，於本體1之開口部方向具有辅助定位肋片152，將光 罩載置於固疋部16時，為將光罩引導至定位置者。 於=二將光罩於未達裡面側之定位置之狀態欲將光罩載置 、一足P 1 6時，開口邵方向之輔助定位肋片1 52將成障礙， 光罩藥去乘於開口部方向之固定部丨6，將光罩引導致定 位置時，辅助定位肋片152再也不成障礙，可載置於前述開 口 #方向之固定部16。 、、 辅助走位肋片1 5 2為，只要是較光罩之定置處配設 於開口部方向者即可。 83330 -17- 200307635 其次，於蓋體2之内部於略四角形狀之盒之由分別之角部稍 微中心方向之4處，亦具有分別固定載置光罩之固定部26。 該等固定部26分別配置於與本體1之固定部16對應之部 分，於本體1之固定部16上載置光罩關閉蓋體時，藉由分別 對應於固定部1 6位置之蓋體2之固定部押住者。 該固定部26，由固定部基部261及具有與光罩接觸之面之 傾斜面262所成，關閉蓋體2時光罩上面側之侧邊之角部之 棱線部分與該蓋體固定部26之傾斜面262抵接，由上方方向 向下方方向押住。 此時，固定部26之中，位於蓋體2之凹部23侧之兩個固定 部26,其傾斜面262之傾斜之低的端部262a在於蓋體2之内側 方向，高的端部262b在於蓋體2之外侧方向，傾斜面262之 傾斜與沒有蓋體2之凹部23及連接部插入口 22之兩侧邊平 行地配設。 又’於固定部26内，位於蓋體2之連接不插入口 22侧之兩 個固定邵26,其傾斜面262之傾斜之低的端部262a在於蓋體2 之内侧方向，高的端部262b在於蓋體2之外侧方向，傾斜面 262之傾斜沿著蓋體2之連接部插入口 22侧之侧邊平行地配 設。 再者，支持該等之固定部26之傾斜面262之固定部基部 261，具有為維持為以定位置押住光罩之高度之特定高度。 因此，於本體1内載置光罩關閉蓋體2時，盒之裡面側即 位於連接部插入口 22侧之兩個固定部26，向盒之橫方向之 内侧降低其傾斜面，光罩插入方向之兩側面之上面侧之兩 83330 -18- 200307635 侧邊之角部之棱線部分以該傾斜面262抵接 入方向之兩侧方向進行押住。 又’光罩插入罪近側之盒開口邵侧之上面侧之侧邊之角 部之稜線部分係，與位於蓋體2之凹部23側之兩個固定部26 之傾斜面262之傾斜抵接者。 該固定部26向蓋體2之中心部方向漸漸地變低，盒開口部 侧高而向盒中心方向變低地與盒之兩侧平行地將傾斜面 262朝向者，盒之縱方向即於裡面方向將其傾斜面變低，光 罩之插入方向之兩侧面上之上面側之兩側邊之角部之棱線 部分與該傾斜面262抵接可防止向開口部方向之偏移者。 再者，固定部26之傾斜面262以多用於半導體相關之烯烴 類所構成《外’為以彈性押纟，以由pp塊狀共聚體所成者 或氨基甲酸酯樹脂等所構成者亦可。 該固定部26，於固定部基部261具有傾斜面之構成之 外，例如以兩端部分作為固定部基部261， 傾斜面262之橋狀固定部26亦可。 “作為 藉由_有彈H之構件或/與此—起作成橋狀使之擁有彈性 ，於蓋體2_時可以彈力押住，不僅可防止傷及光罩亦可 圖防止偏移。 又’孩寺《固定部26，於蓋體2一體成形配設者之外 體具有^出部，對此於固定部基部261具有對該突出 ,“《孔’藉由於具有傾斜面262之固定部26之固定部基 邵261之孔將前述突出部嵌合嵌著於蓋體二者亦可。土 例如於兩端部具有固定部基部261其分別具有孔，只要於 83330 -19- 200307635 蓋體2有適合於此之兩個突出部，可容易地控制於配設時之 傾斜面262之方向。 特別是藉由改變突出部之形狀，長度或大小等及前述2個 孔之形狀，深度或大小等，可將特定之傾斜配合希望之方 向嵌入。 人，证於盖 ▼、孤叫 > 〜μ叩咖八部22側冬雨個固疋部26之間 ，於稍微蓋體2之連接部插入口 22具有肋片24的同時位於蓋 體2之凹部23侧之兩個固定部％之間，於稍微蓋體2之凹= 23侧具有肋片24，合起來該等肋片具有突出部241。 、該等肋片24及肋片突出部241，通常雖不與光罩接觸，惟 万、使用上奇盒文到大的衝擊越過固定部“之彈性的按押之 制服力時，為消除光罩偏移之防備。 、4以上，本體固疋部16與蓋體2之固定部％，分別對 =配設，藉由由上下夾住將光罩的上下面之角部之棱線 邵分押住疋位之光罩收納及防止偏移。 此時，與本體1及嘗娜 l及我肢2對向乏固定部16與固定部26分別 將久、斜面朝向交又方向， 成由四方方向押人。猎由先罩（上下面之各棱線部分 再者於辅助定位狀& j, Βφ + _ 2或肋片突出部241受到更強的衝200307635 Description of the invention · [Technical field to which the invention belongs] The present invention relates to a fixing member which can be reliably positioned and placed in a box when storing or transporting a photomask substrate for manufacturing a semiconductor element or a liquid crystal display element, etc. Each of the photomasks has a fixing member which can prevent damage to the photomask or generate static electricity due to displacement in contact with the surface of the photomask substrate. [Prior art] A photomask substrate used in a manufacturing step of a semiconductor integrated circuit or the like is used for a photomask substrate used in an exposure and development step for manufacturing a semiconductor element or a liquid crystal display element, etc. Use a reticle case to prevent dust from adhering to the reticle substrate. That is, the photomask substrate is a fine photographic plate-making product, and since the adhesion of dust will cause significant damage, it will hate any pollutants that will stain the photographic original plate, and it is necessary to prevent the adhesion of dust as much as possible. The photomask substrate is a glass substrate. In the photomask case, static electricity is generated due to the friction between the photomask substrate that is impacted and the photomask support of the fixture, and dust is attached to the photomask substrate. Yu, for photo-making: Dust may cause serious damage. Therefore, the body is for example. As a photomask support for a fixing member for placing a photomask substrate in a box, JP-A-2001-301877, FIG. 7 and FIG. 8, constitute a photomask supporting a child fixing member, and the inner surface of the μ T limb is long. If the number of holding branches is prominent and the photomask substrate is placed on this part, the holding branch of the holding branch has a platen section with an inclined plane or the holding branch is at 4 83330 200307635. The problem that the branch is to be solved by the disclosed invention is to abolish the contamination of the photomask itself by placing the photomask in the photomask as described above, and the contamination of the lower surface due to contact. At this time, the use of the photomask substrate is extremely extreme. It is necessary to try to avoid the upper part of the photomask. First of all, the cadres shown in kaishu kaikai 20001_3〇1877 have caps. The surface is limited to the hat #, and Ji Li,, # contacting the surface, but the hat will contact the upper and lower surfaces of the mask in any case, and contamination of this part cannot be avoided. In addition, due to the support of the hat portion, the inner mask is shaken when the mask is put into the mask box for transportation, and the t is shifted from the aforementioned holding branch. Further, if the contact surface of the disc cover of the cap is shifted and friction is generated, static electricity causes the dust in the box to adhere to the surface of the mask. Therefore, there is a possibility that the photomask may cause great damage. Secondly, the cadre shown in JP-301-877 has a holding branch portion with a platen portion having an inclined plane, which is formed at the corner of the inclined plane supporting the mask, that is, the ridgeline 'does not contact the upper and lower surfaces of the mask. Although this point is extremely useful, it only has a slanted plane. When the mask is supported only with a flat surface, it can prevent the mask from tilting to the top of the tilt. The direction of the lower part is shifted, and the mask will shift to the horizontal plane direction of the inclined plane, that is, the direction of the trunk and the vertical line. For example, as