US4550593A - Turbomolecular pump suitable for performing counterflow leakage tests - Google Patents

Turbomolecular pump suitable for performing counterflow leakage tests Download PDF

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Publication number
US4550593A
US4550593A US06/399,403 US39940382A US4550593A US 4550593 A US4550593 A US 4550593A US 39940382 A US39940382 A US 39940382A US 4550593 A US4550593 A US 4550593A
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United States
Prior art keywords
pump
container
test
common
turbomolecular pump
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Expired - Lifetime
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US06/399,403
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English (en)
Inventor
Gunter Reich
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Balzers und Leybold Deutschland Holding AG
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Leybold Heraeus GmbH
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Assigned to LEYBOLD-HERAEUS GMBH, A GERMAN CORP. reassignment LEYBOLD-HERAEUS GMBH, A GERMAN CORP. ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: REICH, GUNTER
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Assigned to LEYBOLD AKTIENGESELLSCHAFT reassignment LEYBOLD AKTIENGESELLSCHAFT CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). Assignors: LEYBOLD-HERAEUS GMBH
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Expired - Lifetime legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions

Definitions

  • Testing a container for leaks can be performed by evacuating the container being tested and spraying a test gas over it.
  • the container is small, it is also known to fill it with the test gas and place it in a test tank which is then evacuated. In either case, if the gas penetrates through the wall of the container, the container is leaky.
  • a test gas detector connected to the vacuum line for evacuating the container or test tank thus makes it possible to determine whether such leakage is occurring.
  • the test gas detector is often a mass spectrometer which is set for the test gas, preferably helium, and therefore for mass 4.
  • Mass spectrometers can be operated only at a pressure less than 1 ⁇ 10 -3 mbar and, preferably of 1 ⁇ 10 -4 mbar or less, while the pressure at which the leakage test can be performed is substantially greater. It is therefore known to pass test gas countercurrently through the high vacuum pump that evacuates the mass spectrometer (see, for example, Briggs U.S. Pat. No. 3,690,151, substantially corresponding to German No. 1,937,271).
  • the container or test tank and the mass spectrometer were both connected to the turbomolecular between the two tandem pump stages, while the forepump was connected to both outer ends of the two pump stages via a conduit system situated outside of the pump casing.
  • a separate pump stage is required, with several rows of turbine buckets which are intended to form a gas-tight labyrinth packing.
  • the separation is said to be achieved by a "virtually gas-impermeable partition wall".
  • test gas that is to be registered has to travel a relatively long path, namely from the container or test tank connection through the stage serving for the evacuation of the test tank, through the forepump conduit system situated outside of the pump casing--partially in a counterflow--and finally in a counterflow through the pump stage serving for the evacuation of the mass spectrometer, all of which impairs the sensitivity of the leakage test.
  • This object is achieved in accordance with the invention by providing connections for a mass spectrometer and a container or test tank to be tested in the area of opposite outer end of a tandem-stage turbomolecular pump system such that the pumped gas flows, during operation, from the opposite, outside ends of the pump to the inside (e.g. middle) respectively through the two pump stages, and a common forepump connection between the two pump stages.
  • the tandemly-arranged turbomolecular pump stages pump towards eachother.
  • the path to be traveled by the test gas is also optimally shortened.
  • only one forepump connection is necessary, so that the conduit system situated outside of the pump casing also can be eliminated.
  • the turbomolecular pump 1 has a rotor 2, which is mounted at only one end, i.e., cantilevered, in the casing 3 and can be driven by means of the motor 4. All that is visible is a diagrammatically represented bearing 5 for the shaft 6 of the rotor. This bearing can be a rolling bearing or a magnetic bearing.
