US6158136A - Coordinate measuring apparatus with user assist - Google Patents

Coordinate measuring apparatus with user assist Download PDF

Info

Publication number
US6158136A
US6158136A US09/264,413 US26441399A US6158136A US 6158136 A US6158136 A US 6158136A US 26441399 A US26441399 A US 26441399A US 6158136 A US6158136 A US 6158136A
Authority
US
United States
Prior art keywords
probe
control element
measuring apparatus
force
coordinate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US09/264,413
Other languages
English (en)
Inventor
Klaus-Dieter Gotz
Otto Ruck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss Industrielle Messtechnik GmbH
Original Assignee
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss AG filed Critical Carl Zeiss AG
Assigned to CARL-ZEISS-STIFTUNG HEIDENHEIM/BRENZ reassignment CARL-ZEISS-STIFTUNG HEIDENHEIM/BRENZ ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: RUCK, OTTO, GOETZ, KLAUS-DIETER
Application granted granted Critical
Publication of US6158136A publication Critical patent/US6158136A/en
Assigned to CARL ZEISS INDUSTRIELLE MESSTECHNIK GMBH reassignment CARL ZEISS INDUSTRIELLE MESSTECHNIK GMBH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: CARL ZEISS STIFTUNG, HEIDENHEIM
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B3/00—Measuring instruments characterised by the use of mechanical techniques
    • G01B3/002—Details
    • G01B3/008—Arrangements for controlling the measuring force
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/047—Accessories, e.g. for positioning, for tool-setting, for measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines

