WO2008152464A3 - Detection device for electron microscope - Google Patents

Detection device for electron microscope Download PDF

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Publication number
WO2008152464A3
WO2008152464A3 PCT/IB2008/001438 IB2008001438W WO2008152464A3 WO 2008152464 A3 WO2008152464 A3 WO 2008152464A3 IB 2008001438 W IB2008001438 W IB 2008001438W WO 2008152464 A3 WO2008152464 A3 WO 2008152464A3
Authority
WO
WIPO (PCT)
Prior art keywords
sample
electron microscope
detection device
analysed
deflected
Prior art date
Application number
PCT/IB2008/001438
Other languages
French (fr)
Other versions
WO2008152464A2 (en
Inventor
Vittorio Morandi
Andrea Migliori
Original Assignee
Consiglio Nazionale Ricerche
Ghiselli Antonia
Merli Elisa
Vittorio Morandi
Andrea Migliori
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Consiglio Nazionale Ricerche, Ghiselli Antonia, Merli Elisa, Vittorio Morandi, Andrea Migliori filed Critical Consiglio Nazionale Ricerche
Publication of WO2008152464A2 publication Critical patent/WO2008152464A2/en
Publication of WO2008152464A3 publication Critical patent/WO2008152464A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2441—Semiconductor detectors, e.g. diodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2446—Position sensitive detectors
    • H01J2237/24465—Sectored detectors, e.g. quadrants
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24495—Signal processing, e.g. mixing of two or more signals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2802—Transmission microscopes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Two-Way Televisions, Distribution Of Moving Picture Or The Like (AREA)

Abstract

Described is a detection device designed to be installed in a scanning electron microscope (2) downstream of a sample (3) to be analysed using an electron beam (F) passing through the sample. The device comprises a detection element (4) divided into a plurality of portions which subtend different angles with the sample. Each portion generates a signal dependent on the number of electrons which pass through the sample and are deflected in the angle subtended by that detector portion.
PCT/IB2008/001438 2007-06-11 2008-06-05 Detection device for electron microscope WO2008152464A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
ITBO2007A000409 2007-06-11
ITBO20070409 ITBO20070409A1 (en) 2007-06-11 2007-06-11 DETECTOR DEVICE FOR ELECTRONIC MICROSCOPE.

Publications (2)

Publication Number Publication Date
WO2008152464A2 WO2008152464A2 (en) 2008-12-18
WO2008152464A3 true WO2008152464A3 (en) 2009-04-02

Family

ID=39800529

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2008/001438 WO2008152464A2 (en) 2007-06-11 2008-06-05 Detection device for electron microscope

Country Status (2)

Country Link
IT (1) ITBO20070409A1 (en)
WO (1) WO2008152464A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140027632A1 (en) * 2012-07-26 2014-01-30 Gatan, Inc. System and method for measuring angular luminescence in a charged particle microscope
JP6366127B2 (en) * 2013-12-12 2018-08-01 三星電子株式会社Ｓａｍｓｕｎｇ Ｅｌｅｃｔｒｏｎｉｃｓ Ｃｏ．，Ｌｔｄ． Electron beam apparatus, sample observation method
EP3534391B1 (en) * 2018-03-01 2020-11-04 FEI Company Discriminative imaging technique in scanning transmission charged particle microscopy

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3626184A (en) * 1970-03-05 1971-12-07 Atomic Energy Commission Detector system for a scanning electron microscope
GB1328713A (en) * 1970-08-31 1973-08-30 Max Planck Gesellschaft Corpuscular beam scanning microscopes
US4038543A (en) * 1975-07-08 1977-07-26 Siemens Aktiengesellschaft Scanning transmission electron microscope including an improved image detector
US4068123A (en) * 1973-07-27 1978-01-10 Nihon Denshi Kabushiki Kaisha Scanning electron microscope
US5552602A (en) * 1991-05-15 1996-09-03 Hitachi, Ltd. Electron microscope
JP2004259516A (en) * 2003-02-25 2004-09-16 Fujitsu Ltd Scanning transmission electron microscope
US20070085007A1 (en) * 2005-10-19 2007-04-19 Hitachi High-Technologies Corporation Charged particle beam device with DF-STEM image valuation method

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3626184A (en) * 1970-03-05 1971-12-07 Atomic Energy Commission Detector system for a scanning electron microscope
GB1328713A (en) * 1970-08-31 1973-08-30 Max Planck Gesellschaft Corpuscular beam scanning microscopes
US4068123A (en) * 1973-07-27 1978-01-10 Nihon Denshi Kabushiki Kaisha Scanning electron microscope
US4038543A (en) * 1975-07-08 1977-07-26 Siemens Aktiengesellschaft Scanning transmission electron microscope including an improved image detector
US5552602A (en) * 1991-05-15 1996-09-03 Hitachi, Ltd. Electron microscope
JP2004259516A (en) * 2003-02-25 2004-09-16 Fujitsu Ltd Scanning transmission electron microscope
US20070085007A1 (en) * 2005-10-19 2007-04-19 Hitachi High-Technologies Corporation Charged particle beam device with DF-STEM image valuation method

Also Published As

Publication number Publication date
WO2008152464A2 (en) 2008-12-18
ITBO20070409A1 (en) 2008-12-12

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