US3814946A - Method of detecting defects in transparent and semitransparent bodies - Google Patents

Method of detecting defects in transparent and semitransparent bodies Download PDF

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Publication number
US3814946A
US3814946A US00312103A US31210372A US3814946A US 3814946 A US3814946 A US 3814946A US 00312103 A US00312103 A US 00312103A US 31210372 A US31210372 A US 31210372A US 3814946 A US3814946 A US 3814946A
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Prior art keywords
light
smooth surface
plate
defects
source
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Expired - Lifetime
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US00312103A
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English (en)
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S Takahashi
T Asao
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AGC Inc
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Asahi Glass Co Ltd
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Priority to US00312103A priority Critical patent/US3814946A/en
Priority to FR7245252A priority patent/FR2211126A5/fr
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G01N2021/8905—Directional selective optics, e.g. slits, spatial filters
    • G01N2021/8907—Cylindrical optics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/90—Investigating the presence of flaws or contamination in a container or its contents

Definitions

  • ABSTRACT A method and apparatus for detecting defects in a transparent or semitransparent plate having a figured surface and an oppositely disposed smooth surface.
  • a first light source is disposed on one side of the plate while a second light source is disposed on the opposite side so that the first light source and the second light source form, in conjunction with a photodetector, first and second optical systems respectively.
  • the first optical system detects an internal defect in the plate by means of light which has passed through the plate and has been scattered by internal defects.
  • the second optical system detects defects'present in the smooth surface of the member by detecting light which has been reflected from the plate and scattered by surface defects.
  • the present invention relates to a method and system for automatically detecting optical defects in transparent or semitransparent bodies.
  • the most commonly known method of automatically detecting defects in a transparent plate comprises the steps of directing a light beam onto various portions of the transparent plate, measuring the amounts of light which have passed through the respective portions of the plate, converting the amounts of light thus measured into the corresponding electrical signals respectively by means of a photoelectric converter, and comparing the electrical signal obtained from the portion of the plate having a defect (hereinafter referred to as the abnormal portion of the plate) with that obtained from the portion of the plate having no defect (hereinafter referred to as the normal portion of the plate" to determine the presence or absence of such a defect.
  • the abnormal portion of the plate that obtained from the portion of the plate having no defect
  • a further difficult problem is encountered when it is attempted to rely upon the above said prior art in constituting a defect detecting apparatus which can be used for semitransparent plates having one patterned or figured surface and an opposite smooth surface as well as transparent plates. More particularly, in the case of a plate having various patterns or figures on its surface, such as ground glass, or figured glass, undesirable irregularities in the amount of light passed through are caused due to such surface patterns or figures, and such irregularities might be sensed by the photodetector while it is receiving the light even from the normal portion of the plate, so that the photodetector will be unable to distinguish the variation in the amount of light passed through due to said irregularities from the variation in the amount of light passed through due to a surface defect in the smooth surface of the plate which is intended to be detected.
  • a light source is disposed on one side of a plate to be checked and a photodetector is disposed outside the area of distribution of the light having been passed through and scattered from the normal portion of the plate so that the photodetector catches only the light scattered from the normal portion of the plate.
  • a second light source is disposed on the opposite side of the plate with respect to said first light source.
  • Said photodetector is disposed so that it receives the light which has been emitted from the second light source and reflected from the surface of the plate but does not receive the direct light from the second light source.
  • the light from the second light source is used to detect defects present in the smooth surface of the plate which cannot be detected by means of the light from the first light source.
  • FIG. la shows a diagrammatic view of a first optical defect detecting system utilizing passed-through" light.
  • FIG. lb shows an enlarged perspective view of the detector section of the defect detecting system.
