US20120326209A1 - Semiconductor device and method of producing the same - Google Patents

Semiconductor device and method of producing the same Download PDF

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US20120326209A1
US20120326209A1 US13/582,235 US201113582235A US2012326209A1 US 20120326209 A1 US20120326209 A1 US 20120326209A1 US 201113582235 A US201113582235 A US 201113582235A US 2012326209 A1 US2012326209 A1 US 2012326209A1
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layer
type
buffer
semiconductor device
functional laminate
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Yoshikazu Ooshika
Tetsuya Matsuura
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Dowa Electronics Materials Co Ltd
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    • H01L33/12—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a stress relaxation structure, e.g. buffer layer
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    • H01L29/66409—Unipolar field-effect transistors
    • H01L29/66446—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET]
    • H01L29/66462—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET] with a heterojunction interface channel or gate, e.g. HFET, HIGFET, SISFET, HJFET, HEMT
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    • H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
    • H01L29/7786—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT
    • H01L29/7787—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT with wide bandgap charge-carrier supplying layer, e.g. direct single heterostructure MODFET
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    • H01L33/26—Materials of the light emitting region
    • H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
    • H01L33/32—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen
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    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
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    • H01L33/0062—Processes for devices with an active region comprising only III-V compounds
    • H01L33/0066—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound
    • H01L33/007—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound comprising nitride compounds
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    • H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/04—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
    • H—ELECTRICITY
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    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S2301/00—Functional characteristics
    • H01S2301/17—Semiconductor lasers comprising special layers
    • H01S2301/173—The laser chip comprising special buffer layers, e.g. dislocation prevention or reduction
    • H—ELECTRICITY
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    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
    • H01S5/323—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
    • H01S5/32308—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser emitting light at a wavelength less than 900 nm
    • H01S5/32341—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser emitting light at a wavelength less than 900 nm blue laser based on GaN or GaP

Definitions

  • the present invention relates to a semiconductor device and a method of producing the semiconductor device.
  • the present invention particularly relates to a semiconductor device such as ultraviolet light emitting diodes, electronic devices, and to a method of producing the same.
  • ultraviolet LEDs light emitting diodes
  • HEMTs high electron mobility transistors
  • an ultraviolet LED has a functional laminate having a structure in which a light emitting layer is interposed between an n-type nitride semiconductor layer and a p-type nitride semiconductor layer.
  • a functional laminate is generally formed on the substrate with a buffer interposed therebetween.
  • HEMTs have a functional laminate including an i-type channel layer and an n-type electron supply layer that are formed of nitride semiconductor layers.
  • the functional laminate is also generally formed over the substrate with a buffer interposed therebetween.
  • Patent Document 1 discloses a nitride semiconductor substrate in which a first semiconductor layer (buffer) mainly containing AlN or AlGaN that is doped with a lateral growth promoting substance is formed on a substrate directly or with one or a plurality of nitride semiconductor layers mainly containing AlN or AlGaN interposed therebetween, and a functional laminate including a nitride semiconductor layer is formed thereon.
  • a first semiconductor layer buffer mainly containing AlN or AlGaN that is doped with a lateral growth promoting substance is formed on a substrate directly or with one or a plurality of nitride semiconductor layers mainly containing AlN or AlGaN interposed therebetween, and a functional laminate including a nitride semiconductor layer is formed thereon.
  • lateral growth is promoted in the buffer, accompanied by promotion of coupling of dislocations, which allows the threading dislocation in a buffer surface to be reduced.
  • Patent Document 1 a typical AlN low-temperature deposited buffer layer is formed between a buffer and an n-type A 0.4 Ga 0.6 N layer.
  • the relation of the Al compositions between the AlN low-temperature deposited buffer layer and the n-type Al 0.4 Ga 0.6 N layer is not considered.
  • the AlN low-temperature deposited buffer layer reduces the effect of promoting lattice relaxation in the buffer provided thereunder; thus, crystallinity improvement due to lateral growth was not sufficient.
  • the inventors of the present invention have made various studies to achieve the above objects to consequently find that the crystallinity and flatness improved in a buffer can be effectively passed on to a functional laminate by providing an Al z Ga 1-z N adjustment layer between the buffer on a substrate and an n-type Al x Ga 1-x N layer in a functional laminate having, for example, the n-type Al x Ga 1-x N layer (0 ⁇ x ⁇ 1), a light emitting layer, and a p-type Al y Ga 1-y N layer (0 ⁇ y ⁇ 1) from the buffer side.
