WO1997009642A1 - Miroir dimorphe adaptatif de type mosaique - Google Patents

Miroir dimorphe adaptatif de type mosaique Download PDF

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Publication number
WO1997009642A1
WO1997009642A1 PCT/RU1996/000114 RU9600114W WO9709642A1 WO 1997009642 A1 WO1997009642 A1 WO 1997009642A1 RU 9600114 W RU9600114 W RU 9600114W WO 9709642 A1 WO9709642 A1 WO 9709642A1
Authority
WO
WIPO (PCT)
Prior art keywords
fact
increase
earth
ποveρχnοsτi
πezοπlasτin
Prior art date
Application number
PCT/RU1996/000114
Other languages
English (en)
Russian (ru)
Inventor
Andrei Gennadievich Safronov
Original Assignee
Yalestown Corporation N.V.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yalestown Corporation N.V. filed Critical Yalestown Corporation N.V.
Priority to JP9511110A priority Critical patent/JPH11506223A/ja
Priority to PL96322714A priority patent/PL322714A1/xx
Priority to EP96915259A priority patent/EP0793120A1/fr
Priority to KR1019970701674A priority patent/KR100230723B1/ko
Priority to AU57075/96A priority patent/AU5707596A/en
Priority to RO96-01759A priority patent/RO118340B1/ro
Publication of WO1997009642A1 publication Critical patent/WO1997009642A1/fr

