US20140150689A1 - Electroless nickel plating bath composition - Google Patents

Electroless nickel plating bath composition Download PDF

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Publication number
US20140150689A1
US20140150689A1 US14/131,949 US201214131949A US2014150689A1 US 20140150689 A1 US20140150689 A1 US 20140150689A1 US 201214131949 A US201214131949 A US 201214131949A US 2014150689 A1 US2014150689 A1 US 2014150689A1
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US
United States
Prior art keywords
plating bath
bath composition
nickel
ranges
concentration
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Abandoned
Application number
US14/131,949
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English (en)
Inventor
Boris Alexander JANSSEN
Holger BERA
Sebastian WEISSBROD
Britta Schafsteller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Atotech Deutschland GmbH and Co KG
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Atotech Deutschland GmbH and Co KG
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Application filed by Atotech Deutschland GmbH and Co KG filed Critical Atotech Deutschland GmbH and Co KG
Assigned to ATOTECH DEUTSCHLAND GMBH reassignment ATOTECH DEUTSCHLAND GMBH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: Janssen, Boris Alexander, Weißbrod, Sebastian, Schafsteller, Britta, BERA, Holger
Publication of US20140150689A1 publication Critical patent/US20140150689A1/en
Assigned to BARCLAYS BANK PLC, AS COLLATERAL AGENT reassignment BARCLAYS BANK PLC, AS COLLATERAL AGENT SECURITY INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ATOTECH DEUTSCHLAND GMBH, ATOTECH USA INC
Assigned to ATOTECH USA, LLC, ATOTECH DEUTSCHLAND GMBH reassignment ATOTECH USA, LLC RELEASE BY SECURED PARTY (SEE DOCUMENT FOR DETAILS). Assignors: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Abandoned legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31Coating with metals
    • C23C18/32Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
    • C23C18/34Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents
    • C23C18/36Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents using hypophosphites

