USD405428S - Heat retaining tube for use in a semiconductor wafer heat processing apparatus - Google Patents
Heat retaining tube for use in a semiconductor wafer heat processing apparatus Download PDFInfo
- Publication number
- USD405428S USD405428S US29/074,285 US7428597F USD405428S US D405428 S USD405428 S US D405428S US 7428597 F US7428597 F US 7428597F US D405428 S USD405428 S US D405428S
- Authority
- US
- United States
- Prior art keywords
- processing apparatus
- semiconductor wafer
- retaining tube
- heat
- heat processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Description
FIG. 1: a perspective view of a heat retaining tube for use in a semiconductor wafer heat processing apparatus;
FIG. 2: a top plan view thereof;
FIG. 3: a front elevational view thereof;
FIG. 4: a cross sectional view thereof taken along line IV--IV in FIG. 3;
FIG. 5: a cross sectional view thereof taken along line V--V in FIG. 3;
FIG. 6: a left side view thereof;
FIG. 7: a right side view thereof;
FIG. 8: a bottom plan view thereof; and,
FIG. 9: a rear elevational view thereof.
Claims (1)
- I claim the ornamental design for a heat retaining tube for use in a semiconductor wafer heat processing apparatus, as shown and described.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP265697 | 1997-01-31 | ||
JP9-2656 | 1997-01-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
USD405428S true USD405428S (en) | 1999-02-09 |
Family
ID=71726460
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/074,285 Expired - Lifetime USD405428S (en) | 1997-01-31 | 1997-07-24 | Heat retaining tube for use in a semiconductor wafer heat processing apparatus |
Country Status (1)
Country | Link |
---|---|
US (1) | USD405428S (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD793974S1 (en) * | 2015-09-29 | 2017-08-08 | Hitachi Kokusai Electric Inc. | Heater for semiconductor thermal process |
USD793975S1 (en) * | 2015-09-29 | 2017-08-08 | Hitachi Kokusai Electric Inc. | Heater for semiconductor thermal process |
USD795209S1 (en) * | 2015-09-29 | 2017-08-22 | Hitachi Kokusai Electric Inc. | Heater for semiconductor thermal process |
USD798250S1 (en) * | 2015-12-01 | 2017-09-26 | Nuflare Technology, Inc. | Heater |
-
1997
- 1997-07-24 US US29/074,285 patent/USD405428S/en not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD793974S1 (en) * | 2015-09-29 | 2017-08-08 | Hitachi Kokusai Electric Inc. | Heater for semiconductor thermal process |
USD793975S1 (en) * | 2015-09-29 | 2017-08-08 | Hitachi Kokusai Electric Inc. | Heater for semiconductor thermal process |
USD795209S1 (en) * | 2015-09-29 | 2017-08-22 | Hitachi Kokusai Electric Inc. | Heater for semiconductor thermal process |
USD798250S1 (en) * | 2015-12-01 | 2017-09-26 | Nuflare Technology, Inc. | Heater |
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