WO1991009995A3 - Procede pour le depot de couches minces sur des solides - Google Patents
Procede pour le depot de couches minces sur des solides Download PDFInfo
- Publication number
- WO1991009995A3 WO1991009995A3 PCT/GB1990/001967 GB9001967W WO9109995A3 WO 1991009995 A3 WO1991009995 A3 WO 1991009995A3 GB 9001967 W GB9001967 W GB 9001967W WO 9109995 A3 WO9109995 A3 WO 9109995A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- solids
- deposition
- thin films
- group iii
- lewis
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
- C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/301—AIII BV compounds, where A is Al, Ga, In or Tl and B is N, P, As, Sb or Bi
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
Abstract
Un procédé pour former un film de métal du groupe III, ou un film semi-conducteur III - V, sur un substrat solide consiste à appliquer à ce dernier un précurseur gazeux du groupe III ayant la formule MH3L ou MH3L2 où M est Al, In ou Ga et L est un doneur de Lewis. Des doneurs de Lewis préférés sont à base d'As, P ou N, par exemple NMe3.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB898928824A GB8928824D0 (en) | 1989-12-21 | 1989-12-21 | Processes for the deposition of thin films on solids |
GB8928824.5 | 1989-12-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO1991009995A2 WO1991009995A2 (fr) | 1991-07-11 |
WO1991009995A3 true WO1991009995A3 (fr) | 1991-10-17 |
Family
ID=10668268
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/GB1990/001967 WO1991009995A2 (fr) | 1989-12-21 | 1990-12-17 | Procede pour le depot de couches minces sur des solides |
Country Status (3)
Country | Link |
---|---|
JP (1) | JPH05501480A (fr) |
GB (1) | GB8928824D0 (fr) |
WO (1) | WO1991009995A2 (fr) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3375129A (en) * | 1966-09-22 | 1968-03-26 | Ethyl Corp | Aluminum plating employing amine complex of aluminum hydride |
EP0052979A1 (fr) * | 1980-11-18 | 1982-06-02 | BRITISH TELECOMMUNICATIONS public limited company | Production de composés du groupe IIIB-VB |
EP0251555A1 (fr) * | 1986-07-01 | 1988-01-07 | Morton Thiokol, Inc. | Produits d'addition de l'hydrure de gallium/trialkylamine et leur emploi pour le dépôt de films de composés III-V |
WO1990010726A1 (fr) * | 1989-03-09 | 1990-09-20 | MERCK Patent Gesellschaft mit beschränkter Haftung | Utilisation de composes organo-metalliques pour la deposition de couches minces en phase gazeuse |
WO1990010727A1 (fr) * | 1989-03-09 | 1990-09-20 | MERCK Patent Gesellschaft mit beschränkter Haftung | Produits d'addition organo-metalliques |
-
1989
- 1989-12-21 GB GB898928824A patent/GB8928824D0/en active Pending
-
1990
- 1990-12-17 WO PCT/GB1990/001967 patent/WO1991009995A2/fr unknown
- 1990-12-17 JP JP50133791A patent/JPH05501480A/ja active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3375129A (en) * | 1966-09-22 | 1968-03-26 | Ethyl Corp | Aluminum plating employing amine complex of aluminum hydride |
EP0052979A1 (fr) * | 1980-11-18 | 1982-06-02 | BRITISH TELECOMMUNICATIONS public limited company | Production de composés du groupe IIIB-VB |
EP0251555A1 (fr) * | 1986-07-01 | 1988-01-07 | Morton Thiokol, Inc. | Produits d'addition de l'hydrure de gallium/trialkylamine et leur emploi pour le dépôt de films de composés III-V |
WO1990010726A1 (fr) * | 1989-03-09 | 1990-09-20 | MERCK Patent Gesellschaft mit beschränkter Haftung | Utilisation de composes organo-metalliques pour la deposition de couches minces en phase gazeuse |
WO1990010727A1 (fr) * | 1989-03-09 | 1990-09-20 | MERCK Patent Gesellschaft mit beschränkter Haftung | Produits d'addition organo-metalliques |
Non-Patent Citations (3)
Title |
---|
Chemtronics, vol. 4, no. 4, December 1989, (Guildford, Surrey, GB), J.S. Foord et al.: "Evaluation of the surface reactivity of novel hydride adduct precursors of aluminium and gallium for chemical beam epitaxy", pages 262-264, see "results and discussion" * |
Journal of Crystal Growth, vol. 104, no. 4, September 1990, Elsevier Science Publishers B.V., (Amsterdam, NL), J.S. Roberts et al.: "MOVPE growth of AlGaAs using trimethylamine alane", pages 857-860, see page 857 * |
Journal of Crystal Growth, vol. 96, no. 4, August 1989, Elsevier Science Publishers B.V., (Amsterdam, NL), A.C. Jones et al.: "Growth of AlxGa1-x as bz MOVPE using a new alkylaluminium precursor", pages 769-773 * |
Also Published As
Publication number | Publication date |
---|---|
WO1991009995A2 (fr) | 1991-07-11 |
GB8928824D0 (en) | 1990-02-28 |
JPH05501480A (ja) | 1993-03-18 |
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