Definitions

  • the present invention relates to an aqueous plating bath composition for the electroless deposition of nickel phosphorous alloys.
  • Electroless plating of nickel-phosphorous alloys is used in various industries.
  • the deposits derived are used e.g. as wear resistant coatings and barrier layers.
  • Such plating bath compositions generally comprise a source of nickel ions, a hypophosphite compound as the reducing agent, at least one complexing agent and at least one stabilizing agent.
  • the at least one stabilizing agent present is required in order to provide a sufficient bath lifetime, a reasonable deposition rate and to control the phosphorous content in the as deposited nickel phosphorous alloy.
  • plating baths for deposition of nickel-phosphorous alloys known in the art comprise more than one stabilizing agent.
  • Common stabilizing agents are selected from heavy metal ions such as cadmium, thallium, bismuth, lead and antimony ions, inorganic ions such as SCN ⁇ and various organic compounds such as thiourea.
  • the patent application U.S. 2005/0013928 A1 discloses an electroless plating pre-treatment solution which comprises 3-mercaptopropanesulfonic acid.
  • the pre-treatment solution reduces the incubation time (time from the start of the supply of an electroless plating solution to the start of the plating reaction) of nickel plating from an electroless plating bath on a copper surface.
  • patent application U.S. 2006/024043 A1 discloses an alkaline aqueous plating bath for deposition of nickel phosphorous alloys which optionally comprises further additives such as thiourea and/or 3-mercapto-1-propane sulfonic acid.
  • Such plating bath compositions are not acceptable for industrial applications (see Examples 2 to 5). Furthermore, thiourea is a carcinogenic substance.
  • an aqueous plating bath composition for electroless plating of a nickel phosphorous alloy comprising
  • a nickel phosphorous alloy having a phosphorous content in the range of 5 to 12 wt. % of phosphorous is derived by electroless plating.
  • the aqueous plating bath composition according to the present invention comprises a water soluble source of nickel ions such as nickel sulfate, a reducing agent such as sodium hypophosphite, at least one complexing agent and a stabilizing agent selected from compounds according to formulae (1) and (2).
  • the concentration of nickel ions ranges from 1 to 18 g/l, more preferably from 3 to 9 g/l.
  • the reducing agent is selected from hypophosphite compounds such as hypophosphorous acid or a bath soluble salt thereof such as sodium hypophosphite, potassium hypophosphite and ammonium hypophosphite.
  • the amount of the reducing agent employed in the plating bath ranges from 2 to 60 g/l, more preferably from 12 to 50 g/l and most preferably from 20 to 45 g/l. As a conventional practice the reducing agent is replenished during the reaction.
  • the complexing agents are employed in amounts of 1 to 200 g/l, more preferably from 15 to 75 g/l.
  • carboxylic acids, polyamines and sulfonic acids or mixtures thereof are selected as complexing agents.
  • Useful carboxylic acids include mono-, di-, tri- and tetra-carboxylic acids.
  • the carboxylic acids may be substituted with various substituent moieties such as hydroxy or amino groups and the acids may be introduced into the plating solutions as their sodium, potassium or ammonium salts.
  • Some complexing agents such as acetic acid, for example, may also act as a buffering agent, and the appropriate concentration of such additive components can be optimised for any plating solution in consideration of their dual functionality.
  • carboxylic acids which are useful as the complexing agents include: monocarboxylic acids such as acetic acid, hydroxyacetic acid, aminoacetic acid, 2-amino propanoic acid, 2-hydroxy propanoic acid, lactic acid; dicarboxylic acids such as succinic acid, amino succinic acid, hydroxy succinic acid, propanedioic acid, hydroxybutanedioic acid, tartaric acid, malic acid; tricarboxylic acids such as 2-hydroxy-1,2,3 propane tricarboxylic acid; and tetracarboxylic acids such as ethylene diamine tetra acetic acid (EDTA).
  • monocarboxylic acids such as acetic acid, hydroxyacetic acid, aminoacetic acid, 2-amino propanoic acid, 2-hydroxy propanoic acid, lactic acid
  • dicarboxylic acids such as succinic acid, amino succinic acid, hydroxy succinic acid, propanedioic acid, hydroxybutanedi
  • the most preferred complexing agents are selected from the group consisting of mono-carboxylic acids and di-carboxylic acids.
  • mixtures of two or more of the above complexing agents are utilized.
  • the stabilizing agent is selected from compounds according to formulae (1) and (2):
  • R 1 is selected from the group consisting of hydrogen, sodium and potassium.
  • n ranges from 2 to 4.
  • R 2 is selected from the group consisting of hydrogen, sodium and potassium.
  • R 3 is selected from the group consisting of hydrogen, sodium and potassium.
  • m ranges from 2 to 4.
  • the concentration of the stabilizing agent according to formulae (1) and (2) in the plating bath composition preferably ranges from 1 to 100 ppm, more preferably from 2 to 50 ppm and most preferably from 3 to 30 ppm.
  • the pH may be periodically or continuously adjusted by adding bath-soluble and bath-compatible alkaline substances such as sodium, potassium or ammonium hydroxides, carbonates and bicarbonates.
  • bath-soluble and bath-compatible alkaline substances such as sodium, potassium or ammonium hydroxides, carbonates and bicarbonates.
  • the stability of the operating pH of the plating solutions can be improved by the addition of various buffer compounds such as acetic acid, propionic acid, boric acid, or the like, in amounts of up to 30 g/L, more preferably from 2 to 10 g/l.
  • the pH value of the aqueous plating bath according to the present invention preferably ranges from 3.5 to 6.5, more preferably from 4 to 6.
  • nickel plating solutions such as buffers and wetting agents. These materials are known in the art.
  • the nickel plating solutions optionally may employ one or more wetting agents of any of the various types heretofore known which are soluble and compatible with the other bath constituents.
  • wetting agents prevents or hinders pitting of the nickel phosphorous alloy deposit, and the wetting agents can be employed in amounts up to about 1 g/l.
  • the substrate to be plated is contacted with the plating bath at a temperature of at least 40° C. up to 95° C.
  • the electroless nickel plating baths according to the present invention are employed, in one embodiment, at a temperature of from 70° C. to 95° C., and more often, at a temperature of from 80° C. to 90° C.
  • the duration of contact of the electroless nickel plating bath with the substrate being plated is a function which is dependent on the desired thickness of the nickel phosphorus alloy.
  • a contact time can range from 1 to 30 min.
  • the substrate to be coated with a nickel phosphorous alloy can be contacted with the plating bath according to the present invention by dipping the substrate into the plating bath or by spraying the plating bath onto the substrate.
  • mild agitation may be employed. Agitation may be a mild air agitation, mechanical agitation, bath circulation by pumping, rotation of a barrel plating, etc.
  • the plating solution may also be subjected to a periodic or continuous filtration treatment to reduce the level of contaminants therein. Replenishment of the constituents of the bath may also be performed, in some embodiments, on a periodic or continuous basis to maintain the concentration of constituents, and in particular, the concentration of nickel ions and hypophosphite ions, as well as the pH level within the desired limits.
  • the phosphorous concentration in the deposited nickel phosphorous alloys increases from 7.0 wt. % at 1 MTO to 8.3 wt. % at 3 MTO.
  • the plating rate of this plating bath is 0 ⁇ m/h.
  • the plating rate of this plating bath is 0 ⁇ m/h.
  • the plating rate of this plating bath is 0 ⁇ m/h.
  • the plating rate of this plating bath is 0 ⁇ m/h.
  • the stabilizing agent according to the present invention shows the desired properties in respect to the stable phosphorous concentration in the deposited nickel phosphorous alloy layers when using the plating bath. Furthermore, the plating rate is sufficient for industrial application.

