USD797690S1 - Heater for semiconductor manufacturing apparatus - Google Patents

Heater for semiconductor manufacturing apparatus Download PDF

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Publication number
USD797690S1
USD797690S1 US29/539,509 US201529539509F USD797690S US D797690 S1 USD797690 S1 US D797690S1 US 201529539509 F US201529539509 F US 201529539509F US D797690 S USD797690 S US D797690S
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Prior art keywords
heater
manufacturing apparatus
semiconductor manufacturing
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semiconductor
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US29/539,509
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English (en)
Inventor
Hiroshi Furutani
Yuusuke Sato
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Nuflare Technology Inc
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Nuflare Technology Inc
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Assigned to NUFLARE TECHNOLOGY, INC. reassignment NUFLARE TECHNOLOGY, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SATO, YUUSUKE, FURUTANI, HIROSHI
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US29/539,509 2015-03-16 2015-09-15 Heater for semiconductor manufacturing apparatus Active USD797690S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015-005626 2015-03-16
JPD2015-5626F JP1541874S (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 2015-03-16 2015-03-16

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USD797690S1 true USD797690S1 (en) 2017-09-19

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US (1) USD797690S1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JP1541874S (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD826185S1 (en) * 2016-10-14 2018-08-21 Hitachi Kokusai Electric Inc. Ceiling heater for substrate processing apparatus
USD839223S1 (en) * 2017-05-30 2019-01-29 TinyPCB, Inc. Modular circuit board
USD839221S1 (en) * 2017-05-30 2019-01-29 TinyPCB, Inc. Modular circuit board
USD839222S1 (en) * 2017-05-30 2019-01-29 TinyPCB, Inc. Modular circuit board
USD841605S1 (en) * 2017-05-30 2019-02-26 TinyPCB, Inc. Modular circuit board
USD841606S1 (en) * 2017-05-30 2019-02-26 TinyPCB, Inc. Modular circuit board
USD842260S1 (en) * 2017-05-30 2019-03-05 TinyPCB, Inc. Modular circuit board
USD846513S1 (en) * 2016-04-27 2019-04-23 Ngk Insulators, Ltd. Sheet heater for electrostatic chuck
USD875057S1 (en) * 2017-05-26 2020-02-11 Tiny PCB, Inc. Modular circuit board
USD887358S1 (en) * 2018-12-06 2020-06-16 Lofelt Gmbh Motor membrane
USD913229S1 (en) * 2019-04-24 2021-03-16 Tokyo Electron Limited Heater for heating semiconductor wafer
USD913230S1 (en) * 2019-04-24 2021-03-16 Tokyo Electron Limited Heater for heating semiconductor wafer
USD918848S1 (en) * 2019-07-18 2021-05-11 Kokusai Electric Corporation Retainer of ceiling heater for semiconductor fabrication apparatus
USD936187S1 (en) * 2020-02-12 2021-11-16 Applied Materials, Inc. Gas distribution assembly lid
USD959393S1 (en) * 2020-09-24 2022-08-02 Kokusai Electric Corporation Ceiling heater for substrate processing apparatus
USD962184S1 (en) * 2019-07-11 2022-08-30 Kokusai Electric Corporation Retainer plate of top heater for wafer processing furnace
USD962183S1 (en) * 2019-07-11 2022-08-30 Kokusai Electric Corporation Retainer plate of top heater for wafer processing furnace
USD1037778S1 (en) 2022-07-19 2024-08-06 Applied Materials, Inc. Gas distribution plate
USD1071103S1 (en) 2022-04-11 2025-04-15 Applied Materials, Inc. Gas distribution plate
USD1085029S1 (en) 2022-07-19 2025-07-22 Applied Materials, Inc. Gas distribution plate
USD1094324S1 (en) 2023-12-01 2025-09-23 Nuflare Technology, Inc. Semiconductor wafer heater