shown in Figure 5 of JP-2001_301 877, you have to wait for the configuration of Shaozhi 83330 200307635. Resentment 'combined on the map, and placed together; the lower the universal offset, In the case of Fig. 6, the two t-sections are simply shifted in the direction of rotation as the axis. > When transported in a photomask box, the internal description is kept dry but unwell > Shake early i, but then, and the bucket is private and damaged, "Yu, and because of the tilt flat m <contact surface The offset may cause the ridges of the photomask to be rubbed and cause the photomask to be susceptible: electrically attaching the cymbals to the surface I will cause great damage to the photomask. ♦ Furthermore, the photomask will not be offset without producing an offset. With the support of the holding branches as described above, it is necessary to apply extremely high pressure on the holding branches to hold the photomask with the body and the cover, which may cause damage to the photomask. . In addition, there is a possibility that a gap may be generated between the main body and the cover body due to the sandwiching of the photomask, which may facilitate the penetration of dust into the case. As described above, it is difficult and accurate to place the photomask in the box without offset. The purpose of the present invention is to solve the above-mentioned problems in view of the related viewpoint, and to provide a correct and safe positioning of the photomask without touching the upper and lower surfaces, and to prevent the photomask from being impacted during transportation. The reticle of the offset fixed portion. Means to solve the problem In order to achieve the above-mentioned object, the invention according to item 1 of the scope of patent application is a cover body having a body and a closing portion of the body, and a photomask box for accommodating a photomask. The direction has a fixed part for mounting the inclined surface of the photomask, and the cover body corresponding to the fixed part when the cover is closed has a photomask box for holding the fixed part of the inclined surface of the photomask, the body 83330 200307635 & lt The opening 4 is fixed in the direction of the center, and it is gradually lowered toward the center of the box, and the fixed part in the inner direction of the body is gradually lowered toward the opening of the box. The fixed part in the direction of the cover is gradually lowered toward the inside of the box, and the inner direction of the cover body is gradually lowered toward the center of the box. 1 When the cover is closed , The fixing portion of the body and the fixing portion in the direction of the opening portion of the cover body respectively hold the reticle portion of the photomask from the up-down direction through the inclined surface and the photo-mask box that can be pressed from the front-back direction, thereby Informed prior to said subject. Regarding the invention of the second patent application, the substantially quadrangular shape of the photomask box body has four fixed portions with inclined surfaces on which the photomask is placed from the corner to the center, respectively. There are 4 photomask boxes in the cover body that hold the photomask and have an inclined surface. The 2 fixing parts in the direction of the opening π of the body are inclined to face the center of the box. It is arranged so that the two fixing parts in the inner direction of the main body are opposite to each other, and the inclined surfaces thereof are gradually lowered toward each other in the direction of the opening of the box. The inner direction of the box is gradually lowered to the lower part of the inner direction of the cover. The two laying parts are facing each other, and their inclined surfaces are $ / * 7 2. The Xiangyi Center Shao Wanxiang is gradually lowered and arranged. When the cover is closed In this case, the mask portion of the main body and the fixing portion in the direction of the opening of the cover body can be achieved by pressing the ridge portions of the photomask from the up-down direction and the front-rear and left-right direction at the same time by respective inclined surfaces. Or Guan Wan, the fixed part of the cover of the invention of the third patent application is Wan, ', Liang Yang # Wanxiang has a fixed base, and the central part is formed by an inclined surface. 83330 -10- 200307635 Slightly bridge-shaped fixing The reticle box is also available. Further on the invention of the fourth scope of the patent application, the base of the fixed part of the fixed part of the cover has holes of different sizes, and the two sizes of the holes are described in the fixed foot of the side cover and the Chinese counterpart. For different protruding parts, a mask box that can determine the position of the fixed part can be determined by inserting the protruding part of the hole of the four bases in the mouth. In addition, regarding the application of the spring responsibility I r, v '〗 The 5th invention of the cover of the cover of the fixed body with a flexible PP block copolymer surface ten # 甘 ^ ^ 4 "permanent limb or lice based formate resin The photomask box is also the same and the same. The 6 bases of Shen Yan's patent Fan Tuchu and the visual envelopment < fixed part of the body of the invention has a fixed base part with two sizes, such as Tian, J Xiangxing < On the other side of the body, there is a photomask box corresponding to the front ^ hole < two protrusions of different sizes, buried in the position of the hole flag at the base of the aforementioned fixed portion. ^ Another example is about the application The 7 inventions of the patent 罘 stem enclosure are located near the fixing part in the inner side of the insertion mouth side of the body, and have an auxiliary receiving platform that gradually becomes higher and the fixing part is inclined 10,000, and the shoe is inclined and the side is inclined; You can guide the reticle of the mask when the sloping edge is pressed. # Σ 1 、, f " The tilted edge can guide the ridge of the mask: You can also fix the mask box with the tilted surface. The eight inventions of Qianweidi and the inner part of the ancient private part open the side of the D part, and there are more meanings from the original bone] to the opening part of the body The inclined surface of the solid gold is slightly higher and sloping. The nn auxiliary placement of the cover determines the rib. The position of the rib can be controlled by the auxiliary position. The face mask is placed toward the stop; the same is true for the mask box with a fixed π side offset. 83330 200307635 Or, as for the invention in the ninth aspect of the patent application, the connection part of the inner surface of the cover body is inserted into the mouth side and extends to The fins on the inclined surface of the fixed portion in the inner direction of the cover have ribs slightly higher than the height of the inclined surface. The fins can prevent the photomask placed on the inclined surface of the fixed portion from deviating inward. It is also possible to move the reticle box. In addition, for example, the invention concerning the scope of application for patent No. 丨 has a rib with an inclined surface extending from the opening portion side of the inner surface of the cover body to the fixed portion of the opening direction of the cover body. The ribs which are slightly higher than the height of the inclined surface can also prevent the mask box on the inclined surface of the fixed portion from being shifted toward the opening by the ribs. The invention of the item is two of the inner surface of the body and / or the cover Surface, the ribs extending from the side portion to the edge portion of the mask when storing the mask can control the placement of the mask, and the rib can prevent the mounted mask from shifting in the horizontal direction. [Embodiment] FIG. 1 is a diagram showing an implementation state of the mask evening soap < mask box > of the present invention, and each of the mask body of the mask having a substantially rectangular shape as a base plate 1 and the cover body 2 for the mask box covering the opening of the body. By covering the body 1 with the cover body 2, the photomask can be closed. ^ When the body 1 is closed with the cover body 2 closed < The opening periphery 11 of the seam body 1 and the opening periphery 21 of the cover body 2 have a cutting knife 110 and 210, which are fitted together by these interfitting, and the private M1 preparation opening is improved when closed. Degree of sealing. Next, both the main body 1 and the cover 2 are connected to each other, and are connected by a connecting portion 3 as a shaft piece portion that can be flexibly folded between the switches. 83330 -12- 200307635 This connection Shao 3 is provided with a tongue piece part 32 connecting the Shao insertion openings 12 and 22 of the body 1 and the cover body 2 at both ends of the slightly U-shaped connection part body 3 丨. The tongue pieces on the opening side of the connecting Shao body 31 have shaft shapes of the contact pieces 35 respectively. The contact piece 35 maintains 1 when the respective tongue piece portions 32 are in a horizontal state; the opening of the connecting body 31 of the shape, and the contact side surfaces 351 of one side of the contact piece 35 are in contact with each other. Therefore, the contact piece 35 can be inserted into the connection portion insertion openings 12 and 22 of the main body 1 and the cover body 2 with the respective set pieces 32 connecting the hand 3 in a state facing the inside of the box, so that the main body 1 and the cover body In the 20% closed state, as described above, the tongue piece Shao 32 is in a horizontal state, and the contact sides 351 of the contact piece 35 are in contact with each other, which can improve the sealing of the part. Next, when the lid body 2 is opened in such a state, a part of the U-shaped connecting portion body 31 is bent and can be opened. The position where the connecting part 3 is provided is the opening of the body 1 and the cover 2 in the opposite direction. The recesses 3 and 23 have the body 1 and the cover 2, and the closing slide 4 is provided in the recesses 13 and 23. . The closing slide plate 4 is to fix the main body 1 and the cover by clamping the closing block 23 1 of the cover body 2 by closing the slide plate 4 while controlling the moving direction by the horizontal portion 1 30 of the body 1 or the protruding conductive piece 1 31. The body 2 can be locked, and conversely, the closing slide 4 can be moved, and the cover 2 can be opened by releasing the clamping. In this way, the closing slide plate 4 is disposed in the recesses 1 3, 3 and 3 provided in the respective internal directions of the main body 1 and the cover body 2. In the state of closing the slide plate 4, the closing slide plate 4 is not controlled by the body 1 and the cover. The outer surface of the body 2 is arranged in a state of 83330 -13- 200307635 protruding outward. For example, the above-mentioned connecting portion 3 and the closed outer peripheral side plate are approximately the same plane h, which can be respectively located