US20230133839A1 - Electrostatic chuck device power supply, electrostatic chuck device, and dechuck control method - Google Patents

Electrostatic chuck device power supply, electrostatic chuck device, and dechuck control method Download PDF

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Publication number
US20230133839A1
US20230133839A1 US17/801,586 US202017801586A US2023133839A1 US 20230133839 A1 US20230133839 A1 US 20230133839A1 US 202017801586 A US202017801586 A US 202017801586A US 2023133839 A1 US2023133839 A1 US 2023133839A1
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voltage
electrode
dechuck
waveform
electrostatic chuck
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English (en)
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Takahiro Tsuchiya
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Hamamatsu Photonics KK
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Hamamatsu Photonics KK
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Assigned to HAMAMATSU PHOTONICS K.K. reassignment HAMAMATSU PHOTONICS K.K. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: TSUCHIYA, TAKAHIRO
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
    • H01L21/6833—Details of electrostatic chucks
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect

Definitions

  • the present disclosure relates to a power supply for an electrostatic chuck device, an electrostatic chuck device, and a dechuck control method.
  • the electrostatic holding device in the related art includes an electrostatic holding unit in which a plurality of electrodes are arranged in an insulating layer, and a switching unit that switches a connection state between the electrostatic holding unit and a DC power supply and an AC power supply.
  • charges of the electrostatic holding unit are removed by applying an AC voltage to an electrode when dechucking an object to be held.
  • the present disclosure has been made to solve the problem, and an object thereof is to provide a power supply for an electrostatic chuck device which is capable of shortening time taken until an object to be held is separated from a support unit at the time of dechuck, an electrostatic chuck device, and a dechuck control method.
  • a power supply for an electrostatic chuck device includes: a voltage application unit configured to apply a dechuck voltage that is used when dechucking an object to be held to a first electrode and a second electrode, the dechuck voltage being constituted by a first AC voltage applied to the first electrode in a first waveform, and a second AC voltage applied to the second electrode in a second waveform having a phase difference from the first waveform; and an information output unit configured to output information based on timing at which the first waveform and the second waveform intersect each other.
  • the voltage application unit stops application of the dechuck voltage to the first electrode and the second electrode on the basis of the information.
  • the information output unit may acquire the information through detection of the first AC voltage and the second AC voltage.
  • the information output unit can appropriately output information, and application of the dechuck voltage can be stopped at timing suitable for separation of the object. Accordingly, it is possible to shorten time taken until the object is separated from the support unit at the time of dechuck.
  • the information output unit may retain the information based on the first AC voltage and the second AC voltage in advance.
  • the information output unit can appropriately output the information, and application of the dechuck voltage can be stopped at timing suitable for separation of the object. Accordingly, it is possible to shorten time taken until the object is separated from the support unit at the time of dechuck.
  • the voltage application unit may apply the dechuck voltage to the first electrode and the second electrode so that the first waveform and the second waveform have phases opposite to each other.
  • a positive potential and a negative potential are alternately applied to the first electrode and the second electrode, it is possible to improve removal efficiency for charges in the support unit by the first AC voltage and the second AC voltage.
  • the voltage application unit may apply the dechuck voltage to the first electrode and the second electrode so that values of the first AC voltage and the second AC voltage become zero when the first waveform and the second waveform intersect each other. In this case, since application of the dechuck voltage can be stopped when the voltage values of the first AC voltage and the second AC voltage become zero, dechuck reliability can be improved.
  • the voltage application unit may apply the dechuck voltage to the first electrode and the second electrode so that periods indicated by the first waveform and the second waveform when initiating application of the dechuck voltage become equal to or greater than 0 and less than 1 ⁇ 2 ⁇ and equal to or greater than ⁇ and less than 3/2 ⁇ in a case where one period of the first waveform and the second waveform is set to 2 ⁇ .
  • the voltage application unit may apply the dechuck voltage to the first electrode and the second electrode so that the first waveform and the second waveform have the same amplitude.
  • the first waveform and the second waveform are caused to have positive and negative symmetry, it is possible to improve removal efficiency for charges in the support unit by the first AC voltage and the second AC voltage.
  • the voltage application unit may invert a polarity of a voltage applied to the first electrode and a polarity of a voltage applied to the second electrode in switching from a chuck voltage used when chucking the object to the dechuck voltage. In this case, it is possible to initiate removal of charges in the support unit from time immediately after initiating dechuck. Accordingly, it is possible to more effectively shorten time taken until the object is separated from the support unit at the time of dechuck.
