USD734730S1 - Boat of substrate processing apparatus - Google Patents
Boat of substrate processing apparatus Download PDFInfo
- Publication number
- USD734730S1 USD734730S1 US29/459,104 US201329459104F USD734730S US D734730 S1 USD734730 S1 US D734730S1 US 201329459104 F US201329459104 F US 201329459104F US D734730 S USD734730 S US D734730S
- Authority
- US
- United States
- Prior art keywords
- boat
- processing apparatus
- substrate processing
- view
- elevational view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012031874 | 2012-12-27 | ||
JP2012-031874 | 2012-12-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
USD734730S1 true USD734730S1 (en) | 2015-07-21 |
Family
ID=53540387
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/459,104 Active USD734730S1 (en) | 2012-12-27 | 2013-06-26 | Boat of substrate processing apparatus |
Country Status (2)
Country | Link |
---|---|
US (1) | USD734730S1 (zh) |
TW (1) | TWD161688S (zh) |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD748593S1 (en) * | 2014-03-05 | 2016-02-02 | Hzo, Inc. | Boat for use in a material deposition apparatus |
USD766850S1 (en) * | 2014-03-28 | 2016-09-20 | Tokyo Electron Limited | Wafer holder for manufacturing semiconductor |
USD839219S1 (en) * | 2016-02-12 | 2019-01-29 | Kokusai Electric Corporation | Boat for substrate processing apparatus |
USD846514S1 (en) * | 2018-05-03 | 2019-04-23 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
USD847105S1 (en) * | 2018-05-03 | 2019-04-30 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
USD893438S1 (en) * | 2017-08-21 | 2020-08-18 | Tokyo Electron Limited | Wafer boat |
USD908103S1 (en) * | 2019-02-20 | 2021-01-19 | Veeco Instruments Inc. | Transportable semiconductor wafer rack |
USD908102S1 (en) * | 2019-02-20 | 2021-01-19 | Veeco Instruments Inc. | Transportable semiconductor wafer rack |
US20210035835A1 (en) * | 2019-07-31 | 2021-02-04 | Kokusai Electric Corporation | Substrate processing apparatus, substrate support, and method of manufacturing semiconductor device |
USD920935S1 (en) * | 2018-09-20 | 2021-06-01 | Kokusai Electric Corporation | Boat for substrate processing apparatus |
USD939459S1 (en) * | 2019-08-07 | 2021-12-28 | Kokusai Electric Corporation | Boat for wafer processing apparatus |
USD965542S1 (en) * | 2020-03-19 | 2022-10-04 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
USD973609S1 (en) * | 2020-04-22 | 2022-12-27 | Applied Materials, Inc. | Upper shield with showerhead for a process chamber |
Citations (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD361752S (en) * | 1993-09-17 | 1995-08-29 | Tokyo Electron Kasbushiki Kaisha | Wafer boat or rack for holding semiconductor wafers |
USD366868S (en) * | 1993-09-29 | 1996-02-06 | Tokyo Electron Kabushiki Kaisha | Wafer boat or rack |
USD378675S (en) * | 1995-05-30 | 1997-04-01 | Tokyo Electron Limited | Wafer boat |
USD378823S (en) * | 1995-05-30 | 1997-04-15 | Tokyo Electron Limited | Wafer boat |
USD380454S (en) * | 1995-05-30 | 1997-07-01 | Tokyo Electron Limited | Wafer boat |
US5752609A (en) * | 1996-02-06 | 1998-05-19 | Tokyo Electron Limited | Wafer boat |
USD404015S (en) * | 1997-01-31 | 1999-01-12 | Tokyo Electron Ltd. | Wafer boat for use in a semiconductor wafer heat processing apparatus |
USD404371S (en) * | 1997-08-20 | 1999-01-19 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
US5897311A (en) * | 1995-05-31 | 1999-04-27 | Tokyo Electron Limited | Support boat for objects to be processed |
USD409158S (en) * | 1997-08-20 | 1999-05-04 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
USD411176S (en) * | 1997-08-20 | 1999-06-22 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
US6062853A (en) * | 1996-02-29 | 2000-05-16 | Tokyo Electron Limited | Heat-treating boat for semiconductor wafers |
US6065615A (en) * | 1996-02-28 | 2000-05-23 | Asahi Glass Company, Ltd. | Vertical wafer boat |
US6095806A (en) * | 1998-06-24 | 2000-08-01 | Tokyo Electron Limited | Semiconductor wafer boat and vertical heat treating system |
US6099302A (en) * | 1998-06-23 | 2000-08-08 | Samsung Electronics Co., Ltd. | Semiconductor wafer boat with reduced wafer contact area |
US6099645A (en) * | 1999-07-09 | 2000-08-08 | Union Oil Company Of California | Vertical semiconductor wafer carrier with slats |
US6287112B1 (en) * | 2000-03-30 | 2001-09-11 | Asm International, N.V. | Wafer boat |