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements

Definitions

  • Iz ⁇ b ⁇ e ⁇ enie ⁇ n ⁇ si ⁇ sya ⁇ u ⁇ avlyaem ⁇ y ⁇ i ⁇ e and m ⁇ zhe ⁇ by ⁇ is ⁇ lz ⁇ van ⁇ for s ⁇ a ⁇ iches ⁇ g ⁇ and dinamiches ⁇ g ⁇ u ⁇ avleniya v ⁇ ln ⁇ vym ⁇ n ⁇ m radiation ⁇ azlichny ⁇ ⁇ iches ⁇ i ⁇ ⁇ ib ⁇ a ⁇ and sis ⁇ ema ⁇ , v ⁇ lyuchaya as ⁇ n ⁇ miches ⁇ ie ⁇ eles ⁇ y, ⁇ myshlennuyu laze ⁇ nuyu ⁇ e ⁇ ni ⁇ u and ⁇ a ⁇ zhe ⁇ iches ⁇ ie sis ⁇ emy guidance and s ⁇ v ⁇ zhdeniya.
  • PREVIOUS UZH ⁇ There is a well-known bimorphic mirror (see ⁇ .I. Boykov, P. ⁇ . ⁇ ikolayev, ⁇ . ⁇ . Consisting of a 60 mm diameter flat plate. On the rear, 7 separate sections with 18 mm diameters are connected.
  • the disadvantages of this bimplicate are: 1) Dirty patch on the back side of the back plate. due to the inability to directly influence her deformations in the interval between the neighboring players; 2) the small size of the controlled room for the movement of the physical; 3) low sensitivity (maximum 19.2 ⁇ m / ⁇ ); 4) high production volume of optical activity; 5) low quality and stability of its original form, 6) low reliability and reliability of the mirror.
  • Izves ⁇ n ⁇ ⁇ a ⁇ zhe ⁇ lazhdaem ⁇ e ada ⁇ ivn ⁇ e bim ⁇ n ⁇ e ze ⁇ al ⁇ see., Na ⁇ ime ⁇ . ⁇ a ⁇ en ⁇ SSS ⁇ ⁇ 1,808,159, ⁇ I ⁇ 018 3/02, 1989) as s ⁇ de ⁇ zhashee ⁇ us s ⁇ a ⁇ ana, ⁇ lazhdaemuyu ⁇ azhayuschuyu ⁇ las ⁇ inu, and ⁇ sn ⁇ vnuyu d ⁇ lni ⁇ elnuyu ⁇ ez ⁇ ele ⁇ iches ⁇ ie ⁇ las ⁇ iny and having 18 nezavisimy ⁇ u ⁇ avlyayushi ⁇ ele ⁇ d ⁇ v.
  • an additional case Situated between the supplied Explode and main plaque and hard-wired and connected to them, it is used independently of the main plaque. To eat it, an electrifying product does not have an electrical contact with other elec- trodes. ⁇ aznachenie e ⁇ y d ⁇ lni ⁇ eln ⁇ y ⁇ ez ⁇ las ⁇ iny za ⁇ lyuchae ⁇ sya in s ⁇ abilizatsii ⁇ e ⁇ e ⁇ n ⁇ y ⁇ my ⁇ azhayushey ⁇ ve ⁇ n ⁇ s ⁇ i ze ⁇ ala, reducing eg ⁇ ele ⁇ me ⁇ aniches ⁇ g ⁇ gis ⁇ e ⁇ ezisa and ⁇ i ⁇ edelenny ⁇ usl ⁇ viya ⁇ , increasing dia ⁇ az ⁇ na u ⁇ avlyaemy ⁇ ⁇ e ⁇ emesheny ⁇ azhayuschey ⁇ ve ⁇ n ⁇ s ⁇ i. In addition, the deformations of the affected part in this bimber are achieved due to the
  • each pipe bushing is suppressed ⁇ ed ⁇ s ⁇ a ⁇ ami izves ⁇ n ⁇ g ⁇ us ⁇ ys ⁇ va yavlyayu ⁇ sya: presence ele ⁇ iches ⁇ g ⁇ ⁇ entsiala on me ⁇ alliches ⁇ m ⁇ use ze ⁇ ala, small am ⁇ li ⁇ uda u ⁇ avlyaemy ⁇ de ⁇ matsy ⁇ azhayuschey ⁇ ve ⁇ n ⁇ s ⁇ i (ma ⁇ simum 1 1.2 m ⁇ m) niz ⁇ aya chuvs ⁇ vi ⁇ eln ⁇ s ⁇ (ma ⁇ simum 37.3 m ⁇ m / ⁇ ), vys ⁇ aya ⁇ ud ⁇ em ⁇ s ⁇ ⁇ mi ⁇ vaniya ⁇ iches ⁇ y ⁇ ve ⁇ n ⁇ s ⁇ i, niz ⁇ e ⁇ aches ⁇ v ⁇ and s ⁇ abiln ⁇ s ⁇ its is ⁇ dn ⁇ y
  • each piezoelectric element is an actual bimper part. Disadvantages ⁇ ⁇ 97/09642 ⁇ / ⁇ .96 / 00114
