JP2021089174A - Probe card accommodating case - Google Patents

Abstract

To solve the problem with a conventional probe card accommodating case, that a brim part fixed to a probe card substrate by screwing or bonding, etc., is used for positioning and fixation and, therefore, there is a possibility of breakage of the brim part.SOLUTION: A probe card accommodating case of the present invention comprises: a lower case part for accommodating a probe card consisting of a ceramic probe card substrate formed into a polygonal shape, a probe provided on the probe card substrate and a brim part fixed to an outer edge of the probe card substrate; an upper case part for shutting an opening of the lower case part; at least three positioning parts provided on the lower case part, for coming in contact with a desired outer periphery of the probe card substrate and positioning the probe card in relation to the lower case part; at least three placement faces for placing edges of the probe card substrate and provided on the lower case part; and a probe card presser member.SELECTED DRAWING: Figure 2

Description

The present invention relates to a case for accommodating a probe card for semiconductor wafer inspection.

(1. Conventional explanation)

In the final inspection of semiconductor chip (wafer) manufacturing, the quality of the semiconductor chip is measured using a probe card. The semiconductor chip is required to have extremely high accuracy, and the probe of the probe card also has high accuracy.

When moving this probe card, a probe card storage case is required to protect it from dust and the like.

11 to 14 show a conventional probe card storage case 1 and a probe card 2 stored in the storage case 1.

As shown in FIG. 11, the probe card storage case 1 can open and close a box-shaped lower case portion 3 having an upper surface opening for inserting a probe card and an upper surface opening of the lower case portion 3. It is composed of an upper case portion 4 that closes to.

Further, the probe card 2 is, for example, as shown in FIGS. 12 and 13, a disk-shaped ceramic probe card substrate 5 and a large number of probes provided in the central portion of the lower surface of the probe card substrate 5. It is composed of a (probe) 6 and a stiffener (reinforcing material) 7 for reinforcing the probe card substrate 5 fixed to the upper surface of the ceramic probe card substrate 5. The stiffener 7 is formed in a ring shape, for example, and is formed larger than the probe card substrate 5.

Further, a plurality of plate-shaped brim portions (protruding plate portions) 8 projecting outward in the radial direction are formed at a desired position on the outer peripheral edge portion of the stiffener 7 at a desired distance. In the brim portion 8, for example, a screw hole into which a male screw portion of a probe card ejecting tool (not shown) for engaging with and taking out the probe card 2 housed in the storage case 1 is screwed. 9 is provided, and one positioning portion 10 such as a recess for positioning the probe card storage case 1 is formed on the outer peripheral edge 8a of the brim portion 8.

The probe card ejector has at least three male screw portions separated from each other in order to stably lift the stored probe card, and the probe card is screwed into the male screw portion. A brim portion 8 having a screw hole 9 to be combined is provided, for example, corresponding to the position and number of the male screw portions.

The brim portion 8 may be provided with an identification mark for a probe card or the like, which does not have the screw hole 9 and the positioning portion 10 on one side.

Further, the lower case portion 3 is formed of, for example, a plate body to be a rectangular bottom plate 3a and a side wall portion 3b erected from the outer peripheral edge of the bottom plate 3a, and is formed in a rectangular box shape. A mounting table 11 is provided on the outer peripheral portion of the upper surface, and the mounting table 11 is provided at three places corresponding to the brim portion 8 of the probe card 2, for example.

The mounting table 11 is described above as a mounting portion 11b having a mounting surface 11a on which the brim portion 8 of the probe card 2 is mounted so that the probe card 2 has a desired height from the bottom plate 3a. It is composed of a protruding portion 11c formed on the outer side portion of the placing surface 11a and having an inner side surface having the other positioning portion 12 such as a convex portion that engages with the one positioning portion 10.

The inner surface of the protruding portion 11c is formed in a shape that matches the surface of the outer peripheral edge 8a of the brim portion 8.

Then, the brim portion 8a of the probe card 2 is placed on the mounting surface 11a of the three mounting bases 11, and one of the positioning portions 10 is engaged with the other positioning portion 12. The probe card 2 can be placed at a desired height from the bottom plate 3a and can be positioned.

Further, the upper case portion 4 is composed of, for example, a plate body to be a rectangular ceiling plate 4a and a side wall portion 4b hanging from the outer peripheral edge of the ceiling plate 4a, and the side wall portion 3b of the lower case portion 3 is formed. When the upper end of the upper case and the lower end of the side wall 4b of the upper case 4 come into contact with each other, the upper opening of the lower case 3 is closed by the upper case 4.

