US9001966B2 - Transmission X-ray analyzer - Google Patents

Transmission X-ray analyzer Download PDF

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Publication number
US9001966B2
US9001966B2 US13/769,704 US201313769704A US9001966B2 US 9001966 B2 US9001966 B2 US 9001966B2 US 201313769704 A US201313769704 A US 201313769704A US 9001966 B2 US9001966 B2 US 9001966B2
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sample
pair
tdi sensor
sensor
rollers
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US20130216024A1 (en
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Yoshiki Matoba
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Hitachi High Tech Analysis Corp
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Hitachi High Tech Science Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/10—Different kinds of radiation or particles
    • G01N2223/101—Different kinds of radiation or particles electromagnetic radiation
    • G01N2223/1016—X-ray

Definitions

  • the present invention relates to a transmission X-ray analyzer, which is capable of measuring a transmission X-ray output from a sample through use of a time delay and integration (TDI) sensor.
  • TDI time delay and integration
  • a foreign matter in a sample and density unevenness of elements have been detected by X-ray transmission imaging.
  • a method of the X-ray transmission imaging there is known a method of converting a transmission X-ray output from a sample into fluorescent light through a fluorescent screen or the like, and detecting the fluorescent light through use of image pickup devices (charge coupled devices (CCDs)).
  • image pickup devices charge coupled devices (CCDs)
  • CCDs charge coupled devices
  • a detection method using CCDs there is a method of scanning a sample to obtain linear images successively through use of a line sensor having a plurality of image pickup devices arranged in one direction, thereby obtaining a two-dimensional image of the sample.
  • TDI time delay and integration
  • a line sensor of the second stage In a line sensor of the second stage, the charge transferred from the line sensor of the first stage is added to the charge accumulated when the line sensor of the second stage receives light, and the resultant charge is transferred to a line sensor of the third stage.
  • charge transferred from a line sensor of the previous stage is added sequentially to each line sensor, and accumulated charge transferred to a line sensor of the last stage is output.
  • the TDI sensor in the case where the number of stages is T, charge which is T times as large as that of a single line sensor is accumulated, and a contrast becomes T times as high as that of a single line sensor. Further, noise is reduced, measurement can be performed at high speed, and an S/N ratio increases.
  • an electrode of a lithium ion battery is produced continuously by unrolling a roll-shaped collector metal foil and applying an electrode material to the foil. Therefore, when a foreign matter in the strip-shaped electrode is detected by X-ray transmission imaging, the electrode is transported continuously to a position between an X-ray source and a sensor by transportation rollers, to thereby detect the foreign matter (Japanese Patent Application Laid-open No. 2004-614793 ( FIG. 4 )).
  • the TDI sensor has sensitivity higher than that of the line sensor.
  • a feed speed of the sample differs significantly from a feed speed of a transmission image on the TDI sensor to cause displacement of a detection position, with the result that points to be detected are scattered.
  • charge is not accumulated conveniently, and an accumulated image is blurred to increase a minimum detectable size, resulting in remarkable degradation in detection accuracy.
  • the sample may be transported to the TDI sensor in a fluttered state.
  • the above-mentioned problem becomes remarkable.
  • the present invention has been made so as to solve the above-mentioned problem, and therefore provides a transmission X-ray analyzer in which a distance between a TDI sensor and a sample transported continuously in a band shape by transportation rollers is kept constant to enhance detection accuracy.
  • a transmission X-ray analyzer for detecting a transmission X-ray image of a sample that is continuous in a band shape and moves in a predetermined transportation direction