  • FIG. 2 shows the distribution characteristic of the light which has been passed through the portion of a transparent plate having no defect
  • FIG. 3 shows the distribution characteristic of the light which has been passed through the portion 'of the transparent plate having a defect
  • FIG. 4 is a view diagrammatically showing the placement of a photodetector in the system of FIG. la for the detection of defects in an ordinary plate glass
  • FIG. 5 is a view diagrammatically showing theplacement of photodetector in the system of FIG. la of the detection of defects in a figured plate glass
  • FIG. 6 is a view diagrammatically showing the placement of a plurality of photodetectors in the system of FIG. la for the detection of various kinds of defects.
  • FIG. 7 is a view showing the passed through light and the reflected light resulting from an incident light beam onto a smooth surface of a figured glass
  • FIG. 8 shows a diagrammatic view of the embodiment of the invention.
  • FIG. 1 there is shown an optical system for defecting various kinds of defects present in a transparent plate utilizing passed-through light.
  • a source of light beam 1 is positioned, for example, below a transparent plate 2, such as a glass plate, which is being continuously formed in a ribbon-like shape or which has been prepared by cutting a large glass sheet into sections.
  • the light emitted backwardly from the light source I is focused by a concaved silvered plate 9 disposed on the rear side thereof and, together with the light emitted forwardly, directed through lenses 3, 3' and 3", whereby it is shaped into collimated light rays 8.
  • a slit 6 is disposed in the path of the collimated rays 8 so that a light beam impinges upon the glass plate 2 at a predetermined incident angle. Substantial portion of the light beam passes through the glass plate 2 and is directed in the direction indicated with an arrow in the drawing.
  • Reference numeral 7 designates a photodetector disposed so that it does not catch the direct light but catches the portion of the light that has been scattered by a defect 4 present in the glass plate 2.
  • the photodetector may usually be composed of a condensing lens 5 and a photoconverter such as a photocell, a phototransistor or a photomultiplier.
  • the condensing lens may preferably be disposed so as to focus the image present at the intersection of the incident light beam and the glass plate 2 onto the sensitive surface of the photoconverter.
  • the collimated rays 8 from the light source 1 are usually reduced to about 1 --l0 mm in diameter and directed onto the glass plate 2. If it is desired to detect a defect in a glass plate moving in a predetermined direction, such collimated light rays 8 may be directed in a band-like form onto the glass plate 2 perpendicularly thereto, and a number of photodetectors 7 may be disposed in anequally spaced relationship perpendicularly to the direction of movement of the glass plate.
  • FIG. lb shows an arrangement wherein a band-like light source is disposed in parallel to the glass plate, and lenses, photodetectors and a slit are also disposed in parallel relationship correspondingly.
  • FIG. 2 shows one example of the distribution of the amount or intensity of the passed-through light obtained when a glass plate having no defect passes in the region of the band-like light.
  • the area of distribution of the passed-through light is very narrow, and, in the case of an ordinary glass plate, the area of distribution of the light is somewhat broader, but, in either case, the distribution characteristic resembles that indicated by a in FIG. 2.
  • the distribution characteristic resembles that indicated by b, c and d, respectively, in accordance with the patterns provided on the surface thereof.
  • FIG. 3 shows one example of the distribution of the amount or intensity of the passed-through light obtained when a glass plate having various kinds of defects passes through the region of the light band. More particularly, FIG. 3 shows the light intensity distribution characteristic generated by connecting the points having the same and predetermined value representing the amount or intensity of the light scattered in all directions from the crossing point of the incident light beam and the glass plate during the period from the time of the entry into the light band of the defect of the plate to the time of its leaving from said light band. FIG. 3 also shows the intensity distribution characteristic of the light scattered in all directions during the passage through the light band of one pattern of a figured plate glass which has a series of periodic patterns, in the similar manner to FIG. 2.
  • the intensity distribution characteristic of the passedthrough light may be represented by X.
  • the intensity distribution characteristic of the passed-through light may be represented by Y.
  • the intensity distribution characteristic of the passed-through light may be represented by Z.
  • the plate glass has an opaque defect, such as a-particle of refractory material or insoluble material, a devitrified spot, or a crack, it may be represented by W.