  • 3 are the following: 1) a small amplitude of the corrected deformations of the disruptive (caused by a very low active severity is inexpressible, i.e.); 2) low sensitivity; 3) the high labor intensity of the manufacture of the self-made spare part (couscous).
  • sb ⁇ i ( ⁇ e ⁇ lenie and yus ⁇ i ⁇ v ⁇ a ⁇ ez ⁇ elemen ⁇ v) and ⁇ a ⁇ zhe ⁇ mi ⁇ vaniya eg ⁇ ⁇ iches ⁇ y ⁇ ve ⁇ n ⁇ s ⁇ i 4) niz ⁇ e ⁇ aches ⁇ v ⁇ and s ⁇ abiln ⁇ s ⁇ yu is ⁇ dn ⁇ y ⁇ my ⁇ azhayushey ⁇ ve ⁇ n ⁇ s ⁇ i: 5) and niz ⁇ aya ⁇ chn ⁇ s ⁇ nadezhn ⁇ s ⁇ ze ⁇ ala.
  • the technical task to solve the shortened direction of the given invention, is to increase the amplitude of the disruption of the room for the loss of optimal Otherwise, the proposed consumer equipment will reduce the cost of production. failures and events of the earth. Improve the quality and stability of its original format and its optical efficiency, as well as increase the reliability and reliability of the mirror.
  • the corresponding distinctive sign is that, in every piezoelectric element, all the elec- trodes of piezoelectric plates are fulfilled good. Items for the polarization of adjacent piezoelectric plates of each element are directed to the convenient paths. and their elec- tric elec- trodes are electrically interconnected. How to do it.
  • This invention proposes the following way out of this situation. Namely: an increase in local hardness of each local, large, multi-structured structure is compensated, in a different degree, more elastic ⁇ ⁇ 97/09642 ⁇ / ⁇ 6 / 00 ⁇ 4
  • ⁇ dna ⁇ es ⁇ es ⁇ venn ⁇ influence ⁇ e ⁇ eg ⁇ ⁇ lichi ⁇ eln ⁇ g ⁇ ⁇ izna ⁇ a ( ⁇ .e., ch ⁇ s ⁇ a ⁇ an vy ⁇ lnen as edin ⁇ y de ⁇ ali with the bottom ⁇ e ⁇ emenn ⁇ y ⁇ lschiny on s ⁇ edney chas ⁇ i ⁇ g ⁇ , imeyushih b ⁇ lshuyu ⁇ lschinu, vy ⁇ lnena ⁇ azhayushaya ⁇ ve ⁇ n ⁇ s ⁇ ) on am ⁇ li ⁇ udu de ⁇ matsy ⁇ azhayuschey ⁇ ve ⁇ n ⁇ s ⁇ i bude ⁇ b ⁇ lee znachi ⁇ elnym for ⁇ e ⁇ i ⁇ e ⁇ iyny ⁇ ⁇ ez ⁇ ele ⁇ iches ⁇ i ⁇ elemen ⁇ v Mosaic zerkala.
  • This allows the use of various types of parts for
  • ch ⁇ is ⁇ lz ⁇ vanie in vyb ⁇ ann ⁇ m ⁇ i ⁇ e ⁇ l ⁇ ⁇ e ⁇ eg ⁇ ⁇ lichi ⁇ eln ⁇ g ⁇ ⁇ izna ⁇ a ⁇ edlagaem ⁇ g ⁇ iz ⁇ b ⁇ e ⁇ eniya ( ⁇ .e., ch ⁇ s ⁇ a ⁇ an vy ⁇ lnen as edin ⁇ y de ⁇ ali with Dnishev ⁇ e ⁇ emenn ⁇ y ⁇ lshiny on s ⁇ edney chas ⁇ i ⁇ g ⁇ , imeyushih b ⁇ lshuyu ⁇ lshinu, vy ⁇ lnena ⁇ azhayushaya ⁇ ve ⁇ n ⁇ s ⁇ ) to d ⁇ s ⁇ izheniya u ⁇ azann ⁇ g ⁇ ⁇ e ⁇ niches ⁇ g ⁇ result ⁇ ⁇ 97/09642 ⁇ / ⁇ 6 /
  • piezoelectric elements in the simplest case can be simply glued with a durable adhesive.
  • the area of its body is filled with an elastic seal. Reducing ⁇ ud ⁇ em ⁇ s ⁇ i ⁇ mi ⁇ vaniya ⁇ iches ⁇ y ⁇ ve ⁇ n ⁇ s ⁇ i ze ⁇ ala and ⁇ vyshenie ⁇ aches ⁇ va her is ⁇ dn ⁇ y ⁇ my d ⁇ s ⁇ igae ⁇ sya blag ⁇ da ⁇ ya dem ⁇ i ⁇ vaniyu elas ⁇ ichnym pressure ge ⁇ me ⁇ i ⁇ m ⁇ li ⁇ valni ⁇ a on ⁇ azhayushuyu ⁇ las ⁇ inu ze ⁇ ala in ⁇ tsesse ⁇ li ⁇ v ⁇ i ⁇ sledneg ⁇ , on account cheg ⁇ ⁇ bes ⁇ echivae ⁇ sya b ⁇ lee ⁇ dn ⁇