  • the transmission X-ray analyzer including: a time delay and integration (TDI) sensor including a plurality of two-dimensionally arranged image pickup devices for reading charge generated when an image derived from the transmission X-ray image is subjected to photoelectric conversion, the TDI sensor including a plurality of stages of line sensors including the plurality of two-dimensionally arranged image pickup devices arranged in a direction perpendicular to the predetermined transportation direction, the plurality of stages of line sensors being arranged in the predetermined transportation direction, the TDI sensor being configured to transfer charge accumulated in one line sensor to an adjacent subsequent line sensor; an X-ray source arranged so as to be opposed to the TDI sensor; a pair of support rollers arranged away from the TDI sensor in
  • the sample passes along the TDI sensor while being subjected to a tension by the support rollers. Therefore, the sample is not transported to the TDI sensor in a fluttered state, and the distance in the detection direction between the sample and the TDI sensor is kept constant, with the result that detection accuracy can be enhanced while keeping a minute detectable minimum size.
  • the pair of support rollers may be fixed to the TDI sensor.
  • the distance in the detection direction between the support rollers and the TDI sensor can be kept with high accuracy.
  • the sample is not transported to the TDI sensor in a fluttered state, and the distance in the detection direction between the sample and the TDI sensor can be kept constant, with the result that the detection accuracy of a transmission X-ray can be enhanced while keeping a minute detectable minimum size.
  • FIG. 1 is a block diagram illustrating a configuration of a transmission X-ray analyzer according to an embodiment of the present invention
  • FIGS. 2A and 2B are diagrams illustrating an example of a method of time delay and integration processing through use of a TDI sensor
  • FIG. 3 is a diagram illustrating a modified example in which the position of a sample passing along each roller is changed
  • FIG. 4 is a diagram illustrating a modified example in which the arrangement state of each roller and the position of a sample passing along each roller are changed.
  • FIG. 5 is a diagram illustrating another modified example in which the arrangement state of each roller and the position of a sample passing along each roller are changed.
  • FIG. 1 is a block diagram illustrating a configuration of a transmission X-ray analyzer 1 according to the embodiment of the present invention.
  • the transmission X-ray analyzer 1 includes an X-ray source 12 , a time delay and integration (TDI) sensor 14 , a fluorescent screen 16 arranged between the TDI sensor 14 and a sample 100 , for converting a transmission X-ray 12 x from the sample 100 into fluorescent light (visible light image), a housing 18 for accommodating the TDI sensor 14 and the fluorescent screen 16 , a pair of support portions 18 s respectively extending downward from both side ends of the housing 18 toward the X-ray source 12 , a pair of support rollers 31 , 32 pivotally supported by the respective support portions 18 s , a pair of outside rollers 51 , 52 for transporting the sample 100 , and control means 60 .
  • TDI time delay and integration
  • the sample 100 has a sheet shape or a strip shape continuous in the form of a band and is designed to move in a transportation direction L (from left to right in FIG. 1 ) by the support rollers 31 , 32 and the outside rollers 51 , 52 .
  • the sample 100 is, for example, a lithium cobaltate electrode plate to be used for a positive electrode of a lithium ion battery.
  • the X-ray source 12 is arranged below the sample 100 .
  • An X-ray is emitted upward from the X-ray source 12 to pass through the sample 100 and is then converted into a visible light image through the fluorescent screen 16 . Then, the visible light image is received by the TDI sensor 14 arranged above the sample 100 .
  • An X-ray is constantly emitted from the X-ray source 12 so as to continuously analyze the moving sample 100 using the X-ray.
  • the control means 60 is implemented by a computer, which includes a CPU, a ROM, a RAM, and the like.
  • the control means 60 is capable of executing predetermined computer programs, and performs the overall processing such as the irradiation of X-rays from the X-ray source 12 , reception of light of a visible light image by the TDI sensor 14 , and output processing.
  • the transmission X-ray analyzer 1 is configured to detect a foreign matter 101 (e.g., Fe) in the sample 100 .
  • a foreign matter 101 e.g., Fe
  • the X-ray source 12 includes a predetermined X-ray tubular bulb.
  • the X-ray tubular bulb for example, emits as a primary X-ray an X-ray, which is generated by the fact that thermoelectrons generated from a filament (positive electrode) of the tubular bulb are accelerated by a voltage applied between the filament (positive electrode) and a target (negative electrode) to thereby smash against the target (tungsten (W), molybdenum (Mo), chromium (Cr), or the like), from a window of a beryllium foil or the like.
