CN100362631C - 使用活性助气的激光加工 - Google Patents
使用活性助气的激光加工 Download PDFInfo
- Publication number
- CN100362631C CN100362631C CNB200480005971XA CN200480005971A CN100362631C CN 100362631 C CN100362631 C CN 100362631C CN B200480005971X A CNB200480005971X A CN B200480005971XA CN 200480005971 A CN200480005971 A CN 200480005971A CN 100362631 C CN100362631 C CN 100362631C
- Authority
- CN
- China
- Prior art keywords
- workpiece
- laser
- silicon
- gas
- laser beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000003754 machining Methods 0.000 title abstract description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 70
- 239000010703 silicon Substances 0.000 claims abstract description 69
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 69
- 229910052736 halogen Inorganic materials 0.000 claims abstract description 24
- 150000002367 halogens Chemical class 0.000 claims abstract description 22
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 claims abstract description 11
- 229960000909 sulfur hexafluoride Drugs 0.000 claims abstract description 11
- 238000002679 ablation Methods 0.000 claims abstract description 3
- 239000007789 gas Substances 0.000 claims description 64
- 238000000034 method Methods 0.000 claims description 51
- 238000012545 processing Methods 0.000 claims description 44
- 239000000758 substrate Substances 0.000 claims description 19
- 238000006243 chemical reaction Methods 0.000 claims description 18
- 238000004140 cleaning Methods 0.000 claims description 18
- 238000005520 cutting process Methods 0.000 claims description 15
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 13
- 229910052731 fluorine Inorganic materials 0.000 claims description 13
- 239000011737 fluorine Substances 0.000 claims description 13
- 239000012634 fragment Substances 0.000 claims description 12
- 238000003698 laser cutting Methods 0.000 claims description 12
- -1 halogen free radical Chemical class 0.000 claims description 11
- 238000006303 photolysis reaction Methods 0.000 claims description 5
- 239000002912 waste gas Substances 0.000 claims description 5
- 238000000605 extraction Methods 0.000 claims description 4
- 238000005339 levitation Methods 0.000 claims description 4
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 claims description 4
- 239000000155 melt Substances 0.000 claims description 3
- 230000015843 photosynthesis, light reaction Effects 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 description 28
- 238000005530 etching Methods 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000007787 solid Substances 0.000 description 4
- 238000000608 laser ablation Methods 0.000 description 3
- 239000006227 byproduct Substances 0.000 description 2
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 230000004807 localization Effects 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 1
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- AIFMYMZGQVTROK-UHFFFAOYSA-N silicon tetrabromide Chemical compound Br[Si](Br)(Br)Br AIFMYMZGQVTROK-UHFFFAOYSA-N 0.000 description 1
- 239000005049 silicon tetrachloride Substances 0.000 description 1
- JHGCXUUFRJCMON-UHFFFAOYSA-J silicon(4+);tetraiodide Chemical compound [Si+4].[I-].[I-].[I-].[I-] JHGCXUUFRJCMON-UHFFFAOYSA-J 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
- H01L21/3043—Making grooves, e.g. cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
- B23K26/123—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an atmosphere of particular gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
- B23K26/127—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an enclosure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/142—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor for the removal of by-products
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Laser Beam Processing (AREA)