  • FIG. 4 shows that a photodetector 5 can be disposed just outside the region of angle 0a representing the area of distribution of the light passed through the normal portion of a polished plate glass, for example.
  • the photodetector 5 By disposing the photodetector 5 at such a position, the scattered lights corresponding to the distribution characteristics X, Y, Z and W may be caught by the photodetector 5, and it becomes possible to constitute a detector which is capable of detecting all defects covering from those presenting a narrow distribution of scattered light to those presenting a broad distribution of scattered light.
  • FIG. 5 shows that a photodetector can be disposed at D so as to accept any defects which are nonsignificant from practical viewpoint, such as a small surface unevenness (which corresponds to the distribution characteristic X) or a small bubble in the plate (which corresponds to distribution characteristic Y), but so as not to accept any opaque defects (which corresponds to the distribution characteristic W).
  • any defects which are nonsignificant from practical viewpoint such as a small surface unevenness (which corresponds to the distribution characteristic X) or a small bubble in the plate (which corresponds to distribution characteristic Y), but so as not to accept any opaque defects (which corresponds to the distribution characteristic W).
  • a photodetector may be disposed at c and its sensitivity may be adjusted appropriately so that it produces a defect signal when a bubble is large, but does not produce such a defect signal when the size of the defect is within the allowable limit.
  • an ordinary plate glass presents the distribution characteristic 0 of the light scattered from a normal portion of the plate as well as the distribution characteristic X, Y, Z or W of the light scattered from an abnormal portion of the plate is checked.
  • these photodetectors are disposed to detect the defects corresponding respectively to the distribution characteristics X, Y, Z and W and these photodetectors may be adjusted respectively so that the kinds and degree of defects of the plates can be checked collectively.
  • the maximum values of the outputs of the photodetectors A, B, C and D may be amplified by amplifier means (not shown) with predetermined amplification factors respectively, and these amplified output may be combined together to produce a final outputs signal representing collectively the degree of the defect of the plate, or as the case may be, such a final output signal may be compared with a prestored signal representing a standard pattern of defects.
  • amplifier means not shown
  • predetermined amplification factors respectively
  • the glass plate may be moved relative to the fixed optical system, or alternatively, the light source and photodetectors may be moved to scan the stationary glass plate.
  • FIG. 7 shows that the intensity distribution characteristic of the light reflected from the surface of a plate varies depending upon the nature of that surface.
  • the light beam directed onto a figured glass having its upper smooth surface by means of a light source 11 through a lens 13 and a slit 16 is represented by I
  • the light beam is divided into a reflected light I, and a forwardly-advancing light I which light l reaches the lower surface of the glass plate while it is being partially absorbed by the plate, whereupon one portion of said light I is emitted as a passed-through light 1 and the other portion thereof is reflected upwards to produce a second reflected light I, and a second forwardly-advancing light i
  • the light will thus undergo repeated refraction and reflection.
  • I has a specific distribution characteristic depending upon the nature of the surface of the glass plate and the area of distribution of l, is usually narrow in the case of a smooth surface having no defect, but, when there is a defect 14 at the reflection point of the incident light I on the upper surface of a figured glass 12, the area of distribution of the reflected light I, is broader in width than that of said reflected light I, resulting from the normal portion of the smooth surface of the plate, although it varies in accordance with the kind of the defect.
  • defect detecting system which is constituted by combining the defect detector utilizing reflected light shown in FIG. 7 with the aforementioned defect detector utilizing passed-through light shown in FIG. la.
  • a light source 11 and a photodetector 27 are disposed above a figured glass 22 to form an optical system, and an optical system comprising a second light source 21, lenses 23, 23 and 23", and a slit 26 is provided on the opposite side thereof with respect to the first light source 11.
  • the distribution characteristic of the light from the light source 21 that has been passed through the normal portion of the plate and scattered therefrom is represented by a. and the distribution characteristics of the reflected light resulting from the light beam of the source 11 that has been projected onto the normal portion of the plate are represented by b, and b respectively.
