US20070256929A1 - Production of Carbon Nanotubes - Google Patents
Production of Carbon Nanotubes Download PDFInfo
- Publication number
- US20070256929A1 US20070256929A1 US11/568,569 US56856905A US2007256929A1 US 20070256929 A1 US20070256929 A1 US 20070256929A1 US 56856905 A US56856905 A US 56856905A US 2007256929 A1 US2007256929 A1 US 2007256929A1
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- US
- United States
- Prior art keywords
- anode
- electrodes
- carbon
- tip
- gap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 43
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 22
- 239000002041 carbon nanotube Substances 0.000 title abstract description 18
- 229910021393 carbon nanotube Inorganic materials 0.000 title abstract description 18
- 238000001816 cooling Methods 0.000 claims abstract description 25
- 239000002048 multi walled nanotube Substances 0.000 claims abstract description 16
- 238000010891 electric arc Methods 0.000 claims abstract description 10
- 238000001241 arc-discharge method Methods 0.000 claims abstract description 7
- 230000000977 initiatory effect Effects 0.000 claims abstract description 4
- 229910052799 carbon Inorganic materials 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 16
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 10
- 229910052802 copper Inorganic materials 0.000 claims description 10
- 239000010949 copper Substances 0.000 claims description 10
- 229910052734 helium Inorganic materials 0.000 claims description 4
- 239000001307 helium Substances 0.000 claims description 4
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 4
- 230000003190 augmentative effect Effects 0.000 claims description 3
- 229910052756 noble gas Inorganic materials 0.000 claims 1
- 230000001105 regulatory effect Effects 0.000 claims 1
- 239000002071 nanotube Substances 0.000 description 12
- 238000002474 experimental method Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 6
- 230000007423 decrease Effects 0.000 description 5
- 230000008021 deposition Effects 0.000 description 5
- 230000003247 decreasing effect Effects 0.000 description 4
- 229910002804 graphite Inorganic materials 0.000 description 4
- 239000010439 graphite Substances 0.000 description 4
- 239000002131 composite material Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000009834 vaporization Methods 0.000 description 3
- 230000008016 vaporization Effects 0.000 description 3
- 238000012795 verification Methods 0.000 description 3
- 125000004429 atom Chemical group 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000002105 nanoparticle Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 239000002109 single walled nanotube Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 241000234282 Allium Species 0.000 description 1
- 235000002732 Allium cepa var. cepa Nutrition 0.000 description 1
- 229920000271 Kevlar® Polymers 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008033 biological extinction Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000013590 bulk material Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 230000003292 diminished effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000004146 energy storage Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000012770 industrial material Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000004761 kevlar Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- -1 polypropylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 230000002028 premature Effects 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000004071 soot Substances 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
-
- D—TEXTILES; PAPER
- D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
- D01F—CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
- D01F9/00—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments
- D01F9/08—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments of inorganic material
- D01F9/12—Carbon filaments; Apparatus specially adapted for the manufacture thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/158—Carbon nanotubes
- C01B32/16—Preparation
- C01B32/162—Preparation characterised by catalysts
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2202/00—Structure or properties of carbon nanotubes
- C01B2202/06—Multi-walled nanotubes
Definitions
- This invention relates to production of carbon nanotubes, more specific the invention relates to improvements in the arc discharge method for producing high quality multi-walled carbon nanotubes (MWNT).
- MWNT multi-walled carbon nanotubes
- Carbon nanotubes are very long and closed tubular structures that may be considered to be a graphitic sheet that is folded onto itself to form a seamless cylinder which is terminated in both ends by a fullerene-like hemisphere. Carbon nanotubes are unique nanostructures that conceptually can be considered as a one-dimensional quantum wire due to their narrow size and very huge aspect ratio.
- SWNT single walled nanotube
- MWNT multi-walled carbon nanotube
- carbon nanotubes may be considered as the ultimate carbon fibre formed of perfectly graphitized closed seamless shells which show unique mechanical and electronic properties that are very sensitive to its geometry and dimensions [1].
- a decade later extensive research activity has established that carbon nanotubes is almost certainly the strongest, stiffest, and toughest molecule that can ever be produced, the best possible molecular conductor of both heat and electricity.
- the carbon nanotube is a new man-made polymer to follow from nylon, polypropylene and Kevlar.
- it is a new “graphite” fibre, but now with the ultimate possible strength.
- it is a new species in organic chemistry, and potentially in molecular biology as well, a carbon molecule with the almost alien property of electrical conductivity, and super steel-strength [2].
- the conventional arc discharge method employs plasma, formed in helium gas when passing high DC currents through an opposing anode and cathode (in the form of carbon rods) in a helium atmosphere, to evaporate carbon atoms of the anode that subsequently condenses on the cathode to form MWNTs and other carbon structures.
- the carbon anode is gradually consumed and the deposit grows accordingly on the cathode.
- the deposit will obtain the same shape as the anode. If for instance a longitudinal hole is drilled at the centre of the anode, the deposit will also have such a hole.
- the process must be performed in an inert atmosphere, and it is typically employed a helium atmosphere of approximately 500 Torr, typical current densities are about 150 A/cm 2 (cross section area of the anode), applied voltage is around 20 V, the distance between the anode and cathode is about 1 mm, the diameter of the anode is in the order of 5-10 mm, and the cylindrical growth rate of the deposit will be in the order of 1-2 mm/min.
- the temperatures in the plasma zone are typically in the order of 3000-4000° C.
- the cathode should be effectively cooled in order to obtain the best conditions for condensation of carbon nanotubes.
- the deposit on the cathode will be a cylinder rod with an outer hard shell of fused and useless material (nanotubes and nanoparticles fused together), and a black fibrous core containing about two-thirds nanotubes and one-third nanoparticles (polyhedral graphitic particles, also known as carbon onions).
- the main objective of this invention is therefore to provide a method and apparatus based on the conventional arc discharge technology that allows use of electrodes with large diameters for production of high-quality MWNTs.
- the invention is based on a discovery that the electric conductivity of carbon decreases at temperatures approaching the vaporization point, and that this causes an enhanced resistance at the lower section near the tip of the anode due to heat conducted from the vaporization zone and into the bulk material of the anode.
- This problem is expected to become more severe with larger diameters of the electrodes, probably because a smaller fraction of the heat energy from the vaporization zone in the gap between the anode and cathode can escape by heat radiation since electrode tips with larger surface areas will absorb a larger fraction of the heat generated by the plasma inside the gap.
- the heat generated within the electrodes by the flow of current is mainly dissipated via radiation. Thus, due to a decreasing surface/volume ratio with increased diameters, it should be expected that this dissipation becomes less efficient for higher diameters.
- the problem with increased electric resistance in the anode can be solved or at least substantially reduced by providing cooling means that controls/lowers the temperature in the anode at its lower parts facing the cathode.
- lower part we mean the end section of the anode rod that is not connected to the base, i.e. the tip or lower section facing the cathode.
- This anode cooling should not be confused with conventional cooling of the electrodes where the bases of the electrodes are equipped with water cooling devices. Cooling of the base will of course not provide a satisfactory control of the temperature at the opposite end of the anode rod due to an insufficient thermal contact between the tip of the anode and the cooling device at the base.
- the water cooling of the lower section of the anode is provided by placing an annulus shaped water-cooled copper block around the lower section of the anode, see FIG. 2 .
- lower section we mean in the opposite end of the base, that is, the end section comprising the tip of the anode.
- the copper block has a through-going centre hole with an inner diameter that is slightly larger than the outer diameter of the anode, and the anode rod is inserted coaxially from above at the centre of this through-going hole and lowered until the tip protrudes slightly below the bottom plane of the copper block. This position must of course be maintained by lowering the anode electrode in accordance with the rate at which it is being consumed during production.
- the inventive idea of providing cooling of the anode tip in order to obtain better control with the temperature in this section of the anode can is of course not limited to the use of water-cooled copper blocks, but may be implemented with any other conceivable cooling device known to a skilled person.
- the invention should not be considered to be restricted to electrodes with diameters of about 10-25 mm, but can of course be applied to any conceivable diameter of the electrodes up to diameters of several meters in magnitude.