Definitions

  • the invention relates to a coordinate measuring apparatus having at least one probe unit for contacting a workpiece to be measured and a mechanical assembly via which the probe unit can be moved in the three coordinate directions.
  • the apparatus further has several drives via which the mechanical assembly for moving the probe unit can be driven and at least one manually actuable control element with which the drives can be controlled.
  • a coordinate measuring apparatus of the above kind is, for example, disclosed in European patent publication 0,252,212 and includes a portal-shaped mechanical assembly.
  • This mechanical assembly includes a portal which extends over a measuring table on which the workpiece to be measured is mounted.
  • the portal can be driven by a corresponding drive in a first coordinate direction relative to the measurement table.
  • the portal-shaped mechanical assembly additionally includes a transverse carriage in the region of the portal spanning the measurement table.
  • the transverse carriage can be moved by a further drive along the spanned region of the portal in a second coordinate direction.
  • a probe shaft is, in turn, movable in a vertical direction (that is, the third coordinate direction) by a third drive.
  • a probe unit is provided at the end of the probe shaft for contacting a workpiece placed on the measurement or workpiece table.
  • a control element is provided for controlling the coordinate measuring apparatus. With this control element, the corresponding drives in the mechanical assembly shown can be controlled so that, in this way, the probe unit can be moved in all three coordinate directions.
  • the coordinate measuring apparatus shown has the following special features.
  • the return force of the control element is developed by springs when the control element is deflected from its rest position.
  • the springs pull the control element back to its rest position and the return force is always proportional to the deflected path. In this way, it is possible for the operator to deflect the control element to any extent desired.
  • the corresponding speed of the drive for the mechanical assembly in the particular coordinate measuring apparatus is usually pregiven proportional to the deflection from its rest position. For this reason, it is easily possible for the operator to generate high startup movement accelerations or braking decelerations which can lead to a rapid wear of the mechanical assembly and even to a destruction thereof.
  • the probe can be destroyed when contacting a workpiece when utilizing very fine probe pins. This is so because the operator can effortlessly actuate the control element without realizing the forces acting on the probe.
  • the coordinate measuring apparatus of the invention is for measuring a workpiece in accordance with a measuring sequence.
  • the apparatus includes: a probe unit for scanning the workpiece; a mechanical assembly for moving the probe unit in three coordinate directions (X, Y, Z); a plurality of drives for driving mechanical assembly to move the probe unit; a manually actuable control element for controlling the drives; and, a force unit for superposing a force onto the control element in correspondence to specific conditions in the measuring sequence.
  • the special basic idea of the invention is seen in that a force can be superposed on the control element by a force unit in correspondence to specific conditions in the course of the measurement.
  • the special advantage is afforded that the specific conditions in the course of measurement are reflected to the control element so as to be perceivable by the operator. The operator can then be guided during the control of the control element directly via the force superposed on the control element when operating the coordinate measuring apparatus.
  • the coordinate measuring apparatus is in no way limited to the embodiments described hereinafter, but rather can assume completely different configurations.
  • the probe unit referred to can be any desired sensor with which a workpiece can be scanned. Accordingly, the following can be, for example, provided: optical probe heads, measuring probe heads with corresponding probes, switching probe heads having corresponding probes, et cetera.
  • the mechanical assembly can be any desired mechanical assembly.
  • any desired configuration of the coordinate measuring apparatus can be used.
  • a stand configuration is possible wherein a vertically aligned stand can be moved along the measuring table in a first coordinate direction.
  • a so-called cross slide can be guided vertically in a second coordinate direction and, on this transverse slide, a measuring arm can be guided so as to be horizontally movable in the third coordinate direction.
  • the probe unit can be attached to the end of this measuring arm.
  • the drives for driving the mechanical assembly can also be differently configured.
  • the drive can be a so-called friction wheel drive wherein a friction wheel is driven by an electric motor and is supported on a running surface coacting therewith.
  • spindle drives, rack-and-pinion drives, et cetera can also be used.
  • control elements can be considered for the control elements.
  • control elements can be had wherein the shift of the mechanical assembly in the particular coordinate direction is proportional to the displacement of the control element.
  • a handwheel having a rotation transducer mounted thereon or a slider with a device for measuring the slider position can be provided with the slider being displaceable linearly.
  • the mechanical assembly can be moved in the particular coordinate direction in dependence upon the rotation position of the rotational transducer or of the slider.
  • control element In another variation of the control element, the speed or even the acceleration of the mechanical assembly is adjusted in the particular coordinate direction proportionally to the deflection of the control element out of its rest position.
  • the characteristic of such control elements is that they are conventionally pulled back to their neutral position by corresponding return elements.
  • Control elements of this kind are, for example, control levers which are configured as joysticks customary for present-day computers or as handwheels which are connected to corresponding rotation transducers and are always pulled back to a defined angular position via corresponding return elements.
  • force also includes the torque, for example, on a handwheel, because a force is also required to generate a torque. In the simplest case, this can take place with an electric motor which superposes a torque onto the control element in correspondence with the desired force.
  • pneumatics are also conceivable with which the force is generated by superposing a corresponding pressure.
  • pneumatics are also conceivable with which the force is generated by superposing a corresponding pressure.
  • two pneumatic cylinders are conceivable with each cylinder being connected via a cable to the shaft of the handwheel.
  • the cable or rope of one cylinder can be wound on a disc in a first rotational direction and be attached to the disc with its end.
  • the disc can be correspondingly connected to the shaft.
  • the cable of the second cylinder would be wound on a second disc connected to the shaft in another rotational direction and be attached with its end.
  • the corresponding cylinder can then be charged with a corresponding air pressure.
  • the control elements are operatively connected to a functional assembly group which, on the one hand, further processes signals coming from the rotational transducers of the control elements and, on the other hand, controls the superposition of force onto the control elements.
  • This functional assembly group can be a self-contained element in the form of, for example, a controller or can comprise a plurality of individual elements which can possibly be disposed in the control or in the computer of the coordinate measuring apparatus.
  • the force is superposed on the control element in proportion to the acceleration of the mechanical assembly in the particular coordinate direction.
  • the operator of the coordinate measuring apparatus can perceive how high the acceleration is which the operator has adjusted so that, at high accelerations, the operator has a certain feel for this acceleration whether these accelerations are startup, travel accelerations or braking decelerations.
  • the force can be selected to be approximately proportional to the mass inertial force occurring with the acceleration of the mechanical assembly.
  • this affords the advantage that a feel for the corresponding mass inertial forces is also provided.
  • a coordinate measuring apparatus of the portal type this means, for example, that the movement of the light probe shaft in the vertical direction is considerably less critical than the movement of the entire portal in the horizontal coordinate direction. This is so because the portal with the transverse carriage, the probe shaft and the probe unit of course has considerably more mass than the probe shaft with the probe unit attached thereto so that the mass inertial forces are considerably different for the same acceleration.
  • the force which is to be superposed on the control element, can be determined in that, for example, the acceleration of the mechanical assembly in the coordinate directions is measured, for example, from the corresponding signals of the drives or from an acceleration sensor mounted in the region of the probe unit and, as required, is multiplied by the masses of the mechanical assembly. These masses are those which are to be accelerated in the particular coordinate direction.
  • the acceleration and braking performance of the mechanical assembly of the coordinate measuring apparatus can be simulated by a corresponding differential equation in the particular functional assembly group so that no data need be recorded with respect to the actual acceleration of the mechanical assembly or the probe unit.
  • the acceleration or the mass inertial force can even be simulated in the simplest way without any computation for a control element wherein the displacement of the mechanical assembly in the particular coordinate direction is proportional to the displacement of the control element.
  • This is done in that the control element is directly coupled to a mass to be accelerated (a flywheel mass) which is accelerated with the actuation of the control element and therefore works as a force unit.
  • a mass to be accelerated a flywheel mass
  • the mass can either be rigidly connected to the control element or be connected via a gear assembly to the control element.
  • the mass can, for example, be a disc which is attached to the shaft of the handwheel.
  • this mass can be moved either linearly (in that a gear wheel is attached to the shaft of the handwheel which engages in a corresponding toothed rack on which the mass is attached) or the mass is rotated whereby the gear wheel, which is attached to the shaft of the handwheel, engages in a corresponding gear wheel connected to a flywheel mass.
  • the superposition of the forces onto the control elements can also be used in order to encourage the operator of the coordinate measuring apparatus in a simple manner to move the probe unit in a desired direction deviating preferably from the coordinate directions.
  • usually at least one control element or two control elements are provided with which the probe unit can be controlled in at least two different coordinate directions.
  • the force is then so superposed on the control element(s) that at least one preferred direction results in which the control element(s) is preferably actuated.
