WO1989005459A3 - Dispositif de mesure de l'acceleration - Google Patents

Dispositif de mesure de l'acceleration Download PDF

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Publication number
WO1989005459A3
WO1989005459A3 PCT/DE1988/000740 DE8800740W WO8905459A3 WO 1989005459 A3 WO1989005459 A3 WO 1989005459A3 DE 8800740 W DE8800740 W DE 8800740W WO 8905459 A3 WO8905459 A3 WO 8905459A3
Authority
WO
WIPO (PCT)
Prior art keywords
motion
changes
acceleration
torques
torsion bars
Prior art date
Application number
PCT/DE1988/000740
Other languages
German (de)
English (en)
Other versions
WO1989005459A2 (fr
Inventor
Wolfgang Benecke
Original Assignee
Fraunhofer Ges Forschung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Ges Forschung filed Critical Fraunhofer Ges Forschung
Priority to AT89900182T priority Critical patent/ATE87746T1/de
Priority to DE8989900182T priority patent/DE3879958D1/de
Priority to JP1500286A priority patent/JPH0833409B2/ja
Publication of WO1989005459A2 publication Critical patent/WO1989005459A2/fr
Publication of WO1989005459A3 publication Critical patent/WO1989005459A3/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0845—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration using a plurality of spring-mass systems being arranged on one common planar substrate, the systems not being mechanically coupled and the sensitive direction of each system being different
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0857—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration using a particular shape of the suspension spring
    • G01P2015/086—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration using a particular shape of the suspension spring using a torsional suspension spring
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Micromachines (AREA)

Abstract

Un dispositif de mesure de l'accélération permet de mesurer avec une sensibilité sélective des modifications de mouvements selon les trois axes de l'espace. Afin de saisir des modifications multidimensionnelles de mouvements, trois capteurs micromécaniques sensibles chacun à l'accélération dans un sens sélectionné sont monolithiquement intégrés dans un cristal. Les capteurs comprennent des barres de torsion avec des masses excentriques qui exercent un couple autour des axes des barres de torsion lors de modifications d'un mouvement. Les couples ainsi exercés sont mesurés au moyen de résistances piézoélectriques. L'intégration planaire de l'accéléromètre permet d'intégrer le circuit d'évaluation sur la même surface semi-conductrice. Avec ce procédé, ces accéléromètres sont produits par technologie planaire au moyen de processus d'épitaxie, de lithographie et de gravure amisotropique. La haute précision et le degré élevé de miniaturisation de cet accéléromètre le rend particulièrement utile comme instrument de navigation terrestre et aérienne et comme outil de positionnement de composants en robotique.
PCT/DE1988/000740 1987-12-03 1988-12-01 Dispositif de mesure de l'acceleration WO1989005459A2 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
AT89900182T ATE87746T1 (de) 1987-12-03 1988-12-01 Vorrichtung zur messung von beschleunigungen.
DE8989900182T DE3879958D1 (de) 1987-12-03 1988-12-01 Vorrichtung zur messung von beschleunigungen.
JP1500286A JPH0833409B2 (ja) 1987-12-03 1988-12-01 加速度測定装置及びその製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19873741036 DE3741036A1 (de) 1987-12-03 1987-12-03 Mikromechanischer beschleunigungsmesser
DEP3741036.9 1987-12-03

Publications (2)

Publication Number Publication Date
WO1989005459A2 WO1989005459A2 (fr) 1989-06-15
WO1989005459A3 true WO1989005459A3 (fr) 1989-07-13

Family

ID=6341834

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE1988/000740 WO1989005459A2 (fr) 1987-12-03 1988-12-01 Dispositif de mesure de l'acceleration

Country Status (6)