  • the Al z Ga 1-z N adjustment layer (0 ⁇ z ⁇ 1) is containing p-type impurity, and the Al composition z is within the range of ⁇ 0.05 from the Al composition x of the n-type Al x Ga 1-x N layer in the functional laminate closest on the buffer side. Thus, they accomplished the present invention.
  • the present invention is based on the above findings, and its constituent features are as follows.
  • a semiconductor device comprising a buffer and a functional laminate including a plurality of nitride semiconductor layers, on a substrate,
  • the functional laminate includes a first n-type or i-type Al x Ga 1-x N layer (0 ⁇ x ⁇ 1) on the buffer side, and
  • an Al z Ga 1-z N adjustment layer containing p-type impurity which has an approximately equal Al composition to the first Al x Ga 1-x N layer (x ⁇ 0.05 ⁇ z ⁇ x++0.05, 0 ⁇ z ⁇ 1) is provided between the buffer and the functional laminate.
  • the buffer includes an Al ⁇ Ga 1- ⁇ N layer (0 ⁇ 1) at least on the functional laminate side, and difference between an Al composition ⁇ of the Al ⁇ Ga 1- ⁇ N layer and an Al composition x of the first Al x Ga 1-x N layer is 0.1 or more.
  • the first Al x Ga 1-x N layer is n-type
  • the functional laminate includes at least a light emitting layer and a second Al y Ga 1-y N layer (0 ⁇ y ⁇ 1) in this order on the first Al x Ga 1-x N layer.
  • a thickness of the Al z Ga 1-z N adjustment layer containing p-type impurity is in a range of 100 nm to 1500 nm.
  • the buffer includes a superlattice strain buffer layer having a superlattice structure formed by alternately stacking Al ⁇ Ga 1- ⁇ N layers (0 ⁇ 0.3) and AlN layers.
  • a method of producing a semiconductor device wherein a buffer, an Al z Ga 1-z N adjustment layer containing p-type impurity (x ⁇ 0.05 ⁇ z ⁇ x+0.05, 0 ⁇ z ⁇ 1), and a functional laminate including an i-type or n-type Al x Ga 1-x N layer (0 ⁇ x ⁇ 1) are sequentially formed on a substrate.
  • the present invention can provide a semiconductor device having a functional laminate excellent in flatness and crystallinity and a method of producing the semiconductor device.
  • the flatness and crystallinity improved in a buffer can be effectively passed on to the functional laminate by providing an Al z Ga 1-z N adjustment layer between the buffer on a substrate and a first n-type or i-type Al x Ga 1-x N layer in the functional laminate having an n-type Al x Ga 1-x N layer (0 ⁇ x ⁇ 1).
  • the Al z Ga 1-z N adjustment layer (0 ⁇ z ⁇ 1) is containing p-type impurity, and the Al composition z is within the range of ⁇ 0.05 from the Al composition x of the first Al x Ga 1-x N layer.
  • FIG. 1 is a schematic cross-sectional view of a semiconductor device 100 in accordance with the present invention.
  • FIG. 2 is a schematic cross-sectional view showing a layered structure in a production of a semiconductor device 100 according to the present invention.
  • FIGS. 3( a ) and 3 ( b ) are 1000 ⁇ photomicrographs of surfaces in Experimental Examples 1 and 2, respectively.
  • FIG. 1 is a schematic cross-sectional view showing an example of the semiconductor device 100 in accordance with the present invention.
  • the semiconductor device 100 in accordance with the present invention includes a buffer 2 and a functional laminate 3 having a plurality of nitride semiconductor layers on a substrate 1 as shown in FIG. 1 .
  • the semiconductor device 100 is characterized in that the functional laminate 3 has a first n-type or i-type A x Ga 1-x N layer (0 ⁇ x ⁇ 1) 4 (n-type in FIG. 1 ) on the buffer 2 side, and an Al z Ga 1-z N adjustment layer (x ⁇ 0.05 ⁇ z ⁇ x+0.05, 0 ⁇ z ⁇ 1) 5 (hereinafter also referred to simply as “adjustment layer 5 ”) is provided between the buffer 2 and the functional laminate 3 .