  • A represents the distribution characteristic of the light from the light source 21 that has been passed through the abnormal portion of the plate.
  • the incident light beam lb is scattered by such a surface defect 14 to provide such a distribution-characteristic of light as is indicated by 12,.
  • the area of light distribution of b is much narrower in width than that of a.
  • the area of light distribution of h is not broader than that of a.
  • the photodetector never catches the light b, and b reflected from the upper surface of the plate having no defect.
  • the second optical system comprising the light source 11 and the photodetector 27 can detect with a high precision defects which cannot be detected by means of the first light source
  • the method according to the invention is equally applicable to any other shape of member such as bottle, so long as a photodetector can be disposed so as to catch the light scattered from a defect in the member.
  • a method of detecting defects in a flat substantially transparent member having a figured surface on one side thereof and a smooth surface on an opposite side thereof comprising the steps of:
  • An apparatus for detecting defects in a flat substantially transparent member having a figured surface on one side thereof and a smooth surface on an opposite side thereof comprising:
  • a first source of light disposed in a first side region of said member in a spaced relationship to the figured surface of said member, said first light source directing a first collimated beam onto said figured surface of said member and through said member;
  • a second source of light disposed in an opposite side region of said member in a spaced relationship to said smooth surface of said member, said second light source directing a second collimated beam onto said smooth surface of said member, said second collimated beam reflecting from said smooth surface; and a photodetector means disposed on said opposite side of said member in a spaced relationship thereto at a position outside a region of light from said first source having passed through a non-defective portion of said member and light from said second source having been reflected from said smooth sur- 7 8 face of said member having no defects, and inside of said member are significant; a region'where light from said first source having whereby light received by said photodetector means passed through a defective portion of said member is indicative of internal and smooth surface defects I and light from said second source having been reof said member.

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Cited By (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4038554A (en) * 1976-03-09 1977-07-26 Columbia Research Corporation Detection of flaws in a moving web of transparent material
FR2500630A1 (fr) * 1981-02-25 1982-08-27 Leser Jacques Procede pour la recherche des defauts des feuilles de verre et dispositif mettant en oeuvre ce procede
FR2536860A1 (fr) * 1982-11-25 1984-06-01 Saint Gobain Isover Procede et dispositif pour l'analyse d'heterogeneites dans un materiau transparent
US4468120A (en) * 1981-02-04 1984-08-28 Nippon Kogaku K.K. Foreign substance inspecting apparatus
US4610541A (en) * 1983-04-07 1986-09-09 Nippon Kogaku K. K. Foreign substance inspecting apparatus
EP0156346A3 (en) * 1984-03-30 1987-05-13 Eisai Co., Ltd. Method and apparatus for detecting inferior container
US4886975A (en) * 1986-02-14 1989-12-12 Canon Kabushiki Kaisha Surface examining apparatus for detecting the presence of foreign particles on two or more surfaces
US4914308A (en) * 1988-12-27 1990-04-03 Eastman Kodak Company Web defect scanning apparatus with incandescent illumination means
EP0323564A3 (de) * 1988-01-04 1990-05-30 Erwin Sick GmbH Optik-Elektronik Optische Fehlerinspektionsvorrichtung
WO1991013342A1 (en) * 1990-03-02 1991-09-05 Intec Corp. Scanner detector
US5293538A (en) * 1990-05-25 1994-03-08 Hitachi, Ltd. Method and apparatus for the inspection of defects
FR2697086A1 (fr) * 1992-10-20 1994-04-22 Thomson Csf Procédé et dispositif d'inspection de matériau transparent.