Citations (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1258760A (en) * 1915-07-19 1918-03-12 Thomas Bates Stove-lid.
USD313072S (en) * 1988-02-10 1990-12-18 Redring Electric Limited Electric heater element for use in a radiant heater for a glass ceramic hob
US5043559A (en) * 1989-11-04 1991-08-27 Ceramaspeed Limited Radiant electric heaters
US6037574A (en) * 1997-11-06 2000-03-14 Watlow Electric Manufacturing Quartz substrate heater
US6080970A (en) * 1997-12-26 2000-06-27 Kyocera Corporation Wafer heating apparatus
US6207935B1 (en) * 1996-09-21 2001-03-27 Diehl Ako Stiftung & Co. Kg Radiant heating element with a metal foil heat conductor
US20020088111A1 (en) * 2000-04-07 2002-07-11 Theodore Von Arx Molded assembly with heating element captured therein
US20020190051A1 (en) * 2001-06-15 2002-12-19 Applied Materials, Inc. Low profile thick film heaters in multi-slot bake chamber
US20030121898A1 (en) * 2001-11-26 2003-07-03 Tom Kane Heated vacuum support apparatus
US6753507B2 (en) * 2001-04-27 2004-06-22 Kyocera Corporation Wafer heating apparatus
US6806443B2 (en) * 2002-04-24 2004-10-19 Sumitomo Electric Industries, Ltd. Ceramic susceptor
US20060130763A1 (en) * 2004-11-15 2006-06-22 Emerson David T Restricted radiated heating assembly for high temperature processing
US20070221657A1 (en) * 2006-03-24 2007-09-27 Nuflare Technology, Inc. Semiconductor manufacturing equipment and heater
USD589471S1 (en) * 2006-09-28 2009-03-31 Tokyo Electron Limited Heater for manufacturing semiconductor
USD616389S1 (en) * 2008-10-20 2010-05-25 Ebara Corporation Vacuum contact pad
US7777160B2 (en) * 2007-12-17 2010-08-17 Momentive Performance Materials Inc. Electrode tuning method and apparatus for a layered heater structure
US20110039399A1 (en) * 2009-08-12 2011-02-17 Kunihiko Suzuki Manufacturing apparatus and method for semiconductor device
US20130068164A1 (en) * 2011-09-20 2013-03-21 Naohisa Ikeya Heating unit and film-forming apparatus
US8610034B2 (en) * 2008-08-26 2013-12-17 Nuflare Technology, Inc. Heater, manufacturing apparatus for semiconductor device, and manufacturing method for semiconductor device
USD716774S1 (en) * 2014-04-04 2014-11-04 Avery Dennison Corporation RFID inlay
US20160270150A1 (en) * 2015-03-09 2016-09-15 Nuflare Technology, Inc. Heater and apparatus for manufacturing semiconductor device using heater

Patent Citations (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1258760A (en) * 1915-07-19 1918-03-12 Thomas Bates Stove-lid.
USD313072S (en) * 1988-02-10 1990-12-18 Redring Electric Limited Electric heater element for use in a radiant heater for a glass ceramic hob
US5043559A (en) * 1989-11-04 1991-08-27 Ceramaspeed Limited Radiant electric heaters
US6207935B1 (en) * 1996-09-21 2001-03-27 Diehl Ako Stiftung & Co. Kg Radiant heating element with a metal foil heat conductor
US6037574A (en) * 1997-11-06 2000-03-14 Watlow Electric Manufacturing Quartz substrate heater
US6080970A (en) * 1997-12-26 2000-06-27 Kyocera Corporation Wafer heating apparatus
US20020088111A1 (en) * 2000-04-07 2002-07-11 Theodore Von Arx Molded assembly with heating element captured therein
US6753507B2 (en) * 2001-04-27 2004-06-22 Kyocera Corporation Wafer heating apparatus
US20020190051A1 (en) * 2001-06-15 2002-12-19 Applied Materials, Inc. Low profile thick film heaters in multi-slot bake chamber
US20030121898A1 (en) * 2001-11-26 2003-07-03 Tom Kane Heated vacuum support apparatus
US6806443B2 (en) * 2002-04-24 2004-10-19 Sumitomo Electric Industries, Ltd. Ceramic susceptor
US20060130763A1 (en) * 2004-11-15 2006-06-22 Emerson David T Restricted radiated heating assembly for high temperature processing
US20070221657A1 (en) * 2006-03-24 2007-09-27 Nuflare Technology, Inc. Semiconductor manufacturing equipment and heater
USD589471S1 (en) * 2006-09-28 2009-03-31 Tokyo Electron Limited Heater for manufacturing semiconductor
US7777160B2 (en) * 2007-12-17 2010-08-17 Momentive Performance Materials Inc. Electrode tuning method and apparatus for a layered heater structure
US8610034B2 (en) * 2008-08-26 2013-12-17 Nuflare Technology, Inc. Heater, manufacturing apparatus for semiconductor device, and manufacturing method for semiconductor device
USD616389S1 (en) * 2008-10-20 2010-05-25 Ebara Corporation Vacuum contact pad
US20110039399A1 (en) * 2009-08-12 2011-02-17 Kunihiko Suzuki Manufacturing apparatus and method for semiconductor device
US20130068164A1 (en) * 2011-09-20 2013-03-21 Naohisa Ikeya Heating unit and film-forming apparatus
USD716774S1 (en) * 2014-04-04 2014-11-04 Avery Dennison Corporation RFID inlay
US20160270150A1 (en) * 2015-03-09 2016-09-15 Nuflare Technology, Inc. Heater and apparatus for manufacturing semiconductor device using heater