  • the preferred direction is used to make a movement of the probe unit possible in at least one defined traveling direction.
  • the function assembly group superposes the force on the control element(s) in correspondence to the deflection in such a manner that a constant ratio between the deflections of the control element(s) for the different coordinate directions results corresponding to the preferred direction.
  • optical probe heads can be attached in coordinate measuring apparatus to a so-called rotational pivot unit.
  • the rotational pivot unit can then align the optical probe head in space as desired.
  • the workpiece surface of the workpiece to be scanned is not in the measuring region of the scanning beam during manual operation of the coordinate measuring apparatus so that the probe head must be moved to the workpiece surface or away from the workpiece surface along the probe beam which is possibly aligned inclined in space.
  • a preferred direction is worked with in order to make possible a traveling direction of the probe unit which deviates from the coordinate directions of the coordinate measuring system of the machine.
  • This second possibility of use can result when the workpiece coordinate system is rotated relative to the machine coordinate system.
  • coordinate measuring apparatus can only be driven in the coordinate directions (X, Y, Z), that is, in the machine coordinate system. Often, it is, however, necessary to move the probe not exactly parallel to the coordinate directions but in other respective directions.
  • a cube which is tipped at one of its side edges by 30° and one would like to move precisely parallel to the side surfaces of the cube when operating the control element.
  • the probe unit can be moved correspondingly to the tilted workpiece coordinate system when operating the control elements in the corresponding direction.
  • the preferred direction is then so selected that the probe unit can travel along the axes of a coordinate system (the workpiece coordinate system) rotated relative to the coordinate directions pregiven by the mechanical assembly.
  • the operator is guided during scanning.
  • the problem can, for example, occur that the user has contacted the workpiece at locations which are accessed only with difficulty. For this reason, the probe has been lifted up out of its bearing location and the user cannot tell which is the correct direction in order to lift the probe again from the workpiece surface. In the worst case, this can lead to a breakage of the probe when the probe, for example, is in a bore.
  • the situation described below can occur in another embodiment having a preferred direction for which a measuring probe head is used in the coordinate measuring apparatus.
  • the coordinate measuring apparatus switches over to a control mechanism which applies a defined measuring force on the workpiece surface in the scanning direction.
  • the measuring force is either applied by electromagnetic linear motors or via spring forces which are generated via corresponding springs in the probe head by the deflection of the probe relative to the probe head. In this way, the probe head therefore always applies a defined force on the workpiece surface in the scanning direction.
  • a first configuration of this third embodiment could comprise that, for a coordinate measuring apparatus (wherein a switching probe head having a probe is used as a probe unit), a so-called pressure point is generated as a stop by superposing the forces onto the control elements. This pressure point indicates to the operator of the coordinate measuring apparatus when the optimal scanning speed is reached for the particular probe.
  • a slight deviation can be superposed on the control element in the scanning direction which shows the operator in which direction the workpiece surface has been contacted.
  • the control coordinate apparatus is in a control loop in the particular direction and the deviation of the control element in the particular direction therefore remains without effect. For this reason, this particular deflection is not a hindrance.
  • a light tapping on the control lever can draw attention to a control element which the operator of the coordinate measuring apparatus would like to move but for which the movement should not be possible.
  • FIG. 1 is a schematic perspective view of a coordinate measuring apparatus of the portal type which can be controlled via control elements (11, 12);
  • FIG. 2 shows a control element in the form of an actuating lever for use as control element (11) in the subsequent circuits
  • FIG. 3 is a control element (32) having a handwheel (47) for use in subsequent circuits and is an alternative to the control element (11) of FIG. 2;
  • FIG. 4 is a block diagram of a control unit for a coordinate measuring apparatus wherein a force proportional to the mass inertial force of the moved mechanical assembly is superposed on the control elements (11, 12);
  • FIG. 5 is a schematic of a control element modified with respect to FIG. 3 and which is especially provided for use in a circuit according to FIG. 4; and, FIGS. 6 to 9 show different circuits for coordinate measuring apparatus wherein a preferred direction is set when operating at least one control element.
  • FIG. 1 shows a coordinate measuring apparatus according to the invention.
  • a workpiece 15 to be measured is disposed on a pallet 16 which, in turn, is clamped to a measuring table 1 of the coordinate measuring apparatus.
  • a probe unit 34 is movably guided on a mechanical assembly 33.
  • the probe unit 34 includes a probe head 5 and a probe 6.
  • the mechanical assembly 33 is exemplary and includes a portal 2, a transverse carriage 3 and a probe shaft 4.
  • the portal 2 is movable in a first coordinate direction along arrow y via corresponding guides on the measuring table 1.
  • the portal 2 is movably journalled via corresponding bearings (not shown) and can be moved in the direction of the arrow y via a corresponding wheel drive which is supported on the measuring table 1.
  • an optical probe is provided in the portal 2 and scans an incremental scale 9.
  • the transverse carriage 3 is movably journalled on the part of the portal 2 which spans the measuring table 1 in a second coordinate direction identified by x.
  • a friction wheel drive is provided for movement in the direction of arrow x and an optical probe scans the precise position of the incremental scale 7 in the direction of arrow x.
  • the probe shaft 4 is movably journalled in the direction of arrow z in the third coordinate direction. Corresponding drives can drive the probe shaft 4 in the direction of arrow z.
  • An optical probe is likewise arranged in the transverse carriage and scans the precise position of the scale 8.
  • a coordinate measuring apparatus configured in this manner is usually controlled via data.
  • the probe head 5 is so driven by the mechanical assembly 33 that the probe 6 contacts the workpiece to be measured at corresponding points pregiven by the data.
  • the control of the drives of the mechanical assembly 33 can however take place via the shown control elements (11, 12) which are here shown exemplary on a control panel 10.
  • the control panel 10 can be moved via a movable roller-mounted support 14 in the region of the coordinate measuring apparatus.
  • the control panel 10 is operatively connected to the control 13 which constitutes the connecting member to the drives and sensors of the coordinate measuring apparatus.
  • An evaluation computer 17 is additionally connected to the control 13.
  • the drives of the mechanical assembly 33 can be controlled by the manually actuable control elements (11, 12) as described above.
  • the control elements (11, 12) are so configured that forces can be superposed thereon by a force unit in correspondence to specific characteristics during the measurement sequence. This will be explained in detail with respect to FIGS. 2 and 3.
  • FIG. 2 shows a control element 11 according to FIG. 1.
  • the control element includes a joystick or rod-like handle 35 having a lower end which is guided through respective slots 45 and 46 of two rotatably journalled elements (36, 37).
  • the rotatably journalled elements (36, 37) are rotatably movably suspended about the rotational axes (47, 48).
  • the lower end of the control rod 35 is likewise movably accommodated so that, for a deflection of the control rod 35 from its rest position, the elements (36, 37) are rotated about the axes (47, 48) so that the rotation transducers (43, 44) detect a corresponding rotation of the elements (36 or 37) and output a corresponding signal to the control of the coordinate measuring apparatus.
  • the rotational transducers (43, 44) are configured as electrical potentiometers but can also be configured differently, for example, as optically operating rotational-angle measurement devices.
  • the control rod 35 is additionally always pulled into the rest position shown in FIG. 2 via springs which are not shown in greater detail.
  • gear wheels (41, 42) are mounted at the other ends of the elements (36, 37) in the region of the rotational axes (47, 48).
  • the above-mentioned force units are in the form of electric motors (39, 40) and engage in the gear wheels (41, 42) via gear wheels mounted on the electric motors.
  • a voltage is applied to the electric motors (39, 40) by a function assembly group which is here configured exemplary as controller 22 which will be explained in greater detail hereinafter. With the voltage, the corresponding torque of the electric motors (39, 40) is transmitted via the gear wheels (41, 42) and the elements (36, 37) to the control lever 35.
  • FIG. 3 shows an alternate control element 32 which is likewise used often to operate coordinate measuring apparatus.
  • the control element includes a handwheel 47 which is connected via shafts (51a, 51b) to an electric motor 49 and a rotation transducer 48.
  • the handwheel 47 is provided for manual actuation and the electric motor functions as a force unit.
  • the control element 32 additionally has a friction clutch 50 to prevent an over-rotation in the end stop position and therefore damage to the rotation transducer 48.
  • the friction clutch connects the two shaft halves (51a, 51b) via a ring to each other.
  • the ring is connected friction-tight to the end of shaft half 51a as well as to the end of shaft half 51b.
  • the actual position of the handwheel 47 is read out via the rotation transducer 48 in the same manner as in the control element shown in FIG. 3; whereas, a force can be superposed via the electric motor 49 onto the control element in correspondence to the specific characteristics in the measuring sequence.
  • the control element of FIG. 3 is distinguished by the fact that a rotatable handwheel 47 is used as an input medium and especially by the fact that this is a control element wherein the mechanical assembly 33 of the coordinate measuring apparatus is moved in the corresponding coordinate direction proportional to the rotational position of the handwheel. This is in contrast to the control element of FIG. 2 wherein the control element pregives a speed in the corresponding coordinate direction in correspondence to the deflection of the control rod 35.
  • FIG. 4 A first embodiment of the control circuit for a coordinate measuring apparatus is shown in FIG. 4.
  • the probe unit 34 must be moved correspondingly in the coordinate directions (X, Y, Z) for contacting a workpiece 15 so that the probe 6 contacts the surface of the workpiece 15.
  • a signal here identified by Vx, Vy, Vz
