USD981971S1 - Boat of substrate processing apparatus - Google Patents
Boat of substrate processing apparatus Download PDFInfo
- Publication number
- USD981971S1 USD981971S1 US29/807,738 US202129807738F USD981971S US D981971 S1 USD981971 S1 US D981971S1 US 202129807738 F US202129807738 F US 202129807738F US D981971 S USD981971 S US D981971S
- Authority
- US
- United States
- Prior art keywords
- boat
- processing apparatus
- substrate processing
- elevational view
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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Description
The dot-dashed lines define the bounds of the claimed design and form no part thereof. The broken lines are included for the purpose of illustrating portions of the article that form no part of the claimed design. The dot-dot-dash broken lines in the FIG. 2 are used for reference purposes only, and form no part of the claimed design.
Claims (1)
- The ornamental design for a boat of substrate processing apparatus, as shown and described.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021-005258D | 2021-03-15 | ||
| JP2021005258F JP1700777S (en) | 2021-03-15 | 2021-03-15 | Boat for substrate processing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| USD981971S1 true USD981971S1 (en) | 2023-03-28 |
Family
ID=78766340
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US29/807,738 Active USD981971S1 (en) | 2021-03-15 | 2021-09-14 | Boat of substrate processing apparatus |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | USD981971S1 (en) |
| JP (1) | JP1700777S (en) |
| TW (1) | TWD225035S (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD1019582S1 (en) * | 2022-05-30 | 2024-03-26 | Kokusai Electric Corporation | Inner tube of reaction tube for semiconductor manufacturing equipment |
| USD1019581S1 (en) * | 2022-05-30 | 2024-03-26 | Kokusai Electric Corporation | Inner tube of reaction tube for semiconductor manufacturing equipment |
| USD1019583S1 (en) * | 2022-05-30 | 2024-03-26 | Kokusai Electric Corporation | Inner tube of reaction tube for semiconductor manufacturing equipment |
| USD1053830S1 (en) * | 2022-03-04 | 2024-12-10 | Kokusai Electric Corporation | Wafer support of semiconductor manufacturing apparatus |
| USD1063875S1 (en) * | 2022-09-14 | 2025-02-25 | Kokusai Electric Corporation | Substrate lifter for semiconductor manufacturing equipment |
| USD1078667S1 (en) * | 2022-09-14 | 2025-06-10 | Kokusai Electric Corporation | Wafer support of semiconductor manufacturing apparatus |
| USD1091489S1 (en) * | 2021-04-14 | 2025-09-02 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
| USD1109710S1 (en) * | 2022-03-22 | 2026-01-20 | Achilles Corporation | Main body of a semiconductor wafer carrying container |
Citations (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD302382S (en) * | 1987-08-19 | 1989-07-25 | Bleakley David M | Pin for locking or stopping a sliding window sash |
| US6231038B1 (en) * | 1998-12-01 | 2001-05-15 | Greene Tweed Of Delaware, Inc. | Two-piece clamp ring for holding semiconductor wafer or other workpiece |
| US20020113027A1 (en) * | 2001-02-20 | 2002-08-22 | Mitsubishi Denki Kabushiki Kaisha | Retainer for use in heat treatment of substrate, substrate heat treatment equipment, and method of manufacturing the retainer |
| US6455395B1 (en) * | 2000-06-30 | 2002-09-24 | Integrated Materials, Inc. | Method of fabricating silicon structures including fixtures for supporting wafers |
| US20020187023A1 (en) * | 2001-05-11 | 2002-12-12 | Itsuo Araki | Vertical type wafer supporting jig |
| USD580894S1 (en) * | 2006-05-01 | 2008-11-18 | Tokyo Electron Limited | Wafer boat |
| US20100141924A1 (en) * | 2004-09-01 | 2010-06-10 | Nikon Corporation | Substrate holder, stage apparatus, and exposure apparatus with first support part provided in a suction space and second support part |
| US9153466B2 (en) | 2012-04-26 | 2015-10-06 | Asm Ip Holding B.V. | Wafer boat |
| USD740769S1 (en) * | 2013-03-22 | 2015-10-13 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
| US20160093487A1 (en) * | 2014-09-26 | 2016-03-31 | Asm Ip Holding B.V. | Method for depositing films on semiconductor wafers |
| CN111128814A (en) * | 2018-10-31 | 2020-05-08 | 长鑫存储技术有限公司 | crystal boat |
