US8844671B2 - Apparatus for damping sound in the optical beam path of a microscope, and microscope having a corresponding apparatus - Google Patents

Apparatus for damping sound in the optical beam path of a microscope, and microscope having a corresponding apparatus Download PDF

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Publication number
US8844671B2
US8844671B2 US13/894,726 US201313894726A US8844671B2 US 8844671 B2 US8844671 B2 US 8844671B2 US 201313894726 A US201313894726 A US 201313894726A US 8844671 B2 US8844671 B2 US 8844671B2
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Prior art keywords
tube
sound
housing
microscope
branch
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US13/894,726
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US20130306398A1 (en
Inventor
Holger Birk
Volker Seyfried
Dirk-Oliver Fehrer
Vishnu Varden Krishnamachari
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Leica Microsystems CMS GmbH
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Leica Microsystems CMS GmbH
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Assigned to LECIA MICROSYSTEMS CMS GMBH reassignment LECIA MICROSYSTEMS CMS GMBH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: FEHRER, DIRK-OLIVER, BIRK, HOLGER, Krishnamachari, Vishnu Vardan, SEYFRIED, VOLKER
Publication of US20130306398A1 publication Critical patent/US20130306398A1/en
Assigned to LEICA MICROSYSTEMS CMS GMBH reassignment LEICA MICROSYSTEMS CMS GMBH CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEE PREVIOUSLY RECORDED ON REEL 030557 FRAME 0522. ASSIGNOR(S) HEREBY CONFIRMS THE LEICA MICROSYSTEMS CMS GMBH IS THE CORRECT SPELLING OF THE RECEIVING PARTY. Assignors: FEHRER, DIRK-OLIVER, BIRK, HOLGER, Krishnamachari, Vishnu Vardan, SEYFRIED, VOLKER
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    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/002—Devices for damping, suppressing, obstructing or conducting sound in acoustic devices
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/16—Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/175—Methods or devices for protecting against, or for damping, noise or other acoustic waves in general using interference effects; Masking sound
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/16—Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/172—Methods or devices for protecting against, or for damping, noise or other acoustic waves in general using resonance effects

