GB1304944A - - Google Patents

Info

Publication number
GB1304944A
GB1304944A GB3145670A GB1304944DA GB1304944A GB 1304944 A GB1304944 A GB 1304944A GB 3145670 A GB3145670 A GB 3145670A GB 1304944D A GB1304944D A GB 1304944DA GB 1304944 A GB1304944 A GB 1304944A
Authority
GB
United Kingdom
Prior art keywords
stage
potentiometers
circuitry
june
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3145670A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1304944A publication Critical patent/GB1304944A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/20Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

1304944 Electric analogue calculating ASSOCIATED ELECTRICAL INDUSTRIES Ltd 10 June 1971 [29 June 1970] 31456/70 Heading G4G [Also in Division H1] A specimen stage of a microscope (see Division H1) can be provided with electric analogue calculating circuitry to control the movements of the stage. The circuitry automatically provides translatory movement to maintain a point of interest on the object on the axis of the microscope when the stage is tilted and also converts a tilt relative to this axis into two angles about respective tilting axes of the stage. The circuitry consists of potentiometers mounted on the shafts of motors controlling the movements of the stage, the potentiometers having trigonometrical characteristics. The signals derived from these potentiometers are combined together with signals from further potentiometers which are set according to the degree of tilt desired, in accordance with relationships stated in the Specification, and fed back to the motors to form a self-balancing system.
GB3145670A 1970-06-29 1970-06-29 Expired GB1304944A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB3145670 1970-06-29

Publications (1)

Publication Number Publication Date
GB1304944A true GB1304944A (en) 1973-01-31

Family

ID=10323351

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3145670A Expired GB1304944A (en) 1970-06-29 1970-06-29

Country Status (4)

Country Link
US (1) US3727051A (en)
DE (1) DE2131268A1 (en)
GB (1) GB1304944A (en)
NL (1) NL7108719A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2211655A (en) * 1987-10-23 1989-07-05 Joel Limited Scanning tunnelling microscope installed in electron microscope

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2206542B1 (en) * 1972-11-15 1976-10-29 Thomson Csf
JPS55104057A (en) * 1979-02-02 1980-08-09 Hitachi Ltd Ion implantation device
US5179280A (en) * 1990-10-12 1993-01-12 Chi & Associated Inc. Computer control of the electron microscope sample stage
US5481111A (en) * 1994-01-03 1996-01-02 Philips Electronics North America Corporation Electron microscope having a goniometer controlled from the image frame of reference
US20110017922A1 (en) * 2009-07-24 2011-01-27 Omniprobe, Inc. Variable-tilt tem specimen holder for charged-particle beam instruments
JP5581851B2 (en) * 2009-12-25 2014-09-03 ソニー株式会社 Stage control device, stage control method, stage control program, and microscope
JP5403560B2 (en) * 2010-11-17 2014-01-29 コリア ベイシック サイエンス インスティテュート Specimen holder capable of 3-axis drive for observing and analyzing specimens from more than three directions in a transmission electron microscope
USD794816S1 (en) * 2013-10-24 2017-08-15 Hitachi High-Technologies Corporation Sample holder for an electron microscope
JP6622056B2 (en) * 2015-10-23 2019-12-18 日本電子株式会社 Detection apparatus and charged particle beam apparatus
US9739994B1 (en) 2016-12-09 2017-08-22 William A. Loeb Methods and apparatus for reacquiring a target on a microscope slide

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB646019A (en) * 1946-01-05 1950-11-15 Philips Nv Improvements in or relating to electron microscopes
US3240934A (en) * 1962-02-14 1966-03-15 Jeol Ltd Specimen holding device with means to tilt, rotate and shift the specimen

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2211655A (en) * 1987-10-23 1989-07-05 Joel Limited Scanning tunnelling microscope installed in electron microscope
GB2211655B (en) * 1987-10-23 1992-06-17 Joel Limited Electron microscope equipped with scanning tunnelling microscope

Also Published As

Publication number Publication date
DE2131268A1 (en) 1972-01-05
US3727051A (en) 1973-04-10
NL7108719A (en) 1971-12-31

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees