US20140060908A1 - Printed circuit board and the method for manufacturing the same - Google Patents

Printed circuit board and the method for manufacturing the same Download PDF

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Publication number
US20140060908A1
US20140060908A1 US14/115,138 US201214115138A US2014060908A1 US 20140060908 A1 US20140060908 A1 US 20140060908A1 US 201214115138 A US201214115138 A US 201214115138A US 2014060908 A1 US2014060908 A1 US 2014060908A1
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United States
Prior art keywords
layer
layers
circuit board
printed circuit
insulating
Prior art date
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Abandoned
Application number
US14/115,138
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English (en)
Inventor
Chung Sik Park
Duk Nam Kim
Jae Hyun Ahn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LG Innotek Co Ltd
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LG Innotek Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LG Innotek Co Ltd filed Critical LG Innotek Co Ltd
Assigned to LG INNOTEK CO., LTD. reassignment LG INNOTEK CO., LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: AHN, JAE HYUN, KIM, DUK NAM, PARK, CHUNG SIK
Publication of US20140060908A1 publication Critical patent/US20140060908A1/en
Abandoned legal-status Critical Current

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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/388Improvement of the adhesion between the insulating substrate and the metal by the use of a metallic or inorganic thin film adhesion layer
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814Conductive parts
    • H01L21/4846Leads on or in insulating or insulated substrates, e.g. metallisation
    • H01L21/4857Multilayer substrates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H01L23/3121Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49822Multilayer substrates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49827Via connections through the substrates, e.g. pins going through the substrate, coaxial cables
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0201Thermal arrangements, e.g. for cooling, heating or preventing overheating
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/40Forming printed elements for providing electric connections to or between printed circuits
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/40Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/4038Through-connections; Vertical interconnect access [VIA] connections
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0201Thermal arrangements, e.g. for cooling, heating or preventing overheating
    • H05K1/0203Cooling of mounted components
    • H05K1/0204Cooling of mounted components using means for thermal conduction connection in the thickness direction of the substrate
    • H05K1/0206Cooling of mounted components using means for thermal conduction connection in the thickness direction of the substrate by printed thermal vias
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09209Shape and layout details of conductors
    • H05K2201/095Conductive through-holes or vias
    • H05K2201/096Vertically aligned vias, holes or stacked vias
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09818Shape or layout details not covered by a single group of H05K2201/09009 - H05K2201/09809
    • H05K2201/09854Hole or via having special cross-section, e.g. elliptical
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/03Metal processing
    • H05K2203/0369Etching selective parts of a metal substrate through part of its thickness, e.g. using etch resist

