US20210024779A1 - Polishing composition - Google Patents

Polishing composition Download PDF

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Publication number
US20210024779A1
US20210024779A1 US16/977,837 US201916977837A US2021024779A1 US 20210024779 A1 US20210024779 A1 US 20210024779A1 US 201916977837 A US201916977837 A US 201916977837A US 2021024779 A1 US2021024779 A1 US 2021024779A1
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US
United States
Prior art keywords
alumina
polishing
abrasive grains
polishing composition
particle size
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Pending
Application number
US16/977,837
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English (en)
Inventor
Kazuki Moriyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitta DuPont Inc
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Nitta DuPont Inc
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Publication date
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Assigned to NITTA DUPONT INCORPORATED reassignment NITTA DUPONT INCORPORATED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: MORIYAMA, KAZUKI
Publication of US20210024779A1 publication Critical patent/US20210024779A1/en
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    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1409—Abrasive particles per se
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463—Aqueous liquid suspensions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/31058—After-treatment of organic layers
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0011—Working of insulating substrates or insulating layers
    • H05K3/0055—After-treatment, e.g. cleaning or desmearing of holes
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
    • C01F7/00—Compounds of aluminium
    • C01F7/02—Aluminium oxide; Aluminium hydroxide; Aluminates
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/02—Details related to mechanical or acoustic processing, e.g. drilling, punching, cutting, using ultrasound
    • H05K2203/025—Abrading, e.g. grinding or sand blasting
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/26—Cleaning or polishing of the conductive pattern

