JP6595025B2 - Probe card storage case - Google Patents

Description

  The present invention relates to a storage case for storing a probe card for semiconductor wafer inspection.

  In the semiconductor manufacturing field, in a final inspection in a subsequent process, a probe card attached to a prober inspection machine is brought into contact with a manufactured semiconductor chip (wafer) for communication, and the quality of the semiconductor chip is measured.

  In recent years, silicon wafers have gradually become larger in diameter, so that the size of the probe card has been increased, the weight of the probe card itself has become 20 kg or more, and movement of the probe card requires movement in the probe card storage case.

  Moreover, when an extremely light probe card of 1.5 kg or less that omits the stiffener (reinforcing material) becomes mainstream in the future, it is necessary to move and transport the probe card more delicately.

  For example, there is Patent Document 1 as a conventional probe card storage case.

Utility Model Registration No. 3171687

  The probe card without the stiffener is lighter, but more delicate and easily broken, such as cracks and cracks. Therefore, the probe card storage case can be stored without impacting the probe card and is portable. The problem is whether it can be done.

  In particular, if one of the probes (probes) provided on the probe card is damaged or cannot be used, the probe card itself may not be used. The problem is whether it can be carried around.

  Further, the probe card needs to be accurately positioned and fixed in the storage case. Therefore, one positioning part such as a plurality of recesses is formed at the edge of the probe card, and the other positioning such as a convex part is fitted into the one positioning part in the storage case. The parts are formed, and these are fitted to each other for accurate positioning.

  In order to fix the probe card, a probe card fixing device is provided in the lower case portion of the storage case to fix the probe card stored in the lower case portion.

  However, depending on the company that manufactures the probe card, the number of positioning positions differs from that of the company, and it is necessary to create storage cases corresponding to the number of positioning positions.

  The inventor of the present application aims to provide a probe card storage case that can be stored without impacting the probe card and can be carried with a simple configuration.

  It is another object of the present invention to fix a plurality of mounting cards for mounting and supporting a probe card at a desired plurality of locations so that any probe card can be fixed.

The probe card storage case of the present invention stores a probe card in a lower case part with an open upper surface, an upper case part that closes the opening of the lower case part, and a lower surface of the probe card. A mounting table provided on the lower case part, a probe card pressing member provided on a lower surface of the upper case part, a buffer part formed on the mounting surface of the mounting table, and A buffer portion formed at the lower end of the probe card holding member, and the probe card is sandwiched and fixed between the probe card holding member and the mounting surface, and the upper table is placed on the lower side. A plurality of mounting table fixing units that can be fixed to the case unit are provided on the upper surface of the bottom surface of the lower case unit, and depending on the mounting unit mounted on the mounting table described above, provided on a desired type of probe card, Entry Is fixed to the mounting table fixing portion, and the desired type of probe card is of two types: a probe card having three placement portions provided with one positioning portion and a probe card having four locations. The mounting table fixing unit is provided at five desired positions, and the mounting table having the other positioning unit that engages with the one positioning unit is arranged in accordance with the type of the probe card. It is characterized by being fixed to.

Further, the probe card storage case of the present invention mounts the lower case part with the upper surface opened, the upper case part closing the opening part of the lower case part, and the lower surface of the probe card. A plurality of mounting tables each having a mounting surface, and a plurality of mounting table fixing portions that can fix the mounting table to the lower case portion are provided on the upper surface of the bottom surface of the lower case portion, and a desired type of probe card The above-mentioned mounting table is fixed to the above-mentioned mounting table fixing unit according to the mounting unit mounted on the above-mentioned mounting table, and the above-mentioned desired type of probe card is provided with one positioning unit There are two types of probe card having three mounting parts and four probe cards, and the above-mentioned mounting base fixing part is provided at five desired positions, and the other is engaged with the one positioning part. With a positioning part Base, depending on the type of the probe card, is fastened to the mounting table fixing portion and said Rukoto.

In addition, the mounting table fixing portion is provided at a position that is spaced substantially equidistant from the center of the probe card that is positioned and placed in the radial direction, and at 0 degrees, 45 degrees, 135 degrees, and 225 in the clockwise direction. degrees, 315 degrees, respectively provided separated, when the positioning portion of one provided in the probe card of the three places, the top the placing stand is 0 degrees, 135 degrees, base fixed stacking at 225 degree position each fixed to parts, if the positioning of the one provided in the probe card is four, the upper the placing stand is 45 degrees, 135 degrees, respectively fixed to the base fixing portion mounting at the position of 225,315 degrees It is characterized by being.

  The probe card pressing member provided on the lower surface of the upper case portion, a buffer portion formed on the mounting surface of the mounting table, and a buffer portion formed on the lower end of the probe card pressing member. The probe card is sandwiched and fixed by the holding member and the mounting surface, and is stored.

  According to the present invention, it is possible to provide a probe card storage case corresponding to a plurality of types of probe cards.

  In addition, with a simple configuration, the probe card can be stored without impact and can be carried.

It is a top view of the probe card storage case of this invention. It is a side view of the probe card storage case of this invention. It is a top view of the lower case part of the state which opened the upper case part of the probe card storage case of this invention. It is a vertical side view of the probe card storage case of this invention. It is a top view of a probe card. It is a top view of the lower case part of the state which opened the upper case part of the probe card storage case of this invention. It is a vertical side view in the state where the probe card of the probe card storage case of the present invention was stored.

  Embodiments of the present invention will be described below with reference to the drawings.

  As shown in FIG. 1 to FIG. 7, the probe card storage case 1 of the present invention includes a lower case portion 3 that stores a probe card 2 and has an opening on the upper surface, and an opening of the lower case portion 3. The lower case portion 3 and the upper case portion 4 are formed by closing the opening of the lower case portion 3 with the upper case portion 4 so that the probe card 2 can be opened and closed. Is formed so that it can be stored in the storage case 1.

  For example, as shown in FIG. 4, the lower case portion 3 includes a plate body that becomes a rectangular bottom plate 3 a and a side wall portion 3 b that stands up from the outer peripheral edge of the bottom plate 3 a, and has a rectangular box shape. It is formed.

  Further, as shown in FIG. 3, a plurality of mounting table fixing portions are provided in the periphery of the upper surface of the bottom plate 3a. For example, mounting table fixing portions 5a, 5b, 5c, 5d, and 5e are provided at five locations. It is formed.

  The mounting table fixing portions 5a to 5e described above are provided, for example, at positions spaced substantially equidistant from each other in the radial direction from the center of the probe card 2 that is positioned and placed, and are provided at a desired angle. For example, they are provided in the clockwise direction at a distance of 0 degrees, 45 degrees, 135 degrees, 225 degrees, and 315 degrees.

  And when accommodating the probe card 2 positioned in three places, as shown in FIG. 3 among the above-mentioned mounting base fixing | fixed parts 5, in three mounting base fixing | fixed parts 5a, 5c, and 5d, Mounting tables 6a, 6c, and 6d for mounting and supporting the probe card 2 at a desired height from the bottom surface 3a are respectively fixed by screws or the like.

  The three mounting table fixing portions 5a, 5c, and 5d are provided at desired angles at which the stored probe card 2 can be uniquely positioned.

  When the probe card 2 positioned at four locations is accommodated, as shown in FIG. 6, among the mounting table fixing portions 5, the four mounting table fixing portions 5b, 5c, 5d, 5e are provided. Further, mounting tables 6b, 6c, 6d, and 6e for mounting and supporting the probe card 2 at a desired height from the bottom surface 3a are respectively fixed by screws or the like.

  The four mounting table fixing portions 5b, 5c, 5d, and 4d are provided at desired angles at which the stored probe card 2 can be uniquely positioned.

  The mounting table 6 is, for example, a mounting table formed in an L-shaped cross section. For example, as illustrated in FIGS. 3 and 4, the mounting surface 7 on which the lower surface of the edge of the probe card 2 is mounted. 5 and the other positioning portion 8 such as a convex portion engaging with one positioning portion 2a formed in a concave shape on the outer periphery of the probe card 2, for example. The upper surface of the placement surface 7 is formed by a buffer portion 12 such as an elastic portion such as rubber.

  The buffer portion 12 is made of, for example, a soft synthetic resin member such as a soft silicon member, and is fixed so as not to be damaged when the probe card is sandwiched, and vibration from the outside of the case is not transmitted to the probe card 2. Thus, the probe card is prevented from being damaged from an external impact.

Then, engaging the three mounting stand 6a, 6c, each mounting surface 7 of 6d, while placing the edge of the probe card 2, one of the positioning portions 2a above, the other positioning portion 8 As a result, the probe card 2 is placed on the lower case portion 3 at a desired height from the bottom surface 3a and can be positioned.

  Of the one positioning part and the other positioning part corresponding to the one positioning part, only one pair of positioning parts is engaged, and the other pair of positioning parts is simply one You may make it contact | abut the other positioning part corresponding to this positioning part to this positioning part.

  Even in this case, the probe card can be uniquely positioned in the storage case.

  Further, the upper case portion 4 includes, for example, a plate body that becomes a rectangular ceiling plate 4a and a side wall portion 4b that hangs down from the outer peripheral edge portion of the ceiling plate 4a, as shown in FIG. The upper surface of the lower case part 3 is blocked by the upper case part 4 by the upper end of the side wall part 3b of the side case part 3 and the lower end of the side wall part 4b of the upper case part 4 coming into contact with each other. become.

  Further, a bar-shaped pressing member 9 having a desired length projecting downward is formed on the lower surface of the ceiling plate 4a, and the upper case portion 4 is attached to the lower case portion 3 as shown in FIG. When the cover member 9 is closed, the pressing member 9 presses the probe card 2 mounted on the mounting table 6 of the lower case portion 3 downward from above, and the probe card 2 is described above as the pressing member 9. The probe card 2 is formed so that the probe card 2 can be fixed to the storage case 1 by being sandwiched by the mounting surface 7 of the mounting table 6. In addition, the lower end of the pressing member 9 is formed by a buffer portion 10 such as an elastic portion such as rubber.

