USD404375S - Heat retaining tube base for use in a semiconductor wafer head processing apparatus - Google Patents
Heat retaining tube base for use in a semiconductor wafer head processing apparatus Download PDFInfo
- Publication number
- USD404375S USD404375S US29/083,718 US8371898F USD404375S US D404375 S USD404375 S US D404375S US 8371898 F US8371898 F US 8371898F US D404375 S USD404375 S US D404375S
- Authority
- US
- United States
- Prior art keywords
- processing apparatus
- semiconductor wafer
- heat retaining
- tube base
- retaining tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Description
FIG. 1 a perspective view of a heat retaining tube base for use in a semiconductor wafer heat processing apparatus;
FIG. 2 a front elevational view thereof;
FIG. 3 a top plan view thereof;
FIG. 4 a right side view thereof;
FIG. 5 a bottom plan view thereof; and,
FIG. 6 a cross-sectional view taken along line VI--VI in Fig. 3.
Claims (1)
- I claim the ornamental design for a heat retaining tube base for use in a semiconductor wafer heat processing apparatus, as shown and described.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9-65105 | 1997-08-20 | ||
| JP6510597 | 1997-08-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| USD404375S true USD404375S (en) | 1999-01-19 |
Family
ID=71729425
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US29/083,718 Expired - Lifetime USD404375S (en) | 1997-08-20 | 1998-02-12 | Heat retaining tube base for use in a semiconductor wafer head processing apparatus |
Country Status (1)
| Country | Link |
|---|---|
| US (1) | USD404375S (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD574792S1 (en) * | 2006-08-23 | 2008-08-12 | Tokyo Electron Limited | Lower heat insulating cylinder for manufacturing semiconductor wafers |
| USD579885S1 (en) * | 2007-02-20 | 2008-11-04 | Tokyo Electron Limited | Upper heat insulating cylinder for manufacturing semiconductor wafers |
| USD601979S1 (en) * | 2008-03-28 | 2009-10-13 | Tokyo Electron Limited | Pedestal base of a heat insulating cylinder for manufacturing semiconductor wafers |
| USD616395S1 (en) * | 2009-03-11 | 2010-05-25 | Tokyo Electron Limited | Support of wafer boat for manufacturing semiconductor wafers |
| USD616394S1 (en) * | 2009-03-06 | 2010-05-25 | Tokyo Electron Limited | Support of wafer boat for manufacturing semiconductor wafers |
| USD798250S1 (en) * | 2015-12-01 | 2017-09-26 | Nuflare Technology, Inc. | Heater |
| USD1032549S1 (en) * | 2020-11-06 | 2024-06-25 | Hitachi Energy Ltd | Reinforced straight turret for electrical equipment |
| USD1036400S1 (en) * | 2020-11-06 | 2024-07-23 | Hitachi Energy Ltd | Reinforced external turret for electrical equipment |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4857689A (en) | 1988-03-23 | 1989-08-15 | High Temperature Engineering Corporation | Rapid thermal furnace for semiconductor processing |
| US5314574A (en) | 1992-06-26 | 1994-05-24 | Tokyo Electron Kabushiki Kaisha | Surface treatment method and apparatus |
| US5320218A (en) | 1992-04-07 | 1994-06-14 | Shinko Electric Co., Ltd. | Closed container to be used in a clean room |
| US5752796A (en) | 1996-01-24 | 1998-05-19 | Muka; Richard S. | Vacuum integrated SMIF system |
-
1998
- 1998-02-12 US US29/083,718 patent/USD404375S/en not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4857689A (en) | 1988-03-23 | 1989-08-15 | High Temperature Engineering Corporation | Rapid thermal furnace for semiconductor processing |
| US5320218A (en) | 1992-04-07 | 1994-06-14 | Shinko Electric Co., Ltd. | Closed container to be used in a clean room |
| US5314574A (en) | 1992-06-26 | 1994-05-24 | Tokyo Electron Kabushiki Kaisha | Surface treatment method and apparatus |
| US5752796A (en) | 1996-01-24 | 1998-05-19 | Muka; Richard S. | Vacuum integrated SMIF system |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD574792S1 (en) * | 2006-08-23 | 2008-08-12 | Tokyo Electron Limited | Lower heat insulating cylinder for manufacturing semiconductor wafers |
| USD579885S1 (en) * | 2007-02-20 | 2008-11-04 | Tokyo Electron Limited | Upper heat insulating cylinder for manufacturing semiconductor wafers |
| USD601979S1 (en) * | 2008-03-28 | 2009-10-13 | Tokyo Electron Limited | Pedestal base of a heat insulating cylinder for manufacturing semiconductor wafers |
| USD616394S1 (en) * | 2009-03-06 | 2010-05-25 | Tokyo Electron Limited | Support of wafer boat for manufacturing semiconductor wafers |
| USD616395S1 (en) * | 2009-03-11 | 2010-05-25 | Tokyo Electron Limited | Support of wafer boat for manufacturing semiconductor wafers |
| USD798250S1 (en) * | 2015-12-01 | 2017-09-26 | Nuflare Technology, Inc. | Heater |
| USD1032549S1 (en) * | 2020-11-06 | 2024-06-25 | Hitachi Energy Ltd | Reinforced straight turret for electrical equipment |
| USD1036400S1 (en) * | 2020-11-06 | 2024-07-23 | Hitachi Energy Ltd | Reinforced external turret for electrical equipment |
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