Definitions

  • the present invention relates to a polishing composition.
  • a polishing composition for polishing copper or the copper alloy is, for example, a polishing composition including abrasive grains such as colloidal silica, a copper complexing agent, alkylbenzenesulfonic acid triethanolamine, and water (Patent Literature 1).
  • Patent Literature 1 JP 2015-090922 A
  • the present invention has been conceived in view of such circumstances, and it is therefore an object of the present invention to provide a polishing composition capable of suppressing precipitation of abrasive grains and increasing a polishing speed for a resin.
  • the present inventors have found that, when a polishing composition including alumina abrasive grains, a dispersant, and water is used to polish a resin, a ratio between a primary average particle size of alumina particles in the alumina abrasive grains and an average particle size of the alumina abrasive grains measured by dynamic light scattering falls within a specific range so that the abrasive grains can be suppressed from precipitating and the polishing speed for the resin can be increased.
  • the summary of the present invention is provided below.
  • the polishing composition according to the present invention is for polishing a resin, and includes: alumina abrasive grains; a dispersant; and water, wherein a ratio between a primary average particle size of alumina particles in the alumina abrasive grains and an average particle size of the alumina particles measured by dynamic light scattering is 1:6.0 to 1:100.
  • the dispersant is preferably a surfactant.
  • the surfactant is preferably an alkylbenzenesulfonate.
  • FIG. 1 is a graph showing the polishing speed for polyimide when polished using a polishing composition of each of Examples and Comparative Examples.
  • the polishing composition according to the embodiment of the present invention includes alumina abrasive grains, a dispersant, and water.
  • the polishing composition according to this embodiment includes alumina abrasive grains.
  • the alumina abrasive grains are not particularly limited, and may be appropriately selected from various known kinds of alumina particles for use. Examples of such known kinds of alumina particles include ⁇ -alumina, ⁇ -alumina, ⁇ -alumina, ⁇ -alumina, ⁇ -alumina, ⁇ -alumina, and ⁇ -alumina.
  • alumina particles further include alumina called fumed alumina (typically alumina fine particles produced when alumina salt is calcined at a high temperature), and alumina called colloidal alumina or alumina sol (for example an alumina hydrate such as boehmite), based on classification according to production methods.
  • fumed alumina typically alumina fine particles produced when alumina salt is calcined at a high temperature
  • colloidal alumina or alumina sol for example an alumina hydrate such as boehmite
  • the content of the alumina abrasive grains in the polishing composition is preferably 0.3 mass % or more, and preferably 5.0 mass % or less. When the content of the alumina abrasive grains falls within the above range, it is possible to suppress a decrease in storage stability while maintaining a high polishing capability.
  • the content of the alumina abrasive grains is more preferably 1.0 mass % or more, and more preferably 3.0 mass % or less. In the case where two or more kinds of the alumina abrasive grains are included, the content of the alumina abrasive grains shall be the total content of the two or more kinds of the alumina abrasive grains.
  • a ratio between a primary average particle size of alumina particles in the alumina abrasive grains and an average particle size of the alumina particles measured by dynamic light scattering is 1:6.0 to 1:100, preferably 1:10 to 1:50.
  • a dispersant to be described later is adsorbed on surfaces of the alumina particles in the alumina abrasive grains, whereby the alumina particles form clusters.
  • the ratio between the primary average particle size of the alumina particles in the alumina abrasive grains and the average particle size of the alumina particles measured by dynamic light scattering falls within the aforementioned range so that dispersibility of the alumina abrasive grains can be improved and precipitation of the alumina abrasive grains can be suppressed.
  • the polishing composition can be uniformly supplied on the polishing pad.
  • the average particle size of the alumina particles in the polishing composition can be made larger than the primary average particle size of these alumina particles so that the polishing speed for the resin can be increased.
  • the polishing composition according to this embodiment includes a dispersant.
  • the dispersant examples include a surfactant, a polymer compound, and a phosphate.
  • the dispersant is preferably a surfactant.
  • the dispersant is a surfactant
  • the surfactant is adsorbed on the surfaces of the alumina particles to more improve dispersibility of the alumina abrasive grains.
  • the precipitation of the alumina abrasive grains can be more suppressed.
  • the absorption of the surfactant on the surfaces of the alumina abrasive grains allows the average particle size of the alumina particles in the polishing composition to be larger than the primary average particle size of these alumina particles, to thereby more increase the polishing speed for the resin.
  • These dispersants may be individually used, or two or more kinds of them may be used in combination.
  • the surfactant examples include anionic surfactants such as a polyacrylic acid, an alkylbenzenesulfonic acid, an alkanesulfonic acid, an ⁇ -olefinsulfonic acid, an alkyl ether carboxylic acid, an alkyl sulfonic acid, and salts thereof, as well as an alkyl sulfate ester salt.
  • the surfactant is preferably an alkylbenzenesulfonate.
  • the alkylbenzenesulfonate is adsorbed on the surfaces of the alumina particles to more improve dispersibility of the alumina abrasive grains.
  • the precipitation of the alumina abrasive grains can be more suppressed.
  • the absorption of the alkylbenzenesulfonate on the surfaces of the alumina abrasive grains allows the average particle size of the alumina particles in the polishing composition to be larger than the primary average particle size of these alumina particles, to thereby more increase the polishing speed for the resin.