  • Fig. 1 shows a schematic breakdown of a musical adaptive bimetal in case of use in each piezoelectric element.
  • Fig. 2 shows a view of the mirror from the music channel, which is used for the occasion. when the last one has been configured with 7 piezoelectric elements.
  • ele ⁇ iches ⁇ i ⁇ elemen ⁇ v as ⁇ ez ⁇ e ⁇ amiches ⁇ i ⁇ ⁇ las ⁇ in 4 with deposited u ⁇ avlyayushimi ele ⁇ dami 5 s ⁇ edini ⁇ elny ⁇ ⁇ v ⁇ dni ⁇ v 6 ele ⁇ iches ⁇ i ⁇ ⁇ v ⁇ d ⁇ v 7 ele ⁇ iches ⁇ g ⁇ ⁇ azema 8 and 9 elas ⁇ ichn ⁇ g ⁇ ge ⁇ me ⁇ i ⁇ a .
  • Fig. 1 the direction of the original polarization is shown for each game.
  • the neighboring single electrodes for each pair of piezoplastins in each piezoelement are shown with one simple line.
  • each local multi-player is optional
  • each connection “impaired plate 3 - a local multiple accessory device (a separate accessory)” is electrically connected.
  • ⁇ a ⁇ e s ⁇ edinenie, ⁇ a ⁇ izves ⁇ n ⁇ (see na ⁇ , ⁇ k ⁇ g ⁇ zk ⁇ ⁇ . ⁇ . ⁇ a ⁇ uz ⁇ ⁇ G a ⁇ a ⁇ e ⁇ sa ⁇ e ⁇ ete ⁇ z tas ⁇ e Gg ⁇ t ⁇ e ⁇ e ⁇ es ⁇ s Yt ⁇ g ⁇ z -....] ⁇ ⁇ s ⁇ t 1979, ⁇ .69, ⁇ 1, ⁇ 181-187.... ), is a semi-passive bimp structure. Consequently.
  • the multi-component parts may not be connected by a simple connection of individual parts with the electrical parts applied on both sides, but. for example, a combination of a plate of a piezoelectric film. For this. the films themselves do not have ⁇ electrical appliances. and they play platypads.
  • the film is processed, due to this, it is damaged (but not the case).
  • the film is processed, due to this, it is damaged (but not the case).
  • the outcome of the pie for many of the most convenient parts are found to be paralleled through a common element for them.
  • s ⁇ de ⁇ z haschimi dis ⁇ e ⁇ nye u ⁇ avlyayuschie ⁇ iv ⁇ dy (na ⁇ ime ⁇ , ⁇ s ⁇ avneniyu with de ⁇ mi ⁇ uemymi ze ⁇ alami ⁇ antsuzs ⁇ y ⁇ i ⁇ my azegs ⁇ ⁇ 52 and ⁇ 249, s ⁇ de ⁇ zhaschimi, s ⁇ ve ⁇ s ⁇ venn ⁇ , 52 and 249 ⁇ ez ⁇ iv ⁇ d ⁇ v see. . ⁇ .- ⁇ . ⁇ ayags ⁇ , ⁇ La ⁇ ige1. ⁇ . .
  • ⁇ a ⁇ ⁇ s ⁇ a ⁇ e ⁇ sz :. ⁇ ezs ⁇ ⁇ G a ⁇ a ⁇ aYe s ⁇ t ⁇ e ⁇ z a ⁇ azegs ⁇ - ⁇ g ⁇ s ⁇ , 1994, ⁇ 2201, ⁇ 688-702), ⁇ edl ⁇ zhenn ⁇ e us ⁇ ys ⁇ v ⁇ ⁇ i ⁇ chi ⁇ ⁇ avny ⁇ usl ⁇ viya ⁇ ( ⁇ a ⁇ a ⁇ e ⁇ is ⁇ i ⁇ a ⁇ ) ⁇ bladae ⁇ ⁇ a ⁇ ⁇ eimushes ⁇ vami at least the following: znachi ⁇ eln ⁇ smaller mass ⁇ y... and large sizes. Significantly lower production costs. ⁇ ⁇ 97/09642 ⁇ / ⁇ 6 / 00114
  • the practical invention may be used in any kind of optical systems for performing dynamic measurements (compensation) of the study.
  • optical systems for performing dynamic measurements (compensation) of the study.
  • astronomical telescopes with the aim of increasing the quality of the image of remote sources (compensation of the influence of earthly volatility).

