US3754153A - Crystal mounting assembly - Google Patents
Crystal mounting assembly Download PDFInfo
- Publication number
- US3754153A US3754153A US00204177A US3754153DA US3754153A US 3754153 A US3754153 A US 3754153A US 00204177 A US00204177 A US 00204177A US 3754153D A US3754153D A US 3754153DA US 3754153 A US3754153 A US 3754153A
- Authority
- US
- United States
- Prior art keywords
- crystal
- electrodes
- plate
- assembly
- contacts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 107
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 229910010293 ceramic material Inorganic materials 0.000 claims description 3
- 230000000295 complement effect Effects 0.000 claims description 2
- 239000000758 substrate Substances 0.000 abstract description 18
- 239000000919 ceramic Substances 0.000 abstract description 3
- 239000000356 contaminant Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000005476 soldering Methods 0.000 description 5
- 230000007613 environmental effect Effects 0.000 description 4
- 238000003466 welding Methods 0.000 description 4
- 239000003517 fume Substances 0.000 description 3
- 239000003351 stiffener Substances 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000036760 body temperature Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000002939 deleterious effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
- 230000009931 harmful effect Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 229920000136 polysorbate Polymers 0.000 description 1
- WYROLENTHWJFLR-ACLDMZEESA-N queuine Chemical compound C1=2C(=O)NC(N)=NC=2NC=C1CN[C@H]1C=C[C@H](O)[C@@H]1O WYROLENTHWJFLR-ACLDMZEESA-N 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
- 210000000707 wrist Anatomy 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/10—Mounting in enclosures
- H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
- H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
-
- G—PHYSICS
- G04—HOROLOGY
- G04F—TIME-INTERVAL MEASURING
- G04F5/00—Apparatus for producing preselected time intervals for use as timing standards
- G04F5/04—Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses
- G04F5/06—Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses using piezoelectric resonators
- G04F5/063—Constructional details
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/09—Elastic or damping supports
Definitions
- ABSTRACT A crystal mounting assembly provided with a hermetically sealed and evacuated envelope in which a crystal unit is supported on a rigid ceramic substrate by means of straimfree leads connecting the crystal electrodes to contacts plated on the substrate.
- the substrate contacts are connected to terminal pins projecting from the envelope, whereby the lead-supported crystal is mechanically isolated from and unaffected by stresses imposed on the pins.
- This invention relates generally to piezoelectric crystal units, and more particularly to a mounting assembly for protectively housing a crystal unit.
- Piezoelectric crystal units are high-Q resonators that serve as stable frequency standards.
- such standards have been employed as a time base in electronic watches, the frequency of the crystal being divided down electronically to provide low-frequency pulses for operating a time display.
- One such crystalcontrolled timepiece is disclosed in the co-pending application of Mutter and Gruner, entitled ELEC- TRONIC SYSTEM MODULE FOR CRYSTAL- CONTROLLED WATCH, Ser. No. 204,000, filed Dec. 2, 1971.
- the crystal mounting have a low mechanical impedance and yet sufficient rigidity so that the crystal unit, when subjected to mechanical shock,will not change its characteristics as an oscillator. It is likewise desirable that the crystal unit be supported within an evacuated, hermetically sealed container.
- An evacuated container not only eliminates losses caused by ultrasonic radiation into the air, but it also prevents air loading, contamination, moisture and other deleterious factors from affecting the crystal.
- the Q of a crystal unit in vacuum is much higher than in air.
- soldering or head-welding has been found to be objectionable, for the fumes generated by these techniques are trapped within the envelope, and contaminates evolving from the soldering materials settle on the crystal surface. As a consequence, the Q of the crystal is adversely affected, and the frequency thereof may be shifted slightly. A slight shift in frequency is sufficient to render the timepiece inaccurate.
- Yet another object of the invention is to provide a crystal mounting assembly which is insensitive to ambient temperature changes.
- a crystal mounting assembly including an envelope having a flanged base section and a flanged cover section which are joined together and hermetically sealed by coldwelding the flanges.
- a pair of terminal pins project from the base section.
- Seated within the base section is a ceramic stiffener plate having a zero-temperature coefficient of expansion, the upper surface of the plate having contacts plated thereon which are connected to the inner ends of the pins.
- a coeffient as used in chemistry or physical is a number expressing the amount of some change or effect under certain specified conditions as to temperature, pressure, etc., (The Encyclopedia of Chemistry-' 3rd Ed. -Van Nostrand Reinhold).
- the difference between a temperature coefficient of expansion and a temperature coefficient of frequency is that the former deals 'with a change in the size of an element resulting from a change in the temperature of the element and the latter with a change in the frequency produced by the element resulting from a change in the temperature of the element.
- a crystal unit Mounted above the plate is a crystal unit whose electrodes are connected at nodal points to unstrained leads which serve to support the crystal unit, the ends of the leads being connected to the contacts on the substrate. Because the leads, though electrically connected thereto, are mechanically isolated from the pins, forces giving rise to pin displacement are not transmitted to the leads.
- FIG. 1 is a perspective view of a crystal mounting assembly in accordance with the invention
- FIG. 2 separately shows the cover of the assembly envelope
- FIG. 3 separately shows the base of the envelope with the stiffener substrate and the crystal unit seated therein;
- FIG. 4 is an exploded view of the arrangement shown in FIG. 3;
- FIG. 5 is a perspective view of the crystal unit, the hidden right and bottom faces thereof being rotated to bring them into view;
- FIG. 6 is a plan view of the crystal unit and the supporting leads therefor;
- FIG. 7 is a plan view of the substrate
- FIG. 8 is a plan view of the crystal unit mounted on the substrate.
- FIG. 9 is a schematic view of the electrode connections for the crystal unit.
- FIG. I there is shown a crystal mounting assembly in accordance with the invention, the assembly including an evacuated metal envelope, preferably formed of a non-ferromagnetic material such as aluminum.
- the envelope is constituted by a cover section 10 having an elliptical formation, welded or otherwise bonded to a similarly shaped base section Cover section 10, as best seen in FIG. 2, is provided with a peripheral flange 10A that exactly matches the peripheral flange 11A formed in base section 11 (see FIGS. 3 and 4).
- the flangs on the two sections are united, so that the envelope defined by the joined sections is hermetically sealed.
- the joining together of the flanges is preferably carried out by a high-pressure cold-welding technique that avoids fumes and contaminants.
- base section 11 Projecting downwardly from the floor of base section 11 is a pair of terminal pins 12 and 13, anchoredin glass-to-metal seals 14 and 15, respectively, which insulate the pins from the metal envelope.
- a generally rectangular stiffener plate 16 Seated within base section 11 is a generally rectangular stiffener plate 16 whose ends are rounded to conform to the rounded ends of the base section.
- Plate 16 which is preferably formed of ceramic material, such as alumina or other rigid, high-strength insulating material, acts as a substrate for a piezoelectric crystal unit, generally designated by numeral 17.
- Electroplated or otherwise formed on the top surfaceof plate 16 are three conductive layers l8, l9 and 20 which serve as electrical contacts.
- Layer I8 entirely covers one end portion of the top surface, whereas layers l9 and 20, which together cover the other end portion, are spaced apart by a longitudinal channel so that these layers define separate contacts.
- terminal pin 12 passes through a bore in plate 16, and is soldered to contact 18.
- the inner end 13A of terminal pin 13 goes through another bore in plate 16, and is soldered to contact 19. No terminal pin is provided for layer 20, for reasons which will be later explaned.
- Crystal unit 17 is composed of a bar-shaped piezoelectric crystal element whose ends are unplated but whose four faces are metallized in a particular pattern to define electrodes.
- crystal cuts are the X and Y cuts.