  • an electrostatic chuck device including: the power supply for an electrostatic chuck device according to the aspect; and a support unit that includes a first electrode and a second electrode in an insulator.
  • the electrostatic chuck device application of the dechuck voltage to the first electrode and the second electrode is stopped on the basis of information on timing at which a waveform of a first AC voltage and a waveform of a second AC voltage interest each other at the time of dechuck. According to this configuration, application of the dechuck voltage to the first electrode and the second electrode can be positively stopped at timing suitable for separation of the object without waiting attenuation of the first AC voltage and the second AC voltage. Accordingly, in the electrostatic chuck device, it is possible to shorten time taken until the object is separated from the support unit at the time of dechuck.
  • a dechuck control method including: a dechuck voltage application step of applying a first AC voltage to a first electrode in a first waveform and applying a second AC voltage to a second electrode in a second waveform having a phase difference from the first waveform; an information output step of outputting information on timing at which the first waveform and the second waveform intersect each other; and a stoppage step of stopping application of the dechuck voltage to the first electrode and the second electrode on the basis of the information output from the information output step.
  • application of the dechuck voltage to the first electrode and the second electrode is stopped on the basis of information on timing at which the waveform of the first AC voltage and the waveform of the second AC voltage intersect each other at the time of dechuck. According to this, application of the dechuck voltage to the first electrode and the second electrode can be positively stopped at timing suitable for separation of the object without waiting attenuation of the first AC voltage and the second AC voltage. Accordingly, in the electrostatic chuck device, it is possible to shorten time taken until the object is separated from the support unit at the time of dechuck.
  • the information acquired through detection of the first AC voltage and the second AC voltage may be output.
  • the information retained in advance on the basis of the first AC voltage and the second AC voltage may be output.
  • the dechuck voltage may be applied to the first electrode and the second electrode so that the first waveform and the second waveform have phases opposite to each other.
  • a positive potential and a negative potential are alternately applied to the first electrode and the second electrode, it is possible to improve removal efficiency for charges in the support unit by the first AC voltage and the second AC voltage.
  • the dechuck voltage may be applied to the first electrode and the second electrode so that values of the first AC voltage and the second AC voltage become zero when the first waveform and the second waveform intersect each other. In this case, since application of the dechuck voltage can be stopped when the voltage values of the first AC voltage and the second AC voltage become zero, dechuck reliability can be improved.
  • the dechuck voltage may be applied to the first electrode and the second electrode so that periods indicated by the first waveform and the second waveform when initiating application of the dechuck voltage become equal to or greater than 0 and less than 1 ⁇ 2 ⁇ and equal to or greater than ⁇ and less than 3/2 ⁇ in a case where one period of the first waveform and the second waveform is set to 2 ⁇ .
  • the dechuck voltage may be applied to the first electrode and the second electrode so that the first waveform and the second waveform have the same amplitude.
  • the first waveform and the second waveform are caused to have positive and negative symmetry, it is possible to improve removal efficiency for charges in the support unit by the first AC voltage and the second AC voltage.
  • a polarity of a voltage applied to the first electrode and a polarity of a voltage applied to the second electrode may be inverted in switching from a chuck voltage to the dechuck voltage.
  • FIG. 1 is a schematic cross-sectional view illustrating an embodiment of an electrostatic chuck device.
  • FIG. 2 is a circuit diagram illustrating a configuration example of a voltage application unit.
  • FIG. 3 is a view illustrating an example of various signals and an output voltage which are used in the voltage application unit.
  • FIG. 4 is a view illustrating an example of control of a chuck voltage and a dechuck voltage by the voltage application unit.
  • FIG. 5 is a flowchart illustrating an operation of the electrostatic chuck device.
  • FIG. 6 is a view illustrating a verification result of dechuck conditions for an object to be held.
  • FIG. 7 is a circuit diagram illustrating a modification example of the voltage application unit.
  • FIG. 1 is a schematic cross-sectional view illustrating an embodiment of an electrostatic chuck device 1 .
  • the electrostatic chuck device 1 illustrated in FIG. 1 is a bipolar electrostatic chuck device capable of switching holding and non-holding of an object K to be held.
  • the electrostatic chuck device 1 is a device that holds the object K by using an electrostatic force.
