US7942165B2 - Connection structure between integrated panel and fluid device - Google Patents

Connection structure between integrated panel and fluid device Download PDF

Info

Publication number
US7942165B2
US7942165B2 US11/988,555 US98855506A US7942165B2 US 7942165 B2 US7942165 B2 US 7942165B2 US 98855506 A US98855506 A US 98855506A US 7942165 B2 US7942165 B2 US 7942165B2
Authority
US
United States
Prior art keywords
annular
fluid
discharge port
portions
fluid supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active, expires
Application number
US11/988,555
Other languages
English (en)
Other versions
US20090126808A1 (en
Inventor
Masayoshi Katsura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Pillar Packing Co Ltd
Original Assignee
Nippon Pillar Packing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2005202934A external-priority patent/JP4512526B2/ja
Priority claimed from JP2005203940A external-priority patent/JP4512528B2/ja
Application filed by Nippon Pillar Packing Co Ltd filed Critical Nippon Pillar Packing Co Ltd
Assigned to NIPPON PILLAR PACKING CO., LTD. reassignment NIPPON PILLAR PACKING CO., LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KATSURA, MASAYOSHI
Publication of US20090126808A1 publication Critical patent/US20090126808A1/en
Application granted granted Critical
Publication of US7942165B2 publication Critical patent/US7942165B2/en
Active legal-status Critical Current
Adjusted expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L19/00—Joints in which sealing surfaces are pressed together by means of a member, e.g. a swivel nut, screwed on or into one of the joint parts
    • F16L19/02—Pipe ends provided with collars or flanges, integral with the pipe or not, pressed together by a screwed member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L39/00—Joints or fittings for double-walled or multi-channel pipes or pipe assemblies
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L19/00—Joints in which sealing surfaces are pressed together by means of a member, e.g. a swivel nut, screwed on or into one of the joint parts
    • F16L19/02—Pipe ends provided with collars or flanges, integral with the pipe or not, pressed together by a screwed member
    • F16L19/0212—Pipe ends provided with collars or flanges, integral with the pipe or not, pressed together by a screwed member using specially adapted sealing means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L23/00—Flanged joints
    • F16L23/16—Flanged joints characterised by the sealing means
    • F16L23/18—Flanged joints characterised by the sealing means the sealing means being rings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L41/00—Branching pipes; Joining pipes to walls
    • F16L41/08—Joining pipes to walls or pipes, the joined pipe axis being perpendicular to the plane of the wall or to the axis of another pipe
    • F16L41/086—Joining pipes to walls or pipes, the joined pipe axis being perpendicular to the plane of the wall or to the axis of another pipe fixed with screws
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L41/00—Branching pipes; Joining pipes to walls
    • F16L41/08—Joining pipes to walls or pipes, the joined pipe axis being perpendicular to the plane of the wall or to the axis of another pipe
    • F16L41/12—Joining pipes to walls or pipes, the joined pipe axis being perpendicular to the plane of the wall or to the axis of another pipe using attaching means embracing the pipe
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87153—Plural noncommunicating flow paths
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure

Definitions

  • the present invention relates a connecting structure for an integration panel and a fluid device, and more particularly to a connecting structure for communicatingly connecting an integration panel for a fluid which is expected to be largely used, with a fluid device such as a pump, a valve, or an accumulator via a gasket in a sealed state in a piping system or the like for high-purity liquid, ultrapure water, cleaning liquid, or the like that is handled in a production process in various technical fields such as semiconductor production, medical and pharmaceutical production, food processing, and chemical industry.
  • FIG. 1 An example of such a connecting structure is a structure where a valve which is an example of a fluid device is connected and coupled to an integration panel in which a fluid passage is internally formed, by causing a pair of supply/discharge flow paths to communicate with each other.
  • Connecting structures are disclosed in Patent Reference 1 and Patent Reference 2.
  • the connecting structure disclosed in Patent Reference 1 is a structure where a pair of supply and discharge flow paths are juxtaposed each other, and liquid-tightly connected and coupled to each other by plural bolts via annular gaskets which are independent of each other.
  • the connecting structure disclosed in Patent Reference 2 is a structure where a pair of supply and discharge flow paths are juxtaposed each other, and a single gasket having a pair of flow path holes corresponding to the pair of supply and discharge flow paths is connected and coupled by using a single external screw nut.
  • Both of the connecting structures disclosed in Patent References 1 and 2 employ a structure in which many fluid apparatuses are integrately attached to a fluid block, or a so-called integrated piping structure. This is useful for compactifying or modularizing the whole of a piping system.
  • the invention has been conducted in view of the circumstances. It is an object of the invention to improve a connecting structure for an integration panel and a fluid device in a fluid piping system, thereby providing a connecting structure for an integration panel and a fluid device in which an excellent sealing property can be held even when substantially no further fastening is performed, and the assembling workability is improved.
  • the invention of claim 1 is a connecting structure for an integration panel and a fluid device, wherein, when a first fluid supply/discharge port portion 1 A of an integration panel 1 having the first fluid supply/discharge port portion 1 A where pipe-like fluid passages 3 , 4 are opened, and a second fluid supply/discharge port portion 2 A of a fluid device 2 having the second fluid supply/discharge port portion 2 A where pipe-like fluid passages 7 , 8 are opened are to be communicatingly connected to each other in a state where the fluid passages 3 , 4 , 7 , 8 are sealed by a ring-like gasket G interposed between the first fluid supply/discharge port portion 1 A and the second fluid supply/discharge port portion 2 A,
  • annular projections 11 , 21 are formed on outer-diameter portions of the fluid passages 3 , 4 , 7 , 8 which are opened in end faces,
  • the gasket G is configured by a flexible material having: a fluid path W which is formed to allow the corresponding fluid passages 3 , 4 , 7 , 8 of the first and second fluid supply/discharge port portions 1 A, 2 A to communicate with each other; a pair of annular grooves 51 , 51 which are formed on an outer-diameter portion of the fluid path W to be fitted respectively to the annular projections 11 , 21 formed on the end faces of the first and second fluid supply/discharge port portions 1 A, 2 A; and inner and outer peripheral wall end portions 52 , 53 which are projected in an axial direction P of the first and second fluid supply/discharge port portions 1 A, 2 A in order to form the annular grooves 51 ,
  • annular press portions 12 , 22 which are buttable against the peripheral wall end portion 52 on the inner-diameter side are formed on inner-diameter sides of the annular projections 11 , 21 on the end faces of the first and second fluid supply/discharge port portions 1 A, 2 A,
  • the annular press portions 12 , 22 are formed into forward-narrowed annular projections having tapered peripheral faces 12 a , 22 a in which side peripheral faces on sides of the annular press projections are inclined so that valley portions 14 , 24 surrounded by the annular press portions and the annular projections 11 , 21 have an inward-narrowed shape
  • the peripheral wall end portion 52 on the inner-diameter side is formed into a forward-narrowed annular projection which has a tapered peripheral face 52 a butting against the tapered peripheral faces 12 a , 22 a of the annular press portions 12 , 22 , and which is enterable into the valley portions 14 , 24 ,
  • the first fluid supply/discharge port portion 1 A and the second fluid supply/discharge port portion 2 A are attracted to each other via the gasket G, whereby the annular projection 11 of the first fluid supply/discharge port portion 1 A and the annular groove 51 of one end of the gasket G, and the annular projection 21 of the second fluid supply/discharge port portion 2 A and the annular groove 51 of another end of the gasket G are fitted respectively to each other, and the tapered peripheral faces 12 a , 22 a of the annular press portions 12 , 22 are press contacted with the tapered peripheral face 52 a of the peripheral wall end portion 52 on the inner-diameter side to form a sealing portion S 1 .
  • the invention of claim 2 is characterized in that, in the connecting structure for an integration panel and a fluid device set forth in claim 1 , inclination angles of the tapered peripheral faces 12 a , 22 a of the annular press portions 12 , 22 are set to be different from an inclination angle of the tapered peripheral face 52 a of the peripheral wall end portion 52 on the inner-diameter side so that it is configured by a press contact only between end portions of the tapered peripheral faces 12 a , 22 a of the annular press portions 12 , 22 and the tapered peripheral face 52 a of the peripheral wall end portion 52 on the inner-diameter side, the end portion being on a side which is radially remote from the annular projections 11 , 21 .
  • the invention of claim 3 is characterized in that, in the connecting structure for an integration panel and a fluid device set forth in claim 1 or 2 , projection amounts of the annular projections 11 , 21 in the direction of the axis P are set to be larger than projection amounts of the annular press portions 12 , 22 in the direction of the axis P.
  • the invention of claim 4 is characterized in that, in the connecting structure for an integration panel and a fluid device set forth in any one of claims 1 to 3 , a state is configured where the peripheral wall end portion 52 on the inner-diameter side is expandingly displaced to be press contacted with the annular projections 11 , 21 to form a sealing portion S 2 , by a component force caused by attracting the first fluid supply/discharge port portion 1 A and the second fluid supply/discharge port portion 2 A via the gasket G to cause the both tapered peripheral faces 12 a , 22 a , 52 a to be in press contact with each other.
  • the invention of claim 5 is characterized in that, in the connecting structure for an integration panel and a fluid device set forth in any one of claims 1 to 4 , the gasket G has a substantially H-like section shape.
  • the invention of claim 6 is characterized in that, in the connecting structure for an integration panel and a fluid device set forth in any one of claims 1 to 5 , in order to facilitate insertion of the annular projections 11 , 21 into the annular grooves 51 , the annular projections 11 , 21 are formed into a tapered section shape in which an inner peripheral edge and/or outer peripheral edge of a tip end is chamfered.
  • the invention of claim 7 is characterized in that, in the connecting structure for an integration panel and a fluid device set forth in any one of claims 1 to 6 , holding means I for holding the joined state where the sealing portion S 1 is formed is equipped.
  • the invention of claim 8 is characterized in that, in the connecting structure for an integration panel and a fluid device set forth in claim 7 , the holding means I performs an attracting function of attracting the first fluid supply/discharge port portion 1 A and the second fluid supply/discharge port portion 2 A to obtain the joined state.
  • the invention of claim 9 is a connecting structure for an integration panel and a fluid device, wherein
  • annular projections 21 , 11 , 41 , 31 are formed on outer-diameter portions of the fluid passages 3 , 4 , 7 , 8 which are opened in end faces,
  • the gaskets G 1 , G 2 are configured by flexible materials having: fluid paths W 1 , W 2 which are formed to allow the corresponding fluid passages 3 , 4 , 7 , 8 of the first and second fluid supply/discharge port portions 1 A, 2 A to communicate with each other; a pair of annular grooves 51 , 61 which are formed on outer-diameter portions of the fluid paths W 1 , W 2 to be fitted respectively to the annular projections 21 , 11 , 41 , 31 formed on the end faces of the first and second fluid supply/discharge port portions 1 A, 2 A; and peripheral wall end portions 52 , 53 , 62 , 63 on the inner- and outer-diameter sides which are projected in an axial direction of the first and second fluid supply/discharge port portions 1 A, 2 A in order to form the annular grooves 51 , 61 ,
  • annular press portions 22 , 23 , 12 , 13 , 42 , 43 , 32 , 33 which are buttable respectively against the peripheral wall end portions 52 , 53 , 62 , 63 on the inner- and outer-diameter sides are formed on the inner- and outer-diameter sides of the annular projections 21 , 11 , 41 , 31 on the end faces of the first and second fluid supply/discharge port portions 1 A, 2 A,
  • the annular press portions 22 , 23 , 12 , 13 , 42 , 43 , 32 , 33 are formed into forward-narrowed annular projections having tapered peripheral faces 22 a , 23 a , 12 a , 13 a , 42 a , 43 a , 32 a , 33 a in which side peripheral faces on sides of the annular press projections are inclined so that valley portions 24 , 25 , 14 , 15 , 44 , 45 , 34 , 35 surrounded by the annular press portions and the annular projections 21 , 11 , 41 , 31 have an inward-narrowed shape, the peripheral wall end portions 52 , 53 , 62 , 63 are formed into forward-narrowed annular projections which have tapered peripheral faces 52 a , 53 a , 62 a , 63 a butting against the tapered peripheral faces 22 a , 23 a , 12 a , 13 a , 42 a , 43 a ,
  • the first fluid supply/discharge port portion 1 A and the second fluid supply/discharge port portion 2 A are attracted to each other via the plural gaskets G 1 , G 2 , whereby the annular projections 21 , 41 of the first fluid supply/discharge port portion 1 A and the annular grooves 51 , 61 of one ends of the gaskets G 1 , G 2 , and the annular projections 11 , 31 of the second fluid supply/discharge port portion 2 A and the annular grooves 51 , 61 of other ends of the gaskets G 1 , G 2 are fitted respectively to each other, and the tapered peripheral faces 22 a , 23 a , 12 a , 13 a , 42 a , 43 a , 32 a , 33 a of the corresponding annular press portions 22 , 23 , 12 , 13 , 42 , 43 , 32 , 33 are press contacted with the tapered peripheral faces 52 a , 53 a , 62 a , 63
  • an intermediate gasket G 1 in which the fluid passages W 1 , W 2 exist on both inner- and outer-diameter sides in the joined state is formed in a state where an outer peripheral face 55 a of the gasket is a wall for forming an annular fluid path W 2 through which the annular fluid passage 8 of the first fluid supply/discharge port portion 1 A existing on the outer-diameter side of the intermediate gasket G 1 communicates with the annular fluid passage 4 of the second fluid supply/discharge port portion 2 A.
  • the invention of claim 10 is characterized in that, in the connecting structure for an integration panel and a fluid device set forth in claim 9 , inclination angles of the tapered peripheral faces 22 a , 23 a , 12 a , 13 a , 42 a , 43 a , 32 a , 33 a of the annular press portions 22 , 23 , 12 , 13 , 42 , 43 , 32 , 33 are set to be different from inclination angles of the tapered peripheral faces 52 a , 53 a , 62 a , 63 a of the peripheral wall end portions 52 , 53 , 62 , 63 so that the sealing portion S 1 is configured by a press contact only between end portions of the tapered peripheral faces 22 a , 23 a , 12 a , 13 a , 42 a , 43 a , 32 a , 33 a of the annular press portions 22 , 23 , 12 , 13 , 42 , 43 , 32 , 33 and the tape
  • the invention of claim 11 is characterized in that, in the connecting structure for an integration panel and a fluid device set forth in claim 9 or 10 , projection amounts of the annular projections 21 , 11 , 41 , 31 in the direction of the axis are set to be larger than projection amounts of the annular press portions 22 , 23 , 12 , 13 , 42 , 43 , 32 , 33 in the direction of the axis.
  • the invention of claim 12 is characterized in that, in the connecting structure for an integration panel and a fluid device set forth in any one of claims 9 to 11 , a state is configured where the peripheral wall end portions 52 , 62 on the inner-diameter side are diameter-increasing displaced, and the peripheral wall end portions 53 , 63 on the outer-diameter side are diameter-decreasing displaced to be press contacted with the annular projections 21 , 41 , 11 , 31 to form a secondary sealing portion S 2 , by a component force caused by attracting the first fluid supply/discharge port portion 1 A and the second fluid supply/discharge port portion 2 A via the plural gaskets G 1 , G 2 to cause the both tapered peripheral faces 22 a , 23 a , 12 a , 13 a , 42 a , 43 a , 32 a , 33 a , 52 a , 53 a , 62 a , 63 a to be in press contact with
  • the invention of claim 13 is characterized in that, in the connecting structure for an integration panel and a fluid device set forth in any one of claims 9 to 12 , the plural gaskets G 1 , G 2 have a substantially H-like section shape.
  • the invention of claim 14 is characterized in that, in the connecting structure for an integration panel and a fluid device set forth in any one of claims 9 to 13 , in order to facilitate insertion of the annular projections 21 , 11 , 41 , 31 into the annular grooves 51 , 61 , the annular projections 21 , 11 , 41 , 31 are formed into a tapered section shape in which an inner peripheral edge and/or outer peripheral edge of a tip end is chamfered.
  • the invention of claim 15 is characterized in that, in the connecting structure for an integration panel and a fluid device set forth in any one of claims 9 to 14 , holding means I for holding the joined state where the sealing portion S 1 is formed is equipped.
  • the invention of claim 16 is characterized in that, in the connecting structure for an integration panel and a fluid device set forth in claim 15 , the holding means I performs an attracting function of attracting the first fluid supply/discharge port portion 1 A and the second fluid supply/discharge port portion 2 A to obtain the joined state.
  • the annular projections formed respectively on the fluid supply/discharge port portions, and the annular grooves formed respectively in the one and other end faces of the gasket are fitted to each other by relative movement in the axial direction, whereby a guiding function is exerted, the first and second fluid supply/discharge port portions relatively approach each other in a satisfactory manner without causing positional displacement, and the joined state where the annular press portions which are formed on the inner-diameter sides of the annular projections in the fluid supply/discharge port portions are press contacted with the peripheral wall end portion on the inner-diameter side of the gasket as desired is obtained.
  • the sealing portion i.e., an independent sealing portion on the inner-diameter side of the fitting portion between the annular projections and the annular grooves is formed.
  • the fitting portion between the annular projections and the annular grooves which exerts the guiding function exerts a labyrinth effect, so that it is possible to expect a function of, even when leakage from the sealing portion occurs, causing the leakage liquid to hardly reach the outer-diameter side.
  • Each of the tapered peripheral faces of the first and second fluid supply/discharge port portions is angled in a state where the side of the annular projection is retracted (recessed) in the axial direction, and hence press contacted not only in the axial direction but also in a radial direction. Therefore, the reduction of the press contact force of the sealing portion in the case where the pressure in the axial direction is lowered by a reason such as that the force of attracting the first and second fluid supply/discharge port portions is lowered is gentle.
  • the sealing portion is in the state where only the end portion (inner-most-diameter side end) that is radially remote from the annular groove is press contacted, and hence a sure sealing function is obtained by a higher surface pressure.
  • This prevents a fluid from entering between the tapered peripheral faces. Therefore, it is possible to provide a connecting structure for an integration panel and a fluid device which has an advantage that a disadvantage that a fluid itself or a mixture or foreign material in the fluid enters and stagnates to lower the purity of the fluid does not occur.
  • sequencing is performed so that the annular projections first enter into the annular grooves, and thereafter the tapered peripheral faces butt against each other. Therefore, the guiding function due to the fitting of the annular projections and the annular grooves is surely exerted.
  • the sealing portion due to the press contact between the annular press portion and the peripheral wall end portion on the inner-diameter side is configured so as to be surely exerted as desired.
  • a sealing portion is configured also between the peripheral wall end portion on the inner-diameter side and the annular projection. Therefore, the sealing function is further enhanced by the two sealing portions, and it is possible to provide a connecting structure for an integration panel and a fluid device which has a more excellent sealing performance.
  • the gasket is formed into a substantially H-like section shape. Therefore, the design and production of the gasket and the first and second fluid supply/discharge port portions which are portions to be fitted therewith can be simplified as compared with the case of, for example, a lateral T-like shape. Furthermore, a connecting structure which is excellent in balance (strength balance, assembling balance) when fitted to an integration panel and a fluid device can be produced.
  • the tapered section shape in which the inner peripheral edge and/or an outer peripheral edge of each annular projection is chamfered is formed, thereby facilitating insertion of the annular projection into the annular groove.
  • the holding means can hold the joined state where the fluid supply/discharge port portions are attracted to each other via the gasket. Therefore, it is possible to provide a highly reliable connecting structure for an integration panel and a fluid device in which the state where liquid leakage does not occur in the integration panel and the fluid device, and the excellent sealing property can be held for a long term. As a result, it is possible to further enhance the function and effect that a connecting structure for an integration panel and a fluid device in which an excellent sealing property can be held even when substantially no further fastening is performed, and the assembling workability is improved can be provided.
  • the holding means can perform not only holding of the joined state of the first fluid supply/discharge port portion and the second fluid supply/discharge port portion, but also an attracting function of attracting the first fluid supply/discharge port portion and the second fluid supply/discharge port portion to obtain the joined state. Therefore, it is not required to additionally prepare attracting means, and there are advantages that the assembling work can be reduced as a whole, and that the cost can be lowered.
  • means is provided for forming two or more fluid passages as concentric multiplex pipes, thereby compactifying a connecting structure portion as compared with a structure in which plural fluid passages are independently arranged.
  • the tapered peripheral faces of the annular press portions and the peripheral wall end portion are press contacted with each other to form the sealing portion, i.e., independent sealing portions on the inner- and outer-diameter sides of the fitting portion between the annular projections and the annular grooves are formed.
  • the sealing portion the first and second fluid supply/discharge port portions can be connected to each other in a state where liquid leakage from the connecting portion between them is surely blocked.
  • the fitting portion between the annular projections and the annular grooves which exerts the guiding function exerts a labyrinth effect, so that it is possible to expect a function of, even when leakage from the sealing portion occurs, causing the leakage liquid to hardly reach the inner-diameter side or the outer-diameter side.
  • this connecting structure When this connecting structure is used in a piping system for a cleaning apparatus in a semiconductor device producing facility, for example, the occupation area of the apparatus can be reduced while ensuring an excellent sealing property, and hence the structure is advantageous from the viewpoint of cost. Furthermore, a large fluid path can be ensured, and hence the circulating flow amount can be increased, and the purities of chemicals can be made higher, thereby attaining an effect that the invention can contribute to improvement of the yield.
  • Each of the tapered peripheral faces of the first and second fluid supply/discharge port portions is angled in a state where the side of the annular projection is retracted (recessed) in the axial direction, and hence press contacted not only in the axial direction but also in a radial direction. Therefore, the reduction of the press contact force of the sealing portion in the case where the pressure in the axial direction is lowered by a reason such as that the force of attracting the first and second fluid supply/discharge port portions is lowered is gentle.
  • the invention can contribute to promotion of integration of fluid devices which can be advantageously modularized or compactified, and provide a connecting structure for an integration panel and a fluid device in which an excellent sealing property can be held for a long term, the reliability is high, and further compactification is enabled.
  • the sealing portion is in the state where only the end portion (the innermost-diameter side end on the inner-diameter side, and the outermost-diameter side end on the outer-diameter side) that is radially remote from the annular groove is press contacted, and hence a sure sealing function is obtained by a higher surface pressure.
  • sequencing is performed so that the annular projections first enter into the annular grooves, and thereafter the tapered peripheral faces butt against each other. Therefore, the guiding function due to the fitting of the annular projections and the annular grooves is surely exerted.
  • the sealing portion due to the press contact between the annular press portion and the peripheral wall end portion on the inner- and outer-diameter sides is configured so as to be surely exerted as desired.
  • sealing portions are configured also between the peripheral wall end portions on the inner- and outer-diameter sides and the annular projection. Therefore, the sealing function is further enhanced by the sealing portion and the secondary sealing portions, and it is possible to provide a connecting structure for an integration panel and a fluid device which has a more excellent sealing performance.
  • the gasket is formed into a substantially H-like section shape. Therefore, the design and production of the gasket and the first and second fluid supply/discharge port portions which are portions to be fitted therewith can be simplified as compared with the case of, for example, a lateral T-like shape. Furthermore, a connecting structure which is excellent in balance (strength balance, assembling balance) when fitted to an integration panel and a fluid device can be produced.
  • the tapered section shape in which the inner peripheral edge and/or an outer peripheral edge of each annular projection is chamfered is formed, thereby facilitating insertion of the annular projection into the annular groove.
  • the holding means can hold the joined state where the fluid supply/discharge port portions are attracted to each other via the gasket. Therefore, it is possible to provide a highly reliable connecting structure for an integration panel and a fluid device in which the state where liquid leakage does not occur in the integration panel and the fluid device, and the excellent sealing property can be held for a long term. As a result, it is possible to further enhance the function and effect that a connecting structure for an integration panel and a fluid device can be provided which can contribute to promotion of integration of fluid devices that can be advantageously modularized or compactified, and in which an excellent sealing property can be held for a long term, the reliability is high, and further compactification is enabled.
  • the holding means can perform not only holding of the joined state of the first fluid supply/discharge port portion and the second fluid supply/discharge port portion, but also an attracting function of attracting the first fluid supply/discharge port portion and the second fluid supply/discharge port portion to obtain the joined state. Therefore, it is not required to additionally prepare attracting means, and there are advantages that the assembling work can be reduced as a whole, and that the cost can be lowered.
  • FIG. 1 is a section view (Embodiment 1) showing a connecting structure for an integration panel and a valve.
  • FIG. 2 is a section view of main portions of a gasket which is used in the connecting structure of FIG. 1 , and fluid supply/discharge ports.
  • FIG. 3 is an enlarged section view of main portions showing in detail a fitting structure for the gasket and a fluid device.
  • FIG. 4 is a section view (Embodiment 2) showing a connecting structure for an integration panel and a bellows valve.
  • FIG. 5 is a section view (Embodiment 3) showing a connecting structure for an integration panel and a filter.
  • FIG. 6 is a section view (Embodiment 4) of main portions showing a first other structure of holding means having an attracting function.
  • FIG. 7 is a diagram showing a connection procedure of a connecting structure having the holding means of FIG. 6 .
  • FIG. 8 is a section view (Embodiment 5) of main portions showing a second other structure of holding means having an attracting function.
  • FIG. 9 is a diagram showing a connection procedure of a connecting structure having the holding means of FIG. 8 .
  • FIG. 10 is a section view (Embodiment 6) of main portions showing a third other structure of holding means having an attracting function.
  • FIG. 11 is a section view (Embodiment 7) of main portions showing a fourth other structure of holding means having an attracting function.
  • FIG. 12 is a section view (Embodiment 8) of main portions showing a fifth other structure of holding means having an attracting function.
  • FIGS. 13( a ) and 13 ( b ) are section views of main portions showing another shape of an annular projection.
  • FIG. 14 is a section view (Embodiment 9) showing a concentric multiplex flow path connecting structure for an integration panel and a valve.
  • FIG. 15 is a section view of main portions of a gasket which is used in the connecting structure of FIG. 14 , and fluid supply/discharge ports.
  • FIG. 16 is an enlarged section view of main portions showing in detail a fitting structure for the gasket and a fluid device.
  • FIG. 17 is a section view (Embodiment 10) showing a concentric multiplex flow path connecting structure for an integration panel and a pump via a flanged pipe.
  • FIG. 18 is a section view (Embodiment 11) of main portions showing a sixth other structure of holding means having an attracting function.
  • FIG. 19 is a diagram showing a connection procedure of a connecting structure having the holding means of FIG. 17 .
  • FIG. 20 is a section view (Embodiment 12) of main portions showing a seventh other structure of holding means having an attracting function.
  • FIG. 21 is a diagram showing a connection procedure of a connecting structure having the holding means of FIG. 19 .
  • FIG. 22 is a section view (Embodiment 13) of main portions showing the structure of the holding means.
  • FIGS. 23( a ) and 23 ( b ) are section views of main portions showing another shape of an annular projection.
  • FIGS. 1 to 3 show a connecting structure for an integration panel and a fluid device in Embodiment 1
  • FIGS. 4 and 5 show connecting structures for an integration panel and a fluid device in Embodiments 2 and 3, respectively
  • FIGS. 6 to 12 show other structures of holding means
  • FIG. 6 shows a first other structure
  • FIGS. 7 and 8 show a second other structure
  • FIGS. 9 and 10 show a third other structure
  • FIG. 11 shows a fourth other structure
  • FIG. 12 shows a fifth other structure
  • FIG. 13 shows another structure of an annular projection.
  • FIGS. 14 and 15 are overall and main section views showing a connecting structure for an integration panel and a fluid device in Embodiment 9
  • FIG. 16 is an enlarged section view of main portions showing in detail a fitting structure for a first gasket and a first fluid supply/discharge port
  • FIG. 17 is an overall view showing a connecting structure for an integration panel and a fluid device in Embodiment 10
  • FIGS. 18 and 19 are half-section and assembly views of the holding means of the sixth other structure
  • FIGS. 20 and 21 are half-section and assembly views of the holding means of the seventh other structure
  • FIG. 22 is a section view of the holding means of the eighth other structure
  • FIG. 23 shows another structure of an annular projection.
  • FIGS. 1 and 2 show a connecting structure for an integration panel and a fluid device according to Embodiment 1.
  • the connecting structure for an integration panel and a fluid device is of the single-flow path type that extends over the integration panel 1 in which a pair of circular pipe-like fluid passages 3 , 4 are formed, and a valve (such as an on-off valve or a stop valve) 2 which is mounted on the upper face 1 a of the panel via ring-like gaskets G, and that shares the vertical axis P.
  • a pair of connecting structures for supply and discharge are configured so as to be identical to each other.
  • the pair of circular pipe-like supply-side fluid passages 3 , 4 consisting of: vertical passages 3 a , 4 a which are vertically formed, and which are opened in the panel upper face 1 a ; and lateral passages 3 b , 4 b which laterally extend are formed in the panel member (or a block member) 5 made of a fluororesin such as PFA or PTFE.
  • the portion where the supply/discharge fluid passages 3 , 4 in the integration panel 1 are opened is referred to as a first fluid supply/discharge port portion 1 A.
  • the circular pipe-like vertical passages 3 a , 4 a are formed as passages each having the axis P.
  • a lower first seal end portion t 21 and lower second seal end portion t 22 which have inner and outer annular projections 21 that are annular and centered at the axis P, and that are upward projected are formed in the outer diameter-side portions of the fluid passages 3 , 4 which are opened in the upper end face of the port portion, respectively.
  • the valve (an example of the fluid device) 2 has a valve case 6 which is made of a fluororesin such as PFA or PTFE, and which is circular in a vertical view.
  • a lower end portion of the valve case 6 is formed as a second fluid supply/discharge port portion 2 A having: a circular pipe-like supply-side fluid passage 7 which is vertically placed in a state where it is down-ward projected from the lower face 6 a ; and a circular pipe-like discharge-side fluid passage 8 which is vertically placed in a state where it is opened on a lateral side of the supply-side fluid passage 7 and laterally separated therefrom.
  • each of the circular pipe-like supply/discharge fluid passages 7 , 8 is formed as a passage having the axis P.
  • a pair of mounting flanges 9 which have a pair of bolt insertion holes 9 a , and which are made of a fluororesin such as PFA, PTFE, or another material are downward projectedly formed on the lower end of the valve case 6 .
  • Each of the mounting flanges 9 is formed by a pipe portion 9 A having fluid passages 7 , 8 , and a flange portion (outward flange) 9 B.
  • the supply-side mounting flange 9 is formed into an upper first seal end portion t 11 having an annular projection 11 which is down-ward projected, and the discharge-side mounting flange is formed into an upper second seal end portion t 12 having an annular projection 11 which is upward projected.
  • the pair of gaskets G are identical to each other. Their structures will be described while taking the supply-side gasket G as an example.
  • the gasket G is configured as a portion made of a fluororesin such as PFA or PTFE, and having: a pipe-like fluid path W which is formed so as to allow the vertical passage 3 a and supply-side fluid passage 7 that are corresponding fluid passages of the supply-side upper and lower fluid supply/discharge port portions 1 A, 2 A, to communicate with each other; and a pair of upper and lower annular grooves 51 , 51 which are formed in an outer diameter-side portion of the fluid path W so as to be fitted with the annular projections 11 , 21 of the upper first seal end portion t 11 and upper second seal end portion t 12 that are formed on the end faces of the first and second fluid supply/discharge port portions 1 A, 2 A.
  • the section shape of the gasket G is formed into a substantially H-like shape which has the pair of upper and lower annular grooves 51 , 51 , and inner and outer peripheral walls 54 , 55 for forming the annular grooves 51 , 51 , in which the upper and lower annular grooves 51 , 51 have the same depth and width, and are vertically symmetric, and the inner and outer peripheral walls 54 , 55 are laterally symmetric, and which is axisymmetric (or approximately axisymmetric) about both the vertical center line Z along the direction of the axis P of the first and second fluid supply/discharge port portions 1 A, 2 A, and the lateral center line X perpendicular to the vertical center line Z.
  • Upper and lower end portions of the inner peripheral wall 54 are formed as tapered inner peripheral faces 52 a , 52 a in which upper and lower end portions of the fluid path W serving as the inner peripheral face 54 a are outward inclined in a funnel-like manner.
  • upper and lower end portions of the outer peripheral wall 55 are formed as tapered outer peripheral faces 53 a , 53 a in which upper and lower end portions of the outer peripheral face 55 a are inward inclined.
  • annular press projections (an example of the annular press portion) 12 , 13 , 22 , 23 are formed to prevent inner and outer peripheral wall end portions 52 a , 53 a which are projected in the direction of the axis P in order to form the annular groove 51 in the gasket G, from being expandingly deformed by fittings between the annular groove 51 and the annular projections 11 , 21 .
  • the structure relating to the annular press projections will be described about the gasket G and the upper first seal end portion t 11 .
  • the inner and outer annular press projections 12 , 13 are symmetric, and formed as annular projections that have a forward-narrowed shape, and that have a tapered outer peripheral face 12 a and a tapered inner peripheral face 13 a in which side peripheral faces on the side of the annular projections are inclined so that valley portions 14 , 15 surrounded by the projections and the annular projection 11 have an inward-narrowed shape (upward narrowed shape).
  • the upper first seal end portion t 11 is a generic term of the annular projection 11
  • the annular press projections 12 , 13 and valley portions 14 , 15 which are formed on the both of inner and outer sides of the annular projection.
  • Upper end portions of the inner and outer peripheral walls 54 , 55 of the gasket G have annular seal projections (an example of the peripheral wall end portions) 52 , 53 which are forward-narrowed, which have tapered inner and tapered outer peripheral faces 52 a , 53 a butting against the tapered outer and tapered inner peripheral faces 12 a , 13 a of the annular press projections 12 , 13 , respectively, and which are fittable into the valley portions 14 , 15 .
  • annular seal projections an example of the peripheral wall end portions
  • the annular seal projections 52 , 53 which are upper end portions of the inner and outer peripheral walls 54 , 55 enter into the corresponding valley portions 14 , 15 , the tapered outer peripheral face 12 a of the upper first seal end portion t 11 is pressingly contacted with the tapered inner peripheral face 52 a of the gasket G, and the tapered inner peripheral face 13 a of the upper first seal end portion t 11 is pressingly contacted with the tapered outer peripheral face 53 a of the gasket G.
  • an upper sealing portion g 11 is formed by the annular groove 51 and the annular seal projections 52 , 53 inside and outside thereof, in the upper end portion of the gasket G, and similarly a lower sealing portion g 12 is formed in the lower end portion.
  • the upper sealing portion g 11 is fitted to the upper first seal end portion t 11 to form a fitting sealing portion 10
  • the lower sealing portion g 12 is fitted to the lower second seal end portion t 21 to form a fitting sealing portion 10 .
  • the fitting structure of the fitting sealing portions 10 will be described in detail about the upper first seal end portion t 11 and the upper sealing portion g 11 of the gasket G.
  • the inner and outer valley portions 14 , 15 are symmetric, and the inner and outer annular seal projections 52 , 53 are symmetric.
  • the contained angle ⁇ ° of the whole of the inner and outer valley portions 14 , 15 , and the opposed angle ⁇ ° of the whole of the inner and outer annular seal projections 52 , 53 are set to have the relationship of ⁇ ° ⁇ °.
  • the tapered outer peripheral face 12 a of the upper inner annular press projection 12 , and the tapered inner peripheral face 52 a of the upper inner annular seal projection 52 are in a state where they are pressingly contacted with each other in the innermost diameter portion (see the phantom line in FIG. 3 ), thereby attaining an advantage that they function as a primary sealing portion (an example of the sealing portion) S 1 which prevents the fluid passing through the fluid passage W from entering between the tapered outer and tapered inner peripheral faces 12 a , 52 a.
  • a relationship of h1 ⁇ h2 is established.
  • the upper annular projection 11 and the upper annular groove 51 are strongly pressingly contacted with each other to form a secondary sealing portion S 2 which exhibits an excellent sealing performance of preventing the fluid from leaking.
  • the tapered outer peripheral face 12 a of the upper inner annular press projection 12 surely butts against the tapered inner peripheral face 52 a of the upper inner annular seal projection 52 . Accordingly, there is an advantage that the above-mentioned primary sealing portion S 1 is satisfactorily formed.
  • the fitting sealing portion 10 may be set in the following manner.
  • R1 ⁇ R2 may be preferably established where R 1 and R 2 are the radii of the annular projection 11 ( 21 ) and the annular groove 51 with respect to the axis P, respectively.
  • a structure may be possible in which the peripheral wall end portion 52 on the inner-diameter side is press contacted with the annular projection 11 ( 21 ), but the secondary sealing portion S 2 is not formed.
  • the tip ends of the inner annular press projection 12 and the annular seal projections 52 , 53 are formed into a shape which is cut so as not to form a pin angle, i.e., into an inclined cut face 12 b and cut faces 52 b , 53 b .
  • a pin angle i.e., into an inclined cut face 12 b and cut faces 52 b , 53 b .
  • the opening angle of the recess i.e., the contained angle between the inclined cut face 12 b and the tapered inner peripheral face 52 a is sufficiently large, and hence the possibility that liquid stagnation due to surface tension is caused is eliminated.
  • Inner and outer peripheral edge portions of the tip end of the annular projection 11 are formed as a chamfered shape portion 11 a which is chamfered. Therefore, the press movement into the narrow annular groove 51 can be smoothly performed without causing any problem such as scuffing.
  • the annular projection 11 may be formed into a tapered section shape in which the chamfered shape portions 11 a of the inner and outer peripheral edge portions of the tip end of the annular projection are clearly enlarged, thereby facilitating the insertion of the annular projection 11 into the annular groove 51 .
  • the fitting sealing portion 10 (the secondary sealing portion S 2 ) is formed by fitting portions between the root portion of the annular projection 11 and tip end portion of the annular groove 51 .
  • the chamfered shape portions 11 a may be further enlarged, and an extremely tapered shape may be formed so that the whole of the inner and outer side peripheral faces of the annular projection 11 is configured as the inclined tapered peripheral faces 11 a.
  • the fitting guiding function is enhanced, and the insertion of the annular projection 11 into the annular groove 51 is further facilitated, and the disposition of the fitting sealing portion 10 (the secondary sealing portion S 2 ) produces a wedge effect that the annular projection 11 widens the annular groove 51 , so that the tip end portion of the annular groove 51 and the root portion of the annular projection 11 are circumferentially press contacted with each other by line contact or a very small area, whereby the sealing function can be exerted more surely.
  • the structures shown in FIGS. 13( a ) and 13 ( b ) may be applied to the other annular projection 21 .
  • a lower-end inner peripheral portion 9 b for forming a lower end portion of the valve case 6 exists in a state where it is continuous to a tapered inner peripheral face 13 a of the annular press projection 13 .
  • the whole shape of the projection is different from that of the inner annular press projection 12 .
  • an upper-end inner peripheral portion 5 b for forming an upper end portion of the panel member 5 exists in a state where it is continuous to the tapered inner peripheral face 23 a of the annular press projection 23 , and also the whole shape is different from the inner annular press projection 22 .
  • the upper- and lower-end inner peripheral portions 5 b , 9 b serve as a guide in the case where the upper and lower sealing portions g 11 , g 12 of the gasket G are fitted to the upper and lower first seal end portions t 11 , t 21 , and can perform a function of cooperating with the tapered inner peripheral faces 13 a , 23 a to prevent an outer peripheral wall 55 of the gasket G from being expandingly deformed.
  • a ring-like flange 1 f for attachment and detachment which is laterally projected may be integrally formed on the outer peripheral wall 55 of the gasket G.
  • the pulling operation can be easily performed by, for example, pulling the flange 1 f by a tool or the fingers.
  • the thickness of the attachable and detachable flange 1 f is smaller than the distance between the first and second fluid supply/discharge port portions 1 A, 2 A in the joined state.
  • the opening angle (the opening angle between the valley portions 14 , 15 ) D of the tapered peripheral faces 12 a , 13 a of the annular press projections 12 , 13 is set to a value in the range of 50 to 70 deg. (50° ⁇ D° ⁇ 70°)
  • the apical angle E of the tapered peripheral faces 52 a , 53 a of the annular seal projections (peripheral wall end portions) 52 , 53 is set to a value in the range of 60 to 80 deg. (60° ⁇ D° ⁇ 80°).
  • the tapered outer peripheral face 12 a and the tapered inner peripheral face 52 a butts against each other in an annular line-contact state, whereby the seal-lip effect is exerted in the primary sealing portion S 1 .
  • the sealing function is exerted in their outer-diameter side end portion.
  • an inclined cut face similar to the inclined cut face 12 b is formed on the outer annular press projection 13 , and the seal-lip effect is produced.
  • the apical angle E of the tapered peripheral faces 52 a , 53 a (the tapered inner peripheral face 52 a , the tapered outer peripheral face 53 a ) of the annular seal projections (peripheral wall end portions) 52 , 53 with respect to the attracting direction along which the first fluid supply/discharge port portion 1 A and the second fluid supply/discharge port portion 2 A are attracted to each other is set to a value which is a sum of the opening angle D of the tapered peripheral faces 12 a , 13 a (the tapered outer peripheral face 12 a , the tapered inner peripheral face 13 a ) on the side of the annular projection 11 in the annular press projections 12 , 13 with respect to the attracting direction, and an angle of 10 to 20 deg., preferably, 10 deg. or about 10 deg.
  • the apical angle E is set to 60 to 80 deg., preferably, 80 deg. or about 80 deg.
  • the projection amounts of the annular press projections 12 , 13 in the attracting direction (axial direction) are smaller than the radial width, and the strengths and rigidities of the projections are relatively improved. Accordingly, there is an advantage that, while restricting the expansions of the annular seal projections 52 , 53 , the possibility that they (the annular seal projections 12 , 13 ) themselves are radially expandingly deformed can be effectively suppressed.
  • the component force by which the tapered peripheral faces 52 a , 53 a radially press the annular press projections 12 , 13 in an expanding manner can be reduced by the bitings of the annular seal projections 52 , 53 into the valley portions 14 , 15 . Also by this phenomenon, the radially expanding deformations of the annular press projections 12 , 13 can be suppressed.
  • the holding means I is configured so that the first fluid supply/discharge port portion 1 A of the integration panel 1 and the second fluid supply/discharge port portion 2 A of the valve 2 are attracted to each other via the gasket G, and the attracting function holds the joined state in which the upper first seal end portion t 11 of the first fluid supply/discharge port portion 1 A and the upper sealing portion g 11 of the gasket G, and the lower first seal end portion t 21 of the second supply/discharge port portion 2 A and the lower sealing portion g 12 of the gasket G are fitted to each other to form the fitting sealing portions 10 .
  • annular projection 11 of the second fluid supply/discharge port portion 2 A is fitted into the upper annular groove 51 of the gasket G
  • annular projection 21 of the first fluid supply/discharge port portion 1 A is fitted into the lower annular groove 51 of the gasket G.
  • the specific structure of the holding means I is configured by: a pair of bolts 66 which are passed through bolt passage holes 9 a of the flange 9 B of the second fluid supply/discharge port portion 2 A; and nut portions 67 , 67 which are formed correspondingly with the pair of bolt passage holes 9 a , 9 a in the first fluid supply/discharge port portion 1 A (the panel member 5 ).
  • the holding means I is provided with an attracting function that, by a fastening operation of screwing the bolts 66 with the nut portions 67 , the valve 2 can be attracted to the integration panel 1 , and the attracted state can be held. In the case where the press contact forces of the fitting sealing portions 10 are reduced because of aging, occurrence of creep, or the like, the reduction can be coped with by further fastening the bolts 66 , and therefore the excellent sealing property can be held.
  • FIG. 4 shows a connecting structure for an integration panel and a fluid device according to Embodiment 2.
  • This is a structure for connecting and coupling a filter 2 which is an example of a fluid device, with the integration panel 1 .
  • the connecting structure itself is identical with that of Embodiment 1 shown in FIGS. 1 to 3 . Therefore, identical components are denoted by the same reference numerals, and the detailed description of the components is omitted.
  • the filter 2 is configured by a main body case 2 K, a lower case 2 B, and a filter element 2 C.
  • a supply-side fluid passage 7 In the lower case 2 B, a supply-side fluid passage 7 , a discharge-side fluid passage 8 , and a pair of mounting flanges 9 , 9 which are laterally projected in a state where it has the fluid passages 7 , 8 are formed.
  • the mounting flanges 9 , 9 , and the integration panel 1 are connected and coupled to each other via the gasket G.
  • a connecting structure for an integration panel and a fluid device is a connecting structure for the integration panel 1 and a regulator 2 which is an example of the fluid device.
  • the regulator 2 has a casing 2 C consisting of an upper case, an intermediate case, and a lower case, and is configured by: a bellows (not shown) in which an outer peripheral portion is clamped between the upper case and the intermediate case; a valve element (not shown) in which an outer peripheral portion is clamped between the intermediate case and the lower case; a return spring (not shown) which is housed in the lower case; and the like.
  • the casing 2 C is integrally equipped with the pair of mounting flanges 9 , 9 which are laterally projected.
  • the regulator 2 is connected and coupled via the gasket G to the upper face 1 a of the integration panel 1 by using the mounting flanges 9 , 9 .
  • the connecting structure for connecting the mounting flanges 9 and the upper face 1 a of the integration panel 1 via the gasket G is identical with that of Embodiment 1 shown in FIGS. 1 to 3 , and the detailed description of the structure is omitted.
  • FIGS. 6 and 7 show a connecting structure for an integration panel and a fluid device according to Embodiment 4.
  • the connecting structure is different only in the holding means I from that of Embodiment 1.
  • the holding means I of a first other structure will be described.
  • portions corresponding to those of Embodiment 1 shown in FIGS. 1 to 3 are denoted by corresponding reference numerals. As shown in FIGS.
  • the holding means I of the first other structure is configured by: a cylindrical nut 81 having an internal thread portion 81 n which is screwable with an external thread portion in formed on an outer peripheral portion of the projection-like first fluid supply/discharge port portion 1 A that is formed on the upper face of the integration panel 1 , and that is circular in a plan view; and a split ring 82 which has two or three or more split pieces, and which interferes in the direction of the axis P of the annular fluid passage 7 with the outward flange 9 that is formed in a lower end portion of the valve case 6 of the valve 2 .
  • the holding means I is configured as holding means having the attracting function in which, by a fastening operation of the cylindrical nut 81 in which the internal thread portion 81 n is screwed with the external thread portion 1 n of the first fluid supply/discharge port portion 1 A, the fluid supply/discharge port portions 1 A, 2 A can be attracted in the direction along which they approach each other via the gasket G, and the attracted state can be held.
  • An opening portion 83 a of an inward flange 83 which is formed on the side of the valve 2 (the upper side) of the cylindrical nut 81 is set to have a minimum internal diameter which is sufficient for allowing the passage of the outward flange 9 .
  • the outer diameter of the split ring 82 is set to be slightly smaller than the inner diameter of the internal thread portion 81 n so that the split ring can freely enter into the cylindrical nut 81 , and the inner diameter is set to a minimum dimension by which the split ring is fittable onto the outer diameter portion of the circular second fluid supply/discharge port portion 2 A of the valve 2 .
  • the axial length of a small-diameter portion of the second fluid supply/discharge port portion 2 A excluding the outward flange 9 must be larger than the sum of the axial length of the cylindrical nut 81 and the thickness of the split ring 82 .
  • the conditions that, as shown in FIG. 7( b ), the distance d 3 between the cylindrical nut 81 in a state where it butts against a root portion 6 t of the valve case 6 , and the outward flange 9 is larger than the thickness d 4 of the split ring 82 (d3>d4) is imposed.
  • an inner peripheral face portion 81 m which is axially slidable on the split ring 82 , and which has a length in the direction of the axis P that covers the width dimension of the split ring 82 is formed into a flat inner peripheral face which is coaxial with the axis P.
  • the inner diameter portion 81 a between the internal thread portion 81 n of the cylindrical nut 81 and the inward flange 83 is formed into a flat inner peripheral face which is concentric with the supply-side fluid passage 7 , and the dimensions are set to a fitting tolerance state where the inner diameter of the inner peripheral face portion 81 m is very slightly larger than the outer diameter of the split ring 82 which is formed so as to have a rectangular section shape.
  • an outer diameter portion of the second fluid supply/discharge port portion 2 A is formed into a flat outer peripheral face which is concentric with the supply-side fluid passage 7 , and has a diameter which is substantially equal to the inner diameter of the split ring 82 .
  • the split ring 82 is inclined to gouge, and that the pressing force in the direction of the axis P due to the screw advancement of the cylindrical nut 81 is not well transmitted to the outward flange 9 . Therefore, the outward flange 9 can be effectively pressed, and the first and second fluid supply/discharge port portions 1 A, 2 A can be satisfactorily attracted in the direction along which they approach each other.
  • the fluid supply/discharge port portions 1 A, 2 A are connected and coupled to each other by the holding means I of the first other structure in the following operation procedure.
  • the cylindrical nut 81 is passed over the outward flange 9 to be fitted onto the outer periphery of the second fluid supply/discharge port portion 2 A of the valve 2 , and is moved to the innermost portion (until it butts against the root portion 6 t ).
  • the split ring 82 is passed between the outward flange 9 and the tip end of the cylindrical nut 81 , to be fitted onto the second fluid supply/discharge port portion 2 A.
  • the gasket G may be attached to the end face of one of the fluid supply/discharge port portions 1 A, 2 A via provisional fittings between the annular projections 11 , 21 , 31 , 41 and the annular grooves 51 , 61 .
  • the first fluid supply/discharge port portion 1 A is placed on the second fluid supply/discharge port portion 2 A via the gasket G, the cylindrical nut 81 is slidingly moved under this state, and a fastening operation [see FIG. 7( c )] is then conducted, whereby the connection state shown in FIG. 6 is obtained.
  • FIG. 7 for the sake of convenience in drawing, the integration panel 1 and valve 2 which are vertically stacked to each other are shown in a laterally arranged manner.
  • FIGS. 8 and 9 show a connecting structure for an integration panel and a fluid device according to Embodiment 5.
  • the connecting structure is different only in the holding means I from that of Embodiment 1.
  • the holding means I of a second other structure will be described.
  • portions corresponding to those of Embodiment 1 shown in FIGS. 1 to 3 are denoted by corresponding reference numerals.
  • the holding means I of the second other structure comprises: first and second truncated conical end portions 1 D, 2 D in which the diameters of the first and second fluid supply/discharge port portions 1 A, 2 A are increased as further advancing toward the respective end faces; a sprit press ring 85 consisting of a pair of half-arcuate members 84 , 84 having an inner peripheral face having a substantially L-like section shape formed by a first tapered inner peripheral face 84 a butting against a tapered outer peripheral face 1 d of the first truncated conical end portion 1 D, and a second tapered inner peripheral face 84 b butting against a tapered outer peripheral face 2 d of the second truncated conical end portion 2 D; a bolt 86 for attracting the half-arcuate members 84 , 84 ; and a nut 87 which is formed in one of the half-arcuate members 84 .
  • the fluid supply/discharge port portions 1 A, 2 A are attracted together by a force exerted by butting of the tapered faces caused by fastening the bolt 86 passed through a through hole 84 h of the other half-arcuate member 84 , and the nut 87 to attract together the half-arcuate members 84 , 84 in which one end is hingedly pivoted at a fulcrum Q.
  • the sprit press ring 85 is preferably formed by a fluororesin material. Alternatively, the ring may be made of another material such as an aluminum alloy.
  • the fluid supply/discharge port portions 1 A, 2 A are connected and coupled to each other by the holding means I of the second other structure in the following operation procedure.
  • a preliminary coupling operation of lightly connecting and coupling the first and second fluid supply/discharge port portions 1 A, 2 A with each other via the gaskets G is performed.
  • the sprit press ring 85 is put on the first and second truncated conical end portions 1 D, 2 D on which the preliminary coupling operation has been applied, and an operation of fastening the bolt 86 is performed.
  • FIG. 10 shows a connecting structure for an integration panel and a fluid device according to Embodiment 6.
  • the connecting structure is different only in the holding means I from that of Embodiment 1.
  • the holding means I of a third other structure will be described.
  • portions corresponding to those of Embodiment 1 shown in FIGS. 1 to 3 are denoted by corresponding reference numerals.
  • the holding means I of the third other structure comprises: the projection-like first fluid supply/discharge port portion 1 A which is formed on the upper face of the integration panel 1 in a state where the external thread portion in is formed in the outer peripheral portion, and which is circular in a plan view; the flange portion 9 which is formed on a lower end portion of the valve case 6 in a state where an external thread portion 9 n is formed in the outer peripheral portion of the second fluid supply/discharge port portion 2 A; first and second ring nuts 91 , 92 having internal thread portions 91 n , 92 n which are screwable with the external thread portions 1 n , 9 n ; and an engagement ring 93 which is fittable into outer peripheral grooves 91 m , 92 m of the ring nuts 91 , 92 , and which has a substantially U-like section shape.
  • the ring nuts 91 , 92 and the engagement ring 93 are made of a fluororesin such as PFA or PTFE, and which has a certain degree of flexibility.
  • the fluid supply/discharge port portions 1 A, 2 A are connected and coupled to each other by the holding means I of the third other structure in the following operation procedure.
  • the engagement ring 93 is previously engaged with the ring nuts 91 , 92 , whereby the integrated first and second ring nuts 91 , 92 are previously formed.
  • the integrated first and second ring nuts 91 , 92 are screwed on the first and second fluid supply/discharge port portions 1 A, 2 A which are attracted together via the gaskets G to be set to the assembled state, thereby forming a connecting structure for an integration panel and a fluid device. It is a matter of course that, in this case, the external thread portions 1 n , 9 n must be identical to each other. After the screwing, the ring nuts 91 , 92 can be turned to be fastened more strongly, or to perform further fastening.
  • an attracting step is conducted in which the first and second fluid supply/discharge port portions 1 A, 2 A are attracted together via the gaskets G, and the port portions are connected to each other in a sealed state where the gaskets G are pressingly contacted with each other.
  • the attracting step is conducted by dedicated attracting means other than the holding means I.
  • the engagement ring 93 is forcedly deformed by expanding the diameter, whereby the ring is fitted into the outer peripheral grooves 91 m , 92 m of the first and second ring nuts 91 , 92 which are screwed in a state where the ring nuts are adjacent to the external thread portions 1 n , 9 n , respectively.
  • a connecting structure for an integration panel and a fluid device is formed. Namely, the engagement ring 93 is engaged by forced fitting with the ring nuts 91 , 92 .
  • the thus configured holding means 1 literally has only a function of holding the sealed connection state of the first and second fluid supply/discharge port portions 1 A, 2 A via the gasket G.
  • the ring nuts 91 , 92 and the engagement ring 93 are relatively rotatable, and therefore both of the ring nuts 91 , 92 can singly rotatingly move.
  • a further fastening operation can be performed by forcedly rotating one or both of the ring nuts 91 , 92 .
  • FIG. 11 shows a connecting structure for an integration panel and a fluid device according to Embodiment 7.
  • the connecting structure is different only in the holding means I from that of Embodiment 1.
  • the holding means I of a fourth other structure will be described.
  • the holding means I of the fourth other structure is configured by: the projection-like first fluid supply/discharge port portion 1 A which is formed on the upper face of the integration panel 1 in a state where an outer peripheral portion has an external thread portion 1 n , and which is circular in a plan view; the flange portion 9 which is formed on a lower end portion of the valve case 6 in a state where an external thread portion 9 n is formed in the outer peripheral portion of the second fluid supply/discharge port portion 2 A; and a cylindrical nut 101 having an internal thread portion 101 n which is screwable with the external thread portions 1 n , 9 n.
  • a gouged inner peripheral portion 101 a the diameter of which is larger than the external thread portions 1 n , 9 n is formed between the internal thread portion 101 n on the tip end side and an inward flange 102 on a basal end side, and the inward flange 102 is formed so as to have an inner diameter dimension at which the inward flange 102 interferes with the flange portion 9 in the direction of the axis P.
  • the external thread portion 9 n of the fluid device 2 is housed in the gouged inner peripheral portion 101 a , and only the external thread portion 1 n of the integration panel 1 and the internal thread portion 101 n are screwed with each other. This state holds the state where the first and second fluid supply/discharge port portions 1 A, 2 A are attracted together.
  • the internal thread portion 101 n of the cylindrical nut 101 is screwed and fastened with the external thread portion 9 n of the flange portion 9 of the fluid device 2 , and passed over the external thread portion 9 n to set a state where the external thread portion is rotatably housed in the gouged inner peripheral portion 101 a .
  • the internal thread portion 101 n is screwed and fastened via the gasket G with the external thread portion in of the integration panel 1 .
  • the cylindrical nut 101 and the external thread portion 9 n of the flange portion 9 are relatively idle.
  • the structure is configured as the holding means I having the attracting function.
  • FIG. 12 shows a connecting structure for an integration panel and a fluid device according to Embodiment 8.
  • the connecting structure is different only in the holding means I from that of Embodiment 1.
  • the holding means I of a fifth other structure will be described.
  • the holding means I of the fifth other structure has a compromise configuration between the holding means I of the first other structure shown in FIG. 6 , and the holding means I of the fourth other structure shown in FIG. 11 . As shown in FIG.
  • the holding means is configured by: the projection-like first fluid supply/discharge port portion 1 A which is formed on the upper face of the integration panel 1 in a state where an outer peripheral portion has an external thread portion 1 n , and which is circular in a plan view; the flange portion 9 which is formed on a lower end portion of the valve case 6 in a state where an external thread portion 9 n is formed in the outer peripheral portion of the second fluid supply/discharge port portion 2 A; a cylindrical nut 111 having an internal thread portion 111 n which is screwable with the external thread portions 1 n , 9 n ; and a split ring 112 .
  • a gouged inner peripheral portion 111 a the diameter of which is larger than the external thread portions 1 n , 9 n is formed between the internal thread portion 111 n on the tip end side and an inward flange 113 on a basal end side, and the inward flange 113 is formed so as to have an inner diameter portion 113 a of a size at which the inward flange 113 does not interfere with the flange portion 9 in the direction of the axis P.
  • the split ring 112 is formed by splitting a circular ring into three or more portions (for example, three sector members of a little less than 120 deg.), so as to allow operations that the split ring passes over the inward flange 113 and the internal thread portion 111 n and then enters from the outside into the gouged inner peripheral portion 111 a , and that the split members are assembled into a ring-like form in the gouged inner peripheral portion 111 a .
  • the split ring 112 may be configured by a single C-like member which is flexile to some extent so that, when it bends radially like a snap ring, it can enter into the gouged inner peripheral portion 111 a.
  • An assembling process using the holding means I of the fifth other structure is performed in the following manner. Namely, a state in which the split ring 112 enters into the gouged inner peripheral portion 111 a in the above-described manner is previously set. The subsequent steps are identical with those of the case of the holding means I of the fourth other structure described above. Therefore, further description of the assembling procedure is omitted.
  • FIGS. 14 and 15 show a connecting structure for an integration panel and a fluid device according to Embodiment 9.
  • the connecting structure for an integration panel and a fluid device is a concentric double flow path structure that extends over both an integration panel 1 in which plural pipe-like fluid passages 3 , 4 are formed, and a valve (such as an on-off valve or a stop valve) 2 which is mounted on the upper face 1 a of the panel via inner and outer ring-like gaskets G 1 , G 2 numbering two in total, and that shares the vertical axis P.
  • a valve such as an on-off valve or a stop valve
  • the pipe-like supply-side fluid passage 3 consisting of: a vertical passage 3 a which is vertically formed, and which is opened in the panel upper face 1 a ; and a lateral passage 3 b which laterally extends
  • the discharge-side fluid passage 4 consisting of: an annular vertical ring passage 4 a which is formed on an outer diameter-side of the vertical passage 3 a , and which is opened in the panel upper face 1 a ; and a lateral passage 4 b which communicates with a bottom portion of the ring passage, and which laterally extends are formed in a panel member (or a block member) 5 made of a fluororesin such as PFA or PTFE.
  • first fluid supply/discharge port portion 1 A The portion where the supply/discharge fluid passages 3 , 4 in the integration panel 1 are opened in a double-pipe like manner is referred to as a first fluid supply/discharge port portion 1 A.
  • the pipe-like vertical passage 3 a and the annular vertical ring passage 4 a are formed as concentric passages having the common axis P.
  • a lower first seal end portion t 21 and lower second seal end portion t 22 which have inner and outer annular projections 21 , 41 that are annular and centered at the axis P, and that are upward projected are formed in the outer diameter-side portions of the fluid passages 3 , 4 which are opened in the upper end face of the port portion, respectively.
  • the valve (an example of the fluid device) 2 has a valve case 6 which is made of a fluororesin such as PFA or PTFE, and which is circular in a vertical view.
  • a lower end portion of the valve case 6 is formed as a second fluid supply/discharge port portion 2 A having: a pipe-like supply-side fluid passage 7 which is vertically placed at the center of the lower end portion in a state where it is opened in the lower face 6 a ; and an annular discharge-side fluid passage 8 which is formed on the outer-diameter side of the supply-side fluid passage 7 , and which is vertically placed in a state where it is opened in the lower face 6 a .
  • the pipe-like supply-side fluid passage 7 and the annular discharge-side fluid passage 8 are formed as concentric passages having the common axis P.
  • a mounting flange 9 which has a pair of bolt insertion holes 9 a , and which is made of a fluororesin such as PFA or PTFE or another material is integrated by fusion bonding to an outer peripheral portion of the lower end of the valve case 6 .
  • the valve case 6 and the mounting flange 9 are formed as an integral member which is integrally formed by a cutting or molding process.
  • an upper first seal end portion t 11 and upper second seal end portion t 12 which have inner and outer annular projections 11 , 31 that are annular and centered at the axis P, and that are upward projected are formed in the outer diameter-side portions of the fluid passages 7 , 8 which are opened in the lower end face of the port portion, respectively.
  • the inner and outer ring-like gaskets G 1 , G 2 are different only in diameter, and formed into the same section shape. Their structures will be described while taking the inner first gasket G 1 as an example.
  • the outer second gasket G 2 the description of which is omitted, portions corresponding to those of the first gasket G 1 are denoted by corresponding reference numerals (for example, 54a ⁇ 64a).
  • the first gasket G 1 is configured as a portion made of a fluororesin such as PFA or PTFE, and having: a pipe-like fluid path W 1 which is formed so as to allow the vertical passage 3 a and supply-side fluid passage 7 that are corresponding fluid passages of the first and second fluid supply/discharge port portions 1 A, 2 A, to communicate with each other; and a pair of upper and lower annular grooves 51 , 51 which are formed in an outer diameter-side portion of the fluid path W 1 so as to be fitted respectively with the annular projections 11 , 31 of the upper first seal end portion t 11 and upper second seal end portion t 12 that are formed on the end faces of the first and second fluid supply/discharge port portions 1 A, 2 A.
  • a fluororesin such as PFA or PTFE
  • the section shape of the first gasket G 1 is formed into a substantially H-like shape which has the pair of upper and lower annular grooves 51 , 51 , and inner and outer peripheral walls 54 , 55 for forming the annular grooves 51 , 51 , in which the upper and lower annular grooves 51 , 51 have the same depth and width, and are vertically symmetric, and the inner and outer peripheral walls 54 , 55 are laterally symmetric, and which is axisymmetric (or approximately axisymmetric) about both the vertical center line Z along the direction of the axis P of the first and second fluid supply/discharge port portions 1 A, 2 A, and the lateral center line X perpendicular to the vertical center line Z.
  • Upper and lower end portions of the inner peripheral wall 54 are formed as tapered inner peripheral faces 52 a , 52 a in which upper and lower end portions of the fluid path W 1 serving as the inner peripheral face 54 a are outward inclined in a funnel-like manner.
  • upper and lower end portions of the outer peripheral wall 55 are formed as tapered outer peripheral faces 53 a , 53 a in which upper and lower end portions of the outer peripheral face 55 a are inward inclined.
  • annular press projections (an example of annular press portions) 12 , 13 , 22 , 23 , 32 , 33 , 42 , 43 are formed to pre-vent inner and outer peripheral wall end portions 52 a , 53 a , 62 a , 63 a which are projected in the direction of the axis P in order to form the annular grooves 51 , 61 in the gaskets G 1 , G 2 , from being expandingly deformed by fittings between the corresponding annular grooves 51 , 61 and the corresponding annular projections 11 , 21 , 31 , 41
  • the structure relating to the annular press projections will be described about the first gasket G 1 and the upper first seal end portion t 11 .
  • the inner and outer annular press projections 12 , 13 are symmetric, and formed as annular projections that have a forward-narrowed shape, and that have a tapered outer peripheral face 12 a and a tapered inner peripheral face 13 a in which side peripheral faces on the side of the annular projections are inclined so that valley portions 14 , 15 surrounded by the projections and the annular projection 11 have an inward-narrowed shape (upward narrowed shape).
  • the upper first seal end portion t 11 is a generic term of the annular projection 11
  • the annular press projections 12 , 13 and valley portions 14 , 15 which are formed on the both of inner and outer sides of the annular projection.
  • Upper end portions of the inner and outer peripheral walls 54 , 55 of the first gasket G 1 have annular seal projections (an example of the peripheral wall end portions) 52 , 53 which are forward-narrowed, which have tapered inner and tapered outer peripheral faces 52 a , 53 a butting against the tapered outer and tapered inner peripheral faces 12 a , 13 a of the annular press projections 12 , 13 , respectively, and which are fittable into 14 , 15 .
  • annular seal projections an example of the peripheral wall end portions
  • the annular seal projections 52 , 53 which are upper end portions of the inner and outer peripheral walls 54 , 55 enter into the corresponding valley portions 14 , 15 , the tapered outer peripheral face 12 a of the upper first seal end portion t 11 is pressingly contacted with the tapered inner peripheral face 52 a of the first gasket G 1 , and the tapered inner peripheral face 13 a of the upper first seal end portion t 11 is pressingly contacted with the tapered outer peripheral face 53 a of the first gasket G 1 .
  • an upper sealing portion g 11 is formed by the annular groove 51 and the annular seal projections 52 , 53 inside and outside thereof, in the upper end portion of the first gasket G 1 , and similarly a lower sealing portion g 12 is formed in the lower end portion.
  • the upper sealing portion g 11 is fitted to the upper first seal end portion t 11 to form a fitting sealing portion 10
  • the lower sealing portion g 12 is fitted to the lower second seal end portion t 21 to form a fitting sealing portion 10
  • an upper sealing portion g 21 and a lower sealing portion g 22 are formed, and fitted to the upper second seal end portion t 12 and the lower second seal end portion t 22 to form fitting sealing portions 10 , respectively.
  • the fitting structure of the fitting sealing portions 10 will be described in detail about the upper first seal end portion t 11 and the upper sealing portion g 11 of the first gasket G 1 .
  • the inner and outer valley portions 14 , 15 are symmetric, and the inner and outer annular seal projections 52 , 53 are symmetric.
  • the contained angle ⁇ ° of the whole of the inner and outer valley portions 14 , 15 , and the opposed angle ⁇ ° of the whole of the inner and outer annular seal projections 52 , 53 are set to have the relationship of ⁇ ° ⁇ °.
  • the tapered outer peripheral face 12 a of the upper inner annular press projection 12 , and the tapered inner peripheral face 52 a of the upper inner annular seal projection 52 are in a state where they are pressingly contacted with each other in the innermost diameter portion (see the phantom line in FIG. 16 ), thereby attaining an advantage that they function as a primary sealing portion S 1 which prevents the fluid passing through the fluid passage W 1 from entering between the tapered outer and tapered inner peripheral faces 12 a , 52 a.
  • a relationship of h1 ⁇ h2 is established.
  • the upper annular projection 11 and the upper annular groove 51 are strongly pressingly contacted with each other to form a secondary sealing portion S 2 which exhibits an excellent sealing performance of preventing the fluid from leaking.
  • the tapered outer peripheral face 12 a of the upper inner annular press projection 12 surely butts against the tapered inner peripheral face 52 a of the upper inner annular seal projection 52 . Accordingly, there is an advantage that the above-mentioned primary sealing portion S 1 is satisfactorily formed.
  • these relationships are established also between the lower annular projection 21 and the lower annular groove 51 , and the annular groove 61 of the second gasket G 2 and the upper and lower annular projections 31 , 41 .
  • R1 ⁇ R2 and R3>R4 are established where R1, R3, R2, R4 are the radii of the annular projection 11 , 31 ( 21 , 41 ) and the annular groove 51 ( 61 ) on the inner and outer diameters with respect to the axis P, respectively.
  • the tip ends of the annular press projections 12 , 13 and the annular seal projections 52 , 53 are formed into a shape which is cut so as not to form a pin angle, i.e., into inclined cut faces 12 b , 13 b and cut faces 52 b , 53 b .
  • a pin angle i.e., into inclined cut faces 12 b , 13 b and cut faces 52 b , 53 b .
  • the opening angle of the recess i.e., the contained angle between the inclined cut face 12 b and the tapered inner peripheral face 52 a is sufficiently large, and hence the possibility that liquid stagnation due to surface tension is caused is eliminated.
  • the internal and external angles of the tip end of the annular projection 11 are formed as a chamfered shape 11 a . Therefore, the press movement into the narrow annular groove 51 can be smoothly performed without causing any problem such as scuffing.
  • the annular projection 11 may be formed into a tapered section shape in which the chamfered shape portions 11 a of the inner and outer peripheral edge portions of the tip end of the annular projection are clearly enlarged, thereby facilitating the insertion of the annular projection 11 into the annular groove 51 .
  • the annular projection 11 is surely guided into the annular groove 51 while the inner or outer chamfered shape portion 11 a which has a tapered shape functions as a fitting guide.
  • the fitting sealing portion 10 (secondary sealing portion S 2 ) is formed by fitting portions between the root portion of the annular projection 11 and tip end portion of the annular groove 51 .
  • This structure can be configured similarly in the other annular projections 31 , 21 , 41 and the second gasket G 2 .
  • the chamfered shape portions 11 a may be further enlarged, and an extremely tapered shape may be formed so that the whole of the inner and outer side peripheral faces of the annular projection 11 is configured as the inclined tapered peripheral faces 11 a.
  • the fitting guiding function is enhanced, and the insertion of the annular projection 11 into the annular groove 51 is further facilitated.
  • the disposition of the fitting sealing portion 10 (secondary sealing portion S 2 ) produces a wedge effect that the annular projection 11 widens the annular groove 51 , so that the tip end portion of the annular groove 51 and the root portion of the annular projection 11 are circumferentially press contacted with each other by line contact or a very small area, whereby the sealing function can be exerted more surely.
  • a similar structure can be configured also in the other annular projections 31 , 21 , 41 and the second gasket G 2 .
  • the opening angle (the opening angle between the valley portions 14 , 15 ) D of the tapered peripheral faces 12 a , 13 a on the side of the annular projection in the annular press projections 12 , 13 is set to a value in the range of 50 to 70 deg. (50° ⁇ D° ⁇ 70°)
  • the apical angle E of the tapered peripheral faces 52 a , 53 a of the annular seal projections 52 , 53 is set to a value in the range of 60 to 80 deg. (60° ⁇ D° ⁇ 80°).
  • the tapered outer peripheral face 12 a and the tapered inner peripheral face 52 a , and the tapered inner peripheral face 13 a and the tapered outer peripheral face 53 a butt against each other in an annular line-contact state, whereby the seal-lip effect is exerted in the secondary sealing portion S 2 .
  • the apical angle E of the tapered peripheral faces 52 a , 53 a (the tapered inner peripheral face 52 a , the tapered outer peripheral face 53 a ) of the annular seal projections (peripheral wall end portions) 52 , 53 with respect to the attracting direction along which the first fluid supply/discharge port portion 1 A and the second fluid supply/discharge port portion 2 A are attracted to each other is set to a value which is a sum of the opening angle D of the tapered peripheral faces 12 a , 13 a (the tapered outer peripheral face 12 a , the tapered inner peripheral face 13 a ) on the side of the annular projection 11 in the annular press projections 12 , 13 with respect to the attracting direction, and an angle of 10 to 20 deg., preferably, 10 deg. or about 10 deg.
  • the apical angle E is set to 60 to 80 deg., preferably, 80 deg. or about 80 deg.
  • the projection amounts of the annular press projections 12 , 13 in the attracting direction (axial direction) are smaller than the radial width, and the strengths and rigidities of the projections are relatively improved. Accordingly, there is an advantage that, while restricting the expansions of the annular seal projections 52 , 53 , the possibility that they (the annular press projections 12 , 13 ) themselves are radially expandingly deformed can be effectively suppressed.
  • the component force by which the tapered peripheral faces 52 a , 53 a radially press the annular press projections 12 , 13 in an expanding manner can be reduced by the bitings of the annular seal projections 52 , 53 into the valley portions 14 , 15 . Also by this phenomenon, the radially expanding deformations of the annular press projections 12 , 13 can be suppressed.
  • the above-described structure of the fitting sealing portion 10 is similarly applied to the lower side of the first gasket G 1 , and also to the second gasket G 2 , and corresponding portions are denoted by corresponding reference numerals.
  • the diameter is different, but the section shape is strictly identical with that of the first gasket G 1 .
  • the shapes of the upper and lower second seal end portions t 12 , t 22 of the first and second fluid supply/discharge port portions 1 A, 2 A are slightly different from those of the upper and lower first seal end portions t 11 , t 21 because no fluid passage exists on the outer peripheral side.
  • a lower-end inner peripheral portion 6 b for forming a lower end portion of the valve case 6 exists in a state where it is continuous to a tapered inner peripheral face 33 a of the annular press projection 33 .
  • the lower-end inner peripheral portion 6 b serves as a guide in the case where the upper sealing portion g 21 of the second gasket G 2 is fitted to the upper second seal end portion t 12 , and can perform a function of cooperating with the tapered inner peripheral face 33 a to prevent an outer peripheral wall 65 of the second gasket G 2 from being expandingly deformed.
  • the panel member 5 continuously exists on the outer periphery side of the outer annular press projection 43 .
  • the first gasket G 1 that is an intermediate gasket in which the fluid passages 7 , 8 exist on both the inner- and outer-diameter sides in the joined state is formed in a state where the outer peripheral face 55 a which is an outer peripheral portion of the first gasket is a wall for forming an annular fluid path W 2 through which the annular fluid passage 4 a of the first fluid supply/discharge port portion 1 A existing on the outer-diameter side of the first gasket G 1 communicates with the annular fluid passage 8 of the second fluid supply/discharge port portion 2 A.
  • both the inner and outer peripheral face 54 a , 55 a of the first gasket G 1 function also as the walls for forming the fluid passages W 1 , W 2
  • a ring-like flange 1 f for attachment and detachment which is laterally projected may be integrally formed on the outer peripheral wall 65 of the second gasket G 2 .
  • the pulling operation can be easily performed by, for example, pulling the flange 1 f by a tool or the fingers.
  • the thickness of the attachable and detachable flange 1 f is smaller than the distance between the first and second fluid supply/discharge port portions 1 A, 2 A in the joined state.
  • the holding means I is configured so that the first fluid supply/discharge port portion 1 A of the integration panel 1 and the second fluid supply/discharge port portion 2 A of the valve 2 are attracted to each other via the first and second gaskets G 1 , G 2 , and the attracting function holds the joined state where the upper first and upper second seal end portions t 11 , t 12 of the first fluid supply/discharge port portion 1 A and the upper sealing portions g 11 , g 21 of the first and second gaskets G 1 , G 2 , and the lower first and lower second seal end portions t 21 , t 22 of the second fluid supply/discharge port portion 2 A and the lower sealing portions g 12 , g 22 of the first and second gaskets G 1 , G 2 are fitted to each other to form the fitting sealing portions 10 .
  • annular projections 11 , 31 of the second fluid supply/discharge port portion 2 A are fitted into the upper annular grooves 51 , 61 of the first and second gaskets G 1 , G 2 , and the annular projections 21 , 41 of the first fluid supply/discharge port portion 1 A are fitted into the lower annular grooves 51 , 61 of the first and second gaskets G 1 , G 2 .
  • the specific structure of the holding means I is configured by: a pair of bolts 66 which are passed through bolt passage holes 9 a of the mounting flange 9 of the second fluid supply/discharge port portion 2 A; and nut portions 67 , 67 which are formed correspondingly with the pair of bolt passage holes 9 a , 9 a in the first fluid supply/discharge port portion 1 A (the panel member 5 ).
  • a fastening operation of screwing the bolts 66 with the nut portions 67 the valve 2 can be attracted to the integration panel 1 , and the attracted state can be held.
  • the press contact forces of the fitting sealing portions 10 are reduced because of aging, occurrence of creep, or the like, the reduction can be coped with by further fastening the bolts 66 , and therefore the excellent sealing property can be held.
  • a connecting structure for an integration panel and a fluid device according to Embodiment 10 is used for communicatingly connecting the integration panel 1 to a pump (such as a bellows pump for a circulation line of a cleaning apparatus) 2 which is an example of a fluid device, via a flanged pipe 71 .
  • a pump such as a bellows pump for a circulation line of a cleaning apparatus
  • the configuration of the connecting structure itself in which the inner and outer gaskets G 1 , G 2 are interposed is identical with that of the connecting structure described in Embodiment 9. Therefore, only principal components are denoted by reference numerals, and the detailed description of the configuration is omitted.
  • the integration panel 1 is basically identical in structure except that the direction of the discharge-side fluid passage 4 is opposite to that in the case of the integration panel 1 of Embodiment 9.
  • the connecting structure for the integration panel and the fluid device is configured on the upper face of the integration panel.
  • the connecting structure of Embodiment 2 is configured on a side face of the integration panel 1 .
  • the supply/discharge fluid passages 7 , 8 of the pump 2 are opened in the side face.
  • the pair of fluid passages 3 , 4 have the double-pipe structure.
  • the fluid passages are of the independent type in which they are vertically arranged.
  • the flanged pipe 71 consists of: a flange portion 72 having the above-described mounting flange 9 ; and a substantially bifurcated pipe portion 73 which is continuous to the flange portion.
  • the pipe portion 73 is configured by a supply-side pipe 73 A having a pipe-like supply-side fluid passage 74 , and a discharge-side fluid passage 73 B having a pipe-like discharge-side fluid passage 75 .
  • the supply-side fluid passage 74 is formed into a pipe-like shape centered at the axis P, and opened while being directly opposed to the vertical passage 3 a of the integration panel 1 , and an annular passage portion 75 a which is opened while being directly opposed to the vertical ring passage 4 a of the integration panel 1 is formed in a state where it is continuous to the discharge-side fluid passage 75 .
  • the fluid passages 74 , 75 are communicatingly connected and coupled to an in-side port 76 and out-side port 77 of the pump 2 by means such as fusion bonding.
  • the flanged pipe 71 having the flange portion 72 of the double-pipe structure, and the two independent pipe portions 73 is used. Therefore, the first fluid supply/discharge port portion 1 A of the double-pipe structure in the integration panel 1 , and the second fluid supply/discharge port portion 2 A configured by the pair of in-side and out-side ports 76 , 77 which are arranged in parallel, i.e., the integration panel 1 and the pump 2 can be communicatingly connected to each other in juxtaposed, unforced, and compact manners, although the fluid passages have the different opening structures.
  • FIGS. 18 and 19 show a connecting structure for an integration panel and a fluid device according to Embodiment 11.
  • the connecting structure is different only in the holding means I from that of Embodiment 9.
  • the holding means I of a sixth other structure will be described.
  • portions corresponding to those of Embodiment 9 shown in FIGS. 14 to 16 are denoted by corresponding reference numerals. As shown in FIGS.
  • the holding means I of the sixth other structure is configured by: a cylindrical nut 81 having an internal thread portion 81 n which is screwable with an external thread portion in formed on an outer peripheral portion of the projection-like first fluid supply/discharge port portion 1 A that is formed on the upper face of the integration panel 1 , and that is circular in a plan view; and a split ring 82 which has two or three or more split pieces, and which interferes in the direction of the axis P of the annular fluid passage 7 with the outward flange 9 that is formed in a lower end portion of the valve case 6 of the valve 2 .
  • the holding means I is configured as holding means having the attracting function in which, by a fastening operation of the cylindrical nut 81 in which the internal thread portion 81 n is screwed with the external thread portion 1 n of the first fluid supply/discharge port portion 1 A, the fluid supply/discharge port portions 1 A, 2 A can be attracted in the direction along which they approach each other via the two gaskets G 1 , G 2 , and the attracted state can be held.
  • An opening portion 83 a of an inward flange 83 which is formed on the side of the valve 2 (the upper side) of the cylindrical nut 81 is set to have a minimum internal diameter which is sufficient for allowing the passage of the outward flange 9 .
  • the outer diameter of the split ring 82 is set to be slightly smaller than the inner diameter of the internal thread portion 81 n so that the split ring can freely enter into the cylindrical nut 81 , and the inner diameter is set to a minimum dimension by which the split ring is fittable onto the outer diameter portion of the circular second fluid supply/discharge port portion 2 A of the valve 2 .
  • the axial length of a small-diameter portion of the second fluid supply/discharge port portion 2 A excluding the outward flange 9 must be larger than the sum of the axial length of the cylindrical nut 81 and the thickness of the split ring 82 .
  • the conditions that, as shown in FIG. 19( b ), the conditions in which the distance d3 between the cylindrical nut 81 in a state where it butts against a root portion 6 t of the valve case 6 , and the outward flange 9 is larger than the thickness d4 of the split ring 82 (d3>d4) are imposed.
  • an inner peripheral face portion 81 m which is axially slidable on the split ring 82 , and which has a length in the direction of the axis P that covers the width dimension of the split ring 82 is formed into a flat inner peripheral face which is coaxial with the axis P.
  • the inner diameter portion 81 a between the internal thread portion 81 n of the cylindrical nut 81 and the inward flange 83 is formed into a flat inner peripheral face which is concentric with the supply-side fluid passage 7 , and the dimensions are set to a fitting tolerance state where the inner diameter of the inner peripheral face portion 81 m is very slightly larger than the outer diameter of the split ring 82 which is formed so as to have a rectangular section shape.
  • an outer diameter portion of the second fluid supply/discharge port portion 2 A is formed into a flat outer peripheral face which is concentric with the supply-side fluid passage 7 , and has a diameter which is substantially equal to the inner diameter of the split ring 82 .
  • the split ring 82 is inclined to gouge, and that the pressing force in the direction of the axis P due to the screw advancement of the cylindrical nut 81 is not well transmitted to the outward flange 9 . Therefore, the outward flange 9 can be effectively pressed, and the first and second fluid supply/discharge port portions 1 A, 2 A can be satisfactorily attracted in the direction along which they approach each other.
  • the fluid supply/discharge port portions 1 A, 2 A are connected and coupled to each other by the holding means I of the sixth other structure in the following operation procedure.
  • the cylindrical nut 81 is passed over the outward flange 9 to be fitted onto the outer periphery of the second fluid supply/discharge port portion 2 A of the valve 2 , and is moved to the innermost portion (until it butts against the root portion 6 t ).
  • the split ring 82 is passed between the outward flange 9 and the tip end of the cylindrical nut 81 , to be fitted onto the second fluid supply/discharge port portion 2 A.
  • the first and second gaskets G 1 , G 2 may be attached to the end face of one of the fluid supply/discharge port portions 1 A, 2 A via provisional fittings between the annular projections 11 , 21 , 31 , 41 and the annular grooves 51 , 61 .
  • the first fluid supply/discharge port portion 1 A is placed on the second fluid supply/discharge port portion 2 A via the gaskets G 1 , G 2 , the cylindrical nut 81 is slidingly moved under this state, and a fastening operation [see FIG. 19( c )] is then conducted, whereby the connection state shown in FIG. 18 is obtained.
  • FIG. 19 for the sake of convenience in drawing, the integration panel 1 and valve 2 which are vertically stacked to each other are shown in a laterally arranged manner.
  • FIGS. 20 and 21 show a connecting structure for an integration panel and a fluid device according to Embodiment 12.
  • the connecting structure is different only in the holding means I from that of Embodiment 9.
  • the holding means I of a seventh other structure will be described.
  • the holding means I of the seventh other structure comprises: first and second truncated conical end portions 1 D, 2 D in which the diameters of the first and second fluid supply/discharge port portions 1 A, 2 A are increased as further advancing toward the respective end faces; a split press ring 85 consisting of a pair of half-arcuate members 84 , 84 having an inner peripheral face having a substantially L-like section shape formed by a first tapered inner peripheral face 84 a butting against a tapered outer peripheral face 1 d of the first truncated conical end portion 1 D, and a second tapered inner peripheral face 84 b butting against a tapered outer peripheral face 2 d of the second truncated conical end portion 2 D; a bolt 86 for attracting the half-arcuate members 84 , 84 ; and a nut
  • the fluid supply/discharge port portions 1 A, 2 A are attracted together by a force exerted by butting of the tapered faces caused by fastening the bolt 86 passed through a through hole 84 h of the other half-arcuate member 84 , and the nut 87 to attract together the half-arcuate members 84 , 84 in which one end is hingedly pivoted at a fulcrum Q.
  • the split press ring 85 is preferably formed by a fluororesin material. Alternatively, the ring may be made of another material such as an aluminum alloy.
  • the fluid supply/discharge port portions 1 A, 2 A are connected and coupled to each other by the holding means I of the seventh other structure in the following operation procedure.
  • a preliminary coupling operation of lightly connecting and coupling the first and second fluid supply/discharge port portions 1 A, 2 A with each other via the first and second gaskets G 21 , G 2 as shown in FIG. 21( a ) is performed.
  • the sprit press ring 85 is put on the first and second truncated conical end portions 1 D, 2 D on which the preliminary coupling operation has been applied, and an operation of fastening the bolt 86 is performed.
  • FIG. 22 shows a connecting structure for an integration panel and a fluid device according to Embodiment 13.
  • the connecting structure is different only in the holding means I from that of Embodiment 9.
  • the holding means I of an eighth other structure will be described.
  • portions corresponding to those of Embodiment 9 shown in FIGS. 14 to 16 are denoted by corresponding reference numerals.
  • the holding means I of the eighth other structure comprises: the projection-like first fluid supply/discharge port portion 1 A which is formed on the upper face of the integration panel 1 in a state where the external thread portion in is formed in the outer peripheral portion, and which is circular in a plan view; the flange portion 9 which is formed on a lower end portion of the valve case 6 in a state where an external thread portion 9 n is formed in the outer peripheral portion of the second fluid supply/discharge port portion 2 A; first and second ring nuts 91 , 92 having internal thread portions 91 n , 92 n which are screwable with the external thread portions 1 n , 9 n ; and an engagement ring 93 which is fittable into outer peripheral grooves 91 m , 92 m of the ring nuts 91 , 92 , and which has a substantially U-like section shape.
  • the ring nuts 91 , 92 and the engagement ring 93 are made of a material which is a fluororesin such as PFA or PTFE, and have a certain degree of flexibility.
  • the fluid supply/discharge port portions 1 A, 2 A are connected and coupled to each other by the holding means I of the third other structure in the following operation procedure.
  • the engagement ring 93 is engaged with the ring nuts 91 , 92 , whereby the integrated first and second ring nuts 91 , 92 are previously formed.
  • the integrated first and second ring nuts 91 , 92 are screwed on the first and second fluid supply/discharge port portions 1 A, 2 A which are attracted together via the gaskets G 1 , G 2 to be set to the assembled state, thereby forming a connecting structure for an integration panel and a fluid device. It is a matter of course that, in this case, the external thread portions 1 n , 9 n must be identical to each other. After the screwing, the ring nuts 91 , 92 can be turned to be fastened more strongly, or to perform further fastening.
  • an attracting step is conducted in which the first and second fluid supply/discharge port portions 1 A, 2 A are attracted together via the first and second gaskets G 1 , G 2 , and the port portions are connected to each other in a sealed state where the gaskets G 1 , G 2 are pressingly contacted with each other.
  • the attracting step is conducted by dedicated attracting means other than the holding means I.
  • the engagement ring 93 is forcedly deformed by expanding the diameter, whereby the ring is fitted into the outer peripheral grooves 91 m , 92 m of the first and second ring nuts 91 , 92 which are screwed in a state where the ring nuts are adjacent to the external thread portions 1 n , 9 n , respectively.
  • a connecting structure for an integration panel and a fluid device is formed. Namely, the engagement ring 93 is engaged by forced fitting with the ring nuts 91 , 92 .
  • the thus configured holding means I literally has only a function of holding the sealed connection state of the first and second fluid supply/discharge port portions 1 A, 2 A via the gaskets G 1 , G 2 .
  • the ring nuts 91 , 92 and the engagement ring 93 are relatively rotatable, and therefore both of the ring nuts 91 , 92 can singly rotatingly move.
  • a further fastening operation can be performed by forcedly rotating one or both of the ring nuts 91 , 92 .
  • the second gasket portions G 2 on the outer-diameter side may have a structure in which the vertical dimension of the outer peripheral wall 63 is shorter than that of the inner peripheral wall 53 , and which is formed simply by horizontally cutting the upper and lower ends.
  • the outer peripheral wall 63 of the second gasket portions G 2 on the outermost diameter side may not be provided with the sealing function.
  • the gaskets G 1 , G 2 in Embodiments 9 to 13 have a shape which is vertically and laterally symmetric.
  • the gaskets may be configured so that the inner and outer peripheral walls have different lengths or thicknesses, or they are vertically asymmetric, and are not restricted to the illustrated shapes.
  • a connecting structure for a triple or more integration panel having one or plural annular fluid passages in the outside of the outer annular fluid passage 8 , and a fluid device may be possible.
  • a configuration in which, in gaskets other than the gasket existing in the outermost side, their inner and outer peripheral faces function also as fluid passages may be employed.
  • fluid device in the invention is defined as a generic term of devices relating to fluid, such as a valve, a pump, an accumulator, a fluid storage vessel, a heat exchanger, a regulator, a pressure gage, a flowmeter, a heater, and a flanged pipe, or in summary devices other than an integration panel.
  • a turn buckle type structure (example: a structure in which, in the structure shown in FIG. 10 or 22 , one of the external thread portions 1 n , 9 n is formed as a reverse thread, and a turn-buckle nut straddling over the external thread portions 1 n , 9 n is screwed) may be employed.
  • annular press projections 33 , 43 are read as the annular press walls 33 , 43 , and the annular press projections 12 , 13 , 22 , 23 , 32 , 42 and the annular press walls 33 , 43 are generally defined as “annular press portion”.

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Gasket Seals (AREA)
  • Quick-Acting Or Multi-Walled Pipe Joints (AREA)
US11/988,555 2005-07-12 2006-06-15 Connection structure between integrated panel and fluid device Active 2028-08-16 US7942165B2 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2005-202934 2005-07-12
JP2005202934A JP4512526B2 (ja) 2005-07-12 2005-07-12 集積パネルと流体デバイスとの接続構造
JP2005203940A JP4512528B2 (ja) 2005-07-13 2005-07-13 集積パネルと流体デバイスとの接続構造
JP2005-203940 2005-07-13
PCT/JP2006/312013 WO2007007508A1 (ja) 2005-07-12 2006-06-15 集積パネルと流体デバイスとの接続構造

Publications (2)

Publication Number Publication Date
US20090126808A1 US20090126808A1 (en) 2009-05-21
US7942165B2 true US7942165B2 (en) 2011-05-17

Family

ID=37636906

Family Applications (1)

Application Number Title Priority Date Filing Date
US11/988,555 Active 2028-08-16 US7942165B2 (en) 2005-07-12 2006-06-15 Connection structure between integrated panel and fluid device

Country Status (5)

Country Link
US (1) US7942165B2 (zh)
EP (1) EP1909001A1 (zh)
KR (1) KR20080026645A (zh)
TW (1) TW200734563A (zh)
WO (1) WO2007007508A1 (zh)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120192957A1 (en) * 2011-01-27 2012-08-02 Wabtec Holding Corp. Manifold Joint Seal
US20140300106A1 (en) * 2011-12-07 2014-10-09 Dongbangtech Co., Ltd. Pipe joint structure for semiconductor processing
US20200393068A1 (en) * 2018-03-13 2020-12-17 Nippon Pillar Packing Co., Ltd. Structure for mounting gasket on block and gasket
US20230213080A1 (en) * 2022-01-03 2023-07-06 DRiV Automotive Inc. Damper with a slanted elliptical seal between an intermediate tube and an inner pressure tube

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105074408B (zh) 2013-03-28 2017-04-19 株式会社富士金 压力检测器的安装结构
JP6699992B2 (ja) 2015-04-15 2020-05-27 株式会社フジキン 流体継手用ガスケットおよび流体継手
US20180087684A1 (en) * 2016-09-27 2018-03-29 Fujikin Incorporated Fluid control system and joint block used therefor
CN108832664A (zh) * 2018-08-03 2018-11-16 亚洲富士电梯股份有限公司 一种电梯能量回馈装置
CN112211942B (zh) * 2019-11-04 2021-12-17 北京京西重工有限公司 支架、液压阻尼器组件及其之间的连接方法
WO2023096851A2 (en) * 2021-11-24 2023-06-01 Ichor Systems, Inc. Fluid delivery system

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2050137A (en) * 1933-12-23 1936-08-04 United Superior Union Company Plumber's union and method of manufacture thereof
JPS61187946A (ja) 1985-02-15 1986-08-21 株式会社日立製作所 粉砕分級装置
US4988130A (en) * 1988-07-19 1991-01-29 Japan Atomic Energy Research Institute Metal seal flange assembly
US5160178A (en) * 1991-12-17 1992-11-03 Kabushiki Kaisha Com Direct sealing coupling
US5355908A (en) * 1986-01-15 1994-10-18 Hiltap Fittings, Ltd. Reusable pipe union assembly with automatic fluid flow checking
US6070912A (en) * 1989-08-01 2000-06-06 Reflange, Inc. Dual seal and connection
US6135155A (en) * 1995-05-31 2000-10-24 Fujikin Incorporated Fluid control device
JP2002523708A (ja) 1998-09-02 2002-07-30 ゼネラル・エレクトリック・カンパニイ Ｃ形リング・シール
US6892749B2 (en) * 2001-12-04 2005-05-17 Smc Kabushiki Kaisha Manifold for solenoid-operated valve
US7017609B2 (en) * 2002-09-20 2006-03-28 Ckd Corporation Gas supply unit

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61187946U (zh) * 1985-05-16 1986-11-22
JPH10169859A (ja) 1996-12-03 1998-06-26 Benkan Corp 集積化ガスパネルの制御機器取付用シールガスケット
JP2001082609A (ja) 1999-09-09 2001-03-30 Motoyama Eng Works Ltd シールガスケット

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2050137A (en) * 1933-12-23 1936-08-04 United Superior Union Company Plumber's union and method of manufacture thereof
JPS61187946A (ja) 1985-02-15 1986-08-21 株式会社日立製作所 粉砕分級装置
US5355908A (en) * 1986-01-15 1994-10-18 Hiltap Fittings, Ltd. Reusable pipe union assembly with automatic fluid flow checking
US4988130A (en) * 1988-07-19 1991-01-29 Japan Atomic Energy Research Institute Metal seal flange assembly
US6070912A (en) * 1989-08-01 2000-06-06 Reflange, Inc. Dual seal and connection
US5160178A (en) * 1991-12-17 1992-11-03 Kabushiki Kaisha Com Direct sealing coupling
US6135155A (en) * 1995-05-31 2000-10-24 Fujikin Incorporated Fluid control device
JP2002523708A (ja) 1998-09-02 2002-07-30 ゼネラル・エレクトリック・カンパニイ Ｃ形リング・シール
US6892749B2 (en) * 2001-12-04 2005-05-17 Smc Kabushiki Kaisha Manifold for solenoid-operated valve
US7017609B2 (en) * 2002-09-20 2006-03-28 Ckd Corporation Gas supply unit

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120192957A1 (en) * 2011-01-27 2012-08-02 Wabtec Holding Corp. Manifold Joint Seal
US9114788B2 (en) * 2011-01-27 2015-08-25 Wabtec Holding Corp. Manifold joint seal
US20140300106A1 (en) * 2011-12-07 2014-10-09 Dongbangtech Co., Ltd. Pipe joint structure for semiconductor processing
US20200393068A1 (en) * 2018-03-13 2020-12-17 Nippon Pillar Packing Co., Ltd. Structure for mounting gasket on block and gasket
US20230213080A1 (en) * 2022-01-03 2023-07-06 DRiV Automotive Inc. Damper with a slanted elliptical seal between an intermediate tube and an inner pressure tube
US11906015B2 (en) * 2022-01-03 2024-02-20 DRiV Automotive Inc. Damper with a slanted elliptical seal between an intermediate tube and an inner pressure tube

Also Published As

Publication number Publication date
EP1909001A1 (en) 2008-04-09
TW200734563A (en) 2007-09-16
KR20080026645A (ko) 2008-03-25
WO2007007508A1 (ja) 2007-01-18
US20090126808A1 (en) 2009-05-21

Similar Documents

Publication Publication Date Title
US7942165B2 (en) Connection structure between integrated panel and fluid device
US20080000533A1 (en) Structure for Connection Between Integrated Panel and Fluid Device
US20090072536A1 (en) Connection Structure of Stack Panel to Fluid Device
US20070145691A1 (en) Fluid gasket
US20100013213A1 (en) Structure for connection between integrated panel and fluid device
KR19990024027A (ko) 조절가능한 누출방지 체결시스템
JP4268913B2 (ja) 流体機器どうしの接続構造
JP2006161873A (ja) 集積パネルと流体デバイスとの接続構造
JP4465335B2 (ja) 集積パネルと流体デバイスとの接続構造
JP2006316806A (ja) 流体機器どうしの接続構造
JP4512526B2 (ja) 集積パネルと流体デバイスとの接続構造
JP4257319B2 (ja) 集積パネルと流体デバイスとの接続構造
JP4644477B2 (ja) 流体用ガスケット
JP4210669B2 (ja) 集積パネルと流体デバイスとの接続構造
JP4210668B2 (ja) 集積パネルと流体デバイスとの接続構造
JP4048193B2 (ja) 集積パネルと流体デバイスとの接続構造
JP4848467B2 (ja) フランジ配管と流体機器との接続構造
JP4654013B2 (ja) 集積パネルと流体デバイスとの接続構造
JP2006132662A (ja) 集積パネルと流体デバイスとの接続構造
JP4210643B2 (ja) 流体用ガスケット
JP4512528B2 (ja) 集積パネルと流体デバイスとの接続構造
JP2006161830A (ja) フランジ配管どうしの接続構造及びフランジ配管と流体機器との接続構造
JP4268914B2 (ja) 流体機器どうしの接続構造
JP4257320B2 (ja) 集積パネルと流体デバイスとの接続構造
JP4210670B2 (ja) 流体用ガスケット

Legal Events

Date Code Title Description
AS Assignment

Owner name: NIPPON PILLAR PACKING CO., LTD., JAPAN

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:KATSURA, MASAYOSHI;REEL/FRAME:020389/0741

Effective date: 20071214

STCF Information on status: patent grant

Free format text: PATENTED CASE

CC Certificate of correction
FPAY Fee payment

Year of fee payment: 4

MAFP Maintenance fee payment

Free format text: PAYMENT OF MAINTENANCE FEE, 8TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1552); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

Year of fee payment: 8

MAFP Maintenance fee payment

Free format text: PAYMENT OF MAINTENANCE FEE, 12TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1553); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

Year of fee payment: 12