US20070285089A1 - Current detection printed board, voltage detection printed board, current/voltage detection printed board, current/voltage detector, current detector and voltage detector - Google Patents

Current detection printed board, voltage detection printed board, current/voltage detection printed board, current/voltage detector, current detector and voltage detector Download PDF

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Publication number
US20070285089A1
US20070285089A1 US11/687,973 US68797307A US2007285089A1 US 20070285089 A1 US20070285089 A1 US 20070285089A1 US 68797307 A US68797307 A US 68797307A US 2007285089 A1 US2007285089 A1 US 2007285089A1
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US
United States
Prior art keywords
wire
current
printed board
voltage
detection printed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US11/687,973
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English (en)
Inventor
Yoshifumi Ibuki
Shuji Omae
Hideo Ito
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Daihen Corp
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Daihen Corp
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Filing date
Publication date
Application filed by Daihen Corp filed Critical Daihen Corp
Assigned to DAIHEN CORPORATION reassignment DAIHEN CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: IBUKI, YOSHIFUMI, ITO, HIDEO, OMAE, SHUJI
Publication of US20070285089A1 publication Critical patent/US20070285089A1/en
Priority to US12/822,384 priority Critical patent/US20100259247A1/en
Priority to US13/014,288 priority patent/US8427134B2/en
Priority to US13/849,842 priority patent/US8629674B2/en
Abandoned legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
    • G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
    • G01R15/18—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using inductive devices, e.g. transformers
    • G01R15/181—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using inductive devices, e.g. transformers using coils without a magnetic core, e.g. Rogowski coils
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
    • G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
    • G01R15/18—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using inductive devices, e.g. transformers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
    • G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
    • G01R15/142—Arrangements for simultaneous measurements of several parameters employing techniques covered by groups G01R15/14 - G01R15/26

Definitions

  • the present invention relates to a current detection printed board that is used to detect an alternating current flowing in a power transmission conductor used as an alternating current (AC) power transmission path, to a voltage detection printed board that is used to detect an AC voltage to be generated in the power transmission conductor, to a current/voltage detection printed board that is used to detect the alternating current (AC current) and the AC voltage, to a current/voltage detector to detect the alternating current and the AC voltage, and to a current detector and a voltage detector.
  • the invention relates to a technology that uses high-frequency power as AC power.
  • an impedance matching device Like an impedance matching device or a high-frequency power supply device, there is known a device that detects AC power current and voltage and performs a control using the detected current and voltage. As an example, an impedance matching device will now be described.
  • FIG. 30 is a block diagram of an example of a high-frequency power supply system that uses an impedance matching device.
  • the high-frequency power supply system is a system that performs a processing, such as plasma etching or plasma CVD, on a workpiece, such as a semiconductor wafer or a liquid crystal substrate.
  • the high-frequency power supply system includes a high-frequency power supply device 61 , a transmission line 62 , an impedance matching device 63 , a load connection portion 64 , and a load 65 (plasma processing device 65 ).
  • the high-frequency power supply device 61 is a device that outputs high-frequency power to the plasma processing device 65 as a load. Moreover, high-frequency power output from the high-frequency power supply device 61 is supplied to the plasma processing device 65 through the transmission line 62 having a coaxial cable, the impedance matching device 63 , and the load connection portion 64 having a shielded copper plate. In general, the high-frequency power supply device 61 outputs high-frequency power having a frequency of a radio frequency band (for example, a frequency of hundreds kHz or more).
  • the plasma processing device 65 is a device that performs a processing (etching or CVD) on a wafer or a liquid crystal substrate.
  • the impedance matching device 63 includes a matching circuit that has a variable impedance element (for example, a variable capacitor, a variable inductor, or the like) (not shown) therein.
  • the impedance matching device 63 has a control function of changing impedance of the variable impedance element in the matching circuit to accomplish impedance matching between the high-frequency power supply device 61 and the load 65 .
  • a current detector and a voltage detector are provided between an input terminal 63 a of the impedance matching device 63 and the matching circuit.
  • the current detector and the voltage detector detect high-frequency current and high-frequency voltage output from the high-frequency power supply device 61 .
  • Information of forward wave power or reflected wave power is obtained using the current and voltage detected by the detectors.
  • impedance of the variable impedance element is controlled using the obtained information to accomplish impedance matching.
  • FIG. 31 is a schematic circuit diagram of a current detector 80 and a voltage detector 90 provided between the input terminal and a matching circuit 67 of the impedance matching device 63 .
  • a power transmission conductor 66 (for example, rod-shaped copper) serving as a power transmission path is provided between the input terminal 63 a and the matching circuit 67 . Then, the current detector 80 and the voltage detector 90 are provided on the power transmission conductor 66 .
  • the current detector 80 has a current transformer 81 , output wires 82 and 83 of the current transformer 81 , a current conversion circuit 84 , and an output wire 85 of the current conversion circuit 84 .
  • a current according to an AC current that flows in the power transmission conductor 66 flows in the current transformer 81 .
  • This current is input to the current conversion circuit 84 through the output wires 82 and 83 and is converted into a predetermined voltage level. Then, the converted voltage is output from the output wire 85 of the current conversion circuit 84 .
  • the voltage detector 90 has a capacitor 91 , an output wire 92 of the capacitor 91 , a voltage conversion circuit 93 , and an output wire 94 of the voltage conversion circuit 93 .
  • a voltage according to an AC voltage generated in the power transmission conductor 66 is generated in the capacitor 91 .
  • This voltage is input to the voltage conversion circuit 93 through the output wire 92 and is converted into a predetermined voltage level. Then, the converted voltage is output from the output wire 94 of the voltage conversion circuit 93 .
  • the information of forward wave power or reflected wave power is obtained using the current and voltage detected by the current detector 80 and the voltage detector 90 .
  • the current detector 80 and the voltage detector 90 have a structure shown in FIGS. 32 and 33A to 33 C.
  • FIG. 32 is a schematic exterior view of the current detector 80 and the voltage detector 90 .
  • FIGS. 33A to 33C are explanatory views illustrating the configuration of the current detector 80 and the voltage detector 90 shown in FIG. 32 .
  • FIG. 33A is a diagram showing the interior of a casing (indicated by a dotted line) of FIG. 32 in perspective view.
  • FIG. 33B is a diagram showing the vicinity of the current transformer 81 as viewed from the transverse side of FIG. 33A .
  • FIG. 33C is a diagram showing the vicinity of the capacitor 91 as viewed from the transverse side of FIG. 33A .
  • FIGS. 32 and 33A to 33 C the power transmission conductor 66 and an insulator 69 covering the power transmission conductor 66 , not included in the current detector 80 and the voltage detector 90 , are shown for explanation. Further, in FIGS. 32 and 33A to 33 C, for convenience, the same parts as those in FIG. 31 are represented by the same reference numerals.
  • the power transmission conductor 66 is, for example, a cylindrical copper rod.
  • the periphery of the power transmission conductor 66 is covered with a hollow insulator 69 .
  • the power transmission conductor 66 and the insulator 69 pass through a casing 71 .
  • the current transformer 81 constituting the current detector 80 and the capacitor 91 constituting the voltage detector 90 are accommodated in the casing 71 .
  • the current transformer 81 a coated copper wire or the like is wound around a ring-shaped magnetic core (for example, a toroidal core using a ferrite) to form a coiled wire. Then, the current transformer 81 is disposed such that the power transmission conductor 66 passes through the magnetic core. Accordingly, a current according to a current flowing in the power transmission conductor 66 flows in the coiled wire of the current transformer 81 .
  • the current flowing in the current transformer 81 is input to the current conversion circuit 84 through the output wires 82 and 83 that are connected to both ends of the coiled wire. Then, the current conversion circuit 84 converts the input current into a predetermined voltage level and outputs the converted voltage.
  • the capacitor 91 is formed by providing a ring-shaped conductor 91 b (for example, a copper ring) in the vicinity of the insulator 69 .
  • the ring-shaped conductor 91 b and a portion 91 a facing the power transmission conductor 66 function as electrodes of the capacitor. Accordingly, a voltage according to the voltage generated in the power transmission conductor 66 is generated in the capacitor 91 .
  • the voltage generated in the capacitor 91 is input to the voltage conversion circuit 93 through the output wire 92 connected to the ring-shaped conductor 91 b . Then, the voltage conversion circuit 93 converts the input voltage into a predetermined voltage level and outputs the converted voltage.
  • FIGS. 32 and 33A to 33 C the output wire 85 of the current conversion circuit 84 and the output wire 94 of the voltage conversion circuit 93 are not shown.
  • a common conductor cover 72 is provided to cover the current conversion circuit 84 and the voltage conversion circuit 93 .
  • FIG. 32 shows a state where the cover 72 is removed, in order to show the current conversion circuit 84 and the voltage conversion circuit 93 .
  • FIGS. 33A to 33C the cover 72 is not shown.
  • the current detector 80 and the voltage detector 90 have the casing that covers the current transformer 81 , the capacitor 91 , and the like, in addition to the parts of the circuit diagram in FIG. 31 .
  • the casing is common to the current detector 80 and the voltage detector 90 according to the related art.
  • the current detector 80 and the voltage detector 90 described above can be used to other devices, such as the high-frequency power supply device 61 or the like.
  • the current detector and the voltage detector are provided at an output terminal of the high-frequency power supply device 61 .