when they are fitted with the seams of the photomask box ::: The photomask body 1 and the cover body: Therefore For example, when this part is rolled with toilet shame, the body 1 of the mask box and the handle 2 can be sewn together in the same gentle dimension, and all can be rolled as a plane. Maintains the tightness of the pole and can be inserted. There is a polar chance to prevent dust from invading the inside of the box. If necessary, a gasket can be provided at the seams of the two tunes a and 1a. In the case of a person, the body 1 is provided with ribs 14 on its inner side, and the cover body 2 is also provided with ribs 24; the sides of its inner peripheral surface are provided with ribs 24. In this way, the deformation of the box can be prevented, and the deformation accompanying the body 1 and the cover 2 can be prevented. # When it is private, it can prevent the gap between the two and increase the strength of the body 1 and the body 2. In addition, the ribs 14, 24 'provided on both sides of the mask box within the ribs 14 and 24 are extended to the vicinity of the sides of the mask in order to prevent the lateral shift of the mask when the mask is stored. In particular, as shown in the figure, inside the box of the cover body 2, there are ribs protruding from the bottom of the inner peripheral surface of the cover body 2 toward the opening, and provided on the outer periphery of the cover body 2. In addition, positioning ribs 25 are erected with a gap between the exit walls 21. This is to prevent the offset of the protruding wall 110 provided on the inner peripheral edge of the main body ι and the protruding wall 210 provided on the outer peripheral edge 21 of the cover 2 when the body 2 is covered, and to prevent the inner peripheral edge of the main body 1 The protruding wall Π0 is shifted off toward the inside of the box to prevent the shift of the fit. 83330 -14-200307635 Secondly, inside the body 1, the corners of the box with a slightly quadrangular shape are slightly toward the center at 4 positions, and there are fixed mountings 16 for fixing the photomasks. Photomask can be stored in the box. The fixing portion 16 has a fixing portion base portion 161 and an inclined surface 1 62 of an upper surface portion in contact with the mask, and the inclined portion 1 62 is positioned by a ridgeline portion of a corner portion of the side edge contacting the lower side of the mask. At this time, of the two fixing pins 16 located on the concave portion 13 side of the main body 1 among the fixed portions 16, the inclined end 1 62 a of the inclined surface 1 62 lies in the inner direction of the main body 1 and the high end 1 62b is located in the outer direction of the main body 1, and the inclination of the inclined surface 1 62 is arranged parallel to the side of the concave portion 13 side of the main body 1 to increase the end in the outer direction and gradually lower it toward the inner direction. Among the fixing portions 16, the two lower fixing portions 16 on the side of the connection portion insertion opening 12 of the main body 1 have a lower inclined end portion i62a of the inclined surface 162 in the inner direction of the main body 1 and a higher portion 162b In the direction of the outer side of the cover body 2, the inclination of the inclined surface 162 is arranged parallel to both sides of the recessed portion 13 and the connection portion insertion opening 12 without the main body 1, and the end portions in the outer direction are gradually lowered gradually toward the inner direction. . Furthermore, the fixed portion base portion 161 'supporting the inclined surface 162 of the fixed portion 16 has a specific height to maintain the height required to place the photomask. 0 此 糸 本 ^ 1 When the photomask is placed inside, when the photomask is inserted through the opening on the 3rd side of the recess 1 of the main body 1, the inclined surfaces 162 of the two fixing parts 16 located on the side of the connection part insertion opening 12 of the main body 丨Inclined, because the inner side of the body is high and the opening is low: the edge of the mask is inserted into the edge of the lower side of the inner side. The inclined surface 162 is stopped at a specific position to stop the mask at Placement position 83330 -15- 200307635 Prevents pressing more than a certain amount into the back side of the body, and prevents shifting of the mask insertion direction. In this state, the near side of the photomask, that is, the end located on the opening side of the main body 丨 is lowered. When the photomask is placed on the fixed part 16, the inclined surfaces 162 of the two fixed parts 16 on the main body side are inclined. The sides of the two sides are high and the inner side of the body 1 is low. The ridges of the corners of the sides of the lower side of the mask will be placed on the inclined surface 162, which can be performed in the transverse direction of the mask. Pressing can prevent the lateral shift of the insertion direction of the photomask. σ The inclined surfaces 162 of these solid feet Shao 16 are not in contact with the upper and lower surfaces of the photomask. They are in contact with the so-called ridgeline parts and will not be soiled by contact with the photomask surface. In addition, the inclination of the inclined surfaces 162 of the two fixing portions 16 in the inner direction of the main body 1 and the inclination M of the two fixing portions 16 in the opening direction of the main body 1] < When the user faces the cross direction, the photomask can be placed at a fixed position and prevented from