- Drying Of Semiconductors (AREA)
- Dicing (AREA)
Abstract
Description
Claims (23)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0304900.4 | 2003-03-04 | ||
GB0304900A GB2399311B (en) | 2003-03-04 | 2003-03-04 | Laser machining using an active assist gas |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1757100A CN1757100A (zh) | 2006-04-05 |
CN100362631C true CN100362631C (zh) | 2008-01-16 |
Family
ID=9954070
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB200480005971XA Expired - Fee Related CN100362631C (zh) | 2003-03-04 | 2004-03-03 | 使用活性助气的激光加工 |
Country Status (11)
Country | Link |
---|---|
US (1) | US20060249480A1 (zh) |
EP (1) | EP1620883B1 (zh) |
JP (1) | JP4818904B2 (zh) |
KR (1) | KR101058465B1 (zh) |
CN (1) | CN100362631C (zh) |
AT (1) | ATE410785T1 (zh) |
DE (1) | DE602004016984D1 (zh) |
GB (1) | GB2399311B (zh) |
MY (1) | MY135807A (zh) |
TW (1) | TWI270134B (zh) |
WO (1) | WO2004079810A1 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111558774A (zh) * | 2020-07-20 | 2020-08-21 | 昆山联滔电子有限公司 | 一种继电器焊接装置及焊接方法 |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1497851B1 (en) | 2002-04-19 | 2006-01-25 | Xsil Technology Limited | Program-controlled dicing of a substrate using a pulsed laser |
GB2404280B (en) * | 2003-07-03 | 2006-09-27 | Xsil Technology Ltd | Die bonding |
GB2420443B (en) * | 2004-11-01 | 2009-09-16 | Xsil Technology Ltd | Increasing die strength by etching during or after dicing |
US9034731B2 (en) * | 2005-02-03 | 2015-05-19 | Stats Chippac Ltd. | Integrated, integrated circuit singulation system |
JP4777700B2 (ja) * | 2005-06-17 | 2011-09-21 | 株式会社ディスコ | レーザ加工方法 |
JP2007152308A (ja) * | 2005-12-08 | 2007-06-21 | Digital Network:Kk | 洗浄方法および洗浄装置 |
JP2008147242A (ja) * | 2006-12-06 | 2008-06-26 | Hitachi Via Mechanics Ltd | プリント基板のレーザ加工方法 |
WO2008141118A1 (en) * | 2007-05-10 | 2008-11-20 | Linde, Inc. | Laser activated fluorine treatment of silicon substrates |
US9694447B1 (en) * | 2007-09-14 | 2017-07-04 | Steven K. Hughes | Analytical laser ablation of solid samples for ICP, ICP-MS and FAG-MS analysis |
JP2009082975A (ja) * | 2007-10-02 | 2009-04-23 | Sumitomo Electric Ind Ltd | レーザ加工方法 |
EP2299476A4 (en) | 2008-06-26 | 2011-08-03 | Ihi Corp | METHOD AND APPARATUS FOR LASER RECEIVER |
JP5540476B2 (ja) | 2008-06-30 | 2014-07-02 | 株式会社Ihi | レーザアニール装置 |
KR101010601B1 (ko) * | 2008-07-31 | 2011-01-24 | 주식회사 이오테크닉스 | 보조 가스를 이용한 레이저 가공 방법 |
US20100129984A1 (en) * | 2008-11-26 | 2010-05-27 | George Vakanas | Wafer singulation in high volume manufacturing |
US8609512B2 (en) * | 2009-03-27 | 2013-12-17 | Electro Scientific Industries, Inc. | Method for laser singulation of chip scale packages on glass substrates |
US8187983B2 (en) | 2009-04-16 | 2012-05-29 | Micron Technology, Inc. | Methods for fabricating semiconductor components using thinning and back side laser processing |
EP2253413A1 (en) | 2009-05-15 | 2010-11-24 | National University of Ireland Galway | Method for laser ablation |
US8524139B2 (en) * | 2009-08-10 | 2013-09-03 | FEI Compay | Gas-assisted laser ablation |
US8383984B2 (en) | 2010-04-02 | 2013-02-26 | Electro Scientific Industries, Inc. | Method and apparatus for laser singulation of brittle materials |
KR20110114028A (ko) * | 2010-04-12 | 2011-10-19 | 삼성전자주식회사 | 시편 가공 장치 및 방법 |
JP2011224931A (ja) * | 2010-04-22 | 2011-11-10 | Disco Corp | 光デバイスウエーハの加工方法およびレーザー加工装置 |
JP5918044B2 (ja) * | 2012-06-25 | 2016-05-18 | 株式会社ディスコ | 加工方法および加工装置 |
KR101432153B1 (ko) * | 2012-11-13 | 2014-08-22 | 삼성디스플레이 주식회사 | 광 투과 장치 및 이를 구비하는 어닐링 장치 |
KR102294198B1 (ko) | 2013-03-15 | 2021-08-30 | 엘레멘탈 사이언티픽 레이저스 엘엘씨 | 이미지 인식 기반 어블레이션 패턴 위치 소환 |
EP3686846B1 (en) * | 2013-03-15 | 2023-08-02 | Elemental Scientific Lasers, LLC | Image recognition based ablation pattern position recall |