  • the adjustment layer 5 contains p-type impurity, and has an approximately equal Al composition to the first Al x Ga 1-x N layer 4 .
  • the functional laminate 3 refers to a portion serving as a device, in which for example electric current flows, in a semiconductor device such as an LED or an HEMT, and the function of a device is not imparted to the adjustment layer 5 even if the adjustment layer 5 is adjacent to the first Al x Ga 1-x N layer (0 ⁇ x ⁇ 1) 4 .
  • the Al z Ga 1-z N adjustment layer 5 containing p-type impurity is provided between the buffer 2 and the n-type Al x Ga 1-x N layer 4 , which can particularly prevent impurities such as oxygen (O) from diffusing into the functional laminate 3 from the substrate 1 ; as a result, the light output can be improved. Further, since the adjustment layer 5 contains p-type impurity, lateral growth in the adjustment layer 5 is promoted, and the flatness of the adjustment layer 5 can be improved, which consequently improves the flatness of layers thereon.
  • the Al composition z of the Al z Ga 1-z N adjustment layer 5 containing p-type impurity is set within the range of ⁇ 0.05 from the Al composition x of the n-type Al x Ga 1-x N layer 4 , so that the crystallinity and flatness improved in the buffer 2 and the p-type Al z Ga 1-z N adjustment layer 5 can be effectively passed on to the n-type Al x Ga 1-x N layer 4 and even to the layers provided thereon.
  • the semiconductor device 100 of the present invention can achieve high light output.
  • the p-type impurity is preferably Mg, Zn, Ca, or Be, more preferably Mg or Zn, and Mg is highly preferred.
  • Mg, Zn, Ca, or Be can be used as the p-type impurity.
  • Mg or Zn is preferred as a lateral crystal growth promoting substance for promoting the crystal growth of AlGaN or GaN in the lateral direction. Among them, Mg hardly diffuses into other layers, which makes it highly preferable as a lateral crystal growth promoting substance.
  • the Al z Ga 1-z N adjustment layer containing p-type impurity may be not only a p-type Al z Ga 1-z N adjustment layer obtained by activation of p-type impurity but alternatively an Al z Ga 1-z N adjustment layer doped with p-type impurity not subjected to an activation process.
  • the first Al x Ga 1-x N layer 4 is n-type
  • the functional laminate 3 has at least a light emitting layer 6 and a second p-type Al y Ga 1-y N layer (0 ⁇ y ⁇ 1) 7 in this order on the first Al x Ga 1-x N layer 4 .
  • the flatness and crystallinity improved in the buffer 2 can be effectively passed on to the functional laminate 3 , in particular to the light emitting layer 6 in the functional laminate 3 ; thus, the functional laminate 3 can have preferable flatness and crystallinity, and light output can be improved.
  • an i-type Al w Ga 1-w N layer (0 ⁇ w ⁇ 1) 8 not doped with impurity (hereinafter also referred to as “undoped” Al w Ga 1-w N layer 8 ) having an approximately equal Al composition to the first Al x Ga 1-x N layer 4 is preferably provided in addition between the adjustment layer 5 and the first Al x Ga 1-x N layer 4 .
  • the Al composition w of this undoped Al w Ga 1-w N layer 8 is preferably within the range of ⁇ 0.05 from the Al composition x of the first Al x Ga 1-x N layer 4 .
  • x ⁇ 0.05 ⁇ z ⁇ w ⁇ x+0.05 may be taken. Strain due to lattice constant difference between a layer in the buffer 2 on the closest side to the functional laminate 3 and the first Al x Ga 1-x N layer 4 (lattice constant difference between x and a to be described) can be more appropriately reduced due to the relationship between the Al z Ga 1-z N adjustment layer 5 containing p-type impurity and the i-type Al w Ga 1-w N layer 8 . With the relation x ⁇ 0.05 ⁇ z ⁇ w ⁇ x+0.05, upper layers have higher Al composition and consequently have a relatively small lattice constant, so that tensile stress is applied by lower layers to the layers stacked thereabove.
  • tensile stress is applied in the crystal growth of the i-type Al w Ga 1-w N layer 8 . Therefore, crystal growth of the i-type Al w Ga 1-w N layer 8 not doped with p-type impurity itself can additionally have an effect of promoting lateral growth, and the effect of maintaining the improved flatness can be further enhanced by the i-type Al w Ga 1-w N layer 8 .