Abstract

Cette invention se rapporte au domaine des éléments optiques asservis et peut être utilisée dans la commande dynamique et statique du front d'onde d'un rayonnement dans divers appareils et systèmes optiques tels que dans les télescopes astronomiques ou encore dans les techniques relatives aux lasers industriels ainsi que dans des systèmes optiques de guidage et de poursuite. Ce miroir dimorphe adaptatif et de type mosaïque fait appel à des structures dimorphes locales multicouches permettant d'effectuer la déformation de la surface réfléchissante. Ces structures se présentent sous forme d'éléments piézo-électriques et comprennent au moins deux plaques piézo-céramiques (4) fixées au fond d'un logement de type récipient (1) dont la cavité interne est remplie d'un agent d'étanchéité élastique (9).
PCT/RU1996/000114 1996-03-19 1996-05-06 Miroir dimorphe adaptatif de type mosaique WO1997009642A1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP9511110A JPH11506223A (ja) 1996-03-19 1996-05-06 モザイク適応バイモルフ鏡
PL96322714A PL322714A1 (en) 1996-03-19 1996-05-06 Adaptive mosaic-type bimorphous mirror
EP96915259A EP0793120A1 (fr) 1996-03-19 1996-05-06 Miroir dimorphe adaptatif de type mosaique
KR1019970701674A KR100230723B1 (ko) 1996-03-19 1996-05-06 모자이크식 적응형 이형 미러
AU57075/96A AU5707596A (en) 1996-03-19 1996-05-06 Mosaic adaptive bimorph mirror
RO96-01759A RO118340B1 (ro) 1996-03-19 1996-05-06 Oglindă bimorfă, adaptivă, mozaicată

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
RU96104503 1996-03-19
RU9696104503A RU2069883C1 (ru) 1996-03-19 1996-03-19 Мозаичное адаптивное биморфное зеркало

Publications (1)

Publication Number Publication Date
WO1997009642A1 true WO1997009642A1 (fr) 1997-03-13

Family

ID=20177786

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/RU1996/000114 WO1997009642A1 (fr) 1996-03-19 1996-05-06 Miroir dimorphe adaptatif de type mosaique

Country Status (11)

Country Link
EP (1) EP0793120A1 (fr)
JP (1) JPH11506223A (fr)
KR (1) KR100230723B1 (fr)
AU (1) AU5707596A (fr)
CA (1) CA2207470A1 (fr)
HU (1) HUP9602918A2 (fr)
LT (1) LT96122A (fr)
PL (1) PL322714A1 (fr)
RO (1) RO118340B1 (fr)
RU (1) RU2069883C1 (fr)
WO (1) WO1997009642A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6844994B2 (en) 2000-09-20 2005-01-18 Carl Zeiss Smt Ag Optical element deformation system
US6897599B2 (en) 2001-02-13 2005-05-24 Carl Zeiss Smt Ag System for damping oscillations