CN103394805B (zh) * | 2013-08-05 | 2016-09-14 | 大族激光科技产业集团股份有限公司 | 激光切割打孔装置及切割打孔方法 |
CN103464896B (zh) * | 2013-08-29 | 2015-06-03 | 张家港市恒运新材料科技有限公司 | 一种激光焊接机的光学元件保护装置 |
JP2017147296A (ja) * | 2016-02-16 | 2017-08-24 | 株式会社ディスコ | 加工装置 |
CN106735917A (zh) * | 2016-12-05 | 2017-05-31 | 广东富源科技股份有限公司 | 一种高速激光蚀刻蓝宝石镜片的方法 |
JP6450784B2 (ja) * | 2017-01-19 | 2019-01-09 | ファナック株式会社 | レーザ加工機 |
JP6450783B2 (ja) | 2017-01-19 | 2019-01-09 | ファナック株式会社 | レーザ加工ヘッド用ノズル |
US20190210151A1 (en) * | 2018-01-08 | 2019-07-11 | General Electric Company | Systems and methods for additive manufacturing using pressurized consolidation devices |
KR102217194B1 (ko) * | 2018-10-16 | 2021-02-19 | 세메스 주식회사 | 기판 처리 장치 및 기판 처리 방법 |
DE102019214742A1 (de) | 2019-09-26 | 2021-04-01 | Carl Zeiss Microscopy Gmbh | Baugruppe einer Laser-Ablationsvorrichtung sowie Laser-Ablationsvorrichtung einer derartigen Baugruppe |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3679502A (en) * | 1969-09-29 | 1972-07-25 | Motorola Inc | Gaseous nonpreferential etching of silicon |
US3866398A (en) * | 1973-12-20 | 1975-02-18 | Texas Instruments Inc | In-situ gas-phase reaction for removal of laser-scribe debris |
US4617086A (en) * | 1982-03-19 | 1986-10-14 | International Business Machines Corporation | Rapid etching method for silicon by SF6 gas |
US4731158A (en) * | 1986-09-12 | 1988-03-15 | International Business Machines Corporation | High rate laser etching technique |
WO1997024768A1 (en) * | 1995-12-29 | 1997-07-10 | Pacific Solar Pty. Limited | Improved laser grooving and doping method |
US6350391B1 (en) * | 1995-11-09 | 2002-02-26 | Oramir Semiconductor Equipment Ltd. | Laser stripping improvement by modified gas composition |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3637377A (en) * | 1966-11-03 | 1972-01-25 | Teeg Research Inc | Method for making a pattern on a support member by means of actinic radiation sensitive element |
US3811182A (en) * | 1972-03-31 | 1974-05-21 | Ibm | Object handling fixture, system, and process |
US4331504A (en) * | 1981-06-25 | 1982-05-25 | International Business Machines Corporation | Etching process with vibrationally excited SF6 |
US4566935A (en) * | 1984-07-31 | 1986-01-28 | Texas Instruments Incorporated | Spatial light modulator and method |
US5266532A (en) * | 1990-03-29 | 1993-11-30 | The United States Of America As Represented By The Secretary Of The Navy | Method for laser-assisted silicon etching using halocarbon ambients |
US5322988A (en) * | 1990-03-29 | 1994-06-21 | The United States Of America As Represented By The Secretary Of The Navy | Laser texturing |
JP3050579B2 (ja) * | 1990-09-12 | 2000-06-12 | 株式会社日立製作所 | クリーニング方法とその装置 |
JPH0921785A (ja) * | 1995-07-07 | 1997-01-21 | Toshiba Corp | 不純物検出方法 |
JP3485136B2 (ja) * | 1995-11-21 | 2004-01-13 | エア・ウォーター株式会社 | ウエハの製法およびそれに用いる装置 |
JPH116086A (ja) * | 1997-06-13 | 1999-01-12 | Japan Steel Works Ltd:The | レーザ光を用いた表面不要物除去装置 |
AU2002210859A1 (en) * | 2000-10-26 | 2002-05-06 | Xsil Technology Limited | Control of laser machining |
JP4678805B2 (ja) * | 2001-02-14 | 2011-04-27 | シャープ株式会社 | 半導体発光装置およびその製造方法 |
JP3612317B2 (ja) * | 2001-11-30 | 2005-01-19 | 株式会社東芝 | 半導体装置の製造方法 |
-
2003
- 2003-03-04 GB GB0304900A patent/GB2399311B/en not_active Expired - Fee Related
-
2004
- 2004-03-03 US US10/548,284 patent/US20060249480A1/en not_active Abandoned
- 2004-03-03 KR KR1020057016155A patent/KR101058465B1/ko not_active IP Right Cessation
- 2004-03-03 WO PCT/EP2004/002149 patent/WO2004079810A1/en active Application Filing
- 2004-03-03 JP JP2006504523A patent/JP4818904B2/ja not_active Expired - Fee Related
- 2004-03-03 CN CNB200480005971XA patent/CN100362631C/zh not_active Expired - Fee Related
- 2004-03-03 EP EP04716586A patent/EP1620883B1/en not_active Expired - Lifetime