- An X-cut crystal body vibrates in a thickness extensional mode wherein the large surfaces of the crystal plate move apart and come together.
- the Y-cut plate vibrates in a thickness shear mode, wherein the upper surface alternately slides one way and then the other, as the lower surface moves similarly in the opposite direction.
- the bar-shaped crystal element 21, which is in the form and cut preferred for inclusion in the assembly, is an X-Y cut crystal operating in the flexion mode.
- the crystal element is supported over substrate 16 by leads connected thereto at nodal points to avoid withdrawing energy from the crystal.
- an X-Y cut crystal is that it makes it possible with a crystal of tiny dimensions to operate at a relatively low frequency in a range suitable for electronic timepieces.
- an X-Y cut crystal operating at a frequency of 32,768 Hz has the following dimensions: lengthabout inch; widthabout l/l6 inch; thicknessabout l/32 inch. Since the envelope dimensions are such as to encompass this tiny crystal bar, the overall size of the assembly is quite small and lends itself to inclusion in a crystal-controlled timepiece.
- Another significant advantage of the X-Y cut crystal is that its temperature coefficient of frequency over the temperature range normally encountered in watches is substantially flat-hence there is no need to compensate the crystal frequency for temperature variations.
- a so-called zero" temperature-coefficient crystal is one having a very small temperature coefficient over a very wide range (0 C to C). This is true only of a GT cut crystal. All othercrystals have parabolic characteristics, such that at the tum-over point, the slope of the frequency-temperature curve is zero. At this point,
- the crystal has a zero temperature coefficient of frequency at a single temperature only.
- This zero-temperature coefficient of frequency occurs in an X-Y cut crystal at about 30 C, which is close to body temperature.
- the X-Y cut crystal when included in a watch worn on the wrist, it effectively operates with a zero-temperature coefficient of frequency.
- the rangeat which substantially no frequency change occurs in an X-Y cut crystal extends about C above and 10 below 30 C (i.e., from to 40). As a practical matter, therefore, even when the crystal 2 watch is not being worn, the frequency of its X-Y cut crystal is not significantly affected by ordinary changes in ambient temperature.
- FIG. 9 shows crystal 21 provided with top and bottom electrodes TE and BE plated on the top and bottom faces thereof, and left and right electrodes LE and RE plated on the left and right faces thereof. The ends of the crystal element are free of electrodes.
- the top and bottom electrodes TE and BE are interconnected and go to terminal pin 13
- the left and right electrodes LE and RE are interconnected and go to terminal pin 12.
- the electric field is established be tween the top-bottom electrode pair and the left-right electrode pair.
- the left electrode LE is a rectangular layer extending over the entire surface of the left face except for the margins thereof, whereas the similar right electrode RE is somewhat shorter to allow room for the connecting strip CS.
- the right and left electrodes are not interconnected on the crystal bar and must be externally connected to provide the circuit of FIG. 9.
- connection between the crystal electrodes and the pins are effected, as shown in FIGS. 4, 6, 7 and 8, by four wire leads L,, L,, L, and L,, which are symmetrically arranged and connected to the electrodes at nodal points on the crystal, each lead having the formation of a question mark.
- lead L is connected at a nodal point to the connecting strip CS, and hence electrically to both the top and bottom electrodes TE and BE.
- the other end of lead L is connected to contact 19 on the substrate and hence to pin 12.
- lead L One end of lead L, is connected at a nodal point to left electrode LE, the other end of this lead being connected to contact 20 on the substrate. This contact is electrically isolated from the other contacts, and goes to no terminal pin.
- lead L performs only a support function and acts as one of the four symmetrically arranged feet maintaining the crystal unit at its proper position above substrate 16.
- Lead L is connected at one end at a nodal point to right electrode RE, and at the other end to contact 18.
- Lead L is connected at one end to left electrode LE at a nodal point and at the other end to the same contact 18.
- Contact 18 therefore serves to interconnect the left and right electrodes RE and LE and to connect these electrodes to terminal pin 12.
- connection of the ends of the leads to the electrodes in the crystal is preferably carried out by a thermocompression technique rather than by soldering.
- thermo-compression acts to weld the head or tip of the lead to the electrode surface at the nodal point thereon, without effectively broadening the tip, as would be the case with a soldered joint 'where the tip is surrounded with a mound of solder that acts to extend the connection area beyond the nodal point, as a consequence of which, energy is transmitted to the lead.
- each electrode lead In soldering the other end of each electrode lead to its proper contact on the substrate, it is important that the lead be permitted to float before it is soldered in place in order to avoid any strain on the lead that might be transmitted to the crystal. That is to say, the shape or orientation of the lead must be such that no further bending is required to bring it to its point of connection, for if being is necessary, it will create strain forces.
- the rigid substrate on which the crystal unit is mounted by strain-free leads serving as supporting feet as well as electrical connections acts to isolate the crystal unit from any mechanical forces which deform the envelope and shift the pin positions.
- the mounted crystal unit in the evacuated envelope is therefor unstrained, it is free of contaminants and operates at high Q in vacuo at a frequency precisely determined by its dimensions.
- a miniaturized crystal mounting assembly comprising:
- a rigid insulating plate formed of a ceramic material having a substantially zero temperature coefficient of expansion seated within said base section on the floor thereof, said plate having at least two contacts plated on the top surface thereof, the inner ends of said pins passing through bores in said plate and being connected to said contacts;
- E. strain-free leads for supporting said unit within said cover section above said plate, the longitudinal axis of said unit being parallel to the surface of said plate, said leads being connected between said electrodes at nodal points thereon adjacent the ends of said bar-shaped unit and said contacts on said plate adjacent the ends of said plate.
- said plate has a conductive layer coated thereon on one side thereof which constitutes a first contact which is connected to said first pin, second and third conductive layers coated thereon on the other side thereof constituting second and third contacts, said second pin being connected to said second contact, four symmetrically arranged leads being provided, the first and second leads extending between the left and right electrodes and said first contact, the third lead extending between said connecting strip and said second contact, and the fourth lead being connected between said left electrode and said third contact.
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- General Physics & Mathematics (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Electric Clocks (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US20417771A | 1971-12-02 | 1971-12-02 |
Publications (1)
Publication Number | Publication Date |
---|---|
US3754153A true US3754153A (en) | 1973-08-21 |
Family
ID=22756942
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US00204177A Expired - Lifetime US3754153A (en) | 1971-12-02 | 1971-12-02 | Crystal mounting assembly |
Country Status (8)
Country | Link |
---|---|
US (1) | US3754153A (ja) |
JP (1) | JPS5336062Y2 (ja) |