| CN112509967A (en) * | 2019-09-16 | 2021-03-16 | Ap系统股份有限公司 | Edge ring and heat treatment apparatus having the same |
| CN114378751A (en) * | 2020-10-20 | 2022-04-22 | 长鑫存储技术有限公司 | Mounting clamp of bearing ring for wafer |
| US11315813B2 (en) * | 2015-04-10 | 2022-04-26 | Ev Group E. Thallner Gmbh | Substrate holder and method for bonding two substrates |
| CN114628291A (en) * | 2022-04-01 | 2022-06-14 | 合肥真萍电子科技有限公司 | Quartz boat structure for wafer baking |
| USD958093S1 (en) * | 2019-11-28 | 2022-07-19 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
-
2021
- 2021-03-15 JP JP2021005258F patent/JP1700777S/en active Active
- 2021-08-31 TW TW110304575F patent/TWD225035S/en unknown
- 2021-09-14 US US29/807,738 patent/USD981971S1/en active Active
Patent Citations (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD302382S (en) * | 1987-08-19 | 1989-07-25 | Bleakley David M | Pin for locking or stopping a sliding window sash |
| US6231038B1 (en) * | 1998-12-01 | 2001-05-15 | Greene Tweed Of Delaware, Inc. | Two-piece clamp ring for holding semiconductor wafer or other workpiece |
| US6455395B1 (en) * | 2000-06-30 | 2002-09-24 | Integrated Materials, Inc. | Method of fabricating silicon structures including fixtures for supporting wafers |
| US20020113027A1 (en) * | 2001-02-20 | 2002-08-22 | Mitsubishi Denki Kabushiki Kaisha | Retainer for use in heat treatment of substrate, substrate heat treatment equipment, and method of manufacturing the retainer |
| US20020187023A1 (en) * | 2001-05-11 | 2002-12-12 | Itsuo Araki | Vertical type wafer supporting jig |
| US20100141924A1 (en) * | 2004-09-01 | 2010-06-10 | Nikon Corporation | Substrate holder, stage apparatus, and exposure apparatus with first support part provided in a suction space and second support part |
| USD580894S1 (en) * | 2006-05-01 | 2008-11-18 | Tokyo Electron Limited | Wafer boat |
| US9153466B2 (en) | 2012-04-26 | 2015-10-06 | Asm Ip Holding B.V. | Wafer boat |
| USD740769S1 (en) * | 2013-03-22 | 2015-10-13 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
| US20160093487A1 (en) * | 2014-09-26 | 2016-03-31 | Asm Ip Holding B.V. | Method for depositing films on semiconductor wafers |
| US11315813B2 (en) * | 2015-04-10 | 2022-04-26 | Ev Group E. Thallner Gmbh | Substrate holder and method for bonding two substrates |
| CN111128814A (en) * | 2018-10-31 | 2020-05-08 | 长鑫存储技术有限公司 | crystal boat |
| CN112509967A (en) * | 2019-09-16 | 2021-03-16 | Ap系统股份有限公司 | Edge ring and heat treatment apparatus having the same |
| USD958093S1 (en) * | 2019-11-28 | 2022-07-19 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
| CN114378751A (en) * | 2020-10-20 | 2022-04-22 | 长鑫存储技术有限公司 | Mounting clamp of bearing ring for wafer |
| CN114628291A (en) * | 2022-04-01 | 2022-06-14 | 合肥真萍电子科技有限公司 | Quartz boat structure for wafer baking |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD1091489S1 (en) * | 2021-04-14 | 2025-09-02 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
| USD1053830S1 (en) * | 2022-03-04 | 2024-12-10 | Kokusai Electric Corporation | Wafer support of semiconductor manufacturing apparatus |
| USD1109710S1 (en) * | 2022-03-22 | 2026-01-20 | Achilles Corporation | Main body of a semiconductor wafer carrying container |
| USD1019582S1 (en) * | 2022-05-30 | 2024-03-26 | Kokusai Electric Corporation | Inner tube of reaction tube for semiconductor manufacturing equipment |
| USD1019581S1 (en) * | 2022-05-30 | 2024-03-26 | Kokusai Electric Corporation | Inner tube of reaction tube for semiconductor manufacturing equipment |
| USD1019583S1 (en) * | 2022-05-30 | 2024-03-26 | Kokusai Electric Corporation | Inner tube of reaction tube for semiconductor manufacturing equipment |
| USD1063875S1 (en) * | 2022-09-14 | 2025-02-25 | Kokusai Electric Corporation | Substrate lifter for semiconductor manufacturing equipment |
| USD1078667S1 (en) * | 2022-09-14 | 2025-06-10 | Kokusai Electric Corporation | Wafer support of semiconductor manufacturing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| TWD225035S (en) | 2023-05-01 |
| JP1700777S (en) | 2021-11-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FEPP | Fee payment procedure |
Free format text: ENTITY STATUS SET TO UNDISCOUNTED (ORIGINAL EVENT CODE: BIG.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |