US3727051A - Electron microscope with automatically adjusted specimen stage - Google Patents

Electron microscope with automatically adjusted specimen stage Download PDF

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Publication number
US3727051A
US3727051A US00155474A US3727051DA US3727051A US 3727051 A US3727051 A US 3727051A US 00155474 A US00155474 A US 00155474A US 3727051D A US3727051D A US 3727051DA US 3727051 A US3727051 A US 3727051A
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specimen
tilt
optical axis
goniometer
electron optical
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R Page
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African Explosives and Chemical Industries Ltd
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African Explosives and Chemical Industries Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Definitions

  • a specimen stage for an electron microscope having a control system for automatically maintaining a Foreign Application Priority Data selected point of the specimen in the center of the June 29, 1970 Great Britain ..31,456/70 field of View during tilting the P" one t closed control system comprises an electrical computing circuit, including potentiometers coupled to the [52] US. Cl.
  • a specimen stage for an electron microscope may comprise a goniometer upon which the specimen can be mounted, and by means of which the specimen can be tilted about two mutually perpendicular axes with respect to the optical axis of the microscope, so that details of the specimen can be observed from different angles.
  • specimen positioning controls for applying translational movement to the goniometer in a plane transverse to the optical axis. By this arrangement a selected point of the specimen can be positioned on the optical axis, and therefore in the center of the field of view of the microscope.
  • the present invention overcomes the foregoing drawbacks of the prior art, and provides a specimen stage which automatically adjusts the transverse position of the specimen during tilting to maintain a selected point of the specimen on the optical axis of the microscope.
  • An electron microscope is provided with a specimen stage comprising: a goniometer for supporting a specimen and for tilting the specimen relative to the optical axis of the microscope; positioning means for applying translational movement to the goniometer in a plane transverse to the optical axis so as to enable a selected point of the specimen to be positioned on the optical axis; a tilt representing means responsive to the tilt applied to the specimen by the goniometer; position representing means responsive to the position in the specimen of said selected point; computing means fed by said tilt and position representing means to produce an output representative of a corrective translational movement to be applied to the goniometer in order to hold said selected point of the specimen substantially on the optical axis while said tilt is applied to the specimen; and means for applying said output to said stage positioning means so as to correct the translational position of the goniometer.
  • the computing means is also arranged to produce a focal length adjustment signal which is representative of the change in focal length of the ob- 5 jective lens of the electron microscope necessary to hold said selected point of the specimen substantially in focus while said tilt is applied to the specimen.
  • the computing means comprises an electrical computing circuit which may be either digital or analog.
  • the tilt and position representing means comprise potentiometers coupled mechanically to the goniometer and to the specimen positioning controls.
  • the computing means comprises a mechanical model of the goniometer and specimen, preferably on substantially enlarged scale.
  • the tilt, and the position of said selected point in the specimen are simulated by mechanical displacement of corresponding parts of the model, the corrective translational movement being derived from a mechanical displacement of another part of the model.
  • said tilt and position representing means comprise mechanical linkages coupling the model mechanically with the goniometer.
  • said tilt representing means may comprise a plurality of potentiometers coupled to the goniometer, which potentiometers are arranged to control electric motors which control the mechanical configuration of the model.
  • FIG. 1 is a schematic sectional view of an electron microscope
  • FIG. 2 is a perspective view of a specimen cartridge for the microscope, on an enlarged scale compared with FIG. 1;
  • FIG. 3 is a perspective view of the specimen cartridge of FIG. 2 mounted in the specimen stage of the microscope;
  • FIG. 4 is a vector diagram defining certain angles referred to
  • FIGS. 5 9 are block circuit diagrams of computing means for the stage
  • FIG. 10 is a schematic diagram of another part of the stage.
  • FIG. 11 is a diagrammatic view of part of alternative computing means for the stage.
  • the electron microscope comprises generally tubular evacuable housing 101 at one end of which is mounted an electron gun 102 for producing a beam of electrons directed along the axis of the housing 101.
  • the electrons pass in turn through a pair of condenser lenses 103, 104, an objective lens 105, and two projector lenses 106, 107, and finally strike a fluorescent screen 108 positioned in a viewing chamber 109, which is provided with an observation window 110.
  • Each of the lenses 103 107 comprises a winding 111 and a magnetic yoke 112 having a bore 113 through which the electron beam passes.
  • the yoke 112 has a gap 114, and it is the magnetic field across this gap which produces the focussing action of the lens.
  • the lenses 103 107 are substantially coaxial, their common axis of symmetry being the optical axis of the electron microscope.
  • a vacuum manifold 115 is provided for evacuating the interior of the housing 101 and the viewing chamber 109.
  • the specimen stage of the microscope includes a specimen support 117, adapted to receive a specimen cartridge 116, which can be inserted into the support by means of a specimen loading mechanism 118.
  • a specimen cartridge 116 When the cartridge 116 is inserted into the specimen stage, a specimen mounted within the cartridge, as will be described, is supported within the gap 114 of the objective lens 105.
  • the specimen cartridge 116 is generally tubular in shape, and carries at its lower end a goniometer assembly on which the specimen is mounted.
  • the goniometer assembly comprises an outer gimbal ring 119, pivotally mounted within the cartridge 116, and an inner gimbal ring 120, pivotally mounted within the outer gimbal ring 119, the axis 121 of the outer gimbal ring being perpendicular to the axis 122 of the inner gimbal ring.
  • a specimen holder 120a can be mounted within the inner ring by means of a circlip.
  • the cartridge 1 16 carries a pair of pushrods 123, 124 which slide in grooves in the upper end of the cartridge. These pushrods drive respective pulley wheels (not shown) pivotally mounted within the cartridge, which pulley wheels are coupled respectively to the inner and outer gimbal rings by means of drive wires (not shown).
  • the pushrods 123, 124 are tilted about their axes, and therefore the specimen is tilted with respect to the optical axis of the microscope.
  • the angles of tilt about the axes 121, 122 will be referred to as and 4; respectively, where 6 and d) are both zero when the rings 119, 120 both lie in a plane normal to the optical axis of the microscope.
  • the specimen support 117 carrying the cartridge 116, is mounted so as to be slidable to a limited extent with respect to the housing 101 in a plane transverse to the electron optical axis.
  • This movement can be effected by means of two electric motors Mx, My, positioned externally of the housing 101, these motors driving threaded rods 131, 132 which engage in threaded holes in the housing 101, and act directly on the support 117.
  • Return motion is supplied by means of return springs (not shown).
  • the drive shafts 127, 128 are universally and telescopically jointed so as to allow for this transverse motion of the support.
  • the specimen can be positioned so that any selected point of the specimen will be on the optical axis, and therefore in the center of the field of view of the screen 108. Tilt can then be applied to the specimen by means of the drive shafts 127, 128, so that the selected point of the specimen can be viewed from different angles.
  • a system of orthogonal coordinate axes X Y Z will be used, the axes being fixed v with respect to the specimen support 117, and having their origin at the point where the axes 121, 122 of the goniometer intersect. It will be appreciated that, in general, since the support 117 is moveable in a transverse plane with respect to the optical axis this point does not lie on the optical axis.
  • the Z-axis is parallel to the (i.e. axis the X-axis is parallel to the axis 121 Le, the 0 -axis) and the Y-axis is therefore parallel to the direction of the axis 122 (i.e. the da -axis) when 0 0.
  • Any selected point of the specimen can be defined by its coordinates (x, y, z,,) with respect to the X, Y, Z axes before tilt is applied to the specimen. It is assumed that this selected point initially lies on the optical axis of the microscope.
  • this point of the specimen will, in general, have shifted away from the optical axis, and will have new coordinates (x, y, z) with respect to the X, Y, Z axes, these coordinates being given by the vecwhere the transfornmtion matrix A is given by cos; 9 sin .1: sin 0 sin qb sin 0 cos 4) cus 0 sin cos 6 cos qS cos 0 sin 0 2)
  • the matrix A must be constructed, and equation (1) must be solved, as will be described below.
  • the computing circuit of the specimen stage allows the operator to set the values of H and D, which he desires, and automatically computes the corresponding values of the angles 0 and d), applying these angles to the goniometer.
  • the part of the computing circuit shown in FIGS. 5 and 6 also computes the values of the elements of the matrix A.
  • potentiometer 36 The ends of potentiometer 36 are supplied with respective unit voltages,'positive at one end and negative at the other, and. a signal proportional to sin 4 is thus derived from the potentiometer 37 at point 9. This signal is fed via a phase splitter 38 to the potentiometer 36, from which voltages are thus derived at points 10, 11 which are proportional to sinsin I and cossin I respectively.
  • the ends of the potentiometer 39 are supplied with respective unit voltages, positive at one end and negative at the other, so that signals proportional to sin 0 and cos 0 are derived from this potentiometer at points 1 and 2 respectively.
  • potentiometer 42 is also supplied'with respective unit voltages, positive at one end and negative at the other, so that signals proportional to sin (I) and cos (I) are derived from this potentiometer at points 7, 4 respectively.
  • the sin signal from point 7. is fed via a phase splitter 43 to the potentiometer 40, from which are thus derived signals proportional to sin 6 sin 41 and cos 0 sin (I: at points 3 and 4 respectively.
  • the cos (1) signal from point 8 is fed via a phase splitter 44 to the potentiometer 41, from which are derived signals proportional to sin 0 cos do and cos 0 cos at points 5 and 6 respectively.
  • the motors My, 1% operate to adjust thetilt angles 0 and 6 until the outputs of the amplifiers 45, 46
  • x,,, y z are set by the operator by means of three shafts, 201, 202, 203 each of which carries a set of linear potentiometers 204-21 1 fed from the points 11-8, as shown in FIGS. 5 and 6, by way of phase splitters 212 219, so as to multiply together the elements of A with the appropriate components of the vector (x,,, y,,, z