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Cast Aluminum Solutions, dated Aug. 23, 2011, [online], [site visited Apr. 27, 2017]. Available from Internet, <URL: http://www.castaluminumsolutions.com/capabilities.htm>. *

Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD846513S1 (en) * 2016-04-27 2019-04-23 Ngk Insulators, Ltd. Sheet heater for electrostatic chuck
USD826185S1 (en) * 2016-10-14 2018-08-21 Hitachi Kokusai Electric Inc. Ceiling heater for substrate processing apparatus
USD875057S1 (en) * 2017-05-26 2020-02-11 Tiny PCB, Inc. Modular circuit board
USD839223S1 (en) * 2017-05-30 2019-01-29 TinyPCB, Inc. Modular circuit board
USD839221S1 (en) * 2017-05-30 2019-01-29 TinyPCB, Inc. Modular circuit board
USD839222S1 (en) * 2017-05-30 2019-01-29 TinyPCB, Inc. Modular circuit board
USD841605S1 (en) * 2017-05-30 2019-02-26 TinyPCB, Inc. Modular circuit board
USD841606S1 (en) * 2017-05-30 2019-02-26 TinyPCB, Inc. Modular circuit board
USD842260S1 (en) * 2017-05-30 2019-03-05 TinyPCB, Inc. Modular circuit board
USD887358S1 (en) * 2018-12-06 2020-06-16 Lofelt Gmbh Motor membrane
USD913229S1 (en) * 2019-04-24 2021-03-16 Tokyo Electron Limited Heater for heating semiconductor wafer
USD913230S1 (en) * 2019-04-24 2021-03-16 Tokyo Electron Limited Heater for heating semiconductor wafer
USD962184S1 (en) * 2019-07-11 2022-08-30 Kokusai Electric Corporation Retainer plate of top heater for wafer processing furnace
USD962183S1 (en) * 2019-07-11 2022-08-30 Kokusai Electric Corporation Retainer plate of top heater for wafer processing furnace
USD918848S1 (en) * 2019-07-18 2021-05-11 Kokusai Electric Corporation Retainer of ceiling heater for semiconductor fabrication apparatus
USD936187S1 (en) * 2020-02-12 2021-11-16 Applied Materials, Inc. Gas distribution assembly lid
USD959393S1 (en) * 2020-09-24 2022-08-02 Kokusai Electric Corporation Ceiling heater for substrate processing apparatus
USD1071103S1 (en) 2022-04-11 2025-04-15 Applied Materials, Inc. Gas distribution plate
USD1037778S1 (en) 2022-07-19 2024-08-06 Applied Materials, Inc. Gas distribution plate
USD1085029S1 (en) 2022-07-19 2025-07-22 Applied Materials, Inc. Gas distribution plate
USD1094324S1 (en) 2023-12-01 2025-09-23 Nuflare Technology, Inc. Semiconductor wafer heater

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