  • the electrostatic chuck device 1 is applicable to conveyance, processing, and the like of various objects K to be held such as a silicon wafer and an IC lead frame in vacuum environment in which suction by air is difficult.
  • the electrostatic chuck device 1 includes a support unit 2 and a power supply P for an electrostatic chuck device (refer to FIG. 2 ).
  • the support unit 2 includes an insulator 4 , a first electrode 5 , and a second electrode 6 .
  • the insulator 4 is formed from an insulating material such as ceramic and polyimide in a plate shape. One surface side of the insulator 4 becomes a support surface 2 a of the object K with the support unit 2 .
  • the first electrode 5 and the second electrode 6 are formed from a conductive material.
  • the first electrode 5 and the second electrode 6 include a base portion that extends in a trunk shape, and a plurality of comb-like electrodes which protrude from the base portion in a direction that is approximately orthogonal to the extension direction. In FIG. 1 , only the comb-like electrodes are illustrated, and the base portion is omitted.
  • the comb-like electrodes of the first electrode 5 and the second electrode 6 are spaced apart from each other at a constant interval, and are arranged alternately and in parallel to engage with each other.
  • the first electrode 5 and the second electrode 6 are sealed inside the insulator 4 .
  • the number of arrangement of the comb-like electrodes of the first electrode 5 and the number of arrangement of the comb-like electrodes of the second electrode 6 are the same as each other.
  • a and B in FIG. 1 correspond to A and B in FIG. 2 , and the first electrode 5 and the second electrode 6 are electrically connected to a voltage application unit 3 .
  • the power supply P for an electrostatic chuck device is a portion that applies a voltage to the first electrode 5 and the second electrode 6 , and includes the voltage application unit 3 .
  • the voltage application unit 3 applies a chuck voltage that is used when chucking the object K and a dechuck voltage that is used when dechucking the object K to the first electrode 5 and the second electrode 6 .
  • a voltage application unit that applies the chuck voltage that is used when chucking the object K and a voltage application unit that applies the dechuck voltage that is used when dechucking the object K may be separate members.
  • the chuck voltage is constituted by a pair of DC voltages in which positive and negative are inverted
  • the dechuck voltage is constituted by a pair of AC voltages having the same amplitude and phases opposite to each other (refer to FIG. 4 ).
  • the chuck voltage is applied to the first electrode 5 and the second electrode 6
  • static electricity is charged on the support surface 2 a of the support unit 2
  • the object K is held by the support surface 2 a .
  • the dechuck voltages are applied to the first electrode 5 and the second electrode 6
  • voltages in which positive and negative are inverted are periodically applied to the first electrode 5 and the second electrode 6 , and the static electricity is removed from the support surface 2 a of the support unit 2 .
  • application of the pair of AC voltages is stopped when voltage values thereof become 0 (when the voltage values reach a ground voltage), and thus the object K can be separated from the support surface 2 a . Details thereof will be described later.
  • FIG. 2 is a circuit diagram illustrating a configuration example of the voltage application unit 3 .
  • the voltage application unit 3 includes an AC power supply 21 , a DC power supply 22 , and a cross-voltage adjustment unit 23 .
  • the voltage application unit 3 includes a comparator 24 , a counter 25 , a decoder 26 , a first selector 27 , a second selector 28 , a first high-voltage amplifier 29 , and a second high-voltage amplifier 30 .
  • the AC power supply 21 is a single-phase power supply that outputs an AC voltage at the time of dechuck.
  • the AC power supply 21 is connected to the comparator 24 and the first selector 27 .
  • the DC power supply 22 is a power supply that outputs a DC voltage at the time of chuck.
  • the DC power supply 22 is connected to the second selector 28 .
  • the cross-voltage adjustment unit 23 is a DC power supply for adjusting an offset amount of the AC voltage at the time of dechuck.
  • the cross-voltage adjustment unit 23 is connected to the comparator 24 , the first high-voltage amplifier 29 , and the second high-voltage amplifier 30 , respectively.
  • the first high-voltage amplifier 29 is connected to the first electrode 5
  • the second high-voltage amplifier 30 is connected to the second electrode 6 .
  • the comparator 24 is a portion that determines positive and negative of an AC voltage that is input from the AC power supply 21 .
  • the comparator 24 compares an AC voltage that is output from the AC power supply 21 and a DC voltage that is output from the cross-voltage adjustment unit 23 , and outputs an output signal corresponding to a period of the AC voltage to the counter 25 .