  • the current detector and the voltage detector are used to detect current and voltage required for controlling output forward wave power to have a set value.
  • the current detector and the voltage detector may detect current and voltage at the output terminal 63 b of the impedance matching device or the input terminal of the load 65 and may be used to control or analyze the detected current or voltage.
  • FIG. 34 is a circuit diagram showing a case where the current detector 80 and the voltage detector 90 are provided between the matching circuit and the output terminal in the impedance matching device.
  • the current detector 80 and the voltage detector 90 are provided on the power transmission conductor 68 between the matching circuit 67 and the output terminal 63 b in the impedance matching circuit. In this case, the current detector 80 and the voltage detector 90 detect current and voltage at the output terminal 63 b of the impedance matching circuit.
  • FIG. 34 the same parts as those of the circuit diagram in FIG. 31 are represented by the same reference numerals. Meanwhile, there is a difference in current and voltage at the input terminal 63 a and the output terminal 63 b of the impedance matching circuit. Accordingly, the current detector 80 and the voltage detector 90 have a structural difference in view of current resistance and voltage resistance. In FIG. 34 , the same reference numerals are used regardless of the structural difference. For example, the output terminal 63 b of the impedance matching circuit has higher current and voltage than the input terminal 63 a thereof.
  • the current detector 80 and the voltage detector 90 are provided at the output terminal 63 b of the impedance matching circuit, it is necessary to extend an insulation length, compared with a case where the current detector 80 and the voltage detector 90 are provided at the input terminal 63 a of the impedance matching circuit.
  • a conductor having a large diameter is used as the power transmission conductor 68 or the insulator 69 covering the periphery of the power transmission conductor 68 has a large thickness. In FIG. 34 , however, for convenience, the structural difference is not considered.
  • the current detector and the voltage detector are used in the impedance matching circuit, it is necessary to additionally provide a detector for detecting information of current and voltage for impedance matching on the input side of the impedance matching circuit.
  • Patent Document 1 JP-A-2003-302431
  • Patent Document 2 JP-A-2004-85446
  • the current transformer 81 constituting the current detector 80 is formed by winding the wire around the magnetic core, a variation in wiring interval or wiring strength may easily occur. For this reason, when a plurality of current detectors 80 are formed, a variation in detection value of the individual current detectors 80 may easily occur.
  • a variation in shape of the output wires 82 and 83 of the current transformer 81 may easily occur, which may cause a variation in current detection value.
  • the inner diameter of the ring-shaped conductor 91 b constituting the voltage detector 90 is substantially consistent with the outer diameter of the insulator 69 covering the periphery of the power transmission conductor 66 .
  • the ring-shaped conductor 91 b is fitted into the insulator 69 . That is, the ring-shaped conductor 91 b is positioned by the insulator 69 .
  • the insulator 69 may be thinned due to a secular change or the like. In this case, the position of the ring-shaped conductor 91 b may be unstable, and a gap may occur between the power transmission conductor 66 and the insulator 69 .
  • a variation in shape of the output wire 92 of the ring-shaped conductor 91 b may easily occur, which may cause a variation in voltage detection value.
  • the wire is wound around the core in the current transformer 81 constituting the current detector 80 , there is a self-resonant frequency by self inductance and line capacitance.
  • the self-resonant frequency becomes low. For this reason, an upper limit of a detectable frequency band becomes low. That is, the detectable frequency band is limited.
  • the impedance matching device In case of manufacturing the impedance matching device, when the current detector 80 and the voltage detector 90 are installed in the device, it is necessary to install the power transmission conductor 66 and the like simultaneously. However, there are many cases where the impedance matching device or the like is cramped. Accordingly, it may be difficult to install the power transmission conductor 66 and the like simultaneously due to interference with other parts. In addition, when the current detector 80 and the voltage detector 90 are removed for maintenance, since it is necessary to remove the power transmission conductor 66 and the like simultaneously, it may be difficult to remove the current detector 80 and the voltage detector 90 . For example, when the current detector 80 and the voltage detector 90 are disposed on the back side of the impedance matching device, it is necessary to remove the parts on the front side. At this time, in the configuration of the related art, since the volume of a portion to be removed becomes large, and thus it is necessary to remove more parts. As a result, a larger number of work steps are required.
  • a current detection printed board comprising:
  • At least one wire that is formed in a coiled shape having both ends by penetrating the board along the periphery of the cutout and alternately connecting a front surface layer and a rear surface layer of the board,
  • the wire may include: through holes formed at the penetrating portion of the board; and pattern wires formed on the front surface layer and the rear surface layer.
  • both ends or electrically identical portions of each wire may be electrically connectable to both ends or electrically identical positions of another wire.
  • At least one wire that is formed in a coiled shape and has both ends by penetrating between a top conductive layer and a bottom conductive layer of the board along the periphery of the cutout and alternately connecting the top conductive layer and the bottom conductive layer of the board, and/or
  • At least one wire that is formed in a coiled shape and has both ends by penetrating a part of layers of the board along the periphery of the cutout and alternately connecting a top conductive layer and a bottom conductive layer of the penetrating portion,
  • the wire may include: through holes formed at the penetrating portion penetrating between the top conductive layer and the bottom conductive layer of the board or the part of layers of the board; and pattern wires formed on the top conductive layer and the bottom conductive layer of the penetrating portion.
  • both ends or electrically identical portions of each wire may be electrically connectable to both ends or electrically identical positions of another wire.
  • the cutout may have a substantially semicircular shape.
  • the AC current may be an AC current having a frequency of a radio frequency band.
  • a voltage detection printed board comprising:
  • the wire when a conductor, in which an AC voltage is generated, is disposed adjacent to the cutout, the wire ma function as an electrode of a capacitor by making a pair with a portion of the conductor facing the wire.
  • the wire may include: along the periphery of the cutout, a plurality of through holes penetrating the board; and pattern wires formed on a front surface layer and a rear surface layer of the board so as to connect the through holes.
  • the wire may include: along the periphery of the cutout, a plurality of through holes penetrating between the top conductive layer and the bottom conductive layer of the board or a part of layers of the board; and a pattern wire formed on at least one layer between the top conductive layer and the bottom conductive layer of the penetrating portion so as to connect the through holes.
  • the through holes may have a substantially semicircular shape.
  • the AC voltage may be an AC voltage having a frequency of a radio frequency band.
  • a current/voltage detection printed board comprising:
  • At least one first wire that is formed in a coiled shape and has both ends by penetrating the board along the periphery of a substantially half of the penetration hole and alternately connecting a top conductive layer and a bottom conductive layer of the board, and/or
  • At least one wire that is formed in a coiled shape and has both ends by penetrating a part of layers of the board along the periphery of the substantially half of the penetration hole and alternately connecting a top conductive layer and a bottom conductive layer of the penetrating portion;
  • a second wire for output that is connected to all or a part of both ends of the first wire
  • a current detection portion that functions to output a current flowing in the first wire through electromagnetic induction when the power transmission conductor, in which an AC current flows, is disposed to pass through the penetration hole;
  • a voltage detection portion that functions to output a voltage generated in the third wire from the fourth wire when the power transmission conductor, in which an AC voltage is generated, is disposed to pass through the second penetration hole, and the third wire makes a pair with a portion of the power transmission conductor facing the third wire and functions as an electrode of a capacitor.
  • the first wire may include: through holes formed at the penetrating portion penetrating between the top conductive layer and the bottom conductive layer of the board or the part of layers of the board; and pattern wires formed on the top conductive layer and the bottom conductive layer of the penetrating portion.
  • the third wire may include: along the periphery of the penetration hole, a plurality of through holes penetrating between the top conductive layer and the bottom conductive layer of the board or a part of layers of the board; and a pattern wire formed on at least one layer between the top conductive layer and the bottom conductive layer of the penetrating portion so as to connect the through holes.
  • both ends or electrically identical portions of each wire may be electrically connectable to both ends or electrically identical positions of another wire.
  • a current/voltage detector that detects an AC current flowing in a power transmission conductor to be used as an AC power transmission path and an AC voltage generated in the power transmission conductor, the current/voltage detector comprising:
  • a current detection printed board having a first cutout including:
  • a voltage detection printed board having a second cutout including:
  • the first wire may include: through holes formed at the penetrating portion penetrating between the top conductive layer and the bottom conductive layer of the board or the part of layers of the board; and pattern wires formed on the top conductive layer and the bottom conductive layer of the penetrating portion.
  • the third wire may include: along the periphery of the second cutout, a plurality of through holes penetrating between the top conductive layer and the bottom conductive layer of the board or a part of layers of the board; and a pattern wire formed on at least one layer between the top conductive layer and the bottom conductive layer of the penetrating portion so as to connect the through holes.
  • both ends or electrically identical portions of each wire may be electrically connectable to both ends or electrically identical positions of another wire.
  • the current/voltage detector may further comprise:
  • a first conversion circuit that converts the current output from the second wire of the current detection printed board into a predetermined voltage level
  • the first conversion circuit may be provided on the current detection printed board, and
  • the second conversion circuit may be provided on the voltage detection printed board.
  • the current/voltage detector may further comprise: a conductor casing that fixes the current detection printed board and the voltage detection printed board therein,
  • casing may have:
  • the casing may be configured to cover the current detection printed board and the voltage detection printed board, excluding the openings.
  • the casing may include:
  • first casing and the second casing may be disposed such that the first cutout provided in the current detection printed board and the second cutout provided in the voltage detection printed board may be substantially coaxially located.
