US3679502A - Gaseous nonpreferential etching of silicon - Google Patents
Gaseous nonpreferential etching of silicon Download PDFInfo
- Publication number
- US3679502A US3679502A US862039A US3679502DA US3679502A US 3679502 A US3679502 A US 3679502A US 862039 A US862039 A US 862039A US 3679502D A US3679502D A US 3679502DA US 3679502 A US3679502 A US 3679502A
- Authority
- US
- United States
- Prior art keywords
- silicon
- etching
- sulfur hexafluoride
- hydrogen
- nitrogen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910052710 silicon Inorganic materials 0.000 title abstract description 58
- 239000010703 silicon Substances 0.000 title abstract description 58
- 238000005530 etching Methods 0.000 title description 37
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 56
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract description 50
- 229910018503 SF6 Inorganic materials 0.000 abstract description 35
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 abstract description 35
- 229960000909 sulfur hexafluoride Drugs 0.000 abstract description 34
- 229910052757 nitrogen Inorganic materials 0.000 abstract description 25
- 239000001257 hydrogen Substances 0.000 abstract description 18
- 239000008246 gaseous mixture Substances 0.000 abstract description 16
- 229910052739 hydrogen Inorganic materials 0.000 abstract description 16
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical class [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract description 13
- 238000000034 method Methods 0.000 description 16
- 235000012431 wafers Nutrition 0.000 description 16
- 239000004065 semiconductor Substances 0.000 description 10
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 239000012159 carrier gas Substances 0.000 description 8
- 239000007789 gas Substances 0.000 description 8
- 239000000203 mixture Substances 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 6
- 239000012808 vapor phase Substances 0.000 description 6
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 5
- 239000012071 phase Substances 0.000 description 5
- 239000011593 sulfur Substances 0.000 description 5
- 229910052717 sulfur Inorganic materials 0.000 description 5
- 229910052786 argon Inorganic materials 0.000 description 4
- 239000001307 helium Substances 0.000 description 4
- 229910052734 helium Inorganic materials 0.000 description 4
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 4
- 150000002431 hydrogen Chemical class 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000003486 chemical etching Methods 0.000 description 3
- 230000006698 induction Effects 0.000 description 3
- 230000001590 oxidative effect Effects 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 2
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 2
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000003085 diluting agent Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000002427 irreversible effect Effects 0.000 description 1
- 231100000252 nontoxic Toxicity 0.000 description 1
- 230000003000 nontoxic effect Effects 0.000 description 1
- 235000014571 nuts Nutrition 0.000 description 1
- 230000000284 resting effect Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- QTJXVIKNLHZIKL-UHFFFAOYSA-N sulfur difluoride Chemical class FSF QTJXVIKNLHZIKL-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/051—Etching
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/15—Silicon on sapphire SOS
Definitions
- This invention relates to the vapor phase etching of silicon and more particularly to the etching of silicon with a gaseous mixture containing high purity sulfur hexafluoride.
- gas phase etching is carried out by mounting the semiconductor material in a suitable high temperature reaction chamber and passing a gaseous mixture comprising hydrogen and hydrogen chloride in contact with the heated semiconductor material. While the gas phase etching process involving mixtures of hydrogen and hydrogen chloride has been widely accepted by the semiconductor industry as the predominant etching process, extreme care must be utilized with this corrosive gaseous mixture to avoid corrosion problems.
- a method which comprises passing a gaseous mixture containing sulfur hexafluoride having a low nitrogen concentration and preferably below 200 parts per million by weight of nitrogen and a carrier gas such as hydrogen.
- the temperature of the silicon is between 950 C. and 1250 C. as this gaseous mixture is passed thereover.
- sulfur hexafluoride having a relatively high purity may be used as an effective etchant for silicon.
- Sulfur hexafluoride containing 0 to about 1300 parts per million by weight of nitrogen is diluted with a carrier 3,679,502 Patented July 25, 1972 gas such as hydrogen, argon, or helium to provide an etching mixture which when passed over silicon at a temperature between 950 C. and 1250 C. readily etches the silicon.
- the purity of the sulfur hexafluoride is critical in the practice of the method of this invention.
- Commercially available sulfur hexafluoride containing 98.5 percent SP contains, according to the specification sheets, a maximum of about 3000 to 5000 parts per million of nitrogen by weight.
- Sulfur hexafluoride of this purity (a maximum of 3000 to 5000 parts per million by weight of nitrogen) has been found to be unsuitable as an etchant for silicon except at low etch rate at 1150 C or higher.