  • the counter 25 is a portion that receives an input of a chuck and dechuck signal, and measures the number of times of input of the output signals transmitted from the comparator 24 at the time of dechuck.
  • the decoder 26 is a portion that detects the number of times of polarity inversion of the AC voltage that is output from the AC power supply 21 . In a case where the number of times of polarity inversion reaches the number of times set in advance, the decoder 26 outputs an output signal indicating the gist to the first selector 27 .
  • the comparator 24 , the counter 25 , and the decoder 26 constitutes an information output unit 40 (to be described later) that outputs information on timing T at which a first waveform W 1 of a first AC voltage Va 1 and a second waveform W 2 of a second AC voltage Va 2 intersect each other.
  • the first selector 27 selectively inputs an output voltage of one of the AC power supply 21 and a ground voltage to the second selector 28 on the basis of an output signal from the decoder 26 .
  • the second selector 28 receives an input of the chuck and dechuck signal, and selectively inputs an output voltage of one of the DC power supply 22 and the first selector 27 to the first high-voltage amplifier 29 and the second high-voltage amplifier 30 .
  • the first high-voltage amplifier 29 and the second high-voltage amplifier 30 amplify an input voltage from the second selector 28 and the cross-voltage adjustment unit 23 , and apply a voltage after amplification to the first electrode 5 and the second electrode 6 .
  • FIG. 3 is a view illustrating an example of various signals and output voltages which are used in the voltage application unit 3 .
  • An operation of the voltage application unit 3 can be switched on the basis of the chuck and dechuck signal input from the outside.
  • the chuck and dechuck signal becomes 0 at the time of chuck and becomes 1 at the time of dechuck. That is, the chuck and dechuck signal becomes a chuck signal that gives an instruction for a chuck operation to the electrostatic chuck device 1 when a value thereof is 0, and becomes a dechuck signal that gives an instruction for a dechuck operation to the electrostatic chuck device 1 when a value thereof is 1 at time t 0 .
  • an output voltage of the AC power supply 21 is an AC voltage having a constant frequency and a constant amplitude at the time of chuck and at the time of dechuck.
  • an output signal of the comparator 24 becomes 1 in a period in which an output voltage of the AC power supply 21 is positive (including 0), and becomes 0 in a period in which the output voltage is negative.
  • an output signal of the decoder 26 becomes 1 until the subsequent chuck signal arrives. An output signal of the decoder 26 becomes 0 in other periods.
  • an output signal of the second selector 28 has a constant positive value at the time of chuck, and becomes an AC signal having the same waveform as in the output voltage of the AC power supply 21 at the time of dechuck.
  • An output signal of the second selector 28 becomes 0 in a period in which the output signal of the decoder 26 becomes 1 at the time of dechuck.
  • An output voltage of the first high-voltage amplifier 29 is a voltage that is applied to the first electrode 5 .
  • the output voltage of the first high-voltage amplifier 29 becomes a positive DC voltage at the time of chuck, and becomes an AC voltage (first AC voltage Va 1 to be described later) corresponding to the output signal of the second selector 28 at the time of dechuck at time t 0 .
  • An output voltage of the second high-voltage amplifier 30 is a voltage that is applied to the second electrode 6 . As illustrated in FIG.
  • the output voltage of the second high-voltage amplifier becomes a negative DC voltage at the time of chuck and becomes an AC voltage (second AC voltage Va 2 to be described later) in which positive and negative are inverted from the output signal of the second selector 28 at the time of dechuck at time t 0 .
  • the output voltage of the first high-voltage amplifier 29 and the output voltage of the second high-voltage amplifier 30 becomes 0 in a period in which the output signal of the decoder 26 becomes 1 at the time of dechuck at time t 1 .
  • FIG. 4 is a view illustrating an example of control of a chuck voltage and a dechuck voltage by the voltage application unit 3 .
  • values of the output voltage (an application voltage to the first electrode 5 ) of the first high-voltage amplifier 29 and the output voltage (application voltage to the second electrode 6 ) of the second high-voltage amplifier 30 at time to are set to 0 in combination.
  • a first DC voltage Vd 1 is applied to the first electrode 5 and a second DC voltage Vd 2 is applied to the second electrode 6 at the time of chuck.
  • the first DC voltage Vd 1 is a positive voltage
  • the second DC voltage Vd 2 is a negative voltage.