  • the casing may include:
  • first cutout provided in the current detection printed board and the second cutout provided in the voltage detection printed board may be substantially the same size, and the first casing and the second casing may be disposed such that the first cutout and the second cutout are combined to be opposed to each other and the combined portion has a substantially circular shape.
  • a shield member that reduces the amount of an electromagnetic wave entering from a side of the first wire into a side of the first conversion circuit may be provided in at least one of the first casing and the first cover, and
  • a shield member that reduces the amount of an electromagnetic wave entering from a side of the third wire into a side of the second conversion circuit may be provided in at least one of the second casing and the second cover.
  • the first casing and the second casing may be formed in a single body.
  • the casing may include a fixing unit that substantially fixes the relative position between the power transmission conductor, and the current detection printed board and the voltage detection printed board.
  • the first cutout and the second cutout may have a substantially semicircular shape.
  • the AC power may be AC power having a frequency of a radio frequency band.
  • a current detector that detects an AC current flowing in a power transmission conductor to be used as an AC power transmission path, the current detector comprising:
  • a current detection printed board having a first cutout including:
  • the current detection printed board may function to output a current flowing in the first wire through electromagnetic induction.
  • the current detector may comprise:
  • the first conversion circuit may be provided on the current detection printed board.
  • the current detector may further comprise a conductor casing that fixes the current detection printed board therein,
  • casing may have:
  • the casing may be configured to cover the current detection printed board, excluding the openings.
  • the first cutout may have a substantially semicircular shape.
  • the AC power may be AC power having a frequency of a radio frequency band.
  • a voltage detector that detects an AC voltage generated in a power transmission conductor to be used as an AC power transmission path, the voltage detector may comprise:
  • a voltage detection printed board having a first cutout including:
  • the voltage detector may further comprise:
  • the first conversion circuit may be provided on the voltage detection printed board.
  • the voltage detector may further comprise: a conductor casing that fixes the voltage detection printed board therein,
  • casing may have:
  • the casing may be configured to cover the voltage detection printed board, excluding the openings.
  • the first cutout may have a substantially semicircular shape.
  • the AC power may be AC power having a frequency of a radio frequency band.
  • the printed board can have a function of a current transformer.
  • the through holes and pattern wires form the coiled wire, unlike the related art, there is no case where a self-resonant frequency or a degree of coupling of the current transformer changes due to a variation in winding internal or winding strength. For this reason, when a plurality of current detection printed boards are formed, a variation in current detection value of the individual current detection printed boards can be reduced.
  • the wire that is formed along the cutout provided in the board functions as an electrode of the capacitor. Therefore, the printed board can have a voltage detection function.
  • a wire that functions as an electrode of the capacitor can be formed in the printed board. Therefore, when a plurality of voltage detection printed boards are formed, a variation in voltage detection value of the individual voltage detection printed boards can be reduced.
  • the wire has a feature in that the through holes are utilized, as well as the pattern wires. That is, only with the pattern wires, the wire does not have a thickness enough to functioning as an electrode of the capacitor. For this reason, with the through holes, the thickness of the wire can be made large.
  • a structural variation may have a large effect on the voltage detection value.
  • the voltage detection printed board having the configuration of the invention even though an AC voltage having a frequency of a radio frequency band is adopted, an influence thereof can be suppressed to the minimum.
  • one printed board has both a current detection function and a voltage detection function. Therefore, since a current and a voltage are detected at substantially the same position with respect to the axial direction of the power transmission conductor, the detection accuracy of the phase difference can be improved.
  • the current detection can be executed by the current detection printed board and the voltage detection can be executed by the voltage detection printed board.
  • the current detection can be executed by the current detection printed board.
  • the voltage detection can be executed by the voltage detection printed board.
  • the second wire and the fourth wire can be formed by pattern wires (as occasion demands, including through holes). Accordingly, a variation in detection value due to a variation in shape of the wire or the like can be reduced. Further, the number of assembling steps can be reduced.
  • the effects of the thirty-fourth aspect of the invention are the same as the effects about the second wire.
  • the effects of the forty aspect of the invention are the same as the effects about the fourth wire.
  • the printed boards are shielded, excluding the openings required for the current detection printed board and openings required for the voltage detection printed board. Therefore, an influence of an electromagnetic wave on the printed boards can be reduced as small as possible.
  • the effects of the thirty-fifth aspect of the invention are the same as the effects about the current detection printed board.
  • the effects of the forty-first aspect of the invention are the same as the effects about the voltage detection printed board.
  • a current and a voltage are detected at substantially the same position with respect to the axial direction of the power transmission conductor, the detection accuracy of the phase difference can be improved.
  • an influence of an electromagnetic wave on the first conversion circuit and an influence of an electromagnetic wave on the second conversion circuit can be reduced as small as possible.
  • the relative position of the current detection printed board and the voltage detection printed board are kept substantially constant.
  • the first cutout provided in the current detection printed board and the second cutout provided in the voltage detection printed board are set on substantially the same axis, the first casing and the second casing are formed in a signal body. Therefore, the number of steps of substantially coaxially locating the first cutout and the second cutout can be removed.
  • the relative position between the power transmission conductor, and the current detection printed board and the voltage detection printed board can be kept substantially constant.
  • the effects of the thirty-seventh aspect of the invention are the same as the effects about current detection.
  • the effects of the forty-third aspect of the invention are the same as the effects about voltage detection.
  • FIGS. 1A to 1D are diagrams showing an example of a current detection printed board 1 according to the invention.
  • FIG. 2 is a diagram showing a case where a power transmission conductor 66 , in which an AC current flows, and an insulator 69 covering the power transmission conductor 66 are disposed adjacent to a cutout 101 provided in the current detection printed board 1 .
  • FIGS. 3A to 3E are diagrams showing another example of the current detection printed board 1 according to the invention.
  • FIGS. 4A and 4B are diagram showing another example of a coiled wire 10 .
  • FIG. 5 is diagram showing another example of the current detection printed board 1 according to the invention.
  • FIG. 6 is a connection diagram of the current detection printed board 1 shown in FIG. 5 .
  • FIG. 7 is a diagram showing another example of the current detection printed board 1 according to the invention.
  • FIGS. 8A to 8E are diagrams showing the arrangement examples of the first coiled wire 10 - 1 and the second coiled wire 10 - 2 .
  • FIGS. 9A to 9D are diagrams showing an example of a voltage detection printed board 2 according to the invention.
  • FIGS. 10A to 10E are diagrams showing another example of the voltage detection printed board 2 according to the invention.
  • FIGS. 11A and 11B show another example of a substantially smirching-shaped wire 30 .
  • FIGS. 12A to 12C are schematic exterior views of a current/voltage detector 3 according to a third embodiment of the invention.
  • FIGS. 13A and 13B are diagrams showing the schematic configuration of the current/voltage detector 3 shown in FIGS. 12A to 12C .
  • FIGS. 14A to 14C are diagrams of a casing main body 300 .
  • FIGS. 15A and 15B are diagrams three-dimensionally showing the casing main body 30 .
  • FIGS. 16A and 16B are diagrams when the current detection printed board 1 and the voltage detection printed board 2 are mounted on the casing main body 300 in a state where a current detector cover 301 and a voltage detector cover 302 are not mounted.
  • FIG. 17 is a cross-sectional view showing a case where the power transmission conductor 66 and the insulator 69 covering the power transmission conductor 66 penetrate the current/voltage detector 3 .
  • FIGS. 18A and 18B show an example of an application of a second shield portion 314 .
  • FIGS. 19A and 19B are explanation diagrams of when the current/voltage detector 3 is attached.
  • FIG. 20 show a modification of the current detection printed board 1 , the voltage detection printed board 2 , and the casing.
  • FIG. 21 is a diagram showing an example where the current detection printed board 1 and the voltage detection printed board 2 are accommodated in separate casings, thereby forming the current detector 310 and the voltage detector 320 separately.
  • FIG. 22 is a diagram showing an application when the current detector 310 and the voltage detector 320 are provided separately.
  • FIG. 23 is a diagram showing a case where the voltage detector 320 is disposed near the input and the current detector 310 is disposed at the back of the voltage detector 320 .
  • FIG. 24 is a diagram showing an application of the current detection printed board 1 and the voltage detection printed board 2 according to the invention.
  • FIG. 25 is a diagram showing a state where the current detector 310 and the voltage detector 320 are disposed such that recess portions 304 of substantially semicircular cylinder provided in individual casings are opposed to each other.
  • FIG. 26 is a cross-sectional diagram of a casing where the current detection printed board 1 and voltage detection printed board 2 are provided in one casing.
  • FIG. 27 is a diagram of a current/voltage detection printed board 4 having a current detection function and a voltage detection function in one board.
  • FIG. 28 is a diagram showing a fixing method of the insulator 69 .
  • FIG. 29 is a diagram showing the case where the power transmission conductor 66 and the insulator 69 are a part of the current/voltage detector 3 .
  • FIG. 30 is a block diagram of an example of a high-frequency power supply system that uses an impedance matching device.
  • FIG. 31 is a schematic circuit diagram of a current detector 80 and a voltage detector 90 provided between an input terminal and a matching circuit 67 of an impedance matching device 63 .
  • FIG. 32 is a schematic exterior view of the current detector 80 and the voltage detector 90 .
