USD868995S1 - Gas diffusion plate for a plasma processing apparatus - Google Patents

Gas diffusion plate for a plasma processing apparatus Download PDF

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Publication number
USD868995S1
USD868995S1 US29/638,441 US201829638441F USD868995S US D868995 S1 USD868995 S1 US D868995S1 US 201829638441 F US201829638441 F US 201829638441F US D868995 S USD868995 S US D868995S
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Prior art keywords
processing apparatus
plasma processing
gas diffusion
diffusion plate
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US29/638,441
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English (en)
Inventor
Kazuumi Tanaka
Kouji Okuda
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Hitachi High Tech Corp
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Hitachi High Technologies Corp
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Assigned to HITACHI HIGH-TECHNOLOGIES CORPORATION reassignment HITACHI HIGH-TECHNOLOGIES CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: OKUDA, KOUJI, TANAKA, KAZUUMI
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Assigned to HITACHI HIGH-TECH CORPORATION reassignment HITACHI HIGH-TECH CORPORATION CHANGE OF NAME AND ADDRESS Assignors: HITACHI HIGH-TECHNOLOGIES CORPORATION
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US29/638,441 2017-11-06 2018-02-27 Gas diffusion plate for a plasma processing apparatus Active USD868995S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPD2017-24710F JP1605832S (cs) 2017-11-06 2017-11-06
JP2017-024710 2017-11-06

Publications (1)

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USD868995S1 true USD868995S1 (en) 2019-12-03

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US (1) USD868995S1 (cs)
JP (1) JP1605832S (cs)
TW (1) TWD194248S (cs)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD954986S1 (en) * 2019-10-18 2022-06-14 Hitachi High-Tech Corporation Electrode cover for a plasma processing device
USD955217S1 (en) * 2019-10-04 2022-06-21 Coart Inc. Cup lid
USD962206S1 (en) * 2020-01-09 2022-08-30 Space Exploration Technologies Corp. Antenna apparatus
USD962908S1 (en) * 2020-07-09 2022-09-06 Space Exploration Technologies Corp. Antenna apparatus
USD962906S1 (en) * 2020-01-09 2022-09-06 Space Exploration Technologies Corp. Antenna apparatus
USD963623S1 (en) * 2020-01-09 2022-09-13 Space Exploration Technologies Corp. Antenna apparatus
USD971192S1 (en) * 2019-06-03 2022-11-29 Space Exploration Technologies Corp. Antenna apparatus
USD971900S1 (en) * 2019-06-03 2022-12-06 Space Exploration Technologies Corp. Antenna apparatus
USD976242S1 (en) * 2019-06-03 2023-01-24 Space Exploration Technologies Corp. Antenna apparatus
USD986228S1 (en) * 2020-01-09 2023-05-16 Space Exploration Technologies Corp. Antenna apparatus
USD1012249S1 (en) * 2020-09-29 2024-01-23 Brent Waterman Pipe covering

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD411516S (en) * 1996-03-15 1999-06-29 Tokyo Electron Limited Gas diffusion plate for electrode of semiconductor wafer processing apparatus
USD589473S1 (en) * 2007-05-30 2009-03-31 Nitto Denko Corporation Adhesive film material for use in manufacturing semiconductors
USD638550S1 (en) * 2009-11-13 2011-05-24 3M Innovative Properties Company Sample processing disk cover
USD648289S1 (en) * 2010-10-21 2011-11-08 Novellus Systems, Inc. Electroplating flow shaping plate having offset spiral hole pattern
US20120097770A1 (en) * 2009-07-01 2012-04-26 Jang Woo Lee Water spray plate
USD667561S1 (en) * 2009-11-13 2012-09-18 3M Innovative Properties Company Sample processing disk cover
USD672050S1 (en) * 2012-01-13 2012-12-04 Samsung Electronics Co., Ltd. Disk for a medical testing machine
USD734483S1 (en) * 2013-12-31 2015-07-14 Alamak Biosciences Incorporation Company Limited Tissue cell block for cancer detection
USD789888S1 (en) * 2016-01-08 2017-06-20 Asm Ip Holding B.V. Electrode plate for semiconductor manufacturing apparatus
USD793572S1 (en) * 2015-06-10 2017-08-01 Tokyo Electron Limited Electrode plate for plasma processing apparatus
USD794210S1 (en) * 2014-04-15 2017-08-08 Q-Linea Ab Sample holding disc and master used in its manufacture
US20180247853A1 (en) * 2017-02-27 2018-08-30 Disco Corporation Electrostatic chuck table using method