US5452079A (en) * 1992-06-26 1995-09-19 Central Glass Company, Limited Method of and apparatus for detecting defect of transparent sheet as sheet glass
US5559341A (en) * 1993-09-03 1996-09-24 Minnesota Mining And Manufacturing Company System for detecting defects in articles using a scanning width which is less than width of portion of the article scanned
US5907396A (en) * 1996-09-20 1999-05-25 Nikon Corporation Optical detection system for detecting defects and/or particles on a substrate
US6191849B1 (en) * 1997-12-26 2001-02-20 Hitachi, Ltd. Wafer inspecting apparatus
WO2001073403A1 (en) * 2000-03-29 2001-10-04 Corning Incorporated Measuring inclusion depth
WO2001073410A1 (en) * 2000-03-29 2001-10-04 Corning Incorporated Detecting inclusions in transparent sheets
EP1210586A4 (en) * 1999-09-02 2002-12-04 Resolve Engineering Pty Ltd DETECTION OF GLASS INCLUSIONS
US6618136B1 (en) * 1998-09-07 2003-09-09 Minolta Co., Ltd. Method and apparatus for visually inspecting transparent body and translucent body
DE10210209A1 (de) * 2002-03-01 2003-09-11 Zeiss Carl Smt Ag Verfahren und Vorrichtung zur Streulichtinspektion transparenter Prüflinge
US6784998B1 (en) * 1999-04-28 2004-08-31 The Yokohama Rubber Co., Ltd. Sheet-material foreign-matter detecting method and apparatus
US20050046832A1 (en) * 2003-07-09 2005-03-03 Carl Zeiss Smt Ag Apparatus for scattered light inspection of optical elements
WO2005116616A1 (de) * 2004-05-29 2005-12-08 Isra Surface Vision Gmbh Vorrichtung und verfahren zur detektion von kratzern
WO2006029536A1 (en) * 2004-09-17 2006-03-23 De.Vice Scientific Incorporated Optical inspection of flat media using direct image technology
WO2006087213A3 (de) * 2005-02-18 2007-03-29 Schott Ag Verfahren und vorrichtung zur erfassung und/oder klassifizierung von fehlstellen
NL1025122C2 (nl) * 2002-12-27 2008-02-05 Infineon Technologies Ag Inrichting en werkwijze voor het bepalen van de fysische eigenschappen van een onbewerkt masker.
US20080060383A1 (en) * 2005-01-12 2008-03-13 Glassiq Gmbh & Co. Kg Method for Examining the Presence of Nickle Sulphide Inclusions in Tempered Safety Glass and Method Therefor
US20100214564A1 (en) * 2009-02-20 2010-08-26 Samsung Corning Precision Glass Co., Ltd. Apparatus for detecting particles on a glass surface and a method thereof
US20110194113A1 (en) * 2009-02-27 2011-08-11 Mitsubishi Heavy Industries, Ltd. Thin-film inspection apparatus and inspection method
EP2390656A2 (de) 2010-05-28 2011-11-30 ISRA Vision AG Einrichtung und Verfahren zur optischen Überprüfung
WO2015003966A1 (de) * 2013-07-09 2015-01-15 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur herstellung eines spiegelsubstrat-rohlings aus titan-dotiertem kieselglas für die euv-lithographie, sowie system zur positionsbestimmung von defekten in einem rohling
EP3232184A1 (en) 2016-04-15 2017-10-18 Sorter Spolka Jawna Konrad Grzeszczyk Michal Ziomek Surface source of side light
EP3572802A1 (de) 2018-05-24 2019-11-27 AVI Systems GmbH Verfahren zur detektion von diskontinuitäten in einem lichtdurchlässigen werkstück
US10753883B2 (en) 2017-06-07 2020-08-25 Guardian Glass, LLC Method and system for detecting inclusions in float glass
CN113916908A (zh) * 2021-09-03 2022-01-11 苏州鑫格雅电子科技有限公司 一种提高玻璃物性表面处理后用划痕检测装置及其检测方法
