US7341237B2 - Valve mechanism for a vacuum valve - Google Patents

Valve mechanism for a vacuum valve Download PDF

Info

Publication number
US7341237B2
US7341237B2 US11/531,215 US53121506A US7341237B2 US 7341237 B2 US7341237 B2 US 7341237B2 US 53121506 A US53121506 A US 53121506A US 7341237 B2 US7341237 B2 US 7341237B2
Authority
US
United States
Prior art keywords
valve
slots
valve member
opening
mechanism according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US11/531,215
Other languages
English (en)
Other versions
US20070057220A1 (en
Inventor
Hubert Bösch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of US20070057220A1 publication Critical patent/US20070057220A1/en
Application granted granted Critical
Publication of US7341237B2 publication Critical patent/US7341237B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/184—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of cams
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Definitions

  • the invention relates to a valve mechanism for a vacuum valve, and more particularly to a mechanism to apply a high sealing pressure through the use of two mutually movable elements.
  • Vacuum valves are preferred for closing of throughgoing openings in vacuum equipment.
  • Valve mechanisms of the type described may also be used for other valves in which forced guidance is advantageous, for example, shutoff elements in pipes or the like wherein liquids are transported.
  • a known valve mechanism is disclosed by the present Applicant in EP 0662575 B1. According to that publication, a movable valve member is rolled on fixed mounted support shafts. The costs of realizing such a solution are high, and the support shafts disclosed cannot bear as much stress as free guided roll members guided in suitable guide means without bearings.
  • roller bodies in roll or cylindrical roller form
  • JP 2001-090849 A1 An example of bearing-free guided shafts, referred to hereinbelow as “roll bodies” in roll or cylindrical roller form, is disclosed in JP 2001-090849 A1.
  • this known valve mechanism three circular plates which are mutually translatably movable are provided, and between them free guided spheres are disposed which spheres serve as roll bodies. Upwardly inclined grooves are distributed over the periphery of a first plate which is rotationally driven, and the spheres are translationally guidably disposed in the grooves. These spheres engage corresponding, opposite, grooves of a second, middle plate. On the opposite side of said middle plate, additional grooves are provided wherein spheres arc translatably guided which spheres engage corresponding grooves in a third plate.
  • This third plate is the valve plate (movable valve member) which, depending on the rotational position of the other two plates, is moved against the throughgoing opening in the housing or is moved away from that opening
  • a feature of the invention is that only as few as two pieces are provided which are translationally movable with respect to each other, one such piece being the drive plate and the other being the movable valve member. At least one slot is formed in the drive plate which slot cooperates with and overlaps a complementary slot in the neighboring movable valve member.
  • a roll body, having a cylindrical or drum or roller shape is disposed in the overlap region between the drive plate slot and the complementary (valve member) slot.
  • This structure affords the important advantage that for the first time it is possible, with the use of two mutually movable pieces, to admit a high pressing force for sealing purposes, and with the same force to bring about opening of the valve, without the risk that the roll body becomes undesirably displaced in its accommodating structure or becomes completely lost.
  • Another advantage of the present invention is that the cooperating slots in the one piece and the neighboring piece are both closed, so that the roll bodies are secured against undesirable displacement (or dislodgment) upward or downward or otherwise.
  • the closed slots limit engagement of the roll bodies to the axial longitudinal direction.
  • the roll bodies disclosed here are not self-supported bearings, such as ball bearings with inner and outer races, but are free guided roll bodies without the use of additional mechanical elements. Accordingly, for a given external diameter they have appreciably higher load bearing capability.
  • a particular advantage of the invention is that in the simplest case no tensile return springs are needed, because the roll bodies are completely forced and guided, and enclosed, in associated accommodating configurations between the slots, and are forcibly guided in the valve-sealing direction and in the opposite direction.