  • the voltages which are applied to the first electrode 5 and the second electrode 6 are switched from a DC voltage to an AC voltage.
  • the first AC voltage Va 1 is applied to the first electrode 5 and the second AC voltage Va 2 is applied to the second electrode 6 .
  • the first waveform W 1 indicated by the first AC voltage Va 1 and the second waveform W 2 indicated by the second AC voltage Va 2 have the same amplitude and phases opposite to each other.
  • a potential when the first waveform W 1 and the second waveform W 2 intersect each other is adjusted by an offset amount of the first AC voltage Va 1 and the second AC voltage Va 2 .
  • the offset amount of the first AC voltage Va 1 and the second AC voltage Va 2 is adjusted so that voltage values of the first AC voltage Va 1 and the second AC voltage Va 2 become zero when the first waveform W 1 and the second waveform W 2 intersect each other.
  • the period indicated by the first waveform W 1 and the second waveform W 2 when initiating application of the dechuck voltages that is, at time t 0 is equal to or greater than 0 and less than 1 ⁇ 2 ⁇ and equal to or greater than ⁇ and less than 3/2 ⁇ .
  • the period indicated by the first waveform W 1 is ⁇ and the period indicated by the second waveform W 2 is 0.
  • a polarity of a voltage that is applied to the first electrode 5 and a polarity of a voltage that is applied to the second electrode 6 are inverted from each other.
  • Positive and negative absolute values of the first AC voltage Va 1 and the second AC voltage Va 2 are 0 at time t 0 .
  • the absolute values gradually increase after time t 0 , and reach a first peak after passage of time corresponding to 1 ⁇ 2 ⁇ .
  • time taken until the positive and negative absolute values of the first AC voltage Va 1 and the second AC voltage Va 2 reach the first peak is further shortened in comparison to a case where the periods indicated by the first waveform W 1 and the second Waveform W 2 at Time t 0 are Equal to or Greater than 1 ⁇ 2 ⁇ and Less than ⁇ , and equal to or greater than 3/2 ⁇ and less than 2 ⁇ .
  • the information output unit 40 After application of the dechuck voltages, at timing T at which the first waveform W 1 and the second waveform W 2 intersect each other, application of the dechuck voltages to the first electrode 5 and the second electrode 6 is stopped. Specifically, the information output unit 40 outputs dechuck voltage application stoppage signal Dt to the first selector 27 on the basis of a timing signal Ts that is information on timing T at which the first waveform W 1 and the second waveform W 2 intersect each other. After receiving the dechuck voltage application stoppage signal Dt, the first selector 27 inputs a ground voltage to the second selector 28 .
  • the second selector 28 inputs the ground voltage of the first selector 27 to the first high-voltage amplifier 29 and the second high-voltage amplifier 30 . According to this, application of the dechuck voltages to the first electrode 5 and the second electrode 6 is stopped (refer to FIG. 2 ).
  • the information output unit 40 acquires a timing signal Ts 1 related to timing T 1 .
  • the information output unit 40 acquires a timing signal Ts 2 related to timing T 2 .
  • the information output unit 40 acquires a timing signal Ts 3 related to timing T 3 .
  • the information output unit 40 acquires a timing signal Ts 4 related to timing T 4 .
  • the information output unit 40 receives the timing signal Ts 4 and outputs the dechuck voltage application stoppage signal Dt. According to this, application of the dechuck voltages to the first electrode 5 and the second electrode 6 is stopped.
  • the first AC voltage Va 1 and the second AC voltage Va 2 are controlled always to be output in a desired state.
  • the timing signal Ts that is information related to the timing T at which the first waveform W 1 and the second waveform W 2 intersect each other can be output from the comparator 24 of the information output unit 40 even when an actual AC voltage is not detected. That is, since timing at which positive and negative determination of the AC voltage output from the AC power supply 21 is switched (polarity inversion) is the same as the timing T at which the first waveform W 1 and the second waveform W 2 intersect each other, an output signal of the comparator 24 becomes the timing signal Ts.
  • the counter 25 After receiving an input of the dechuck signal, the counter 25 measures the number of times of input of the timing signal Ts from the comparator 24 after time at which dechuck is initiated, and outputs a measurement result toward the decoder 26 . In a case where the number of times of the timing signal Ts synchronized with the number of times of polarity inversion reaches the number of times set in the decoder 26 in advance, the decoder 26 outputs the dechuck voltage application stoppage signal Dt to the first selector 27 .