US11940383B2 (en) 2018-10-01 2024-03-26 Guardian Glass, LLC Method and system for detecting inclusions in float glass based on spectral reflectance analysis

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3030516A (en) * 1958-09-15 1962-04-17 Comstock & Wescott Transparent container inspection
US3085160A (en) * 1960-04-25 1963-04-09 Emhart Mfg Co Glassware inspection apparatus
US3302786A (en) * 1964-09-29 1967-02-07 Owens Illinois Inc Inspecting glass containers with lasers
US3338130A (en) * 1960-12-13 1967-08-29 Saint Gobain Process and apparatus for the detection of flaws in transparent sheets
US3361025A (en) * 1960-12-13 1968-01-02 Saint Gobain Method and apparatus of detecting flaws in transparent bodies
US3386579A (en) * 1964-08-22 1968-06-04 Schulze Ernst Method of and apparatus for detecting light-deflecting flaws in hollow glass articles
US3415433A (en) * 1964-01-28 1968-12-10 Ppg Industries Inc Radiation sensitive apparatus for severing glass along a score mark
US3475615A (en) * 1966-11-29 1969-10-28 Gen Optique Soc Process and apparatus for the detection of flaws in a transparent material
US3478218A (en) * 1965-12-15 1969-11-11 Itt Apparatus and method for detecting flaws in articles of glass and the like
US3493769A (en) * 1966-02-15 1970-02-03 Philco Ford Corp System,including pulse shape discriminator for detecting flaws in transparent material
US3533704A (en) * 1967-06-15 1970-10-13 Emhart Corp Method of and apparatus for optically testing glass objects for cracks

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3030516A (en) * 1958-09-15 1962-04-17 Comstock & Wescott Transparent container inspection
US3085160A (en) * 1960-04-25 1963-04-09 Emhart Mfg Co Glassware inspection apparatus
US3338130A (en) * 1960-12-13 1967-08-29 Saint Gobain Process and apparatus for the detection of flaws in transparent sheets
US3361025A (en) * 1960-12-13 1968-01-02 Saint Gobain Method and apparatus of detecting flaws in transparent bodies
US3415433A (en) * 1964-01-28 1968-12-10 Ppg Industries Inc Radiation sensitive apparatus for severing glass along a score mark
US3386579A (en) * 1964-08-22 1968-06-04 Schulze Ernst Method of and apparatus for detecting light-deflecting flaws in hollow glass articles
US3302786A (en) * 1964-09-29 1967-02-07 Owens Illinois Inc Inspecting glass containers with lasers
US3478218A (en) * 1965-12-15 1969-11-11 Itt Apparatus and method for detecting flaws in articles of glass and the like
US3493769A (en) * 1966-02-15 1970-02-03 Philco Ford Corp System,including pulse shape discriminator for detecting flaws in transparent material
US3475615A (en) * 1966-11-29 1969-10-28 Gen Optique Soc Process and apparatus for the detection of flaws in a transparent material
US3533704A (en) * 1967-06-15 1970-10-13 Emhart Corp Method of and apparatus for optically testing glass objects for cracks

Cited By (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4038554A (en) * 1976-03-09 1977-07-26 Columbia Research Corporation Detection of flaws in a moving web of transparent material
US4468120A (en) * 1981-02-04 1984-08-28 Nippon Kogaku K.K. Foreign substance inspecting apparatus
FR2500630A1 (fr) * 1981-02-25 1982-08-27 Leser Jacques Procede pour la recherche des defauts des feuilles de verre et dispositif mettant en oeuvre ce procede
EP0060160A1 (fr) * 1981-02-25 1982-09-15 Cem Compagnie Electro-Mecanique Procédé pour la recherche des défauts des feuilles de verre et dispositif mettant en oeuvre ce procédé