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10150424B4 (de) * 2001-10-11 2004-07-29 Siemens Ag Reflexionssystem und Verwendung des Reflexionssystems
AU2003294125A1 (en) * 2002-12-23 2004-07-14 Bae Systems Plc Deformable mirror
US7708415B2 (en) 2003-10-20 2010-05-04 Bae Systems Plc Mirror structure having piezoelectric element bonded to a mirror substrate
FR2875607B1 (fr) 2004-09-20 2006-11-24 Cit Alcatel Miroir a deformation locale par variation d'epaisseur d'un materiau electro-actif controlee par effet electrique
FR2913117B1 (fr) * 2007-02-28 2009-07-03 Cie Ind Des Lasers Cilas Sa Miroir adaptatif piezoelectrique.
WO2009007447A2 (fr) * 2007-07-11 2009-01-15 Universite Libre De Bruxelles Miroir déformable
DE102008014619C5 (de) 2008-03-17 2015-06-25 Friedrich-Schiller-Universität Jena Adaptiver Spiegel und Verfahren zu dessen Herstellung
US20100033704A1 (en) * 2008-08-11 2010-02-11 Masayuki Shiraishi Deformable mirror, mirror apparatus, and exposure apparatus
US9476764B2 (en) * 2013-09-10 2016-10-25 Taiwan Semiconductor Manufacturing Co., Ltd. Wavefront adjustment in extreme ultra-violet (EUV) lithography
US9405204B2 (en) 2013-09-18 2016-08-02 Taiwan Semiconductor Manufacturing Co., Ltd. Method of overlay in extreme ultra-violet (EUV) lithography
WO2017073317A1 (fr) 2015-10-27 2017-05-04 株式会社村田製作所 Dispositif piézoélectrique et procédé de fabrication de dispositif piézoélectrique
RU177637U1 (ru) * 2017-10-27 2018-03-05 Федеральное государственное унитарное предприятие "Научно-исследовательский институт Научно-производственное объединение "ЛУЧ" (ФГУП "НИИ НПО "ЛУЧ") Адаптивное зеркало

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US4298247A (en) * 1979-04-04 1981-11-03 Quantel S.A. Thick optical element having a variable curvature
US4589740A (en) * 1982-07-22 1986-05-20 Office National D'etudes Et De Recherche Aerospatiales (Onera) Trihedron-shaped deformable reflectors
US4674848A (en) * 1986-03-17 1987-06-23 Itek Corporation Laser mirror having a cooled, deformable surface

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Publication number Priority date Publication date Assignee Title
US4257686A (en) * 1978-12-14 1981-03-24 Itek Corporation Multiple layer piezoelectric wavefront modulator
US4280756A (en) * 1979-01-02 1981-07-28 Itek Corporation Piezoelectric bi-morph mirror actuator

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4298247A (en) * 1979-04-04 1981-11-03 Quantel S.A. Thick optical element having a variable curvature
US4589740A (en) * 1982-07-22 1986-05-20 Office National D'etudes Et De Recherche Aerospatiales (Onera) Trihedron-shaped deformable reflectors
US4674848A (en) * 1986-03-17 1987-06-23 Itek Corporation Laser mirror having a cooled, deformable surface

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP0793120A4 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6844994B2 (en) 2000-09-20 2005-01-18 Carl Zeiss Smt Ag Optical element deformation system
US6897599B2 (en) 2001-02-13 2005-05-24 Carl Zeiss Smt Ag System for damping oscillations

Also Published As

Publication number Publication date
KR100230723B1 (ko) 1999-11-15
RO118340B1 (ro) 2003-04-30
KR970707457A (ko) 1997-12-01
AU5707596A (en) 1997-03-27
CA2207470A1 (fr) 1997-03-13
LT96122A (en) 1997-10-27
HUP9602918A2 (en) 1997-11-28
RU2069883C1 (ru) 1996-11-27
EP0793120A4 (fr) 1997-08-22
PL322714A1 (en) 1998-02-16
EP0793120A1 (fr) 1997-09-03
JPH11506223A (ja) 1999-06-02
HU9602918D0 (en) 1996-12-30

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