  • the controller 22 serves as an electronic interface between the control elements (11, 12) as well as the control 13 of the coordinate measuring apparatus.
  • the controller 22 receives the signals (Vx, Vy, Vz) supplied by the transducers of the control elements and converts these signals into corresponding signals which are identified for the sake of simplicity also by (Vx, Vy, Vz). These converted signals (Vx, Vy, Vz) are transmitted to the control 13.
  • control 13 is connected only via schematically shown lines to the controller 22.
  • the connection of the controller 22 to the control is realized via logic data channels, for example, a LAN connection or an interface RS232.
  • the control derives signals (Xs, Ys, Zs) based on the signals (Vx, Vy, Vz).
  • the drives 18 of the mechanical assembly are driven and the mechanical assembly 33 of the coordinate measuring apparatus is correspondingly driven in the coordinate directions.
  • the actual position of the probe unit 34 (the so-called apparatus position Xm, Ym, Zm) is determined via optical probe heads as described above. These optical probe heads scan corresponding scales (7, 8, 9) in the three coordinate directions.
  • the measuring devices are identified by reference numeral 19 and are referred to as position measuring devices.
  • the probe unit 34 is configured as a measuring probe head 5 by way of example.
  • the probe 6 can be continuously deflected relative to the probe head 5 in all three coordinate directions.
  • the deflection of the probe 6 relative to the probe head 5 is detected by measurement value detection devices 20 which detect the deflection of the probe 6 in each of the three coordinate directions.
  • the particular measured deflection in the three coordinate directions is identified by (XT, YT, ZT) as probe deflection.
  • the probe head includes so-called measurement force generators 21 which can superpose a defined measuring force onto the probe 6 in correspondence to an input F des .
  • the item of special interest in the coordinate measuring apparatus shown in FIG. 4 is seen in that the control elements known until now functioned completely independently of the mass inertial forces which occur with the acceleration of the individual parts of the mechanical assembly 33. If the operator therefore makes rapid changes of the control elements (11, 12) to move the probe unit 34, then this can have the consequence that the resulting high accelerations cause deformations or even destruction of the mechanical assembly 33.
  • the force with which the control elements (11, 12) is charged is selected approximately proportional to the mass inertial force occurring with the acceleration of the mechanical assembly 33 in the circuit of FIG. 4. This is shown as an example with respect to FIG. 1 in connection with a displacement of the portal 2 in the coordinate direction of arrow y.
  • the operator To shift the portal 2, the operator must move the control element 11 in the corresponding direction. With a deflection of the control element 11 out of the rest position, the portal is however first accelerated until the desired speed is reached. Even when braking the portal until it comes to standstill at its final desired position means an deceleration of the portal 2 and triggers mass inertial forces.
  • a force Fy is superposed upon the particular control element 11 which is selected to be approximately proportional to the mass inertial force occurring when there is an acceleration of the portal 2 or the mechanical assembly 33. The force Fy is opposite to the deflection of the control element. In this way, the user is given a feeling for the actual mechanical assembly to be accelerated, so that, in this way, the user can avoid accelerations which are too great.
  • the acceleration which is experienced by the mechanical assembly because of the drive of the mechanical assembly in the corresponding direction, is generated in the embodiment of FIG. 4 by a simulation of the controller.
  • the particular acceleration can also be derived from the drive data (Xs, Ys, Zs) or from an acceleration sensor which is attached preferably in the region of the probe unit 34 in the mechanical assembly of the coordinate measuring apparatus.
  • the mass inertial force is then computed by a multiplication of the acceleration with the mass of the mechanical assembly accelerated in the particular coordinate direction.
  • a signal (Fx, Fy, Fz) is superposed upon the control element (11, 12) proportional to the mass inertial force whereby the particular control element (11, 12) generates an opposite force which can be felt by the operator.
  • the mass corresponds in the example shown for a movement in the direction of arrow y to the mass of the portal 2 with all components which are attached hereto such as drives, transverse carriages, probe shafts, probe units, et cetera.
  • FIG. 4 is shown here strictly as exemplary for a control element according to FIG. 2. It is understood, however, that the control element 32 of FIG. 3 can also be utilized.
  • a counter torque is superposed upon the control element via the electric motor 49 and is proportional to the mass inertial force occurring with the acceleration of the mechanical assembly 33.
  • FIG. 5 shows a very simple control element wherein the force, which is to be superposed upon the control element, can be even superposed without the motor shown below.
  • the control element is simply coupled to a mass 54 which must likewise be accelerated when actuating the control element.
  • the control element is essentially configured precisely as the control element of FIG. 3.
  • the control element is connected to a rotatable fly disc 54 which must be accelerated when actuating the handwheel 47.
  • the mass 54 is connected via a gear assembly including the gear wheels (52, 53) so that the rotational frequency of the handwheel 47 is translated into a considerably higher rotational frequency of the mass 54 to be accelerated.
  • the arrangement shown has the special advantage that the mass 54, which is to be accelerated, can be exchanged variably for other corresponding masses so that the handwheel, after an electronic switchover, can also be used for different coordinate directions of the mechanical assembly 33 of the coordinate measuring apparatus. If the handwheel is, for example, used to shift the probe shaft 4 in the direction of the arrow Z, then a disc 54 is used with considerably lower mass than for the case when the control element is used to move the entire portal 2 for the coordinate direction y.
  • Typical mass inertial torques which are superposed on the handwheel 47 by the disc 54 in connection with the gear assembly, can have a value of typically greater than 1 ⁇ 10 -3 kg m 2 .
  • control element it is not necessary that the control element be configured as in FIG. 5; instead, a gear rack with a mass attached thereto can be provided in lieu of a rotatable disc 54 and the gear wheel 53 so that the gear wheel 52 converts the rotational movement into a linear movement of a mass to be accelerated.
  • the disc 54 can also be attached directly to one of the shaft halves (51a , 51b) so that the additional gear assembly (52, 53) and a rotatable bearing for the rotatable disc 54 become unnecessary.
  • a control element has the disadvantage that it is relatively inflexible and must be manufactured especially for a direction of movement of a special coordinate measuring apparatus.
  • a coordinate measuring apparatus wherein the probe unit is especially configured as a so-called switching probe head 31.
  • the common characteristic of switching probe heads is here seen in that the probe 6 is lifted out of its bearing positions 29 relative to the probe head 31 when the probe 6 contacts a workpiece 15.
  • the probe 6 is journalled in the bearing positions 29 on the probe head 31 and an interruption of the electric contact takes place when the probe 31 is lifted out of its bearing locations 29.
  • a signal SL is outputted to the control 13 because of the interruption of the electric contact. Because of this, a contacting of the workpiece by the probe 6 is recognized as valid.
  • a piezo crystal 55 is provided additionally in the probe head 6 for increasing accuracy.
  • the piezo crystal 55 outputs an electric signal SP to the control 13 already for the slightest touching of the workpiece by the probe 6 long before the probe 6 is lifted out of its bearing positions 29. Because of the electric signal SP, the machine positions (Xm, Ym, Zm) are frozen. Only when the probe 6 is lifted out its bearing position 29, is the contact deemed to be valid and the frozen machine position are assumed as contact positions (Xp, Yp, Zp).
  • This method affords the additional advantage compared to the first-described method in that considerably more accurate contact points are obtained.
  • FIG. 6a shows this in detail. If the probe head 31 is moved further to the left to the machine position (Xm, Ym, Zm) from the last valid contact position (Xp, Yp, Zp), then the deflection of the probe 6 increases until the probe is possibly destroyed. According to the configuration of FIG.
  • a signal SL is transmitted to the control 13 when the probe 6 is lifted out of its bearing positions 29.
  • the machine positions (Xm, Ym, Zm) which are used in dependence upon the method, are stored as actual contact positions (Xp, Yp, Zp). These actual contact positions (Xp, Yp, Zp) are stored in the control 13 and likewise transmitted via a corresponding line to the controller 22.
  • the signal SL is also transmitted from the control 13 to the controller 22. The signal SL transmits further the opening of the switch contact.
  • the actual machine positions (Xm, Ym, Zm) are likewise transmitted via a corresponding line to the controller 22.
  • a vector U is provided from the actual machine positions (Xm, Ym, Zm) and the last valid contact position (Xp, Yp, Zp) as shown in FIG. 6a.
  • This vector U reflects nothing more than the deviation of the probe head 31 from the last valid contact position (Xp, Yp, Zp).
  • a force is superposed on the control elements which is opposite to the deflection so that the control elements can apply a force to the operator in opposition to this direction. In this way, the operator can always return to the last measured contact position (Xp, Yp, Zp) until the probe 6 again comes to rest in the bearing positions 29 and, in this way, the signal SL again has its zero position.
  • FIG. 7 shows another embodiment wherein a preferred direction results when operating the at least one control element.
  • an optical probe 28 is used which, as is conventional in coordinate measuring apparatus, is attached to a so-called rotation-pivot unit 52 so that the scanning beam (a) can be aligned as desired in space.
  • the rotation-pivot unit 52 has a rotation unit 26, with which the optical probe 28 can be rotated about a first axis in accordance with arrow am, as well as a second rotation unit 27 with which the optical probe head 28 can be likewise rotated about a second rotational axis, which is perpendicular to the first rotational axis.
  • the optical probe head 28 is here rotated along the arrow ⁇ m so that the probe head 28 can be aligned in space as desired.
  • Probe heads of this kind usually scan the surface of the workpiece 15 to be measured with the scanning beam (a).
  • the rotational-pivot unit 52 exhibits any desired spatially inclined alignment, then it becomes difficult for the operator of the coordinate measuring apparatus to actuate the drives 18 thereof so that the optical probe head 28 is moved precisely in the alignment of the scanning beam (a). For this reason, a force is superposed upon the control elements in the embodiment of FIG. 7 so that the preferred direction (which results when actuating the control element in the preferred direction) is so selected that the optical probe head is moved along the scanning beam (a).