  • the X and Y specimen positioning control rods 131, 132 have linear potentiometers 47, 48 respectively, at tached to them, a unit voltage being applied to each end of each of these, positive at one end and negative at the other, so that signals are obtained from the potentiometers 47, 48, at points 23, 24, proportional respectively to x and y, the X and Y co-ordinates of the point which actually lies on the optical axis.
  • the voltages at points 12 and 19 are summed in an operational amplifier 49 in which the voltage at point 23 is, at the same time, subtracted from the sum, the output from the amplifier 49 being fed, via a signal processing network G to the electric motor M which drives the rod 131 of the specimen positioning control.
  • the voltages at points 13, 16 and 20 are summed in an operational amplifier 50, and the voltage from the point 24 is subtracted from the sum, the output from the amplifier 50 being fed, via a signal processing network Gy, to the electric motor My which drives the rod 132 of the specimen positioning control.
  • the motors M M position the specimen so that the outputs of the amplifiers 49, 50 are both zero, and in this position x and y both satisfy equation l with the result that the selected point of the specimen (i.e. the point with co-ordinates (x,,2 y,,, z,,) before tilting) is held substantially in the center of the field of view of the microscope while the tilt 6, q: is applied.
  • the voltages at the points 14, 17 and 21 are summed in operational amplifier 51, and from this sum is subtracted a feedback signal from the objective lens current control 52, from the point 25, this signal being a measure of z, the Z co-ordinate of the point at the center of the field of view.
  • the output from the amplifier 51 is thus a measure of the amount of correction to be applied to the focal length of the objective lens in order to keep the selected point in focus, and it is accordingly applied to the objective lens control 52.
  • One further potentiometer 220-222 is attachedto each of the x,,, y,,, and 2,, shafts (see FIG. 3) and is fed with a unit voltage at each end (positive atone end, negative at the other).
  • signals proportional to 1: y, and z are obtained from these potentiometers, at points 15, 18 and 22 respectively, and can be used in a display device to enable the operator to monitor the coordinates of the selected point.
  • Further means may be provided for displaying the values of@ and 4 to the operator. Such a display might take the form of a vector diagram.
  • the four drives for the 6 and q tilts and for the X and Y movements, are provided with'manual controls as well as the automatic controls M0.
  • M M and M FIG. shows the arrangement of the two sets of controls for the 0 tilt movement, but it will be understood that similar arrangements are provided for the other three controls.
  • the drives from the automatic control M9, and the manual control 53 after being geared down by gearboxes G1 and G2 respectively, are coupled via clutches C1 and C2 respectively to an output gearbox G3.
  • the clutches C1 and C2 are electromechanically operated by means of coils 54, 55, by means of an actuating circuit (not shown) which is so arranged that only one of the coils can be energized at a time.
  • the set of potentiometers 39, 40, 41 which measure the angle 6, is coupled to the gearbox G3 so that it operates independently of which of the clutches C1, C2 is engaged.
  • the computing circuits described above are designed for the double tilt stage shown in FIGS. 2 and 3 or for a stage kinematically equivalent to that stage, and it will be appreciated that if a stage of different kinematical design were used, a different computing circuit would be required.
  • One advantage of using a digital computer would be that the program could easily be changed to allow the microscope to be used with a stage of different kinematical design.
  • the computing means comprises a mechanical model of the goniometer and the specimen.
  • the model is on a larger scale than the actual goniometer, being typically 30 times the size.
  • the model comprises a horizontally fixed support frame 60 within which is mounted a gimbal frame 61 rotatable about an axis 62 with respect to the support frame 60, and a table 63 mounted within the frame 61 and rotatable about an axis 64 with respect to the frame 61.
  • the model is of identical kinematical design to the actual goniometer.
  • the frame 61 and the table 63 are tilted through angles 0 and I by means of electric motors, MH and M,;,' which are fed with the same tilting signals as are the servomotors M0 and M,,, which tilt the goniometer.
  • the table 63 automatically has the same tilt applied to it as the specimen.
  • a carriage 65 is mounted on the table 63 and can be driven to any point on the table by means of electric motors M M, also mounted on the table.
  • the position of the carriage on the table 63 represents the position of the point of the specimen which is selected for observation.
  • a rod 66 is fixed at one end to the carriage 65 by means of a ball joint 67. At the otherend, the rod 66 is fixed to a further carriage 68 by means of a double frame joint 69 which is also of the same kinematical design as the goniometer. The rod 66 is free to move lengthwise in the joint 69.
  • the carriage can be moved in a plane parallel to the plane of the support frame 60, by means of a pair of electric motors M M,, which also serve to drive the specimen positioning controls of the actual goniometer, through reduction gearing.
  • a pair of potentiometers (not shown) which measure angles p., v which specify the inclination of the rod 66 to the vertical. Signals from these potentiometers are used as reference signals for the motors M,, M such that these servomotors act to keep the rod 66 vertical if the table 63 is tilted.
  • the lateral displacement of the carriage 68 required to keep the rod vertical is equal to the lateral displacement of the carriage 65 when the table 63 is tilted. Since the motors M M, are also coupled to the actual specimen stage, it will be seen that they automatically apply an appropriate translational correction to the actual goniometer in order to hold the selected point of the specimen on the optical axis of the microscope.
