US20070193859A1 - Transport apparatus - Google Patents

Transport apparatus Download PDF

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Publication number
US20070193859A1
US20070193859A1 US11/708,065 US70806507A US2007193859A1 US 20070193859 A1 US20070193859 A1 US 20070193859A1 US 70806507 A US70806507 A US 70806507A US 2007193859 A1 US2007193859 A1 US 2007193859A1
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US
United States
Prior art keywords
track
carrier
join
transported
article
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US11/708,065
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English (en)
Inventor
Senzo Kyutoku
Tatsuo Tsubaki
Masanao Murata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asyst Shinko Inc
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Asyst Shinko Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asyst Shinko Inc filed Critical Asyst Shinko Inc
Assigned to ASYST SHINKO, INC. reassignment ASYST SHINKO, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KYUTOKU, SENZO, MURATA, MASANAO, TSUBAKI, TATSUO
Publication of US20070193859A1 publication Critical patent/US20070193859A1/en
Abandoned legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
    • B65G47/64—Switching conveyors
    • B65G47/641—Switching conveyors by a linear displacement of the switching conveyor
    • B65G47/643—Switching conveyors by a linear displacement of the switching conveyor in a vertical plane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C3/00—Abrasive blasting machines or devices; Plants
    • B24C3/02—Abrasive blasting machines or devices; Plants characterised by the arrangement of the component assemblies with respect to each other
    • B24C3/06—Abrasive blasting machines or devices; Plants characterised by the arrangement of the component assemblies with respect to each other movable; portable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C5/00—Devices or accessories for generating abrasive blasts
    • B24C5/06—Impeller wheels; Rotor blades therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C9/00—Appurtenances of abrasive blasting machines or devices, e.g. working chambers, arrangements for handling used abrasive material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G13/00—Roller-ways
    • B65G13/08—Roller-ways of curved form; with branch-offs
    • B65G13/10—Switching arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715—Changing the direction of the conveying path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers

Definitions

  • the present invention relates to a transport apparatus for transporting an article to be transported.
  • a transport system using a transport conveyer, an Over head Hoist Transport (OHT), an Over Head Shuttle (OHS) and so on transports a carrier which houses therein articles in the manufacturing process in accordance with a process.
  • the articles in the manufacturing may include subjects to be processed such as semiconductor substrates, glass substrates for liquid crystal display apparatuses, glass substrates for photo masks or substrates for optical discs.
  • JP-T-2003-506289 in order to change the traveling direction of a carrier by 90 degrees, for example, at one of the four corners or at a T cross of a transport conveyer, the carrier is temporarily stopped on a turntable, then the turntable is turned by 90 degrees together with the carrier and the transportation of the carrier is started again.
  • the turntable thus turned by 90 degrees is tuned by 90 degrees in the reverse direction and restored to an original point after the current carrier on the turntable moves out of the turntable.
  • An object of the present invention is to provide a transport apparatus which can shorten a time to be required for changing the direction of a carrier.
  • the transport apparatus for transporting an article to be transported comprises: a transport track comprising:
  • a linear portion comprising a main track for guiding the article to be transported in a straight line direction
  • a branch portion comprising a branch track for guiding the article to be transported so as to change a traveling direction thereof and a linear track for guiding the article to be transported in the straight line direction;
  • a switching unit which is provided at the branch portion and switches between the branch track and the linear track so that one of the branch track and the linear track guides the article to be transported in accordance with a traveling direction of the article to be transported.
  • the switching unit provided at the branch portion performs the switching between the branch track and the linear track so as to guide the article to be transported along one of the branch track and the linear track in accordance with the traveling direction of the article to be transported.
  • the switching unit switches between the branch track and the linear track so that one of the branch track and the linear track continues to the main track and the other of the branch track and the linear track is moved away from the article to be transported.
  • the switching unit serves to continue one of the branch track and the linear track to the main track and also move the other track away from the article to be transported thereby to switch between the branch track and the linear track.
  • a time required for the switching can be shortened.
  • the branch track is configured by a plurality of right side rollers and a plurality of left side rollers, each of which is disposed with a predetermined interval along the track and can receive the article to be transported, each of the right side rollers and the left side rollers has a portion for receiving the article to be transported, which is formed by a part of a side surface of a cone having a center axis inclined with respect to a transportation plane of the article to be transported, and the diameter of the right side roller is different from that of the left side roller.
  • the right side roller has the diameter different from that of the left side roller. Accordingly, the rotation speed of the roller having the large diameter becomes faster than the rotation speed of the roller having the small diameter when the both rollers are rotated.
  • the article to be transported can be transported smoothly while changing the traveling direction thereof, by using the roller having the large diameter as the roller on the outer periphery side, without using a particular mechanism for making the transporting speed of the article to be transported on the outer periphery side faster than the transporting speed of the article to be transported on the inner periphery side.
  • each of the left side roller and the right side roller has the article to be transported receiving portion of a tapered shape formed by the part of the side surface of the cone, it is possible to suppress to the minimum the generation of dust due to the slip between the article to be transported and the rollers.
  • a transport apparatus for transporting an article to be transported comprises:
  • a transport track comprising:
  • a linear portion comprising a main track for guiding the article to be transported in a straight line direction
  • join portion comprising a join track for guiding the article to be transported so as to join to the main track from the traveling direction different from the main track and a linear track for guiding the article to be transported so as to join to the main track from the traveling direction same as the main track;
  • a switching unit which is provided at the join portion and switches between the join track and the linear track so that one of the join track and the linear track guides the article to be transported in accordance with an entering state of the article to be transported into the join portion.