Definitions

  • the invention relates to an apparatus for damping sound in the optical beam path of a microscope, having an acoustic insulation housing (housing) for encapsulating a sound-emitting component, preferably a rapidly moving or oscillating beam deflection means, in particular a resonantly oscillating mirror, the housing comprising at least one optical entrance/exit opening (opening).
  • a microscope preferably a scanning microscope, having a corresponding apparatus.
  • a beam deflection device serves for beam control, in particular for incoupling the illumination light, the sample being scanned, for example, line by line in meander fashion by the deflected illumination beam. Detected light returning from the sample passes through the beam deflection device and is guided to the detectors.
  • the sound source is ultimately encapsulated, and the entrance window and/or exit window are to be understood as optical elements that influence the beam path (illumination beam path and/or detected beam path).
  • An acoustic emission is perceived to be particularly objectionable when it is caused by a component that is excited to oscillate, resonantly or nonresonantly, in the range of several kHz, as is routinely the case in the context of scanning microscopy when the mirror serves as a deflection means.
  • the underlying object of the invention is to configure and refine an apparatus of the species in such a way that acoustic emissions of objectionable sound sources in the optical beam path of a microscope can be efficiently damped without thereby influencing the optical beam path. Also to be described is a corresponding microscope having a suitable apparatus.
  • the aforesaid object is achieved, with reference to the apparatus, by the features of claim 1 .
  • the coordinated claim 17 achieves the object with reference to a microscope, utilizing the apparatus according to the present invention.
  • the apparatus according to the present invention is characterized in that the housing, preferably the opening of the housing, is embodied and/or configured in such a way that the sound emerging, without soundproof windows, from the housing is largely extinguished by destructive interference without thereby influencing the optical beam.
  • the action relating to acoustic insulation has no effect on the optical beam.
  • the latter can pass unimpeded through the opening or openings of the housing even though the sound is eliminated, but at least very considerably reduced, as a result of interference conditions.
  • the sound source is an acoustically monochromatic sound source (such that the sound generated has a single frequency, possibly with overtones), as is the case in a scanning microscope having a resonantly oscillating mirror.
  • the resulting sound has substantially the frequency component of the resonant oscillating frequency.
  • an acoustic insulation housing hereinafter called a “housing,” is provided, the housing comprising at least one opening for beam entrance and/or beam exit.
  • An optical entrance opening and an optical exit opening is provided in ordinary fashion in the housing, and both openings can be damped with reference to acoustic emission in accordance with the same (inventive) principle, namely utilizing destructive interference.
  • the opening is constituted by a tube extending away from the housing, such that sound damping takes place along the length of the tube.
  • the tube is equipped with at least one tube branch protruding laterally from the tube, such that the tube branch can be embodied in the manner of a blind hole.
  • the length of the tube branch is advantageously selected so that sound waves that run into the tube branch and are reflected therein at the end experience a phase change of 180° with respect to the wave running straight ahead, and thus together with the wave running straight ahead in the tube result in destructive interference.
  • the effective length of the tube branch can thus be a quarter, or an odd multiple of a quarter, of the acoustic wavelength.
  • the intensity of the two waves i.e. the intensity of the wave running straight ahead in the tube and the intensity of the wave coming back out of the tube branch, should be identical if possible, but at least similar. It is of further advantage if the tube is equipped with two or more tube branches protruding laterally from the tube, on the one hand in order to magnify the sound-eliminating effect and on the other hand to eliminate sound of different wavelengths, caused for example by different movable components or overtones.
  • the tube branch is closed at the end, a sound reflection wall preferably being embodied there.
  • the absorption behavior or reflection behavior can be influenced, for example, by tuning the respective tube branch, specifically by adapting the width/diameter and/or length of the tube branch.
  • tuning the respective tube branch specifically by adapting the width/diameter and/or length of the tube branch.
  • a sound reflection wall that modifies the depth of the tube branch; said wall can be carried or constituted by an adjusting screw threadable into the end of the tube, or by an adjustable/insertable adjusting pin, adjusting rod, or adjusting piston.
  • the tube branch be adjustable in terms of length or depth, thereby making possible tuning of the tube branch to the particular sound frequency.
  • Adjustment and thus tuning of the interference conditions in the tube branch can be accomplished manually, but also in motorized fashion or hydraulically or pneumatically. What is essential here is that even in a context of a change in sound frequency, an optimum adaptation or adjustment is possible in order to implement destructive interference. It is thus conceivable, for example, to perform an automatic readjustment, specifically if the frequency is constantly changing due to differing operation and constant adaptation is necessary. Automated operation is possible in any event with corresponding detection of the parameters.
  • tuning of the tube branch in order to generate the necessary destructive interference can be accomplished by selection of a suitable material for the tube/tube branch, the suitable material having a defined sound absorption behavior. Both the geometry of the tube branch and the material can be employed and thus utilized for tuning of the tube branch.
  • the tube can encompass one or more tube branch(es).
  • the tube branch can be embodied as a bypass, proceeding from the tube and opening back into the tube, having an adapted acoustic wavelength.
  • the bypass has an acoustic path length that is longer than the tube by an amount equal to half the sound wavelength. This, too, ensures that destructive interference occurs.
  • the sound can also be “picked off” in the same fashion from a different location in the interior of the housing and combined, with a corresponding phase delay, with the sound in the opening used by the light path, so that destructive interference occurs.
  • Such a lining also has aspects according to the present invention with regard to destructive interference: because the sound propagates at the edge of the tube more slowly, or at least at a different speed, than in the center as a result of the properties of the absorber material, the phase delay of the sound components proceeding at the edge as compared with the sound components proceeding in the center allows the formation, in particular after mixing of the two components over a longer travel distance, of a destructive interference that ultimately once again results in noise suppression toward the outside, namely analogously to the teaching of the present invention.
  • FIG. 1 is a schematic view of an exemplifying embodiment of an apparatus according to the present invention, the optical beam being guided therein through a window to an oscillating mirror (sound source) and being guided from there out of the housing through a tube having a tube branch.
  • an oscillating mirror sound source
  • FIG. 2 is a schematic view of the subject matter of FIG. 1 , a variable tuning of the tube branch being provided therein, by means of a slider, for adaptation to the respective frequency of the sound,
  • FIG. 3 is a schematic view of the subject matter of FIG. 1 where a screw is provided at the tube branch for adaptation to the respective frequency of the sound.
  • FIG. 4 is a schematic view of a further exemplifying embodiment of an apparatus according to the present invention, the tube therein being equipped with a bypass having an adapted acoustic path length,
  • FIG. 5 is a schematic view of a further exemplifying embodiment of an apparatus according to the present invention, a bypass having an acoustic path length extending therein between the housing and tube,
  • FIG. 6 is a schematic view of a further exemplifying embodiment of an apparatus according to the present invention, the housing therein comprising an entrance opening and an exit opening having tubes that are both equipped with tube branches in order to bring about destructive interference on both sides,
  • FIG. 7 is a schematic view of a further exemplifying embodiment of an apparatus according to the present invention, one of the tubes therein being equipped with two tube branches in order to intensify the sound damping by means of the sequence of two filters,
  • FIG. 8 is a schematic view of a further exemplifying embodiment of an apparatus according to the present invention, two tube branches of different lengths being provided therein in one tube for simultaneous damping of two discrete sound frequencies,
  • FIG. 9 is a schematic view of a further exemplifying embodiment of an apparatus according to the present invention, the housing therein comprising an entrance opening and an exit opening having tubes that are both equipped with a tube branch in order to bring about destructive interference on both sides, additional acoustic absorbers being provided on the inner wall of the housing, and
  • FIG. 10 is a schematic view of a further exemplifying embodiment of an apparatus according to the present invention, acoustic absorbers being embodied therein both on the inner wall of the housing and on the inner wall of a very long tube.
  • the apparatus for damping sound in optical beam path 1 of a microscope encompasses an acoustic insulation housing 2 (hereinafter referred to as a “housing”) that serves to encapsulate a sound-emitting component.
  • a housing acoustic insulation housing 2
  • An oscillating mirror 3 constituting an oscillating beam deflection means is shown by way of example as a sound source.
  • Light beam 4 travels through a window 5 into the interior of housing 2 , strikes mirror 3 therein, and in accordance with the angular position of mirror 3 is directed into and through a tube 6 , tube 6 defining an entrance opening and exit opening of housing 2 .
  • tube 6 comprises a tube branch 7 that is embodied in the manner of a blind hole, i.e. comprises a sound reflection wall 8 at the end.
  • Tube branch 7 protrudes laterally, for example orthogonally, from tube 6 and is equipped and dimensioned in such a way that it brings about a 180° phase change with respect to the sound wave running straight ahead in tube 6 , so that the sound wave reflected out of tube branch 7 results, together with the sound wave running straight ahead, in destructive interference.
  • the length of tube branch 7 can correspondingly be one-quarter of the acoustic wavelength.
  • variable tuning of the length of tube branch 7 is possible, sound reflection wall 8 being carried therein, merely symbolically, by an insertable rod 9 .
  • Sound reflection wall 8 and rod 9 can be embodied in the manner of a piston having a piston rod. Motorized or hydraulic/pneumatic operation is conceivable, in particular, for automatic adaptation or tuning of tube branch 7 .
  • sound reflection wall 8 is actuated via a screw 10 that in turn can be actuated or driven manually or also via an electric motor, for example utilizing a spindle.
  • the exemplifying embodiment shown in FIG. 3 otherwise corresponds to the exemplifying embodiments of FIGS. 1 and 2 .
  • FIG. 4 shows a further exemplifying embodiment of an apparatus according to the present invention, tube 6 therein being equipped with a bypass 11 in such a way that bypass 11 is longer than the parallel travel path through tube 6 by an amount equal to half the sound wavelength, so that sound waves that run along both possible sound pathways exhibit a relative phase difference of 180°.
  • the result is that no acoustic pressure is produced at the end of tube 6 , specifically because of the destructive interference thereby generated.
  • FIG. 5 shows a variant with respect to the exemplifying embodiment of FIG. 4 , the sound there being “picked off” directly out of housing 2 .
  • Bypass 11 thus extends from housing 2 through a lateral opening into tube 6 , so that sound running through bypass 11 is combined, with a corresponding phase delay, with the sound in the opening used by the light path. Destructive interference can be implemented in this fashion as well.
  • the exemplifying embodiment shown in FIG. 6 defines, by the provision of two tubes 6 , actions causing destructive interference in the region of both an optical entrance opening and an optical exit opening.
  • the provision of a window in accordance with the exemplifying embodiments of FIGS. 1 to 5 is not necessary here.
  • Both tubes 6 are equipped with a respective tube branch 7 , the two tube branches 7 operating in accordance with the statements above regarding FIGS. 1 to 5 .
  • the exemplifying embodiment of FIG. 7 adds to the one tube 6 a further, second tube branch, specifically in order to intensify the sound damping, ultimately as a result of the sequence of two “filters.”
  • the two tube branches 7 are embodied identically.
  • the exemplifying embodiment of FIG. 8 differs from the exemplifying embodiment of FIG. 7 , in terms of the tubes comprising the two tube branches 7 , in that tube branches 7 are of different lengths. This allows two or more discrete sound frequencies to be damped simultaneously, specifically in accordance with the number and configuration of tube branches 7 .
  • the exemplifying embodiment in FIG. 9 corresponds substantially to the exemplifying embodiment of FIG. 6 , the inner wall of housing 2 being equipped therein with acoustic absorbers 12 .
  • This is advantageous in that as a result of the destructive interference at the optical openings or in tubes 6 , the acoustic energy is substantially reflected back into housing 2 .
  • the additional provision of acoustic absorbers 12 brings about a synergistic effect with the destructive interference actions, specifically in such a way that a reduction in the noise level inside housing 2 takes place as a result of absorbers 12 that are additionally used.
  • the exemplifying embodiment shown in FIG. 10 is relevant in the context of sound sources of variable frequency, acoustic absorbers being arranged or embodied therein both in the interior of housing 2 and in the interior of an elongated tube 6 , in each case on the inner wall.
  • a tube 6 of this kind can be used as an optical opening in housing 2 without thereby negatively affecting the optical beam path.
  • a kind of broad-band absorber is implemented here.
  • the lining of the tube system with the absorber material has an effect according to the present invention in terms of destructive interference. Because the sound at the edge of the tube propagates more slowly, or at least at a different speed, than in the center as a result of the properties of the absorber material, the phase delay of the sound components proceeding at the edge as compared with the sound components proceeding in the center allows the formation, in particular after mixing of the two components over a longer travel distance, of a destructive interference that ultimately once again results in noise suppression toward the outside.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Soundproofing, Sound Blocking, And Sound Damping (AREA)
  • Microscoopes, Condenser (AREA)
US13/894,726 2012-05-16 2013-05-15 Apparatus for damping sound in the optical beam path of a microscope, and microscope having a corresponding apparatus Active US8844671B2 (en)