- Another problem with employing electrodes with larger diameters is the initiating of the arc and maintaining an even burn rate and thus, an even shape of the anode tip.
- the inventors have discovered that this problem can be solved or at least substantially reduced by providing a narrowing of the anode tip. In this way, the contact surface between the two electrodes during the initial contact is significantly reduced, and the current is forced to pass through a very restricted area such that the current flowing through the electrodes is considerably diminished.
- the high current density i.e. the current/section ratio
- the size of the pointed end should be fitted according to the diameter of the electrodes. If the diameter of the point is too small, the current flowing through the electrodes during the contact will not be enough to sufficiently increase the temperature of the electrodes and the arc will extinguish as soon as the pointed end is consumed.
- An example of a preferred fitting in the case of 12 mm diameter electrodes is a tip with length 1 mm and diameter of 2.5 mm.
- the diameter of the pointed end should be within in the range from 1 ⁇ 2 to 1 ⁇ 8 of the diameter of the anode.
- Maintaining a large gap is therefore not pertinent when working with up to 12 mm diameter electrodes but might be necessary with larger electrodes, especially if heat dissipation from the plasma turns out to be a major problem.
- Another advantage of using large gaps is that no sophisticated system for the control of the electrodes motion is required.
- the gap can simply be adjusted by monitoring the current and maintaining it constant. However, the gap must be increased very gradually. The reason is that the current drops rapidly when the distance between the electrodes exceed approximately 3-4 mm. To counterbalance the decrease in current, the voltage must therefore be gradually increased as the gap is augmented.
- inventive features of applying active cooling of the lower sections of the anode tip and providing a narrowing of the tip may be implemented on all known conventional arc discharge reactors for producing carbon nanotubes with a device for cooling the anode tip in order to maintain a better control of the temperature and current flow.
- conventional arc discharge reactors we mean reactors as described in the prior art section above where two carbon electrodes are opposing each other with a narrow gap between them in an inert atmosphere.
- One example of such reactors are presented on page 143 of [1], one other is given in FIG. 2 of [4].
- each electrode will be mounted on rotatable water-cooled bases such that it is possible to rotate the electrodes in relation to each other.
- the size of the gap between the opposing electrode tips can be strictly controlled and adjusted in order to maintain the optimum voltage drop over the gap, and thus controlling the current density through the electrodes.
- a DC-potential When a suitable DC-potential is applied at these bases, a DC-current will flow through the electrodes and cross the gap between them to form plasma. This plasma will heat the tip of the anode to an extent which causes carbon atoms to evaporate and migrate to the water-cooled cathode and deposit there.
- Such reactors are well known to the skilled person and need no further description here.
- By larger diameters of the electrodes we mean from about 10 mm in diameter and every practically conceivable size above 10 mm.
- FIG. 1 shows a schematic drawing of a prior art conventional arc discharge reactor according to [4]
- FIG. 2 shows a cross-sectional view from the side of the anode provided with a water-cooled copper block according to a preferred embodiment of the invention.
- FIG. 3 shows a cross-sectional view from the side of anode according to the invention and the initiating of the arc.
- FIG. 4 shows a diagram presenting the current through the anode as a function of time with no cooling of the anode.
- FIG. 5 shows a diagram presenting the current through the anode as a function of time with active cooling of the anode according to the invention.
- the first series of verification tests was performed in order to test the assumption that the electrical conductivity of carbon decreases at higher temperatures, such that it is the temperature of the anode tip that is the limiting factor on the current through the electrodes.
- the anode was wrapped in a graphite foil in order to increase its thermal insulation.
- the graphite foil was maintained in contact with the anode by means of several rings of graphite felt stacked on top of each other (see FIG. 3 ), which also helped to improve the anode insulation.
- the tip of the anode was left non-insulated.
- the current with a non-insulated 12 mm diameter anode is usually ranging from 180 to 200 A.
- a very similar current was measured initially.
- a significant current drop was observed as soon as the distance from the tip to the insulated part of the electrode became lower than ⁇ 1.5 cm.