Further, a pressing member 13 projecting downward is formed on the lower surface of the ceiling plate 4a, and when the upper case portion 4 is closed by the lower case portion 3, the pressing member 13 causes the lower case portion. By pressing the brim portion 8 of the probe card 2 mounted on the mounting table 11 of 3 from top to bottom and sandwiching the brim portion 8 between the above-described stand 11 and the pressing member 13, the probe card 2 is formed so that it can be fixed to the storage case 1.

Reference numeral 13a is an elastic member provided at the lower end of the pressing member 13.

Further, reference numeral 2a is a hinge portion in which one side of the lower case portion 3 and one side of the upper case portion 4 are tiltably connected to each other.

For example, Patent Document 1 is a conventional probe card storage case.

Utility Model Registration No. 3171687

(2. Explanation of lightweight probe card)

Since the stiffener 7 is heavy, a probe card 14 that does not use the stiffener 7 has been proposed as shown in FIGS. 15 and 16. The probe card 14 without the stiffener 7 is formed by fixing a plurality of separate plate-shaped brim portions 15 to the outer peripheral edge of the ceramic probe card substrate 5 by screwing, adhesion, or the like. ..

However, as shown in FIG. 17, when the brim portion 15a having the screw hole 9 and one of the positioning portions 10 is placed on the mounting table 11 of the storage case 1 and sandwiched and fixed by the holding member 13. Due to vibration of the storage case 1, the brim portion 15a fixed by screwing or adhesive may be removed from the probe card substrate 5.

An object of the present invention is to eliminate the above-mentioned drawbacks.

(3. Explanation of Outline of the Present Invention)

The probe card storage case of the present invention is a probe card composed of a probe card substrate made of ceramic formed in a polygonal shape, a probe provided on the probe card substrate, and a brim portion fixed to the outer peripheral edge of the probe card substrate. The lower case portion having an open upper surface, the upper case portion closing the opening of the lower case portion, and the desired outer periphery of the probe card substrate provided in the lower case portion are in contact with each other. At least three positioning portions for positioning the probe card with respect to the lower case portion and at least three positioning portions provided on the lower case portion on which the edge portion of the probe card substrate is placed. It is characterized in that the three mounting surfaces and the above-described mounting surface constitute a probe card holding member that sandwiches and fixes the edge portion of the probe card substrate.

Further, the positioning portion and the above-described mounting surface are characterized in that they are formed on a mounting table provided on the lower case.

Further, it is characterized in that one or a plurality of a pair of mounting surfaces positioned so as to sandwich a desired brim portion are provided.

Further, it is characterized by further having an elastic member provided on the upper surface of the above-mentioned mounting surface and an elastic member provided on the lower end of the probe card pressing member.

Further, the lower case portion is composed of a bottom plate, a side wall portion erected from the outer peripheral edge of the bottom plate, and a plurality of rib portions connecting the bottom plate and the side wall portion, and the lower case portion. Is integrally molded by injection molding of synthetic resin, and the upper case portion is a plurality of connecting the ceiling plate, the side wall portion hanging from the outer peripheral edge of the ceiling plate, and the ceiling plate and the side wall portion. The upper case portion is integrally molded by injection molding of a synthetic resin.

(4. Explanation of the effect of the present invention)

According to the present invention, the probe card storage case is positioned and fixed to the storage case so that the probe card storage case does not come into contact with the brim portion, so that damage to the brim portion such as the brim portion coming off from the probe card substrate can be prevented. Will be able to.

It is a top view of the lower case part of the probe card storage case of this invention. It is a top view of the lower case part of this invention with the probe card housed. It is a vertical sectional side view of the probe card storage case of this invention in the state which the probe card is stored. It is a side view of the probe card remover of this invention. FIG. 5 is an enlarged plan view for explaining how to use the probe card remover of the probe card storage case of the present invention. FIG. 5 is an enlarged plan view for explaining how to use the probe card remover of the probe card storage case of the present invention. It is a top view of another Example of the probe card storage case of this invention. It is a longitudinal side view of another Example of the probe card storage case of this invention. It is a top view of the lower case part of the probe card storage case of the 2nd Example of this invention. It is a top view of the lower case part of the 2nd Example of this invention in the state which housed the probe card. It is a vertical sectional side view of the conventional probe card storage case. It is a vertical sectional side view of a probe card. It is a top view of the probe card. It is a vertical sectional side view of the conventional probe card storage case in the state where the probe card is stored. It is a top view of another probe card. It is a longitudinal side view of another probe card. It is a vertical sectional side view of the conventional probe card storage case in a state where another probe card is stored.