  • W tungsten
  • Mo molybdenum
  • Cr chromium
  • the TDI sensor 14 has a configuration in which a plurality of image pickup devices (charge coupled devices (CCDs)) are arranged in a two-dimensional array. As illustrated in FIGS. 2A and 2B , the TDI sensor 14 has a configuration in which a plurality of stages (eight stages in the example of FIGS. 2A and 2B ; however, actually, several hundred to several thousand stages) of line sensors 14 a to 14 h having image pickup devices arranged in a direction perpendicular to the transportation direction L are arranged in the transportation direction L.
  • image pickup devices charge coupled devices (CCDs)
  • FIGS. 2A and 2B the TDI sensor 14 has a configuration in which a plurality of stages (eight stages in the example of FIGS. 2A and 2B ; however, actually, several hundred to several thousand stages) of line sensors 14 a to 14 h having image pickup devices arranged in a direction perpendicular to the transportation direction L are arranged in the transportation direction L.
  • the respective rollers 31 , 32 , 51 , and 52 which are features of the present invention, are hereinafter described.
  • the support rollers 31 , 32 pivotally supported by the respective support portions 18 s can respectively rotate about an axis in a direction perpendicular to the drawing sheet.
  • the support rollers 31 , 32 are arranged away from the TDI sensor 14 in a detection direction S (vertical direction in FIG. 1 ) connecting the TDI sensor 14 to the X-ray source 12 , and the sample 100 is transported to a detection position of the TDI sensor 14 while coming into contact with the lower surfaces of the support rollers 31 , 32 .
  • the TDI sensor 14 and the lower surfaces of the support rollers 31 , 32 are away from each other by a distance h 1 in the detection direction S, and hence, an interval between the TDI sensor 14 and the sample 100 is also kept at the predetermined distance h 1 .
  • the outside rollers 51 , 52 are arranged respectively on an outer side of the support rollers 31 , 32 in the transportation direction L. Further, in the detection direction S, the support roller 31 and the outside roller 51 adjacent to each other (and the support roller 32 and the outside roller 52 adjacent to each other) are arranged at different positions. For example, in the example of FIG. 1 , the outside roller 51 is positioned higher than the support roller 31 , and the outside roller 52 is also positioned higher than the support roller 32 . Then, the sample 100 is transported while coming into contact with the upper surfaces of the respective outside rollers 51 , 52 . Thus, the pair of support rollers 31 , 32 holds the sample 100 passing along the respective outside rollers 51 , 52 so as to push down the sample 100 , and thereby, can apply a tension to the sample 100 between the pair of support rollers 31 , 32 .
  • the sample 100 passes along the multi-stage TDI sensor 14 while being subjected to a tension by the support rollers 31 , 32 . Therefore, the sample 100 is not transported to the TDI sensor 14 in a fluttered state, and a distance in the detection direction S between the sample 100 and the TDI sensor 14 is kept constant, with the result that detection accuracy can be enhanced while keeping a minute detectable minimum size.
  • the support rollers 31 , 32 are fixed to the TDI sensor 14 (to the housing 18 of the TDI sensor 14 ). Therefore, a distance in the detection direction S between the support rollers 31 , 32 and the TDI sensor 14 can be kept with high accuracy.
  • examples of the sample 100 include, but are not limited to, a graphite-coated electrode plate to be used as a negative electrode of a lithium ion battery, a separator of a battery, an ion-exchange membrane for a fuel cell, and an insulating film for a multi-layer circuit board.
  • a length of the sample 100 can be set to about 500 to 1,000 m and a transportation speed thereof can be set to about 10 to 100 m/min, although not limited thereto.
  • the support rollers 31 , 32 for example, support rollers which have a width of about 60 to 1,000 mm can be used, although not limited thereto.
  • a tension applied to the sample 100 between the support rollers 31 , 32 can be set to about 5 to 10 N/cm in the case of an electrode plate for a lithium ion battery.
  • the TDI sensor 14 includes the plurality of stages (eight stages) of line sensors 14 a to 14 h.
  • the charge transferred from the line sensor 14 a of the first stage is added to the charge accumulated when the line sensor 14 b of the second stage receives light, and the resultant accumulated charge is transferred to the line sensor 14 c of the third stage.
  • charge transferred from a line sensor of the previous stage is added sequentially to each of the line sensors 14 a to 14 h , and accumulated charge transferred to the line sensor 14 h of the last stage is output.
  • the sample 100 moving in the transportation direction L is subjected to a line analysis continuously, with the result that two-dimensional image data of the sample 100 is obtained continuously.
  • the TDI sensor 14 in the case where the number of stages is T, charge which is T times as large as that of a single line sensor is accumulated, and a contrast becomes T times as high as that of a single line sensor. Further, noise is reduced, measurement can be performed at high speed, and an S/N ratio increases.
  • FIG. 3 illustrates a modified example in which the position of the sample 100 passing along the respective rollers 31 , 32 , 51 , and 52 is changed.
  • the outside roller 51 is positioned higher than the support roller 31
  • the outside roller 52 is also positioned higher than the support roller 32 in the same way as in FIG. 1 .
  • the sample 100 is transported while coming into contact with the lower surfaces of the respective outside rollers 51 , 52 and support rollers 31 , 32 .
  • the sample 100 is placed at a lowest point at the positions of the pair of support rollers 31 , 32 , and can be subjected to a tension between the pair of support rollers 31 , 32 .
  • FIG. 4 illustrates a modified example in which the arrangement state of the respective rollers 31 , 32 , 51 , and 52 and the position of the sample 100 passing along the respective rollers 31 , 32 , 51 , and 52 are changed.
  • a length of a support portion 18 s 2 on the right side is set to be larger than that of the support portion 18 s on the left side, and a distance between the TDI sensor 14 and the lower surface of the support roller 31 is set to be equal (distance h 1 ) to that between the TDI sensor 14 and the upper surface of the support roller 32 in the detection direction S.
  • the sample 100 is transported to the TDI sensor 14 while coming into contact with the lower surface of the support roller 31 and is output from the TDI sensor 14 while coming into contact with the upper surface of the support roller 32 . Accordingly, an interval between the TDI sensor 14 and the sample 100 can also be kept at the predetermined distance h 1 .
  • the outside roller 51 is positioned higher than the support roller 31
  • the outside roller 52 is positioned lower than the support roller 32 . Then, the sample 100 is transported while coming into contact with the lower surface of the outside roller 51 and the upper surface of the outside roller 52 . Even in the example of FIG. 4 , the sample 100 can be subjected to a tension between the pair of support rollers 31 , 32 .
  • FIG. 5 illustrates another modified example in which the arrangement state of the respective rollers 31 , 32 , 51 , and 52 and the position of the sample 100 passing along the respective rollers 31 , 32 , 51 , and 52 are changed.
  • lengths of both the support portions 18 s 2 are set to be larger than those of the support portions 18 s of FIG. 1 , and a distance between the TDI sensor 14 and the lower surface of the support roller 31 is set to be equal (distance h 1 ) to that between the TDI sensor 14 and the lower surface of the support roller 32 in the detection direction S.
  • the sample 100 is transported to the TDI sensor 14 while coming into contact with the upper surfaces of the support rollers 31 , 32 . Accordingly, an interval between the TDI sensor 14 and the sample 100 can also be kept at the predetermined distance h 1 .
  • the outside roller 51 is positioned lower than the support roller 31
  • the outside roller 52 is positioned lower than the support roller 32 . Then, the sample 100 is transported while coming into contact with the upper surfaces of the outside rollers 51 , 52 . Even in the example of FIG. 5 , the sample 100 can be subjected to a tension between the pair of support rollers 31 , 32 .
  • the arrangement state of the support rollers and the outside rollers, and the position of the sample passing along the respective rollers are not limited to the examples of FIGS. 1 and 3 to 5 described above.
  • the adjacent support roller and outside roller only need to be arranged at different positions in the detection direction so that a tension can be applied to the sample between the pair of support rollers.
  • the support roller and the outside roller may be driving rollers or rollers that merely spin.
  • the support roller is not required to be fixed to the TDI sensor (to the housing of the TDI sensor), and may be pivotally supported by a support portion separate from the TDI sensor.