- the experiment was stopped when the tip of the anode went out of sight. At that time, the current had dropped down to 120 A ( FIG. 4 ).
- the most plausible explanation is that the current drop is correlated to an increase of the anode tip temperature as the distance between the tip and the insulated part gets smaller.
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Materials Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Textile Engineering (AREA)
- Composite Materials (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Carbon And Carbon Compounds (AREA)
- Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0410033.5 | 2004-05-05 | ||
GB0410033A GB2413793A (en) | 2004-05-05 | 2004-05-05 | Method of producing carbon nanotubes using cooled carbon anodes |
PCT/NO2005/000146 WO2005106086A1 (en) | 2004-05-05 | 2005-05-03 | Production of carbon nanotubes |
Publications (1)
Publication Number | Publication Date |
---|---|
US20070256929A1 true US20070256929A1 (en) | 2007-11-08 |
Family
ID=32482717
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/568,569 Abandoned US20070256929A1 (en) | 2004-05-05 | 2005-05-03 | Production of Carbon Nanotubes |
Country Status (11)
Country | Link |
---|---|
US (1) | US20070256929A1 (ja) |
EP (1) | EP1747309B1 (ja) |
JP (1) | JP2007536189A (ja) |
CN (1) | CN1997781A (ja) |
AT (1) | ATE380266T1 (ja) |
AU (1) | AU2005238410A1 (ja) |
CA (1) | CA2565139A1 (ja) |
DE (1) | DE602005003659T2 (ja) |
GB (1) | GB2413793A (ja) |
MX (1) | MXPA06012710A (ja) |
WO (1) | WO2005106086A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070148991A1 (en) * | 2005-12-23 | 2007-06-28 | Fei Company | Method of fabricating nanodevices |
US20100276283A1 (en) * | 2006-12-07 | 2010-11-04 | Wolf-Dieter Muenz | Vacuum coating unit for homogeneous PVD coating |
CN108442101A (zh) * | 2018-04-28 | 2018-08-24 | 青岛科技大学 | 一种碳纳米管改性碳纤维表面的规模化生产设备 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2471706C1 (ru) * | 2011-06-09 | 2013-01-10 | Федеральное государственное бюджетное учреждение науки Институт физики твердого тела Российской академии наук (ИФТТ РАН) | Устройство для получения массивов углеродных нанотрубок на металлических подложках |
CN103025039A (zh) * | 2012-11-30 | 2013-04-03 | 大连理工大学 | 一种大气压非热等离子体发生器 |
RU2572245C1 (ru) * | 2014-10-22 | 2016-01-10 | Федеральное государственное бюджетное учреждение науки Институт физики твердого тела Российской академии наук (ИФТТ РАН) | Холодный катод |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5916642A (en) * | 1995-11-22 | 1999-06-29 | Northwestern University | Method of encapsulating a material in a carbon nanotube |
US6262539B1 (en) * | 1997-10-24 | 2001-07-17 | Filplas Vacuum Technology Pte Ltd | Cathode arc source with target feeding apparatus |
US20010050219A1 (en) * | 2000-05-31 | 2001-12-13 | Fuji Xerox Co., Ltd. | Method of manufacturing carbon nanotubes and/or fullerenes, and manufacturing apparatus for the same |
US7132039B2 (en) * | 2002-11-06 | 2006-11-07 | Fuji Xerox Co., Ltd. | Manufacturing apparatus and method for carbon nanotube |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3702887B2 (ja) * | 1993-10-19 | 2005-10-05 | ソニー株式会社 | カーボンチューブの製造方法 |
JP3017161B2 (ja) * | 1998-03-16 | 2000-03-06 | 双葉電子工業株式会社 | 単層カーボンナノチューブの製造方法 |