Examples of the present invention will be described below with reference to the drawings.

The parts not particularly described are the same as those in the above-mentioned conventional example, and the description thereof will be omitted.

(5. Description of the present invention)

In the storage case 16 of the present invention in which the stiffener is omitted and the probe card 14 in which the plurality of brim portions 15 are fixed to the probe card substrate 5 by screwing or adhesion is stored, the ceramic card substrate 5 is, for example, hexadecagonal. Paying attention to the polygonal shape such as the above, the probe card 14 is positioned with respect to the storage case 16 by using the outer periphery of the ceramic card substrate 5.

Further, the storage case 16 (upper case portion 4 and lower case portion 3) is placed by using the edge portion of the ceramic card substrate 5 and sandwiched between the upper case portion 4 and the lower case portion 3. ) Does not come into contact with the brim portion 15, and the probe card 14 is placed and fixed on the storage case 16.

That is, in the probe card storage case 16 of the present invention, instead of using the mounting table 11 on which the brim portion 15 is mounted and positioned in the conventional probe card storage case 1, as shown in FIGS. 1 to 3, A positioning portion 17a having an inner side surface that abuts on the outer peripheral portion 5a of the probe card substrate 5 formed in a polygonal shape such as a hexadecagon on the outer peripheral portion of the upper surface of the bottom plate 3a of the lower case portion 3, and the probe card. A mounting table 17 having a mounting surface 17b on which the lower surface of the edge portion of the substrate 5 is mounted is provided.

Further, when the pressing member 13 of the upper case portion 4 closes the upper case portion 4 to the lower case portion 3, the pressing member 13 is placed on the mounting table 17 of the lower case portion 3. A position where the probe card 14 can be fixed to the storage case 16 by pressing the edge portion of the probe card substrate 5 from top to bottom and sandwiching the edge portion between the above-described stand 17 and the pressing member 13. Is formed in.

In order to protect the edge of the probe card substrate 5, an elastic member 13a is formed at the lower end of the pressing member 13, and an elastic member is also formed on the upper surface of the mounting surface 17b of the above-mentioned pedestal 17. It is preferable that 17c is provided.

The positioning portion 17a abuts on at least three different outer periphery 5a of the outer periphery 5a of the probe card substrate 5 so that the probe card 14 can be positioned and fixed to the storage case 16. If necessary, a plurality of, for example, three mounting tables 17 are provided.

A plurality of positioning portions 17a may be provided on one mounting table 17.

If the probe card substrate 5 has a regular polygonal shape, positioning in the rotation direction may not be possible. In that case, the probe card 14 and the storage case 16 have display units for alignment (these can be aligned with each other. (Not shown) may be provided.

Further, at least three of the above-mentioned mounting surfaces 17b are provided so that the probe cards 14 can be stably mounted at a desired distance from each other. It should be noted that a plurality of mounting surfaces 17b may be provided on one mounting table 17, and the probe card substrate 5 is stable even if the mounting surfaces 17b referred to here are formed on the same plane. In the case of a place having two or more desired distances that can be supported, it shall have two or more mounting surfaces 17b.

Further, the arranging portion 17a is separated from the above-described pedestal 17, and is composed of, for example, a pedestal 17 having three mounting surfaces 17b and three positioning bodies (not shown) having locating portions 17a. You may try to do it.

Further, instead of the screw holes 9 provided in the brim portions 8 and 15 of the conventional probe cards 2 and 14 that are engaged with the probe card ejector, the probe cards 2 and 14 of the present invention have the same FIG. As shown in the above, the outer peripheral edges 8a and 15b of the brim portions 8 and 15 are provided with, for example, a long groove-shaped notch 19 extending inward in the radial direction.

Further, in the present invention, as shown in FIG. 4, an improved probe card ejector 20 is used instead of the conventional probe card ejector having a male screw portion. The improved probe card ejecting tool 20 is vertically slidable in the axial direction with respect to the ejecting tool main body 21 and the ejecting tool main body 21 vertically provided on the ejecting tool 21 main body, and also has a shaft. It is composed of an L-shaped rod-shaped engaging rod 22 that is rotatable around, and the engaging rod 22 is formed by bending the hanging rod 22a and the lower end of the hanging rod 22a at a right angle. It is composed of a curved portion 22b.

