US6647165B2 - Total internal reflection optical switch utilizing a moving droplet - Google Patents

Total internal reflection optical switch utilizing a moving droplet Download PDF

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Publication number
US6647165B2
US6647165B2 US09/871,486 US87148601A US6647165B2 US 6647165 B2 US6647165 B2 US 6647165B2 US 87148601 A US87148601 A US 87148601A US 6647165 B2 US6647165 B2 US 6647165B2
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United States
Prior art keywords
droplet
trench
gap
waveguide
index
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related, expires
Application number
US09/871,486
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English (en)
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US20020181835A1 (en
Inventor
Gongjian Hu
Peter Robrish
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Avago Technologies International Sales Pte Ltd
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Agilent Technologies Inc
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Priority to US09/871,486 priority Critical patent/US6647165B2/en
Assigned to AGILENT TECHNOLOGIES, INC. reassignment AGILENT TECHNOLOGIES, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HU, GONGJIAN, ROBRISH, PETER
Priority to EP02002173A priority patent/EP1262811B1/de
Priority to DE60203340T priority patent/DE60203340T2/de
Priority to EP03023270A priority patent/EP1385036B1/de
Priority to DE60203383T priority patent/DE60203383T2/de
Priority to JP2002148875A priority patent/JP2003107375A/ja
Publication of US20020181835A1 publication Critical patent/US20020181835A1/en
Publication of US6647165B2 publication Critical patent/US6647165B2/en
Application granted granted Critical
Assigned to AVAGO TECHNOLOGIES GENERAL IP PTE. LTD. reassignment AVAGO TECHNOLOGIES GENERAL IP PTE. LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: AGILENT TECHNOLOGIES, INC.
Assigned to AVAGO TECHNOLOGIES FIBER IP (SINGAPORE) PTE. LTD. reassignment AVAGO TECHNOLOGIES FIBER IP (SINGAPORE) PTE. LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD.
Assigned to AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD. reassignment AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD. MERGER (SEE DOCUMENT FOR DETAILS). Assignors: AVAGO TECHNOLOGIES FIBER IP (SINGAPORE) PTE. LTD.
Assigned to AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD. reassignment AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD. CORRECTIVE ASSIGNMENT TO CORRECT THE NAME OF THE ASSIGNEE PREVIOUSLY RECORDED ON REEL 017207 FRAME 0020. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Assignors: AGILENT TECHNOLOGIES, INC.
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Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3538—Optical coupling means having switching means based on displacement or deformation of a liquid
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/004—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3576—Temperature or heat actuation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3596—With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate
US09/871,486 2001-05-31 2001-05-31 Total internal reflection optical switch utilizing a moving droplet Expired - Fee Related US6647165B2 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
US09/871,486 US6647165B2 (en) 2001-05-31 2001-05-31 Total internal reflection optical switch utilizing a moving droplet
EP02002173A EP1262811B1 (de) 2001-05-31 2002-01-29 Auf Totalreflexion beruhender optischer Schalter mit bewegtem Tropfen
DE60203340T DE60203340T2 (de) 2001-05-31 2002-01-29 Auf Totalreflexion beruhender optischer Schalter mit bewegtem Tropfen
EP03023270A EP1385036B1 (de) 2001-05-31 2002-01-29 Auf Totalreflexion beruhender optischer Schalter mit bewegtem Tropfen
DE60203383T DE60203383T2 (de) 2001-05-31 2002-01-29 Auf Totalreflexion beruhender optischer Schalter mit bewegtem Tropfen
JP2002148875A JP2003107375A (ja) 2001-05-31 2002-05-23 移動する液滴を利用した全内反射光スイッチ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/871,486 US6647165B2 (en) 2001-05-31 2001-05-31 Total internal reflection optical switch utilizing a moving droplet

Publications (2)

Publication Number Publication Date
US20020181835A1 US20020181835A1 (en) 2002-12-05
US6647165B2 true US6647165B2 (en) 2003-11-11

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Family Applications (1)

Application Number Title Priority Date Filing Date
US09/871,486 Expired - Fee Related US6647165B2 (en) 2001-05-31 2001-05-31 Total internal reflection optical switch utilizing a moving droplet

Country Status (4)