shifting, and the photomask can be easily fixed to the fixed position even when the photomask is stored with a slight offset from the fixed position. In addition, the inclined surface 162 of the fixing portion 16 is preferably configured for a semiconductor type or the like. Related to the olefin, the fixing portions 16 are provided in addition to the body 丨 integrally formed and provided, for example, the body has a protruding portion, and the fixing portion base 161 has a hole for fitting the protruding portion ′. The above-mentioned protruding portion may be fitted into the hole of the fixing portion base 16 of the fixing portion 16 having the inclined surface 162, and may be embedded in the body. For example, there are two holes in the base 161 of the fixing portion, as long as the body! And there are two protruding m suitable for this to easily control the direction of the frequency ramp 162 83330 -16-200307635 during the deployment. The auxiliary receiving ribs 151 on the two fixing portions 16 located on the side of the insertion portion 12 of the connection portion of the main body 1 are slightly toward the center of the main body i. +20,000, Ben " 1 <The opening portion is low in direction, and tilts as it becomes higher inward < auxiliary receiving rib 151. In order to store the photomask in the body 1 from the direction of the opening to the connection part insertion opening 12 of the body 1, it can be used to control the inner direction of the photomask (the lower edge line). Partly along the direction when the auxiliary receiving ribs i5i are pushed into the inner side of the main body 彳 疋. If the photomask is pushed along the auxiliary receiving ribs 1 5 1 with a tilt, the weight also reaches close to the fixed part 16 Near the height of the inclined surface 162, the inclined surface 162 of the fixed portion 16 can be contacted. Therefore, 'the photomask can be conveniently placed and can be accurately positioned at a fixed position. The auxiliary table ribs 1 5 1 due to the opening The side is low, and the photomask is placed on the solid surface of 4mm, so it will not contact the photomask any more. In addition, it has auxiliary positioning ribs 152 in the direction of the opening of the main body 1, and the photomask is placed on the solid surface. At 16 o'clock, it is the person who guides the photomask to a fixed position. If the photomask is to be placed in a state where the photomask has not reached the fixed position on the inner side, when the foot is full P 1 6, the auxiliary positioning rib in the direction of the opening is opened. Sheet 1 52 will become an obstacle. The mask medicine will go to the fixed part in the direction of the opening. When the position is fixed, the auxiliary positioning rib 152 is no longer an obstacle, and can be placed on the fixing portion 16 in the direction of the opening #. The auxiliary positioning rib 1 2 is provided as long as it is located at a position more than the photomask. 83330 -17- 200307635 Secondly, there are four fixed positions in the slightly quadrangular box inside the cover 2 which are slightly centered from the respective corners, and also have fixing parts for fixing the photomasks respectively. 26. These fixing portions 26 are respectively disposed at the portions corresponding to the fixing portion 16 of the main body 1, and when the photomask is closed on the fixing portion 16 of the main body 1, the covers corresponding to the 16 positions of the fixing portion are respectively placed. The fixing part 26 is a fixing part 26. The fixing part 26 is formed by the fixing part base 261 and the inclined surface 262 having a surface in contact with the mask, and the ridge line of the corner of the upper side of the mask when the cover 2 is closed. Partly abuts against the inclined surface 262 of the cover fixing portion 26, and presses it from the upper direction to the lower direction. At this time, among the fixing portions 26, the two fixing portions 26 located on the concave portion 23 side of the cover 2 are inclined. The low-inclined end portion 262a of the surface 262 is in the direction of the inside of the cover 2 The portion 262b is located outside the cover 2 and the inclination of the inclined surface 262 is arranged parallel to both sides of the recessed portion 23 and the connection portion insertion opening 22 without the cover 2. Also in the fixing portion 26, it is located in the cover 2 It is connected to the two fixed shafts 26 that are not inserted on the side of the mouth 22. The inclined end 262a of the inclined surface 262 is in the direction of the inside of the cover 2 and the high end 262b is located in the direction of the outside of the cover 2. The inclined surface 262 The inclination is arranged in parallel along the side of the connection part insertion port 22 side of the cover body 2. Furthermore, the fixing part base 261 supporting the inclined surface 262 of the fixing part 26 has a fixed position for maintenance. The specific height of the height of the reticle. Therefore, when the photomask closing cover 2 is placed in the main body 1, the two inner sides of the box, that is, the two fixing portions 26 on the side of the connection part insertion opening 22, lower the inclined surface toward the inner side in the lateral direction of the box, and the photomask is inserted. The ridgeline portions of the corners of the upper sides of the two sides of the direction, 83330 -18- 200307635, are clamped with the inclined surface 262 abutting both sides of the access direction. Also, the ridge line portion of the corner of the side of the upper side of