  • the rotor 2 bears rotor bucket disks 7 and 8 which with corresponding stator bucket disks 9 and 11 form two pump stages 12 and 13 whose pumping direction is indicated by the arrows 14 and 15 (from the outside in).
  • the stator bucket disks 9 and 11 are mounted in the thereby-common casing 3 of the turbomolecular pump by means of spacer rings 16.
  • the casing 3 of the turbomolecular pump 1 has a total of three connections 17, 18 and 19. Connections 17 and 18 are situated adjacent the outer ends of the pump system formed by the two pump stages 12 and 13. Between the two pump systems is the common forepump connection 19. In the area of the forepump connection 19 one stator bucket plate is missing, so that a gap or common, open space 21 results which separates the two pump stages 12 and 13 from one another.
  • the pumping properties of a turbomolecular pump can be influenced especially by the angle of attack and the spacing of the buckets.
  • the two pump stages 12 and 13 are to have different pumping properties. If the bearing 5 is in the form of a rolling bearing, it might be desirable to connect the container being tested to connection 17 and the mass spectrometer to the connection 18. It is then unnecessary to produce the especially low pressure necessary for the operation of the mass spectrometer in the area of the bearing, so that trouble does not occur due to lubricant vapors entering from the bearing chamber.
  • the pump stage 13 Since the pressure produced by the forepump connected to the connection 19 is equal to or less than 0.2 mbar, the pump stage 13 has the purpose of evacuating the test sample or test tank connected to connection 17, preferably down to a pressure of less than 0.1 mbar. Moreover, this pump stage is to be able to pump the test gas particularly well. The pump stage 13 must therefore have a very high ability to aspirate and to compress the test gas so that the leakage test can be performed rapidly and reliably.
  • pump stage 12 With regard to pump stage 12, the requirement is that it must be able to evacuate the mass spectrometer connected to connection 18 down to a pressure of at least 10 -4 mbar, and to let the test gas pass through it countercurrently with the least possible hindrance. Consequently, this pump stage 12 should have sufficient power for the evacuation of the mass spectrometer and a compression capacity that is low for the test gas.
  • the pump stage serving for the evacuation of the article being tested or of the test tank it has therefore proven to be especially advantageous for the pump stage serving for the evacuation of the article being tested or of the test tank to have more rows of buckets than the pump stage serving for the evacuation of the mass spectrometer and operated countercurrently for the test gas.
  • One special advantage of the present invention lies in the fact that the performance of the leakage test with the described turbomolecular pump under a great variety of circumstances is especially simple. For example, by varying the rotatory speed of the rotor of the turbomolecular pump it is possible to preset it for the pumping characteristics (aspirating capacity, compression capacity) desired in each case in the pump stages 12 and 13. Also the calibration of the sensitivity of the leak test apparatus operated with the turbomolecular pump can be performed by controlling the rotatory speed of the rotor 2. The calibration of the sensitivity can also be accomplished by making the effective aspirating capacity of the forepump adjustable at the connection 19. This can be done, for example, by measures taken at the forepump itself or by means of an adjustable throttle valve.
  • all light gases having a mass equal to or less than 20 can be used, such as for example H 2 , D 2 , HD, TH, TD, T 2 , He 3 , He 4 , CH 4 , Ne or the like.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
US06/399,403 1981-08-26 1982-07-19 Turbomolecular pump suitable for performing counterflow leakage tests Expired - Lifetime US4550593A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19813133781 DE3133781A1 (de) 1981-08-26 1981-08-26 Fuer die durchfuehrung der gegenstrom-lecksuche geeignete turbomolekularpumpe
DE3133781 1981-08-26

Publications (1)

Publication Number Publication Date
US4550593A true US4550593A (en) 1985-11-05

Family

ID=6140167

Family Applications (1)

Application Number Title Priority Date Filing Date
US06/399,403 Expired - Lifetime US4550593A (en) 1981-08-26 1982-07-19 Turbomolecular pump suitable for performing counterflow leakage tests

Country Status (4)