  • the switching unit provided at the branch portion performs the switching between the branch track and the linear track so as to guide the article to be transported along one of the branch track and the linear track in accordance with the entering state of the article to be transported into the join portion.
  • the switching unit switches between the join track and the linear track so that one of the join track and the linear track continues to the main track and the other of the join track and the linear track is moved away from the article to be transported.
  • the switching unit serves to continue one of the join track and the linear track to the main track and also move the other track away from the article to be transported thereby to switch between the join track and the linear track.
  • a time required for the switching can be made short.
  • the join track is configured by a plurality of right side rollers and a plurality of left side rollers, each of which is disposed with a predetermined interval along the track and can receive the article to be transported, each of the right side rollers and the left side rollers has a portion for receiving the article to be transported, which is formed by a part of a side surface of a cone having a center axis inclined with respect to a transportation plane of the article to be transported, and
  • the diameter of the right side roller is different from that of the left side roller.
  • the rotation speed of the roller having the large diameter becomes faster than the rotation speed of the roller having the small diameter when the both rollers are rotated.
  • the article to be transported can be transported smoothly while changing the traveling direction thereof, by using the roller having the large diameter as the roller on the outer periphery side, without using a particular mechanism for making the transporting speed of the article to be transported on the outer periphery side faster than the transporting speed of the article to be transported on the inner periphery side.
  • each of the left side roller and the right side roller has the article to be transported receiving portion of a tapered shape formed by the part of the side surface of the cone, it is possible to suppress to the minimum the generation of dust due to the slip between the article to be transported and the rollers.
  • each of at least the rollers on an outer periphery side among the right side rollers and the left side rollers has a flange on the outer periphery side.
  • the rollers on the outer periphery sides have the flanges on the outer periphery sides thereof respectively.
  • the flanges can suppress the centrifugal force, which is generated at the article to be transported when the article to be transported travels while changing the traveling direction thereof.
  • the switching unit switches between the branch track and the linear track in such a manner that a extensible pole, which is provided at the branch portion, moves a first frame provided at the branch track and a second frame provided at the linear track up and down.
  • the switching unit switches between the join track and the linear track in such a manner that a extensible pole, which is provided at the join portion, moves a third frame provided at the join track and a fourth frame provided at the linear track up and down.
  • the transport apparatus further comprises a sensor which is provided at the branch portion and obtains a information of the article to be transported.
  • the transport apparatus further comprises a sensor which is provided at the join portion and obtains a information of the article to be transported.
  • a part of the branch track is provided in order to overlap with a part of the linear portion.
  • a part of the join track is provided in order to overlap with a part of the linear portion.
  • FIG. 1 is a diagram showing the entirety of a transport track constituting a transport apparatus
  • FIG. 2 is a diagram illustrating a linear portion and a corner portion
  • FIG. 3 is a diagram illustrating a branch portion
  • FIG. 4 is a diagram illustrating the branch portion
  • FIG. 5 is an enlarged diagram of a main portion A surrounded by a two-dotted chain line in FIG. 4 ;
  • FIG. 6 is a cross-sectional diagram cut along a line VI-VI in FIG. 5 ;
  • FIG. 7A is an explanatory diagram showing a state where frames are moved up and down by extensible poles and a case where the traveling direction of a carrier is changed;
  • FIG. 7B is an explanatory diagram showing a state where frames are moved up and down by extensible poles and a case where the traveling direction of a carrier is maintained;
  • FIG. 8 is a diagram illustrating a join portion
  • FIG. 9 is a diagram illustrating the join portion
  • FIG. 10 is a flow chart of a branch portion track switching processing routine.
  • FIG. 11 is a flow chart of a join portion track switching processing routine.
  • the transport apparatus 1 includes a transport track 2 for guiding a carrier 8 , which is an article to be transported.
  • the transport track 2 is configured by suitably combining linear portions 2 a , corner portions 2 b , branch portions 2 c and join portions 2 d .
  • Not-shown stockers etc. for temporarily keeping the carriers are disposed at the periphery of the transport track 2 .
  • the linear portion 2 a of the transport track 2 is provided with a main track 3 for guiding the carrier 8 in the straight line direction
  • the corner portion 2 b of the transport track 2 is provided with a corner track 4 for changing the traveling direction of the carrier 8 by 90 degrees.
  • the angle for changing the traveling direction of the carrier 8 is not limited to 90 degrees.
  • the main track 3 includes a plurality of main track roller pairs 13 which are disposed with a predetermined interval along a not-shown frame and each of which can receive the carrier 8
  • the corner track 4 includes a plurality of right side rollers 14 R and a plurality of left side rollers 14 L which are disposed with a predetermined interval along the not-shown frame and each of which can receive the carrier 8 .
  • Each of rollers 13 L and 13 R constituting the main track roller pair 13 includes a carrier receiving portion 13 a of a cylindrical shape and a flange 13 b for forcedly restricting the movement of the carrier in the left and right directions so that the carrier 8 does not run off the main track 3 .
  • Each of rollers 14 L and 14 R provided at the corner track 4 includes a carrier receiving portion 14 a of a tapered shape and a flange 14 b for forcedly restricting the movement of the carrier in the left and right directions so that the carrier 8 does not run off the corner track 4 .
  • rollers 14 L and 14 R provided at the corner track 4 have the similar configuration as those of a right side roller and a left side roller provided at each of a branch track 6 and a join track 7 described later, respectively.
  • One of the rollers 13 L and 13 R constituting the main track roller pair 13 is a driving roller and the other may be a driven roller, or each of them may be a driving roller.
  • one of the rollers 14 L and 14 R provided at the corner track 4 is a driving roller and the other may be a driven roller, or each of them may be a driving roller.
  • the number of the right side rollers 14 R may not be necessarily same as the number of the left side rollers 14 L.
  • the number of the right side rollers 14 R on the outer periphery side having a longer track length is slightly larger than the number of the left side rollers 14 L on the inner periphery side.
  • the branch portion 2 c of the transport track 2 is provided with a linear track 5 for keeping the traveling direction of the carrier 8 in the straight line direction and the branch track 6 for changing the traveling direction of the carrier 8 by 90 degrees in a manner that these linear track and the branch track are partially overlapped.
  • the angle for changing the traveling direction of the carrier 8 is not limited to 90 degrees.
  • the linear track 5 includes a plurality of linear track roller pairs 15 which are disposed with a predetermined interval along a not-shown frame and each of which can receive the carrier.
  • the branch track 6 includes a plurality of right side rollers 16 R and a plurality of left side rollers 16 L which are disposed with a predetermined interval along the not-shown frame and each of which can receive the carrier 8 .
  • rollers 15 L and 15 R constituting the linear track roller pair 15 includes a carrier receiving portion 15 a of a cylindrical shape and a flange 15 b for forcedly restricting the movement of the carrier in the left and right directions so that the carrier 8 does not run off the linear track 5 .
  • Rollers 16 L and 16 R provided at the branch track 6 are configured in a similar manner as the rollers 14 L and 14 R provided at the corner track 4 , and each of these right side roller and the left side roller includes a carrier receiving portion 16 a of a tapered shape and a flange 16 b for forcedly restricting the movement of the carrier in the left and right directions so that the carrier 8 does not run off the branch track 6 .
  • a centrifugal force directed to the outer peripheral direction acts on the carrier 8 on the branch track 6
  • this centrifugal force can be suppressed by the flange 16 b of the right side roller 16 R.
  • One of the rollers 15 L and 15 R constituting the linear track roller pair 15 is a driving roller and the other may be a driven roller, or each of them may be a driving roller.
  • one of the rollers 16 L and 16 R provided at the branch track 6 is a driving roller and the other may be a driven roller, or each of them may be a driving roller.
  • the number of the right side rollers 16 R may not be necessarily same as the number of the left side rollers 16 L.
  • the number of the right side rollers 16 R on the outer periphery side having a longer track length is slightly larger than the number of the left side rollers 16 L on the inner periphery side.
  • FIG. 4 is a diagram of the branch portion 2 c viewed from the bottom side of the carrier 8 .
  • the branch portion 2 c corresponds to an area surrounded by a dotted line.
  • Each of the upstream side (the lower side in the figure) and the downstream side (the upper side in the figure) of the linear track 5 in the branch portion 2 c constitutes the linear portion 2 a at which the main track 3 is provided.
  • the downstream side (the right side in the figure) of the branch track 6 in the branch portion 2 c also constitutes the linear portion 2 a at which the main track 3 is provided.
  • a first sensor 9 a is provided at the side of the main track 3 on the upstream side of the linear track 5 so as to obtain the information of the carrier 8 entering into the branch portion 2 c .
  • the information of the carriers 8 is identification numbers of the carriers, respectively.
  • a second sensor 9 b is provided at a position which is adjacent to the branch portion 2 c and on the side of the main track 3 on the downstream side of the linear track 5 so as to detect the carrier 8 passed on the linear track 5 of the branch portion 2 c .
  • a third sensor 9 c is provided at a position which is adjacent to the branch portion 2 c and on the side of the main track 3 on the downstream side of the branch track 6 so as to detect the carrier 8 passed on the branch track 6 of the branch portion 2 c.
  • the rollers 15 L, 15 R constituting the linear track 5 and the rollers 16 R, 16 L constituting the branch track 6 are alternately provided continuously at a position B where the branch of the track starts.
  • the diameter of each of the rollers 15 L, 15 R constituting the linear track roller pair 15 is set to L 2 .
  • the diameter of the left side roller 16 L on the inner periphery side of a curve constituting the linear track roller pair 15 is set to L 2
  • the diameter of the right side roller 16 R on the outer periphery side of the curve is set to L 1 .
  • the diameter of each of the rollers 13 L, 13 R constituting the main track roller pair 13 is set to L 1 .
  • L 1 is 30 mm and L 2 is 20 mm.
  • the curvature radius and the values of L 1 , L 2 are not limited to these values.
  • the width of the roller at a position d/2 thereof is defined as the diameter of the roller, where d represents the thickness of the carrier receiving portion.
  • the width of the flange is not contained in the diameter of the roller.
  • the carrier receiving portion 16 a of each of the rollers 16 L, 16 R constituting the branch track 6 forms a part of the side surface of a cone 20 having a center axis 16 A inclined with respect to the horizontal plane 10 . That is, the carrier receiving portion 16 a has a tapered shape.
  • a side surface 21 positioned at the upper end in the vertical direction of the cone 20 having the center axis 16 A is set to extend in the horizontal direction.
  • the carrier 8 which is placed on the carrier receiving portions 16 a of the rollers 16 L, 16 R, is kept to be laid in the horizontal direction.
  • the carrier 8 can be transported smoothly while changing the traveling direction thereof, by using the right side roller 16 R having the large diameter as the roller on the outer periphery side, without using a particular mechanism for making the transporting speed of the carrier 8 on the outer periphery side having a long traveling length be faster than the transporting speed of the carrier 8 on the inner periphery side having a short traveling length.
  • the slip hardly occurs between the carrier receiving portion 16 a and the carrier 8 since the carrier receiving portion 16 a is formed in the tapered shape, so that it is possible to suppress the generation of dust due to the slip between the carrier 8 and the rollers 16 L, 16 R.