Country Link
US (1) US6647165B2 (de)
EP (2) EP1385036B1 (de)
JP (1) JP2003107375A (de)
DE (2) DE60203340T2 (de)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6750413B1 (en) * 2003-04-25 2004-06-15 Agilent Technologies, Inc. Liquid metal micro switches using patterned thick film dielectric as channels and a thin ceramic or glass cover plate
US6759611B1 (en) * 2003-06-16 2004-07-06 Agilent Technologies, Inc. Fluid-based switches and methods for producing the same
US6759610B1 (en) * 2003-06-05 2004-07-06 Agilent Technologies, Inc. Multi-layer assembly of stacked LIMMS devices with liquid metal vias
US6768068B1 (en) * 2003-04-14 2004-07-27 Agilent Technologies, Inc. Method and structure for a slug pusher-mode piezoelectrically actuated liquid metal switch
US20040144632A1 (en) * 2003-01-13 2004-07-29 Wong Marvin Glenn Photoimaged channel plate for a switch
US6774325B1 (en) * 2003-04-14 2004-08-10 Agilent Technologies, Inc. Reducing oxides on a switching fluid in a fluid-based switch
US6777630B1 (en) * 2003-04-30 2004-08-17 Agilent Technologies, Inc. Liquid metal micro switches using as channels and heater cavities matching patterned thick film dielectric layers on opposing thin ceramic plates
US6781074B1 (en) * 2003-07-30 2004-08-24 Agilent Technologies, Inc. Preventing corrosion degradation in a fluid-based switch
US6787720B1 (en) * 2003-07-31 2004-09-07 Agilent Technologies, Inc. Gettering agent and method to prevent corrosion in a fluid switch
US6794591B1 (en) * 2003-04-14 2004-09-21 Agilent Technologies, Inc. Fluid-based switches
US20040200707A1 (en) * 2003-04-14 2004-10-14 Wong Marvin Glenn Bent switching fluid cavity
US20040200708A1 (en) * 2003-04-14 2004-10-14 Wong Marvin Glenn Method and structure for a slug assisted pusher-mode piezoelectrically actuated liquid metal optical switch
US6884951B1 (en) * 2003-10-29 2005-04-26 Agilent Technologies, Inc. Fluid-based switches and methods for manufacturing and sealing fluid-based switches
US7447397B1 (en) 2004-06-14 2008-11-04 Dynamic Method Enterprises Limited Optical switch matrix

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6674933B2 (en) * 2001-09-27 2004-01-06 Agilent Technologies, Inc. Optical switch controlled by selective activation and deactivation of an optical source
JP2007534985A (ja) 2004-04-24 2007-11-29 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 液体型光学装置、その制御方法及び電子装置
ES2261083B1 (es) * 2005-04-26 2007-11-16 Consejo Superior Investi.Cientificas Componentes opticos basados en fluidos u otros medios actuables mediante campos electromagneticos.
DE102006035925B3 (de) * 2006-07-31 2008-02-21 Albert-Ludwigs-Universität Freiburg Vorrichtung und Verfahren zur elektrischen Bewegung von Flüssigkeitstropfen
JP6162465B2 (ja) * 2013-04-22 2017-07-12 浜松ホトニクス株式会社 半導体レーザ装置
WO2014201341A1 (en) * 2013-06-14 2014-12-18 Advanced Liquid Logic, Inc. Droplet actuator and methods

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE203409C (de) *
US4384761A (en) * 1980-06-30 1983-05-24 International Business Machines Corporation Ferrofluid optical switches
US4505539A (en) * 1981-09-30 1985-03-19 Siemens Aktiengesellschaft Optical device or switch for controlling radiation conducted in an optical waveguide
US4988157A (en) 1990-03-08 1991-01-29 Bell Communications Research, Inc. Optical switch using bubbles
US5204921A (en) 1991-01-08 1993-04-20 Nippon Telegraph And Telephone Corporation Automated optical main distributing frame system
US5699462A (en) 1996-06-14 1997-12-16 Hewlett-Packard Company Total internal reflection optical switches employing thermal activation
US5732168A (en) * 1995-10-31 1998-03-24 Hewlett Packard Company Thermal optical switches for light
EP0938013A2 (de) 1998-02-18 1999-08-25 Hewlett-Packard Company Herstellung von optischen Schaltern mit innerer Totalreflektion mit flüssigkeitsgefüllten vertikalen Löchern
US6072924A (en) 1996-09-02 2000-06-06 Nippon Telegraph And Telephone Corporation Optical switch and method for assembling the same
US6195478B1 (en) 1998-02-04 2001-02-27 Agilent Technologies, Inc. Planar lightwave circuit-based optical switches using micromirrors in trenches
EP1111419A1 (de) 1999-12-22 2001-06-27 Agilent Technologies Inc Ein verbesserter, auf interner Totalreflexion beruhender optischer Schalter

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE203409C (de) *
US4384761A (en) * 1980-06-30 1983-05-24 International Business Machines Corporation Ferrofluid optical switches
US4505539A (en) * 1981-09-30 1985-03-19 Siemens Aktiengesellschaft Optical device or switch for controlling radiation conducted in an optical waveguide
US4988157A (en) 1990-03-08 1991-01-29 Bell Communications Research, Inc. Optical switch using bubbles
US5204921A (en) 1991-01-08 1993-04-20 Nippon Telegraph And Telephone Corporation Automated optical main distributing frame system
US5732168A (en) * 1995-10-31 1998-03-24 Hewlett Packard Company Thermal optical switches for light
US5699462A (en) 1996-06-14 1997-12-16 Hewlett-Packard Company Total internal reflection optical switches employing thermal activation
US6072924A (en) 1996-09-02 2000-06-06 Nippon Telegraph And Telephone Corporation Optical switch and method for assembling the same
US6195478B1 (en) 1998-02-04 2001-02-27 Agilent Technologies, Inc. Planar lightwave circuit-based optical switches using micromirrors in trenches
EP0938013A2 (de) 1998-02-18 1999-08-25 Hewlett-Packard Company Herstellung von optischen Schaltern mit innerer Totalreflektion mit flüssigkeitsgefüllten vertikalen Löchern
EP1111419A1 (de) 1999-12-22 2001-06-27 Agilent Technologies Inc Ein verbesserter, auf interner Totalreflexion beruhender optischer Schalter

