US3626184A - Detector system for a scanning electron microscope - Google Patents

Detector system for a scanning electron microscope Download PDF

Info

Publication number
US3626184A
US3626184A US168020*A US3626184DA US3626184A US 3626184 A US3626184 A US 3626184A US 3626184D A US3626184D A US 3626184DA US 3626184 A US3626184 A US 3626184A
Authority
US
United States
Prior art keywords
electrons
cone
illumination
detector
detector means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US168020*A
Other languages
English (en)
Inventor
Albert V Crewe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
US Atomic Energy Commission (AEC)
Original Assignee
US Atomic Energy Commission (AEC)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by US Atomic Energy Commission (AEC) filed Critical US Atomic Energy Commission (AEC)
Application granted granted Critical
Publication of US3626184A publication Critical patent/US3626184A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/045—Beam blanking or chopping, i.e. arrangements for momentarily interrupting exposure to the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/484—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with spherical mirrors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2446—Position sensitive detectors
    • H01J2237/24465—Sectored detectors, e.g. quadrants
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24475—Scattered electron detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24485—Energy spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2449—Detector devices with moving charges in electric or magnetic fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24571—Measurements of non-electric or non-magnetic variables
    • H01J2237/24585—Other variables, e.g. energy, mass, velocity, time, temperature

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
US168020*A 1970-03-05 1970-03-05 Detector system for a scanning electron microscope Expired - Lifetime US3626184A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US1680270A 1970-03-05 1970-03-05

Publications (1)

Publication Number Publication Date
US3626184A true US3626184A (en) 1971-12-07

Family

ID=21779049

Family Applications (1)

Application Number Title Priority Date Filing Date
US168020*A Expired - Lifetime US3626184A (en) 1970-03-05 1970-03-05 Detector system for a scanning electron microscope

Country Status (7)

Country Link
US (1) US3626184A (ja)
JP (1) JPS5411664B1 (ja)
BE (1) BE763456A (ja)
CH (1) CH520927A (ja)
DE (1) DE2110325A1 (ja)
FR (1) FR2084007A5 (ja)
GB (1) GB1294440A (ja)

Cited By (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2221151A1 (de) * 1971-04-30 1972-11-16 Thomson Csf Anordnung zur Messung der Strahlungsdosis eines ionisierenden Strahlungsbuendels
US3833811A (en) * 1972-07-11 1974-09-03 Jeol Ltd Scanning electron microscope with improved means for focusing
US3857034A (en) * 1970-08-31 1974-12-24 Max Planck Gesellschaft Scanning charged beam particle beam microscope
US3908124A (en) * 1974-07-01 1975-09-23 Us Energy Phase contrast in high resolution electron microscopy
US3909610A (en) * 1973-08-22 1975-09-30 Jeol Ltd Apparatus for displaying the energy distribution of a charged particle beam
US3914606A (en) * 1973-03-12 1975-10-21 Jeol Ltd Electron detector
US3917946A (en) * 1972-04-12 1975-11-04 Philips Corp Electron-optical device for the recording of selected diffraction patterns
DE2526116A1 (de) * 1974-06-14 1976-01-02 Cgr Mev Vorrichtung zur kontrolle der zentrierung, der intensitaet, der homogenitaet und der richtungsbuendelung eines ionisierenden strahlenbuendels
US3965351A (en) * 1974-10-30 1976-06-22 The United States Of America As Represented By The United States Energy Research And Development Administration Differential auger spectrometry
US4058730A (en) * 1974-09-12 1977-11-15 Siemens Aktiengesellschaft Irradiating device with an electronic accelerator
USRE29500E (en) * 1970-08-31 1977-12-20 Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. Scanning charged beam particle beam microscope
US4068123A (en) * 1973-07-27 1978-01-10 Nihon Denshi Kabushiki Kaisha Scanning electron microscope
US4097740A (en) * 1975-09-19 1978-06-27 Siemens Aktiengesellschaft Method and apparatus for focusing the objective lens of a scanning transmission-type corpuscular-beam microscope
US4099055A (en) * 1975-10-17 1978-07-04 Hitachi, Ltd. Scanning transmission electron microscope
FR2423860A1 (fr) * 1978-04-17 1979-11-16 Philips Nv Microscope electronique pour la formation d'une image de phase qui n'est pas deduite d'images de difference
US4514629A (en) * 1982-07-07 1985-04-30 National Research Development Corporation Scanning transmission electron microscopes
US4596928A (en) * 1979-07-03 1986-06-24 Unisearch Limited Method and apparatus for an atmospheric scanning electron microscope
GB2173666A (en) * 1985-04-12 1986-10-15 Plessey Co Plc Scanning optical microscopes
US4760567A (en) * 1986-08-11 1988-07-26 Electron Beam Memories Electron beam memory system with ultra-compact, high current density electron gun
EP0308953A1 (en) * 1987-09-25 1989-03-29 Hitachi, Ltd. Charged particle detector
US4877961A (en) * 1988-10-26 1989-10-31 Varian Associates, Inc. In-line electron beam energy monitor and control
EP0348992A2 (en) * 1988-07-01 1990-01-03 Hitachi, Ltd. Apparatus and method of pattern detection based on a scanning transmission electron microscope
EP0390118A2 (en) * 1989-03-30 1990-10-03 Hitachi, Ltd. Field emission scanning electron microsope and method of controlling beam aperture angle
US5008535A (en) * 1988-09-02 1991-04-16 U.S. Philips Corporation Energy analyzer and spectrometer for low-energy electrons
US5475228A (en) * 1994-11-28 1995-12-12 University Of Puerto Rico Unipolar blocking method and apparatus for monitoring electrically charged particles
WO2005006384A2 (de) * 2003-07-09 2005-01-20 Carl Zeiss Nts Gmbh Detektorsystem für ein rasterelektronenmikroskop und rasterelektronenmikroskop mit einem entsprechenden detektorsystem
US20060097166A1 (en) * 2004-10-27 2006-05-11 Hitachi High-Technologies Corporation Charged particle beam apparatus and sample manufacturing method
US20060169894A1 (en) * 2005-01-18 2006-08-03 International Business Machines Corporation Method of forming images in a scanning electron microscope
EP1437759A3 (en) * 2003-01-07 2008-02-27 Hitachi High-Technologies Corporation Electron beam device
WO2008152464A2 (en) * 2007-06-11 2008-12-18 C.N.R. Consiglio Nazionale Delle Ricerche Detection device for electron microscope