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  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemically Coating (AREA)
US14/131,949 2011-07-26 2012-07-04 Electroless nickel plating bath composition Abandoned US20140150689A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP11175295A EP2551375A1 (en) 2011-07-26 2011-07-26 Electroless nickel plating bath composition
EP11175295.2 2011-07-26
PCT/EP2012/062967 WO2013013941A1 (en) 2011-07-26 2012-07-04 Electroless nickel plating bath composition

Publications (1)

Publication Number Publication Date
US20140150689A1 true US20140150689A1 (en) 2014-06-05

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US14/131,949 Abandoned US20140150689A1 (en) 2011-07-26 2012-07-04 Electroless nickel plating bath composition

Country Status (7)

Country Link
US (1) US20140150689A1 (ja)
EP (2) EP2551375A1 (ja)
JP (1) JP6053785B2 (ja)
KR (1) KR101936977B1 (ja)
CN (1) CN103946420B (ja)
TW (1) TWI555878B (ja)
WO (1) WO2013013941A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104152877A (zh) * 2014-07-17 2014-11-19 广东致卓精密金属科技有限公司 一种化学镀镍液

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2551375A1 (en) 2011-07-26 2013-01-30 Atotech Deutschland GmbH Electroless nickel plating bath composition
US11685999B2 (en) 2014-06-02 2023-06-27 Macdermid Acumen, Inc. Aqueous electroless nickel plating bath and method of using the same
ES2639300T3 (es) 2014-12-16 2017-10-26 Atotech Deutschland Gmbh Composiciones de baño de chapado para el chapado no electrolítico de metales y aleaciones metálicas
SG11201706122SA (en) 2015-03-20 2017-10-30 Atotech Deutschland Gmbh Activation method for silicon substrates
EP3190208B1 (en) * 2016-01-06 2018-09-12 ATOTECH Deutschland GmbH Electroless nickel plating baths comprising aminonitriles and a method for deposition of nickel and nickel alloys

Citations (5)

* Cited by examiner, † Cited by third party
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US2830014A (en) * 1954-03-22 1958-04-08 Dehydag Gmbh Electroplating process
US4150180A (en) * 1975-12-08 1979-04-17 Potapov Fedor P Method for chemical nickel-plating of parts having a catalytic surface employing a vessel having an upper heated zone and a lower cooled zone
US4483711A (en) * 1983-06-17 1984-11-20 Omi International Corporation Aqueous electroless nickel plating bath and process
US6755957B2 (en) * 2000-02-01 2004-06-29 Shinko Electric Industries Co., Ltd. Method of plating for filling via holes
US20050013928A1 (en) * 2003-07-15 2005-01-20 Tokyo Electron Limited Electroless plating pre-treatment solution and electroles plating method