  • FIGS. 33A to 33C are explanatory views illustrating the configuration of the current detector 80 and the voltage detector 90 shown in FIG. 32 .
  • FIG. 34 is a circuit diagram showing a case where the current detector 80 and the voltage detector 90 are provided between the matching circuit and the output terminal in the impedance matching device.
  • FIGS. 1A to 1D are diagrams showing an example of a current detection printed board 1 according to the invention.
  • FIG. 1A is a plan view of the current detection printed board 1 (as viewed from the above).
  • FIG. 1B is a schematic view of a portion (a portion A surrounded by a dotted line) of FIG. 1A on magnified scale (viewed from a direction of a cutout 101 ).
  • FIG. 1C is a diagram showing linear expansion for simplification of FIG. 1B .
  • FIG. 1D shows a wire of the current detection printed board 1 when FIG. 1C is viewed from the side.
  • portions that are not typically viewed are shown in perspective view for explanation.
  • the current detection printed board 1 is provided with a substantially semicircular cutout 101 .
  • a wire 10 (hereinafter, referred to as a coiled wire 10 ) that is formed in a coiled shape is provided along the periphery of the cutout 101 .
  • the coiled wire 10 is formed in a coiled shape having both ends by alternately connecting a front surface 121 and a rear surface 122 of the board while penetrating the board. Portions of the wire penetrating the board are formed by through holes 11 and wires of the front surface and the rear surface of the board are formed by pattern wires 12 and 13 .
  • portions indicated by dotted lines represent pattern wires of the rear surface of the board. These portions are in perspective view, and thus indicated by dotted lines.
  • Output wires 21 and 22 are connected to both ends 10 a and 10 b of the coiled wire 10 .
  • the output wires are connected to output terminals 23 and 24 .
  • the board having a double-sided structure (hereinafter, referred to a double-sided board) is used. Accordingly, the pattern wires are formed on a front surface layer and a rear surface layer of one insulator member 110 .
  • the coiled wire 10 is an example of a coiled first wire of the invention, and the output wires 21 and 22 are examples of the second wire of the invention.
  • FIG. 2 is a diagram showing a case where a power transmission conductor 66 , in which an AC current flows, and an insulator 69 covering the power transmission conductor 66 are disposed adjacent to the cutout 101 provided in the current detection printed board 1 . Moreover, for simplification, the wire is not shown. Further, in this embodiment and the following embodiments, a case where the current detection printed board or a voltage detection printed board described below is provided between an input terminal and a matching circuit 67 of an impedance matching device 63 .
  • the printed board can have a current transformer.
  • a current transformer can be formed in the current detection printed board 1 .
  • the power transmission conductor 66 is regarded as being disposed adjacent to the cutout 101 . Further, it also applies to a voltage detection printed board 2 as described hereinafter.
  • the portions of the coiled wire 10 correspond to the current transformer 81 in the circuit diagram shown in FIG. 31 .
  • the portions of the coiled wire 10 are formed by the through holes and the pattern wires, and thus there is almost no variation in shape or position. Accordingly, there is almost no variation in winding interval or winding strength. Therefore, when a plurality of current detection printed boards 1 are formed, a variation in current detection value of the individual current detection printed boards 1 can be reduced.
  • a current conversion circuit 51 corresponding to the current conversion circuit 84 shown in FIG. 31 may be provided on the current detection printed board 1 of FIG. 1 .
  • the output terminals 23 and 24 shown in FIG. 1 are not required, and the output wires 21 and 22 of the coiled wire 10 are directly connected to the current conversion circuit 51 .
  • the insulator member 110 of the board is formed of, for example, glass epoxy. Relative magnetic permeability of the insulator member 110 of the board is smaller than a magnetic material. For this reason, a self-resonant frequency may be higher, compared with a case where a current transformer is formed by winding a wire around a magnetic material uses as a core, like the related art. Accordingly, an upper limit of a detectable frequency band is higher than the related art.
  • FIGS. 3A to 3E are diagrams showing another example of the current detection printed board 1 according to the invention.
  • FIG. 3A is a plan view of the current detection printed board 1 .
  • FIG. 3B is a schematic view of a portion (a portion B surrounded by a dotted line) of FIG. 3A on magnified scale (viewed from a direction of the cutout 101 ).
  • FIG. 3C is a diagram showing linear expansion for simplification of FIG. 3B .
  • FIG. 3D shows a wire of the current detection printed board 1 when FIG. 3C is viewed from the side.
  • FIG. 3E shows the wire of the current detection printed board 1 paying emphasis on the output wire 21 or the like as viewed from the side.
  • portions that are not typically viewed are shown in perspective view for explanation.
  • the current detection printed board 1 , through holes 11 , pattern wires 12 and 13 , and the like are represented by the same reference numerals as those in FIGS. 1A to 1D .
  • the current detection printed board 1 shown in FIGS. 3A to 3E is specifically the same as the current detection printed board 1 shown in FIGS. 1A to 1D , except that the board has a multilayer structure, and the coiled wire 10 is formed between inner layers.
  • insulator materials constituting the board having a multilayer structure are appropriately called a first insulator material, a second insulator material, a third insulator material, . . . in sequence from the upper portion of the drawings.
  • conductive layers to be formed between the individual insulator materials of the board are appropriately called a first conductive layer, a second conductive layer, a third conductive layer, . . . .
  • a conductive layer to be formed at the front surface of the board is called a front surface layer
  • a conductive layer to be formed at the rear surface of the board is called a rear surface layer.
  • the double-sided board has the front surface layer and the rear surface layer and may be called a multilayer board, since only one insulator material exists, there are no conductive layers to be formed between the individual insulator materials of the board.
  • the insulator materials of the board include three insulator materials of a first insulator material 111 , a second insulator 112 , and a third insulator material 113 . Then, a first conductive layer 131 is formed between the first insulator material 111 and the second insulator material 112 , and a second conductive layer 132 is formed between the second insulator material 112 and the third insulator material 113 . Further, a front surface layer can be formed on a front surface 121 (a surface on the first insulator material) of the board. In addition, a rear surface layer can be formed on a rear surface 122 (a lower surface of the third insulator material). In the example of FIGS. 3A to 3E , the rear surface layer of the board is not provided.
  • the coiled wire 10 is formed between the first conductive layer 131 and the second conductive layer 132 . Accordingly, the coiled wire 10 can have a structure that cannot be viewed from the outside of the board. In this case, portions of the coiled wire 10 correspond to the current transformer 81 of the circuit diagram shown in FIG. 31 .
  • the output wire 21 of the coiled wire 10 is formed by a pattern wire 21 a connected to one end 10 a of the coiled wire 10 formed in the first conductive layer 131 , a through hole 21 b , and a pattern wire 21 C formed on the front surface of the board.
  • the output wire 21 is connected to the output terminal 23 .
  • the output wire 22 of the coiled wire 10 is the same as the output wire 21 , and thus the description thereof will be omitted.
  • the current conversion circuit 51 corresponding to the current conversion circuit 84 shown in FIG. 31 may be formed on thee current detection printed board 1 of FIGS. 3A to 3E .
  • the output terminals 23 and 24 shown in FIGS. 3A to 3E are not required, and thus the output wires 21 and 22 of the coiled wire 10 are directly connected to thee current conversion circuit 51 .
  • the length of the output wire 21 shown in FIG. 3A and the length of the output wire 21 shown in FIG. 3E are different, it is caused just for simplification of the figure.
  • FIGS. 4A and 4B are diagram showing another example of the coiled wire 10 .
  • the coiled wire 10 may be formed between the front surface layer of the board and the second conductive layer 132 .
  • the coiled wire 10 is formed by alternately connecting the front surface layer as a top conductive layer of the board and the second conductive layer 132 as a bottom conductive layer of the board.
  • the coiled wire 10 may be formed between the front surface layer as a top conductive layer and the rear surface layer as a bottom conductive layer of the board. Moreover, in FIG. 4B , like FIGS. 1A to 1D , the coiled wire 10 is formed by alternately connecting the front surface layer and the rear surface layer of the board.
  • a through hole is one for connection between layers by forming a penetration hole between the layers of the board and providing a conductive layer (for example, copper) in the penetration hole.
  • a conductive layer for example, copper
  • the term ‘between the layers’ may mean ‘between all layers’ or ‘between some layers’.
  • the through hole is a type of inserting a lead line.
  • the through hole only for connection between the layers is particularly called a via hole.
  • the via hole includes a penetration via hole that forms a penetration hole from the front surface of the board to the rear surface thereof, and an interstitial via hole that forms a penetration hole only between specific layers.
  • the interstitial via hole includes a blind via in which a hole is viewed from one surface of the board, as shown in FIG. 4A , and a buried via in which a hole is viewed from both surfaces of the board, as shown in FIGS. 3A to 3E .
  • FIGS. 3A to 3E and 4 uses a so-called four-layered board (four conductive layers including the front surface layer and the rear surface layer), but is not intended to limit the invention.
  • a multilayer board such as a three-layered board, a six-layered board, or an eight-layered board, may be used.
  • FIG. 5 is diagram showing another example of the current detection printed board 1 according to the invention.
  • the current detection printed board 1 shown in FIG. 5 is different from that of FIG. 1 in that two coiled wires 10 - 1 and 10 - 2 are provided in the current detection printed board 1 .
  • a first coiled wire 10 - 1 and a second coiled wire 10 - 2 that is disposed closer to the cutout 101 than the first coiled wire 10 - 1 are provided in the current detection printed board 1 .