  • the composition difference from x is more than 0.05, cracks would occur or flatness would be affected by strain due to the difference in the lattice constant.
  • the i-type AlGaN layer not doped with impurity here refers to a layer which is not designed to be doped with specific impurity (also referred to as “undoped layer”).
  • a semiconductor preferably contains no impurity; however, a semiconductor with low carrier density (for example, less than 5 ⁇ 10 16 /cm 3 ) can be referred to as i-type as long as it does not electrically serve as a p-type or n-type semiconductor.
  • the thickness of the adjustment layer 5 is preferably in the range of 100 nm to 1500 nm, more preferably 100 nm to 300 nm. When the thickness is less than 100 nm, sufficient surface flatness would not be achieved; when the thickness is more than 1500 nm, cracks would occur in the surface of the adjustment layer; and when the thickness is more than 300 nm, cracks would occur in the functional laminate.
  • the adjustment layer 5 is doped with magnesium (Mg), and its Mg concentration is preferably in the range of 5 ⁇ 10 16 /cm 3 to 2 ⁇ 10 20 /cm 3 .
  • Mg magnesium
  • the lateral growth of the adjustment layer 5 is promoted to help promotion of planarization.
  • the Mg concentration is less than 5 ⁇ 10 16 /cm 3 , sufficient surface flatness would not be achieved.
  • the Mg concentration is more than 2 ⁇ 10 20 /cm 3 , the Mg concentration is supersaturated to cause segregation, which would significantly impair the flatness of the surface.
  • the concentration of oxygen (O) contained in the first Al x Ga 1-x N layer 4 is preferably less than 2 ⁇ 10 18 /cm 3 , more preferably 1 ⁇ 10 18 /cm 3 or less.
  • Oxygen contained in the n-type Al x Ga 1-x N layer 4 has been mixed in, for example when a layer is stacked on the substrate 1 with oxygen in the atmosphere being attached thereto and the oxygen is diffused into the upper layer.
  • the oxygen causes reduction in the power output of light emitting devices; therefore, the concentration is preferably even lower.
  • the buffer 2 serves to reduce dislocation or strain resulted from the lattice mismatch or thermal expansion difference between the substrate 1 and the functional laminate 3 , and it can be selected from known buffers depending on the type of the substrate 1 and the functional laminate 3 .
  • the present invention is advantageous in a case where the Al compositions of layers in the buffer 2 and the functional laminate 3 that are most close to each other are different, and particularly in a case where the difference of the Al compositions is 0.1 or more.
  • the difference between the Al composition ⁇ of the Al ⁇ Ga 1- ⁇ N layer (0 ⁇ 1) in the buffer 2 on the closest side to the functional laminate 3 and the Al composition x of the first Al x Ga 1-x N layer 4 is preferably 0.1 or more.
  • the buffer 2 may be a single layer or a multilayer, but a superlattice is preferably used. Further, the buffer 2 more preferably includes a superlattice strain buffer layer having a superlattice structure formed by alternately stacking Al ⁇ Ga 1- ⁇ N layers (0 ⁇ 0.3) 2 a and AlN layers 2 b .
  • the Al ⁇ Ga 1- ⁇ N layers (0 ⁇ 0.3) 2 a are preferred to be p-type. This is for reducing lattice mismatch and improving the flatness. Note that the layered structure of the superlattice strain buffer layer is partially omitted in the figure.
  • an AlN layer having a thickness ranging from 500 nm to 1500 nm epitaxially grown on the substrate 1 using a known technique such as MOCVD, MOVPE, HVPE, or MBE, for example, may be provided as an initial layer between the substrate 1 and the superlattice strain buffer layer.
  • the thickness of the p-type Al ⁇ Ga 1- ⁇ N layers 2 a may be for example, 0.1 nm to 3 nm, preferably 2 nm or less, while the thickness of the AlN layers 2 b may be for example, 0.1 nm to 9 nm, preferably 0.9 nm to 9 nm.
  • the number of the stacked p-type Al ⁇ Ga 1- ⁇ N layers 2 a and AlN layers 2 b the number of the pairs of the p-type Al ⁇ Ga 1- ⁇ N layers 2 a and AlN layers 2 b can be, for example 20 to 70, preferably 20 to 50.