US6341935B1 (en) * | 2000-06-14 | 2002-01-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wafer boat having improved wafer holding capability |
US20020092815A1 (en) * | 2001-01-18 | 2002-07-18 | Hong-Guen Kim | Semiconductor wafer boat having stackable independently replaceable boat parts and vertical heat-treating apparatus comprising the same |
US20020113027A1 (en) * | 2001-02-20 | 2002-08-22 | Mitsubishi Denki Kabushiki Kaisha | Retainer for use in heat treatment of substrate, substrate heat treatment equipment, and method of manufacturing the retainer |
US20020130061A1 (en) * | 2000-11-02 | 2002-09-19 | Hengst Richard R. | Apparatus and method of making a slip free wafer boat |
US20020187023A1 (en) * | 2001-05-11 | 2002-12-12 | Itsuo Araki | Vertical type wafer supporting jig |
US20030024888A1 (en) * | 2001-07-16 | 2003-02-06 | Rohm And Haas Company | Wafer holding apparatus |
US20050145584A1 (en) * | 2004-01-06 | 2005-07-07 | Buckley Richard F. | Wafer boat with interference fit wafer supports |
USD570308S1 (en) * | 2006-05-01 | 2008-06-03 | Tokyo Electron Limited | Wafer boat |
USD570309S1 (en) * | 2006-10-25 | 2008-06-03 | Tokyo Electron Limited | Wafer boat |
USD580894S1 (en) * | 2006-05-01 | 2008-11-18 | Tokyo Electron Limited | Wafer boat |
US7484958B2 (en) * | 2003-07-16 | 2009-02-03 | Shin-Etsu Handotai Co., Ltd. | Vertical boat for heat treatment and method for producing the same |
USD600221S1 (en) * | 2008-03-28 | 2009-09-15 | Tokyo Electron Limited | Wafer boat |
USD600222S1 (en) * | 2008-03-28 | 2009-09-15 | Tokyo Electron Limited | Wafer boat |
US20090250005A1 (en) * | 2008-04-03 | 2009-10-08 | Tokyo Electron Limited | Reaction tube and heat processing apparatus for a semiconductor process |
USD616395S1 (en) * | 2009-03-11 | 2010-05-25 | Tokyo Electron Limited | Support of wafer boat for manufacturing semiconductor wafers |
USD616394S1 (en) * | 2009-03-06 | 2010-05-25 | Tokyo Electron Limited | Support of wafer boat for manufacturing semiconductor wafers |
USD616396S1 (en) * | 2009-03-12 | 2010-05-25 | Tokyo Electron Limited | Pedestal of heat insulating cylinder for manufacturing semiconductor wafers |
USD655255S1 (en) * | 2010-06-18 | 2012-03-06 | Hitachi Kokusai Electric Inc. | Boat of wafer processing apparatus |
USD655682S1 (en) * | 2010-06-18 | 2012-03-13 | Hitachi Kokusai Electric Inc. | Boat of wafer processing apparatus |
-
2013
- 2013-06-26 TW TW102304386F patent/TWD161688S/zh unknown
- 2013-06-26 US US29/459,104 patent/USD734730S1/en active Active
Patent Citations (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD361752S (en) * | 1993-09-17 | 1995-08-29 | Tokyo Electron Kasbushiki Kaisha | Wafer boat or rack for holding semiconductor wafers |
USD366868S (en) * | 1993-09-29 | 1996-02-06 | Tokyo Electron Kabushiki Kaisha | Wafer boat or rack |
USD378675S (en) * | 1995-05-30 | 1997-04-01 | Tokyo Electron Limited | Wafer boat |
USD378823S (en) * | 1995-05-30 | 1997-04-15 | Tokyo Electron Limited | Wafer boat |
USD380454S (en) * | 1995-05-30 | 1997-07-01 | Tokyo Electron Limited | Wafer boat |
US5897311A (en) * | 1995-05-31 | 1999-04-27 | Tokyo Electron Limited | Support boat for objects to be processed |
US5752609A (en) * | 1996-02-06 | 1998-05-19 | Tokyo Electron Limited | Wafer boat |
US6065615A (en) * | 1996-02-28 | 2000-05-23 | Asahi Glass Company, Ltd. | Vertical wafer boat |
US6062853A (en) * | 1996-02-29 | 2000-05-16 | Tokyo Electron Limited | Heat-treating boat for semiconductor wafers |
USD404015S (en) * | 1997-01-31 | 1999-01-12 | Tokyo Electron Ltd. | Wafer boat for use in a semiconductor wafer heat processing apparatus |
USD409158S (en) * | 1997-08-20 | 1999-05-04 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
USD411176S (en) * | 1997-08-20 | 1999-06-22 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
USD404371S (en) * | 1997-08-20 | 1999-01-19 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
US6099302A (en) * | 1998-06-23 | 2000-08-08 | Samsung Electronics Co., Ltd. | Semiconductor wafer boat with reduced wafer contact area |
US6095806A (en) * | 1998-06-24 | 2000-08-01 | Tokyo Electron Limited | Semiconductor wafer boat and vertical heat treating system |
US6099645A (en) * | 1999-07-09 | 2000-08-08 | Union Oil Company Of California | Vertical semiconductor wafer carrier with slats |