- 2004-03-03 AT AT04716586T patent/ATE410785T1/de not_active IP Right Cessation
- 2004-03-03 DE DE602004016984T patent/DE602004016984D1/de not_active Expired - Lifetime
- 2004-03-04 TW TW093105695A patent/TWI270134B/zh not_active IP Right Cessation
- 2004-03-04 MY MYPI20040756A patent/MY135807A/en unknown
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3679502A (en) * | 1969-09-29 | 1972-07-25 | Motorola Inc | Gaseous nonpreferential etching of silicon |
US3866398A (en) * | 1973-12-20 | 1975-02-18 | Texas Instruments Inc | In-situ gas-phase reaction for removal of laser-scribe debris |
US4617086A (en) * | 1982-03-19 | 1986-10-14 | International Business Machines Corporation | Rapid etching method for silicon by SF6 gas |
US4731158A (en) * | 1986-09-12 | 1988-03-15 | International Business Machines Corporation | High rate laser etching technique |
US6350391B1 (en) * | 1995-11-09 | 2002-02-26 | Oramir Semiconductor Equipment Ltd. | Laser stripping improvement by modified gas composition |
WO1997024768A1 (en) * | 1995-12-29 | 1997-07-10 | Pacific Solar Pty. Limited | Improved laser grooving and doping method |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111558774A (zh) * | 2020-07-20 | 2020-08-21 | 昆山联滔电子有限公司 | 一种继电器焊接装置及焊接方法 |
Also Published As
Publication number | Publication date |
---|---|
KR20050106472A (ko) | 2005-11-09 |
ATE410785T1 (de) | 2008-10-15 |
GB2399311B (en) | 2005-06-15 |
EP1620883B1 (en) | 2008-10-08 |
GB0304900D0 (en) | 2003-04-09 |
GB2399311A (en) | 2004-09-15 |
WO2004079810A1 (en) | 2004-09-16 |
JP2006520534A (ja) | 2006-09-07 |
JP4818904B2 (ja) | 2011-11-16 |
TW200507094A (en) | 2005-02-16 |
CN1757100A (zh) | 2006-04-05 |
TWI270134B (en) | 2007-01-01 |
MY135807A (en) | 2008-07-31 |
EP1620883A1 (en) | 2006-02-01 |
KR101058465B1 (ko) | 2011-08-24 |
DE602004016984D1 (de) | 2008-11-20 |
US20060249480A1 (en) | 2006-11-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN100362631C (zh) | 使用活性助气的激光加工 | |
US11551974B2 (en) | Manufacturing process of element chip using laser grooving and plasma-etching | |
EP1404481B1 (en) | A laser machining system and method | |
US8800475B2 (en) | Etching a laser-cut semiconductor before dicing a die attach film (DAF) or other material layer | |
US7169687B2 (en) | Laser micromachining method | |
TWI660413B (zh) | 自單粒化晶粒側壁移除殘留物 | |
KR101920343B1 (ko) | 플라즈마 에칭을 갖는 하이브리드 갈바닉 레이저 스크라이빙 프로세스를 이용한 웨이퍼 다이싱 | |
JP2015519732A (ja) | プラズマエッチングによるハイブリッドマルチステップレーザスクライビングプロセスを用いたウェハダイシング | |
US20210114925A1 (en) | Crack-free glass substrate cutting and thinning method | |
US20100129984A1 (en) | Wafer singulation in high volume manufacturing | |
WO2003002289A1 (en) | Multistep laser processing of wafers supporting surface device layers | |
KR100824466B1 (ko) | 레이저 다이싱을 위한 방법 및 장치 | |
CN102308372A (zh) | 晶片切割方法及其系统 | |
KR20160073392A (ko) | 마스크리스 하이브리드 레이저 스크라이빙 및 플라즈마 에칭 웨이퍼 다이싱 프로세스 | |
TWI667709B (zh) | 用於改良晶圓塗佈處理之烘烤工具 | |
CN112689892A (zh) | 使用具有中间穿透处理的混合激光刻划及等离子体蚀刻方法的晶片切割 | |
CN104625432B (zh) | 一种钨钢薄片的激光切割方法及系统 | |
US20220402072A1 (en) | Element chip manufacturing method and substrate processing method | |
KR100537494B1 (ko) | 계면활성제 도포 방법을 이용한 실리콘 웨이퍼의 레이저 절단 방법 | |
JP2022191952A (ja) | 素子チップの製造方法、および、基板の加工方法 | |
Heng et al. | Laser dicing of silicon and electronics substrates |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: IRITALK SCIENCE AND TECHNOLOGY INDUSTRIAL STOCK CO Free format text: FORMER OWNER: XSIL TECHNOLOGY CO., LTD. Effective date: 20091127 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20091127 Address after: oregon Patentee after: Electro Scient Ind Inc. Address before: Dublin, Ireland Patentee before: XSIL Technology Ltd. |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080116 Termination date: 20180303 |
|
CF01 | Termination of patent right due to non-payment of annual fee |