  • the model is first of all set so that the table 63 is horizontal, i.e. in the plane of the support frame 60. Signals are then applied to the servomotors M M,, representative of the co-ordinates of the point of interest in the specimen.
  • the carriage 65 thus assumes a position on the table 63 which represents the selected point of the specimen, and the carriage 68 moves a automatically to keep the rod 66 vertical.
  • the actual goniometer is moved by servomotors M M In this way, the selected point is positioned on the optical axis.
  • a tilt can now be applied to the specimen, the same tilt being automatically applied to the table 63.
  • the carriage 68 again moves so as to keep the rod 66 vertical, and the corrective translational movement is automatically applied to the goniometer by the servomotors
  • the input signals applied to the model in FIG. 11 are all electrical, in some cases it may be possible to couple the model mechanically to the goniometer, in which case the input signals would be purely mechanical.
  • circuits shown in FIGS. 5 and 6, for converting theand I settings into 0 and qb tilts could be used without the circuits in FIGS. 6, 7, 8 and 9 for applying automatic corrective translational movement to the goniometer.
  • circuits shown in FIGS. 5 and 6 may be simplified as follows.
  • equations (3) and (4) can be considerably simplified, by making the approximation that I is equal to sin 1
  • the potentiometers 37, 39 and 42 in FIGS. 5 and 6 can all be replaced by linear potentiometers which are much less expensive than the sine or cosine type.
  • the potentiometers 40 and 41, as well as the circuits shown FIGS. 7, 8 and 9, are not needed at all. Translational correction to maintain the field of view when tilt is applied, must be made manually in this case.
  • the invention may be applied to the scanned transmission type of electron microscope as well as to the non-scanned type.
  • an electron microscope comprising a source of electrons for producing a beam of electrons directed generally along an electron optical axis, an image screen, a specimen stage for supporting and controlling the position of a specimen in said beam, and an electron optical system for focussing said beam to form an electron image of a portion of said specimen on said screen, said specimen stage comprising:
  • a goniometer for supporting the specimen and for tilting the specimen relative to the electron optical axis
  • positioning means for applying translational movement to the goniometer in a plane transverse to the electron optical axis so as to enable a selected point of the specimen to be positioned on the electron optical axis for viewing on said screen;
  • tilt representing means, responsive to the tilt applied .to the specimen by the goniometer;
  • a specimen stage according to claim 1 wherein said computing means comprises means for producing a focal length adjustment signal, representative of the change in focal length of the objective lens of the electron microscope necessary to hold said selected point of the specimen substantially in focus while said tilt is applied to the specimen, and said specimen stage comprises means for applying said focal length adjustment signal to the objective lens.
  • a specimen stage according to claim 4 wherein said tilt representing means comprises a plurality of potentiometers coupled mechanically to the goniometer.
  • a specimen stage according to claim 4 wherein said position representing means comprises a plurality of potentiometers, coupled to the specimen positioning controls.
  • a specimen stage according to claim 1 wherein said computing means comprises:
  • said tilt representing means comprises a plurality of potentiometers coupled to the goniometer;
  • said computing means includes a plurality of electric motors coupled mechanically to said model and coupled electrically to said potentiometers.
  • a specimen stage according to claim 7 wherein the model comprises:
  • a specimen stage according to claim 10 wherein said means for measuring the lateral displacement comprises;
  • setting means for setting the values of a required magnitude and direction of tilt to be applied to said specimen by the goniometer with respect to said electron optical axis;
  • control means for computing the angles of tilt about the goniometer axes required to produce the required magnitude and direction of tilt
  • an electron microscope comprising a source of electrons for producing a beam of electrons directed generally along an electron optical axis, an image screen, a specimen stage for supporting and controlling the position of a specimen in said beam, and an electron optical system for focusing said beam to form an electron image of a portion of said specimen on said screen, said specimen stage comprising:
  • specimen mounting means for adjustably tilt-ably mounting a specimen within the beam of electrons at selected orientations with respect to the electron optical axis
  • actuating means coupled to said specimen mounting means for automatically actuating said positioning means in response to changes in orientation of the specimen with respect to the electron optical axis to maintain a point under observation substantially along said optical axis during tilting.
  • said actuating means comprises sensing means coupled to said specimen mounting means for sensing changes of orientation of the specimen with respect to the electron optical axis, and computing means coupled to said sensing means for producing an output representative of a translational movement to be applied to said specimen mounting means and for applying said output to said positioning means.
  • the specimen stage of claim 13 further including means coupled to said specimen mounting means for automatically adjusting said electron optical system in response to changes of orientation of the specimen with respect to the electron optical axis to maintain a point under observation substantially in focus on said screen during tilting.