Then, as shown in FIG. 5, the bent portion 22b of the improved probe card ejecting tool 20 is rotated so as to coincide with the longitudinal direction of the notch portion 19, and the notch portion 19 is formed. The bent portion 22b is hung from above to below, penetrated into the cutout portion 19, and rotated by 90 degrees, for example, as shown in FIG. Is located on the lower surface side of the brim portions 8 and 15, whereby if the probe card ejecting tool 20 is lifted upward, the probe cards 2 and 14 can be lifted upward.

As described above, by forming the notch portion 19 composed of the long groove, there is some shape error in the case, for example, when the lower case portion 3 and the upper case portion 4 are integrally molded with synthetic resin. Even in this case, the probe card ejector and the probe card can be engaged with each other.

Since the present invention has the above-described configuration, the upper case portion 4 is opened, and the edge portion of the probe card substrate 5 is positioned and mounted on the mounting table 17 of the lower case 3.

In the positioning portion 17a configured so that the probe card substrate 5 abuts on three desired outer peripherals 5a whose positions are uniquely determined with respect to the storage case 16, such as when the probe card substrate 5 is not a regular polygon. By placing the probe card substrate 5 on the above-mentioned stand 17, positioning can be performed including the rotation direction.

When the probe card 14 cannot be positioned with respect to the rotation direction, such as when the probe card board 5 is a regular polygon, the display unit of the probe card board 5 and the display unit of the storage case 16 are displayed in advance. By placing the probe card 14 on the mounting table 17 together with the above, positioning becomes possible.

Then, by closing the upper case portion 4 in the lower case portion 3, the pressing member 13 attaches the edge portion of the probe card substrate 5 mounted on the mounting base 17 of the lower case portion 3 from above. The probe card 14 can be fixed to the storage case 1 by pressing downward and sandwiching the edge portion between the above-described pedestal 17 and the pressing member 13.

In the present invention, the probe card 14 is positioned and fixed to the storage case 16 so that the storage case 16 does not come into contact with the brim portion 15, so that the brim portion 15 is damaged such that the brim portion 15 comes off from the probe card substrate 5. Will be able to prevent.

The present invention is suitable for the probe card 14 in which the brim portion 15 is fixed to the probe card substrate 5 by screwing, adhesion, or the like, but the probe card 2 using the conventional stiffener 7 can also be stored. it can.

As shown in FIGS. 7 and 8, the upper case portion 3 and / or the lower case portion 4 of the probe card storage case 16 is integrally molded by injection molding of synthetic resin, and the lower case portion is formed. In No. 3, a plurality of rib portions 23 separated by a desired distance are provided to connect the inner side surface of the side wall portion 3b and the upper surface of the bottom plate 3a.

Similarly, in the upper case portion 3, a plurality of rib portions 23 separated by a desired distance are provided to connect the inner side surface of the side wall portion 3b and the lower surface of the ceiling plate 3a.

Conventionally, for example, when a probe card storage case made of synthetic resin having a thickness of 430 mm × 430 mm × 68 mm and a plate thickness of 5 mm is produced by injection molding, a molding error of 0.2 mm occurs and the probe card cannot be used. In the present invention, by providing the rib portion 23, the shape error can be reduced.

Further, when the rib portion 23 is not provided, the thickness of the side wall portion of the upper case portion (or the lower case portion) needs to be 5 mm or more due to the need to increase the strength, but the rib portion 23 should be provided. As a result, the weight can be reduced to 4 mm or less, and as a result, the weight can be reduced by 20% or more.

Further, the rib portion 23 is formed in a right-angled triangular plate shape, for example, and the thickness of the rib portion 23 is made thinner than the thickness of the side wall portion, for example, the thickness is halved or less. Form as.

When the lower case portion (or lower case portion) made of synthetic resin is formed by injection molding by thinning the rib portion 23, particularly by reducing the rib portion 23 to half or less, the raw material supply for forming the side wall portion is formed. By making the supply amount of the raw material forming the rib portion significantly smaller than the amount, when the raw material is supplied, the upper surface of the side wall portion is lowered due to the shortage of the raw material supply amount (supply pressure) on the side wall portion side (supply pressure). Alternatively, it is possible to prevent the lower surface from bending upward), and it becomes possible to improve the shape accuracy.

(6. Explanation of the Second Example of the Present Invention)

9 and 10 show a second embodiment of the present invention.

In this second embodiment, as shown in FIGS. 9 and 10, a pair of positioning portions 17a and 17a are provided so as to sandwich the desired brim portions 15 in a horizontal plane at a desired distance. , The pair of positioning portions 17a, 17a are provided one or more.