  Each pressing member 9 is provided at a position facing the mounting surface 7 of the mounting table 6.

  The buffer 10 is made of, for example, a soft synthetic resin member such as a soft silicon member. When the probe card is sandwiched, it is fixed so as not to be damaged, and vibration from the outside of the case is not transmitted to the probe card. In this way, the probe card is prevented from being damaged from an external impact.

  Then, the probe card sandwiched between the buffer portion 12 and the buffer portion 10 prevents vibration from the outside of the case from being transmitted more and prevents the probe card from being damaged.

  Reference numeral 11 denotes a hinge portion provided on one side surface of the storage case 1, and the hinge portion 11 connects one side surface of the lower case portion 3 and one side surface of the upper case portion 4. The upper case part 4 can be opened and closed freely.

  The lower case portion 3 and the upper case portion 4 may be connected by other means or may be connected so as to be separable.

  Further, after the lower case portion 3 is closed by the upper case portion 4, the lower case portion 3 and the upper case portion 4 are fixed by fixing means (not shown).

  Moreover, you may provide a handle (not shown) in the one side surface or other side surface of the said storage case 1, as needed.

  In the present invention, when the probe card is positioned at three positions, the mounting table 6 is fixed at the predetermined three positions of the mounting table fixing portion, and when the probe card is positioned at four positions, The mounting table is fixed at four predetermined positions of the mounting table fixing part.

  Then, after the probe card is stored in the lower case part, if the upper case part is closed, the pressing member 9 moves the probe card 2 placed on the placing table 6 of the lower case part 3 upward. The probe card 2 can be fixed to the storage case 1 by pressing downward.

  In addition, since the probe card 2 is sandwiched and fixed by the buffer portion 12 of the placement surface 7 and the buffer portion 10 of the holding member 9, the shock is applied even if an impact is applied to the storage case. There is less influence on the stored probe card.

  According to the present invention, even a probe card having a different positioning position of the probe card to be stored can be stored.

  Further, with a simple configuration, for example, even a probe card in which a stiffener is omitted can be stored and carried without giving an impact.

DESCRIPTION OF SYMBOLS 1 Probe card storage case 2 Probe card 2a One positioning part 3 Lower case part 3a Bottom plate 3b Side wall part 4 Upper case part 4a Ceiling board 4b Side wall part 5a Mounting base fixing part 5b Mounting base fixing part 5c Mounting base fixing part 5d Mounting table fixing portion 5e Mounting table fixing portion 6a Mounting table 6b Mounting table 6c Mounting table 6d Mounting table 6e Mounting table 7 Mounting surface 8 Other positioning portion 9 Holding member 10 Buffering portion 11 Hinge portion 12 Buffering portion

Claims (3)

A lower case part that houses the probe card and has an upper surface opened, and an upper case part that closes the opening of the lower case part,
A mounting table having a mounting surface on which the lower surface of the probe card is mounted;
A probe card pressing member provided on the lower surface of the upper case part;
A buffer formed on the mounting surface of the mounting table;
It consists of a buffer part formed at the lower end of the probe card pressing member,
The probe card is sandwiched and fixed and stored by the probe card holding member and the mounting surface .
A plurality of mounting table fixing parts that can fix the mounting table to the lower case part are provided on the bottom upper surface of the lower case part,
Depending on the placement part placed on the placement table provided on the desired type of probe card, the placement table is fixed to the placement table fixing part,
The desired type of probe card is of two types: a probe card having three placement portions provided with one positioning portion and four probe cards,
The pedestal fixing parts described above are provided at five desired positions,
A probe card storage case , wherein a mounting table having the other positioning portion engaged with the one positioning portion is fixed to the mounting table fixing portion according to the type of the probe card. A lower case part that houses the probe card and has an upper surface opened, and an upper case part that closes the opening of the lower case part,
It consists of a plurality of mounting tables having mounting surfaces for mounting the lower surface of the probe card,
A plurality of mounting table fixing parts that can fix the mounting table to the lower case part are provided on the bottom upper surface of the lower case part,
Depending on the placement part placed on the placement table provided on the desired type of probe card, the placement table is fixed to the placement table fixing part,
The desired type of probe card is of two types: a probe card having three placement portions provided with one positioning portion and four probe cards,
The pedestal fixing parts described above are provided at five desired positions,
Mounting table having the other positioning portion for engaging one of the positioning portions described above, according to the type of the probe card, the probe card storage case according to claim Rukoto fixed to the mounting table fixing unit. The mounting table fixing portion is provided at a position that is substantially equidistantly spaced from the center of the probe card that is positioned and placed, and is clockwise, 0 degrees, 45 degrees, 135 degrees, 225 degrees, 315 degrees apart from each other,
When there are three positioning portions provided on the probe card, the mounting table is fixed to the mounting table fixing unit at the positions of 0 degrees, 135 degrees, and 225 degrees,
When the positioning portion of one provided in the probe card is four, the mounting table is 45 degrees, 135 degrees, and wherein Rukoto respectively fixed to the base fixing portion mounting at the position of 225,315 degrees The probe card storage case according to claim 1 or 2.

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