the opening of the box near the side of the mask is inserted into the inclination of the inclined surface 262 of the two fixing portions 26 on the concave portion 23 side of the cover 2 By. The fixing portion 26 gradually decreases toward the center portion of the cover 2, and the side of the opening portion of the box is high and lower toward the center of the box. The inclined surface 262 faces parallel to both sides of the box, and the longitudinal direction of the box is inside. The inclined surface is lowered in the direction, and the ridge portions of the corners of the upper and lower sides on both sides of the mask in the insertion direction are in contact with the inclined surface 262 to prevent the deviation in the direction of the opening. In addition, the inclined surface 262 of the fixing portion 26 is composed of olefins mainly used for semiconductors. The outer side is formed by elasticity, and is formed by a pp block copolymer or a urethane resin. can. The fixing portion 26 may have a structure in which the fixing portion base 261 has an inclined surface. For example, both ends may be used as the fixing portion base 261, and the bridge-like fixing portion 26 in the inclined surface 262 may be used. "As a component made of _ with elastic H or / with this, it is made into a bridge shape to have elasticity, and it can be elastically held when the cover 2_, not only to prevent injury to the photomask, but also to prevent displacement. "Haiji" fixed part 26 is provided with a body outside the cover body 2 and is provided with an outer part. For this, the fixed part base 261 has a protrusion, "" hole "because of the fixed part with an inclined surface 262 The fixing portion 26 of the base 261 may be fitted with the aforementioned protruding portion to the cover body. For example, the soil has a fixed base 261 at both ends, and each has a hole. As long as the cover body 2 has two protruding portions suitable for the 83330 -19- 200307635, the direction of the inclined surface 262 during deployment can be easily controlled. . In particular, by changing the shape, length, or size of the protruding portion and the shape, depth, or size of the two holes, a specific tilt can be fitted in the desired direction. The person is shown in the cover ▼, solitary call > ~ μ 叩 Ca eight sections 22 side of the winter rain between the solid stubby section 26, slightly connected to the cover 2 of the insertion portion 22 has ribs 24 and is located in the cover 2 Between the two fixing portions on the concave portion 23 side, there are ribs 24 on the concave = 23 side of the slightly cover body 2, and these ribs together have a protruding portion 241. The ribs 24 and the rib protrusions 241 are usually not in contact with the photomask. However, in order to eliminate the light, the impact of the elastic pressing force of the fixed part over the fixed part is used to eliminate light. Precautions against shifting of the mask. Above 4, the fixing parts of the main body fixing part 16 and the cover 2 are respectively set to = configuration, and the ridge lines of the upper and lower corners of the photomask are divided by clamping up and down. The mask that holds the niches is stored and prevented from shifting. At this time, the fixed part 16 and the fixed part 26 are opposite to the main body 1 and Zana 1 and my limb 2 respectively. The direction is to hold people. The hunting is first covered (the ridges of the upper and lower sides are further assisted by positioning & j, Βφ + _ 2 or the rib protrusion 241 is subjected to a stronger impact.
擊時亦可將光罩之偏鵷知座τ 士田 W 止偏移措施。 抑制在取低限之所謂兩段構造之防 如以上，於本體1内 光罩上面側之側邊、又下將蓋體2關閉時 ;邯又棱線部分，與該蓋體固定部26 认斜面初抵接，成由上方方向向下方方向押住，可將光 83330 -20- 200307635 罩以靜止狀態定置。 再者藉由於光罩之上下面之各棱線部分於本體！及蓋 相對< 固足邵16與固定部26分別將其傾斜 ^ 由四万万向押住可使光罩不會偏移地收納於光罩盒内。 又因固定部2 6以彈性押住光罩可進—步抑孤 的同時亦可防止光罩的破損。 移 固足邵1 6、2 6接觸 又，僅以光罩之角部之棱線部分與各 可不接觸光罩本身地載置。 移所產生之靜電，可防止 可防止因各固定部之接觸 藉此可防止因盒内之光罩之偏 不必要的粉塵附著於光罩的同時 之光罩表面之污染。 防止因光罩之偏 合起來，於光罩之操作之上亦可充分地 移之光罩破損。 再者，為防止光罩盒本身產生靜電的情事而使用塗敷導 笔树月曰類之素材的情形，咬者梓闲 y 4有便用添加防止帶電效果高的 導電橡膠之壓克力系樹脂者亦可。 藉此防止益本身產生靜電，可防止不必要的塵埃對盒之 附著。 | 圖2為顯示先前例之一例之圖，本體7與蓋體8以軸片90之 口個翼4 90 1連接，設於由本體7之開口周緣突出形成之板 之先袖之本體侧固定塊7丨與合蓋時與此接合之蓋體侧固定 塊81藉由固定滑板95扣合之構成。 Q此居固足滑板9 5位於蓋體8之上部方向向盒之外部突 出形成者。 83330 ' 21 - 200307635 於該部分以黏著膠帶捲繞時因固定部95之部分隆起，會 產生空隙。 又錯開该部分’僅將靠該固定邵之下之部分以黏著膠帶 捲繞時，突出形成之本體侧固定塊71之周邊與蓋體側固定 塊8 1之間未被黏著膠帶捲繞會留下空隙，因該部分塵埃合 進入盒内部。 又，於本體7具有固定部75，雖均具有傾斜面751，惟該 等全由盒之兩侧邊方向漸漸地向内侧之盒中心變低的傾斜 ’於橫方向之移動雖可某種程度的控制，對縱方向之偏移 則係幾近無力者。 再者於盖體8具有略棒狀之固定部85，該固定部以之先端 具有帽子部。 因此，關閉盍體時於光罩之上面表面以該帽子部接觸， 押住光罩者。 此為 ㈢與光罩表面接觸的同時係以帽子部先端部分之 一點押住者，於抑制光罩之偏移上極為脆弱。 再者’於該部分施力過頭時有發生光罩破損等之虞。 圖3為顯示開啟本光罩盒之蓋體2之狀態之圖。 如本圖所示位於本體1之凹部13側之兩個固定部16與凹 邰1 3側之侧邊平行地配設，位於本體丨之連接部插入口 12側 心兩個固疋部16與凹部23及沒有連接部插入口 ^之兩側邊 即由盒之開口部方向向裡面方向平行地配設。 再者’位於蓋體2之凹部23侧之之兩個固定部26與四部23 及沒有連接部插入口 22之兩侧邊平行地配設。 83330 -22- 200307635 又，位於蓋體2之連接部插入口 22侧之之兩個固定部26與 盍體2之連接部插入口 22側之側邊平行地配設。 因此將蓋體2閉合時，本體丨之固定部16及與此對應之蓋 體2之固定部26分別朝向交叉之方向，可將光罩不僅由上下 面進一步可由四方押住。 圖4為顯示本體丨之固定部16之一例之圖’由兩個圓筒狀 的腳部以連接部連接構成之固定部基部161與傾斜面162所 成。 於該傾斜面162接光罩之棱線部者。 再者固足邯基部1 6 1之兩個圓筒形狀之腳部有分別寬度 相異之孔。 於本體1設粗細分別相異之兩個突出部，藉由將該突出部 篏入前述孔，將本固定部丨6配設於本體1。 例如藉由设如此粗細相異之兩個突出部，可將本固定部 16之安裝方向無誤且簡單地進行。 圖5為顯示蓋體2之固定部26之一例之圖，顯示以兩端部 分作為固疋邵基部261，將其中間部分作為傾斜面262之略 橋狀之固定部。 兩端邯分為’不使固定部基部26丨開掉地以連接構件連接。 因此，於該傾斜面262接光罩之棱線部。 特W疋因於固定邵基部261間具有傾斜面262，該傾斜面 262成擁有彈性，可彈壓光罩。 又於兩個固定邵基部2 61分別具有相異寬度之孔。 介由於盖體2設粗細分別相異之兩個突出部分，藉由將該 83330 •23 - 200307635 笑出邵嵌入前述孔可配設本固定件26於蓋體2。 藉由作成如此，與前述同樣地，可將本固定部2 6安裝方 向無誤且簡單地進行。 發明之效果 1. 第一之效果：有關於本發明之光罩盒，將本體之具有 傾斜面之固定部改變盒開口部與裡面方向之傾斜之方向的 同時盍體之固定邵亦具有傾斜面，將蓋體閉合時將兩者之 固疋部之傾斜面會交叉地構成，關於本體則開口部方向之 固定部之傾斜面以左右方向傾斜，使裡面方向之固定部之 傾斜面以前後方向，即由裡面方向向開口部方向漸漸地變 低地傾斜，關於蓋體則使開口部方向之固定部之傾斜面由 開口邵方向向裡面方向漸漸地變低地傾斜，使裡面方向之 固疋部之傾斜面以左右方向傾斜，使夾入之光罩成除上下 万向外由則後左右方向押住，於收那時之光罩之偏移消失 ，可防止因固定件與光罩間產生偏移之摩擦所產生的靜電 ’可防止於光罩附著塵埃。 