  • the rotation positions ( ⁇ m, ⁇ m) of the rotation joint 27 of the rotation-pivot unit 52 are transmitted from the angular measuring unit 26 via the control 13 also to the controller 22.
  • the angle measuring unit 26 measures the rotational positions ( ⁇ m, ⁇ m) of the rotation joint 27 of the rotation-pivot unit 52.
  • the precise alignment of the scanning beam (a) is derived from the two rotational angles ( ⁇ m, ⁇ m) and, in this way, corresponding forces (Fx, Fy, Fz) are superposed upon the control elements (11, 12) so that, for an actuation of the control elements (11, 12), a preferred direction automatically results along the probe beam (a) along which the probe head can be moved.
  • the preferred direction deviates, as required, from the coordinate directions.
  • control elements (11, 12) are arranged on the control panel and a key 53 is additionally arranged thereon. With the key 53, the control in the coordinate measuring apparatus can be switched over from the drives 18 to the drives 25 of the rotation units (26, 27) of the rotation-pivot unit. In the depressed state of this key, therefore, the rotation unit 26 as well as the rotation unit 27 can be operated by the control element 11 in the same manner as the drives 18. This corresponds to the angle speeds (Wu, We). The signals W ⁇ and W ⁇ are then converted to signals ⁇ s and ⁇ s according to which the drives 25 of the rotation units are displaced.
  • FIG. 8 a third variation of the second embodiment is shown, wherein a preferred direction results along which the probe unit is moved when the at least one control element is operated. This preferred direction deviates from the coordinate direction.
  • the particular circuit shows the probe unit 34 as measuring probe head 5 with corresponding probe 6.
  • any desired probe head such as an optical probe head for example, switching probe head, et cetera can be used.
  • the functional assembly groups (18 to 21) which are described for the measuring probe head, have already been described with respect to FIG. 4 so that it is not necessary to again provide a description here.
  • the use of the coordinate measuring apparatus on simple workpieces such as a cube having side surfaces which are always parallel to the coordinate directions is simple because the probe first must be positioned only in the region of the particular surface and then is moved only perpendicularly to the particular surface by actuating the corresponding control element (11, 12).
  • a simple embodiment could be that, for example, the above-mentioned cube is simply tilted by 30° about one of its edges as shown by way of example with the workpiece 15 in FIG. 8 so that the workpiece coordinate system (Xw, Yw, Zw) is rotated relative to the machine coordinate system (X, Y, Z) about the Y axis by an angle gamma of 30°.
  • the above-mentioned cube is simply tilted by 30° about one of its edges as shown by way of example with the workpiece 15 in FIG. 8 so that the workpiece coordinate system (Xw, Yw, Zw) is rotated relative to the machine coordinate system (X, Y, Z) about the Y axis by an angle gamma of 30°.
  • a force (Fx, Fy, Fz) is therefore superposed in the same manner on the control elements (11, 12).
  • This force likewise superposes on the control elements several preferred directions deviating from the coordinate directions and is so selected that the probe unit can be moved along the axes of a coordinate system rotated with respect to the coordinate directions pregiven by the mechanical assembly 33.
  • the coordinate measuring apparatus is switched over into a mode via a switch (not shown) in which the correspondingly rotated workpiece coordinate directions (Xw, Yw, Zw) are recorded for the workpiece 15.
  • a switch not shown
  • the correspondingly rotated workpiece coordinate directions (Xw, Yw, Zw) are recorded for the workpiece 15.
  • three measuring points are scanned on each of three mutually perpendicular surfaces of the cube and, from the scanned measuring points, the three rotational angles (delta, gamma, epsilon) are computed and transmitted to the controller 22 of the control elements (11, 12).
  • the rotational angle delta is the rotational angle of the workpiece coordinate system (Xw, Yw, Zw) relative to the machine coordinate system (X, Y, Z) about the Z axis.
  • the rotational angle gamma is the rotational angle of the workpiece coordinate system (Xw, Yw, Zw) relative to the machine coordinate system (X, Y, Z) about the Y axis.
  • the rotational angle epsilon is the rotational angle of the workpiece coordinate system (Xw, Yw, Zw) relative to the machine coordinate system (X, Y, Z) about the X axis.
  • the controller 22 then computes the corresponding rotated workpiece coordinate directions (Xw, Yw, Zw) from the angle values (delta, gamma, epsilon) and sets the forces (Fx, Fy, Fz), which are superposed upon the control elements in such a manner that the control elements are shifted in a preferred direction when they are actuated.
  • the preferred direction then corresponds to the workpiece coordinate directions (Xw, Yw, Zw).
  • a measuring probe head 5 having a probe 6 is again used as a probe unit as already described as exemplary in connection with FIG. 4.
  • the probe 6 is charged with a defined measuring force which usually is directed perpendicularly to the surface of the workpiece 15, which is to be measured, at the contact scanning point.
  • This measuring force is either generated by a so-called measuring force generator as shown in connection with FIGS. 4, 8 and 9 or by means of springs which are tensioned when the probe 6 is deflected out of its rest position and thereby generate the measuring force.
  • the measuring force generator is nothing more than an electronic linear motor which generates a certain force in the particular coordinate direction.
  • the perpendicular direction is supplied in the CAD operation conventionally with the points to be scanned on the workpiece surface and is separately adjusted for each point to be scanned. This is, however, not-possible in manual operation, wherein the probe is shifted by means of control elements (11, 12) because the precise direction of the surface is known neither to the coordinate measuring apparatus nor to the operator for each workpiece.
  • the measuring force is here therefore usually superposed in the direction that the probe head 5 is moved on the surface of the workpiece 15 to be measured when placing the probe 6.
  • the measuring force F probe is likewise superposed on the probe 6 horizontally toward the workpiece.
  • the pregiven measuring force F probe is here always charged with a constant magnitude in the Z direction as long as the probe is in contact with the workpiece 15.
  • the probe is bound into the control loop which correspondingly readjusts the drives 18 because of the probe deflection measured by the probe head circuit 20 so that the probe is always in a defined desired position.
  • the constant measuring force is superposed in the contact direction onto the probe 6 so that the probe can no longer be moved further toward the workpiece.
  • a movement of the probe head 5 is, however, possible perpendicular to the scan direction in the coordinate directions (x, y, z).
  • the probe head 5 If the probe head 5 is now, for example, moved in the direction of arrow x, then the probe 6 will at some time get caught on the edge 54 of the workpiece and a probe deflection of the probe 6 relative to the probe head 5 will result in the direction of the coordinate direction x.
  • This deflection of the probe 6 relative to the probe head 5 leads to a measuring force F perp in a direction perpendicular to the scanning direction.
  • This measuring force F perp is applied either as shown in FIG. 9 by the measuring force generators in order to return the probe 6 to its zero position in the coordinate direction x, or which measuring force F perp is generated by the deflection of the probe out of its rest position for the case that the measuring force is developed by means of springs.
  • the probe is a very fine probe (the probe ball of the probe has a diameter of less than 1 mm)
  • the danger is present that the probe will break off when a certain measuring force is exceeded.
  • a preferred direction would be superposed onto the control elements (11, 12) for this case which operates such that the deflection between probe 6 and the measuring probe head 5 becomes less when moving in the corresponding direction.
  • the preferred direction is, in the contacting state, superposed proportional to the measuring forces, which act perpendicularly to the scanning direction.
  • the measuring force F act is measured via the measuring force generators based on the adjusted currents of the measuring force units 24 and transmitted to the controller 22. Furthermore, the component F probe effective in the scanning direction is transmitted by the control 13 so that the force component F perp , which is perpendicular to the scanning direction, can be determined via vector arithmetic.
  • This force component F perp is used in the controller 22 in order to superpose a corresponding force (Fx, Fy, Fz) onto the control elements.
  • This force (Fx, Fy, Fz) operates opposite to the force component F perp . In this way, the operator is always guided in the adjusted preferred direction in such a manner that the operator is again taken away from the edge.
  • a tapping is superposed on control elements, which are not intended to be operated by the operator in the measurement sequence, so that the operator is hereby informed.
  • the circuit is configured, for example, as shown in FIG. 4.
  • an additional line would be provided between the control 13 and the controller 22. Via this additional line, the control could inform the controller 22 as to the corresponding control elements which are not to be used.
  • the force of the function assembly group is pregiven in such a manner that a stop occurs during a deflection of the control element.
  • the stop is so provided that a probe head, which is provided as a switching probe unit, is moved at an optimal scanning speed.
  • This type of stop or pressure point can arise from the controller 22 when there is a deflection of the control elements (11, 12) by the superposition of a force (Fx, Fy, Fz) for a certain deflection.
  • the circuit would be similar to that in FIG. 6 but without the lines (Xm, Ym, Zm), (Xp, Yp, Zp), (SL) between the control 13 and the controller 22. In lieu thereof, a line would be provided between the control 13 and the controller via which the optimal scanning speed is transmitted to the controller.
  • the coordinate measuring apparatus has a control element having a pregiven rest position and a measuring probe head with a probe as a probe unit.
  • the force from the function assembly group is pregiven in such a manner that the control element is deflected from its neutral position into the scanning direction as long as the probe contacts the workpiece. This can be achieved with a slight modification of the circuit of FIG. 4. In this case, only a line must be provided between control 13 and controller 22 which transmits the scanning direction to the controller.
  • the measuring force F act can be determined by the actual probe deflection and processed as described above.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
US09/264,413 1998-03-06 1999-03-08 Coordinate measuring apparatus with user assist Expired - Lifetime US6158136A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19809690 1998-03-06
DE19809690A DE19809690A1 (de) 1998-03-06 1998-03-06 Koordinatenmeßgerät mit Benutzerführung