CA (1) | CA968069A (ja) |
CH (1) | CH552847A (ja) |
FR (1) | FR2170415A5 (ja) |
GB (1) | GB1415337A (ja) |
HK (1) | HK56576A (ja) |
IT (1) | IT971402B (ja) |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USB343240I5 (ja) * | 1972-03-21 | 1975-01-28 | ||
US3885174A (en) * | 1974-01-16 | 1975-05-20 | Motorola Inc | X-T flexure piezoelectric device |
US4453104A (en) * | 1982-05-12 | 1984-06-05 | Motorola, Inc. | Low-profile crystal package with an improved crystal-mounting arrangement |
US4891469A (en) * | 1987-09-22 | 1990-01-02 | U.S. Philips Corporation | Piezoelectric resonator housing for surface mounting |
US5030875A (en) * | 1990-01-26 | 1991-07-09 | Motorola, Inc. | Sacrificial quartz crystal mount |
US5256929A (en) * | 1991-10-08 | 1993-10-26 | Akai Electric Co., Ltd. | Vibrator support structure |
US5493166A (en) * | 1988-08-12 | 1996-02-20 | Murata Manufacturing Co., Ltd. | Vibrator and vibrating gyroscope using the same |
US5681410A (en) * | 1990-07-26 | 1997-10-28 | Ngk Insulators, Ltd. | Method of producing a piezoelectric/electrostrictive actuator |
US5777423A (en) * | 1993-08-03 | 1998-07-07 | Nanomotion Ltd. | Ceramic motor |
US5998909A (en) * | 1996-05-15 | 1999-12-07 | Tokin Corporation | Piezoelectric transformer |
US6016699A (en) * | 1988-08-12 | 2000-01-25 | Murata Manufacturing Co., Ltd. | Vibrator including piezoelectric electrodes of detectors arranged to be non-parallel and non-perpendicular to Coriolis force direction and vibratory gyroscope using the same |
US6064140A (en) * | 1993-07-09 | 2000-05-16 | Nanomotion Ltd | Ceramic motor |
US20060017516A1 (en) * | 2004-05-25 | 2006-01-26 | Broadcom Corporation | Small crystal with grounded package |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4484158A (en) * | 1982-07-07 | 1984-11-20 | General Electric Company | Monolithic crystal filter and method of manufacturing same |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1830328A (en) * | 1926-12-20 | 1931-11-03 | Fed Telegraph Co | Cast piezo-electric device |
US2275122A (en) * | 1940-06-05 | 1942-03-03 | Bell Telephone Labor Inc | Piezoelectric crystal apparatus |
US2944117A (en) * | 1955-06-20 | 1960-07-05 | Erie Resistor Corp | Bender type piezoelectric transducer |
GB848030A (en) * | 1958-02-03 | 1960-09-14 | Marconi Wireless Telegraph Co | Improvements in or relating to piezo-electric crystals |
US3046423A (en) * | 1958-10-09 | 1962-07-24 | Bliley Electric Company | High shock and vibration resistant piezoelectric crystal units |
US3221189A (en) * | 1963-06-03 | 1965-11-30 | Dynamics Corp America | Ceramic ruggedized low frequency crystal unit |
US3518460A (en) * | 1968-10-30 | 1970-06-30 | Euphonics Corp | Ultrasonic transducer employing suspended piezoelectric plate |
US3566164A (en) * | 1967-06-05 | 1971-02-23 | Centre Electron Horloger | System for resiliently supporting an oscillation quartz in a casing |
US3581126A (en) * | 1969-01-13 | 1971-05-25 | Centre Electron Horloger | Mounting device for flexion vibrators |
-
1971
- 1971-12-02 US US00204177A patent/US3754153A/en not_active Expired - Lifetime
-
1972
- 1972-11-30 CH CH1748972A patent/CH552847A/xx unknown
- 1972-11-30 IT IT32321/72A patent/IT971402B/it active
- 1972-12-01 FR FR7242841A patent/FR2170415A5/fr not_active Expired
- 1972-12-01 CA CA158,451A patent/CA968069A/en not_active Expired
- 1972-12-01 GB GB5573272A patent/GB1415337A/en not_active Expired
-
1976
- 1976-09-16 HK HK565/76*UA patent/HK56576A/xx unknown
- 1976-12-10 JP JP1976165752U patent/JPS5336062Y2/ja not_active Expired
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1830328A (en) * | 1926-12-20 | 1931-11-03 | Fed Telegraph Co | Cast piezo-electric device |