  • a determination as to whether to stop application of the dechuck voltages at which timing T at which the first waveform W 1 and the second waveform W 2 intersect each other is appropriately made, for example, the kind of the object K or the support unit 2 , a voltage value of the chuck voltage, an amplitude and a frequency of the dechuck voltages, and the like.
  • timing of stopping application of the dechuck voltages that is, timing at which the dechuck voltage application stoppage signal Dt is output by the information output unit 40
  • the number of times of intersection of the first waveform W 1 and the second waveform W 2 (the number of times of set of the decoder 26 ) may be changed.
  • Dechuck conditions can also be adjusted by changing voltage values, amplitudes, or frequencies of the first AC voltage Va 1 and the second AC voltage Va 2 .
  • the dechuck conditions can be adjusted by changing an amplitude or a frequency of the AC power supply 21 .
  • FIG. 5 is a flowchart illustrating the operation of the electrostatic chuck device 1 .
  • step S 01 in the electrostatic chuck device 1 , first, chuck conditions and dechuck conditions are set (step S 01 ).
  • step S 01 voltage values of the first DC voltage Vd 1 and the second DC voltage Vd 2 which are used at the time of chuck, waveforms, frequencies, amplitudes, and an offset amount of the first AC voltage Va 1 and the second AC voltage Va 2 which are used at the time of dechuck, timing of stopping the dechuck voltages, and the like are set.
  • chuck voltages (the first DC voltage Vd 1 and the second DC voltage Vd 2 ) are applied to the first electrode 5 and the second electrode 6 (step S 03 ). Due to application of the chuck voltages to the first electrode 5 and the second electrode 6 , static electricity is charged on the support surface 2 a of the support unit 2 , and the object K is held by the support surface 2 a .
  • Various treatments such as conveyance and processing are performed on the object K which is held on the support surface 2 a.
  • step S 04 After application of the chuck voltages, a determination is made as to whether or not the dechuck signal has been input (step S 04 ). In a case where the dechuck signal is not input, holding of the object K on the support surface 2 a continues, and the determination in step S 04 is repeated until the dechuck signal is input. In a case where the dechuck signal has been input, dechuck voltages (the first AC voltage Va 1 and the second AC voltage Va 2 ) are applied to the first electrode 5 and the second electrode 6 (step S 05 ). Due to application of the dechuck voltages, voltages in which positive and negative are inverted are periodically applied to the first electrode 5 and the second electrode 6 , and the static electricity is removed from the support surface 2 a of the support unit 2 .
  • dechuck voltages the first AC voltage Va 1 and the second AC voltage Va 2
  • step S 06 After initiating application of the dechuck voltages, a determination is made as to whether or not the dechuck voltage stoppage timing set in step S 01 has been reached (step S 06 ). In a case where the set timing has not been reached, application of the dechuck voltages continues, and the determination in step S 06 is repeated until reaching the timing. In a case where the set timing is reached, application of the dechuck voltages is stopped at timing at which the waveform of the first AC voltage Va 1 and the waveform of the second alternating current intersect each other (step S 07 ). When voltage values of the first AC voltage Va 1 and the second AC voltage Va 2 become the ground voltage, application of the first AC voltage Va 1 and the second AC voltage Va 2 is stopped in order for the object K to be separated from the support surface 2 a.
  • the electrostatic chuck device 1 application of the dechuck voltages to the first electrode 5 and the second electrode 6 is stopped on the basis of information on the timing at which the first waveform W 1 and the second waveform W 2 intersect each other at the time of dechuck. According to the configuration, application of the dechuck voltages to the first electrode 5 and the second electrode 6 can be positively stopped at timing suitable for separation of the object K without waiting attenuation of the first AC voltage Va 1 and the second AC voltage Va 2 . Accordingly, in the electrostatic chuck device 1 , it is possible to shorten time taken until the object K is separated from the support unit 2 at the time of dechuck.
  • the information output unit 40 retains information in advance on the basis of the first AC voltage Va 1 and the second AC voltage Va 2 . According to this, in the information output unit 40 , the information can be appropriately output, and application of the dechuck voltages can be stopped at timing suitable for separation of the object K. Accordingly, it is possible to shorten time taken until the object K is separated from the support unit 2 at the time of dechuck.