  • These surfactants may be individually used, or two or more kinds of them may be used in combination.
  • alkylbenzenesulfonic acid examples include alkylbenzenesulfonic acids from C6 to C20, specifically a decylbenzenesulfonic acid, a undecylbenzenesulfonic acid, a dodecylbenzenesulfonic acid, a tridecylbenzenesulfonic acid, and a tetradecylbenzenesulfonic acid.
  • the alkylbenzenesulfonic acid is preferably a dodecylbenzenesulfonic acid in terms of suppressing the precipitation of the alumina abrasive grains and increasing the polishing speed for the resin.
  • examples of the alkylbenzenesulfonate include sodium alkylbenzenesulfonate and alkylbenzenesulfonic acid triethanolamine.
  • the content of the dispersant in the polishing composition is preferably 0.3 mass % or more, more preferably 0.5 mass % or more, and is preferably 3.0 mass % or less, more preferably 1.5 mass % or less, in terms of improving dispersibility of the alumina abrasive grains. In the case where two or more dispersants are included, the content of the dispersant shall be the total content of the dispersants.
  • the alumina abrasive grains, glycine and the surfactant are dissolved or suspended in water. It is preferable that the water including few impurities, such as ion exchange water, be used so as not to inhibit various actions of the alumina abrasive grains, the glycine, and the surfactant.
  • the polishing composition according to this embodiment may have a pH of 7.0 or more and 11.0 or less. This configuration can improve the mechanical polishing power for a resin and increase the polishing speed for the resin.
  • the polishing composition according to this embodiment may include a pH adjuster as required.
  • the pH adjuster include: an acid such as an organic acid or an inorganic acid (e.g., the organic acid such as glycine, malonic acid, malic acid, tartaric acid, or aspartic acid, or the inorganic acid such as nitric acid or hydrochloric acid); an inorganic base such as ammonia or KOH; and an organic base such as tetramethylammonium hydroxide (TMAH).
  • the polishing composition according to this embodiment may include a defoamer as required. This configuration allows foaming of the polishing composition to be suppressed and allows a resin to be more uniformly polished.
  • the defoamer include a silicone emulsion and a nonionic surfactant.
  • the content of the defoamer in the polishing composition is preferably 0.05 mass % or more, and preferably 0.3 mass % or less.
  • polishing composition according to the present invention is not limited to the abovementioned embodiment. Further, the polishing composition according to the present invention is not limited to the abovementioned operational effects, either. Various modifications can be made to the polishing composition according to the present invention without departing from the gist of the present invention.
  • the polishing composition according to the present embodiment is for polishing a resin.
  • the resin include an epoxy resin, a phenol resin, and a polyimide resin.
  • Examples of the polishing object to be polished with the polishing composition according to this embodiment include a printed circuit board, a module board, and a package board, which include the resin.
  • Glycine manufactured by FUSO CHEMICAL CO., LTD.
  • Silicone-based defoamer silicone emulsion (manufactured by SENKA corporation)
  • the pH of the polishing composition of each of Examples and Comparative Examples was measured using a pH meter.
  • the primary particle size of the alumina particles was calculated by the formula (i) below, assuming that the particles were spherical.
  • the density of alumina was set to 4 g/cm 3 .
  • the specific surface area in the above formula (i) was measured by the nitrogen gas adsorption method (BET method) using a specific surface area and pore size analyzer QUADRASORB evo (manufactured by Quantachrome Co.). Used as the alumina abrasive grains was alumina slurry that was subjected to vacuum drying at 85° C. for 24 hours. Detailed conditions are given below.
  • Pretreatment The alumina abrasive grains were placed in a measurement cell and subjected to vacuum degassing at 85° C. for 2 hours.
  • Adsorbed gas nitrogen gas
  • the specific surface area was measured twice for the same alumina abrasive grain by the method above, and the average value of the primary particle size obtained by the above formula (i) from the respective specific surface area values was defined as the primary average particle size.
  • the average particle size of the alumina particles was measured by dynamic light scattering using the zeta potential/grain size measurement system ELSZ-2 (manufactured by Otsuka Electronics Co., Ltd.). The obtained particle size in which the cumulative volume frequency of the volume particle size distribution was 50% was defined as the average particle size of the alumina particle size.
  • the measurement was performed by filling the measurement cell with the alumina slurry diluted by a factor of 100 with ultrapure water. As the laser, a semiconductor laser was used.
  • the average particle size of the alumina particles and the ratio between the primary average particle size and the average particle size of the alumina particles are shown in Table 1. Since the alumina abrasive grains precipitated in the polishing compositions of Comparative Examples 2 and 3, the average particle size of the alumina particles could not be measured.
  • Polishing object polyimide (deposited on silicon wafers)
  • Polishing pad IC1000 (Nitta Haas Incorporated)
  • the polishing compositions of Examples 1 to 3 which meet all the requirements of the present invention were capable of suppressing the precipitation of the alumina abrasive grains and increasing the polishing speed for the resin.
  • the polishing composition of Comparative Example 1 neither includes any dispersant nor has a ratio between the primary average particle size and the average particle size of alumina particles satisfying the range specified in the present invention, and was therefore not capable of increasing the polishing speed for the resin.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
US16/977,837 2018-03-15 2019-02-28 Polishing composition Pending US20210024779A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2018048058 2018-03-15
JP2018-048058 2018-03-15
PCT/JP2019/007787 WO2019176558A1 (ja) 2018-03-15 2019-02-28 研磨組成物

