US8649009B2 - Optical spectrometer element having non-spherical mirrors - Google Patents

Optical spectrometer element having non-spherical mirrors Download PDF

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Publication number
US8649009B2
US8649009B2 US12/663,619 US66361908A US8649009B2 US 8649009 B2 US8649009 B2 US 8649009B2 US 66361908 A US66361908 A US 66361908A US 8649009 B2 US8649009 B2 US 8649009B2
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plane
sensors
mirrors
spectrometer
spectrometer according
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US12/663,619
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US20100141941A1 (en
Inventor
Wolfram Bohle
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Spectro Analytical Instruments GmbH and Co KG
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Spectro Analytical Instruments GmbH and Co KG
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Assigned to SPECTRO ANALYTICAL INSTRUMENTS GMBH reassignment SPECTRO ANALYTICAL INSTRUMENTS GMBH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: BOHLE, WOLFRAM
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/443—Emission spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/66—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors

Definitions

  • the present invention relates to a spectrometer for analysing the optical emission of excited samples in the range of visible wavelengths and adjacent wavelength ranges having the features of the preamble of claim 1 .
  • part of a sample is evaporated by sparks, arcs or ICP and changed into plasma.
  • the emissions of the plasma contain spectral lines of the elements occurring therein which can be analysed with optical spectrometers.
  • the light to be analysed enters via an entrance gap into a spectrometer housing, is diffracted there on a dispersive element and spectrally fanned out.
  • the spectral lines develop as imaging of the entrance gap on a so-called focal curve.
  • Detectors with which the light of the interesting wavelength range is collected and evaluated, are arranged on this focal curve.
  • spatially resolving semiconductor detectors which consist of a line of detector elements of the CCD or CMOS design, are used.
  • the light yield i.e. the amount of light present in the beam path of a certain wavelength, which actually reaches the detector, is not optimum for weak emission lines.
  • the object of the present invention is, therefore, to create a spectrometer of the design mentioned at the beginning, in which the light yield is improved.
  • the focusing tilted mirrors have an aspheric surface, their imaging characteristics are better adapted to the geometrical conditions in such a spectrometer.
  • a surface which perpendicular to the plane of the beam path corresponds to the mathematical shape of a parabola is selected in this case. Provision may also be made for the surface to be formed from a section of an ellipse.
  • FIG. 1 shows a schematic layout of a spectrometer having line sensors in a top view onto the plane of the beam path;
  • FIG. 2 shows a sectional view through the schematically represented spectrometer along the line II-II.
  • FIG. 1 schematically shows the beam path of a spectrometer with spark excitation.
  • An electrical spark 1 is generated between an electrode 2 and a sample 3 .
  • the spark causes an emission in the UV range and in the visible light range with the characteristic spectral lines of the chemical elements contained in the sample 3 .
  • the light is guided through an entrance gap 6 into the interior of the spectrometer and there strikes a diffraction grating 7 , which spectrally fans out the light in one plane and images the entrance gap 6 onto lines of solid body sensors 8 .
  • a spectrometer in the case of mass-produced devices for laboratory and industrial purposes, is constructed in a Paschen-Runge arrangement.
  • the beam path between the diffraction grating 7 and the sensors 8 is illustrated in more detail in FIG. 2 .
  • the concave diffraction grating 7 is illustrated as a cross section from which a number of beams 10 run parallel to one another onto an imaging mirror 11 .
  • the imaging mirror 11 has a surface 12 turned towards the beams 10 , which has a highly-reflective surface and whose curvature runs aspherically, i.e. in this exemplary embodiment corresponds to a parabola section.
  • the reflecting surface 12 focuses the light beams 10 onto a light-sensitive element 13 of the CCD sensor line 8 .
  • the light yield is substantially improved in the case of this geometric arrangement in contrast to known spectrometers, in which the light beams 10 are to be focused via cylindrical mirrors onto the CCD line 8 .
  • the curvature of the aspherical surface 12 of the mirror 11 perpendicular to the spectral plane, can also assume the shape of an elliptic section.
  • the mirror 11 is linear in the direction perpendicular to the plane of projection in FIG. 2 , which enables the mirror 11 to be manufactured relatively simply.
  • the manufacture of the mirror 11 and in particular the moulding of the surface shape in the region of the highly-reflective surface 12 , is preferably carried out using glass in a moulding process, in which the mould is removed from a matrix.
  • the resulting glass moulding can be finished to form a mirror by cutting to size, carrying out vapour deposition for example with aluminum and mounting in a frame, as is required for the present invention.