- Sulfur hexafluoride of 99 percent purity containing a maximum-of about 1300 parts per million of nitrogen by weight has been found tobe a marginal material to use as an etchant on silicon at temperatures between 950 and 1050 C.
- Sulfur hexafluoride of this purity does, however, yield good results as an etchant in the temperature range of 1050 to Sulfur hexafluoride of 99.98 percent purity containing less than 200 parts per million of nitrogen by weight .
- the minimum detectable nitrogen quanty in SF is a very effective etchant on silicon over the entire temperature range of 950 to 1250 C. It is quiteclear that the efliciency and/or effectiveness of the sulfur hexafluoride as a silicon etchant is directly dependent upon the concentration of the nitrogen in the SF Nitrogen concentrations above 1300 ppm. tend'to render the sulfur hexafluoride ineffective, whereas substantially nitrogen free sulfur hexafluoride provides excellent etching results.
- the SF etchant is used in the etching method described below.
- Silicon wafers are placed on a slab of quartz which serves as a planar support resting on a susceptor of graphite.
- the susceptor is heated by any suitable means, for example, by radio frequency energy from induction coils about the reaction chamber.
- the silicon is heated primarily by conduction from the susceptor although substantial direct heating of the semiconductor by induction does occur in the event substantially elevated temperatures are employed.
- the silicon wafer is then heated to a temperature between 950 and 1250 C.
- Sulfur hexafluoride of high purity containing less than about :1300 parts per million by weight of the nitrogen and preferably below 200 parts by weight nitrogen is mixed with a carrier gas such as hydrogen, argon, or helium, with hydrogen being the preferred gas.
- a carrier gas such as hydrogen, argon, or helium
- the sulfur hexafluoride gas mixture is passed over the heated silicon for a given period of time to etch the silicon surface. When the desired amount of silicon has been etched away, the flow of sulfur hexafluoride is stopped, while the flow of the diluent gas is continued.
- the mole ratio of the sulfur hexafluoride in hydrogen is about 1 10 percent to 1 percent.
- the mole ratio is determined at a given temperature experimentally to obtain the optimum processing conditions, that is, a convenient rate and an adequate surface quality. This will be apparent from the following examples.
- Example 1 A series of silicon wafers were placed on a slab' of quartz on a graphite susceptor. The susceptor was heated by induction coils surrounding the reaction chamber. The susceptor in turn provided suflicient heat to heat the silicon wafers to a temperature of 1000 C. Sulfur hexafluoride containing a maximum of 200 parts per million by weight nitrogen was mixed with hydrogen to form a gaseous mixture containing 21 l0' mole percent SP The sulfur hexafluoride-hydrogen mixture was passed over the heated silicon for about Trm'nutes to etch the silicon micron per minute.” This etching rate is considered "too surface to a depth of four microns.- The how of sulfur slowin most cases at this temperature;
- a borderline surface is a surface which looks good 7 providing a silicon wafer having a mirror-like surface to under room light but which looks hazy when observed v be etched; I i under oblique light from a microscope lamp.
- Table 1 heating said wafer to a temperature lying within the indicates the preferred etching rates at a given temperarange between 950 C. to 1200 C.; ture.
- the etching rate at 1000 C. which is passinga gaseous mixture of hydrogen and sulfur hexapreferred is .59 micron per minute or less since .83 micron fluoride.
- Table 2 lists results 'obtained with sulfur hexafluoride I si+sF H +n,siF+sis containing less than' 1300 parts per million by weight nitrogen. Good surfaces were obtained at temperatures and etchablyremoving portions of said silicon while .of 1050 through 1150" c. with etching rates of from 99 maintaining the mirror-like q ality of said silicon 0.32 micron per minute to 1.62 microns per minute, resurface; and
- said carrier gas being selected from the group consisting of hydrogen, argon and helium;
- said gaseous mixture containing a nitrogen content less than 5000 parts per million by weight, and containing a percentage of sulfur hexafluoride laying within the range between 0.001 and 0.1 mole percent.
- the method for the monopreferential vapor phase etching of a mirror-like silicon surface while maintaining the mirror-like quality of the surface for assuring a suitable silicon surface for semiconductor processing comprising the steps of providing a silicon wafer having a mirror-like surface to be etched;
- said gaseous mixture having a nitrogen content less than 200 parts per million by weight, and containing a percentage of sulfur hexafluoride lying within the range between 0.005 and 0.1 mole percent.