又’因偏移之消失亦有助於防止光罩之破損 2. 第2之效果：光罩與本體及蓋體之固定部之傾斜面接觸 者由於僅以光罩之稜線邵分接觸，未固定部於光罩之上 下面之表面接觸，無弄髒光罩表面之情事。 3·第三之效果：藉由將蓋體側之固定部作成所謂橋狀， 可以彈性押住光罩，可防止光罩偏移之效果的同時可防止 光罩破損。 4_第四之效果··藉由辅助受台肋片，可容易地正確且容 83330 -24 - 200307635 易地作光罩裝入時之定位。 第五又政果：對於藉由辅助 肋片所收納之光罩，即使 ：肋片、肋片突出部， 止光罩之偏移。 、 益她予大的衝擊時亦可防 又，亦有助於收納光罩時之定位。 【圖式簡單說明】 圖 圖1為頭不關於本發明之光罩之光罩盒之—實施狀態之 圖2為顯示，先前之一例之圖。 〜圖3為顯示開啟關於本發明之光罩之光罩盒之蓋 只施狀態之圖。 圖4為顯示本體之固定部之一例之圖。 圖5為顯示蓋體之固定部之一例之圖。 【圖式代表符號說明】 1 本體 11 開口周緣 110 突出壁 12 連結部插入口 121 接触片嵌入凹部 13 凹部 130 水平部 131 突出導通片 14 肋片 151 辅助受台肋片 83330 -25- 200307635 152 補助定位肋片 16 固定部 162 傾斜面 2 蓋體 21 開口周緣 210 突出壁 22 連結部插入口 221 接觸片插入凹部 23 、凹部 231 關閉塊 24 肋片 241 肋片突出部 25 定位肋片 26 固定部 262 傾斜面 3 連接部 3 1 連接部本體 312 背面部 32 舌片部 321 舌片部孔 35 接觸片 351 接觸側面 352 接觸片突出部 4 關閉滑板 83330 -26- 200307635 40 41 42 43 關閉滑板本體 突出導通路嵌入片 突出位置控制片 螺旋部 83330 27-When hitting, the bias of the reticle can also be adjusted to τ Shitian W. When the lower limit of the so-called two-stage structure is suppressed, as described above, when the cover 2 is closed on the side of the upper side of the photomask in the body 1 and closed, the edge portion of the cover is fixed with the cover fixing portion 26. The inclined surfaces are initially abutted, so as to be held from the upper direction to the lower direction, and the light 83330 -20-200307635 can be set in a static state. Furthermore, the ridges above and below the mask are on the body! Relative cover < Fixed foot Shao 16 and fixed part 26 respectively tilt it ^ Pressing in 40,000 directions allows the photomask to be stored in the photomask box without shifting. In addition, the fixing portion 26 can elastically hold the photomask to prevent the photomask from being damaged while further suppressing isolation. Removal of the fixed foot Shao 1 6 and 2 6 Place the ridges on the corners of the photomask and each of them without contacting the photomask itself. The generated static electricity can be prevented. It can prevent contact between the fixing parts. This can prevent unnecessary dust from being attached to the mask and contamination of the mask surface due to the bias of the mask in the box. Prevent the photomask from being damaged due to the misalignment of the photomask. In addition, in order to prevent static electricity from occurring in the photomask box itself, a material such as a guide pen tree is used. The biteer Zixian 4 can be added with a conductive acrylic rubber with high anti-charge effect. Resin can also be used. This prevents the static electricity from being generated, and prevents unnecessary dust from adhering to the box. Figure 2 is a diagram showing an example of the previous example. The main body 7 and the cover body 8 are connected with wings 4 90 1 of the shaft piece 90. The main body side of the front sleeve of the plate formed by the protruding periphery of the main body 7 is fixed The block 7 丨 is engaged with the cover-side fixing block 81 which is engaged with the cover when the cover is closed. Q This Ju Gu foot slide 95 is located above the cover 8 and protrudes outward from the box. 83330 '21-200307635 When this part is wound with adhesive tape, the part of the fixing part 95 bulges, and a gap may be generated. Again staggering this part, 'when only the part under the fixing shawl is wound with adhesive tape, the periphery of the body-side fixing block 71 protruding from the cover-side fixing block 81 and the cover-side fixing block 81 will be left without being rolled with adhesive tape The lower gap, because of the part of the dust into the inside of the box. In addition, although the main body 7 has a fixed portion 75, although all of them have an inclined surface 751, the inclination that gradually decreases from the sides of the box to the center of the box gradually decreases. The control of the vertical displacement is almost powerless. Further, the cover body 8 has a slightly stick-shaped fixing portion 85, and a tip portion of the fixing portion has a hat portion. Therefore, when the carcass is closed, the upper surface of the mask is contacted with the cap, and the mask is held. This is because ㈢ is in contact with the surface of the mask and is held at a point on the tip of the hat, which is extremely fragile in suppressing the shift of the mask. Furthermore, there is a possibility that the photomask may be damaged when an excessive force is applied to this portion. FIG. 3 is a view showing a state in which the lid body 2 of the photomask box is opened. As shown in the figure, the two fixing portions 16 located on the concave portion 13 side of the body 1 and the sides of the concave portion 13 side are arranged in parallel. The two fixing portions 16 located on the side of the connection portion insertion opening 12 of the body 丨 and Both sides of the recessed portion 23 and the insertion opening ^ without the connection portion are arranged in parallel from the opening direction of the box to the inside direction. Furthermore, the two fixing portions 26 located on the recessed portion 23 side of the lid body 2 are arranged in parallel with both sides of the four portions 23 and the connection-portion 22 without the connection portion. 