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
US12/663,619 2007-06-08 2008-06-04 Optical spectrometer element having non-spherical mirrors Active 2030-06-15 US8649009B2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE102007027010.2A DE102007027010B4 (de) 2007-06-08 2007-06-08 Spektrometeroptik mit nicht-sphärischen Spiegeln
DE102007027010.2 2007-06-08
DE102007027010 2007-06-08
PCT/EP2008/004489 WO2008148551A1 (de) 2007-06-08 2008-06-05 Spektrometeroptik mit asphärischen spiegeln

Publications (2)

Publication Number Publication Date
US20100141941A1 US20100141941A1 (en) 2010-06-10
US8649009B2 true US8649009B2 (en) 2014-02-11

Family

ID=39789887

Family Applications (1)

Application Number Title Priority Date Filing Date
US12/663,619 Active 2030-06-15 US8649009B2 (en) 2007-06-08 2008-06-04 Optical spectrometer element having non-spherical mirrors

Country Status (4)

Country Link
US (1) US8649009B2 (de)
EP (1) EP2156153A1 (de)
DE (1) DE102007027010B4 (de)
WO (1) WO2008148551A1 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9638669B2 (en) 2014-08-13 2017-05-02 Spectro Scientific, Inc. Portable fuel dilution meter and method
EP3819613A1 (de) 2019-11-07 2021-05-12 Hitachi High-Tech Analytical Science GmbH Optisches system für spektrometer

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019239489A1 (ja) * 2018-06-12 2019-12-19 株式会社クボタ 測定装置及び基板搭載装置
DE102018129010B4 (de) 2018-11-19 2023-09-28 Spectro Analytical Instruments Gmbh Anordnung zur optischen Emissionsspektrometrie mit verbesserter Lichtausbeute

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US4575241A (en) * 1981-04-16 1986-03-11 Baird Corporation Spectrometer
US5018856A (en) * 1989-10-30 1991-05-28 The United States Of America As Represented By The Secretary Of Agriculture Continuum source atomic absorption spectrometry
JPH10111176A (ja) 1996-10-04 1998-04-28 Nec Corp 回折格子分光計
US5963320A (en) * 1998-06-08 1999-10-05 General Atomics Active spectrometer
DE19853754A1 (de) 1998-11-21 2000-05-25 Spectro Analytical Instr Gmbh Simultanes Doppelgitter-Spektrometer mit Halbleiterzeilensensoren oder Photoelektronenvervielfachern
US6392748B1 (en) * 1999-04-09 2002-05-21 Plain Sight Systems, Inc. Radiation filter, spectrometer and imager using a micro-mirror array
US6862092B1 (en) * 1999-01-08 2005-03-01 Ibsen Photonics A/S Spectrometer
US20060092414A1 (en) 1999-04-09 2006-05-04 Frank Geshwind Devices and method for spectral measurements
DE102005057919A1 (de) 2005-12-02 2007-06-06 Spectro Analytical Instruments Gmbh & Co. Kg Vorrichtung zur Analyse einer Festkörperprobe und Betriebsverfahren

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DE19620541A1 (de) * 1996-05-22 1997-11-27 Zeiss Carl Jena Gmbh Dispergierendes optisches System für ein Simultanspektrometer
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US4049353A (en) * 1976-08-11 1977-09-20 Spectrametrics, Incorporated Spectrometric system and cassette
US4575241A (en) * 1981-04-16 1986-03-11 Baird Corporation Spectrometer
US5018856A (en) * 1989-10-30 1991-05-28 The United States Of America As Represented By The Secretary Of Agriculture Continuum source atomic absorption spectrometry
JPH10111176A (ja) 1996-10-04 1998-04-28 Nec Corp 回折格子分光計
US5963320A (en) * 1998-06-08 1999-10-05 General Atomics Active spectrometer
DE19853754A1 (de) 1998-11-21 2000-05-25 Spectro Analytical Instr Gmbh Simultanes Doppelgitter-Spektrometer mit Halbleiterzeilensensoren oder Photoelektronenvervielfachern
US6862092B1 (en) * 1999-01-08 2005-03-01 Ibsen Photonics A/S Spectrometer
US6392748B1 (en) * 1999-04-09 2002-05-21 Plain Sight Systems, Inc. Radiation filter, spectrometer and imager using a micro-mirror array
US20060092414A1 (en) 1999-04-09 2006-05-04 Frank Geshwind Devices and method for spectral measurements
DE102005057919A1 (de) 2005-12-02 2007-06-06 Spectro Analytical Instruments Gmbh & Co. Kg Vorrichtung zur Analyse einer Festkörperprobe und Betriebsverfahren

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9638669B2 (en) 2014-08-13 2017-05-02 Spectro Scientific, Inc. Portable fuel dilution meter and method
EP3819613A1 (de) 2019-11-07 2021-05-12 Hitachi High-Tech Analytical Science GmbH Optisches system für spektrometer
WO2021089817A1 (en) 2019-11-07 2021-05-14 Hitachi High-Tech Analytical Science GmbH Optical system for spectrometers

Also Published As

Publication number Publication date
DE102007027010A1 (de) 2008-12-11
WO2008148551A1 (de) 2008-12-11
EP2156153A1 (de) 2010-02-24
US20100141941A1 (en) 2010-06-10
DE102007027010B4 (de) 2023-02-16

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