  • the embodiments of the invention are not limited to a configuration in which the roll bodies are in the form of rolls or the like extending entirely from one side of the device to the other. According to another embodiment of the invention it may be provided that the roll bodies are only present in the form of segments of rolls or the like and, for example, do not extend over the entire width of the valve from one side of the valve to the other, and are not interconnected by a connecting member.
  • the embodiments of the invention are not limited to the use of roll bodies in the form of cylindrical rolls. Other shapes may be employed, such as, in particular, triangular bodies which enable direct rolling movement with rounded spherical surfaces.
  • the roll bodies Because the forces on the roll bodies are substantially smaller than the forces employed previously in related valve structures, it is sufficient for the roll bodies to be comprised of a commercially widely available and relatively inexpensive metallic material. Similarly, it is unnecessary for the guide slots for the roll bodies to have specially hardened support surfaces.
  • a carriage As a supporting element for the slots according to the invention, preferably a carriage is employed which is driven in the horizontal direction. Suitable drive means are known in the art and are not specifically described herein.
  • the carriage have four supporting wheels.
  • Other types of support elements may be utilized, such as convex roller bearings or the like.
  • arriage is referred to herein as the “drive plate,” because it is in the form of a plate-shaped body borne by rollers which body is driven in translational movement on a support surface in a housing.
  • the movable valve member borne by the carriage is longitudinally guided by a guide slot (guideway) which at its end forces the movable valve member to move upward toward the sealing seat.
  • a guideway for the movable valve member other means of forcing and guiding mechanisms for lifting may be used such as, for example, a rocker arm or the like.
  • FIG. 1 is a cross section through a first embodiment of the invention of a valve mechanism in a vacuum valve
  • FIG. 2 is a plan view of the guideway slot in the FIG. 1 embodiment for forcible guiding of the movable valve member;
  • FIG. 3 is a cross section through line III-III of FIG. 1 ;
  • FIG. 4 is an enlarged cross sectional view through a detail of the guide means for the roll body in the slot of FIG. 1 ;
  • FIG. 5 is a cross section through a second exemplary embodiment of the valve mechanism of the invention, with a movable valve member and a counter-disc;
  • FIG. 6 is a cross section through line VI-VI of FIG. 5 ;
  • FIGS. 7A-7E show several exemplary embodiments of the complementary slots in accordance with the invention.
  • FIGS. 8A-8F show the course of movement when complementary slots in accordance with the invention are moved with respect to each other;
  • FIG. 9 is a perspective, expanded view of the disc with the roll bodies in accordance with the invention.
  • FIG. 10 is an enlarged view of a portion of FIG. 9 .
  • FIG. 1 is a general view of a valve mechanism of the invention in a vacuum valve, wherewith throughgoing valve opening 2 is disposed in housing 1 .
  • the valve opening can be closed off by movable valve member 4 with the aid of sealing element 8 .
  • the traveling element (carriage) illustrated in FIGS. 1 and 3 is essentially comprised of drive plate 14 which is drivable back and forth in the direction of arrow 22 (see also FIG. 6 );
  • Guideway slot 3 and its function are illustrated more clearly in FIG. 2 .
  • Wheel 9 moves exclusively along axis 10 , which axis has at its front end a part 11 which extends perpendicularly to its main direction. Between the two parts a gradual transition or radius 12 is provided to ensure a smooth transition of the movement. It is understood that a small amount of air reaches this wheel traveling in the guideway slot, to enable the bearing to roll on the running surface of the guideway slot.
  • the wheel is connected to the movable valve member 4 via the arm 13 which is integral to or fixed to said valve member 4 .
  • Wheel 9 has exclusively guiding functions, and in particular is not subjected to stresses of the sealing or release of the valve closure. It bears only the weight of the parts suspended on it, such as movable valve member 4 .
  • Drive plate 14 has a plurality of suspension means 15 which are movable in the drive plane along the axis or in direction of arrow 22 but are not movable along any other axis.
  • the suspension means are wheels 15 which roll on corresponding support surfaces 24 disposed in the interior of the housing.