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Drying Of Semiconductors (AREA)
- ing And Chemical Polishing (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US86203969A | 1969-09-29 | 1969-09-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
US3679502A true US3679502A (en) | 1972-07-25 |
Family
ID=25337473
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US862039A Expired - Lifetime US3679502A (en) | 1969-09-29 | 1969-09-29 | Gaseous nonpreferential etching of silicon |
Country Status (6)
Country | Link |
---|---|
US (1) | US3679502A (fr) |
JP (1) | JPS4840810B1 (fr) |
BE (1) | BE756807A (fr) |
DE (1) | DE2046956A1 (fr) |
FR (1) | FR2062802A5 (fr) |
GB (1) | GB1305625A (fr) |
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4039357A (en) * | 1976-08-27 | 1977-08-02 | Bell Telephone Laboratories, Incorporated | Etching of III-V semiconductor materials with H2 S in the preparation of heterodiodes to facilitate the deposition of cadmium sulfide |
US4052251A (en) * | 1976-03-02 | 1977-10-04 | Rca Corporation | Method of etching sapphire utilizing sulfur hexafluoride |
US4131496A (en) * | 1977-12-15 | 1978-12-26 | Rca Corp. | Method of making silicon on sapphire field effect transistors with specifically aligned gates |
US4213818A (en) * | 1979-01-04 | 1980-07-22 | Signetics Corporation | Selective plasma vapor etching process |
US4331504A (en) * | 1981-06-25 | 1982-05-25 | International Business Machines Corporation | Etching process with vibrationally excited SF6 |
US4364793A (en) * | 1981-08-28 | 1982-12-21 | Graves Clinton G | Method of etching silicon and polysilicon substrates |
US4582581A (en) * | 1985-05-09 | 1986-04-15 | Allied Corporation | Boron trifluoride system for plasma etching of silicon dioxide |
US4615764A (en) * | 1984-11-05 | 1986-10-07 | Allied Corporation | SF6/nitriding gas/oxidizer plasma etch system |
JPS61284587A (ja) * | 1985-06-12 | 1986-12-15 | Hitachi Ltd | 表面処理方法 |
US6355564B1 (en) * | 1999-08-26 | 2002-03-12 | Advanced Micro Devices, Inc. | Selective back side reactive ion etch |
WO2004079810A1 (fr) * | 2003-03-04 | 2004-09-16 | Xsil Technology Limited | Usinage laser au moyen d'un gaz auxiliaire actif |
US20070224733A1 (en) * | 2003-07-03 | 2007-09-27 | Adrian Boyle | Die Bonding |
US8906248B2 (en) | 2011-12-13 | 2014-12-09 | Lam Research Corporation | Silicon on insulator etch |
US9716195B2 (en) | 2015-06-01 | 2017-07-25 | International Business Machines Corporation | Dry etch method for texturing silicon and device |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4214946A (en) * | 1979-02-21 | 1980-07-29 | International Business Machines Corporation | Selective reactive ion etching of polysilicon against SiO2 utilizing SF6 -Cl2 -inert gas etchant |
US4498953A (en) * | 1983-07-27 | 1985-02-12 | At&T Bell Laboratories | Etching techniques |
-
0
- BE BE756807D patent/BE756807A/fr unknown
-
1969
- 1969-09-29 US US862039A patent/US3679502A/en not_active Expired - Lifetime
-
1970
- 1970-08-25 JP JP45073917A patent/JPS4840810B1/ja active Pending
- 1970-09-09 GB GB4318470A patent/GB1305625A/en not_active Expired
- 1970-09-23 DE DE19702046956 patent/DE2046956A1/de active Pending
- 1970-09-29 FR FR7035244A patent/FR2062802A5/fr not_active Expired
Cited By (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4052251A (en) * | 1976-03-02 | 1977-10-04 | Rca Corporation | Method of etching sapphire utilizing sulfur hexafluoride |
US4039357A (en) * | 1976-08-27 | 1977-08-02 | Bell Telephone Laboratories, Incorporated | Etching of III-V semiconductor materials with H2 S in the preparation of heterodiodes to facilitate the deposition of cadmium sulfide |
US4131496A (en) * | 1977-12-15 | 1978-12-26 | Rca Corp. | Method of making silicon on sapphire field effect transistors with specifically aligned gates |