  • the superlattice strain buffer layer is AlGaN
  • the Al composition is generally calculated from the Al composition and the thickness of each layer. It should be noted that the Al composition of the surfaces of the buffer 2 facing to the functional laminate 3 does not refer to the calculated Al composition of the superlattice, but to the practical Al composition of the surfaces irrespective of the thickness.
  • the AlN layers 2 b made of AlN are thicker (the ratio of the AlN layers 2 b is higher) on the substrate 1 side, and the ratio of the AlN layers 2 b with respect to the p-type Al ⁇ Ga 1- ⁇ N layers 2 a preferably decreases gradually to the side of the n-type Al x Ga 1-x N layer 4 .
  • the crystallinity of the n-type Al x Ga 1-x N layer 4 can be further improved.
  • the superlattice strain buffer layer is not substantially electrically conductive as a whole (for example, the specific resistance measured by a sheet resistance measuring apparatus is 10 ⁇ cm/square or more), and the impurity concentration of the whole superlattice strain buffer layer measured by SIMS is preferably 1 ⁇ 10 18 cm ⁇ 3 or less, more preferably 7 ⁇ 10 17 cm ⁇ 3 or less.
  • the impurity concentration is more than 1 ⁇ 10 18 cm ⁇ 3 , thyristor failure would occur in the nitride semiconductor device.
  • the AlN layers are designed not to be doped with p-type impurity.
  • the superlattice strain buffer layer of the present invention is not required to be electrically conductive, the amount of impurities in the AlN layers 2 b is preferably much smaller than the normal impurity doping amount, excluding unavoidable impurity diffused from the p-type Al ⁇ Ga 1- ⁇ N layers 2 a.
  • layers having a low Al content an Al composition ⁇ ranging 0 ⁇ 0.3, which further contain p-type impurity, can be used as the p-type Al ⁇ Ga 1- ⁇ N layers 2 a .
  • the p-type impurity for example Mg, Zn, Ca, or Be can be used.
  • the p-type impurity can be contained in the Al ⁇ Ga 1- ⁇ N layers 2 a by supplying the p-type impurity simultaneously with a source gas in the formation of the Al ⁇ Ga 1- ⁇ N layers 2 a and alternatively by intermittently supplying the p-type impurity onto the AlN layers 2 b , then forming the Al ⁇ Ga 1- ⁇ N layers 2 a , and diffusing the p-type impurity into the Al ⁇ Ga 1- ⁇ N layers 2 a .
  • the concentration of the p-type impurity in the p-type Al ⁇ Ga 1- ⁇ N layers 2 a may be, for example, 5 ⁇ 10 16 /cm 3 or more and less than 2 ⁇ 10 20 /cm 3 , preferably 7 ⁇ 10 17 /cm 3 to 1.7 ⁇ 10 19 /cm 3 , more preferably 7 ⁇ 10 18 /cm 3 to 1.7 ⁇ 10 19 /cm 3 .
  • a known substrate that is different kind from Group III nitride on which a Group III nitride can be grown can be used as the substrate 1 .
  • An AlN template substrate in which a single crystal AlN layer 1 b is grown directly on a sapphire base substrate 1 a , and an AlGaN template substrate in which a single crystal AlGaN layer 1 b is directly grown on a sapphire base substrate 1 a are preferable.
  • a Si substrate is also preferred.
  • the inventors found that when an AlN template substrate is used, the above attachment of oxygen (O) in the atmosphere more easily occurs as compared with the case of using a sapphire substrate, and rise in the concentration of oxygen in the functional laminate 3 due to the attached oxygen is required to be suppressed. Then, with respect to a semiconductor device of the present invention, they found that the diffusion of the oxygen (O) into the functional laminate 3 can be effectively suppressed by providing the Al z Ga 1-z N adjustment layer 5 containing p-type impurity. The layer containing p-type impurity, which has an adequate thickness is considered to suppress the diffusion of oxygen (O).
  • Si or the like is preferably used as n-type impurity in the n-type Al x Ga 1-x N layer 4 .
  • a layer made of Al ⁇ In ⁇ Ga 1- ⁇ - ⁇ N (where 0 ⁇ 1, 0 ⁇ 1, 0 ⁇ + ⁇ 1) can be used as the light emitting layer 6 .
  • Mg, Zn, Ca, Be, or the like is preferably used as p-type impurity in the p-type Al y Ga 1-y N layer 7 .
  • the thickness of the layers may be, for example, as follows: the n-type Al x Ga 1-x N layer 4 : 1300 nm to 1400 nm, the light emitting layer 6 : 50 nm to 80 nm, and the p-type Al y Ga 1-y N layer 7 : 200 nm to 300 nm. Note that these layers can be formed by epitaxial growth using known techniques.
  • a p-side electrode 9 can be provided on the p-type Al y Ga 1-y N layer 7
  • an n-side electrode 10 can be provided on the partially exposed n-type Al x Ga 1-x N layer 4 .
  • a NiAu electrode obtained by sequentially vapor-depositing a Ni-containing film and an Au-containing film by vacuum vapor deposition, for example, may be used as the p-side electrode 9 .
  • a TiAl electrode obtained by sequentially vapor-depositing a Ti-containing film and an Al-containing film by vacuum vapor deposition, for example, may be used as the n-side electrode 10 .
  • FIG. 2 schematically shows an example of a layered structure of a semiconductor device 100 in accordance with the present invention at a stage of production.
  • the method of producing the semiconductor device 100 in accordance with the present invention is characterized by sequentially forming a buffer 2 , an Al z Ga 1-z N adjustment layer (x ⁇ 0.05 ⁇ z ⁇ x+0.05, 0 ⁇ z ⁇ 1) 5 containing p-type impurity, and a functional laminate 3 containing an i-type or n-type Al x Ga 1-x N layer (0 ⁇ x ⁇ 1) 4 , on a substrate 1 for example by MOCVD, as shown in FIG. 2 .
  • a buffer 2 an Al z Ga 1-z N adjustment layer (x ⁇ 0.05 ⁇ z ⁇ x+0.05, 0 ⁇ z ⁇ 1) 5 containing p-type impurity
  • a functional laminate 3 containing an i-type or n-type Al x Ga 1-x N layer (0 ⁇ x ⁇ 1) 4
  • the semiconductor device is a light emitting device, as shown in FIG. 1 , at least a p-type Al y Ga 1-y N layer 7 and a light emitting layer 6 (and part of an n-type Al x Ga 1-x N layer 4 ) which have been formed on the adjustment layer 5 are etched by dry etching to partially expose the n-type Al x Ga 1-x N layer 4 on the light emitting layer 6 side (in the upper part of FIG. 1 ). Then, finally, a p-side electrode 9 and an n-side electrode 10 are formed by vacuum vapor deposition to electrically connect the n-type Al x Ga 1-x N layer 4 and the p-type Al y Ga 1-y N layer 7 . Thus, a semiconductor device 100 shown in FIG. 1 can be obtained.
  • the adjustment layer 5 of the thus produced semiconductor device 100 Since p-type impurity is contained in the adjustment layer 5 of the thus produced semiconductor device 100 , lateral crystal growth of the adjustment layer 5 is promoted, so that the flatness and crystallinity of the adjustment layer 5 is improved. Accordingly, the flatness and crystallinity of the n-type Al x Ga 1-x N layer 4 formed on the adjustment layer 5 is also improved, which consequently improves the flatness and crystallinity of the light emitting layer 6 and the p-type Al y Ga 1-y N layer 7 thereon. Thus, a semiconductor device 100 with high light output can be obtained.
  • the n-type Al x Ga 1-x N layer 4 of a nitride semiconductor device of the present invention may be a laminate of an n-cladding layer and an n-contact layer.
  • the p-type Al y Ga 1-y N layer 7 may be a laminate of a p-cladding layer and a p-contact layer.
  • first Al x Ga 1-x N layer is n-type
  • present invention can also be applied to cases where the first Al x Ga 1-x N layer is undoped i-type.
  • first Al x Ga 1-x N layer is i-type
  • this i-type Al x Ga 1-x N layer is used as a channel layer, and an n-type AlGaN-based layer provided thereon as an electron supply layer, and three electrodes of a source, a gate, and a drain are provided thereon to obtain an electronic device having a HEMT structure.
  • the above AlGaN layer may be a layer into which In, B, or the like is inevitably mixed at approximately 1% or less.
  • a Mg-doped p-type Al 0.31 Ga 0.69 N layer (thickness: 1000 nm, doped with Mg, Mg concentration: 1 ⁇ 10 19 /cm 3 ) was grown on an AlN template substrate by MOCVD.