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3191028A (en) * 1963-04-22 1965-06-22 Albert V Crewe Scanning electron microscope

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3191028A (en) * 1963-04-22 1965-06-22 Albert V Crewe Scanning electron microscope

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Denbigh et al.; Journal of Scientific Instr.; Vol. 42, No. 5, May, 1965, pp. 305 311; *

Cited By (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE29500E (en) * 1970-08-31 1977-12-20 Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. Scanning charged beam particle beam microscope
US3857034A (en) * 1970-08-31 1974-12-24 Max Planck Gesellschaft Scanning charged beam particle beam microscope
US3808441A (en) * 1971-04-30 1974-04-30 Thomson Csf Devices for measuring the dose rate of a beam of ionising radiation
DE2221151A1 (de) * 1971-04-30 1972-11-16 Thomson Csf Anordnung zur Messung der Strahlungsdosis eines ionisierenden Strahlungsbuendels
US3917946A (en) * 1972-04-12 1975-11-04 Philips Corp Electron-optical device for the recording of selected diffraction patterns
US3833811A (en) * 1972-07-11 1974-09-03 Jeol Ltd Scanning electron microscope with improved means for focusing
US3914606A (en) * 1973-03-12 1975-10-21 Jeol Ltd Electron detector
US4068123A (en) * 1973-07-27 1978-01-10 Nihon Denshi Kabushiki Kaisha Scanning electron microscope
US3909610A (en) * 1973-08-22 1975-09-30 Jeol Ltd Apparatus for displaying the energy distribution of a charged particle beam
DE2526116A1 (de) * 1974-06-14 1976-01-02 Cgr Mev Vorrichtung zur kontrolle der zentrierung, der intensitaet, der homogenitaet und der richtungsbuendelung eines ionisierenden strahlenbuendels
US3908124A (en) * 1974-07-01 1975-09-23 Us Energy Phase contrast in high resolution electron microscopy
US4058730A (en) * 1974-09-12 1977-11-15 Siemens Aktiengesellschaft Irradiating device with an electronic accelerator
US3965351A (en) * 1974-10-30 1976-06-22 The United States Of America As Represented By The United States Energy Research And Development Administration Differential auger spectrometry
US4097740A (en) * 1975-09-19 1978-06-27 Siemens Aktiengesellschaft Method and apparatus for focusing the objective lens of a scanning transmission-type corpuscular-beam microscope
US4099055A (en) * 1975-10-17 1978-07-04 Hitachi, Ltd. Scanning transmission electron microscope
FR2423860A1 (fr) * 1978-04-17 1979-11-16 Philips Nv Microscope electronique pour la formation d'une image de phase qui n'est pas deduite d'images de difference
US4596928A (en) * 1979-07-03 1986-06-24 Unisearch Limited Method and apparatus for an atmospheric scanning electron microscope
US4514629A (en) * 1982-07-07 1985-04-30 National Research Development Corporation Scanning transmission electron microscopes
GB2173666A (en) * 1985-04-12 1986-10-15 Plessey Co Plc Scanning optical microscopes
US4760567A (en) * 1986-08-11 1988-07-26 Electron Beam Memories Electron beam memory system with ultra-compact, high current density electron gun
EP0308953A1 (en) * 1987-09-25 1989-03-29 Hitachi, Ltd. Charged particle detector
US4868394A (en) * 1987-09-25 1989-09-19 Hitachi, Ltd. Charged particle detector
EP0348992A2 (en) * 1988-07-01 1990-01-03 Hitachi, Ltd. Apparatus and method of pattern detection based on a scanning transmission electron microscope
EP0348992A3 (en) * 1988-07-01 1991-07-31 Hitachi, Ltd. Apparatus and method of pattern detection based on a scanning transmission electron microscope
US5008535A (en) * 1988-09-02 1991-04-16 U.S. Philips Corporation Energy analyzer and spectrometer for low-energy electrons
US4877961A (en) * 1988-10-26 1989-10-31 Varian Associates, Inc. In-line electron beam energy monitor and control
EP0390118A2 (en) * 1989-03-30 1990-10-03 Hitachi, Ltd. Field emission scanning electron microsope and method of controlling beam aperture angle
EP0390118A3 (en) * 1989-03-30 1991-07-17 Hitachi, Ltd. Field emission scanning electron microsope and method of controlling beam aperture angle
US5142148A (en) * 1989-03-30 1992-08-25 Hitachi, Ltd. Field emission scanning electron microscope and method of controlling beam aperture angle
US5475228A (en) * 1994-11-28 1995-12-12 University Of Puerto Rico Unipolar blocking method and apparatus for monitoring electrically charged particles
EP1437759A3 (en) * 2003-01-07 2008-02-27 Hitachi High-Technologies Corporation Electron beam device
US20080290275A1 (en) * 2003-01-07 2008-11-27 Chisato Kamiya Electron beam device
US7745787B2 (en) 2003-01-07 2010-06-29 Hitachi High-Technologies Corporation Electron beam device
WO2005006384A3 (de) * 2003-07-09 2005-02-10 Zeiss Carl Nts Gmbh Detektorsystem für ein rasterelektronenmikroskop und rasterelektronenmikroskop mit einem entsprechenden detektorsystem
US20060163478A1 (en) * 2003-07-09 2006-07-27 Heiner Jaksch Detector system for a scanning electron microscope and a scanning electron microscope incorporating said detector system
US7285780B2 (en) 2003-07-09 2007-10-23 Carl Zeiss Nts Gmbh Detector system for a scanning electron microscope and a scanning electron microscope incorporating said detector system
WO2005006384A2 (de) * 2003-07-09 2005-01-20 Carl Zeiss Nts Gmbh Detektorsystem für ein rasterelektronenmikroskop und rasterelektronenmikroskop mit einem entsprechenden detektorsystem
US20060097166A1 (en) * 2004-10-27 2006-05-11 Hitachi High-Technologies Corporation Charged particle beam apparatus and sample manufacturing method
US7928377B2 (en) * 2004-10-27 2011-04-19 Hitachi High-Technologies Corporation Charged particle beam apparatus and sample manufacturing method
US20060169894A1 (en) * 2005-01-18 2006-08-03 International Business Machines Corporation Method of forming images in a scanning electron microscope
WO2008152464A2 (en) * 2007-06-11 2008-12-18 C.N.R. Consiglio Nazionale Delle Ricerche Detection device for electron microscope
WO2008152464A3 (en) * 2007-06-11 2009-04-02 Consiglio Nazionale Ricerche Detection device for electron microscope