Definitions

  • the present invention relates to a printed circuit board and a method for manufacturing the same.
  • Circuit boards refer to electrical insulating substrates printed with circuit patterns, and are used to mount electronic components thereon.
  • FIG. 1 is a sectional view showing a printed circuit board 10 according to the related art.
  • the printed circuit board 10 includes multi-layer circuit patterns 4 and 5 formed between a plurality of multi-layer insulating layers 1 , and is formed therein with vias 2 and 3 used to connect the circuit patterns 4 and 5 to each other.
  • the vias 2 and 3 are filled with conductive paste after a mechanical hole process has been performed, or formed through a plating process after a hole process has been performed through a laser drill scheme.
  • the scheme of forming the via 2 by using the conductive paste is employed when the plating scheme may not be employed due to the great size of the via 2 .
  • the via 2 formed by the conductive paste represents great electrical resistance, so that the transmission signal may have noise. Accordingly, the reliability may be degraded.
  • the embodiment provides a printed circuit board having a novel structure and a method for manufacturing the same.
  • the embodiment provides a printed circuit board and a method for manufacturing the same, in which vias are formed through a simple process.
  • a printed circuit board including a first insulating layer, a second insulating layer on the first insulating layer, and at least one via formed through the first and second insulating layers and having a layer structure.
  • the via includes a first via layer formed through the first insulating layer, a second via layer formed on the first via layer while passing through the second insulating layer, and an adhesive layer between the first and second via layers.
  • the first via layer has a section different from a section of the second via layer.
  • a method for manufacturing a printed circuit board includes forming a via groove in a via region of each of a plurality of bulk metallic layers to form a via layer, filling a first insulating layer in the via groove of one bulk metallic layer, forming an adhesive layer on a plurality of via grooves of the one bulk metallic layer, arranging the via layer of another bulk metallic layer on the adhesive layer and bonding the bulk metallic layers to each other while filling a second insulating layer into the via groove, and etching the bulk metallic layers to expose the first and second insulating layers.
  • the adhesive property between the copper layer and the insulating layer is improved, and bulk copper is used, so that the heat radiation property can be improved.
  • the vias used to connect interlayer circuits to each other are formed between a plurality of insulating layers through an etching process instead of a laser process or a polishing process, so that the process ability can be improved, and the manufacturing cost can be reduced.
  • FIG. 1 is a sectional view showing a printed circuit board according to the related art
  • FIG. 2 is a sectional view showing a device chip package employing a printed circuit board according to the embodiment of the present invention
  • FIGS. 3 to 16 are sectional views showing a method for manufacturing the printed circuit board of FIGS. 2 ;
  • FIG. 17 is a sectional view showing a device chip package employing the printed circuit board of FIG. 2 .
  • a predetermined part when a predetermined part “includes” a predetermined component, the predetermined part does not exclude other components, but may further include other components if there is a specific opposite description.
  • the present invention provides a printed circuit board which does not employ a laser drilling scheme when forming a via hole.
  • FIG. 2 is a sectional view showing a printed circuit board according to the embodiment of the present invention and a device chip package 100 employing the printed circuit board.
  • the device chip package 100 includes the printed circuit board and a device chip 200 mounted on the printed circuit board.
  • the printed circuit board includes a plurality of insulating layers 120 , 150 , 176 , and 186 , a plurality of vias formed through the insulating layers 120 , 150 , 176 , and 186 , and a coverlay 195 to cover the vias.
  • the insulating layers 120 , 150 , 176 , and 186 include the first insulating layer 120 , the second insulating layer 150 formed on the first insulating layer 120 , and third and fourth insulating layers 176 and 186 formed on the first insulating layer 176 and under the fourth insulating layer 186 , respectively.
  • the first to fourth insulating layers 120 , 150 , 176 , and 186 may include epoxy insulating resin representing low thermal conductivity (about 0.2 W/mK to about 0.4 W/mk).
  • the first to fourth insulating layers 120 , 150 , 176 , and 186 may include poly imide resin representing high thermal conductivity.
  • the first to fourth insulating layers 120 , 150 , 176 , and 186 may include the same material.
  • the first to fourth insulating layers 120 , 150 , 176 , and 186 may include materials different from each other.
  • first to fourth insulating layers 120 , 150 , 176 , and 186 are formed by filling adjacent vias with a predetermined material, and have sectional shapes varied according to the shapes of the vias.
  • the vias may be spaced apart from each other, and may include through vias formed by perforating from the top surface of the printed circuit board to the bottom surface of the printed circuit board.
  • Each via has a layer structure including a plurality of layers.
  • Each via includes a first via layer formed by perforating the first insulating layer 120 , a second via layer 140 formed through the second insulating layer 150 and aligned with the first via layer 110 , and third and fourth via layers 170 and 180 formed on the first via layer 110 and under the second via layer 140 , respectively, by perforating the third and fourth insulating layers 176 and 186 , respectively.
  • the present invention has been described in that the printed circuit board is limited to a multi-layer structure having four insulating layers 120 , 150 , 176 , and 186 , so that the vias are formed in a four layer-structure, the vias may be designed as many as the number of the insulating layers 120 , 150 , 176 , and 186 .
  • the vias has the layer structure having layers, the number of which is fewer than the number of the insulating layers 120 , 150 , 176 , and 186 , so that the shape of the filled via can be represented instead of the shape of the through via.
  • the first via layer 110 is formed at the central region of the printed circuit board, and has a sectional shape gradually enlarged toward the lower portion thereof.
  • the second via layer 140 extends from the top surface of the first via layer 110 , and has a sectional shape gradually enlarged toward the upper portion thereof.
  • the third via layer 170 may be formed on the second via layer 140 , and may have the same shape as that of the second via layer 140 .
  • the fourth via layer 180 may be formed under the first via layer 110 , and may have the same shape as that of the first via layer 110 .
  • the plural layer structure may have a symmetric structure about the central region.
  • the first to fourth via layers 110 , 140 , 170 , and 180 may include the same material.
  • the first to fourth via layers 110 , 140 , 170 , and 180 may include copper which is a conductive material representing superior heat radiation property.
  • a plurality of adhesive layers 131 , 161 , and 191 may be formed between the via layers.
  • the adhesive layers 131 , 161 , and 191 include the first adhesive layer 131 formed between the first and second via layers 110 and 140 , the second adhesive layers 161 formed between the second and third via layers 140 and 170 and between the first and fourth via layers 110 and 180 , respectively, and the third adhesive layers 191 formed on the surface of the third via layer 170 , which is exposed through the top surface of the printed circuit board, and formed on the surface of the fourth via layer 180 , which is exposed through the bottom surface of the printed circuit board.
  • the adhesive layers 131 , 161 , and 191 may include the same material, and used to bond a plurality of via layers formed through different processes to each other.
  • the adhesive layers 131 , 161 , and 191 may include the same material as that of the via layers.
  • the adhesive layers 131 , 161 , and 191 may include the alloy containing copper.
  • the printed circuit board is provided on the top and bottom surfaces thereof with coverlays 195 , and portions of vias are exposed from the coverlay 195 to form pads 198 and 199 .
  • the pads 198 and 199 may include the alloy containing metal such as silver, gold, nickel or palladium, and include the inner lead 198 formed on a surface having a chip to be formed thereon and the outer lead 199 formed on a rear surface provided in opposition to the surface having the chip to be formed thereon.
  • a solder paste 220 is coated on the exposed top surface of the via, and the device chip 200 is mounted on the solder paste 220 .
  • the device chip 200 may include a semiconductor chip, a light emitting diode chip, and other driving chips. In addition, the device chip 200 is electrically connected to the inner lead 198 through a wire 210 .
  • the device chip 200 is molded by a resin 230 so that the device chip 200 can be protected from the outside.
  • the first bulk metallic plate 111 is prepared.
  • the first bulk metallic plate 111 may include a copper plate having a thickness greater than that of each via layer.
  • a first insulating groove 115 is formed by etching a space between the vias except for the region for the formation of the via as shown in FIG. 4 .
  • the first insulating groove 115 may be formed by performing a wet etching scheme after a resist pattern is formed on the copper plate 111 , and may have a curved section.
  • a protrusion constituting the first via layer 110 is formed between the first insulating grooves 115 .
  • the first insulating layer 120 is pressed against the first metallic plate 111 , so that the first insulating layer 120 is filled in the first insulating groove 115 of the first metallic plate 111 .
  • the first metallic layer 130 is formed on the first via layer 110 and the first insulating layer 120 .
  • the first metallic layer 130 may be formed by depositing copper through an aerosol deposition scheme. In other words, mixture of the copper and gas is aerosolized and sprayed on the first via layer 110 and the first insulating layer 120 through a nozzle, thereby forming the first metallic layer 130 .
  • the first metallic layer 130 is etched except for the upper portion of the first via layer 110 , thereby forming the first adhesive layer 131 of FIG. 2 .
  • the first metallic layer 130 may be etched through a wet etching process after the resist pattern has been formed.
  • the first adhesive layer 131 has a surface extending to the upper portion of the first insulating layer 120 so that the first adhesive layer 131 has a surface wider than the top surface of the first via layer 110 .
  • the second metallic plate 141 is arranged in such a manner that the second insulating groove 145 faces the first insulating layer 115 . Then, the second insulating layer 150 is provided corresponding to the second insulating groove 145 , and heat and pressure are applied to the first and second metallic plates 111 and 141 , thereby completing the shape of FIG. 10 .
  • both surfaces of the first and second metallic plates 111 and 141 are etched until the first and second insulating layers 120 and 150 are exposed, thereby forming the first and second via layers 110 and 140 of FIG. 2 .
  • the second metallic layers 160 are formed on the first and second via layers 110 and 140 and the exposed first and second insulating layers 120 and 150 .
  • Each second metallic layer 160 is formed by using a copper layer through an aerosol deposition scheme as shown in FIG. 7 , and portions of the second metallic layers 160 are etched to form the second adhesive layers 161 on the first and second via layers 110 and 140 as shown in FIG. 13 .
  • the second adhesive layer 161 has an area wider than that of the first adhesive layer 131 due to the shapes of the first and second via layers 110 and 140 .
  • FIG. 14 a multi-layer structure of FIG. 14 is formed by repeating the processes of FIGS. 3 to 13 .
  • the third via layer 170 is formed on the second via layer 140
  • the fourth via layer 180 is formed under the first via layer 110
  • the third adhesive layers 191 are formed on the exposed surface of the first and fourth via layers 110 and 180 .
  • the third adhesive layers 191 may have the same shape as that of the second adhesive layers 161 , and have areas extending to the upper portions of the third and fourth insulating layers 176 and 186 .
  • the coverlay 195 may include solder resist or a dry film.
  • the inner lead 198 and the outer lead 199 are formed by plating the exposed surfaces of the coverlay 195 .
  • the inner lead 198 and the outer lead 199 may include the alloy containing metal such as silver, gold, nickel, or palladium, and may be subject to plating, so that the inner lead 198 and the outer lead 199 may have a multi-layer structure.
  • the printed circuit board is completed.
  • the device chip 200 is mounted, and the device chip 200 is electrically conducted with the inner lead 198 through the wire 210 , thereby completing the package 100 of the device chip 200 .
  • the via is formed through the etching process, so that the cost can be reduced.
  • the adhesive layer is formed between via layers, so that an adhesive strength and a signal characteristic can be ensured.