  • a Si-doped n-type Al 0.31 Ga 0.69 N layer (thickness: 1000 nm, doped with Si, Si concentration: 4 ⁇ 10 18 /cm 3 ) was grown on an AlN template substrate by MOCVD.
  • An undoped i-type Al 0.31 Ga 0.69 N layer (thickness: 1000 nm) was grown on an AlN template substrate by MOCVD.
  • FIGS. 3( a ) and 3 ( b ) are micrographs, taken through an optical microscope (1000 ⁇ ), of the surfaces in Experimental Examples 1 and 2, respectively. As evident from the micrographs, no step was seen in Experimental Example 1, while steps were observed in the same field of view in Experimental Example 2. This reveals that Experimental Example 1 in which the Mg-doped Al 0.31 Ga 0.69 N layer was grown on the substrate achieved a flatter surface than Experimental Example 2 in which the n-type Al 0.31 Ga 0.69 N layer was grown on the substrate. Steps were also found in the surface of Experimental Example 3 similarly to Experimental Example 2.
  • An AlN layer (thickness: 27 nm) was stacked as an initial layer by MOCVD on an AlN template substrate, and then a buffer (superlattice strain buffer layer), a p-type Al 0.31 Ga 0.69 N adjustment layer (thickness: 100 nm, Mg concentration: 1 ⁇ 10 18 /cm 3 ) doped with Mg as a substance for promoting planarization, an undoped i-type Al 0.35 Ga 0.65 N layer (thickness: 300 nm) were epitaxially grown thereon in this order.
  • a buffer superlattice strain buffer layer
  • a p-type Al 0.31 Ga 0.69 N adjustment layer (thickness: 100 nm, Mg concentration: 1 ⁇ 10 18 /cm 3 ) doped with Mg as a substance for promoting planarization
  • an undoped i-type Al 0.35 Ga 0.65 N layer (thickness: 300 nm) were epitaxially grown thereon in this order.
  • an n-type Al 0.35 Ga 0.65 N layer (thickness: 1300 nm, doped with Si, Si concentration: 1 ⁇ 10 19 /cm 3 ), a light emitting layer (multiple quantum well structure with an emission wavelength of 325 nm, total thickness: 64.5 nm), and a p-type Al 0.32 Ga 0.68 N layer (thickness: 280 nm, doped with Mg, Mg concentration: 1.5 ⁇ 10 19 /cm 3 ) were epitaxially grown in this order to form a functional laminate.
  • an epitaxial laminate was formed on the substrate.
  • the superlattice strain buffer layer had a structure in which a superlattice laminate I having 20 pairs of alternately stacked AlN layers (thickness: 9 nm) and GaN layers (thickness: 2.1 nm), a superlattice laminate II having 30 pairs of alternately stacked AlN layers (thickness: 2.7 nm) and GaN layers (thickness: 2.1 nm), and a superlattice laminate III having 50.5 pairs of alternately stacked AlN layers (thickness: 0.9 nm) and GaN layers (thickness: 2.1 nm) (“50.5 pairs” implies that both the first layer and the last layer in the laminate were AlN layers) were sequentially stacked.
  • the GaN layers were doped with Mg.
  • the layer in the buffer (superlattice strain buffer layer) on the closest side of the functional laminate was an AlN layer.
  • the difference ( ⁇ x) between the Al composition ⁇ of the buffer on the functional laminate side (the AlN layer) and the Al composition x of the functional laminate on the buffer side (n-type Al 0.35 Ga 0.65 N layer), the AlN layer and the n-type Al 0.35 Ga 0.65 N layer being opposite to each other, was 1.0-0.35 0.65, and was more than 0.1.
  • the production conditions of the superlattice strain buffer layer and the p-type Al 0.31 Ga 0.69 N layer are shown in Table 1.
  • An epitaxial laminate was formed in a manner similar to Example 1 except for that the p-type Al 0.31 Ga 0.69 N adjustment layer doped with Mg was not formed.
  • An epitaxial laminate was formed in a manner similar to Example 1 except for that the undoped i-type Al 0.35 Ga 0.65 N layer was not formed.
  • x 0.35 without change, so that z is out of the range of +0.05 from x.
  • the growth surface was scribed with a diamond pen; Indium dots were physically pressed on a point where the n-type AlGaN layer was exposed and a point 1.5 mm apart from this exposed point.