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Syklarov, O.K., "A Two-Position Lightguide Optical Switch", 1298 Telecommunications and Radio Engineering, 48(1993), Jul., No. 7, New York, pp. 1-3.

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040144632A1 (en) * 2003-01-13 2004-07-29 Wong Marvin Glenn Photoimaged channel plate for a switch
US7098413B2 (en) 2003-01-13 2006-08-29 Agilent Technologies, Inc. Photoimaged channel plate for a switch, and method for making a switch using same
US6897387B2 (en) * 2003-01-13 2005-05-24 Agilent Technologies, Inc. Photoimaged channel plate for a switch
US20040200707A1 (en) * 2003-04-14 2004-10-14 Wong Marvin Glenn Bent switching fluid cavity
US6818844B2 (en) * 2003-04-14 2004-11-16 Agilent Technologies, Inc. Method and structure for a slug assisted pusher-mode piezoelectrically actuated liquid metal optical switch
US6774325B1 (en) * 2003-04-14 2004-08-10 Agilent Technologies, Inc. Reducing oxides on a switching fluid in a fluid-based switch
US6768068B1 (en) * 2003-04-14 2004-07-27 Agilent Technologies, Inc. Method and structure for a slug pusher-mode piezoelectrically actuated liquid metal switch
US6841746B2 (en) * 2003-04-14 2005-01-11 Agilent Technologies, Inc. Bent switching fluid cavity
US6794591B1 (en) * 2003-04-14 2004-09-21 Agilent Technologies, Inc. Fluid-based switches
US20040200708A1 (en) * 2003-04-14 2004-10-14 Wong Marvin Glenn Method and structure for a slug assisted pusher-mode piezoelectrically actuated liquid metal optical switch
US6750413B1 (en) * 2003-04-25 2004-06-15 Agilent Technologies, Inc. Liquid metal micro switches using patterned thick film dielectric as channels and a thin ceramic or glass cover plate
US6777630B1 (en) * 2003-04-30 2004-08-17 Agilent Technologies, Inc. Liquid metal micro switches using as channels and heater cavities matching patterned thick film dielectric layers on opposing thin ceramic plates
US6759610B1 (en) * 2003-06-05 2004-07-06 Agilent Technologies, Inc. Multi-layer assembly of stacked LIMMS devices with liquid metal vias
US6759611B1 (en) * 2003-06-16 2004-07-06 Agilent Technologies, Inc. Fluid-based switches and methods for producing the same
US6781074B1 (en) * 2003-07-30 2004-08-24 Agilent Technologies, Inc. Preventing corrosion degradation in a fluid-based switch
US6787720B1 (en) * 2003-07-31 2004-09-07 Agilent Technologies, Inc. Gettering agent and method to prevent corrosion in a fluid switch
US6884951B1 (en) * 2003-10-29 2005-04-26 Agilent Technologies, Inc. Fluid-based switches and methods for manufacturing and sealing fluid-based switches
US20050092587A1 (en) * 2003-10-29 2005-05-05 Wong Marvin G. Fluid-based switches and methods for manufacturing and sealing fluid-based switches
US7447397B1 (en) 2004-06-14 2008-11-04 Dynamic Method Enterprises Limited Optical switch matrix
US20090028499A1 (en) * 2004-06-14 2009-01-29 Maki Jeffery J Optical Switch Matrix

Also Published As

Publication number Publication date
DE60203340T2 (de) 2006-02-09
EP1262811A1 (de) 2002-12-04
EP1385036B1 (de) 2005-03-23
US20020181835A1 (en) 2002-12-05
DE60203383D1 (de) 2005-04-28
EP1385036A1 (de) 2004-01-28
EP1262811B1 (de) 2005-03-23
JP2003107375A (ja) 2003-04-09
DE60203383T2 (de) 2006-04-20
DE60203340D1 (de) 2005-04-28

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Owner name: AGILENT TECHNOLOGIES, INC., COLORADO

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:HU, GONGJIAN;ROBRISH, PETER;REEL/FRAME:012147/0024

Effective date: 20010530

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Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:AGILENT TECHNOLOGIES, INC.;REEL/FRAME:017207/0020

Effective date: 20051201

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Effective date: 20051201