Publications (1)

Publication Number Publication Date
US6158136A true US6158136A (en) 2000-12-12

Family

ID=7859991

Family Applications (1)

Application Number Title Priority Date Filing Date
US09/264,413 Expired - Lifetime US6158136A (en) 1998-03-06 1999-03-08 Coordinate measuring apparatus with user assist

Country Status (3)

Country Link
US (1) US6158136A (de)
EP (1) EP0940651B1 (de)
DE (2) DE19809690A1 (de)

Cited By (49)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6427353B1 (en) * 1998-05-28 2002-08-06 Rockwell Automation Technologies, Inc. High speed acquisition and calculation of dimensional variables with vibration and skew error reduction
WO2002060653A2 (en) * 2001-01-29 2002-08-08 The Acrobot Company Limited Active-constraint robots
WO2003035335A1 (en) * 2001-10-23 2003-05-01 Abb Ab A system and method for communication between an industrial robot and a tpu
KR20030079202A (ko) * 2002-04-02 2003-10-10 강재관 3차원 측정기
US6633143B2 (en) * 2000-02-03 2003-10-14 Renishaw Plc Reactionless rotary drive mechanism
US6718610B2 (en) * 1998-09-03 2004-04-13 Lockheed Martin Corporation Automated fuel tank assembly system & method
US20040068881A1 (en) * 2002-10-15 2004-04-15 Optical Gaging Products, Inc. Viscous coupled micro interposer
US6756967B2 (en) 2000-12-22 2004-06-29 Alps Electric Co., Ltd. Manual input device improved in operatability and multifunctionality, and vehicle-mounted control device using it
US20040172215A1 (en) * 2001-06-12 2004-09-02 Russell Gary W. Communication method and common control bus interconnecting a controller and a precision measurement assembly
US20040174537A1 (en) * 2001-07-16 2004-09-09 Detlef Ferger Method for measuring surface properties and co-ordinate measuring device
EP1489377A1 (de) * 2003-06-17 2004-12-22 Mitutoyo Corporation Messgerät, Messverfahren, Messprogramm und Aufzeichnungsmedium für Oberflächenscan
US20050052148A1 (en) * 2001-10-23 2005-03-10 Erik Carlson Industrial robot system
KR100484324B1 (ko) * 2002-05-29 2005-04-19 한국항공우주연구원 수동식 공간 위치 측정기
US20050263727A1 (en) * 2004-05-31 2005-12-01 Mitutoyo Corporation Surface scan measuring device, surface scan measuring method, surface scan measuring program and recording medium
US20050274563A1 (en) * 2004-05-28 2005-12-15 Bruce Ahnafield Joystick-operated driving system
US20070132986A1 (en) * 2005-11-28 2007-06-14 Funai Electric Co., Ltd. Liquid crystal module brightness measurement apparatus and brightness measurement apparatus
US20070227019A1 (en) * 2006-04-04 2007-10-04 Wolfgang Holzapfel Method for initializing a position-measuring system
US20070266781A1 (en) * 2006-05-16 2007-11-22 Mitutoyo Corporation Measurement control device, contour measuring instrument and measurement control method
US20080033690A1 (en) * 2005-01-18 2008-02-07 Guenter Grupp Method and machine for determining a space coordinate of a measurement point on a measurement object
US20080249737A1 (en) * 2007-04-03 2008-10-09 Hexagon Metrology Ab Oscillating scanning probe with constant contact force
US20080295349A1 (en) * 2006-01-19 2008-12-04 Carl Zeiss Industrielle Messtechnik Gmbh Coordinate Measuring Machine and Method for Operating a Coordinate Measuring Machine
US20090055118A1 (en) * 2005-04-25 2009-02-26 Renishaw Plc Method of path planning
US20090072117A1 (en) * 2007-09-14 2009-03-19 The Gleason Works Carriage arrangement for a machine tool
US20090132191A1 (en) * 2007-11-15 2009-05-21 Hong Fu Jin Precision Industry (Shenzhen) Co., Ltd . System and method for zero resetting of a measuring machine
US20090271997A1 (en) * 2006-11-17 2009-11-05 Otto Ruck Method and apparatus for determining spatial coordinates at a multiplicity of measurement points
US20100039391A1 (en) * 2008-08-15 2010-02-18 Stanley Spink Jogbox for a coordinate measuring machine
US20100100199A1 (en) * 2007-01-23 2010-04-22 Carl Zeiss Industrielle Messtechnik Gmbh Control of an operation of a coordinate measuring device
US20110192042A1 (en) * 2007-04-23 2011-08-11 Renishaw Plc Apparatus and method for controlling or programming a measurement routine
US20110192044A1 (en) * 2010-02-05 2011-08-11 Mitutoyo Corporation Coordinate measuring machine
US20120246953A1 (en) * 2009-10-06 2012-10-04 Thomas Engel Coordinate measuring device having positional change sensors
US20130129406A1 (en) * 2011-11-18 2013-05-23 Hexagon Metrology Sas Measuring device including an indexed locking arm
US20130227850A1 (en) * 2012-03-02 2013-09-05 Hexagon Metrology, Inc. Coordinate measuring machine with support beam having springs
US20130283627A1 (en) * 2012-04-26 2013-10-31 Mitutoyo Corporation Profile measuring method and profile measuring instrument
US8825438B2 (en) 2007-08-20 2014-09-02 Renishaw Plc Course of motion determination
JP2014206416A (ja) * 2013-04-11 2014-10-30 株式会社東京精密 測定機、及び、測定機の移動ガイド機構
US20150000147A1 (en) * 2013-06-28 2015-01-01 Hon Hai Precision Industry Co., Ltd. Coordinate measuring apparatus
US20150330760A1 (en) * 2013-07-08 2015-11-19 Hexagon Technology Center Gmbh Location determination apparatus with an inertial measurement unit
US20160195390A1 (en) * 2015-01-05 2016-07-07 Bell Helicopter Textron Inc. Inspecting components using mobile robotic inspection systems
US9498231B2 (en) 2011-06-27 2016-11-22 Board Of Regents Of The University Of Nebraska On-board tool tracking system and methods of computer assisted surgery
US20170089684A1 (en) * 2014-04-17 2017-03-30 Carl Zeiss Industrielle Messtechnik Gmbh Coordinate measuring machine and method for operating a coordinate measuring machine
US20180038749A1 (en) * 2016-08-03 2018-02-08 Toyota Jidosha Kabushiki Kaisha Surface pressure measuring device
US10105149B2 (en) 2013-03-15 2018-10-23 Board Of Regents Of The University Of Nebraska On-board tool tracking system and methods of computer assisted surgery
US10219811B2 (en) 2011-06-27 2019-03-05 Board Of Regents Of The University Of Nebraska On-board tool tracking system and methods of computer assisted surgery
US10288404B2 (en) * 2016-04-06 2019-05-14 Jtekt Corporation Gear measurement method and gear measurement apparatus
US11060838B2 (en) * 2018-10-23 2021-07-13 Mitutoyo Corporation Coordinate measuring machine
US11085751B2 (en) * 2019-11-11 2021-08-10 Hexagon Metrology, Inc. Ergonomic mobile controller for coordinate measuring machine
US11118890B2 (en) * 2018-07-23 2021-09-14 Hexagon Metrology, Inc. Scanning jogbox
US11116574B2 (en) 2006-06-16 2021-09-14 Board Of Regents Of The University Of Nebraska Method and apparatus for computer aided surgery
US11911117B2 (en) 2011-06-27 2024-02-27 Board Of Regents Of The University Of Nebraska On-board tool tracking system and methods of computer assisted surgery

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2373039B (en) * 2000-11-28 2005-06-15 In2Games Ltd Position transducer
DE10229824A1 (de) * 2002-06-28 2004-01-15 Carl Zeiss Verfahren zum Betrieb eines in wenigstens zwei Betriebsarten betreibbaren Koordinatenmessgerätes
DE10229821B4 (de) * 2002-06-28 2004-11-11 Carl Zeiss Koordinatenmeßgerät und Verfahren zur Steuerung eines Koordinatenmeßgerätes mit variabler Tastkopfmasse
DE10261336A1 (de) * 2002-12-28 2004-07-22 Carl Zeiss Koordinatenmessgerät
DE102004038416B4 (de) * 2004-07-30 2014-02-06 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zum Bestimmen von Raumkoordinaten eines Messpunktes an einem Messobjekt sowie entsprechendes Koordinatenmessgerät
DE102008011534B9 (de) * 2008-02-28 2011-02-24 Carl Zeiss Industrielle Messtechnik Gmbh Manuell steuerbares Koordinatenmessgerät und Verfahren zum Betreiben eines solchen Koordinatenmessgeräts
DE102014220540B4 (de) 2013-10-11 2016-03-17 Carl Zeiss Industrielle Messtechnik Gmbh Koordinatenmessgerät mit Bedieneinrichtung für eine Bedienperson und Verfahren zum Betreiben des Koordinatenmessgeräts

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0252212A1 (de) * 1986-05-12 1988-01-13 The Warner And Swasey Company Steuerknüppel zur dreiachsigen Steuerung angetriebener Elemente
US4769763A (en) * 1985-06-28 1988-09-06 Carl-Zeiss-Stiftung Control for coordinate measuring instruments
EP0482672A1 (de) * 1986-07-25 1992-04-29 Renishaw plc Koordinaten-Messung
US5228356A (en) * 1991-11-25 1993-07-20 Chuang Keh Shih K Variable effort joystick
US5347723A (en) * 1992-12-10 1994-09-20 Brown & Sharpe Mfg. Co. Air bearing control system
US5434803A (en) * 1992-03-26 1995-07-18 Tokyo Seimitsu Co., Ltd. Coordinate measuring machine and method of measuring therein
GB2298931A (en) * 1995-03-17 1996-09-18 Marconi Gec Ltd Virtual force feedback for a real environment
US6002351A (en) * 1995-11-10 1999-12-14 Nintendo Co., Ltd. Joystick device

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57148209A (en) * 1981-03-09 1982-09-13 Toyoda Mach Works Ltd Device for measuring shape of curved surface
JPH03185308A (ja) * 1989-12-15 1991-08-13 Nikon Corp 座標測定機
JPH08193829A (ja) * 1995-01-17 1996-07-30 Mitsutoyo Corp 三次元測定機
US5659480A (en) * 1995-06-27 1997-08-19 Industrial Service And Machine, Incorporated Method for coordinating motion control of a multiple axis machine
JP3153111B2 (ja) * 1995-09-18 2001-04-03 株式会社ミツトヨ 手動操作型三次元測定機
US5999168A (en) * 1995-09-27 1999-12-07 Immersion Corporation Haptic accelerator for force feedback computer peripherals
US5808888A (en) * 1996-01-11 1998-09-15 Thermwood Corporation Method and apparatus for programming a CNC machine