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
US00155474A 1970-06-29 1971-06-22 Electron microscope with automatically adjusted specimen stage Expired - Lifetime US3727051A (en)

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4274004A (en) * 1979-02-02 1981-06-16 Hitachi, Ltd. Ion implanter
US5179280A (en) * 1990-10-12 1993-01-12 Chi & Associated Inc. Computer control of the electron microscope sample stage
US5481111A (en) * 1994-01-03 1996-01-02 Philips Electronics North America Corporation Electron microscope having a goniometer controlled from the image frame of reference
US20110017922A1 (en) * 2009-07-24 2011-01-27 Omniprobe, Inc. Variable-tilt tem specimen holder for charged-particle beam instruments
CN102109673A (zh) * 2009-12-25 2011-06-29 索尼公司 镜台控制装置、镜台控制方法、镜台控制程序和显微镜
US20120119109A1 (en) * 2010-11-17 2012-05-17 Korea Basic Science Institute Specimen holder with 3-axis movement for tem 3d analysis
US20170117117A1 (en) * 2015-10-23 2017-04-27 Jeol Ltd. Detector Apparatus and Charged Particle Beam System
USD794816S1 (en) * 2013-10-24 2017-08-15 Hitachi High-Technologies Corporation Sample holder for an electron microscope
US9739994B1 (en) 2016-12-09 2017-08-22 William A. Loeb Methods and apparatus for reacquiring a target on a microscope slide