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JPS502861B1 (ja) * 1970-05-09 1975-01-29
CH620710A5 (en) * 1975-10-06 1980-12-15 Fedor Petrovich Potapov Process for chemical nickel-plating of workpieces having a catalytic surface, and installation for carrying out the process
AU555641B2 (en) * 1984-03-05 1986-10-02 Omi International Corp. Aqueous electroless nickel plating bath
TW390915B (en) * 1995-10-23 2000-05-21 Uyemura C & Co Ltd Electroless nickel plating solution and method
DE10327374B4 (de) 2003-06-18 2006-07-06 Raschig Gmbh Verwendung von propansulfonierten und 2-Hydroxy-propansulfonierten Alkylaminaloxylaten als Hilfsmittel zur elektrolytischen Abscheidung von metallischen Schichten und galvanische Bäder enthaltend diese
JP4731851B2 (ja) 2004-07-28 2011-07-27 キヤノン株式会社 画像転送システム
CA2575410A1 (en) * 2004-07-30 2006-02-09 Ultra-Scan Corporation Medical records system and method
WO2006102318A2 (en) * 2005-03-18 2006-09-28 Applied Materials, Inc. Electroless deposition process on a contact containing silicon or silicide
KR100961011B1 (ko) * 2005-10-07 2010-06-01 닛코킨조쿠 가부시키가이샤 무전해 니켈 도금액
TWI348499B (en) * 2006-07-07 2011-09-11 Rohm & Haas Elect Mat Electroless copper and redox couples
EP2145986B1 (en) * 2008-07-15 2010-03-24 Atotech Deutschland Gmbh Solution and method for electrochemically depositing a metal on a substrate
ATE503037T1 (de) * 2008-10-17 2011-04-15 Atotech Deutschland Gmbh Spannungsreduzierte ni-p/pd-stapel für waferoberfläche
EP2199315B1 (en) 2008-12-19 2013-12-11 Basf Se Composition for metal electroplating comprising leveling agent
EP2551375A1 (en) 2011-07-26 2013-01-30 Atotech Deutschland GmbH Electroless nickel plating bath composition

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2830014A (en) * 1954-03-22 1958-04-08 Dehydag Gmbh Electroplating process
US4150180A (en) * 1975-12-08 1979-04-17 Potapov Fedor P Method for chemical nickel-plating of parts having a catalytic surface employing a vessel having an upper heated zone and a lower cooled zone
US4483711A (en) * 1983-06-17 1984-11-20 Omi International Corporation Aqueous electroless nickel plating bath and process
US6755957B2 (en) * 2000-02-01 2004-06-29 Shinko Electric Industries Co., Ltd. Method of plating for filling via holes
US20050013928A1 (en) * 2003-07-15 2005-01-20 Tokyo Electron Limited Electroless plating pre-treatment solution and electroles plating method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104152877A (zh) * 2014-07-17 2014-11-19 广东致卓精密金属科技有限公司 一种化学镀镍液

Also Published As

Publication number Publication date
TWI555878B (zh) 2016-11-01
EP2737107B1 (en) 2015-09-09
EP2551375A1 (en) 2013-01-30
KR101936977B1 (ko) 2019-01-09
CN103946420B (zh) 2015-11-25
WO2013013941A1 (en) 2013-01-31
EP2737107A1 (en) 2014-06-04
CN103946420A (zh) 2014-07-23
JP6053785B2 (ja) 2016-12-27
KR20140041762A (ko) 2014-04-04
TW201309844A (zh) 2013-03-01
JP2014521834A (ja) 2014-08-28

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Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:JANSSEN, BORIS ALEXANDER;BERA, HOLGER;WEISSBROD, SEBASTIAN;AND OTHERS;SIGNING DATES FROM 20131120 TO 20140107;REEL/FRAME:031936/0807

STCB Information on status: application discontinuation

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