FR2536860A1 (fr) * 1982-11-25 1984-06-01 Saint Gobain Isover Procede et dispositif pour l'analyse d'heterogeneites dans un materiau transparent
EP0110770A3 (fr) * 1982-11-25 1984-07-11 Isover Saint-Gobain Procédé et dispositif pour l'analyse d'hétérogénéités dans un matériau transparent
US4541856A (en) * 1982-11-25 1985-09-17 Isover Saint-Gobain Process and device for the analysis of the heterogeneous features in a transparent material
US4610541A (en) * 1983-04-07 1986-09-09 Nippon Kogaku K. K. Foreign substance inspecting apparatus
EP0156346A3 (en) * 1984-03-30 1987-05-13 Eisai Co., Ltd. Method and apparatus for detecting inferior container
US5017798A (en) * 1986-02-14 1991-05-21 Canon Kabushiki Kaisha Surface examining apparatus for detecting the presence of foreign particles on two or more surfaces
US4886975A (en) * 1986-02-14 1989-12-12 Canon Kabushiki Kaisha Surface examining apparatus for detecting the presence of foreign particles on two or more surfaces
EP0323564A3 (de) * 1988-01-04 1990-05-30 Erwin Sick GmbH Optik-Elektronik Optische Fehlerinspektionsvorrichtung
US4914308A (en) * 1988-12-27 1990-04-03 Eastman Kodak Company Web defect scanning apparatus with incandescent illumination means
WO1991013342A1 (en) * 1990-03-02 1991-09-05 Intec Corp. Scanner detector
US5068523A (en) * 1990-03-02 1991-11-26 Intec Corp. Scanner detector array and light diffuser
US5293538A (en) * 1990-05-25 1994-03-08 Hitachi, Ltd. Method and apparatus for the inspection of defects
US5452079A (en) * 1992-06-26 1995-09-19 Central Glass Company, Limited Method of and apparatus for detecting defect of transparent sheet as sheet glass
FR2697086A1 (fr) * 1992-10-20 1994-04-22 Thomson Csf Procédé et dispositif d'inspection de matériau transparent.
WO1994009358A1 (fr) * 1992-10-20 1994-04-28 Thomson-Csf Procede et dispositif d'inspection de materiau transparent
US5559341A (en) * 1993-09-03 1996-09-24 Minnesota Mining And Manufacturing Company System for detecting defects in articles using a scanning width which is less than width of portion of the article scanned
US5907396A (en) * 1996-09-20 1999-05-25 Nikon Corporation Optical detection system for detecting defects and/or particles on a substrate
US6191849B1 (en) * 1997-12-26 2001-02-20 Hitachi, Ltd. Wafer inspecting apparatus
US6618136B1 (en) * 1998-09-07 2003-09-09 Minolta Co., Ltd. Method and apparatus for visually inspecting transparent body and translucent body
US6784998B1 (en) * 1999-04-28 2004-08-31 The Yokohama Rubber Co., Ltd. Sheet-material foreign-matter detecting method and apparatus
EP1210586A4 (en) * 1999-09-02 2002-12-04 Resolve Engineering Pty Ltd DETECTION OF GLASS INCLUSIONS
WO2001073410A1 (en) * 2000-03-29 2001-10-04 Corning Incorporated Detecting inclusions in transparent sheets
WO2001073403A1 (en) * 2000-03-29 2001-10-04 Corning Incorporated Measuring inclusion depth
US6388745B2 (en) * 2000-03-29 2002-05-14 Corning Incorporated Detecting inclusions in transparent sheets
DE10210209A1 (de) * 2002-03-01 2003-09-11 Zeiss Carl Smt Ag Verfahren und Vorrichtung zur Streulichtinspektion transparenter Prüflinge
NL1025122C2 (nl) * 2002-12-27 2008-02-05 Infineon Technologies Ag Inrichting en werkwijze voor het bepalen van de fysische eigenschappen van een onbewerkt masker.