US2275122A (en) * | 1940-06-05 | 1942-03-03 | Bell Telephone Labor Inc | Piezoelectric crystal apparatus |
US2944117A (en) * | 1955-06-20 | 1960-07-05 | Erie Resistor Corp | Bender type piezoelectric transducer |
GB848030A (en) * | 1958-02-03 | 1960-09-14 | Marconi Wireless Telegraph Co | Improvements in or relating to piezo-electric crystals |
US3046423A (en) * | 1958-10-09 | 1962-07-24 | Bliley Electric Company | High shock and vibration resistant piezoelectric crystal units |
US3221189A (en) * | 1963-06-03 | 1965-11-30 | Dynamics Corp America | Ceramic ruggedized low frequency crystal unit |
US3566164A (en) * | 1967-06-05 | 1971-02-23 | Centre Electron Horloger | System for resiliently supporting an oscillation quartz in a casing |
US3518460A (en) * | 1968-10-30 | 1970-06-30 | Euphonics Corp | Ultrasonic transducer employing suspended piezoelectric plate |
US3581126A (en) * | 1969-01-13 | 1971-05-25 | Centre Electron Horloger | Mounting device for flexion vibrators |
Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USB343240I5 (ja) * | 1972-03-21 | 1975-01-28 | ||
US3925693A (en) * | 1972-03-21 | 1975-12-09 | Ebauches Sa | Mounting device for a quartz resonator |
US3885174A (en) * | 1974-01-16 | 1975-05-20 | Motorola Inc | X-T flexure piezoelectric device |
US4453104A (en) * | 1982-05-12 | 1984-06-05 | Motorola, Inc. | Low-profile crystal package with an improved crystal-mounting arrangement |
US4891469A (en) * | 1987-09-22 | 1990-01-02 | U.S. Philips Corporation | Piezoelectric resonator housing for surface mounting |
US5569969A (en) * | 1988-08-12 | 1996-10-29 | Murata Manufacturing Co., Ltd. | Vibrator and vibratory gyroscope using the same |
US5493166A (en) * | 1988-08-12 | 1996-02-20 | Murata Manufacturing Co., Ltd. | Vibrator and vibrating gyroscope using the same |
US6016699A (en) * | 1988-08-12 | 2000-01-25 | Murata Manufacturing Co., Ltd. | Vibrator including piezoelectric electrodes of detectors arranged to be non-parallel and non-perpendicular to Coriolis force direction and vibratory gyroscope using the same |
US6016698A (en) * | 1988-08-12 | 2000-01-25 | Murata Manufacturing Co., Ltd. | Vibratory gyroscope including piezoelectric electrodes or detectors arranged to be non-parallel and non-perpendicular to coriolis force direction |
US6161432A (en) * | 1988-08-12 | 2000-12-19 | Murata Manufacturing Co., Ltd. | Vibrator and vibratory gyroscope using the same |
US5030875A (en) * | 1990-01-26 | 1991-07-09 | Motorola, Inc. | Sacrificial quartz crystal mount |
US5681410A (en) * | 1990-07-26 | 1997-10-28 | Ngk Insulators, Ltd. | Method of producing a piezoelectric/electrostrictive actuator |
US5256929A (en) * | 1991-10-08 | 1993-10-26 | Akai Electric Co., Ltd. | Vibrator support structure |
US6064140A (en) * | 1993-07-09 | 2000-05-16 | Nanomotion Ltd | Ceramic motor |
US5777423A (en) * | 1993-08-03 | 1998-07-07 | Nanomotion Ltd. | Ceramic motor |
US5998909A (en) * | 1996-05-15 | 1999-12-07 | Tokin Corporation | Piezoelectric transformer |
US20060017516A1 (en) * | 2004-05-25 | 2006-01-26 | Broadcom Corporation | Small crystal with grounded package |
Also Published As
Publication number | Publication date |
---|---|
DE2258510B2 (de) | 1976-09-30 |
JPS5336062Y2 (ja) | 1978-09-02 |
CA968069A (en) | 1975-05-20 |
IT971402B (it) | 1974-04-30 |
CH1748972A4 (ja) | 1974-02-28 |
FR2170415A5 (ja) | 1973-09-14 |
DE2258510A1 (de) | 1973-06-07 |
HK56576A (en) | 1976-09-24 |
JPS52131972U (ja) | 1977-10-06 |
GB1415337A (en) | 1975-11-26 |
CH552847A (ja) | 1974-08-15 |
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