US6647165B2 - Total internal reflection optical switch utilizing a moving droplet - Google Patents

Total internal reflection optical switch utilizing a moving droplet Download PDF

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Publication number
US6647165B2
US6647165B2 US09/871,486 US87148601A US6647165B2 US 6647165 B2 US6647165 B2 US 6647165B2 US 87148601 A US87148601 A US 87148601A US 6647165 B2 US6647165 B2 US 6647165B2
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Prior art keywords
droplet
trench
gap
waveguide
index
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Expired - Fee Related, expires
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US09/871,486
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US20020181835A1 (en
Inventor
Gongjian Hu
Peter Robrish
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Avago Technologies International Sales Pte Ltd
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Agilent Technologies Inc
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Priority to EP02002173A priority patent/EP1262811B1/de
Priority to EP03023270A priority patent/EP1385036B1/de
Priority to DE60203340T priority patent/DE60203340T2/de
Priority to DE60203383T priority patent/DE60203383T2/de
Priority to JP2002148875A priority patent/JP2003107375A/ja
Publication of US20020181835A1 publication Critical patent/US20020181835A1/en
Publication of US6647165B2 publication Critical patent/US6647165B2/en
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3538—Optical coupling means having switching means based on displacement or deformation of a liquid
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/004—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3576—Temperature or heat actuation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3596—With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate

Definitions

  • the present invention relates to optical switches, and more particularly, to an improved cross-point switching element.
  • Optical fibers provide significantly higher data rates than electronic paths.
  • effective utilization of the greater bandwidth inherent in optical signal paths requires optical cross-connect switches.
  • the switching of signals between optical fibers utilizes an electrical cross-connect switch.
  • the optical signals are first converted to electrical signals. After the electrical signals have been switched, the signals are again converted back to optical signals that are transmitted via the optical fibers.
  • the electrical cross-connect switches utilize highly parallel, and highly costly, switching arrangements. However, even with such parallel architectures, the cross-connect switches remain a bottleneck.
  • optical cross-connect switches have been proposed; however, none of these has successfully filled the need for an inexpensive, reliable, optical cross-connect switch.
  • One class of optical cross-connects depends on wavelength division multiplexing (WDM) to effect the switching.
  • WDM wavelength division multiplexing
  • this type of system requires that the optical signals being switched have different wavelengths.
  • this type of system requires the signals to be converted to the desired wavelength, switched, and then be re-converted to the original wavelength. This conversion process complicates the system and increases the cost.
  • a second type of optical cross-connect utilizes total internal reflection (TIR) switching elements.
  • TIR element consists of a waveguide with a switchable boundary. Light strikes the boundary at an angle. In the first state, the boundary separates two regions having substantially different indices of refraction. In this state, the incident angle is greater than the critical angle of TIR, the light is reflected off of the boundary and thus changes direction. In the second state, the two regions separated by the boundary have the same index of refraction and the light continues in a straight line through the boundary.
  • the critical angle of TIR depends on the difference in the index of refraction of the two regions. To obtain a large change in direction, the region behind the boundary must be switchable between an index of refraction equal to that of the waveguide and an index of refraction that is markedly smaller than that of the waveguide.
  • U.S. Pat. No. 5,204,921 Kanai, et al. describes an optical cross-connect based on an array of cross-points in a waveguide.
  • a groove at each cross-point may be switched “on” or “off,” depending upon whether the groove is filled with an index-matching oil.
  • the index-matching oil has a refractive index close to that of the waveguides.
  • An optical signal transmitted through a waveguide is transmitted through the cross-point when the groove is filled with the matching oil, but the signal changes its direction at the cross-point through total internal reflection when the groove is empty.
  • grooves must be filled or emptied.
  • a “robot” fills and empties the grooves. This type of switch is too slow for many applications of interest.
  • TIR thermo activation to displace liquid from a gap at the intersection of a first optical waveguide and a second optical waveguide.
  • a trench is cut through a waveguide.
  • the trench is filled with an index-matching liquid.
  • a bubble is generated at the cross-point by heating the index matching liquid with a localized heater. The bubble must be removed from the cross-point to switch the cross-point from the reflecting to the transmitting state and thus change the direction of the output optical signal.
  • Switches based on a gas-vapor transition have a number of problems.
  • the present invention is an optical switch constructed from first and second waveguides.
  • the first and second waveguides have ends disposed across a gap such that light traversing the first waveguide enters the second waveguide when the gap is filled with a liquid having a first index of refraction, whereas light traversing the first waveguide is reflected by the gap when the gap is filled with a material having a second index of refraction that is substantially different from the first index of refraction.
  • the gap is part of a trench that contains a liquid droplet made from a droplet material having the first index of refraction. The droplet is located in the trench and is movable between the first and second positions in the trench, the droplet filling the gap in the first position.
  • the gap is filled with a material having the second index of refraction when the droplet is in the second position.
  • the droplet may be moved using an electric field generated by a plurality of electrodes arranged such that an electrical potential applied between a first pair of the electrodes creates an electric field in a region of the trench containing the first position.
  • the droplet can also be moved by differentially heating two edges of the droplet so as to create a net force on the droplet in a direction parallel to the direction of the trench. The heating can be accomplished by illuminating one edge of the droplet with light of a wavelength that is absorbed by the droplet material.
  • FIGS. 1 and 2 are top views of a prior art cross-point switching element 10 having two states.
  • FIG. 3 is a partially exploded perspective view of a portion of a cross-point 10 according to the present invention.
  • FIG. 4 is a top view of a cross-point according to the present invention in the reflecting state.
  • FIG. 5 is a top view of a cross-point according to the present invention in the transmitting state.
  • FIGS. 6-8 are cross-sectional views of the waveguide through line 51 - 52 as shown in FIG. 4 .
  • FIG. 9 is a top cross-sectional view of a trench 101 containing a droplet 102 that moves to match the index of refraction across the gap in waveguide 104 .
  • FIGS. 10 and 11 are side cross-sectional views of trench 101 through line 115 - 116 .
  • FIG. 12 is a cross-sectional view of the trench in another embodiment of the present invention.