  • the first coiled wire 10 - 1 and the second coiled wire 10 - 2 are formed by through holes and pattern wires, like FIGS. 1B to 1D . For this reason, the descriptions thereof will be omitted.
  • the multilayer board shown in FIGS. 3A to 3E may be used. Here, the description thereof will be omitted.
  • FIG. 6 is a connection diagram of the current detection printed board 1 shown in FIG. 5 .
  • output terminals 23 - 1 and 24 - 1 are connected to both ends 10 - 1 a and 10 - 1 b of the first coiled wire 10 - 1 through the output wires 21 - 1 and 22 - 1 .
  • output terminals 23 - 2 and 24 - 2 are connected to both ends 10 - 2 a and 10 - 2 b of the second coiled wire 10 - 2 through the output wires 21 - 2 and 22 - 2 .
  • various kinds of current transformers can be formed in one current detection printed board 1 .
  • ‘x’ means non-connection to other terminals.
  • a current transformer using the first coiled wire 10 - 1 is formed in the current detection printed board 1 .
  • a current transformer using the second coiled wire 10 - 2 is formed in the current detection printed board 1 .
  • the output wires 21 - 2 and 22 - 2 are not necessary.
  • the output wires 21 - 2 and 22 - 2 are not necessary. Therefore, unnecessary output wires and output terminals may not be provided.
  • FIG. 7 is a diagram showing another example of the current detection printed board 1 according to the invention.
  • the current detection printed board 1 like FIG. 5 , the first coiled wire 10 - 1 and the second coiled wire 10 - 2 are provided in one current detection printed board 1 .
  • the current detection printed board 1 of FIG. 7 is different from that of FIG. 5 in that the first coiled wire 10 - 1 and the second coiled wire 10 - 2 are disposed to have a double helix structure.
  • various kinds of current transformers can be formed in one current detection printed board 1 .
  • FIGS. 5 and 7 for ease discrimination of the wires, the positions of the output terminals are shifted from each other, but the invention is not limited thereto. Various kinds of position relationship may be adopted.
  • the first coiled wire 10 - 1 and the second coiled wire 10 - 2 can be arranged to have a double helix structure.
  • many arrangement examples may be considered, in addition to the example shown in FIG. 7 .
  • FIGS. 8A to 8E are diagrams showing the arrangement examples of the first coiled wire 10 - 1 and the second coiled wire 10 - 2 .
  • FIGS. 8A to 8E schematically show the sections of the first coiled wire 10 - 1 and the second coiled wire 10 - 2 and show various arrangement examples.
  • the first coiled wire 10 - 1 and the second coiled wire 10 - 2 are shifted from each other with respect to a backward direction as viewed from the paper. Since portions that are not typically viewed are shown in perspective view for explanation, the wires may seem to overlap each other.
  • FIG. 8A shows an example where the first coiled wire 10 - 1 and the second coiled wire 10 - 2 are formed in the same conductive layer.
  • the pattern wire of the first coiled wire 10 - 1 is longer than that of the second coiled wire 10 - 2 .
  • the pattern wire of the second coiled wire 10 - 2 may be longer than that of the first coiled wire 10 - 1 .
  • FIG. 8B shows an example where the first coiled wire 10 - 1 and the second coiled wire 10 - 2 are formed in the same conductive layer, like FIG. 8A .
  • the pattern wires of the first coiled wire 10 - 1 and the second coiled wire 10 - 2 have the same length.
  • FIG. 8C shows an example where the through hole of the second coiled wire 10 - 2 is formed further towards the inside than the first coiled wire 10 - 1 , and the pattern wire of the second coiled wire 10 - 2 is formed in a conductive layer inside the first coiled wire 10 - 1 .
  • FIG. 8D shows an example where the through hole of the second coiled wire 10 - 2 is formed further towards the inside than the first coiled wire 10 - 1 , and the pattern wire of the second coiled wire 10 - 2 is formed in a conductive layer outside the first coiled wire 10 - 1 .
  • FIG. 8E shows an example where the through hole of the second coiled wire 10 - 2 is formed further towards the outside than the first coiled wire 10 - 1 , and the pattern wire of the second coiled wire 10 - 2 is formed in a conductive layer inside the first coiled wire 10 - 1 .
  • FIGS. 8A to 8E as the current detection printed board 1 is viewed in plan view, the through holes and the pattern wires of the first coiled wire 10 - 1 and the second coiled wire 10 - 2 are shifted from each other. With this configuration, various arrangement examples can be made. Alternatively, as shown in FIG.
  • the pattern wires of the first coiled wire 10 - 1 and the second coiled wire 10 - 2 may be partially overlap each other.
  • the relationship between the first coiled wire 10 - 1 and the second coiled wire 10 - 2 may be reversed.
  • FIGS. 5 and 7 an example where the two coiled wires 10 are provided in one current detection printed board 1 has been illustrated, but the number of coiled wires is not limited thereto.
  • three or more coiled wires 10 may be provided in one current detection printed board 1 .
  • the number of combinations of the coiled wires 10 to be formed in one current detection printed board 1 can be increased.
  • the wires may be connected near both ends of the coiled wires 10 or may be connected in the current conversion circuit 51 . That is, both ends of each wire or positions electrically identical to both ends thereof are electrically connectable to both ends of another wire or positions electrically identical to both ends thereof.
  • a coil also referred to as an inductor
  • the characteristic changes according to a frequency to be used.
  • a detection level of a current is low in a region where a frequency is low. For this reason, the coil is used in a region where a frequency is high.
  • an excessively high frequency causes resonance.
  • a frequency at the time of resonance is referred to as a resonant frequency. Near the resonant frequency, a change in detection level of a current is excessively large, and thus it is unsuitable for current detection. For this reason, schematically, a detectable frequency band is limited. That is, a usable frequency has an upper limit and a lower limit.
  • inductance of the coil becomes large, the detectable frequency band goes toward a lower frequency. Meanwhile, if inductance of the coil becomes small, the detectable frequency band goes toward a higher frequency. For this reason, it is necessary to select inductance of the coiled wire 10 to an appropriate value using a frequency of an AC current flowing in the power transmission conductor 66 .
  • the above-described high-frequency power supply device 61 outputs different frequencies of high-frequency power according to the uses. For example, a frequency of 2 MHz, 13.56 MHz, or the like is used according to the uses. For this reason, since it is necessary to select inductance of the coiled wire 10 according to the frequencies. Accordingly, if various kinds of current transformers can be formed in one current detection printed board 1 , convenience can be increased. For example, if both the current transformer for 2 MHz and the current transformer for 13.56 MHz can be formed, it is unnecessary to prepare the current detection printed boards 1 for the individual frequencies. Therefore, kinds of products can be reduced.
  • FIGS. 9A to 9D are diagrams showing an example of a voltage detection printed board 2 according to the invention.
  • FIG. 9A is a plan view of the voltage detection printed board 2 .
  • FIG. 9B is a schematic view of a portion (a portion C surrounded by a dotted line) of FIG. 9A on magnified scale (viewed from a direction of a cutout 201 ).
  • FIG. 9C is a diagram showing linear expansion for simplification of FIG. 9B .
  • FIG. 9D shows a wire of the voltage detection printed board 2 when FIG. 9C is viewed from the side.
  • portions that are not typically viewed are shown in perspective view for explanation.
  • the voltage detection printed board 2 has a cutout 201 , and a substantially smirching-shaped wire 30 that is provided in the vicinity of the penetration hole 201 .
  • the substantially smirching-shaped wire 30 is formed by, along the periphery of the cutout 201 , providing a plurality of through holes 31 that penetrate the board and patterns wires 32 and 33 that connect the through holes to a front surface 221 and a rear surface 222 of the board. For this reason, the individual through holes are provided between the pattern wires 32 and 33 of the front surface of the rear surface of the board. Further, the thickness of each of the through holes is formed to have the substantially same thickness as the thickness of the board. In such a manner, the substantially smirching-shaped 30 is obtained.
  • the pattern wires 32 and 33 of the front surface and the rear surface of the board overlap each other. Further, an output wire 40 is connected to the substantially smirching-shaped wire 30 .
  • the substantially semiring-shaped wire 30 and a portion of the power transmission conductor 66 facing the substantially semiring-shaped wire 30 function as electrodes of a capacitor. That is, the printed board can have a function as the electrodes of the capacitor. Accordingly, portions of the substantially semiring-shaped wire 30 correspond to the electrode 91 b of the capacitor of the circuit diagram in FIG. 31 .
  • the portions of the substantially semiring-shaped wire 30 are formed by the through holes 31 or the pattern wires 32 and 33 . Accordingly, there is almost no variation in shape or position. Therefore, when a plurality of voltage detection printed boards 2 are formed, a variation in voltage detection value of the individual voltage detection printed boards 2 can be reduced.
  • a voltage conversion circuit 53 corresponding to the voltage conversion circuit 93 shown in FIG. 31 may be provided on the voltage detection printed board 2 of FIGS. 9A to 9D .
  • an output terminal 41 shown in FIGS. 9A to 9D is not required, and thus the output wire 40 of the substantially semiring-shaped wire 30 is directly connected to the voltage conversion circuit 53 .
  • the substantially semiring-shaped wire 30 is an example of a third wire of the invention (a first wire in the case of a voltage detector), and the output wire 40 is an example of a fourth wire of the invention (a second wire in the case of a voltage detector).
  • FIGS. 10A to 10E are diagrams showing another example of the voltage detection printed board 2 according to the invention.
  • FIG. 10A is a plan view of the voltage detection printed board 2 .
  • FIG. 10B is a schematic view of a portion (a portion D surrounded by a dotted line) of FIG. 10A on magnified scale (viewed from a direction of the cutout 201 ).
  • FIG. 10C is a diagram showing linear expansion for simplification of FIG. 10B .
  • FIG. 10D shows a wire of the voltage detection printed board 2 when FIG. 10C is viewed from the side.
  • FIG. 10E shows the wire of the voltage detection printed board 2 paying emphasis on the output wire 40 as viewed from the side.
  • portions that are not typically viewed are shown in perspective view for explanation.
  • the voltage detection printed board 2 , through holes 31 , pattern wires 32 and 33 , and the like are represented by the same reference numerals as those in FIGS. 9A to 9D .
  • the voltage detection printed board 2 shown in FIGS. 10 A to 10 E is specifically the same as the voltage detection printed board 2 shown in FIGS. 9A to 9D , except that the board has a multilayer structure, and the substantially semiring-shaped wire 30 is formed between inner layers. This is the same as FIGS. 3A to 3E , and the description thereof will be omitted.
  • the substantially semiring-shaped wire 30 is formed between a first conductive layer 231 and a second conductive layer 232 . Accordingly, the substantially semiring-shaped wire 30 may not be viewed. Further, in this case, the portions of the substantially semiring-shaped wire 30 correspond to the electrode 91 b of the capacitor of the circuit diagram in FIG. 31 .
  • the substantially semiring-shaped wire 30 is formed by pattern wires 40 a connected to one end 30 a of the ring-shaped wire 30 formed in the first conductive layer 231 , through holes 40 b , and pattern wires 40 c formed on the front surface of the board 40 c, as shown in FIG. 10E .
  • the output wire 40 is connected to an output terminal 41 .
  • the substantially semiring-shaped wire 30 may be formed.
  • FIGS. 11A and 11B show another example of the substantially semiring-shaped wire 30 .
  • FIG. 11A shows an example where an additional pattern wire for connecting the through holes is provided between a top conductive layer and a bottom conductive layer at penetration portions of the through holes 31 .
  • four pattern wires of a pattern wire 34 , a pattern wire 35 , a pattern wire 36 , and a pattern wire 37 are provided in sequence from the upper portion of the board. As such, three or more pattern wires may be provided.
  • FIG. 11B shows an example where a pattern wire 38 is provided in only one layer between the top conductive layer and the bottom conductive layer at the penetration portions of the through holes 31 . As such, only one pattern wire may be provided.
  • a pattern wire may be provided in at least one layer between the top conductive layer and the bottom conductive layer at the penetration portions of the through holes so as to connect the through holes.
  • the portions of the substantially semiring-shaped wire 30 correspond to the electrode 91 b of the capacitor of the circuit diagram in FIG. 31 .
  • FIGS. 12A to 12C are schematic exterior views of a current/voltage detector 3 according to a third embodiment of the invention.
  • FIG. 12A is a schematic exterior view three-dimensionally showing the current/voltage detector 3 .
  • FIG. 12B is a schematic exterior view of a conductor casing as viewed from the side.
  • FIG. 12C is a diagram when the conductor casing of FIG. 12B is removed.
  • the current/voltage detector 3 is provided with a recess portion 304 of a substantially semicircular cylinder shape and has a structure in which a power transmission conductor 66 and an insulator 69 surrounding the power transmission conductor 66 can be disposed adjacent to the recess portion 304 of a substantially semicircular cylinder shape.
  • the power transmission conductor 66 and the insulator 69 surrounding the power transmission conductor 66 are not included in the current/voltage detector 3 but are just shown for explanation.
  • the insulator 69 insulates the power transmission conductor 66 and the current/voltage detector 3 . For this reason, an actual length of the insulator 69 is shorter than the length of the insulator 69 shown in the drawing, but it is shown like FIG. 12A for simplification of the drawing. The same is applied to other drawings (for example, FIG. 17 ).
  • the current detection printed board 1 and the voltage detection printed board 2 are accommodated in the casing. For this reason, a current that flows in the power transmission conductor 66 disposed adjacent to the recess portion 304 of a substantially semicircular cylinder shape provided at the casing can be detected by the current detection printed board 1 , and a voltage that is generated in the power transmission conductor 66 can be detected by the voltage detection printed board 2 .
  • a left portion of the current/voltage detector 3 corresponds to a current detector 310 and a right portion thereof corresponds to a voltage detector 320 .
  • the casing is formed of a conductor, such as aluminum or the like. Then, the current detector 310 corresponds to the current detector 80 shown in FIG. 31 , and the voltage detector 320 corresponds to the voltage detector 90 shown in FIG. 31 .
  • FIGS. 13A and 13B are diagrams showing the schematic configuration of the current/voltage detector 3 shown in FIGS. 12A to 12C .
  • FIG. 13A is a diagram showing the configuration of the current/voltage detector 3 .
  • FIG. 13B is a schematic view showing when individual parts of FIG. 13A are assembled.
  • the shapes of the individual parts are schematic. For example, a cutout of a substantially semicircular shape, a recess portion 304 of a substantially semicircular cylinder or an opening through which a magnetic flux passes is provided in the casing or the board, but it is not shown in the drawings.
  • portions that are not viewed from the outside are schematically indicated by dotted lines.
  • the current/voltage detector 3 has a casing main body 300 , and the current detection printed board 1 , the voltage detection printed board 2 , a current detector cover 301 , and a voltage detector cover 302 that are fixed to the casing main body 300 .
  • parts, such as screws or beads, for fixing the above-described constituents but they are regarded as portions of the constituents and are not shown for simplification of explanation.
  • the current detection printed board 1 and the voltage detection printed board 2 are fixed in the casing main body 300 , and the current detection printed board 1 and the voltage detection printed board 2 are covered with the covers 301 and 302 , respectively.
  • a portion where the current detection printed board 1 is fixed is an example of a first casing of the invention
  • a portion where the voltage detection printed board 2 is fixed is an example of a second casing of the invention (a first cover in the case of a voltage detector).
  • the current detector cover 301 is an example of a first cover of the invention
  • the voltage detector cover 302 is an example of a second cover of the invention (a first cover in the case of a voltage detector).
  • the current detection printed board 1 and the voltage detection printed board 2 are disposed in the casing.
  • the casing main body 300 is common to the current detection printed board 1 and the voltage detection printed board 2 .
  • the voltage detection printed board 2 is fixed on the rear surface thereof. Accordingly, the current detection printed board 1 and the voltage detection printed board 2 are accommodated in separate spaces, respectively. Therefore, there is almost no mutual interference between the current detection printed board 1 and the voltage detection printed board 2 , and detection accuracy increases.
  • FIGS. 14A to 14C are diagrams of the casing main body 300 .
  • FIG. 14A is a diagram as viewed from a side on which the current detection printed board 1 is fixed.
  • FIG. 14B is a cross-sectional view of a side surface of the casing main body 300 .
  • FIG. 14C is a diagram as viewed from a side on which the voltage detection printed board 2 is fixed.
  • FIGS. 15A and 15B are diagrams three-dimensionally showing the casing main body 300 .
  • FIG. 15A is a diagram as viewed from the side on which the current detection printed board 1 is fixed
  • FIG. 15B is a diagram as viewed from the side on which the voltage detection printed board 2 .
  • FIGS. 16A and 16B are diagrams when the current detection printed board 1 and the voltage detection printed board 2 are mounted on the casing main body 300 in a state where the current detector cover 301 and the voltage detector cover 302 are not mounted.
  • FIG. 16A is a diagram of the current detection printed board 1 side.
  • FIG. 16B is a diagram of the voltage detection printed board 2 side.
  • the recess portion 304 of a substantially semicircular cylinder shape and concave portions 311 , 312 , 321 , and 322 are provided in the casing main body 300 .
  • the power transmission conductor 66 and the insulator 69 covering the power transmission conductor 66 are disposed adjacent to the recess portion 304 of a substantially semicircular cylinder shape, and the current detection printed board 1 and the voltage detection printed board 2 are accommodated in the casing main body.
  • the current detection printed board 1 is accommodated on a side where the concave portions 311 and 312 are provided
  • the voltage detection printed board 2 is accommodated on a side where the concave portions 321 and 322 are provided.
  • Four board fixing portions 315 are provided at four corners of the concave portion 311 , and the current detection printed board 1 is fixed to the portions. This is to allow the current detection printed board 1 to float with respect to the bottom surface of the concave portion 311 such that the coiled wire provided in the current detection printed board 1 does not come into contact with the casing.
  • four board fixing portions 324 are provided at four corners of the concave portion 321 such that the voltage detection printed board 2 floats with respect to the bottom surface of the concave portion 321 .
  • the board fixing portions 315 provided at the four corners of the concave portion 311 can be removed. Then, the height of the bottom surface of the concave portion 311 can be the same as the height of the bottom surface of the concave portion 312 . For this reason, the structure of the casing main body 300 can be simplified. Similarly, for example, unlike FIGS. 3A to 3E , when the coiled wire 10 of the current detection printed board 1 is not formed on the rear surface layer of the board, the board fixing portions 315 provided at the four corners of the concave portion 311 can be removed. Then, the height of the bottom surface of the concave portion 311 can be the same as the height of the bottom surface of the concave portion 312 . For this reason, the structure of the casing main body 300 can be simplified. Similarly, for example, unlike FIGS.