  • the actual support surface for wheels 15 is either the lower support surface 24 or the opposite support surface 24 ′, depending on the installed orientation of the overall housing 1 .
  • roll bodies 16 are in the form of throughgoing profiled rolls, shafts, or pins (see FIG. 3 ).
  • the outer end of each roll body 16 engages a corresponding control slot 23 in the region of the drive plate 14 .
  • a form-interlocking (configurationally engaging) connection between the two slots ( 6 , 23 ) is provided, via the respective engaging gudgeon ends of the roll bodies 16 .
  • the support member embodied as the roll body 16 may be comprised of two aligned roll bodies which are not joined. Thus, roll body 16 may have a break in its center, to form two roll body parts which are held in alignment in movable valve member 4 . Such a configuration with divided roll bodies 16 is particularly preferred for vacuum valves of large operating width.
  • the shapes of the slots 6 and 7 are preferably arcuate curves. However, other shapes may be chosen, such as:
  • FIGS. 7A-7E show examples of various slot shapes meeting this description,
  • the slots are surrounded by walls which limit movement in the direction perpendicular to their longitudinal extent. Such limiting is also present on the ends of the slots (the upper and lower ends).
  • a roll body can enter into engagement with a control slot only in a plane perpendicular to the plane of the longitudinal extent of the control slot.
  • the coordinated complementary slots 6 and 23 have overlapping end regions.
  • the control slot 23 in drive plate 14 has an end region 29 which forms one side of an accommodating opening 32 , whereas the other side of the accommodating opening 32 is formed by the end region 30 of the complementarily disposed slot 6 in the movable valve member 4 .
  • a complete accommodating opening 32 which surrounds roll body 16 is formed, in which opening 32 the roll body is held without appreciable play.
  • FIGS. 7A-7E demonstrate that the shape of the slots is not confined to simple arcuate curves but may have angular bends, or slots 6 and 23 may be substantially comprised of respective straight inclined regions ( FIG. 7B ). Thus it is possible to provide a constant deflection over the extent of the slot. In any event, it is important that slots 23 on both sides of drive plate 14 have the same shape (but rotated 180° to result in a complementary shape).
  • the two parallel roll bodies 16 disposed a distance apart are positioned in parallel slots 6 disposed a distance apart in movable valve member 4 .
  • synchronization plate 36 ( FIG. 10 ) is employed which is shown disposed on one side of movable valve member 4 in the intermediate space between the outer side surface of the movable valve member and the opposing surface of drive plate 14 .
  • a gap is provided there (gap 35 in FIGS. 9 and 10 ), in which gap the synchronization plate 36 is disposed with some space to spare, allowing plate 36 to operate with some play. Only one such gap 35 and plate 36 is shown, but it is preferable that there be a plate 36 on each side valve member 4 .
  • each roll body 16 extends through and engages a synchronization plate 36 , so that the synchronization plate accommodates and guides the ends of the roll bodies on both sides of movable valve member 4 . This achieves absolute parallel guiding of the two roll bodies 16 on each side of the movable valve member 4 .
  • This synchronization means employing synchronization plates, applies analogously for the embodiment according to FIG. 5 , which (as shown) has twice as many roll bodies. Also for this case, it is provided that the laterally disposed roll bodies extend through and engage the synchronization plate on the front and rear sides, so that here, in the embodiment shown, the front and rear roll bodies are moved in continuous synchrony, via the synchronization plate(s) disposed between said roll bodies.
  • FIG. 4 illustrates another embodiment of the above-described roll body.
  • This roll body 17 may have a groove 25 at one or more locations which groove receives a spring-loading element, such as O-ring 18 .
  • a spring-loading element such as O-ring 18 .
  • recess 19 is provided, the resulting configuration being that O-ring 18 is pressed (lightly) on only one side, namely, that of the support surface 26 .
  • Such a mechanism ensures that that roll body 17 is always urged in one lateral direction, even in the presence of tolerances which may be necessary for manufacturing engineering reasons and which cause a slight play.
  • the arrangement with the O-ring according to FIG. 4 may optionally (but not necessarily) be provided in the embodiment according to FIGS. 5 and 6 .
  • Spring element 20 is provided in that embodiment which, when slightly pre-stressed, urges roll bodies 16 against the corresponding surfaces in slots 6 and 7 .
  • spring element 20 is employed as a detent means 21 for the forward position.
  • the spring element may be in the form of a sheet spring, but other types of spring elements may used, for example, helical springs, plate springs, or ring-shaped plate springs, which also urge the movable valve member 4 against the second movable valve member 5 , or against the drive plate 14 .
  • the use of a second (cooperating) movable valve member 5 has the advantage that when the valve is closed not only is the upper valve opening 2 closed via the seal element 8 but the lower valve opening is also closed via the valve member 5 .
  • the drive means and its associated components are not illustrated because the features of the drive means are not material to the present invention. It is merely specified that forces are applied to the drive plate 14 in the direction of arrow 22 and in the opposite direction in a known manner.
  • FIGS. 8A-8F illustrate in more detail the course of the movement of the two cooperatively (and oppositely) moved slots 6 and 23 . It is seen from FIG. 8A that in the rest position an accommodation opening 32 is formed by the mutually complementary cooperating slots 6 , 23 . This overlap region was described above as being formed from the adjacent end regions 29 , 30 of the respective slots 6 , 23 .
  • slot 23 is moved rightward, until wheel 9 ( FIGS. 1-3 ) passes through the curved region 12 of the guideway slot 3 and into region 11 , whereby movable valve member 4 is raised in the direction of arrow 33 .
  • slot 6 stays unmoved, because the movable valve member 4 can only move upward, in the direction of arrow 33 , while roll body 16 also moves upward in the region of slot 6 and downward in the region of control slot 23 .
  • Control slot 23 has been moved rightward through distance 22 ′ (which may be, for example, about 6 mm), during a period when slot 6 has not been moved in the horizontal direction. However, slot 6 has been moved vertically upward by the distance 33 ′. In the rest position ( FIG. 8A ) and in the final position ( FIG. 8F ), the accommodation opening 32 takes on a circular shape for accommodating roll body 16 or 17 .
  • FIGS. 8A-8F show clearly how the reverse progression, that is, movement of the control slot leftward from the FIG. 8F position, leads to movement of the movable valve member 4 , 5 away from the respective sealing seat. Because the roll bodies are constantly surrounded on all sides in accommodation opening 32 , and are guided by configurational engagement, this movement away from the sealing seat is a continuously forced movement which occurs without play (as was the case with the upward movement in the direction of arrow 33 ).
  • slot 6 in cooperating movable valve member 5 is shown as a slot 7 which has the same function as slot 6 in movable valve member 4 .
  • gap 27 is formed between movable valve member 4 and cooperating movable valve member 5 .
  • FIGS. 5 and 6 shows that one does not need a slot having a part 11 which serves as a detent, but rather spring element 20 can serve as detent 21 .
  • Roll bodies 16 and 17 are protected against falling out in their longitudinal directions by means of external detents 28 which are disposed on drive plate 14 .
  • the invention affords the advantage that the connection between drive plate 14 and movable valve member 4 (also cooperating movable valve member 5 ) is controlled via two cooperating control slots 6 , 23 which have mutually complementary configurations, and via the supporting ends (gudgeon ends) of roll bodies 16 and 17 , so as to achieve a guiding configurational engagement between drive plate 14 and movable valve member 4 , 5 .
  • the slots are all closed laterally, that is, such that roll bodies 16 and 17 cannot exit from the slots, which represents an improvement over the state of the art.
  • FIG. 9 is a perspective view of movable valve member 4 with roll bodies 16 which undergo rolling in slots 23 of drive plate 14 .
  • FIG. 10 illustrates an enlarged detail of FIG. 9 , wherewith synchronizing plate 36 has been added which has two bores 37 which are engaged by roll bodies 16 with a certain support play.
  • the synchronization plate 36 serves to synchronize the movement of parallel roll bodies 16 disposed a mutual distance apart. If and when the position of the frontmost roll body (in the direction of travel) 16 in slots 6 and 23 is changed, rear roll body 16 is carried along, by the intermediary of the synchronization plate 36 .

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Manipulator (AREA)
US11/531,215 2005-09-12 2006-09-12 Valve mechanism for a vacuum valve Active US7341237B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005043595A DE102005043595A1 (de) 2005-09-12 2005-09-12 Ventilmechanik für ein Vakuumventil
DEDE102005043595.5 2005-09-12

Publications (2)

Publication Number Publication Date
US20070057220A1 US20070057220A1 (en) 2007-03-15
US7341237B2 true US7341237B2 (en) 2008-03-11

Family

ID=37496816

Family Applications (1)

Application Number Title Priority Date Filing Date
US11/531,215 Active US7341237B2 (en) 2005-09-12 2006-09-12 Valve mechanism for a vacuum valve

Country Status (5)

Country Link
US (1) US7341237B2 (de)
EP (1) EP1762759B1 (de)
JP (1) JP5208392B2 (de)
AT (1) ATE500452T1 (de)
DE (2) DE102005043595A1 (de)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3056780A1 (de) 2015-02-16 2016-08-17 King Lai Hygienic Materials Co., Ltd. Schieberventil mit sicherem Dichtungsmechanismus
CN105987190A (zh) * 2015-02-15 2016-10-05 新莱应材科技有限公司 具有锁定功能的闸阀
US9464721B2 (en) 2015-02-23 2016-10-11 King Lai Hygienic Material Co., Ltd Gate valve with secure sealing mechanism
RU2659619C2 (ru) * 2016-09-02 2018-07-03 Кинг Лай Гигиеник Материалз Ко., Лтд. Задвижка с надежным запорным механизмом
US20190178390A1 (en) * 2017-12-07 2019-06-13 King Lai Hygienic Materials Co., Ltd Spring free gate valve
US11112012B2 (en) * 2020-01-02 2021-09-07 King Lai Hygienic Materials Co., Ltd Dustproof gate valve
US20220290780A1 (en) * 2019-09-03 2022-09-15 Vat Holding Ag Vacuum valve for loading and/or unloading a vacuum chamber

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI551798B (zh) * 2015-02-06 2016-10-01 新萊應材科技有限公司 具有鎖定功能之閘閥
JP5990612B2 (ja) * 2015-02-27 2016-09-14 新▲莱▼應材科技有限公司 仕切弁
RU2612871C2 (ru) * 2015-04-30 2017-03-13 Кинг Лай Гигиеник Материалз Ко., Лтд. Задвижка с защищенным запорным механизмом
JP6242450B2 (ja) * 2016-08-12 2017-12-06 新▲莱▼應材科技有限公司 仕切弁
EP3538900B1 (de) * 2016-11-08 2022-07-20 O.I. Corporation Intelligenter schieber
CN108150663B (zh) * 2018-01-11 2021-11-02 张跃 一种真空管道闸门
JP2023058273A (ja) * 2021-10-13 2023-04-25 Smc株式会社 ゲートバルブ
TWI835047B (zh) * 2022-01-05 2024-03-11 新萊應材科技有限公司 利用彈力啟閉之閘閥
CN115306915A (zh) * 2022-07-29 2022-11-08 成都中科唯实仪器有限责任公司 一种真空插板阀

Citations (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US681285A (en) * 1900-11-07 1901-08-27 Clemens Wehner Stop-valve.
US983960A (en) * 1910-09-16 1911-02-14 Byron C Leavitt Valve.
US1057308A (en) * 1912-01-20 1913-03-25 Byron C Leavitt Valve.
US2502689A (en) * 1944-08-17 1950-04-04 Crane Co Retractable gate valve
US3973753A (en) * 1974-03-18 1976-08-10 Varian Associates High vacuum gate valve
US4408634A (en) * 1981-11-05 1983-10-11 Hps Corporation Gate stop valve
US4480659A (en) * 1981-11-05 1984-11-06 Hps Corporation Gate stop valve
US4560141A (en) * 1982-06-30 1985-12-24 Siegfried Schertler Vacuum gate valve
US4718637A (en) * 1986-07-02 1988-01-12 Mdc Vacuum Products Corporation High vacuum gate valve having improved metal vacuum joint
US4846441A (en) * 1988-06-20 1989-07-11 Keystone International, Inc. Methods and apparatus for adjusting a valve closure member
US4903937A (en) * 1987-09-24 1990-02-27 Varian Associates, Inc. Isolation valve for vacuum and non-vacuum application
US5722636A (en) * 1996-12-18 1998-03-03 Houston; James L. Double disk gate assembly for block and bleed type valves
US5743296A (en) * 1993-12-08 1998-04-28 Boesch; Hubert Valve mechanism with constraint guide means
US6109167A (en) * 1998-06-04 2000-08-29 Gits Manufacturing Company Actuator with axially movable O-rings between piston and housing
JP2001090849A (ja) 1999-09-22 2001-04-03 V Tex:Kk ゲートバルブの開閉装置
US6431518B1 (en) * 2001-01-11 2002-08-13 Vat Holding Ag Vacuum valve
US6474622B2 (en) * 2001-03-28 2002-11-05 V Tex Corporation Gate valve
US6896239B1 (en) * 2003-04-22 2005-05-24 Arthur J. Brenes Method and apparatus for locking a valve

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE636317C (de) * 1930-10-27 1936-10-06 Dango & Dienenthal Kg Absperrschieber mit parallelen Dichtflaechen
CH402537A (de) * 1961-02-16 1965-11-15 Licentia Gmbh Schieberventil
JPS5650207Y2 (de) * 1972-05-11 1981-11-24
DE2601120A1 (de) * 1976-01-14 1977-07-28 Bergwerksverband Gmbh Zugschieber zum absperren von gasen in rohrleitungen
JP2864234B2 (ja) * 1996-11-22 1999-03-03 株式会社ブイテックス 摩擦の無い動力伝達装置
JP2001021048A (ja) * 1999-06-29 2001-01-26 Varian Inc ランプアクチュエータ機構を有するゲートバルブ
US6612546B2 (en) * 2001-08-01 2003-09-02 Varian, Inc. Gate valve with delayed retraction of counter plate

Patent Citations (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US681285A (en) * 1900-11-07 1901-08-27 Clemens Wehner Stop-valve.
US983960A (en) * 1910-09-16 1911-02-14 Byron C Leavitt Valve.
US1057308A (en) * 1912-01-20 1913-03-25 Byron C Leavitt Valve.
US2502689A (en) * 1944-08-17 1950-04-04 Crane Co Retractable gate valve
US3973753A (en) * 1974-03-18 1976-08-10 Varian Associates High vacuum gate valve
US4408634A (en) * 1981-11-05 1983-10-11 Hps Corporation Gate stop valve
US4480659A (en) * 1981-11-05 1984-11-06 Hps Corporation Gate stop valve
US4560141A (en) * 1982-06-30 1985-12-24 Siegfried Schertler Vacuum gate valve
US4718637A (en) * 1986-07-02 1988-01-12 Mdc Vacuum Products Corporation High vacuum gate valve having improved metal vacuum joint
US4903937A (en) * 1987-09-24 1990-02-27 Varian Associates, Inc. Isolation valve for vacuum and non-vacuum application
US4846441A (en) * 1988-06-20 1989-07-11 Keystone International, Inc. Methods and apparatus for adjusting a valve closure member
US5743296A (en) * 1993-12-08 1998-04-28 Boesch; Hubert Valve mechanism with constraint guide means
EP0662575B1 (de) 1993-12-08 1999-11-03 Hubert Bösch Ventilmechanik mit Zwangsführung
US5722636A (en) * 1996-12-18 1998-03-03 Houston; James L. Double disk gate assembly for block and bleed type valves
US6109167A (en) * 1998-06-04 2000-08-29 Gits Manufacturing Company Actuator with axially movable O-rings between piston and housing
JP2001090849A (ja) 1999-09-22 2001-04-03 V Tex:Kk ゲートバルブの開閉装置
US6431518B1 (en) * 2001-01-11 2002-08-13 Vat Holding Ag Vacuum valve
US6474622B2 (en) * 2001-03-28 2002-11-05 V Tex Corporation Gate valve
US6896239B1 (en) * 2003-04-22 2005-05-24 Arthur J. Brenes Method and apparatus for locking a valve