  • the carrier receiving portions 15 a of the linear track roller pair 15 constituting the linear track 5 form a part of the side surface of a cylinder 30 having a center axis 15 A which is in parallel to (that is, horizontal) to the horizontal plane 10 . That is, the carrier receiving portion 15 a has a cylindrical shape.
  • Each of the rollers 14 R, 14 L constituting the corner track 4 has the potion 14 a of a tapered shape like the rollers 16 L, 16 R constituting the branch track 6 and the flange 14 b .
  • the carrier 8 can be transported smoothly while changing the traveling direction thereof and the generation of dust can be suppressed.
  • a not-shown system controller obtains the information of the carrier 8 entering into the branch portion 2 c from the first sensor 9 a (see FIG. 4 ) and changes the traveling direction of the carrier 8 by 90 degrees.
  • an extensible pole 40 (see FIGS. 7A and 7B ), which serves as a switching unit for the transport apparatus 1 , is extended thereby to set the height in the vertical direction of the rollers 16 L, 16 R constituting the branch track 6 to the reference height D (hereinafter called a reference height D) in the vertical direction of the main not-shown track roller pair 13 constituting the main track 3 .
  • an extensible pole 41 see FIGS.
  • each of the extensible pole 40 and the extensible pole 41 is extended and shrunk by an electrically driving system, it may be driven by an air driving system or a gear driving system.
  • the not-shown system controller obtains the information of the carrier 8 entering into the branch portion 2 c from the first sensor 9 a (see FIG. 4 ) and keeps the traveling direction of the carrier 8 in the straight line direction.
  • the extensible pole 40 (see FIGS. 7A and 7B ) is shrunk thereby to set the height in the vertical direction of the rollers 16 L, 16 R constituting the branch track 6 to the lower position E.
  • the extensible pole 41 (see FIGS. 7A and 7B ) is extended thereby to set the vertical direction of the rollers 15 L, 15 R constituting the linear track 5 to the reference height D.
  • a frame 26 provided with, for example, five right side rollers 16 R of the branch track 6 and a frame 25 provided with, for example, five right side rollers 15 R of the linear track 5 are provided in a manner that the right side roller 16 R and the right side roller 15 R are alternately positioned in the traveling direction of the carrier 8 .
  • the frame 26 is moved up and down by the extensible pole 40 and the frame 25 is moved up and down by the extensible pole 41 .
  • the frame 26 is located at an upper position by the expansion of the extensible pole 40 so that the upper end of the right side roller 16 R of the branch track 6 locates at the reference height D. Further, the frame 25 is located at a lower position by the shrinkage of the extensible pole 41 so that the upper end of the right side roller 15 R of the linear track 5 locates at the lower position E where the upper end does not abut against the carrier 8 .
  • the frame 26 is located at the lower position by the shrinkage of the extensible pole 40 so that the upper end of the right side roller 16 R of the branch track 6 does not abut against the carrier 8 .
  • the frame 25 is located at the higher position by the expansion of the extensible pole 41 so that the upper end of the right side roller 15 R of the linear track 5 locates at the reference height D.
  • a length L 3 along which the frame 26 and the frame 25 move up and down is set in view of the heights of the flange 16 b and the flange 15 b .
  • the length L 3 along which the frame 26 and the frame 25 move up and down is set to be larger than 5 mm.
  • frames are moved up and down by extensible poles each serving as a switching unit respectively provided at frames like the frame 25 and 26 .
  • the switching unit is not limited to the extensible pole, and any members capable of moving the frame up and down can be employed as the switching unit.
  • the extensible poles 40 , 41 provided at the branch portion 2 c perform the switching between the branch track 6 and the linear track 5 so as to guide the carrier 8 along one of the branch track 6 and the linear track 5 in accordance with the traveling direction of the carrier 8 .
  • the carrier 8 can be transported without being temporarily stopped by merely performing the switching between the branch track 6 and the linear track 5 .
  • the time necessary for changing the direction of the carrier 8 can be shortened.
  • the extensible poles 40 , 41 serve to position one of the branch track 6 and the linear track 5 to the reference height D thereby to continue to the main track 3 and also position the other track to the lower position E thereby to move the other track away from the carrier 8 to switch between the branch track 6 and the linear track 5 .
  • a time required for the switching can be made short.
  • the one carrier 8 having been temporarily stopped starts to travel along the linear track 5 after the third sensor 9 c detects that the another carrier 8 has passed through the branch track 6 , and the rollers 15 L, 15 R (that is, the linear track 5 ) and the rollers 16 L, 16 R (that is, the branch track 6 ) are set to the reference height D and the lower position E, respectively.
  • the join portion 2 d of the transport track 2 is provided with the linear track 5 for keeping the traveling direction of the carrier 8 having been guided by the main track 3 in the straight line direction and the join track 7 for changing the traveling direction of the carrier 8 by 90 degrees thereby to guide the carrier 8 so as to join the main track 3 in a manner that these linear track and the join track are partially overlapped.
  • the angle for changing the traveling direction of the carrier 8 is not limited to 90 degrees.
  • the linear track 5 has the similar configuration as the linear track 5 of the branch portion 2 c and so the explanation thereof will be omitted.
  • the join track 7 includes a plurality of right side rollers 17 R and a plurality of left side rollers 17 L which are disposed with a predetermined interval along the not-shown frame and each of which can receive the carrier 8 .
  • the rollers 17 L and 17 R constituting the join track 7 are configured in a similar manner as the rollers 16 L and 16 R constituting the branch track 6 . That is, the roller constituting the join track a carrier receiving portion 17 a of a tapered shape and a flange 17 b for forcedly restricting the movement of the carrier in the left and right directions so that the carrier 8 does not run off the join track 7 .
