USD404375S - Heat retaining tube base for use in a semiconductor wafer head processing apparatus - Google Patents

Heat retaining tube base for use in a semiconductor wafer head processing apparatus Download PDF

Info

Publication number
USD404375S
USD404375S US29/083,718 US8371898F USD404375S US D404375 S USD404375 S US D404375S US 8371898 F US8371898 F US 8371898F US D404375 S USD404375 S US D404375S
Authority
US
United States
Prior art keywords
processing apparatus
semiconductor wafer
heat retaining
tube base
retaining tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/083,718
Inventor
Tomohisa Shimazu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SHIMAZU, TOMOHISA
Application granted granted Critical
Publication of USD404375S publication Critical patent/USD404375S/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Description

FIG. 1 a perspective view of a heat retaining tube base for use in a semiconductor wafer heat processing apparatus;
FIG. 2 a front elevational view thereof;
FIG. 3 a top plan view thereof;
FIG. 4 a right side view thereof;
FIG. 5 a bottom plan view thereof; and,
FIG. 6 a cross-sectional view taken along line VI--VI in Fig. 3.

Claims (1)

  1. I claim the ornamental design for a heat retaining tube base for use in a semiconductor wafer heat processing apparatus, as shown and described.
US29/083,718 1997-08-20 1998-02-12 Heat retaining tube base for use in a semiconductor wafer head processing apparatus Expired - Lifetime USD404375S (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP9-65105 1997-08-20
JP6510597 1997-08-20

Publications (1)

Publication Number Publication Date
USD404375S true USD404375S (en) 1999-01-19

Family

ID=71729425

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/083,718 Expired - Lifetime USD404375S (en) 1997-08-20 1998-02-12 Heat retaining tube base for use in a semiconductor wafer head processing apparatus

Country Status (1)

Country Link
US (1) USD404375S (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD798250S1 (en) * 2015-12-01 2017-09-26 Nuflare Technology, Inc. Heater
USD1032549S1 (en) * 2020-11-06 2024-06-25 Hitachi Energy Ltd Reinforced straight turret for electrical equipment
USD1036400S1 (en) * 2020-11-06 2024-07-23 Hitachi Energy Ltd Reinforced external turret for electrical equipment

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD798250S1 (en) * 2015-12-01 2017-09-26 Nuflare Technology, Inc. Heater
USD1032549S1 (en) * 2020-11-06 2024-06-25 Hitachi Energy Ltd Reinforced straight turret for electrical equipment
USD1036400S1 (en) * 2020-11-06 2024-07-23 Hitachi Energy Ltd Reinforced external turret for electrical equipment

Similar Documents

Publication Publication Date Title
USD404370S (en) Cap for use in a semiconductor wafer heat processing apparatus
USD404372S (en) Ring for use in a semiconductor wafer heat processing apparatus
USD409158S (en) Wafer boat for use in a semiconductor wafer heat processing apparatus
USD411176S (en) Wafer boat for use in a semiconductor wafer heat processing apparatus
USD404371S (en) Wafer boat for use in a semiconductor wafer heat processing apparatus
USD396847S (en) Semiconductor device
USD459967S1 (en) Tool handle with holder
USD407696S (en) Inner tube for use in a semiconductor wafer heat processing apparatus
USD405431S (en) Tube for use in a semiconductor wafer heat processing apparatus
USD405429S (en) Processing tube for use in a semiconductor wafer heat processing apparatus
USD405430S (en) Inner tube for use in a semiconductor wafer heat processing apparatus
USD463641S1 (en) Steam station base
USD404369S (en) Manifold cover for use in a semiconductor wafer heat processing apparatus
USD404015S (en) Wafer boat for use in a semiconductor wafer heat processing apparatus
USD405062S (en) Processing tube for use in a semiconductor wafer heat processing apparatus
USD418485S (en) Semiconductor device
USD404368S (en) Outer tube for use in a semiconductor wafer heat processing apparatus
USD406113S (en) Processing tube for use in a semiconductor wafer heat processing apparatus
USD410052S (en) Support base for a baseball batting practice tee
USD421969S (en) Semiconductor device
USD428859S (en) Semiconductor device
USD452955S1 (en) Bottle in a bottle holder
USD404375S (en) Heat retaining tube base for use in a semiconductor wafer head processing apparatus
USD385758S (en) Cup holding device
USD432018S (en) Bottle