US4213818A (en) * | 1979-01-04 | 1980-07-22 | Signetics Corporation | Selective plasma vapor etching process |
US4331504A (en) * | 1981-06-25 | 1982-05-25 | International Business Machines Corporation | Etching process with vibrationally excited SF6 |
US4364793A (en) * | 1981-08-28 | 1982-12-21 | Graves Clinton G | Method of etching silicon and polysilicon substrates |
US4615764A (en) * | 1984-11-05 | 1986-10-07 | Allied Corporation | SF6/nitriding gas/oxidizer plasma etch system |
US4582581A (en) * | 1985-05-09 | 1986-04-15 | Allied Corporation | Boron trifluoride system for plasma etching of silicon dioxide |
JPS61284587A (ja) * | 1985-06-12 | 1986-12-15 | Hitachi Ltd | 表面処理方法 |
JPH086184B2 (ja) | 1985-06-12 | 1996-01-24 | 株式会社日立製作所 | 表面処理方法 |
US6355564B1 (en) * | 1999-08-26 | 2002-03-12 | Advanced Micro Devices, Inc. | Selective back side reactive ion etch |
WO2004079810A1 (fr) * | 2003-03-04 | 2004-09-16 | Xsil Technology Limited | Usinage laser au moyen d'un gaz auxiliaire actif |
US20060249480A1 (en) * | 2003-03-04 | 2006-11-09 | Adrian Boyle | Laser machining using an active assist gas |
CN100362631C (zh) * | 2003-03-04 | 2008-01-16 | Xsil技术有限公司 | 使用活性助气的激光加工 |
US20070224733A1 (en) * | 2003-07-03 | 2007-09-27 | Adrian Boyle | Die Bonding |
US7989320B2 (en) | 2003-07-03 | 2011-08-02 | Electro Scientific Industries, Inc. | Die bonding |
US8906248B2 (en) | 2011-12-13 | 2014-12-09 | Lam Research Corporation | Silicon on insulator etch |
US9716195B2 (en) | 2015-06-01 | 2017-07-25 | International Business Machines Corporation | Dry etch method for texturing silicon and device |
Also Published As
Publication number | Publication date |
---|---|
FR2062802A5 (fr) | 1971-06-25 |
BE756807A (fr) | 1971-03-29 |
DE2046956A1 (de) | 1971-05-06 |
GB1305625A (fr) | 1973-02-07 |
JPS4840810B1 (fr) | 1973-12-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US3679502A (en) | Gaseous nonpreferential etching of silicon | |
US3511727A (en) | Vapor phase etching and polishing of semiconductors | |
US4255230A (en) | Plasma etching process | |
CA1061691A (fr) | Preparation d'une surface intacte sur alumine alpha | |
US3142596A (en) | Epitaxial deposition onto semiconductor wafers through an interaction between the wafers and the support material | |
US3669774A (en) | Low temperature silicon etch | |
EP0004285B1 (fr) | Procédé de décapage de bioxyde de silicium à l'aide d'un plasma à une vitesse plus élevée que celle pour le silicium dans un article comportant les deux | |
US3398033A (en) | Method of etching silicon carbide | |
US3262825A (en) | Method for etching crystals of group iii(a)-v(a) compounds and etchant used therefor | |
US6680455B2 (en) | Plasma resistant quartz glass jig | |
US3506508A (en) | Use of gas etching under vacuum pressure for purifying silicon | |
US3546036A (en) | Process for etch-polishing sapphire and other oxides | |
JPS61285714A (ja) | 半導体構造の製造方法 | |
US3366520A (en) | Vapor polishing of a semiconductor wafer | |
US4364793A (en) | Method of etching silicon and polysilicon substrates | |
US3855024A (en) | Method of vapor-phase polishing a surface of a semiconductor | |
US3533856A (en) | Method for solution growth of gallium arsenide and gallium phosphide | |
US4052251A (en) | Method of etching sapphire utilizing sulfur hexafluoride | |
US3775201A (en) | Method for polishing semiconductor gallium phosphide planar surfaces | |
WO2007063938A1 (fr) | Procede et purification d’un compose de carbone fluore insature, procede de formation d’un film fluorocarbone et procede de fabrication d’un dispositif semi-conducteur | |
US2992080A (en) | Method of improving the purity of silicon | |
Marasina et al. | Chemical etching of sapphire | |
Rai‐Choudhury | Sulfur hexafluoride as an etchant for silicon | |
KR970023672A (ko) | 박막제조방법 | |
Chiang et al. | Growth of homoepitaxial silicon at low temperatures using silane-helium mixtures |