  • the voltage application unit 3 applies the dechuck voltages to the first electrode 5 and the second electrode 6 so that the first waveform W 1 and the second waveform W 2 have phases opposite to each other. Accordingly, since positive and negative potentials are alternately applied to the first electrode 5 and the second electrode 6 , it is possible to improve removal efficiency for charges in the support unit 2 by the first AC voltage Va 1 and the second AC voltage Va 2 .
  • the voltage application unit 3 applies the dechuck voltages to the first electrode 5 and the second electrode 6 so that values of the first AC voltage Va 1 and the second AC voltage Va 2 become zero in combination when the first waveform W 1 and the second waveform W 2 intersect each other. Accordingly, since application of the dechuck voltages can be stopped when the voltage values of the first AC voltage Va 1 and the second AC voltage Va 2 become zero, dechuck reliability can be improved.
  • the voltage application unit 3 applies the dechuck voltages to the first electrode 5 and the second electrode 6 so that periods indicated by the first waveform W 1 and the second waveform W 2 when initiating application of the dechuck voltages become equal to or greater than 0 and less than 1 ⁇ 2 ⁇ and equal to or greater than ⁇ and less than 3/2 ⁇ in a case where one period of the first waveform W 1 and the second waveform W 2 is set to 2 ⁇ . Accordingly, it is possible to shorten time taken until positive and negative absolute values of the first AC voltage Va 1 and the second AC voltage Va 2 becomes maximum values after initiating application of the dechuck voltages. Accordingly, it is possible to more effectively shorten time taken until the object K is separated from the support unit 2 at the time of dechuck.
  • the voltage application unit 3 applies the dechuck voltages to the first electrode 5 and the second electrode 6 so that the first waveform W 1 and the second waveform W 2 have the same amplitude. Accordingly, since the first waveform W 1 and the second waveform W 2 are caused to have positive and negative symmetry, it is possible to improve removal efficiency for charges in the support unit 2 by the first AC voltage Va 1 and the second AC voltage Va 2 .
  • the voltage application unit 3 inverts a polarity of a voltage applied to the first electrode 5 and a polarity of a voltage applied to the second electrode 6 in switching from a chuck voltage used when chucking the object K to the dechuck voltage. In this case, it is possible to initiate removal of charges in the support unit 2 from time immediately after initiating dechuck. Accordingly, it is possible to more effectively shorten time taken until the object K is separated from the support unit 2 at the time of dechuck.
  • FIG. 6 is a view illustrating a verification result of the dechuck conditions for the object K.
  • frequencies and amplitudes of the first AC voltage Va 1 and the second AC voltage Va 2 were set as parameters.
  • the dechuck voltages were applied to the first electrode 5 and the second electrode 6 , and conditions in which time taken until the object K is dropped from the support surface 2 a after application of the dechuck voltages (dechuck time) is the shortest are obtained.
  • the kind of the object K was set to four kinds including a copper frame, paper, glass, and a copper plate.
  • a chuck voltage is set to ⁇ 1200 V.
  • dechuck time was the shortest in a case where frequencies of the first AC voltage Va 1 and the second AC voltage Va 2 were set to 1 Hz, and an amplitude was set to 500 V.
  • dechuck time was the shortest in a case where frequencies of the first AC voltage Va 1 and the second AC voltage Va 2 were set to 1 Hz, and an amplitude was set to 250 V.
  • dechuck time was the shortest in a case where frequencies of the first AC voltage Va 1 and the second AC voltage Va 2 were set to 0.1 Hz, and an amplitude was set to 500 V.
  • the dechuck time was approximately one second.
  • the timing signal Ts is acquired by determining positive and negative of the AC voltages output from the AC power supply 21 by using the comparator 24 , but as illustrated in FIG. 7 , the timing signal Ts may be acquired by detecting timing T at which the first waveform W 1 and the second waveform W 2 intersect each other by using a detection unit 50 that directly detects the first AC voltage Va 1 and the second AC voltage Va 2 .
  • a comparator 32 that constitutes the detection unit 50 may detect timing at which a value of the first AC voltage Va 1 and a value of the second AC voltage Va 2 equal to each other, that is, the timing T at which the first waveform and the second waveform W 2 intersect each other, and may input the detected value to a third selector 33 as a detection signal Ds.
  • the signal described in FIG. 2 is input to the third selector 33 also from the comparator 24 .
  • the third selector 33 selects any one signal among signals input from the comparator 32 and the comparator 24 , and outputs the timing signal Ts corresponding to the signal to the counter 25 .