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2206542B1 (enrdf_load_stackoverflow) * 1972-11-15 1976-10-29 Thomson Csf
JPH01110204A (ja) * 1987-10-23 1989-04-26 Jeol Ltd 電子顕微鏡用走査トンネル顕微鏡

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2494442A (en) * 1946-01-05 1950-01-10 Hartford Nat Bank & Trust Co Electron microscope comprising magnetic focusing
US3240934A (en) * 1962-02-14 1966-03-15 Jeol Ltd Specimen holding device with means to tilt, rotate and shift the specimen

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2494442A (en) * 1946-01-05 1950-01-10 Hartford Nat Bank & Trust Co Electron microscope comprising magnetic focusing
US3240934A (en) * 1962-02-14 1966-03-15 Jeol Ltd Specimen holding device with means to tilt, rotate and shift the specimen

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4274004A (en) * 1979-02-02 1981-06-16 Hitachi, Ltd. Ion implanter
US5179280A (en) * 1990-10-12 1993-01-12 Chi & Associated Inc. Computer control of the electron microscope sample stage
US5481111A (en) * 1994-01-03 1996-01-02 Philips Electronics North America Corporation Electron microscope having a goniometer controlled from the image frame of reference
US20110017922A1 (en) * 2009-07-24 2011-01-27 Omniprobe, Inc. Variable-tilt tem specimen holder for charged-particle beam instruments
CN102109673A (zh) * 2009-12-25 2011-06-29 索尼公司 镜台控制装置、镜台控制方法、镜台控制程序和显微镜
US20120119109A1 (en) * 2010-11-17 2012-05-17 Korea Basic Science Institute Specimen holder with 3-axis movement for tem 3d analysis
US8581207B2 (en) * 2010-11-17 2013-11-12 Korea Basic Science Institute Specimen holder with 3-axis movement for TEM 3D analysis
USD794816S1 (en) * 2013-10-24 2017-08-15 Hitachi High-Technologies Corporation Sample holder for an electron microscope
US20170117117A1 (en) * 2015-10-23 2017-04-27 Jeol Ltd. Detector Apparatus and Charged Particle Beam System
US10014159B2 (en) * 2015-10-23 2018-07-03 Jeol Ltd. Detector apparatus and charged particle beam system
US9739994B1 (en) 2016-12-09 2017-08-22 William A. Loeb Methods and apparatus for reacquiring a target on a microscope slide

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DE2131268A1 (de) 1972-01-05
GB1304944A (enrdf_load_stackoverflow) 1973-01-31

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