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4769763A (en) * 1985-06-28 1988-09-06 Carl-Zeiss-Stiftung Control for coordinate measuring instruments
EP0252212A1 (de) * 1986-05-12 1988-01-13 The Warner And Swasey Company Steuerknüppel zur dreiachsigen Steuerung angetriebener Elemente
EP0482672A1 (de) * 1986-07-25 1992-04-29 Renishaw plc Koordinaten-Messung
US5228356A (en) * 1991-11-25 1993-07-20 Chuang Keh Shih K Variable effort joystick
US5434803A (en) * 1992-03-26 1995-07-18 Tokyo Seimitsu Co., Ltd. Coordinate measuring machine and method of measuring therein
US5347723A (en) * 1992-12-10 1994-09-20 Brown & Sharpe Mfg. Co. Air bearing control system
GB2298931A (en) * 1995-03-17 1996-09-18 Marconi Gec Ltd Virtual force feedback for a real environment
US6002351A (en) * 1995-11-10 1999-12-14 Nintendo Co., Ltd. Joystick device

Cited By (90)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6427353B1 (en) * 1998-05-28 2002-08-06 Rockwell Automation Technologies, Inc. High speed acquisition and calculation of dimensional variables with vibration and skew error reduction
US6718610B2 (en) * 1998-09-03 2004-04-13 Lockheed Martin Corporation Automated fuel tank assembly system & method
US6633143B2 (en) * 2000-02-03 2003-10-14 Renishaw Plc Reactionless rotary drive mechanism
US6756967B2 (en) 2000-12-22 2004-06-29 Alps Electric Co., Ltd. Manual input device improved in operatability and multifunctionality, and vehicle-mounted control device using it
WO2002060653A3 (en) * 2001-01-29 2003-06-05 Acrobot Company Ltd Active-constraint robots
WO2002060653A2 (en) * 2001-01-29 2002-08-08 The Acrobot Company Limited Active-constraint robots
US7035716B2 (en) 2001-01-29 2006-04-25 The Acrobot Company Limited Active-constraint robots
US20040128026A1 (en) * 2001-01-29 2004-07-01 Harris Simon James Active-constraint robots
US20040172215A1 (en) * 2001-06-12 2004-09-02 Russell Gary W. Communication method and common control bus interconnecting a controller and a precision measurement assembly
US6948255B2 (en) * 2001-06-12 2005-09-27 Hexagon Metrology, Ab Communication method and common control bus interconnecting a controller and a precision measurement assembly
US7227647B2 (en) * 2001-07-16 2007-06-05 Werth Messtechnik Gmbh Method for measuring surface properties and co-ordinate measuring device
US20040174537A1 (en) * 2001-07-16 2004-09-09 Detlef Ferger Method for measuring surface properties and co-ordinate measuring device
US7208900B2 (en) 2001-10-23 2007-04-24 Abb Ab Industrial robot system
US20050052148A1 (en) * 2001-10-23 2005-03-10 Erik Carlson Industrial robot system
US20050137746A1 (en) * 2001-10-23 2005-06-23 Abb Ab System and method for communication between an industrial robot and a tpu
WO2003035335A1 (en) * 2001-10-23 2003-05-01 Abb Ab A system and method for communication between an industrial robot and a tpu
KR20030079202A (ko) * 2002-04-02 2003-10-10 강재관 3차원 측정기
KR100484324B1 (ko) * 2002-05-29 2005-04-19 한국항공우주연구원 수동식 공간 위치 측정기
US20040068881A1 (en) * 2002-10-15 2004-04-15 Optical Gaging Products, Inc. Viscous coupled micro interposer
JP2005009917A (ja) * 2003-06-17 2005-01-13 Mitsutoyo Corp 表面倣い測定装置、表面倣い測定方法、表面倣い測定プログラムおよび記録媒体
US7039550B2 (en) * 2003-06-17 2006-05-02 Mitutoyo Corporation Surface scan measuring instrument, surface scan measuring method, surface scan measuring program and recording medium
US20040260509A1 (en) * 2003-06-17 2004-12-23 Mitutoyo Corporation Surface scan measuring instrument, surface scan measuring method, surface scan measuring program and recording medium
EP1489377A1 (de) * 2003-06-17 2004-12-22 Mitutoyo Corporation Messgerät, Messverfahren, Messprogramm und Aufzeichnungsmedium für Oberflächenscan
CN100348946C (zh) * 2003-06-17 2007-11-14 株式会社三丰 表面仿形测量装置及其方法
US20050274563A1 (en) * 2004-05-28 2005-12-15 Bruce Ahnafield Joystick-operated driving system
EP1602895A1 (de) * 2004-05-31 2005-12-07 Mitutoyo Corporation Messgerät, Messverfahren, Messprogramm und Aufzeichnungsmedium für Oberflächensabtastung
US20050263727A1 (en) * 2004-05-31 2005-12-01 Mitutoyo Corporation Surface scan measuring device, surface scan measuring method, surface scan measuring program and recording medium
US7392692B2 (en) 2004-05-31 2008-07-01 Mitutoyo Corporation Surface scan measuring device, surface scan measuring method, surface scan measuring program and recording medium
CN100476348C (zh) * 2004-05-31 2009-04-08 株式会社三丰 表面仿形测定装置
US7599813B2 (en) * 2005-01-18 2009-10-06 Carl Zeiss Industrielle Messtechnik Gmbh Method and machine for determining a space coordinate of a measurement point on a measurement object
US20080033690A1 (en) * 2005-01-18 2008-02-07 Guenter Grupp Method and machine for determining a space coordinate of a measurement point on a measurement object
US7783445B2 (en) * 2005-04-25 2010-08-24 Renishaw Plc Method of path planning
US20090055118A1 (en) * 2005-04-25 2009-02-26 Renishaw Plc Method of path planning
US7426022B2 (en) * 2005-11-28 2008-09-16 Funai Electric Co., Ltd. Liquid crystal module brightness measurement apparatus and brightness measurement apparatus
US20070132986A1 (en) * 2005-11-28 2007-06-14 Funai Electric Co., Ltd. Liquid crystal module brightness measurement apparatus and brightness measurement apparatus
US7627957B2 (en) * 2006-01-19 2009-12-08 Carl Zeiss Industrielle Messtechnik Gmbh Coordinate measuring machine and method for operating a coordinate measuring machine
US20080295349A1 (en) * 2006-01-19 2008-12-04 Carl Zeiss Industrielle Messtechnik Gmbh Coordinate Measuring Machine and Method for Operating a Coordinate Measuring Machine
CN101050957B (zh) * 2006-04-04 2012-06-27 约翰尼斯海登海恩博士股份有限公司 用于初始化位置测量系统的方法
US20070227019A1 (en) * 2006-04-04 2007-10-04 Wolfgang Holzapfel Method for initializing a position-measuring system
US7426790B2 (en) * 2006-04-04 2008-09-23 Dr. Johannes Heidenhain Gmbh Method for initializing a position-measuring system
US7784333B2 (en) * 2006-05-16 2010-08-31 Mitutoyo Corporation Measurement control device and measurement control method
US20070266781A1 (en) * 2006-05-16 2007-11-22 Mitutoyo Corporation Measurement control device, contour measuring instrument and measurement control method
US11857265B2 (en) 2006-06-16 2024-01-02 Board Of Regents Of The University Of Nebraska Method and apparatus for computer aided surgery
US11116574B2 (en) 2006-06-16 2021-09-14 Board Of Regents Of The University Of Nebraska Method and apparatus for computer aided surgery
US7752766B2 (en) * 2006-11-17 2010-07-13 Carl Zeiss Industrielle Messtechnik Gmbh Method and apparatus for determining spatial coordinates at a multiplicity of measurement points
US20090271997A1 (en) * 2006-11-17 2009-11-05 Otto Ruck Method and apparatus for determining spatial coordinates at a multiplicity of measurement points
US20100100199A1 (en) * 2007-01-23 2010-04-22 Carl Zeiss Industrielle Messtechnik Gmbh Control of an operation of a coordinate measuring device
US8600523B2 (en) * 2007-01-23 2013-12-03 Carl Zeiss Industrielle Messtechnik Gmbh Control of an operation of a coordinate measuring device
CN101281011B (zh) * 2007-04-03 2012-12-05 六边形度量衡股份公司 具有恒定接触力的振动扫描探针
US7779553B2 (en) * 2007-04-03 2010-08-24 Hexagon Metrology Ab Oscillating scanning probe with constant contact force
US20080249737A1 (en) * 2007-04-03 2008-10-09 Hexagon Metrology Ab Oscillating scanning probe with constant contact force
US8601701B2 (en) 2007-04-23 2013-12-10 Renishaw Plc Apparatus and method for controlling or programming a measurement routine
US20110192042A1 (en) * 2007-04-23 2011-08-11 Renishaw Plc Apparatus and method for controlling or programming a measurement routine
US8825438B2 (en) 2007-08-20 2014-09-02 Renishaw Plc Course of motion determination
US7712227B2 (en) * 2007-09-14 2010-05-11 The Gleason Works Carriage arrangement for a machine tool
US20090072117A1 (en) * 2007-09-14 2009-03-19 The Gleason Works Carriage arrangement for a machine tool
US20090132191A1 (en) * 2007-11-15 2009-05-21 Hong Fu Jin Precision Industry (Shenzhen) Co., Ltd . System and method for zero resetting of a measuring machine
CN101436052B (zh) * 2007-11-15 2010-09-29 鸿富锦精密工业（深圳）有限公司 机台回零运动系统及方法
US20100039391A1 (en) * 2008-08-15 2010-02-18 Stanley Spink Jogbox for a coordinate measuring machine
US8581855B2 (en) 2008-08-15 2013-11-12 Hexagon Metrology, Inc. Jogbox for a coordinate measuring machine
US20120246953A1 (en) * 2009-10-06 2012-10-04 Thomas Engel Coordinate measuring device having positional change sensors
US8627576B2 (en) * 2009-10-06 2014-01-14 Carl Zeiss Industrielle Messtechnik Gmbh Coordinate measuring device having positional change sensors
US8438746B2 (en) * 2010-02-05 2013-05-14 Mitutoyo Corporation Coordinate measuring machine
US20110192044A1 (en) * 2010-02-05 2011-08-11 Mitutoyo Corporation Coordinate measuring machine
US11911117B2 (en) 2011-06-27 2024-02-27 Board Of Regents Of The University Of Nebraska On-board tool tracking system and methods of computer assisted surgery
US9498231B2 (en) 2011-06-27 2016-11-22 Board Of Regents Of The University Of Nebraska On-board tool tracking system and methods of computer assisted surgery
US10080617B2 (en) 2011-06-27 2018-09-25 Board Of Regents Of The University Of Nebraska On-board tool tracking system and methods of computer assisted surgery
US10219811B2 (en) 2011-06-27 2019-03-05 Board Of Regents Of The University Of Nebraska On-board tool tracking system and methods of computer assisted surgery
US9074620B2 (en) * 2011-11-18 2015-07-07 Hexagon Metrology Sas Measuring device including an indexed locking arm
US20130129406A1 (en) * 2011-11-18 2013-05-23 Hexagon Metrology Sas Measuring device including an indexed locking arm
US20130227850A1 (en) * 2012-03-02 2013-09-05 Hexagon Metrology, Inc. Coordinate measuring machine with support beam having springs
US8973279B2 (en) * 2012-03-02 2015-03-10 Hexagon Metrology, Inc. Coordinate measuring machine with support beam having springs
US9103648B2 (en) * 2012-04-26 2015-08-11 Mitutoyo Corporation Profile measuring method and profile measuring instrument
US20130283627A1 (en) * 2012-04-26 2013-10-31 Mitutoyo Corporation Profile measuring method and profile measuring instrument
US10105149B2 (en) 2013-03-15 2018-10-23 Board Of Regents Of The University Of Nebraska On-board tool tracking system and methods of computer assisted surgery
JP2014206416A (ja) * 2013-04-11 2014-10-30 株式会社東京精密 測定機、及び、測定機の移動ガイド機構
US9410786B2 (en) * 2013-06-28 2016-08-09 Hong Fu Jin Precision Industry (Shenzhen) Co., Ltd. Coordinate measuring apparatus
US20150000147A1 (en) * 2013-06-28 2015-01-01 Hon Hai Precision Industry Co., Ltd. Coordinate measuring apparatus
US9273946B2 (en) * 2013-07-08 2016-03-01 Hexagon Technology Center Gmbh Location determination apparatus with an inertial measurement unit
US20150330760A1 (en) * 2013-07-08 2015-11-19 Hexagon Technology Center Gmbh Location determination apparatus with an inertial measurement unit
US10145664B2 (en) * 2014-04-17 2018-12-04 Carl Zeiss Industrielle Messtechnik Gmbh Coordinate measuring machine and method for operating a coordinate measuring machine
US20170089684A1 (en) * 2014-04-17 2017-03-30 Carl Zeiss Industrielle Messtechnik Gmbh Coordinate measuring machine and method for operating a coordinate measuring machine
US11185985B2 (en) * 2015-01-05 2021-11-30 Bell Helicopter Textron Inc. Inspecting components using mobile robotic inspection systems
US20160195390A1 (en) * 2015-01-05 2016-07-07 Bell Helicopter Textron Inc. Inspecting components using mobile robotic inspection systems
US10288404B2 (en) * 2016-04-06 2019-05-14 Jtekt Corporation Gear measurement method and gear measurement apparatus
US20180038749A1 (en) * 2016-08-03 2018-02-08 Toyota Jidosha Kabushiki Kaisha Surface pressure measuring device
US10365175B2 (en) * 2016-08-03 2019-07-30 Toyota Jidosha Kabushiki Kaisha Surface pressure measuring device
US11118890B2 (en) * 2018-07-23 2021-09-14 Hexagon Metrology, Inc. Scanning jogbox
US11060838B2 (en) * 2018-10-23 2021-07-13 Mitutoyo Corporation Coordinate measuring machine
US11085751B2 (en) * 2019-11-11 2021-08-10 Hexagon Metrology, Inc. Ergonomic mobile controller for coordinate measuring machine