83330 -22- 200307635 In addition, the two fixing portions 26 on the side of the connecting portion insertion opening 22 of the cover 2 and the sides of the side of the connecting portion insertion opening 22 of the body 2 are arranged in parallel. Therefore, when the cover body 2 is closed, the fixing portion 16 of the main body 丨 and the corresponding fixing portion 26 of the cover body 2 face the crossing directions, respectively, and the photomask can be held by the four sides not only from the upper and lower surfaces. Fig. 4 is a view showing an example of the fixing portion 16 of the main body. The fixing portion base 161 and the inclined surface 162 are formed by connecting two cylindrical legs with a connection portion. The ridge portion of the photomask is connected to the inclined surface 162. In addition, the two cylindrical shaped legs of the fixed foot base 161 have holes with different widths. Two protrusions having different thicknesses are provided on the main body 1, and the fixing portion 6 is disposed on the main body 1 by inserting the protrusions into the aforementioned holes. For example, by providing such two protruding portions having different thicknesses, the mounting direction of the fixing portion 16 can be easily and accurately performed. FIG. 5 is a view showing an example of the fixing portion 26 of the lid body 2, showing a slightly bridge-like fixing portion in which both end portions are used as the fixed base portion 261 and the middle portion is used as the inclined surface 262. As shown in FIG. The two ends are divided into two parts to prevent the fixing part base 26 from being opened to the ground for connection. Therefore, the ridge portion of the photomask is connected to the inclined surface 262. In particular, because the fixed base 261 has an inclined surface 262, the inclined surface 262 has elasticity and can elastically press the photomask. There are holes with different widths in the two fixed bases 261. Since the cover body 2 is provided with two protruding portions having different thicknesses, the fixing member 26 can be arranged on the cover body 2 by inserting the 83330 • 23-200307635 into the aforementioned hole. By doing so, the mounting direction of the fixing portion 26 can be easily and simply performed in the same manner as described above. Effects of the Invention 1. The first effect: With regard to the mask box of the present invention, the fixing portion of the body having an inclined surface changes the direction in which the opening portion of the box is inclined to the inner direction, and the fixing of the carcass also has an inclined surface , When the cover is closed, the inclined surfaces of the two fixed parts will be intersected. For the body, the inclined surface of the fixed part in the direction of the opening is inclined in the left-right direction, so that the inclined surface of the fixed part in the inner direction is forward and backward. That is, from the inner direction to the opening direction, it is gradually lowered and inclined. As for the cover, the inclined surface of the fixed part of the opening direction is gradually inclined from the opening direction to the inner direction, so that the fixed part of the inner direction is inclined. The inclined surface is inclined in the left-right direction, so that the clamped photomask is held in the left-right direction except the upper and lower sides. The offset of the photomask disappears when it is closed, which can prevent the deviation between the fixing member and the photomask. The static electricity generated by the friction can prevent dust from attaching to the photomask. It also helps to prevent damage to the mask due to the disappearance of the offset. 2. The second effect: The contact between the mask and the inclined surface of the main body and the fixed part of the cover is only due to the ridge line of the mask. The fixed part is in contact with the upper and lower surfaces of the mask, and there is no staining of the surface of the mask. 3. The third effect: By making the fixing part on the cover side into a so-called bridge shape, the photomask can be elastically held, which can prevent the photomask from shifting and prevent photomask damage. 4_Fourth effect ... With the auxiliary receiving ribs, it can be easily and accurately positioned 83330 -24-200307635 for easy positioning when the mask is installed. Fifth, the political effect: For the photomask accommodated by the auxiliary fins, even if: the fins, the fin projections, and the photomask are offset. It can also prevent when it gives a big impact, and it also helps the positioning when storing the photomask. [Brief Description of the Drawings] FIG. 1 is a view of a mask box of an embodiment of the present invention that is not related to the mask of the present invention. FIG. 2 is a diagram showing a previous example. ~ Fig. 3 is a view showing a state in which the cover of the mask box of the mask of the present invention is opened only. FIG. 4 is a diagram showing an example of a fixing portion of the main body. FIG. 5 is a diagram showing an example of a fixing portion of a cover. [Illustration of representative symbols of the figure] 1 Body 11 Opening periphery 110 Protruding wall 12 Connecting portion insertion opening 121 Contact piece insertion recess 13 Recess 130 Horizontal portion 131 Protruding conductive piece 14 Rib 151 Auxiliary receiving rib 83330 -25- 200307635 152 Subsidy Positioning rib 16 Fixing part 162 Inclined surface 2 Cover 21 Opening perimeter 210 Protruding wall 22 Connecting part insertion opening 221 Contact piece insertion recess 23, recess 231 Closure block 24 Rib 241 Rib protrusion 25 Positioning rib 26 Fixing portion 262 Inclined surface 3 Connection part 3 1 Connection part body 312 Back part 32 Tongue part 321 Tongue part hole 35 Contact piece 351 Contact side 352 Contact piece protrusion 4 Close the slide 83330 -26- 200307635 40 41 42 43 Close the slide body projection guide Channel inserting piece protruding position control piece spiral portion 83330 27-