US20050046832A1 (en) * 2003-07-09 2005-03-03 Carl Zeiss Smt Ag Apparatus for scattered light inspection of optical elements
US7443500B2 (en) 2003-07-09 2008-10-28 Carl Zeiss Smt Ag Apparatus for scattered light inspection of optical elements
JP4918032B2 (ja) * 2004-05-29 2012-04-18 イスラ サーフィス ヴィズィオーン ゲーエムベーハー 傷の検出装置及びその方法
US7453563B2 (en) 2004-05-29 2008-11-18 Isra Surface Vision Gmbh Device and method for detecting scratches
JP2008501105A (ja) * 2004-05-29 2008-01-17 イスラ サーフィス ヴィズィオーン ゲーエムベーハー 傷の検出装置及びその方法
WO2005116616A1 (de) * 2004-05-29 2005-12-08 Isra Surface Vision Gmbh Vorrichtung und verfahren zur detektion von kratzern
US20070252996A1 (en) * 2004-05-29 2007-11-01 Armin Rudert Device and Method for Detecting Scratches
CN100590426C (zh) * 2004-05-29 2010-02-17 伊斯拉表面视觉有限公司 用于检测划痕的装置和方法
US8040502B2 (en) 2004-09-17 2011-10-18 Wdi Wise Device Inc. Optical inspection of flat media using direct image technology
WO2006029536A1 (en) * 2004-09-17 2006-03-23 De.Vice Scientific Incorporated Optical inspection of flat media using direct image technology
US20080060383A1 (en) * 2005-01-12 2008-03-13 Glassiq Gmbh & Co. Kg Method for Examining the Presence of Nickle Sulphide Inclusions in Tempered Safety Glass and Method Therefor
WO2006087213A3 (de) * 2005-02-18 2007-03-29 Schott Ag Verfahren und vorrichtung zur erfassung und/oder klassifizierung von fehlstellen
US20100214564A1 (en) * 2009-02-20 2010-08-26 Samsung Corning Precision Glass Co., Ltd. Apparatus for detecting particles on a glass surface and a method thereof
US8027036B2 (en) * 2009-02-20 2011-09-27 Samsung Corning Precision Materials Co., Ltd. Apparatus for detecting particles on a glass surface and a method thereof
US8497991B2 (en) * 2009-02-27 2013-07-30 Mitsubishi Heavy Industries, Ltd. Thin-film inspection apparatus and inspection method
US20110194113A1 (en) * 2009-02-27 2011-08-11 Mitsubishi Heavy Industries, Ltd. Thin-film inspection apparatus and inspection method
DE102010021853A1 (de) 2010-05-28 2011-12-01 Isra Vision Ag Einrichtung und Verfahren zur optischen Überprüfung eines Gegenstands
EP2390656A2 (de) 2010-05-28 2011-11-30 ISRA Vision AG Einrichtung und Verfahren zur optischen Überprüfung
WO2015003966A1 (de) * 2013-07-09 2015-01-15 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur herstellung eines spiegelsubstrat-rohlings aus titan-dotiertem kieselglas für die euv-lithographie, sowie system zur positionsbestimmung von defekten in einem rohling
US10016872B2 (en) 2013-07-09 2018-07-10 Heraeus Quarzglas Gmbh & Co. Kg Method for producing a mirror substrate blank of titanium-doped silica glass for EUV lithography, and system for determining the position of defects in a blank
EP3232184A1 (en) 2016-04-15 2017-10-18 Sorter Spolka Jawna Konrad Grzeszczyk Michal Ziomek Surface source of side light
US10753883B2 (en) 2017-06-07 2020-08-25 Guardian Glass, LLC Method and system for detecting inclusions in float glass
EP3572802A1 (de) 2018-05-24 2019-11-27 AVI Systems GmbH Verfahren zur detektion von diskontinuitäten in einem lichtdurchlässigen werkstück
US11940383B2 (en) 2018-10-01 2024-03-26 Guardian Glass, LLC Method and system for detecting inclusions in float glass based on spectral reflectance analysis
CN113916908A (zh) * 2021-09-03 2022-01-11 苏州鑫格雅电子科技有限公司 一种提高玻璃物性表面处理后用划痕检测装置及其检测方法

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