Also Published As

Publication number Publication date
FR2084007A5 (ja) 1971-12-17
DE2110325A1 (de) 1971-09-16
CH520927A (de) 1972-03-31
BE763456A (fr) 1971-07-16
JPS5411664B1 (ja) 1979-05-16
GB1294440A (en) 1972-10-25

Similar Documents

Publication Publication Date Title
US3626184A (en) Detector system for a scanning electron microscope
US10535494B2 (en) Particle beam system and method for the particle-optical examination of an object
CN106575595B (zh) 用于使用多个带电粒子束来检查样本的装置和方法
McMullan An improved scanning electron microscope for opaque specimens
US4211924A (en) Transmission-type scanning charged-particle beam microscope
US4236073A (en) Scanning ion microscope
US4352985A (en) Scanning ion microscope
DE112011100306B4 (de) Ladungsteilchenstrahlvorrichtung
US3736422A (en) Apparatus for improving the signal information in the electron beam examination of sample topography
US3678384A (en) Electron beam apparatus
JPH0215545A (ja) Ｘ線マスクの欠陥検査方法及びその装置
US3628014A (en) Scanning electron microscope with color display means
US3889115A (en) Ion microanalyzer
US4292519A (en) Device for contact-free potential measurements
US3714425A (en) Reflecting mirror type electron microscope
US4587425A (en) Electron beam apparatus and electron collectors therefor
JPS61288357A (ja) 定量的電位測定用スペクトロメ−タ−対物レンズ装置
US3714424A (en) Apparatus for improving the signal information in the examination of samples by scanning electron microscopy or electron probe microanalysis
US6730907B1 (en) Charged particle device
GB1304344A (ja)
US3733483A (en) Electron spectroscopy
Matsui et al. Projection-type electron spectroscopy collimator analyzer for charged particles and x-ray detections
US2930898A (en) Cathode ray tube apparatus for the inspection of articles
US3488494A (en) Ion microscope the image of which represents the intensity of secondary radiation as a function of the position of the primary ions causing the radiation
JPS5811569B2 (ja) デンシブンコウソウチ