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6245192B1 (en) 1999-06-30 2001-06-12 Lam Research Corporation Gas distribution apparatus for semiconductor processing
TWM557450U (zh) 2017-09-06 2018-03-21 K Max Technology Co Ltd 離子植入機之電弧室

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD411516S (en) * 1996-03-15 1999-06-29 Tokyo Electron Limited Gas diffusion plate for electrode of semiconductor wafer processing apparatus
USD589473S1 (en) * 2007-05-30 2009-03-31 Nitto Denko Corporation Adhesive film material for use in manufacturing semiconductors
US20120097770A1 (en) * 2009-07-01 2012-04-26 Jang Woo Lee Water spray plate
USD638550S1 (en) * 2009-11-13 2011-05-24 3M Innovative Properties Company Sample processing disk cover
USD667561S1 (en) * 2009-11-13 2012-09-18 3M Innovative Properties Company Sample processing disk cover
USD648289S1 (en) * 2010-10-21 2011-11-08 Novellus Systems, Inc. Electroplating flow shaping plate having offset spiral hole pattern
USD672050S1 (en) * 2012-01-13 2012-12-04 Samsung Electronics Co., Ltd. Disk for a medical testing machine
USD734483S1 (en) * 2013-12-31 2015-07-14 Alamak Biosciences Incorporation Company Limited Tissue cell block for cancer detection
USD794210S1 (en) * 2014-04-15 2017-08-08 Q-Linea Ab Sample holding disc and master used in its manufacture
USD793572S1 (en) * 2015-06-10 2017-08-01 Tokyo Electron Limited Electrode plate for plasma processing apparatus
USD789888S1 (en) * 2016-01-08 2017-06-20 Asm Ip Holding B.V. Electrode plate for semiconductor manufacturing apparatus
US20180247853A1 (en) * 2017-02-27 2018-08-30 Disco Corporation Electrostatic chuck table using method

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD971192S1 (en) * 2019-06-03 2022-11-29 Space Exploration Technologies Corp. Antenna apparatus
USD971900S1 (en) * 2019-06-03 2022-12-06 Space Exploration Technologies Corp. Antenna apparatus
USD976242S1 (en) * 2019-06-03 2023-01-24 Space Exploration Technologies Corp. Antenna apparatus
USD1012070S1 (en) 2019-06-03 2024-01-23 Space Exploration Technologies Corp. Antenna apparatus
USD955217S1 (en) * 2019-10-04 2022-06-21 Coart Inc. Cup lid
USD954986S1 (en) * 2019-10-18 2022-06-14 Hitachi High-Tech Corporation Electrode cover for a plasma processing device
USD962206S1 (en) * 2020-01-09 2022-08-30 Space Exploration Technologies Corp. Antenna apparatus
USD962906S1 (en) * 2020-01-09 2022-09-06 Space Exploration Technologies Corp. Antenna apparatus
USD963623S1 (en) * 2020-01-09 2022-09-13 Space Exploration Technologies Corp. Antenna apparatus
USD986228S1 (en) * 2020-01-09 2023-05-16 Space Exploration Technologies Corp. Antenna apparatus
USD962908S1 (en) * 2020-07-09 2022-09-06 Space Exploration Technologies Corp. Antenna apparatus
USD1012249S1 (en) * 2020-09-29 2024-01-23 Brent Waterman Pipe covering

Also Published As

Publication number Publication date
TWD194248S (zh) 2018-11-21
JP1605832S (cs) 2018-06-04

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