Also Published As

Publication number Publication date
DE19809690A1 (de) 1999-09-09
EP0940651A2 (de) 1999-09-08
EP0940651A3 (de) 2001-07-11
DE59914700D1 (de) 2008-05-08
EP0940651B1 (de) 2008-03-26

Similar Documents

Publication Publication Date Title
US6158136A (en) Coordinate measuring apparatus with user assist
US4769763A (en) Control for coordinate measuring instruments
US5735490A (en) Control device with a control stick, particularly a servo sidestick for aircraft
US5072361A (en) Force-reflective teleoperation control system
JP3341933B2 (ja) 加工物表面の走査方法および走査装置
JP2019530092A (ja) 触覚感覚を改善した少なくとも２自由度を有する触覚インタフェース
CN102239454A (zh) 用于在机械手的控制装置中输入指令的方法和设备
WO1999022904A2 (en) Method and system for computer assisted manual machine tool control
GB2278907A (en) Manual control system for camera mountings
US20200173538A1 (en) Device and method for selecting gears in motor vehicles
US6512344B1 (en) Control apparatus equipped with back drive
JPH10239042A (ja) 三次元測定機
JPH08281584A (ja) ジョイスティック信号処理装置
JPS6114442B2 (de)
JP3698216B2 (ja) ジョイスティック駆動装置
JPH08193829A (ja) 三次元測定機
JPH0736611A (ja) 三次元座標入力装置
JP3178813B2 (ja) 遠隔操縦装置
JP2583740Y2 (ja) 駆動装置
JPH08123611A (ja) コンピュータ制御装置
EP0442733A2 (de) Vorrichtung zum Folgen von Verschiebungen und Messeinrichtung mit dieser Vorrichtung
JPH08136241A (ja) タッチ信号の判別方法
JP3855629B2 (ja) ロボットの干渉検出装置
JP2700066B2 (ja) 操作感触測定方法及びその装置
JPH0736616A (ja) 三次元座標入力装置

Legal Events

Date Code Title Description
AS Assignment

Owner name: CARL-ZEISS-STIFTUNG HEIDENHEIM/BRENZ, GERMANY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:GOETZ, KLAUS-DIETER;RUCK, OTTO;REEL/FRAME:009995/0544;SIGNING DATES FROM 19990324 TO 19990409

STCF Information on status: patent grant

Free format text: PATENTED CASE

FEPP Fee payment procedure

Free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

CC Certificate of correction
FPAY Fee payment

Year of fee payment: 4

AS Assignment

Owner name: CARL ZEISS INDUSTRIELLE MESSTECHNIK GMBH, GERMANY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:CARL ZEISS STIFTUNG, HEIDENHEIM;REEL/FRAME:015530/0041

Effective date: 20040616

FPAY Fee payment

Year of fee payment: 8

FPAY Fee payment

Year of fee payment: 12