When the positioning portion 17a is provided on the mounting table 17, the brim portion 15 is configured such that the brim portion 15 is sandwiched between the pair of mounting tables 17 and 17.

The pair of mounting surfaces 17a, 17a (mounting stands 17, 17) are provided close to the desired brim portion 15, and for example, are on the same side or adjacent to the outer peripheral edge 5a on which the brim portion 15 is provided. It is provided in the outer periphery 5a.

For example, in general, the brim portion 15 having the engaging portion into which the jig for taking out the probe card is inserted is formed at three places, and the positions of these three places are not formed at equal intervals. By providing a pair of mounting surfaces 17a and 17a (mounting tables 17 and 17) at at least two places, positioning in the rotation direction can be uniquely performed.

It should be noted that, for example, a connecting portion provided so as to avoid the brim portion 15 as a mark indicating a place where the brim portion 15 is inserted between the pair of mounting surfaces 17a and 17a (mounting bases 17 and 17). 18 may be provided.

It should be noted that the pair of mounting surfaces 17a and 17a (mounting tables 17 and 17) are combined into one, and the brim portion 15 inserted between the pair of mounting surfaces 17a and 17a (mounting tables 17 and 17) can be seen. In addition, a display unit is provided on each of the pair of (mounting surface) mounting tables and the brim portion, and at the time of mounting, these display portions are provided so as to match each other.

Since the present invention has the above-described configuration, the probe is opened so that the upper case portion 4 is opened and the brim portion 15 is inserted between the paired mounting surfaces 17a and 17a (mounting bases 17 and 17). The card substrate 5 is placed.

As a result, the probe card 14 is positioned with respect to the storage case 16 in the rotation direction.

If the position cannot be uniquely positioned with respect to the rotation direction, the display unit is adjusted.

Then, the probe card 14 is fixed to the storage case 16 by closing the upper case portion 4 and sandwiching the edge portion of the probe card substrate 5 with the pressing member 13.

In the present invention, the probe card 14 can be easily stored in the storage case 16.

1 Probe card storage case 2 Probe card 2a Hinge part 3 Lower case part 3a Bottom plate 3b Side wall part 4 Upper case part 4a Ceiling plate 4b Side wall part 5 Probe card board 5a Outer periphery 6 Probe 7 Stiffener 8 Brim part 8a Outer peripheral edge 9 Screws Hole 10 One positioning part 11 Mounting base 11a Mounting surface 11b Mounting part 11c Protruding part 12 The other positioning part 13 Holding member 13a Elastic member 14 Probe card 15 Brim part 15a Brim part 15b Outer peripheral edge 16 Probe card storage case 17 Stand 17a Positioning part 17b Mounting surface 17c Elastic member 18 Connecting part 19 Notch part 20 Probe card take-out tool 21 Take-out tool body 22 Engagement rod 22a Vertical rod 22b Bent part 23 Rib part

Claims (5)

A bottom with an open upper surface for accommodating a probe card made of a ceramic probe card formed in a polygonal shape, a probe provided on the probe card substrate, and a brim portion fixed to the outer peripheral edge of the probe card substrate. Side case and
An upper case portion that closes the opening of the lower case portion and
At least three positioning portions for positioning the probe card with respect to the lower case portion by abutting against the desired outer periphery of the probe card substrate provided on the lower case portion.
At least three mounting surfaces provided on the lower case portion on which the edge portion of the probe card substrate is mounted, and
A probe card storage case comprising a probe card holding member that sandwiches and fixes the edge portion of the probe card substrate by the above-described mounting surface. The probe card storage case according to claim 1, wherein the positioning portion and the above-described mounting surface are formed on a mounting table provided on the lower case. The probe card storage case according to claim 1 or 2, wherein one or a plurality of a pair of mounting surfaces positioned so as to sandwich a desired brim portion are provided. The probe card storage case according to claim 1, 2 or 3, further comprising an elastic member provided on the upper surface of the mounting surface and an elastic member provided on the lower end of the probe card holding member. .. The lower case portion is composed of a bottom plate, a side wall portion erected from the outer peripheral edge of the bottom plate, and a plurality of rib portions connecting the bottom plate and the side wall portion. It is integrally molded by injection molding of synthetic resin,
The upper case portion is composed of a ceiling plate, a side wall portion hanging from the outer peripheral edge of the ceiling plate, and a plurality of rib portions connecting the ceiling plate and the side wall portion. The probe card storage case according to any one of claims 1 to 4, wherein the probe card is integrally molded by injection molding of a synthetic resin.

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