Country Link
US (1) US4550593A (enrdf_load_stackoverflow)
EP (1) EP0072892B1 (enrdf_load_stackoverflow)
JP (1) JPS5844295A (enrdf_load_stackoverflow)
DE (1) DE3133781A1 (enrdf_load_stackoverflow)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4832564A (en) * 1987-07-04 1989-05-23 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh Pumps
US4919599A (en) * 1988-06-01 1990-04-24 Leybold Aktiengesellschaft Pumping system for a leak detecting device
US4983829A (en) * 1988-09-14 1991-01-08 Alcatel Hochvakuumtechnik Gmbh Method for analyzing gases according to the counter flow principle
US5261793A (en) * 1992-08-05 1993-11-16 The United States Of America As Represented By The Secretary Of The Department Of Health And Human Services Miniature mechanical vacuum pump
US5561240A (en) * 1994-06-29 1996-10-01 Nihon Shinku Gijutsu Kabushiki Kaisha Leak detecting apparatus using compound turbo-molecular pump
US6030189A (en) * 1995-10-20 2000-02-29 Leybold Vakuum Gmbh Friction vacuum pump with intermediate inlet
EP1085214A3 (en) * 1999-09-16 2002-04-03 The BOC Group plc Vacuum pumps
EP1249614A1 (de) * 2001-03-10 2002-10-16 Pfeiffer Vacuum GmbH Gasreibungspumpe mit zusätzlichem Gaseinlass
EP1249613A1 (en) * 2001-03-15 2002-10-16 VARIAN S.p.A. Turbine pump with a stator stage integrated with a spacer ring
US20060191325A1 (en) * 2005-02-28 2006-08-31 Forcecon Technology Co., Ltd. Heat conductor with detection element and testing method thereof
WO2007019149A3 (en) * 2005-08-04 2007-11-01 Forced Physics Llc Enhanced heteroscopic techniques
DE102008013142A1 (de) * 2008-03-07 2009-09-10 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
US20100095745A1 (en) * 2008-10-20 2010-04-22 Kevin Flynn Calibration systems and methods for tracer gas leak detection
RU2545468C2 (ru) * 2010-11-16 2015-03-27 Улвак, Инк. Устройство обнаружения утечки

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2604522B1 (fr) * 1986-09-26 1989-06-16 Cit Alcatel Installation de detection de fuite a gaz traceur et procede d'utilisation
EP0464292B1 (fr) * 1990-07-06 1995-01-18 Alcatel Cit Ensemble mécanique de pompage pour vide secondaire et installation de détection de fuite utilisant un tel ensemble
JPH07111389B2 (ja) * 1990-07-10 1995-11-29 アルカテル・セイテ 機械式ポンプ組立及び漏れ検出装置
DE4228313A1 (de) * 1992-08-26 1994-03-03 Leybold Ag Gegenstrom-Lecksucher mit Hochvakuumpumpe
DE19608502C1 (de) * 1996-03-05 1997-05-28 Saskia Hochvakuum Und Labortec Verfahren zur Gegenstrom-Lecksuche mit einem leichten Spürgas
GB9725146D0 (en) * 1997-11-27 1998-01-28 Boc Group Plc Improvements in vacuum pumps
US6193461B1 (en) 1999-02-02 2001-02-27 Varian Inc. Dual inlet vacuum pumps
DE10055057A1 (de) * 2000-11-07 2002-05-08 Pfeiffer Vacuum Gmbh Leckdetektorpumpe
DE10334455B4 (de) * 2003-07-29 2013-01-31 Pfeiffer Vacuum Gmbh Lecksuchverfahren und Lecksuchanordnung zur Durchführung des Verfahrens
CN108678975A (zh) * 2018-07-17 2018-10-19 中国工程物理研究院机械制造工艺研究所 一种抗振动分子泵

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2049117A1 (de) * 1969-10-27 1971-05-06 Sargent Welch Scientific Co Gasleckanzeigesystem
DE1648648A1 (de) * 1967-04-12 1972-02-10 Pfeiffer Vakuumtechnik Anordnung zur Lecksuche nach dem Massenspektrometer-Prinzip
US3690151A (en) * 1968-07-25 1972-09-12 Norton Co Leak detector
US4057369A (en) * 1973-07-21 1977-11-08 Maschinenfabrik Augsburg-Nurnberg Ag Vacuum pump having a rotor supported in the interior of its casing
US4180370A (en) * 1975-03-22 1979-12-25 Kernforschungsanlage Julich Gesellschaft Mit Beschrankter Haftung Turbomolecular pump
US4332522A (en) * 1979-01-19 1982-06-01 Societe Anonyme Dite Compagnie Industrielle Des Telecommunications Cit-Alcatel Hard vacuum pump