  • the board fixing portions 324 provided at the four corners of the concave portion 321 can be removed, and thus the height of the bottom surface of the concave portion 321 can be the same as the height of the bottom surface of the concave portion 322 . For this reason, the structure of the casing main body 300 can be simplified.
  • a first shield portion 313 that shields a magnetic flux is provided in the vicinity of the recess portion 304 of a substantially semicircular cylinder shape.
  • the coiled wire 10 of the current detection printed board 1 is the same as that of the current detection printed board 1 in FIGS. 1A to 1D , but the output wires 21 and 22 are connected to the current conversion circuit 51 in forms of the pattern wires.
  • the current conversion circuit 51 corresponds to the current conversion circuit 84 shown in FIG. 31 .
  • the coiled wire 10 and the current conversion circuit 51 are provided on the same board. Further, the output wire 52 connected to the current conversion circuit 51 extends towards the outside of the casing through a wire opening 316 . Moreover, the current conversion circuit 51 has an output terminal to which the output wire 52 is connected. In addition, the output wire 52 may be partially a pattern wire or may be overall a wire other than the pattern wire.
  • a second shield portion 314 is provided at a corresponding position between the coiled wire 10 of the current detection printed board 1 and the current conversion circuit 51 .
  • the current detection printed board 1 has a shape having a partially narrower width according to the second shield portion 314 .
  • the current conversion circuit 51 is an example of a first conversion circuit of the invention
  • the output wire 52 is an example of a fifth wire of the invention (a third wire in the case of a current detector).
  • the substantially semiring-shaped wire 30 of the voltage detection printed board 2 is the same as the voltage detection printed board 2 in FIGS. 1A to 1D , but the output wire 40 is connected to the voltage conversion circuit 53 in forms of the pattern wire.
  • the voltage conversion circuit 53 corresponds to the voltage conversion circuit 93 in FIG. 31 .
  • the substantially semiring-shaped wire 30 and the voltage conversion circuit 53 are provided on the same board. Further, the output wire 54 connected to the voltage conversion circuit 53 extends towards the outside of the casing through a wire opening 325 . Moreover, the voltage conversion circuit 53 has an output terminal to which the output wire 54 is connected. In addition, the output wire 54 may be partially a pattern wire or may be overall a wire other than the pattern wire.
  • a third shield portion 323 is provided at a corresponding position between the substantially semiring-shaped wire 30 of the voltage detection printed board 2 and the voltage conversion circuit 53 . For this reason, the voltage detection printed board 2 has a partially narrower width according to the third shield portion 323 .
  • the voltage conversion circuit 53 is an example of a second conversion circuit of the invention (a first conversion circuit in the case of a voltage detector), and the output wire 54 is an example of a sixth wire of the invention (a third wire in the case of a voltage detector).
  • FIG. 17 is a cross-sectional view showing a case where the power transmission conductor 66 and the insulator 69 covering the power transmission conductor 66 are disposed adjacent to the recess portion 304 of a substantially semicircular cylinder shape.
  • the power transmission conductor 66 is disposed adjacent to the current detection printed board 1 and the voltage detection printed board 2 accommodated in the current/voltage detector 3 .
  • FIG. 17 shows a state where the current detector cover 301 and the voltage detector cover 302 are mounted.
  • the board fixing portions 315 and 324 shown in FIGS. 14A to 14C and the like are not shown. Further, the current detection printed board 1 and the voltage detection printed board 2 are partially omitted.
  • a magnetic flux occurs around the conductor.
  • the magnetic flux acts on the coiled wire 10 provided in the current detection printed board 1 , such that a current flows in the coiled wire 10 .
  • the current flowing in the coiled wire 10 is detected, thereby recognizing the current flowing in the power transmission conductor 66 .
  • the power transmission conductor 66 and the current detection printed board 1 are shielded by the conductor casing, the magnetic flux does not act on the current detection printed board 1 , and thus the current cannot be detected.
  • an opening 317 through which the magnetic flux generated around the conductor is introduced into the casing, is provided in the casing.
  • the opening 317 is formed by a gap between the first shield portion 313 and the current detector cover 301 .
  • An electromagnetic wave is generated by an AC current flowing in the power transmission conductor 66 . Since the electromagnetic wave has an effect on a circuit characteristic, it is necessary to prevent the electromagnetic wave from entering the current conversion circuit 51 , if possible. For this reason, the second shield portion 314 is provided in the casing, thereby realizing an electromagnetic shield effect and keeping a good circuit characteristic of the current conversion circuit 51 .
  • the second shield portion 314 is formed by narrowing the board width. This is to shield an electromagnetic wave passing through the inside of the board. That is, the reason why the second shield portion 314 having a narrower board width is formed is that, when the second shield portion 314 is provided to cover the upper portion of the board, without narrowing the board width, an electromagnetic wave passes through the portions of the board, and thus an electromagnetic shield effect becomes weak.
  • FIGS. 18A and 18B show an example of an application of the second shield portion 314 .
  • a shield portion 318 may be provided in the current detector cover 301 .
  • the same one as the shield portion 317 or the shield portion 318 provided in the current detector cover 301 may be provided in the voltage detector cover 302 , thereby increasing an electromagnetic shield effect. This is the same as FIGS. 18A and 18B , and the description thereof will be omitted.
  • the casing main body 300 is formed as a single body. For this reason, as described above, current detection and voltage detection can be performed in separate spaces, and the outputs can be converted into voltage levels using the individual conversion circuits. Therefore, there is almost no mutual interference, and thus detection accuracy can be improved.
  • FIGS. 19A and 19B are explanation diagrams of when the current/voltage detector 3 is attached.
  • FIGS. 19A and 19B it assumes that the power transmission conductor 66 and the insulator 69 surrounding the power transmission conductor 66 are attached, for example in an impedance matching device 63 .
  • impedance matching device 63 For simplification of the figure, other components existed in the periphery of the power transmission conductor 66 and the like are not shown.
  • the power transmission conductor 66 and the like is disposed adjacent to the recess portion 304 of a substantially semicircular cylinder provided in the casing. Therefore, unlike the related art, it is not necessary to attach the current/voltage detector 3 and the power transmission conductor 66 and the like at the same time. That is, as shown in FIG. 19A , even when the power transmission conductor 66 and the like has already been attached in the device, the current/voltage detector 3 can be attached later as shown in FIG. 19B . Further, the current/voltage detector 3 can be removed without removing the power transmission conductor 66 and the like as shown in FIG. 19A from the state where the current/voltage detector 3 is attached to the power transmission conductor 66 and the like as shown in FIG. 19B .
  • FIGS. 20A and 20B show a current/voltage detector 3 a as a modification of the current/voltage detector 3 .
  • a current detector cover 301 a and a voltage detector cover 302 a are not shown.
  • the current detection printed board 1 is as shown in FIGS. 1A to 1D
  • the voltage detection printed board 2 is as shown in FIGS. 9A to 9D . That is, the current conversion circuit 51 is not provided in the current detection printed board 1
  • the voltage conversion circuit 53 is not provided in the voltage detection printed board 2 .
  • a casing main body 300 a having a shape for the current detection printed board 1 and the voltage detection printed board 2 is used.
  • the output of the current detection printed board 1 is output outside the casing by output wires 25 and 26 , not pattern wires.
  • the output of the voltage detection printed board 2 is output outside the casing by an output wire 42 , not a pattern wire.
  • the output wires 25 and 26 are connected to a current conversion circuit 51 that is separately provided, and the output wire 42 is connected to the voltage conversion circuit 53 that is separately provided.
  • the current detector 310 and the voltage detector 320 are formed as a single body.
  • the invention is not limited thereto, but the current detector 310 and the voltage detector 320 may be separately provided.
  • the same reference numerals as FIGS. 12A to 12C are used.
  • FIG. 21 is a diagram showing an example where the current detection printed board 1 and the voltage detection printed board 2 are accommodated in separate casings, thereby forming the current detector 310 and the voltage detector 320 separately.
  • the current detector 310 and the voltage detector 320 are provided separately and disposed such that both sides overlap each other, the same effects as the current detector and the voltage detector formed as a single body can be obtained.
  • the current detector 310 and the voltage detector 320 are individually provided, and thus the recess portions 304 of a substantially semicircular cylinder shape are separated in two part.
  • the same reference numeral is used for each of the recess portion of a substantially semicircular cylinder shape.
  • FIG. 22 is a diagram showing an application when the current detector 310 and the voltage detector 320 are provided separately. As shown in FIG. 22 , the current detector 310 and the voltage detector 320 may overlap each other in different directions, not in the same direction. Moreover, as shown in FIG. 22 , if the recess portions 304 of a substantially semicircular cylinder shape provided in the individual detectors are coaxially located, the power transmission conductor 66 can be linear, and thus the structure can be simplified. Further, ease of assembling can be realized.
  • the detector is provided at the input terminal 63 a of the impedance matching device.
  • the invention is not limited thereto.
  • the detector may be provided at an output terminal of the high-frequency power supply device 61 or may be provided at the output terminal 63 b of the impedance matching device.