  • a centrifugal force directed to the outer peripheral direction acts on the carrier 8 on the join track 7 , this centrifugal force can be suppressed by the flange 17 b of the right side roller 17 R.
  • rollers 17 L, 17 R are provided at a frame which is moved up and down by extensible poles like those shown in FIGS. 7A and 7B .
  • One of the rollers 17 L and 17 R constituting the join track 7 is a driving roller and the other may be a driven roller, or each of them may be a driving roller.
  • the number of the right side rollers 17 R may not be necessarily same as the number of the left side rollers 17 L. Usually, the number of the right side rollers 17 R on the outer periphery side having a longer track length is slightly larger than the number of the left side rollers 17 L on the inner periphery side.
  • FIG. 9 is a diagram of the join portion 2 d seen from the bottom side of the carrier 8 .
  • the join portion 2 d corresponds to an area surrounded by a dotted line.
  • Each of the upstream side (the lower side in the figure) and the downstream side (the upper side in the figure) of the linear track 5 in the join portion 2 d constitutes the linear portion 2 a at which the main track 3 is provided.
  • the upstream side (the right side in the figure) of the join track 7 in the join portion 2 d also constitutes the linear portion 2 a at which the main track 3 is provided.
  • a fourth sensor 19 a is provided at the side of the main track 3 on the upstream side of the linear track 5 so as to obtain the information of the carrier 8 entering into the join portion 2 d .
  • a fifth sensor 19 b is provided at a position which is adjacent to the join portion 2 d and on the side of the main track 3 on the downstream side of the linear track 5 so as to detect the carrier 8 passed on the linear track 5 of the join portion 2 d .
  • a sixth sensor 19 c is provided at a position which is adjacent to the join portion 2 d and on the side of the main track 3 on the upstream side of the join track 7 so as to detect the carrier 8 entering into the join portion 2 d
  • the rollers 15 L, 15 R constituting the linear track 5 and the rollers 17 R, 17 L constituting the join track 7 are alternately provided continuously at a position D where the joining of the tracks complete.
  • the diameter of each of the rollers 15 L, 15 R constituting the linear track 5 is set to L 2 .
  • the diameter of the left side roller 17 L on the inner periphery side of a curve constituting the linear track 5 is set to L 2
  • the diameter of the right side roller 17 R on the outer periphery side of the curve is set to L 1 .
  • L 1 is 30 mm
  • L 2 is 20 mm.
  • the radius of the curvature and the values of L 1 , L 2 are not limited to these values.
  • a not-shown extensible pole like that shown in FIGS. 7A and 7B is extended to position the frame provided with the rollers 17 L, 17 R of the join track 7 upward thereby to set the height in the vertical direction of the rollers 17 L, 17 R (that is, the join track 7 ) to the reference height D.
  • a not-shown extensible pole is shrunk to position the frame provided with the rollers 17 L, 17 R of the join track 7 downward thereby to set the height in the vertical direction of the join track 7 to the lower position E.
  • not-shown another extensible pole is extended to position the frame provided with the rollers 15 L, 15 R of the linear track 5 upward thereby to set the height in the vertical direction of the linear track 5 to the reference height D.
  • the another carrier 8 when the another carrier 8 is traveling along the join track 7 , since the rollers 15 R, 15 L (that is, the linear track roller pair 15 ) constituting the linear track 5 are located at the lower position E, the one carrier 8 intended to travel along the linear track 5 is temporarily stopped just before the join portion 2 d until the fifth sensor 19 b detects the another carrier 8 and the linear track 5 is located at the reference height D and the join track 7 is located at the lower position E. Then, the one carrier 8 having been temporarily stopped starts to travel along the linear track 5 after the fifth sensor 19 b detects that the another carrier 8 has passed through the join track 7 , and the linear track 5 and the join track 7 are set to the reference height D and the lower position E, respectively.
  • the system controller determines one of the two carriers 8 to be entered into the join portion 2 d with a priority. Then, while the one of the carriers 8 thus determined to have a priority is traveling along the join portion 2 d , the other carrier 8 is temporarily stopped just before the join portion 2 d.
  • the not-shown extensible poles performs the switching between the join track 7 and the linear track 5 so as to guide the carrier 8 along one of the join track 7 and the linear track 5 in accordance with the entering state of the carrier 8 into the join portion 2 d .
  • the carrier 8 can be transported without being temporarily stopped by merely performing the switching between the join track 7 and the linear track 5 .
  • it is not necessary to provide a time for restoring to the origin like the turntable the time necessary for changing the direction of the carrier 8 can be shortened.
  • the not-shown extensible poles serve to position one of the join track 7 and the linear track 5 to the reference height D thereby to continue to the main track 3 and also position the other track to the lower position E thereby to move the other track away from the carrier 8 to perform the switching between the join track 7 and the linear track 5 .
  • a time required for the switching can be made short.
  • step S 1 it is determined whether or not the first sensor 9 a (see FIG. 4 ) provided on the side of the main track 3 on the upstream side of the branch portion 2 c detects a carrier 8 (step S 1 ).
  • the first sensor 9 a does not detect the carrier 8 (NO in step S 1 )
  • the system controller obtains the information of the one carrier 8 (step S 2 ).
  • the system controller determines whether or not the one carrier 8 is to be traveled in the straight line direction (step S 3 ).
  • the system controller determines whether or not another carrier 8 exists in the branch portion 2 c (step S 4 ).
  • step S 4 When the another carrier 8 exists in the branch portion 2 c (YES in step S 4 ), it is determined whether or not the another carrier 8 is traveling in the straight line direction (step S 5 ). When the another carrier 8 is not traveling in the straight line direction (NO in step S 5 ), it is determined that the another carrier 8 is traveling along the branch track 6 , then the one carrier 8 is temporarily stopped just before the branch portion 2 c until the another carrier 8 passes through the branch track 6 (step S 6 ), and then the process returns to step S 4 again.