Country Link
US (1) US5065628A (fr)
EP (1) EP0394305B1 (fr)
JP (1) JPH0833409B2 (fr)
AT (1) ATE87746T1 (fr)
DE (2) DE3741036A1 (fr)
WO (1) WO1989005459A2 (fr)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4022495A1 (de) * 1990-07-14 1992-01-23 Bosch Gmbh Robert Mikromechanischer drehratensensor
JPH04258175A (ja) * 1991-02-12 1992-09-14 Mitsubishi Electric Corp シリコン半導体加速度センサの製造方法
JPH05333038A (ja) * 1992-06-03 1993-12-17 Canon Inc 角速度センサ
JPH0690014A (ja) * 1992-07-22 1994-03-29 Mitsubishi Electric Corp 薄型太陽電池及びその製造方法，エッチング方法及び自動エッチング装置，並びに半導体装置の製造方法
DE4322034A1 (de) * 1992-08-06 1994-02-10 Deutsche Aerospace Kontaktierung und Verkapselung von integrierten Schaltungsmodulen
SE500615C2 (sv) * 1992-12-03 1994-07-25 Gert Andersson Anordning för mätning av kraftkomponenter, förfarande för framställning av dylik samt användning därav.
FR2700065B1 (fr) * 1992-12-28 1995-02-10 Commissariat Energie Atomique Procédé de fabrication d'accéléromètres utilisant la technologie silicium sur isolant.
DE4340664C2 (de) * 1993-11-30 1999-02-11 Helmut Dipl Ing Dr Crazzolara Piezoresistiver Beschleunigungsaufnehmer
US6559117B1 (en) 1993-12-13 2003-05-06 The Procter & Gamble Company Viscosity stable concentrated liquid fabric softener compositions
JPH08211091A (ja) * 1995-02-07 1996-08-20 Mitsubishi Electric Corp 半導体加速度検出装置
US5694340A (en) * 1995-04-05 1997-12-02 Kim; Charles Hongchul Method of training physical skills using a digital motion analyzer and an accelerometer
FR2754386B1 (fr) 1996-10-03 1998-10-30 Commissariat Energie Atomique Structure comprenant une partie isolee dans un substrat massif et procede de realisation d'une telle structure
JP3311633B2 (ja) * 1997-04-04 2002-08-05 日本碍子株式会社 センサユニット
DE19750350C1 (de) * 1997-11-13 1999-08-05 Univ Dresden Tech Dreidimensionaler Chip-Beschleunigungssensor und Verfahren zu seiner Herstellung mittels UV-unterstützter Mikrogalvanik
DE10225714A1 (de) * 2002-06-11 2004-01-08 Eads Deutschland Gmbh Mehrachsiger monolithischer Beschleunigungssensor
US6862795B2 (en) * 2002-06-17 2005-03-08 Vty Holding Oy Method of manufacturing of a monolithic silicon acceleration sensor
FI119528B (fi) 2003-02-11 2008-12-15 Vti Technologies Oy Kapasitiivinen kiihtyvyysanturirakenne
FI119159B (fi) * 2003-02-11 2008-08-15 Vti Technologies Oy Kapasitiivinen kiihtyvyysanturirakenne
EP1711836A1 (fr) * 2004-01-07 2006-10-18 Northrop Grumman Corporation Matieres tests coplanaires permettant de detecter une acceleration le long de trois axes
US20050170819A1 (en) * 2004-01-29 2005-08-04 Barclay Deborah L. Mobile communication device call barge-in
EP1994363A1 (fr) * 2006-03-10 2008-11-26 Contitemic Microelectronic GmbH Capteur de vitesse de rotation micromécanique
US7690272B2 (en) * 2007-09-28 2010-04-06 Endevco Corporation Flexural pivot for micro-sensors
US8258799B2 (en) * 2008-11-07 2012-09-04 The Charles Stark Draper Laboratory, Inc. MEMS dosimeter
JP2010156610A (ja) * 2008-12-26 2010-07-15 Kyocera Corp 加速度センサ素子及び加速度センサ
EP2514713B1 (fr) * 2011-04-20 2013-10-02 Tronics Microsystems S.A. Dispositif à système micro-électromécanique (MEMS)
EP2607849A1 (fr) 2011-12-22 2013-06-26 Tronics Microsystems S.A. Capteur inertiel micro-électronique multiaxial
JP2014219251A (ja) * 2013-05-08 2014-11-20 アルプス電気株式会社 Ｍｅｍｓ装置及びその製造方法
KR101915954B1 (ko) * 2016-06-29 2018-11-08 주식회사 신성씨앤티 멤스 기반의 3축 가속도 센서
US11526182B2 (en) 2019-03-25 2022-12-13 Cbn Nano Technologies Inc. Sensing and operation of devices in viscous flow using derived parameters to reduce data-handling requirements

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2101336A (en) * 1981-07-02 1983-01-12 Centre Electron Horloger Capacitive accelerometers
EP0244581A1 (fr) * 1986-04-04 1987-11-11 Robert Bosch Gmbh Capteur pour déclenchement automatique de dispositifs de sécurité pour passagers
EP0301816A2 (fr) * 1987-07-29 1989-02-01 GEC-Marconi Limited Accéléromètre

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GB2174500B (en) * 1985-05-04 1988-02-10 Stc Plc Accelerometer
JPS62118260A (ja) * 1985-11-19 1987-05-29 Fujitsu Ltd 加速度センサ
FR2604791B1 (fr) * 1986-10-02 1988-11-25 Commissariat Energie Atomique Procedes de fabrication d'une jauge piezoresistive et d'un accelerometre comportant une telle jauge
US4851080A (en) * 1987-06-29 1989-07-25 Massachusetts Institute Of Technology Resonant accelerometer

Patent Citations (3)

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Publication number Priority date Publication date Assignee Title
GB2101336A (en) * 1981-07-02 1983-01-12 Centre Electron Horloger Capacitive accelerometers
EP0244581A1 (fr) * 1986-04-04 1987-11-11 Robert Bosch Gmbh Capteur pour déclenchement automatique de dispositifs de sécurité pour passagers
EP0301816A2 (fr) * 1987-07-29 1989-02-01 GEC-Marconi Limited Accéléromètre

Non-Patent Citations (2)

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Title
New Electronics, Band 19, Nr. 16, August 1986, (London, GB) S. Henley: "Advances in VLSI simulate solid-state sensors market", Seiten 45,47-50 *
Technische Rundschau, Band 79, März 1987, (Bern, CH) E.K. Aschmoneit: "LIGA: Mikrostrukturen, lithographisch hergestellt", Seiten 54-57 *

Also Published As

Publication number Publication date
EP0394305A1 (fr) 1990-10-31
EP0394305B1 (fr) 1993-03-31
DE3741036A1 (de) 1989-06-15
JPH03501520A (ja) 1991-04-04
ATE87746T1 (de) 1993-04-15
JPH0833409B2 (ja) 1996-03-29
WO1989005459A2 (fr) 1989-06-15
DE3879958D1 (de) 1993-05-06
US5065628A (en) 1991-11-19

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