US3174678A - Vacuum pumps - Google Patents

Vacuum pumps Download PDF

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Publication number
US3174678A
US3174678A US155656A US15565661A US3174678A US 3174678 A US3174678 A US 3174678A US 155656 A US155656 A US 155656A US 15565661 A US15565661 A US 15565661A US 3174678 A US3174678 A US 3174678A
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US
United States
Prior art keywords
enclosure
grid structure
grid
wall
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US155656A
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English (en)
Inventor
Matricon Marcel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Compagnie Francaise Thomson Houston SA
Original Assignee
Compagnie Francaise Thomson Houston SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Compagnie Francaise Thomson Houston SA filed Critical Compagnie Francaise Thomson Houston SA
Application granted granted Critical
Publication of US3174678A publication Critical patent/US3174678A/en
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Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/02—Manufacture of glass fibres or filaments by drawing or extruding, e.g. direct drawing of molten glass from nozzles; Cooling fins therefor
    • C03B37/03—Drawing means, e.g. drawing drums ; Traction or tensioning devices

Definitions

  • the present invention has for an object the construction of an improved pump implementing the above-mew tioned phenomena.
  • a vacuum pump of the evaporation and ionization type which comprises, on the one hand, a hermetic cylindrical enclosure made from a magnetic material including an inside coating with good gas absorption properties, and a cylindrical grid, on the other hand, arranged on the inside of said enclosure and insulated therefrom, a difference of potential being applied between these two elements in such a way that the enclosure acts as a cathode in relation to the grid, said difference of potential being of sufficient amplitude to produce an electric discharge, the electrons which have been abstracted from the cathode under the impact of the positive ions being accelerated by the electrical field, and submitted to a magnetic field of suitable distribution which enables them to reach the grid after having etiected a certain number of oscillations, during their travel these electrons ionizing the residual gas, the positive ions of which are accelerated towards the cathode where they cause the emission of new electrons, the
  • appropriate screens are suitably arranged on the inside of the grid and parallel to the direction of the magnetic field in such a way that they receive the evaporated cathodic metal, these screens can, should it be necessary, be held at a suitable potential in order that they do not give rise to any disturbance in the distribution of the electrical field.
  • the above-mentioned magnetic field is of perpendicular direc tion in relation to that of the longitudinal axes of the enclosure and the grid, and is distributed in such a way that the major part of the lines of force do not encounter any element of the grid, as a result of which the electrons are able to accomplish a long oscillatory trajectory and consequently have considerable ionizing effect.
  • FIGURE 1 shows a cross-section of a first embodiment of a pump according to the invention
  • FIGURE 2 shows an elevation thereof
  • FIGURES 3 and 4 respectively show cross-sections of two further embodiments.
  • the pump is constituted by a gas-tight cylindrical enclosure 1, made of non-magnetic material having an internal conductive coating 2 having good gas absorption properties.
  • a grid 3 On the inside of this enclosure is a grid 3, arranged coaxial to the whole. Between members 2 and 3 a difference of electrical potential is established so that the grid 3 becomes an anode and the cylinder 2 a cathode.
  • Magnets 4 provided, for example, with pole-pieces 5, are arranged outside enclosure 1 in such a way that a magnetic field, the lines of force of which are shown in 6, are created on the inside of the device.
  • a suitable electrical voltage is applied between the cathode and the anode an electrical discharge results.
  • the electrons abstracted from the cathode by the impact of the positive ions are accelerated by the electrical field which exists between the cathode 2 and the gridformed anode 3 but they are guided by the magnetic field and can generally only attain the anode after having effected a large number of oscillations between the anode and the cathode. During this long trajectory they ionize the residual gases and the positive ions formed accelerate towards the cathode, causing the emission of new electrons.
  • the positive ions which strike the cathode can be absorbed into the metal constituting the cathode if this metal is appropriately chosen.
  • the shock of the positive ions tears away particles of cathodic metal which fix themselves onto the walls of the enclosure. During this process the gaseous molecules are imprisoned beneath the cathodic metal layer.
  • the grid-formed anode 3 is cylindrical in construction, long in relation to its diameter, with a large aperture D to facilitate the passage of the gases to be pumped which pass through a pump inlet 19, the diameter of which is approximately that of the cathode 2.
  • the grid-formed anode 3 is constituted by a number of vertical rods 14 disposed in squirrel-cage fashion along the generators of a cylinder and within these rods 14 is fixed a plurality of parallel rings 15, in axially separated relationship, by any known convenient means such as soldering or binding.
  • the rings 15 are preferably made of the same metal as the rods 14.
  • the anode 3 as a structure is maintained in the pump by insulating members 8, and connected to the positive pole of a current source indicated as a battery 2%, as well as to one of the rods 14 passing through the member 8.
  • the members 8 and 9 thus form between them an electrical connection means and an insulating support.
  • This arrangement is convenient if it is intended to heat the anode by the Joule elfect in order to degasify it and to provoke evaporation of the fixing body of the gas.
  • the anode can be wholly or partly made of the body it is wished to evaporate.
  • the anode can also be positioned by insulating supports which are suitably placed and arranged independent of the electrical connection.
  • FIGURES 3 and 4 show arrangements according to the invention wherein the reference numerals similar to those of FIGURES 1 and 2 designate like parts.
  • the magnetic masses 4 are prismatic and the magnetic field is closed by a yoke 9.
  • surfaces 7 can be held at negative voltage in relation to anode 3 in such a.
  • These surfaces 7 function as ion collectors, thus favouring the fixing of the gases.
  • the voltage to which these surfaces 7 is carried should be such that the ion collection be efficient but that the speed of these ions .be too low to cause the automisation of the metal constituting these surfaces 7 or which is deposited on them.
  • This method of operation can be accompanied by Joule heating of anode 3 and by its evaporation if said anode has been made of a metal able to fix the gases.
  • An ionisation and evaporation vacuum pump comprising a sealed cylindrical enclosure made of a nonmagnetic material, an inlet on said enclosure for-connecting said pump to a structure to be evacuated, a coating on the inside wall of said enclosure, said coating having good gas absorption properties, a cylindrical grid structure open at one end arranged axially within and electrically insulated from said enclosure, said grid structure consisting of a plurality of rods disposed in squirrel-cage fashion along the generators of a cylinder, and a plurality of rings secured to and within said rods in parallel axially spaced relationship, the outer diameter of said grid structure being of such size as to leave a gap between said inner wall of said enclosure, means for supporting said grid structure, means for heating said grid structure, said grid structure being made of a material having at least a coating of a metal to be evaporated, means for applying a potential difference between said grid structure and said enclosure to cause said enclosure to function as a cathode in relation to said grid structure, said potential diiference being of
  • An ionisation and evaporation vacuum pump com prising a sealed cylindrical enclosure made of a nonmagnetic material, an inlet on said enclosure for connecting said pump to a structure to be evacuated, a coating on the inside wall of said-enclosure, said coating having good gas absorption properties, a cylindrical grid structure open at one end arranged within and electrically insulated from said enclosure, said grid structure consisting of a plurality of rods disposed in squirrel-cage fashion along the generators of a cylinder, and a plurality of rings i secured to and Within said rods in parallel axially spaced relationship, the outer diameter of said grid structure being of such size as to leave a gap between said inner wall of said enclosure, rod means passing through said enclosure for supporting said grid structure, said rod means being insulated from said enclosure, electrical connection members for said rod means, means for heating said grid structure, said grid structure being made of a material having at least a coating of a metal to be evaporated, means for applying a potential diiference between said grid structure and said'en