  • step S 4 when it is determined in step S 4 that the another carrier 8 does not exist in the branch portion 2 c (NO in step S 4 ) or it is determined in step S 5 that the another carrier 8 is traveling in the straight line direction (YES in step S 5 ), it is determined whether or not the linear track 5 is located at the reference height D (step S 7 ).
  • step S 7 When the linear track 5 is located at the reference height D (YES in step S 7 ), the one carrier 8 travels along the linear track 5 without switching the tracks and then the process returns to step S 1 again.
  • step S 7 when the linear track 5 is not located at the reference height D (NO in step S 7 ), the linear track 5 is located at the reference height D by the extensible pole 41 (step S 8 ) and the branch track 6 is located at the lower position E by the extensible pole 40 (step S 9 ), whereby the one carrier 8 travels along the linear track 5 and then the process returns to step S 1 again.
  • the extensible poles 40 , 41 provided at the branch portion 2 c switch the branch track 6 and the linear track 5 so as to guide the carrier 8 along the linear track 5 in accordance with the traveling direction (straight line direction) of the carrier 8 .
  • the carrier 8 can be transported without being temporarily stopped by merely performing the switching between the branch track 6 and the linear track 5 .
  • the time necessary for changing the direction of the carrier 8 can be shortened.
  • step S 10 When it is determined that the one carrier 8 is not to be traveled in the straight line direction (NO in step S 3 ), it is determined that the one carrier 8 is to be traveled along the branch track 6 and so it is determined whether or not another carrier 8 exists in the branch portion 2 c (step S 10 ).
  • step S 10 When the another carrier 8 exists in the branch portion 2 c (YES in step S 10 ), it is determined whether or not the another carrier 8 is traveling in the straight line direction (step S 11 ). When the another carrier 8 is traveling in the straight line direction (YES in step S 11 ), it is determined that the another carrier 8 is traveling along the linear track 5 , then the one carrier 8 is temporarily stopped just before the branch portion 2 c until the another carrier 8 passes through the linear track 5 (step S 12 ), and then the process returns to step S 10 again.
  • step S 10 when it is determined in step S 10 that the another carrier 8 does not exist in the branch portion 2 c (NO in step S 10 ) or it is determined in step S 11 that the another carrier 8 is not traveling in the straight line direction (NO in step S 11 ), it is determined whether or not the branch track 6 is located at the reference height D (step S 13 ). When the branch track 6 is located at the reference height D (YES in step 137 ), the carrier 8 travels along the branch track 6 without switching the tracks and then the process returns to step S 1 again.
  • step S 13 when the branch track 6 is not located at the reference height D (NO in step S 13 ), the branch track 6 is located at the reference height D by the extensible pole 40 (step S 14 ) and the linear track 5 is located at the lower position E by the extensible pole 41 (step S 15 ), whereby the one carrier 8 travels along the branch track 6 and then the process returns to step S 1 again.
  • the extensible poles 40 , 41 provided at the branch portion 2 c switch the branch track 6 and the linear track 5 so as to guide the carrier 8 along the branch track 6 in accordance with the traveling direction (curved direction) of the carrier 8 .
  • the carrier 8 can be transported without being temporarily stopped by merely performing the switching between the branch track 6 and the linear track 5 .
  • the time necessary for changing the direction of the carrier 8 can be shortened.
  • the carrier 8 can be transported smoothly, while changing the traveling direction thereof and using the right side roller 16 R having the large diameter as the roller on the outer periphery side, without using a particular mechanism for making the transporting speed of the carrier 8 on the outer periphery side having a long traveling length be higher than the transporting speed of the carrier 8 on the inner periphery side having a short traveling length. Further, since the carrier receiving portion 16 a of each of the left side roller 16 L and the right side roller 16 R is formed in the tapered shape, it is possible to suppress the generation of dust due to the slip between the carrier 8 and the rollers 16 L, 16 R.
  • the flange 16 b is provided at the right side roller 16 R, the centrifugal force acting on the carrier 8 on the branch track 6 can be suppressed by the flange 16 b.
  • the join portion track switching processing routine shown in FIG. 11 .
  • the join portion track switching processing routine is executed, first, it is determined whether or not the fourth sensor 19 a (see FIG. 9 ) provided on the side of the main track 3 on the upstream side of the linear track 5 of the join portion 2 d detects a carrier 8 (step S 21 ).
  • the fourth sensor 19 a detects the carrier 8 (YES in step S 21 )
  • the system controller obtains the information of the one carrier 8 (step S 22 ).
  • it is determined whether or not the sixth sensor 19 c see FIG.
  • step S 23 the system controller obtains the information of the carrier 8 (step S 24 ).
  • the system controller determines one of the carrier 8 detected by the fourth sensor 19 a and the carrier 8 detected by the sixth sensor 19 c to be entered into the join portion 2 d with a priority (step S 25 ) and further determined whether or not the carrier 8 straightly traveling on the linear track 5 is to be gone ahead (step S 26 ).
  • the carrier 8 straightly traveling on the linear track 5 is determined to be gone ahead (YES in step S 26 )
  • the carrier 8 located just before the join track 7 is temporarily stopped (step S 27 ).
  • it is determined whether or not there exists another carrier 8 in the join portion 2 d (step S 28 ).
  • step S 29 it is determined whether or not the another carrier 8 is traveling in the straight line direction.