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JP2012034792A JP5875403B2 (ja) 2012-02-21 2012-02-21 透過ｘ線分析装置
JP2012-034792 2012-02-21

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160041110A1 (en) * 2014-08-11 2016-02-11 Hitachi High-Technologies Corporation X-ray transmission inspection apparatus and extraneous substance detecting method
US20180284037A1 (en) * 2017-03-30 2018-10-04 Sumitomo Chemical Company, Limited Inspection device, inspection method, and method of producing film roll
US20220013326A1 (en) * 2018-12-06 2022-01-13 Hitachi High-Tech Corporation Charged particle beam device

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JP6512980B2 (ja) * 2015-07-29 2019-05-15 株式会社日立ハイテクサイエンス Ｘ線透過検査装置及びｘ線透過検査方法
JP7201481B2 (ja) * 2019-03-04 2023-01-10 株式会社日立ハイテクサイエンス Ｘ線検査装置及びｘ線検査方法
CN110231345B (zh) * 2019-07-17 2023-11-14 佛山市清极能源科技有限公司 一种膜电极缺陷在线检测方法及设备
US20220276185A1 (en) * 2021-02-26 2022-09-01 Honeywell Limited BOEHMITE DETECTION AND WARNING SYSTEM, AND CONCENTRATION INDICATOR FOR LiB SEPARATOR SHEET MANUFACTURING
CN114088742B (zh) * 2021-11-18 2022-09-06 吉林大学 一种变矩器的铸造叶片塌陷位置检测装置
JP2023113027A (ja) * 2022-02-02 2023-08-15 株式会社イシダ Ｘ線検査装置
WO2024044968A1 (zh) * 2022-08-30 2024-03-07 宁德时代新能源科技股份有限公司 极片检测的方法和装置
JP2025072964A (ja) 2023-10-25 2025-05-12 株式会社日立ハイテクサイエンス Ｘ線分析装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2570288A (en) * 1949-05-03 1951-10-09 Howard Paper Mills Inc Photoelectric inspection of sheet materials
US3317736A (en) * 1963-11-12 1967-05-02 Gen Electric Apparatus for measuring the probability of the presence of optical blemishes
US6324249B1 (en) * 2001-03-21 2001-11-27 Agilent Technologies, Inc. Electronic planar laminography system and method

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60154181A (ja) * 1984-01-25 1985-08-13 Nippon Steel Corp 帯状金属板の介在物検出装置
JP2000298102A (ja) * 1999-02-08 2000-10-24 Nkk Corp 表面検査装置
JP3908048B2 (ja) * 2002-02-05 2007-04-25 株式会社イシダ Ｘ線検査装置
JP3971238B2 (ja) * 2002-05-16 2007-09-05 住友ゴム工業株式会社 Ｘ線検査装置
JP2004061479A (ja) 2002-07-27 2004-02-26 Elco:Kk Ｘ線異物検出装置
JP3678730B2 (ja) * 2003-02-26 2005-08-03 株式会社日鉄エレックス Ｘ線異物検査方法及び装置
JP2006267067A (ja) * 2005-03-25 2006-10-05 Nippon Petroleum Refining Co Ltd 異物検出装置及び検出方法、並びに異物除去装置及び除去方法
JP5126645B2 (ja) * 2006-08-23 2013-01-23 国際技術開発株式会社 検査装置
JP2009128090A (ja) * 2007-11-21 2009-06-11 Core Staff Inc テーピングｉｃ対応自動ｘ線検査装置
JP5443033B2 (ja) * 2009-03-27 2014-03-19 トヨタ自動車株式会社 欠陥検査装置および方法
JP4919115B2 (ja) 2009-09-24 2012-04-18 横河電機株式会社 放射線検査装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2570288A (en) * 1949-05-03 1951-10-09 Howard Paper Mills Inc Photoelectric inspection of sheet materials
US3317736A (en) * 1963-11-12 1967-05-02 Gen Electric Apparatus for measuring the probability of the presence of optical blemishes
US6324249B1 (en) * 2001-03-21 2001-11-27 Agilent Technologies, Inc. Electronic planar laminography system and method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160041110A1 (en) * 2014-08-11 2016-02-11 Hitachi High-Technologies Corporation X-ray transmission inspection apparatus and extraneous substance detecting method
US20180284037A1 (en) * 2017-03-30 2018-10-04 Sumitomo Chemical Company, Limited Inspection device, inspection method, and method of producing film roll
US20220013326A1 (en) * 2018-12-06 2022-01-13 Hitachi High-Tech Corporation Charged particle beam device
US11610754B2 (en) * 2018-12-06 2023-03-21 Hitachi High-Tech Corporation Charged particle beam device

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JP2013170924A (ja) 2013-09-02
JP5875403B2 (ja) 2016-03-02
KR101874133B1 (ko) 2018-07-03
CN103499592A (zh) 2014-01-08
CN103499592B (zh) 2017-04-12
US20130216024A1 (en) 2013-08-22
KR20130096180A (ko) 2013-08-29

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