USD940669S1 - Boat for substrate processing apparatus - Google Patents

Boat for substrate processing apparatus Download PDF

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Publication number
USD940669S1
USD940669S1 US29/691,588 US201929691588F USD940669S US D940669 S1 USD940669 S1 US D940669S1 US 201929691588 F US201929691588 F US 201929691588F US D940669 S USD940669 S US D940669S
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United States
Prior art keywords
boat
processing apparatus
substrate processing
view
along line
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Active
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US29/691,588
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English (en)
Inventor
Makoto Sambu
Makoto Tsuri
Satoshi Fujii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
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Kokusai Electric Corp
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Publication date
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Assigned to Kokusai Electric Corporation reassignment Kokusai Electric Corporation ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: FUJII, SATOSHI, SAMBU, MAKOTO, TSURI, MAKOTO
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US29/691,588 2018-11-19 2019-05-17 Boat for substrate processing apparatus Active USD940669S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018-025160 2018-11-19
JPD2018-25160F JP1640260S (enrdf_load_stackoverflow) 2018-11-19 2018-11-19

Publications (1)

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USD940669S1 true USD940669S1 (en) 2022-01-11

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Family Applications (1)

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US29/691,588 Active USD940669S1 (en) 2018-11-19 2019-05-17 Boat for substrate processing apparatus

Country Status (3)

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US (1) USD940669S1 (enrdf_load_stackoverflow)
JP (1) JP1640260S (enrdf_load_stackoverflow)
TW (1) TWD202463S (enrdf_load_stackoverflow)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD965542S1 (en) * 2020-03-19 2022-10-04 Kokusai Electric Corporation Boat of substrate processing apparatus
USD1019582S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1019583S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1019581S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1053830S1 (en) * 2022-03-04 2024-12-10 Kokusai Electric Corporation Wafer support of semiconductor manufacturing apparatus
USD1063875S1 (en) * 2022-09-14 2025-02-25 Kokusai Electric Corporation Substrate lifter for semiconductor manufacturing equipment
USD1078667S1 (en) * 2022-09-14 2025-06-10 Kokusai Electric Corporation Wafer support of semiconductor manufacturing apparatus

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD853979S1 (en) * 2017-12-27 2019-07-16 Kokusai Electric Corporation Reaction tube
USD857021S1 (en) * 2016-05-25 2019-08-20 Tdk Corporation Piezoelectric element
USD858467S1 (en) * 2017-01-05 2019-09-03 Rohm Co., Ltd. Power semiconductor module
USD865689S1 (en) * 2015-02-20 2019-11-05 Microduino Inc. Electrical module
USD866469S1 (en) * 2015-11-23 2019-11-12 Microduino Inc. Electrical module
USD872038S1 (en) * 2018-07-18 2020-01-07 Haining Xincheng Electronics Co., Ltd. LED chips on a printed circuit board
USD873783S1 (en) * 2018-10-19 2020-01-28 Haining Xincheng Electronics Co., Ltd. LED chip
USD873782S1 (en) * 2016-05-17 2020-01-28 Electro Scientific Industries, Inc Component carrier plate
USD892754S1 (en) * 2018-06-04 2020-08-11 Semikron Elektronik Gmbh & Co. Kg Power module
USD893438S1 (en) * 2017-08-21 2020-08-18 Tokyo Electron Limited Wafer boat
USD906273S1 (en) * 2018-11-07 2020-12-29 Rohm Co., Ltd. Semiconductor device
USD911298S1 (en) * 2017-02-17 2021-02-23 Stat Peel Ag Chip
USD911986S1 (en) * 2019-05-03 2021-03-02 Raytheon Company Handheld semiconductor wafer handling tool

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6536608B2 (en) 2001-07-12 2003-03-25 Saint-Gobain Ceramics & Plastics, Inc. Single cast vertical wafer boat with a Y shaped column rack
JP4506125B2 (ja) 2003-07-16 2010-07-21 信越半導体株式会社 熱処理用縦型ボート及びその製造方法
KR20150110207A (ko) 2014-03-24 2015-10-02 주식회사 테라세미콘 보트

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD865689S1 (en) * 2015-02-20 2019-11-05 Microduino Inc. Electrical module
USD866469S1 (en) * 2015-11-23 2019-11-12 Microduino Inc. Electrical module
USD873782S1 (en) * 2016-05-17 2020-01-28 Electro Scientific Industries, Inc Component carrier plate
USD857021S1 (en) * 2016-05-25 2019-08-20 Tdk Corporation Piezoelectric element
USD858467S1 (en) * 2017-01-05 2019-09-03 Rohm Co., Ltd. Power semiconductor module
USD911298S1 (en) * 2017-02-17 2021-02-23 Stat Peel Ag Chip
USD893438S1 (en) * 2017-08-21 2020-08-18 Tokyo Electron Limited Wafer boat
USD853979S1 (en) * 2017-12-27 2019-07-16 Kokusai Electric Corporation Reaction tube
USD892754S1 (en) * 2018-06-04 2020-08-11 Semikron Elektronik Gmbh & Co. Kg Power module
USD872038S1 (en) * 2018-07-18 2020-01-07 Haining Xincheng Electronics Co., Ltd. LED chips on a printed circuit board
USD873783S1 (en) * 2018-10-19 2020-01-28 Haining Xincheng Electronics Co., Ltd. LED chip
USD906273S1 (en) * 2018-11-07 2020-12-29 Rohm Co., Ltd. Semiconductor device
USD911986S1 (en) * 2019-05-03 2021-03-02 Raytheon Company Handheld semiconductor wafer handling tool

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
"Custom Quartz Wafer Carriers & Quartz Boats." May 15, 2018. MICQ. https://www.micquartz.com/quartz-glass-products/quartz-components/custom-quartz-wafer-carriers/. *
"Quartz Boat for Diffusion of Wafer Processing." Feb. 15, 2019. MTI Corporation. https://www.mtixtl.com/QuartzBoatEQ-QB-X025.aspx. *
"Substrate Processing Boat." (Design—© Questel) orbit.com. [Online PDF compilation of references] 89 pgs. Print Dates Range Nov. 28, 2019-May 31, 2013 [Retrieved Sep. 13, 2021]. *
"Wafer Boats." 10-15 Kyocera, https://global.kyocera.com/prdct/fc/product/category/sapphire/sapphire006.html. *

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD965542S1 (en) * 2020-03-19 2022-10-04 Kokusai Electric Corporation Boat of substrate processing apparatus
USD1053830S1 (en) * 2022-03-04 2024-12-10 Kokusai Electric Corporation Wafer support of semiconductor manufacturing apparatus
USD1019582S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1019583S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1019581S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1063875S1 (en) * 2022-09-14 2025-02-25 Kokusai Electric Corporation Substrate lifter for semiconductor manufacturing equipment
USD1078667S1 (en) * 2022-09-14 2025-06-10 Kokusai Electric Corporation Wafer support of semiconductor manufacturing apparatus

Also Published As

Publication number Publication date
TWD202463S (zh) 2020-02-01
JP1640260S (enrdf_load_stackoverflow) 2019-09-02

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