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105987190A (zh) * 2015-02-15 2016-10-05 新莱应材科技有限公司 具有锁定功能的闸阀
EP3056780A1 (de) 2015-02-16 2016-08-17 King Lai Hygienic Materials Co., Ltd. Schieberventil mit sicherem Dichtungsmechanismus
EP3159587A1 (de) 2015-02-16 2017-04-26 King Lai Hygienic Materials Co., Ltd. Schieberventil mit sicherem dichtungsmechanismus
US9464721B2 (en) 2015-02-23 2016-10-11 King Lai Hygienic Material Co., Ltd Gate valve with secure sealing mechanism
US9982787B2 (en) 2015-02-23 2018-05-29 King Lai Hygienic Materials Co., Ltd. Gate valve with secure sealing mechanism
RU2659619C2 (ru) * 2016-09-02 2018-07-03 Кинг Лай Гигиеник Материалз Ко., Лтд. Задвижка с надежным запорным механизмом
US20190178390A1 (en) * 2017-12-07 2019-06-13 King Lai Hygienic Materials Co., Ltd Spring free gate valve
US20220290780A1 (en) * 2019-09-03 2022-09-15 Vat Holding Ag Vacuum valve for loading and/or unloading a vacuum chamber
US11767931B2 (en) * 2019-09-03 2023-09-26 Vat Holding Ag Vacuum valve for loading and/or unloading a vacuum chamber
US11112012B2 (en) * 2020-01-02 2021-09-07 King Lai Hygienic Materials Co., Ltd Dustproof gate valve

Also Published As

Publication number Publication date
DE502006008980D1 (de) 2011-04-14
JP2007078186A (ja) 2007-03-29
US20070057220A1 (en) 2007-03-15
EP1762759A3 (de) 2008-07-16
ATE500452T1 (de) 2011-03-15
DE102005043595A1 (de) 2007-04-19
EP1762759B1 (de) 2011-03-02
JP5208392B2 (ja) 2013-06-12
EP1762759A2 (de) 2007-03-14

Similar Documents

Publication Publication Date Title
US7341237B2 (en) Valve mechanism for a vacuum valve
EP1721086B1 (de) Bewegungssteuerungsvorrichtung
KR101762986B1 (ko) 진공 밸브
US7575535B2 (en) Friction drive device and transmission using the friction drive device
CN104736875A (zh) 借助外能操纵的线性制动器
US20140183391A1 (en) Vacuum slide gate valve
US4592735A (en) Arrangement of two elements which undergo alternating relative motion and its application of slidable homokinetic joints
KR20180044290A (ko) 진공밸브
CN105442981A (zh) 塞拉门开闭装置和塞拉门设备
US7871061B1 (en) Dual spreading link for gate valves
CN102596767A (zh) 停止装置
US11352223B2 (en) Transport system and transport device
US20030045363A1 (en) Tripod type constant-velocity joint
EP1536152B1 (de) Linearrollenlager mit Zwangsführung
JPS5913118A (ja) 無限直線運動用ころ軸受ユニツト
GB2142096A (en) Linear slide roller bearing unit
CN102619903A (zh) 双向可控制超越离合器
JP5256046B2 (ja) 推力要素を有する運搬装置
CN216895853U (zh) 一种插板阀
USRE34981E (en) Linear motion guide unit having a synchronized retainer
JP2013002625A (ja) 転がり案内装置
EP0913214B1 (de) Presse zum Kalibrieren von Brammen
EP1878956A1 (de) Ventilvorrichtung
WO2023195203A1 (ja) 逆入力遮断クラッチ
JPH08145201A (ja) ゲート弁

Legal Events

Date Code Title Description
STCF Information on status: patent grant

Free format text: PATENTED CASE

FPAY Fee payment

Year of fee payment: 4

FPAY Fee payment

Year of fee payment: 8

MAFP Maintenance fee payment

Free format text: PAYMENT OF MAINTENANCE FEE, 12TH YR, SMALL ENTITY (ORIGINAL EVENT CODE: M2553); ENTITY STATUS OF PATENT OWNER: SMALL ENTITY

Year of fee payment: 12