US6287112B1 (en) * | 2000-03-30 | 2001-09-11 | Asm International, N.V. | Wafer boat |
US6341935B1 (en) * | 2000-06-14 | 2002-01-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wafer boat having improved wafer holding capability |
US20020130061A1 (en) * | 2000-11-02 | 2002-09-19 | Hengst Richard R. | Apparatus and method of making a slip free wafer boat |
US20020092815A1 (en) * | 2001-01-18 | 2002-07-18 | Hong-Guen Kim | Semiconductor wafer boat having stackable independently replaceable boat parts and vertical heat-treating apparatus comprising the same |
US20020113027A1 (en) * | 2001-02-20 | 2002-08-22 | Mitsubishi Denki Kabushiki Kaisha | Retainer for use in heat treatment of substrate, substrate heat treatment equipment, and method of manufacturing the retainer |
US20020187023A1 (en) * | 2001-05-11 | 2002-12-12 | Itsuo Araki | Vertical type wafer supporting jig |
US20030024888A1 (en) * | 2001-07-16 | 2003-02-06 | Rohm And Haas Company | Wafer holding apparatus |
US7484958B2 (en) * | 2003-07-16 | 2009-02-03 | Shin-Etsu Handotai Co., Ltd. | Vertical boat for heat treatment and method for producing the same |
US20050145584A1 (en) * | 2004-01-06 | 2005-07-07 | Buckley Richard F. | Wafer boat with interference fit wafer supports |
USD570308S1 (en) * | 2006-05-01 | 2008-06-03 | Tokyo Electron Limited | Wafer boat |
USD580894S1 (en) * | 2006-05-01 | 2008-11-18 | Tokyo Electron Limited | Wafer boat |
USD570309S1 (en) * | 2006-10-25 | 2008-06-03 | Tokyo Electron Limited | Wafer boat |
USD600221S1 (en) * | 2008-03-28 | 2009-09-15 | Tokyo Electron Limited | Wafer boat |
USD600222S1 (en) * | 2008-03-28 | 2009-09-15 | Tokyo Electron Limited | Wafer boat |
US20090250005A1 (en) * | 2008-04-03 | 2009-10-08 | Tokyo Electron Limited | Reaction tube and heat processing apparatus for a semiconductor process |
USD616394S1 (en) * | 2009-03-06 | 2010-05-25 | Tokyo Electron Limited | Support of wafer boat for manufacturing semiconductor wafers |
USD616395S1 (en) * | 2009-03-11 | 2010-05-25 | Tokyo Electron Limited | Support of wafer boat for manufacturing semiconductor wafers |
USD616396S1 (en) * | 2009-03-12 | 2010-05-25 | Tokyo Electron Limited | Pedestal of heat insulating cylinder for manufacturing semiconductor wafers |
USD655255S1 (en) * | 2010-06-18 | 2012-03-06 | Hitachi Kokusai Electric Inc. | Boat of wafer processing apparatus |
USD655682S1 (en) * | 2010-06-18 | 2012-03-13 | Hitachi Kokusai Electric Inc. | Boat of wafer processing apparatus |
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD748593S1 (en) * | 2014-03-05 | 2016-02-02 | Hzo, Inc. | Boat for use in a material deposition apparatus |
USD766850S1 (en) * | 2014-03-28 | 2016-09-20 | Tokyo Electron Limited | Wafer holder for manufacturing semiconductor |
USD839219S1 (en) * | 2016-02-12 | 2019-01-29 | Kokusai Electric Corporation | Boat for substrate processing apparatus |
USD893438S1 (en) * | 2017-08-21 | 2020-08-18 | Tokyo Electron Limited | Wafer boat |
USD846514S1 (en) * | 2018-05-03 | 2019-04-23 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
USD847105S1 (en) * | 2018-05-03 | 2019-04-30 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
USD920935S1 (en) * | 2018-09-20 | 2021-06-01 | Kokusai Electric Corporation | Boat for substrate processing apparatus |
USD908102S1 (en) * | 2019-02-20 | 2021-01-19 | Veeco Instruments Inc. | Transportable semiconductor wafer rack |
USD908103S1 (en) * | 2019-02-20 | 2021-01-19 | Veeco Instruments Inc. | Transportable semiconductor wafer rack |
US20210035835A1 (en) * | 2019-07-31 | 2021-02-04 | Kokusai Electric Corporation | Substrate processing apparatus, substrate support, and method of manufacturing semiconductor device |
US11929272B2 (en) * | 2019-07-31 | 2024-03-12 | Kokusai Electric Corporation | Substrate processing apparatus, substrate support, and method of manufacturing semiconductor device |
USD939459S1 (en) * | 2019-08-07 | 2021-12-28 | Kokusai Electric Corporation | Boat for wafer processing apparatus |
USD965542S1 (en) * | 2020-03-19 | 2022-10-04 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
USD973609S1 (en) * | 2020-04-22 | 2022-12-27 | Applied Materials, Inc. | Upper shield with showerhead for a process chamber |
Also Published As
Publication number | Publication date |
---|---|
TWD161688S (zh) | 2014-07-11 |
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