WO1992008821A1 - Vorrichtung zum gasdiffusionsbeschichten von hohlen werkstücken - Google Patents

Vorrichtung zum gasdiffusionsbeschichten von hohlen werkstücken Download PDF

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Publication number
WO1992008821A1
WO1992008821A1 PCT/EP1991/002039 EP9102039W WO9208821A1 WO 1992008821 A1 WO1992008821 A1 WO 1992008821A1 EP 9102039 W EP9102039 W EP 9102039W WO 9208821 A1 WO9208821 A1 WO 9208821A1
Authority
WO
WIPO (PCT)
Prior art keywords
donor metal
gas
workpiece
donor
metal body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP1991/002039
Other languages
German (de)
English (en)
French (fr)
Inventor
Lothar Peichl
Heinrich Walter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MTU Aero Engines AG
Original Assignee
MTU Motoren und Turbinen Union Muenchen GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MTU Motoren und Turbinen Union Muenchen GmbH filed Critical MTU Motoren und Turbinen Union Muenchen GmbH
Priority to EP91918473A priority Critical patent/EP0556208B1/de
Priority to JP3517661A priority patent/JPH06504321A/ja
Priority to US08/050,271 priority patent/US5439525A/en
Publication of WO1992008821A1 publication Critical patent/WO1992008821A1/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C10/00—Solid state diffusion of only metal elements or silicon into metallic material surfaces
    • C23C10/06—Solid state diffusion of only metal elements or silicon into metallic material surfaces using gases

Definitions

  • Donor metal gas supply of the donor metal gas sump is available. For this reason, a fine-grained powder bed of donor metal is preferably arranged below the donor metal body.
  • FIG 3 shows a device for gas diffusion coating by means of a donor metal body made of sintered metal.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Powder Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)
PCT/EP1991/002039 1990-11-10 1991-10-29 Vorrichtung zum gasdiffusionsbeschichten von hohlen werkstücken Ceased WO1992008821A1 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP91918473A EP0556208B1 (de) 1990-11-10 1991-10-29 Vorrichtung zum gasdiffusionsbeschichten von hohlen werkstücken
JP3517661A JPH06504321A (ja) 1990-11-10 1991-10-29 中空の工作物をガス拡散作用を利用してコーティングするための装置
US08/050,271 US5439525A (en) 1990-11-10 1991-10-29 Device for coating hollow workpieces by gas diffusion

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DEP4035789.9 1990-11-10
DE4035789A DE4035789C1 (https=) 1990-11-10 1990-11-10

Publications (1)

Publication Number Publication Date
WO1992008821A1 true WO1992008821A1 (de) 1992-05-29

Family

ID=6417997

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP1991/002039 Ceased WO1992008821A1 (de) 1990-11-10 1991-10-29 Vorrichtung zum gasdiffusionsbeschichten von hohlen werkstücken

Country Status (5)

Country Link
US (1) US5439525A (https=)
EP (1) EP0556208B1 (https=)
JP (1) JPH06504321A (https=)
DE (1) DE4035789C1 (https=)
WO (1) WO1992008821A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19803740C2 (de) * 1998-01-30 2001-05-31 Mtu Aero Engines Gmbh Gasphasenbeschichtungsverfahren und Vorrichtung zur Gasphasenbeschichtung von Werkstücken