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
US155656A 1960-12-01 1961-11-29 Vacuum pumps Expired - Lifetime US3174678A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR845549A FR1281403A (fr) 1960-12-01 1960-12-01 Système perfectionné de pompe à vide du type à évaporation et à ionisation

Publications (1)

Publication Number Publication Date
US3174678A true US3174678A (en) 1965-03-23

Family

ID=8743801

Family Applications (1)

Application Number Title Priority Date Filing Date
US155656A Expired - Lifetime US3174678A (en) 1960-12-01 1961-11-29 Vacuum pumps

Country Status (4)

Country Link
US (1) US3174678A (de)
DE (1) DE1246932B (de)
FR (1) FR1281403A (de)
GB (1) GB1003212A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3342404A (en) * 1964-11-19 1967-09-19 Atomic Energy Authority Uk Annular electrodes in differential pumping tubes for electrostatic accelerators

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3224664A (en) * 1962-08-08 1965-12-21 Philips Corp Ion pump
DE1539133B1 (de) * 1966-04-28 1969-10-02 Leybold Heraeus Gmbh & Co Kg Ionengetterpumpe
US4842170A (en) * 1987-07-06 1989-06-27 Westinghouse Electric Corp. Liquid metal electromagnetic flow control device incorporating a pumping action

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB797232A (en) * 1955-07-11 1958-06-25 Manfred Von Ardenne Improvements in or relating to high vacuum ion pumps
GB834655A (en) * 1953-04-24 1960-05-11 Gen Electric Improvements in ionic vacuum pumps
GB862892A (en) * 1957-02-27 1961-03-15 Manfred Matthias Dunkel A high-vacuum ion-getter pump
US2993638A (en) * 1957-07-24 1961-07-25 Varian Associates Electrical vacuum pump apparatus and method

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE108954C (de) *
DE1061029B (de) * 1957-01-26 1959-07-09 High Voltage Engineering Corp Ionengetterpumpe
NL229703A (de) * 1957-07-24

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB834655A (en) * 1953-04-24 1960-05-11 Gen Electric Improvements in ionic vacuum pumps
GB797232A (en) * 1955-07-11 1958-06-25 Manfred Von Ardenne Improvements in or relating to high vacuum ion pumps
GB862892A (en) * 1957-02-27 1961-03-15 Manfred Matthias Dunkel A high-vacuum ion-getter pump
US2993638A (en) * 1957-07-24 1961-07-25 Varian Associates Electrical vacuum pump apparatus and method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3342404A (en) * 1964-11-19 1967-09-19 Atomic Energy Authority Uk Annular electrodes in differential pumping tubes for electrostatic accelerators

Also Published As

Publication number Publication date
FR1281403A (fr) 1962-01-12
GB1003212A (en) 1965-09-02
DE1246932B (de) 1967-08-10

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