  • a simple nitride semiconductor device using the formed two points as an n-type electrode and a p-type electrode was manufactured. Then, probes were put on those points; light was output from the rear surface after a DC current of 20 mA was applied; and the light was guided to a multi-channel spectrometer through an optical fiber. The peak intensity of the spectrum was converted to output power to obtain the light output power Po.
  • the emission wavelength was 327 nm in each of the cases. The results are shown in Table 3. Note that the sample of Comparative Example 2 did not emit light.
  • a xenon lamp light source and optical system members which enable irradiation of the wafer through a furnace window were prepared.
  • the wafer was irradiated with the source light, and the reflected light guided through the optical fiber from a light receiving portion was measured by a spectrophotometer.
  • the optical axis was adjusted by using a previously polished sapphire substrate, and the reflection intensity was measured. Relative reflection intensity was determined from the reflectance of the sapphire substrate and the reflectance of the samples at each growth stage.
  • the sample When the sample is grown with its surface being flat, in other words, with the flatness of the surface being high, light passes along the optical axis from the light source to the light receiving portion; therefore, the light intensity of the received light is shown as a constant value. However, when the sample is grown with its surface being rough, light is scattered on the wafer; therefore, the intensity of light to be received becomes lower as compared with the case of flat surface.
  • the in-situ surface condition of the wafer just being grown can be measured in the form of the light intensity over time, and the change in the surface condition of the wafer during growth can be followed.
  • the intensity of the light emitting layer in Example 1 was 1.2 because the Al composition of the light emitting layer was low and the refractive index thereof was high, which accordingly increased the difference between the refractive indices of the light emitting layer and the ambient gas in the furnace (refractive index of a mixture of N 2 and H 2 , which was almost equal to the refractive index of the atmosphere) to increase the reflectance.
  • the reflectance of the light emitting layer was lower than that of the n-type AlGaN layer, which was resulted from the reduction in the reflectance evidently due to surface roughness.
  • the impurity concentration of the samples of Example 1 and Comparative Example 1 above was measured by SIMS.
  • the oxygen (O) concentration of the n-type Al 0.35 Ga 0.65 N layer and the light emitting layer in Example 1 was 1 ⁇ 10 18 /cm 3
  • the oxygen (O) concentration of those in Comparative Example 1 was 8 ⁇ 10 18 /cm 3
  • the oxygen (O) concentration of the n-type AlGaN layer and the light emitting layer in Examples 2 and 3 was also approximately equal to that in Example 1 and was less than 2 ⁇ 10 18 /cm 3 . Therefore, the p-type AlGaN adjustment layer of the present invention reduced the concentration of oxygen (O) in the layers to be stacked afterwards to less than 2 ⁇ 10 18 /cm 3 , which contributed to the improvement in the light output.
  • a high output light emitting device can be obtained by fabricating a semiconductor device by then partially exposing the n-type AlGaN layer forming the functional laminate obtained in this example by dry etching, for example, forming an n-side electrode on the n-type AlGaN layer, and forming a p-side electrode on the p-type AlGaN layer.
  • an adjustment layer of the present invention makes it possible to improve flatness and crystallinity of a nitride semiconductor layer provided thereon, and this can be applied to electronic devices such as HEMTs and the like without limitation to light emitting devices.
  • a superlattice buffer and a non-doped channel layer has an AlGaN layer containing p-type impurity, which has an approximately equal Al composition to the channel layer therebetween, the flatness and crystallinity improved in the buffer can be effectively passed on, and the flatness and crystallinity of the channel layer and layers provided thereon can be improved.
  • the present invention can provide a semiconductor device having a functional laminate excellent in flatness and crystallinity and a method of producing the semiconductor device.
  • the flatness and crystallinity improved in a buffer can be effectively passed on to the functional laminate by providing an Al z Ga 1-z N adjustment layer between the buffer on a substrate and a first n-type or i-type Al x Ga 1-x N layer in the functional laminate having an n-type Al x Ga 1-x N layer (0 ⁇ x ⁇ 1).
  • the Al z Ga 1-z N adjustment layer (0 ⁇ z ⁇ 1) is containing p-type impurity, and the Al composition z is within the range of ⁇ 0.05 from the Al composition x of the first Al x Ga 1-x N layer.

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