USD404373S - Fin for use in a semiconductor wafer heat processing apparatus - Google Patents

Fin for use in a semiconductor wafer heat processing apparatus Download PDF

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Publication number
USD404373S
USD404373S US29/083,716 US8371698F USD404373S US D404373 S USD404373 S US D404373S US 8371698 F US8371698 F US 8371698F US D404373 S USD404373 S US D404373S
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US
United States
Prior art keywords
fin
processing apparatus
semiconductor wafer
heat processing
wafer heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/083,716
Inventor
Norifumi Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
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Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KIMURA, NORIFUMI
Application granted granted Critical
Publication of USD404373S publication Critical patent/USD404373S/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

FIG. 1 a perspective view of a fin for use in a semiconductor wafer heat processing apparatus;
FIG. 2 a front elevational view thereof;
FIG. 3 a right side view thereof;
FIG. 4 a top plan view thereof;
FIG. 5 a bottom plan view therof;
FIG. 6 a cross-sectional view taken along line VI-VI in FIG. 2; and,
FIG. 7 a cross-sectional view taken alone line VII-VII in FIG. 4.

Claims (1)

  1. I claim the ornamental design for a fin for use in a semiconductor wafer heat processing apparatus, as shown and described.
US29/083,716 1997-08-20 1998-02-12 Fin for use in a semiconductor wafer heat processing apparatus Expired - Lifetime USD404373S (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP9-65103 1997-08-20
JP6510397 1997-08-20

Publications (1)

Publication Number Publication Date
USD404373S true USD404373S (en) 1999-01-19

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ID=71729333

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/083,716 Expired - Lifetime USD404373S (en) 1997-08-20 1998-02-12 Fin for use in a semiconductor wafer heat processing apparatus

Country Status (1)

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US (1) USD404373S (en)

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