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5363709U (enrdf_load_stackoverflow) * 1977-10-18 1978-05-29

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1648648A1 (de) * 1967-04-12 1972-02-10 Pfeiffer Vakuumtechnik Anordnung zur Lecksuche nach dem Massenspektrometer-Prinzip
US3690151A (en) * 1968-07-25 1972-09-12 Norton Co Leak detector
DE2049117A1 (de) * 1969-10-27 1971-05-06 Sargent Welch Scientific Co Gasleckanzeigesystem
US3616680A (en) * 1969-10-27 1971-11-02 Sargent Welch Scientific Co Leak detector
US4057369A (en) * 1973-07-21 1977-11-08 Maschinenfabrik Augsburg-Nurnberg Ag Vacuum pump having a rotor supported in the interior of its casing
US4180370A (en) * 1975-03-22 1979-12-25 Kernforschungsanlage Julich Gesellschaft Mit Beschrankter Haftung Turbomolecular pump
US4332522A (en) * 1979-01-19 1982-06-01 Societe Anonyme Dite Compagnie Industrielle Des Telecommunications Cit-Alcatel Hard vacuum pump

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4832564A (en) * 1987-07-04 1989-05-23 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh Pumps
US4919599A (en) * 1988-06-01 1990-04-24 Leybold Aktiengesellschaft Pumping system for a leak detecting device
US4983829A (en) * 1988-09-14 1991-01-08 Alcatel Hochvakuumtechnik Gmbh Method for analyzing gases according to the counter flow principle
US5261793A (en) * 1992-08-05 1993-11-16 The United States Of America As Represented By The Secretary Of The Department Of Health And Human Services Miniature mechanical vacuum pump
US5561240A (en) * 1994-06-29 1996-10-01 Nihon Shinku Gijutsu Kabushiki Kaisha Leak detecting apparatus using compound turbo-molecular pump
US6030189A (en) * 1995-10-20 2000-02-29 Leybold Vakuum Gmbh Friction vacuum pump with intermediate inlet
EP1085214A3 (en) * 1999-09-16 2002-04-03 The BOC Group plc Vacuum pumps
EP1249614A1 (de) * 2001-03-10 2002-10-16 Pfeiffer Vacuum GmbH Gasreibungspumpe mit zusätzlichem Gaseinlass
EP1249613A1 (en) * 2001-03-15 2002-10-16 VARIAN S.p.A. Turbine pump with a stator stage integrated with a spacer ring
US6676368B2 (en) 2001-03-15 2004-01-13 Varian S.P.A. Turbine pump with a stator stage integrated with a spacer ring
US20060191325A1 (en) * 2005-02-28 2006-08-31 Forcecon Technology Co., Ltd. Heat conductor with detection element and testing method thereof
WO2007019149A3 (en) * 2005-08-04 2007-11-01 Forced Physics Llc Enhanced heteroscopic techniques
DE102008013142A1 (de) * 2008-03-07 2009-09-10 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
US20100095745A1 (en) * 2008-10-20 2010-04-22 Kevin Flynn Calibration systems and methods for tracer gas leak detection
US8555704B2 (en) * 2008-10-20 2013-10-15 Agilent Technologies, Inc. Calibration systems and methods for tracer gas leak detection
RU2545468C2 (ru) * 2010-11-16 2015-03-27 Улвак, Инк. Устройство обнаружения утечки

Also Published As

Publication number Publication date
JPS6356438B2 (enrdf_load_stackoverflow) 1988-11-08
EP0072892B1 (de) 1984-12-19
DE3133781A1 (de) 1983-03-10
EP0072892A1 (de) 1983-03-02
DE3133781C2 (enrdf_load_stackoverflow) 1987-08-06
JPS5844295A (ja) 1983-03-15

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