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US (1) US20210024779A1 (zh)
JP (1) JP7324187B2 (zh)
KR (1) KR20200128679A (zh)
CN (1) CN111836869B (zh)
DE (1) DE112019001365T5 (zh)
SG (1) SG11202008551VA (zh)
TW (1) TWI804587B (zh)
WO (1) WO2019176558A1 (zh)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW202225368A (zh) * 2020-12-17 2022-07-01 日商福吉米股份有限公司 研磨用組合物及使用此的研磨方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5076955A (en) * 1989-03-18 1991-12-31 Joh. A. Benckiser Gmbh Acidic cleaning agent with a scouring action
US6440187B1 (en) * 1998-01-08 2002-08-27 Nissan Chemical Industries, Ltd. Alumina powder, process for producing the same and polishing composition
US6475407B2 (en) * 1998-05-19 2002-11-05 Showa Denko K.K. Composition for polishing metal on semiconductor wafer and method of using same

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000028819A (ja) * 1998-07-07 2000-01-28 Toppan Printing Co Ltd 液晶表示装置用カラーフィルタ表面の研磨方法
EP1256548A4 (en) * 1999-12-27 2004-05-19 Showa Denko Kk ALUMINA PARTICLES, METHOD FOR THE PRODUCTION THEREOF. COMPOSITION COMPRISING SAID PARTICLES, AND POLISHING ALUMINA SLUDGE
JP2004022748A (ja) * 2002-06-14 2004-01-22 Seimi Chem Co Ltd 半導体集積回路の有機絶縁膜の研磨方法
KR100497410B1 (ko) * 2002-12-16 2005-06-28 제일모직주식회사 연마성능이 개선된 산화막 연마용 슬러리 조성물
JP2009129977A (ja) * 2007-11-20 2009-06-11 Jsr Corp 多層回路基板の研磨方法および多層回路基板
TWI417245B (zh) * 2008-06-13 2013-12-01 Fujimi Inc 氧化鋁粒子及含有該氧化鋁粒子之研磨用組成物
JP6057706B2 (ja) * 2012-12-28 2017-01-11 株式会社フジミインコーポレーテッド 研磨用組成物
JP6400897B2 (ja) 2013-11-06 2018-10-03 ニッタ・ハース株式会社 研磨組成物
EP3315577A4 (en) 2015-06-26 2018-05-09 Fujimi Incorporated Polishing composition

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5076955A (en) * 1989-03-18 1991-12-31 Joh. A. Benckiser Gmbh Acidic cleaning agent with a scouring action
US6440187B1 (en) * 1998-01-08 2002-08-27 Nissan Chemical Industries, Ltd. Alumina powder, process for producing the same and polishing composition
US6475407B2 (en) * 1998-05-19 2002-11-05 Showa Denko K.K. Composition for polishing metal on semiconductor wafer and method of using same

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Publication number Publication date
CN111836869A (zh) 2020-10-27
TWI804587B (zh) 2023-06-11
JP7324187B2 (ja) 2023-08-09
JPWO2019176558A1 (ja) 2021-04-08
KR20200128679A (ko) 2020-11-16
WO2019176558A1 (ja) 2019-09-19
TW201938750A (zh) 2019-10-01
DE112019001365T5 (de) 2020-12-03
CN111836869B (zh) 2022-07-26
SG11202008551VA (en) 2020-10-29

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