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DE102012208250.6 2012-05-16
DE102012208250 2012-05-16
DE102012208250A DE102012208250A1 (de) 2012-05-16 2012-05-16 Vorrichtung zur Dämmung von Schall im optischen Strahlengang eines Mikroskops und Mikroskop mit einer entsprechenden Vorrichtung

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EP (1) EP2665058B1 (de)
JP (1) JP6220550B2 (de)
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DE102016201439A1 (de) 2016-02-01 2017-08-03 Carl Zeiss Microscopy Gmbh Gehäuse zur Aufnahme einer schwingenden Vorrichtung, Scanvorrichtung, Mikroskop und Verfahren
JP2018169546A (ja) * 2017-03-30 2018-11-01 日本電産株式会社 ハウジング、ハウジングユニット、およびケーシングユニット
DE102017006173A1 (de) * 2017-06-29 2019-01-03 Diehl Metering Gmbh Messeinrichtung und Verfahren zur Ermittlung einer Fluidgröße
EP3421945B1 (de) * 2017-06-29 2020-10-07 Diehl Metering GmbH Verfahren und messeinrichtung zur ermittlung einer fluidgrösse

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CN103426426A (zh) 2013-12-04
DE102012208250A1 (de) 2013-11-21
CN103426426B (zh) 2017-06-09
EP2665058A1 (de) 2013-11-20
EP2665058B1 (de) 2016-02-03
JP2013238856A (ja) 2013-11-28
JP6220550B2 (ja) 2017-10-25
US20130306398A1 (en) 2013-11-21

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