  • the third selector 33 may receive an input of a detection unit using signal or a detection unit not-using signal which are signals indicating whether or not to use the detection unit 50 .
  • the third selector 33 receives the input of the detection unit using signal, selects a detection signal Ds input from the comparator 32 , and outputs the timing signal Ts based on the detection signal Ds to the counter 25 .
  • the third selector 33 receives the input of the detection unit not-using signal, selects a signal input from the comparator 24 , and outputs the timing signal Ts corresponding to the signal to the counter 25 .
  • An output of the AC power supply 21 may be adjusted by using detection information in the detection unit 50 to stabilize characteristics of the AC power supply 21 .
  • the information output unit 40 acquires the timing signal Ts through detection of the first AC voltage Va 1 and the second AC voltage Va 2 .
  • the information output unit 40 can appropriately output the dechuck voltage application stoppage signal Dt, and can stop application of the dechuck voltages at the timing T suitable for separation of the object K. Accordingly, it is possible to shorten time taken until the object K is separated from the support unit 2 at the time of dechuck.
  • appropriate timing T can be obtained by directly detecting the first AC voltage Va 1 and the second AC voltage Va 2 , for example, even in a case where characteristics of the AC power supply 21 is not stable.
  • the number of arrangement of comb-like electrodes of the first electrode 5 and the number of arrangement of comb-like electrodes of the second electrode 6 inside the insulator 4 are the same as each other, but the number of arrangement of the electrodes may be different from each other.
  • the first electrode 5 and the second electrode 6 inside the insulator 4 may have a configuration in which the comb-like electrodes are not provided, and areas of the first electrode 5 and the second electrode 6 when viewed from a normal direction of the support surface 2 a may be different from each other.
  • the first AC voltage Va 1 and the second AC voltage Va 2 which are used at the time of dechuck may deviate from an opposite phase state, or amplitudes or frequencies may be different from each other.
  • a voltage value when the waveform of the first AC voltage Va 1 and the waveform of the second AC voltage Va 2 intersect each other may be offset to any one of positive and negative with respect to zero.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Dicing (AREA)
  • Jigs For Machine Tools (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
US17/801,586 2020-03-02 2020-12-23 Electrostatic chuck device power supply, electrostatic chuck device, and dechuck control method Pending US20230133839A1 (en)

Applications Claiming Priority (3)

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JP2020-035316 2020-03-02
JP2020035316A JP6935528B2 (ja) 2020-03-02 2020-03-02 静電チャック装置用電源、静電チャック装置、及びデチャック制御方法
PCT/JP2020/048193 WO2021176815A1 (ja) 2020-03-02 2020-12-23 静電チャック装置用電源、静電チャック装置、及びデチャック制御方法

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EP (1) EP4117168A4 (ja)
JP (3) JP6935528B2 (ja)
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JPS6244332A (ja) 1985-08-23 1987-02-26 Canon Inc 静電吸着装置
JPH0671944A (ja) 1992-08-26 1994-03-15 Nec Corp プリンタの印字方式
US6236555B1 (en) * 1999-04-19 2001-05-22 Applied Materials, Inc. Method for rapidly dechucking a semiconductor wafer from an electrostatic chuck utilizing a hysteretic discharge cycle
JP2002118164A (ja) * 2000-10-05 2002-04-19 Seiko Epson Corp 静電チャック、半導体処理装置及び静電チャックの脱離方法
US6760213B2 (en) * 2002-03-04 2004-07-06 Hitachi High-Technologies Corporation Electrostatic chuck and method of treating substrate using electrostatic chuck
JP4786693B2 (ja) * 2008-09-30 2011-10-05 三菱重工業株式会社 ウェハ接合装置およびウェハ接合方法
WO2016159239A1 (ja) * 2015-04-02 2016-10-06 株式会社アルバック 吸着装置及び真空処理装置
JP2018166146A (ja) 2017-03-28 2018-10-25 ルネサスエレクトロニクス株式会社 半導体装置の製造方法

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TW202134852A (zh) 2021-09-16
KR20220148161A (ko) 2022-11-04
JP2022002313A (ja) 2022-01-06
JP7453945B2 (ja) 2024-03-21
EP4117168A1 (en) 2023-01-11
WO2021176815A1 (ja) 2021-09-10
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EP4117168A4 (en) 2024-04-03
CN115210858A (zh) 2022-10-18

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