  • the another carrier 8 is not traveling in the straight line direction (NO in step S 29 )
  • it is determined that the another carrier 8 is traveling along the join track 7 then one carrier 8 is temporarily stopped just before the join portion 2 d until the another carrier 8 passes through the join track 7 (step S 30 ), and then the process returns to step S 28 again.
  • step S 28 when it is determined in step S 28 that the another carrier 8 does not exist in the join portion 2 d (NO in step S 28 ) or it is determined in step S 29 that the another carrier 8 is traveling in the straight line direction (YES in step S 29 ), it is determined whether or not the linear track 5 is located at the reference height D (step S 31 ).
  • step S 31 When the linear track 5 is located at the reference height D (YES in step S 31 ), the one carrier 8 travels along the linear track 5 without switching the tracks and then the process returns to step S 1 again.
  • step S 31 when the linear track 5 is not located at the reference height D (NO in step S 31 ), the linear track 5 is located at the reference height D by the extensible pole (step S 32 ) and the join track 7 is located at the lower position E by the other extensible pole (step S 33 ), whereby the one carrier 8 travels along the linear track 5 and then the process returns to step S 1 again.
  • the extensible pole provided at the join portion 2 d switches the join track 7 and the linear track 5 so as to guide the carrier 8 along the linear track 5 .
  • the carrier 8 can be transported without being temporarily stopped by merely performing the switching between the join track 7 and the linear track 5 .
  • the time necessary for changing the direction of the carrier 8 can be shortened.
  • step S 26 when the carrier 8 straightly traveling on the linear track 5 is not to be gone ahead (NO in step S 26 ), the carrier 8 located just before the linear track 5 is temporarily stopped (step S 36 ) and the process proceeds to step S 37 .
  • step S 21 when the fourth sensor 19 a does not detect the carrier 8 (NO in step S 21 ), it is determined whether or not the sixth sensor 19 c detects the carrier 8 (step S 34 ). When the sixth sensor 19 c does not detect the carrier 8 (NO in step S 34 ), the process returns to step S 21 again. On the other hand, when the sixth sensor 19 c detects the carrier 8 (YES in step S 34 ), the system controller obtains the information of the carrier 8 (step S 35 ) and the process proceeds to step S 37
  • step S 37 it is determined whether or not there exists another carrier 8 in the join portion 2 d (step S 37 ).
  • the another carrier 8 exists in the join portion 2 d (YES in step S 37 )
  • the another carrier 8 is traveling in the straight line direction (YES in step S 38 )
  • it is determined that the another carrier 8 is traveling along the linear track 5 .
  • one carrier 8 is temporarily stopped just before the join portion 2 d until the another carrier 8 passes through the linear track 5 (step S 39 ), and then the process returns to step S 37 again.
  • step S 37 when it is determined in step S 37 that the another carrier 8 does not exist in the join portion 2 d (NO in step S 37 ) or it is determined in step S 38 that the another carrier 8 is not traveling in the straight line direction (NO in step S 38 ), it is determined whether or not the join track 7 is located at the reference height D (step S 40 ).
  • step S 40 When the join track 7 is located at the reference height D (YES in step S 40 ), the one carrier 8 travels along the join track 7 without switching the tracks and then the process returns to step S 1 again.
  • step S 40 when the join track 7 is not located at the reference height D (NO in step S 40 ), the join track 7 is located at the reference height D by the not-shown extensible pole (step S 41 ) and the linear track 5 is located at the lower position E by the not-shown other extensible pole (step S 42 ), whereby the one carrier 8 travels along the join track 7 and then the process returns to step S 1 again.
  • the not-shown extensible pole provided at the join portion 2 d switches the join track 7 and the linear track 5 so as to guide the carrier 8 along the join track 7 .
  • the carrier 8 can be transported without being temporarily stopped by merely performing the switching between the join track 7 and the linear track 5 .
  • the time necessary for changing the direction of the carrier 8 can be shortened.
  • the carrier 8 can be transported smoothly while changing the traveling direction thereof, by using the right side roller 17 R having the large diameter as the roller on the outer periphery side, without using a particular mechanism for making the transporting speed of the carrier 8 on the outer periphery side having a long traveling length be faster than the transporting speed of the carrier 8 on the inner periphery side having a short traveling length. Further, since the carrier receiving portion 17 a of each of the left side roller 17 L and the right side roller 17 R is formed in the tapered shape, it is possible to suppress the generation of dust due to the slip between the carrier 8 and the rollers 17 L, 17 R.
  • the flange 17 b is provided at the right side roller 17 R, the centrifugal force acting on the carrier 8 on the join track 7 can be suppressed by the flange 17 b.
  • the transport apparatus 1 is the transport apparatus 1 for transporting a carrier 8 , and said transport apparatus 1 includes: the transport track 2 which has:
  • the branch portion 2 c provided with the branch track 6 for guiding the carrier 8 so as to change the traveling direction thereof and the linear track 5 for guiding the carrier 8 in the straight line direction;
  • the extensible poles 40 , 41 which are provided at the branch portion 2 c and switch between the branch track 6 and the linear track 5 so that one of the branch track 6 and the linear track 5 guides the carrier 8 in accordance with the traveling direction of the carrier 8 .
  • the extensible poles 40 , 41 provided at the branch portion 2 c perform the switching between the branch track 6 and the linear track 5 so as to guide the carrier 8 along one of the branch track 6 and the linear track 5 in accordance with the traveling direction of the carrier 8 .
  • the carrier 8 can be transported without being temporarily stopped by merely performing the switching between the branch track 6 and the linear track 5 .
  • it is not necessary to provide a time for restoring to the origin like the turntable the time necessary for changing the direction of the carrier 8 can be shortened.