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5424097A (en) * 1993-09-30 1995-06-13 Specialty Coating Systems, Inc. Continuous vapor deposition apparatus
US5536319A (en) * 1995-10-27 1996-07-16 Specialty Coating Systems, Inc. Parylene deposition apparatus including an atmospheric shroud and inert gas source
US5879808A (en) * 1995-10-27 1999-03-09 Alpha Metals, Inc. Parylene polymer layers
DE19607625C1 (de) * 1996-02-29 1996-12-12 Mtu Muenchen Gmbh Vorrichtung und Verfahren zur Präparation und/oder Beschichtung der Oberflächen von Hohlbauteilen
US5806319A (en) * 1997-03-13 1998-09-15 Wary; John Method and apparatus for cryogenically cooling a deposition chamber
US6051276A (en) * 1997-03-14 2000-04-18 Alpha Metals, Inc. Internally heated pyrolysis zone
US5841005A (en) * 1997-03-14 1998-11-24 Dolbier, Jr.; William R. Parylene AF4 synthesis
US5910219A (en) * 1997-06-06 1999-06-08 United Technologies Corporation Can coating system
RU2176684C2 (ru) * 1999-11-16 2001-12-10 Общество с ограниченной ответственностью "ТУРБОМЕТ" Способ нанесения защитных покрытий на детали из жаропрочных никелевых сплавов с полостями и перфорационными отверстиями, изготовленными методом электроэрозионного прожига
US7390535B2 (en) * 2003-07-03 2008-06-24 Aeromet Technologies, Inc. Simple chemical vapor deposition system and methods for depositing multiple-metal aluminide coatings
US7444955B2 (en) * 2004-05-19 2008-11-04 Sub-One Technology, Inc. Apparatus for directing plasma flow to coat internal passageways
JP5306993B2 (ja) * 2007-03-30 2013-10-02 東京エレクトロン株式会社 蒸着源ユニット、蒸着装置および蒸着源ユニットの温度調整装置
KR200445846Y1 (ko) * 2009-06-10 2009-09-03 (주) 엠에스피 중앙유통관을 갖는 청크 에칭 바스켓
CN102781562B (zh) * 2009-12-24 2014-11-19 Lg伊诺特有限公司 用于真空热处理设备的热处理容器
EP2476776B1 (de) * 2011-01-18 2015-08-12 Siemens Aktiengesellschaft Verfahren zur Einstellung des Kühlmittelverbrauchs innerhalb aktiv gekühlter Bauteile
US8894770B2 (en) * 2012-03-14 2014-11-25 Andritz Iggesund Tools Inc. Process and apparatus to treat metal surfaces
EP2960059B1 (en) 2014-06-25 2018-10-24 Universal Display Corporation Systems and methods of modulating flow during vapor jet deposition of organic materials
US11220737B2 (en) 2014-06-25 2022-01-11 Universal Display Corporation Systems and methods of modulating flow during vapor jet deposition of organic materials
US11267012B2 (en) 2014-06-25 2022-03-08 Universal Display Corporation Spatial control of vapor condensation using convection
US10566534B2 (en) * 2015-10-12 2020-02-18 Universal Display Corporation Apparatus and method to deliver organic material via organic vapor-jet printing (OVJP)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1130118A (fr) * 1955-07-07 1957-01-31 Perfectionnements aux fours utilisés pour la mise en oeuvre des procédés de formation d'alliages superficiels par diffusion en phase gazeuse d'un métal d'apport
FR1134753A (fr) * 1955-01-31 1957-04-17 Procédé de traitement d'objets métalliques dont la surface doit être modifiée par la formation d'alliages superficiels
US2910382A (en) * 1955-06-30 1959-10-27 Vulliez Paul Method of forming surface alloys on metallic articles
GB825847A (en) * 1955-02-16 1959-12-23 Onera (Off Nat Aerospatiale) Improvements in methods of forming superficial diffusion alloys containing chromium
GB975202A (en) * 1961-06-23 1964-11-11 Alloy Surfaces Co Inc Improvements in process for chromizing and product
EP0068950A1 (fr) * 1981-06-18 1983-01-05 Societe Nationale D'etude Et De Construction De Moteurs D'aviation, "S.N.E.C.M.A." Procédé, en phase vapeur, pour le dépôt d'un revêtement protecteur sur une pièce métallique, dispositif pour sa mise en oeuvre et pièces obtenues selon ledit procédé

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2633641B1 (fr) * 1988-06-30 1993-02-05 Snecma Procede et dispositif de protection simultanee des surfaces internes et externes, notamment par aluminisation de pieces en alliages resistant a chaud, a base de ni, co ou fe

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1134753A (fr) * 1955-01-31 1957-04-17 Procédé de traitement d'objets métalliques dont la surface doit être modifiée par la formation d'alliages superficiels
GB825847A (en) * 1955-02-16 1959-12-23 Onera (Off Nat Aerospatiale) Improvements in methods of forming superficial diffusion alloys containing chromium
US2910382A (en) * 1955-06-30 1959-10-27 Vulliez Paul Method of forming surface alloys on metallic articles
FR1130118A (fr) * 1955-07-07 1957-01-31 Perfectionnements aux fours utilisés pour la mise en oeuvre des procédés de formation d'alliages superficiels par diffusion en phase gazeuse d'un métal d'apport
GB975202A (en) * 1961-06-23 1964-11-11 Alloy Surfaces Co Inc Improvements in process for chromizing and product
EP0068950A1 (fr) * 1981-06-18 1983-01-05 Societe Nationale D'etude Et De Construction De Moteurs D'aviation, "S.N.E.C.M.A." Procédé, en phase vapeur, pour le dépôt d'un revêtement protecteur sur une pièce métallique, dispositif pour sa mise en oeuvre et pièces obtenues selon ledit procédé

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19803740C2 (de) * 1998-01-30 2001-05-31 Mtu Aero Engines Gmbh Gasphasenbeschichtungsverfahren und Vorrichtung zur Gasphasenbeschichtung von Werkstücken

Also Published As

Publication number Publication date
DE4035789C1 (https=) 1991-06-13
EP0556208B1 (de) 1995-04-05
JPH06504321A (ja) 1994-05-19
EP0556208A1 (de) 1993-08-25
US5439525A (en) 1995-08-08

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