JP2003034515A (ja) * | 2001-07-19 | 2003-02-07 | Noritake Itron Corp | 二層カーボンナノチューブの製造方法 |
JP2003103162A (ja) * | 2001-09-28 | 2003-04-08 | Noritake Itron Corp | ナノグラファイバーの製造装置 |
KR100468845B1 (ko) * | 2002-01-30 | 2005-01-29 | 삼성전자주식회사 | 탄소나노튜브 제조방법 |
TW575520B (en) * | 2002-02-27 | 2004-02-11 | Ind Tech Res Inst | Preparation of hollow carbon nanocapsules |
AU2002367831A1 (en) * | 2002-04-03 | 2003-10-13 | Canterprise Ltd. | Continuous method for producing inorganic nanotubes |
JP3969324B2 (ja) * | 2003-02-27 | 2007-09-05 | 富士ゼロックス株式会社 | カーボンナノチューブの製造装置 |
JP3922572B2 (ja) * | 2003-04-08 | 2007-05-30 | Jfeエンジニアリング株式会社 | カーボンナノチューブを製造するためのアーク放電用炭素材料および製造方法 |
JP2005162567A (ja) * | 2003-12-05 | 2005-06-23 | Mitsubishi Heavy Ind Ltd | 機能性カーボンの製造方法及びその装置 |
-
2004
- 2004-05-05 GB GB0410033A patent/GB2413793A/en not_active Withdrawn
-
2005
- 2005-05-03 WO PCT/NO2005/000146 patent/WO2005106086A1/en active IP Right Grant
- 2005-05-03 AU AU2005238410A patent/AU2005238410A1/en not_active Abandoned
- 2005-05-03 CA CA002565139A patent/CA2565139A1/en not_active Abandoned
- 2005-05-03 CN CNA2005800209482A patent/CN1997781A/zh active Pending
- 2005-05-03 MX MXPA06012710A patent/MXPA06012710A/es active IP Right Grant
- 2005-05-03 EP EP05740513A patent/EP1747309B1/en not_active Not-in-force
- 2005-05-03 DE DE602005003659T patent/DE602005003659T2/de active Active
- 2005-05-03 AT AT05740513T patent/ATE380266T1/de not_active IP Right Cessation
- 2005-05-03 JP JP2007511304A patent/JP2007536189A/ja active Pending
- 2005-05-03 US US11/568,569 patent/US20070256929A1/en not_active Abandoned
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5916642A (en) * | 1995-11-22 | 1999-06-29 | Northwestern University | Method of encapsulating a material in a carbon nanotube |
US6262539B1 (en) * | 1997-10-24 | 2001-07-17 | Filplas Vacuum Technology Pte Ltd | Cathode arc source with target feeding apparatus |
US20010050219A1 (en) * | 2000-05-31 | 2001-12-13 | Fuji Xerox Co., Ltd. | Method of manufacturing carbon nanotubes and/or fullerenes, and manufacturing apparatus for the same |
US7132039B2 (en) * | 2002-11-06 | 2006-11-07 | Fuji Xerox Co., Ltd. | Manufacturing apparatus and method for carbon nanotube |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070148991A1 (en) * | 2005-12-23 | 2007-06-28 | Fei Company | Method of fabricating nanodevices |
US7544523B2 (en) | 2005-12-23 | 2009-06-09 | Fei Company | Method of fabricating nanodevices |
US20100276283A1 (en) * | 2006-12-07 | 2010-11-04 | Wolf-Dieter Muenz | Vacuum coating unit for homogeneous PVD coating |
CN108442101A (zh) * | 2018-04-28 | 2018-08-24 | 青岛科技大学 | 一种碳纳米管改性碳纤维表面的规模化生产设备 |
Also Published As
Publication number | Publication date |
---|---|
CN1997781A (zh) | 2007-07-11 |
GB2413793A (en) | 2005-11-09 |
WO2005106086A1 (en) | 2005-11-10 |
DE602005003659D1 (de) | 2008-01-17 |
GB0410033D0 (en) | 2004-06-09 |
ATE380266T1 (de) | 2007-12-15 |
CA2565139A1 (en) | 2005-11-10 |
MXPA06012710A (es) | 2007-03-23 |
JP2007536189A (ja) | 2007-12-13 |
DE602005003659T2 (de) | 2008-11-13 |
EP1747309B1 (en) | 2007-12-05 |
AU2005238410A1 (en) | 2005-11-10 |
EP1747309A1 (en) | 2007-01-31 |
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