  • the detector when the detector is provided at the output terminal 63 b of the impedance matching device or the input terminal of the load 65 , in order to extend an insulation distance, it is preferable to use a power transmission conductor 68 having a large diameter or an insulator 69 covering the periphery of the power transmission conductor 68 in consideration of the difference. Further, the detector may be used for other systems other than the high-frequency power supply system.
  • the voltage detector 320 may be disposed near the input.
  • FIG. 24 is a diagram showing an application of the current detection printed board 1 and the voltage detection printed board 2 according to the invention.
  • the cutout 101 of the current detection printed board 1 and the cutout 201 of the voltage detection printed board 2 can be used by combining them so as to opposed to each other.
  • the cutout 101 and the cutout 201 are a substantially semicircular shape and thus if these recess are substantially the same size, the combined portion becomes a substantially circular shape.
  • a gap may be provided between the current detection printed board 1 and the voltage detection printed board as shown in FIG. 24B .
  • the power transmission conductor 66 is located to pass through a center of the substantially circular portion formed by combined two cutouts and thus the current detection and voltage detection can be performed in the same way as the above embodiments.
  • the power transmission 66 has a circular cylinder shape (circular cross-section)
  • a space between the wire and the power transmission conductor 66 cannot make constant. Therefore, it may cause reduction of detection accuracy. Accordingly, it is preferable to reduce the gap as small as possible.
  • FIGS. 24A and 24B shows an example of the printed board having double-sided structure such as the current detection printed board 1 shown in FIGS. 1A to 1D and the voltage detection printed board 2 shown in FIGS. 9A to 9D , it is not limited thereto, for example a multi-layer printed board may be used in one of or both of these boards.
  • the current conversion circuit 51 or the voltage conversion circuit 53 may be used.
  • FIG. 25 is a diagram showing a state where the current detector 310 and the voltage detector 320 are disposed such that recess portions 304 of substantially semicircular cylinder provided in individual casings are opposed to each other.
  • the recess portion 101 of the current detection printed board 1 and the recess portion 201 of the voltage detection printed board 2 are opposed to each other. That is, it makes arrangement of FIGS. 24A and 24B . Therefore, as explained in FIGS. 24A and 24B , the detection accuracy of phase difference can be improved.
  • the current detector 310 and the voltage detector 320 are individually provided, the effects as explained in FIG. 19 can be obtained.
  • FIG. 26 is a cross-sectional diagram of a casing where the current detection printed board 1 and voltage detection printed board 2 are provided in one casing.
  • the current detector 310 and the voltage detector 320 are individually provided.
  • the current detection printed board 1 and the voltage detection printed board 2 may be provided in one casing main body 305 .
  • This arrangement can obtain the same effect as that in FIG. 25 .
  • the current detection side and the voltage detection side are not independently separated, the effect as explained in FIG. 19 can not be obtained.
  • the casing main body 3 is provided with the penetration hole 303 and the power transmission conductor 66 and the insulator 69 surrounding the power transmission conductor 66 are disposed to pass through the penetration hole 303 .
  • the current detection cover 301 and the voltage detection cover 302 may be separated or integrated as shown in FIG. 26 .
  • FIG. 27 is a diagram of a current/voltage detection printed board 4 having a current detection function and a voltage detection function in one board.
  • the current/voltage detection printed board 4 is a board in which the current detection printed board 1 and the voltage detection printed board 2 shown in FIG. 24A are integrated. This arrangement makes it possible to realize the current detection function and the voltage detection function in one printed board.
  • the current/voltage detection printed board 4 is provided with a penetration hole 401 of a substantially circular shape and the power transmission conductor 66 and the insulator 69 surrounding the power transmission conductor 66 are disposed to pass through the penetration hole 401 .
  • the reference numerals of the current/voltage detection printed board 4 are represented by the same reference numerals as used for the current detection printed board 1 and voltage detection printed board 2 .
  • the current/voltage detector may be configured by using the current/voltage detection printed board 4 .
  • the current/voltage detection printed board 4 shown in FIG. 27 can be used instead of the current detection printed board 1 and the voltage detection printed board 2 in the current/voltage detector shown in FIG. 26 . This case are not shown since it is pretty similar to FIG. 26 .
  • the insulator 69 and the current/voltage detector 3 can be fixed.
  • the insulator 69 having an outer diameter smaller than the inner diameter of the penetration hole may be used.
  • a gap occurs between the insulator 69 and a casing main body 305 .
  • the relative position therebetween may not be constant according to mounting devices. In this case, when a plurality of devices are formed, a variation in detection value of the individual devices occurs. For this reason, when the gap is large, it is preferable to keep the relative position between the power transmission conductor 66 and the current/voltage detector 3 constant.
  • FIG. 28 is a diagram showing a fixing method of the insulator 69 .
  • the current/voltage detection printed board 4 shown in FIG. 27 is used.
  • a concave portion is provided in the insulator 69 , and the current detector cover 301 and the voltage detector cover 302 are fitted into the concave portion.
  • the insulator 69 can be fixed by the current detector cover 301 and the voltage detector cover 302 .
  • a mounting part 306 for fixing the insulator 69 may be provided at the lower portion of the casing main body 305 (as viewed from the paper).
  • the mounting part 306 is fitted into the concave portion provided in the insulator 69 and is mounted on the casing main body 305 by beads or the like (not shown). Then, even though the outer diameter of the insulator 69 is smaller than the inner diameter of the penetration hole 303 , the relative position between the power transmission conductor 66 , and the current detection printed board 1 and the voltage detection printed board 2 can be substantially kept constant.
  • FIG. 28 it explains the case where the casing main body 305 is provided with the penetration hole 303 , however it is not limited thereto.
  • the insulator can be fixed to the current/voltage detector 3 explained in FIG. 12 .
  • the fixing method can be applied to a case where the current detector 310 and the voltage detector 320 are provided separately.
  • the current detection cover 301 , the voltage detection cover 302 and the mounting part 36 are examples of the fixing unit of the invention.
  • FIG. 29 is a diagram showing a case where the sizes of the power transmission conductor 66 and the insulator 69 are suited to the size of the current/voltage detector 3 in the current/voltage detector 3 shown in FIG. 23 .
  • the sizes of the power transmission conductor 66 and the insulator 69 may be suited to the size of the current/voltage detector 3 , such that the power transmission conductor 66 and the insulator 69 can be removed from the current/voltage detector 3 . With this configuration, maintenance can be improved.
  • a connection portion for connection to anther conductor is provided in the power transmission conductor 66 .
  • the current detector cover 301 , the voltage detector cover 302 , and the mounting part 306 of FIGS. 23 to 25 are an example of a fixing unit of the invention.
  • the invention is not limited thereto.
  • a conductor having an elliptical shape or a rectangular shape in section may be used.
  • the cutout 101 of the current detection printed board 1 and the cutout 201 of the voltage detection printed board 2 have a circular shape
  • the invention is not limited thereto.
  • an elliptical shape or a rectangular shape may be used.
  • the cutout 101 of the current detection printed board 1 and the cutout 201 of the voltage detection printed board 2 has been described in a substantially semi circular shape, the invention is not limited thereto.
  • a shape closer to circle than semicircle may be adopted.
  • the coiled wire 10 and the substantially semiring-shaped wire 30 may be changed in shape as well.
  • the shape of the cutout 101 and the cutout 201 are not limited to the semicircular shape as described above, the circular cutout can preferably exert the effect explained in FIG. 24 .

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
  • Structure Of Printed Boards (AREA)
US11/687,973 2006-03-31 2007-03-19 Current detection printed board, voltage detection printed board, current/voltage detection printed board, current/voltage detector, current detector and voltage detector Abandoned US20070285089A1 (en)

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US12/822,384 US20100259247A1 (en) 2006-03-31 2010-06-24 Current detection printed board, voltage detection printed board, current/voltage detection printed board, current/voltage detector, current detector and voltage detector
US13/014,288 US8427134B2 (en) 2006-03-31 2011-01-26 Current detection printed board, voltage detection printed board, current/voltage detection printed board, current/voltage detector, current detector and voltage detector
US13/849,842 US8629674B2 (en) 2006-03-31 2013-03-25 Current detection printed board, voltage detection printed board, current/voltage detection printed board, current/voltage detector, current detector and voltage detector

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JP2006101082 2006-03-31
JP2006-101082 2006-03-31
JP2006-234514 2006-08-30
JP2006234514A JP4916821B2 (ja) 2006-03-31 2006-08-30 電圧検出用プリント基板及びそれを用いた電圧検出器

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US12/822,384 Abandoned US20100259247A1 (en) 2006-03-31 2010-06-24 Current detection printed board, voltage detection printed board, current/voltage detection printed board, current/voltage detector, current detector and voltage detector
US13/014,288 Active US8427134B2 (en) 2006-03-31 2011-01-26 Current detection printed board, voltage detection printed board, current/voltage detection printed board, current/voltage detector, current detector and voltage detector
US13/849,842 Active US8629674B2 (en) 2006-03-31 2013-03-25 Current detection printed board, voltage detection printed board, current/voltage detection printed board, current/voltage detector, current detector and voltage detector

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US13/014,288 Active US8427134B2 (en) 2006-03-31 2011-01-26 Current detection printed board, voltage detection printed board, current/voltage detection printed board, current/voltage detector, current detector and voltage detector
US13/849,842 Active US8629674B2 (en) 2006-03-31 2013-03-25 Current detection printed board, voltage detection printed board, current/voltage detection printed board, current/voltage detector, current detector and voltage detector

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