USD981971S1 - Boat of substrate processing apparatus - Google Patents

Boat of substrate processing apparatus Download PDF

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Publication number
USD981971S1
USD981971S1 US29/807,738 US202129807738F USD981971S US D981971 S1 USD981971 S1 US D981971S1 US 202129807738 F US202129807738 F US 202129807738F US D981971 S USD981971 S US D981971S
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United States
Prior art keywords
boat
processing apparatus
substrate processing
elevational view
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/807,738
Inventor
Daiki Taniguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
Original Assignee
Kokusai Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Corp filed Critical Kokusai Electric Corp
Assigned to Kokusai Electric Corporation reassignment Kokusai Electric Corporation ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: TANIGUCHI, Daiki
Application granted granted Critical
Publication of USD981971S1 publication Critical patent/USD981971S1/en
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FIG. 1 is a front, top and right side perspective view of a boat of substrate processing apparatus showing our new design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a right side elevational view thereof;
FIG. 4 is a left side elevational view thereof;
FIG. 5 is a rear elevational view thereof;
FIG. 6 is a top plan view thereof;
FIG. 7 is a bottom plan view thereof; and
FIG. 8 is an enlarged portion view, labeled FIG. 8 in FIG. 2 .
FIG. 9 is an enlarged cross-sectional view taken along line 9-9 in FIG. 2 thereof;
FIG. 10 is an enlarged cross-sectional view taken along line 10-10 in FIG. 2 thereof;
FIG. 11 is a perspective view of the area shown in FIG. 8 thereof; with portions that form no part of the claimed design removed for illustrative clarity.
FIG. 12 is a front elevational view of FIG. 11 thereof;
FIG. 13 is a rear elevational view of FIG. 11 thereof;
FIG. 14 is a right side elevational view of FIG. 11 thereof;
FIG. 15 is a left side elevational view of FIG. 11 thereof;
FIG. 16 is a top elevational view of FIG. 11 thereof; and,
FIG. 17 is a bottom plan elevational view of FIG. 11 .
The dot-dashed lines define the bounds of the claimed design and form no part thereof. The broken lines are included for the purpose of illustrating portions of the article that form no part of the claimed design. The dot-dot-dash broken lines in the FIG. 2 are used for reference purposes only, and form no part of the claimed design.

Claims (1)

    CLAIM
  1. The ornamental design for a boat of substrate processing apparatus, as shown and described.
US29/807,738 2021-03-15 2021-09-14 Boat of substrate processing apparatus Active USD981971S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021-005258D 2021-03-15
JP2021005258F JP1700777S (en) 2021-03-15 2021-03-15 Boat for substrate processing equipment

Publications (1)

Publication Number Publication Date
USD981971S1 true USD981971S1 (en) 2023-03-28

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ID=78766340

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/807,738 Active USD981971S1 (en) 2021-03-15 2021-09-14 Boat of substrate processing apparatus

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Country Link
US (1) USD981971S1 (en)
JP (1) JP1700777S (en)
TW (1) TWD225035S (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1019582S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1019581S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1019583S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1053830S1 (en) * 2022-03-04 2024-12-10 Kokusai Electric Corporation Wafer support of semiconductor manufacturing apparatus
USD1063875S1 (en) * 2022-09-14 2025-02-25 Kokusai Electric Corporation Substrate lifter for semiconductor manufacturing equipment
USD1078667S1 (en) * 2022-09-14 2025-06-10 Kokusai Electric Corporation Wafer support of semiconductor manufacturing apparatus
USD1091489S1 (en) * 2021-04-14 2025-09-02 Kokusai Electric Corporation Boat of substrate processing apparatus
USD1109710S1 (en) * 2022-03-22 2026-01-20 Achilles Corporation Main body of a semiconductor wafer carrying container

Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD302382S (en) * 1987-08-19 1989-07-25 Bleakley David M Pin for locking or stopping a sliding window sash
US6231038B1 (en) * 1998-12-01 2001-05-15 Greene Tweed Of Delaware, Inc. Two-piece clamp ring for holding semiconductor wafer or other workpiece
US20020113027A1 (en) * 2001-02-20 2002-08-22 Mitsubishi Denki Kabushiki Kaisha Retainer for use in heat treatment of substrate, substrate heat treatment equipment, and method of manufacturing the retainer
US6455395B1 (en) * 2000-06-30 2002-09-24 Integrated Materials, Inc. Method of fabricating silicon structures including fixtures for supporting wafers
US20020187023A1 (en) * 2001-05-11 2002-12-12 Itsuo Araki Vertical type wafer supporting jig
USD580894S1 (en) * 2006-05-01 2008-11-18 Tokyo Electron Limited Wafer boat
US20100141924A1 (en) * 2004-09-01 2010-06-10 Nikon Corporation Substrate holder, stage apparatus, and exposure apparatus with first support part provided in a suction space and second support part
US9153466B2 (en) 2012-04-26 2015-10-06 Asm Ip Holding B.V. Wafer boat
USD740769S1 (en) * 2013-03-22 2015-10-13 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
US20160093487A1 (en) * 2014-09-26 2016-03-31 Asm Ip Holding B.V. Method for depositing films on semiconductor wafers
CN111128814A (en) * 2018-10-31 2020-05-08 长鑫存储技术有限公司 crystal boat
CN112509967A (en) * 2019-09-16 2021-03-16 Ap系统股份有限公司 Edge ring and heat treatment apparatus having the same
CN114378751A (en) * 2020-10-20 2022-04-22 长鑫存储技术有限公司 Mounting clamp of bearing ring for wafer
US11315813B2 (en) * 2015-04-10 2022-04-26 Ev Group E. Thallner Gmbh Substrate holder and method for bonding two substrates
CN114628291A (en) * 2022-04-01 2022-06-14 合肥真萍电子科技有限公司 Quartz boat structure for wafer baking
USD958093S1 (en) * 2019-11-28 2022-07-19 Kokusai Electric Corporation Boat of substrate processing apparatus

Patent Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD302382S (en) * 1987-08-19 1989-07-25 Bleakley David M Pin for locking or stopping a sliding window sash
US6231038B1 (en) * 1998-12-01 2001-05-15 Greene Tweed Of Delaware, Inc. Two-piece clamp ring for holding semiconductor wafer or other workpiece
US6455395B1 (en) * 2000-06-30 2002-09-24 Integrated Materials, Inc. Method of fabricating silicon structures including fixtures for supporting wafers
US20020113027A1 (en) * 2001-02-20 2002-08-22 Mitsubishi Denki Kabushiki Kaisha Retainer for use in heat treatment of substrate, substrate heat treatment equipment, and method of manufacturing the retainer
US20020187023A1 (en) * 2001-05-11 2002-12-12 Itsuo Araki Vertical type wafer supporting jig
US20100141924A1 (en) * 2004-09-01 2010-06-10 Nikon Corporation Substrate holder, stage apparatus, and exposure apparatus with first support part provided in a suction space and second support part
USD580894S1 (en) * 2006-05-01 2008-11-18 Tokyo Electron Limited Wafer boat
US9153466B2 (en) 2012-04-26 2015-10-06 Asm Ip Holding B.V. Wafer boat
USD740769S1 (en) * 2013-03-22 2015-10-13 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
US20160093487A1 (en) * 2014-09-26 2016-03-31 Asm Ip Holding B.V. Method for depositing films on semiconductor wafers
US11315813B2 (en) * 2015-04-10 2022-04-26 Ev Group E. Thallner Gmbh Substrate holder and method for bonding two substrates
CN111128814A (en) * 2018-10-31 2020-05-08 长鑫存储技术有限公司 crystal boat
CN112509967A (en) * 2019-09-16 2021-03-16 Ap系统股份有限公司 Edge ring and heat treatment apparatus having the same
USD958093S1 (en) * 2019-11-28 2022-07-19 Kokusai Electric Corporation Boat of substrate processing apparatus
CN114378751A (en) * 2020-10-20 2022-04-22 长鑫存储技术有限公司 Mounting clamp of bearing ring for wafer
CN114628291A (en) * 2022-04-01 2022-06-14 合肥真萍电子科技有限公司 Quartz boat structure for wafer baking

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1091489S1 (en) * 2021-04-14 2025-09-02 Kokusai Electric Corporation Boat of substrate processing apparatus
USD1053830S1 (en) * 2022-03-04 2024-12-10 Kokusai Electric Corporation Wafer support of semiconductor manufacturing apparatus
USD1109710S1 (en) * 2022-03-22 2026-01-20 Achilles Corporation Main body of a semiconductor wafer carrying container
USD1019582S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1019581S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1019583S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1063875S1 (en) * 2022-09-14 2025-02-25 Kokusai Electric Corporation Substrate lifter for semiconductor manufacturing equipment
USD1078667S1 (en) * 2022-09-14 2025-06-10 Kokusai Electric Corporation Wafer support of semiconductor manufacturing apparatus

Also Published As

Publication number Publication date
TWD225035S (en) 2023-05-01
JP1700777S (en) 2021-11-29

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