  • FIG. 13 is a cross-sectional view of the trench 151 of another embodiment of the present invention.
  • FIGS. 1 and 2 are top views of a prior art cross-point switching element 210 having two states.
  • Switching element 210 is constructed from three waveguides 211 - 213 that are fabricated in a planar lightwave circuit on top of a substrate.
  • the substrate is preferably a silica, but other materials, such as silicon, may be used.
  • the waveguides are defined by two cladding layers and a core layer. To simplify the drawing, the individual layers have been omitted. The fabrication of such waveguides in silica is well known to the art, and hence will not be discussed in detail here. For example, Hitachi Cable and Photonic Integration Research, Inc.
  • the core is primarily SiO 2 doped with another material, such as Ge or TiO 2 .
  • the cladding material is SiO 2 , doped with another material such as B 2 O 3 and/or P 2 O 5 . Because the core material has a refractive index that is different from the refractive index of the cladding layers, optical signals will be guided along waveguides 211 - 213 .
  • a trench 214 is etched through the waveguide and preferably into the silicon substrate.
  • Trench 214 is positioned such that a light signal travelling down waveguide 211 will be reflected into waveguide 213 if the index of refraction of the material filling trench 214 is substantially different from the index of refraction of the waveguides as shown in FIG. 1 .
  • This state of the switching element will be referred to as the “reflecting” state. If, however, the intersection of the trench and the waveguides is filled with a material having an index of refraction that matches that of the core of the waveguides, the light signal will pass through trench 214 and exit via waveguide 212 as shown in FIG. 2 . This state of the switching element will be referred to as the “transmitting” state.
  • the angle at which waveguides 211 and 213 intersect trench 214 depends on the difference in the index of refraction between the waveguide material and the material used to create the reflecting state in the trench.
  • the angles of incidence of the waveguides and the position of the trench are chosen such that light incident on the trench wall from waveguide 211 is totally reflected into waveguide 213 . This angle is typically between 53 and 75 degrees with respect to the normal direction of the trench wall.
  • Waveguide 219 is used to construct cross-connect switches utilizing a two-dimensional array of cross-point switching elements.
  • An array of this type is typically constructed as a plurality of rows and columns of cross-point switching elements. The rows and columns are connected via row and column waveguides.
  • the cross-connect switch connects the signals input on the row waveguides to the column waveguides. The specific switching pattern depends on the state of the switching elements.
  • the index matching material may be displaced from the intersection by forming a bubble 215 at the intersection with the aid of a heating element 216 .
  • Heating element 216 draws power both to vaporize the index matching liquid and to maintain the bubble during the time the cross-point is to remain in the reflective state.
  • the present invention overcomes these problems by utilizing a dielectric droplet of index matching liquid that is moved in the trench by applying electric fields to the droplet. When the fields are removed, the droplet remains at its last position, and hence, the cross-point will maintain its state even if power is removed. In addition, the power consumption of the device is substantially lower than vapor-based bubble systems, since the power source does not have to vaporize the index matching liquid.
  • FIG. 3 is a partially exploded perspective view of a portion of a cross-point 10 according to the present invention.
  • FIGS. 4 and 5 are top views of a cross-point according to the present invention in the reflecting and transmitting states, respectively.
  • the present invention is based on the observation that a droplet of dielectric will move into an electric field.
  • a dielectric droplet 12 is confined to a trench 18 .
  • the transmitting state the droplet is moved such that it covers the waveguide 13 as shown in FIG. 5 .
  • the index of refraction of the droplet is chosen to match that of the waveguide, and hence, light will pass from waveguide 13 to waveguide 14 .
  • the interface between the gas in the trench and the waveguide causes light in the waveguide to be reflected down waveguide 16 .
  • the droplet is moved by applying an AC electric field across a portion of the droplet.
  • the electric field is generated by applying the appropriate potentials across selected one of the electrodes 22 that are deposited on the top of trench cover 23 and the electrodes 21 on the bottom of the trench.
  • a DC electric field can be utilized to move the droplet if the droplet is constructed from a perfect dielectric. Unfortunately, most of the materials that can be used for the droplet have sufficient conductivity to allow ions to move within the droplet. If a DC field is used, these ions will migrate to the surface of the droplet and shield the droplet from the electric field.
  • an AC field that has a polarity that changes in a time that is short compared to the time needed for ions or other carriers to migrate a significant distance within the droplet must be used.
  • a field with a frequency greater than 1 kHz is utilized.
  • FIGS. 6-8 are cross-sectional views of the waveguide through line 51 - 52 shown in FIG. 4 .
  • FIG. 6 illustrates the field pattern used to move droplet 12 into a position at which it causes the waveguide to be transmitting.
  • the droplet is initially to the right of the waveguide.
  • the droplet will experience a force that tends to move the droplet to the left.
  • the electric potentials are removed from the electrodes and the cross-point will remain in the transmitting state as shown in FIG. 7 .
  • the electrodes shown at 31 in FIG. 8 are energized thereby applying a force that moves the droplet to the right.
  • the electrodes are energized in sequence as the droplet moves such that approximately half of the droplet is subjected to the electric field. This arrangement maximizes the force on the droplet, and hence, the speed of the droplet. Once the droplet has moved to the desired final position, the electrodes around the desired position are energized until the droplet's motion ceases. These electrodes are shown at 30 in FIG. 6 .
  • a cross-connect switch can be constructed from an array of cross-points in which a number of the cross-points share the same trench. In this case, it is advantageous to isolate the operation of the cross-points that share a trench. If droplet 12 fills the trench, then its motion will compress the gas on one side of the droplet and reduce the gas pressure on the other side. This pressure differential can cause a droplet in the same trench to move even in the absence of an electric field on that droplet. In addition, the pressure differential inhibits the motion of the droplet, and hence, larger electric fields are needed to move the droplet.
  • the present invention avoids these problems by including an air gap above the droplet as shown at 60 in FIG. 6 . This provides an air passage that prevents a pressure differential from forming across the droplet when the droplet moves.
  • FIG. 9 is a top cross-sectional view of a trench 101 containing a droplet 102 that moves to match the index of refraction across the gap in waveguide 104 .
  • FIGS. 10 and 11 are side cross-sectional views of trench 101 through line 115 - 116 . If the droplet is at a uniform temperature, the surface tension in the surface at the liquid-gas interface 105 is the same as the surface tension at interface 107 .
  • a heating element shown at 106 may be used to heat the droplet edge.
  • a pair of electrodes 108 - 109 can be used to stop the droplet by applying a signal across the electrodes to generate an electric field in the desired region.
  • the electrodes may be viewed as forming the plates of a capacitor in which the droplet is the dielectric.
  • the electric field applies a force to the dielectric that holds the dielectric between the plates of the capacitor. This is the force that moved the droplet in the embodiments discussed above. In those embodiments, the droplet was only part of the way into the capacitor, and hence, the force pulled the remaining distance. In this embodiment, the field traps the droplet. Once the droplet has reached thermal equilibrium, the field can be removed.
  • a second heater 126 can be used to reverse the direction of motion to remove the droplet from the region of the waveguide.
  • a second set of electrodes shown at 129 and 130 can be used to “catch” the droplet and hold it at the reflecting position.
  • FIG. 12 is a cross-sectional view of the trench in another embodiment of the present invention.
  • the motion of droplet 102 is arrested by the stops shown at 132 and 133 .
  • FIG. 13 is a cross-sectional view of the trench 151 of another embodiment of the present invention.
  • the cross-point utilizes a droplet that is constructed from a material that has an absorption band at a control wavelength while remaining clear at the wavelength of the light being transmitted through waveguide 104 .
  • droplet 154 is irradiated with light of the control wavelength from one end, that end of the droplet will be preferentially heated, since the droplet will absorb the light before it reaches the other end of the droplet.
  • the heating can be accomplished by including two small light sources 161 and 162 , one at each end of the trench. LEDs or laser diodes can be utilized for these light sources. In the embodiment shown in FIG. 13, pairs of electrodes shown at 171 and 172 are utilized to trap the droplet at the two positions corresponding to the transmitting and reflecting states of the cross-point.
  • the above-described droplets are generated from a dielectric material that has an index of refraction that matches that of the waveguide.
  • a dielectric material that has an index of refraction that matches that of the waveguide.
  • Such materials are well known in the optical arts, and hence, will not be discussed in detail here. Suitable materials are available from Cargille Laboratories, Inc. Scientific Div. 55 Commerce Rd. Cedar Grove, N.J. 07009-1289. It should be noted that an exact match can be obtained by mixing two different dielectric liquids that have different indices of refraction to obtain a droplet having an index of refraction that is intermediate between the component indices.
  • any dye that is soluble in the droplet material and provides the desired absorption and transmission bands may be utilized. Suitable dyes are available from Aldrich Chemical and Merck.
  • the present invention utilizes a liquid droplet surrounded by a gas.
  • the present invention may be practiced with a vacuum in the trench or with a suspension liquid in the trench provided the liquid has an index of refraction that is sufficiently less than the index of refraction of the liquid in the droplet.
  • the liquid of the droplet must not be soluble in the suspension liquid.
  • the dielectric constant of the liquid of the droplet must be greater than that of the suspension liquid if electric fields are utilized to move the droplet or hold the droplet in place.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
US09/871,486 2001-05-31 2001-05-31 Total internal reflection optical switch utilizing a moving droplet Expired - Fee Related US6647165B2 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
US09/871,486 US6647165B2 (en) 2001-05-31 2001-05-31 Total internal reflection optical switch utilizing a moving droplet
EP02002173A EP1262811B1 (de) 2001-05-31 2002-01-29 Auf Totalreflexion beruhender optischer Schalter mit bewegtem Tropfen
EP03023270A EP1385036B1 (de) 2001-05-31 2002-01-29 Auf Totalreflexion beruhender optischer Schalter mit bewegtem Tropfen
DE60203340T DE60203340T2 (de) 2001-05-31 2002-01-29 Auf Totalreflexion beruhender optischer Schalter mit bewegtem Tropfen
DE60203383T DE60203383T2 (de) 2001-05-31 2002-01-29 Auf Totalreflexion beruhender optischer Schalter mit bewegtem Tropfen
JP2002148875A JP2003107375A (ja) 2001-05-31 2002-05-23 移動する液滴を利用した全内反射光スイッチ

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Application Number Priority Date Filing Date Title
US09/871,486 US6647165B2 (en) 2001-05-31 2001-05-31 Total internal reflection optical switch utilizing a moving droplet

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US20020181835A1 US20020181835A1 (en) 2002-12-05
US6647165B2 true US6647165B2 (en) 2003-11-11

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EP (2) EP1385036B1 (de)
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US6750413B1 (en) * 2003-04-25 2004-06-15 Agilent Technologies, Inc. Liquid metal micro switches using patterned thick film dielectric as channels and a thin ceramic or glass cover plate
US6759610B1 (en) * 2003-06-05 2004-07-06 Agilent Technologies, Inc. Multi-layer assembly of stacked LIMMS devices with liquid metal vias
US6759611B1 (en) * 2003-06-16 2004-07-06 Agilent Technologies, Inc. Fluid-based switches and methods for producing the same
US6768068B1 (en) * 2003-04-14 2004-07-27 Agilent Technologies, Inc. Method and structure for a slug pusher-mode piezoelectrically actuated liquid metal switch
US20040144632A1 (en) * 2003-01-13 2004-07-29 Wong Marvin Glenn Photoimaged channel plate for a switch
US6774325B1 (en) * 2003-04-14 2004-08-10 Agilent Technologies, Inc. Reducing oxides on a switching fluid in a fluid-based switch
US6777630B1 (en) * 2003-04-30 2004-08-17 Agilent Technologies, Inc. Liquid metal micro switches using as channels and heater cavities matching patterned thick film dielectric layers on opposing thin ceramic plates
US6781074B1 (en) * 2003-07-30 2004-08-24 Agilent Technologies, Inc. Preventing corrosion degradation in a fluid-based switch
US6787720B1 (en) * 2003-07-31 2004-09-07 Agilent Technologies, Inc. Gettering agent and method to prevent corrosion in a fluid switch
US6794591B1 (en) * 2003-04-14 2004-09-21 Agilent Technologies, Inc. Fluid-based switches
US20040200707A1 (en) * 2003-04-14 2004-10-14 Wong Marvin Glenn Bent switching fluid cavity
US20040200708A1 (en) * 2003-04-14 2004-10-14 Wong Marvin Glenn Method and structure for a slug assisted pusher-mode piezoelectrically actuated liquid metal optical switch
US6884951B1 (en) * 2003-10-29 2005-04-26 Agilent Technologies, Inc. Fluid-based switches and methods for manufacturing and sealing fluid-based switches
US7447397B1 (en) 2004-06-14 2008-11-04 Dynamic Method Enterprises Limited Optical switch matrix

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US6674933B2 (en) * 2001-09-27 2004-01-06 Agilent Technologies, Inc. Optical switch controlled by selective activation and deactivation of an optical source
KR20070005689A (ko) 2004-04-24 2007-01-10 코닌클리케 필립스 일렉트로닉스 엔.브이. 유체 기반 광학 디바이스, 이 디바이스를 제어하는 방법 및전자 디바이스
ES2261083B1 (es) * 2005-04-26 2007-11-16 Consejo Superior Investi.Cientificas Componentes opticos basados en fluidos u otros medios actuables mediante campos electromagneticos.
DE102006035925B3 (de) * 2006-07-31 2008-02-21 Albert-Ludwigs-Universität Freiburg Vorrichtung und Verfahren zur elektrischen Bewegung von Flüssigkeitstropfen
JP6162465B2 (ja) * 2013-04-22 2017-07-12 浜松ホトニクス株式会社 半導体レーザ装置
US20160116438A1 (en) * 2013-06-14 2016-04-28 Advanced Liquid Logic, Inc. Droplet actuator and methods
DE102018209368B4 (de) 2018-06-12 2020-01-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optik für Sende- und/oder Empfangs-Element, Kommunikationsmodul, Arrays aus Kommunikationsmodulen, System aus mehreren Kommunikationsmodulen und Verfahren zur Herstellung einer Optik
US11733468B2 (en) * 2021-12-08 2023-08-22 Viavi Solutions Inc. Photonic structure using optical heater

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JP2003107375A (ja) 2003-04-09
EP1262811B1 (de) 2005-03-23
EP1385036B1 (de) 2005-03-23
US20020181835A1 (en) 2002-12-05
EP1385036A1 (de) 2004-01-28
DE60203340T2 (de) 2006-02-09
DE60203383D1 (de) 2005-04-28
DE60203383T2 (de) 2006-04-20
DE60203340D1 (de) 2005-04-28
EP1262811A1 (de) 2002-12-04

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