  • the extensible poles 40 , 41 are configured to position one of the branch track 6 and the linear track 5 so as to continue to the main track 3 and also position the other track so as to move away from the carrier 8 thereby to switch between the branch track 6 and the linear track 5 .
  • the extensible poles 40 , 41 serve to continue one of the branch track 6 and the linear track 5 to the main track 3 and also move the other track away from the carrier 8 thereby to switch between the branch track 6 and the linear track 5 .
  • a time required for the switching can be made short.
  • the branch track 6 is configured by a plurality of the right side rollers 16 R and a plurality of the left side rollers 16 L which are disposed with the predetermined interval along the track and each of which can receive the carrier 8 .
  • the carrier receiving portion 16 a of each of the rollers 16 L, 16 R forms a part of the side surface of the cone 20 having the center axis 16 A inclined with respect to the transportation plane of the carrier 8 .
  • the right side roller 16 R has the diameter different from that of the left side roller 16 L.
  • the carrier 8 can be transported smoothly while changing the traveling direction thereof, by using the right side roller 16 R having the large diameter as the roller on the outer periphery side, without using a particular mechanism for making the transporting speed of the carrier 8 on the outer periphery side faster than the transporting speed of the carrier 8 on the inner periphery side.
  • each of the left side roller 16 L and the right side roller 16 R has the carrier receiving portion 16 a of a tapered shape formed by the part of the side surface of the cone 20 , it is possible to suppress to the minimum the generation of dust due to the slip between the carrier 8 and the rollers.
  • the transport apparatus 1 for transporting a carrier 8
  • said transport apparatus includes: the transport track 2 which has:
  • the join portion 2 d provided with the join track 7 for guiding the carrier 8 so as to join to the main track 3 from the traveling direction of the carrier different from the main track 3 and the linear track 5 for guiding the carrier 8 so as to join to the main track 3 from the traveling direction of the carrier same as the main track 3 ;
  • the extensible poles which are provided at the join portion 2 d and switch between the join track 7 and the linear track so that one of the join track 7 and the linear track 5 guides the carrier 8 in accordance with the entering state into the join portion 2 d of the carrier 8 .
  • the not-shown extensible poles provided at the join portion 2 d perform the switching between the join track 7 and the linear track 5 so as to guide the carrier 8 along one of the join track 7 and the linear track 5 in accordance with the entering state of the carrier into the join portion 2 d .
  • the carrier 8 can be transported without being temporarily stopped by merely performing the switching between the join track 7 and the linear track 5 .
  • it is not necessary to provide a time for restoring to the origin like the turntable the time necessary for changing the direction of the carrier 8 can be shortened.
  • the extensible poles are configured to position one of the join track 7 and the linear track 5 so as to continue to the main track 3 and also position the other track so as to move away from the carrier 8 thereby to switch between the join track 7 and the linear track 5 .
  • the extensible poles serve to continue one of the join track 7 and the linear track 5 to the main track 3 and also move the other track away from the carrier 8 thereby to perform the switching between the join track 7 and the linear track 5 .
  • a time required for the switching can be made short.
  • the join track 7 is configured by a plurality of the right side rollers 17 R and a plurality of the left side rollers 17 L which are disposed with the predetermined interval along the track and each of which can receive the carrier 8 .
  • the rollers 17 L, 17 R are configured in a manner that a part of the side surface of the cone 20 having the center axis inclined with respect to the transportation plane of the carrier 8 forms the carrier receiving portion 17 a of each of the right side and left side rollers.
  • the right side roller 17 R has the diameter different from that of the left side roller 17 L.
  • the carrier 8 can be transported smoothly while changing the traveling direction thereof, by using the right side roller 17 R having the large diameter as the roller on the outer periphery side, without using a particular mechanism for making the transporting speed of the carrier 8 on the outer periphery side faster than the transporting speed of the carrier 8 on the inner periphery side.
  • each of the left side roller 17 L and the right side roller 17 R has the carrier receiving portion 17 a of a tapered shape formed by the part of the side surface of the cone 20 , it is possible to suppress to the minimum the generation of dust due to the slip between the carrier 8 and the rollers.
  • the transport apparatus 1 is configured in a manner that at least the right side rollers 16 R, 17 R on the outer periphery sides among the right side rollers 16 R, 17 R and the left side rollers 16 L, 17 L are provided with flanges 16 b , 17 b on the outer periphery sides thereof, respectively.
  • the right side rollers 16 R, 17 R on the outer periphery sides have the flanges 16 b , 17 b on the outer periphery sides thereof, respectively, the centrifugal force generated at the carrier 8 when the carrier 8 travels while changing the traveling direction thereof can be suppressed by the flanges 16 b , 17 b.
  • the various modification may be made in a range without changing the gist of the invention. That is, in FIG. 6 , the axis 16 A of the cone may be laid in the horizontal direction, for example, so that the side surface 21 located at the upper end in the vertical direction of the cone 20 is slanted in a manner that the right side roller 16 R side constituting the branch track 6 is located at a higher position. According to this configuration, there is a case that the centrifugal force generated at the carrier 8 can be suppressed more preferably by the flange 16 b of the right side roller 16 R. This feature is also applied to the right side roller 17 R constituting the join track 7 .

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
  • Relays Between Conveyors (AREA)
  • Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
  • Platform Screen Doors And Railroad Systems (AREA)
  • Non-Mechanical Conveyors (AREA)
US11/708,065 2006-02-21 2007-02-20 Transport apparatus Abandoned US20070193859A1 (en)

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JP2006043573A JP5168794B2 (ja) 2006-02-21 2006-02-21 搬送装置

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CN101024450A (zh) 2007-08-29
KR20070083435A (ko) 2007-08-24

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