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
US14/115,138 2011-05-03 2012-04-26 Printed circuit board and the method for manufacturing the same Abandoned US20140060908A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR1020110042157A KR20120124319A (ko) 2011-05-03 2011-05-03 인쇄회로기판 및 그의 제조 방법
KR10-2011-0042157 2011-05-03
PCT/KR2012/003236 WO2012150777A2 (en) 2011-05-03 2012-04-26 The printed circuit board and the method for manufacturing the same

Publications (1)

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US20140060908A1 true US20140060908A1 (en) 2014-03-06

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US14/115,138 Abandoned US20140060908A1 (en) 2011-05-03 2012-04-26 Printed circuit board and the method for manufacturing the same

Country Status (6)

Country Link
US (1) US20140060908A1 (de)
EP (1) EP2705736B1 (de)
KR (1) KR20120124319A (de)
CN (1) CN103650652A (de)
TW (1) TWI479959B (de)
WO (1) WO2012150777A2 (de)

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US20160365322A1 (en) * 2013-11-14 2016-12-15 Taiwan Semiconductor Manufacturing Company, Ltd. Substrate Design with Balanced Metal and Solder Resist Density
US20220217842A1 (en) * 2021-01-05 2022-07-07 Samsung Electro-Mechanics Co., Ltd. Printed circuit board

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CN104377187B (zh) * 2013-08-16 2017-06-23 碁鼎科技秦皇岛有限公司 Ic载板、具有该ic载板的半导体器件及制作方法
KR102320158B1 (ko) * 2020-04-29 2021-11-01 엘지이노텍 주식회사 회로기판

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US10128195B2 (en) * 2013-11-14 2018-11-13 Taiwan Semiconductor Manufacturing Company, Ltd. Substrate design with balanced metal and solder resist density
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EP2705736B1 (de) 2019-03-27
TWI479959B (zh) 2015-04-01
WO2012150777A3 (en) 2013-03-21
WO2012150777A2 (en) 2012-11-08
EP2705736A4 (de) 2014-11-26
TW201309117A (zh) 2013-02-16
KR20120124319A (ko) 2012-11-13
CN103650652A (zh) 2014-03-19
EP2705736A2 (de) 2014-03-12

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