US20050204638A1 - Polishing composition and polishing method - Google Patents

Polishing composition and polishing method Download PDF

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Publication number
US20050204638A1
US20050204638A1 US11/083,565 US8356505A US2005204638A1 US 20050204638 A1 US20050204638 A1 US 20050204638A1 US 8356505 A US8356505 A US 8356505A US 2005204638 A1 US2005204638 A1 US 2005204638A1
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Prior art keywords
polishing
polishing composition
conductor layer
alumina
trench
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Abandoned
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US11/083,565
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English (en)
Inventor
Kazusei Tamai
Yasuyuki Yamato
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Fujimi Inc
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Fujimi Inc
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Assigned to FUJIMI INCORPORATED reassignment FUJIMI INCORPORATED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: YAMATO, YASUYUKI, TAMAI, KAZUSEI
Publication of US20050204638A1 publication Critical patent/US20050204638A1/en
Priority to US11/948,793 priority Critical patent/US20080132156A1/en
Abandoned legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1409—Abrasive particles per se
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463—Aqueous liquid suspensions
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/26—Cleaning or polishing of the conductive pattern
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/321—After treatment
    • H01L21/32115—Planarisation
    • H01L21/3212—Planarisation by chemical mechanical polishing [CMP]
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/02—Fillers; Particles; Fibers; Reinforcement materials
    • H05K2201/0203—Fillers and particles
    • H05K2201/0206—Materials
    • H05K2201/0209—Inorganic, non-metallic particles
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/02—Details related to mechanical or acoustic processing, e.g. drilling, punching, cutting, using ultrasound
    • H05K2203/025—Abrading, e.g. grinding or sand blasting
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0779—Treatments involving liquids, e.g. plating, rinsing characterised by the specific liquids involved
    • H05K2203/0786—Using an aqueous solution, e.g. for cleaning or during drilling of holes
    • H05K2203/0796—Oxidant in aqueous solution, e.g. permanganate
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/12—Using specific substances
    • H05K2203/121—Metallo-organic compounds
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/04—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed mechanically, e.g. by punching
    • H05K3/045—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed mechanically, e.g. by punching by making a conductive layer having a relief pattern, followed by abrading of the raised portions

Definitions

  • the present invention relates to a polishing composition used, for example, in polishing for forming conductor wiring for a circuit board, and to a polishing method using such a polishing composition.
  • a damascene process wherein a chemical mechanical polishing (CMP) technology is used has become the main method for forming conductor wiring for a circuit board.
  • CMP chemical mechanical polishing
  • a conductor layer is formed so that at least the trenches is filled with the conductor layer.
  • at least a portion of the conductor layer positioned outside the trenches is removed by polishing so that a portion of the resin section between adjacent trenches is exposed. In this way, at least a part of the portion of the conductor layer positioned inside the trenches remains on the resin section, and the portion of the conductor layer which remains functions as conductor wiring.
  • a polishing composition disclosed in Japanese Laid-Open Patent Publication No. 2003-257910 is used in polishing for forming conductor wiring.
  • the polishing composition contains abrasive, a copper chelating agent, a copper etching agent, and an oxidizing agent.
  • polishing rate of a conductor layer In order to enhance the efficiency of polishing for forming conductor wiring, it is important not only to raise the polishing quantity of a conductor layer per unit time (polishing rate of a conductor layer), but also to raise the polishing quantity of a resin section per unit time (polishing rate of a resin section). Nevertheless, the polishing composition described in Japanese Laid-Open Patent Publication No. 2003-257910 can polish a conductor layer in a high stock removal rate, but cannot polish a resin section in a high stock removal rate. Therefore, although the polishing rate of a conductor layer increases when the polishing composition is used in polishing for forming conductor wiring, the polishing rate of a resin section seldom improves.
  • an object of the present invention is to provide a polishing composition which can raise the polishing rate of a conductor layer, and the polishing rate of a resin section.
  • a polishing composition includes alumina, a complexing agent, and an oxidizing agent.
  • the polishing composition is used in an application for polishing an object having a resin section with a trench, and a conductor layer provided on the resin section so that at least the trench is filled with the conductor layer,
  • the present invention also provides a polishing method.
  • the method includes preparing the above polishing composition and polishing an object having a resin section with a trench, and a conductor layer provided on the resin section so that at least the trench is filled with the conductor layer, by using the prepared polishing composition.
  • FIGS. 1 and 2 are sectional views of an object to be polished for explaining a polishing method according to one embodiment of the present invention.
  • FIGS. 1 and 2 An embodiment of the present invention will now be described with reference to FIGS. 1 and 2 .
  • a conductor layer 13 is formed first on an insulating resin layer 11 (resin section) which is provided on a substrate 10 and has trenches 12 .
  • the substrate 10 consists of, for example, ceramics or metal.
  • the resin layer 11 may be formed with any of a glass epoxy resin, a polyimide resin, a paper epoxy resin, and a Bakelite resin.
  • the trenches 12 are formed so as to have a predetermined designed pattern, for example, by well-known lithography technology and pattern-etching technology.
  • the conductor layer 13 is formed on the resin layer 11 so as to fill at least the trenches 12 .
  • the conductor layer 13 is formed, for example, by PVD, CVD, or plating, and consists of copper containing material such as copper, a copper-aluminum alloy, and a copper-titanium alloy.
  • polishing for forming the conductor wiring 14 is performed by one time of polishing step.
  • a polishing composition according to this embodiment contains alumina, a complexing agent, an oxidizing agent, and water, and is used in polishing for forming the conductor wiring 14 .
  • Alumina in the polishing composition has a function of mechanically polishing an object to be polished.
  • Alumina to be contained in the polishing composition may be produced by grinding and classification after heat-treating aluminum hydroxide, or it may be colloidal alumina or fumed alumina.
  • the polishing composition may also contain two types of different alumina.
  • the content of alumina in the polishing composition is preferably 0.1 mass % or more, more preferably 1 mass % or more, further preferably 5 mass % or more, and most preferably 7 mass % or more.
  • the content of alumina is preferably 50 mass % or less, more preferably 30 mass % or less, and most preferably 20 mass % or less.
  • the average particle diameter of the alumina measured by an electric resistance method is preferably 0.1 ⁇ m or more, and further preferably 1 ⁇ m or more.
  • the average particle diameter of the alumina measured by the electric resistance method is preferably 50 ⁇ m or less, and more preferably 10 ⁇ m or less.
  • the average particle diameter of the alumina measured by a laser diffraction method is preferably 0.1 ⁇ m or more.
  • the average particle diameter of the alumina measured by the laser diffraction method is preferably 10 ⁇ m or less, and further preferably 1 ⁇ m or less.
  • a complexing agent in the polishing composition has the function of catching metal generated in the polishing composition by the polishing of the conductor layer 13 and enhancing the polishing of the conductor layer 13 .
  • a complexing agent to be contained in the polishing composition may be at least one compound selected from organic acids such as oxalic acid, citric acid, succinic acid, maleic acid, and tartaric acid; a-amino acids such as glycine and alanine; multiple valued amine such as ethylenediamine and triethylenetetramine; ammonia; and an ammonium salt.
  • an ⁇ -amino acid, ammonia, or an ammonium salt is preferable since having a strong action of enhancing copper polishing when the conductor layer 13 consists of copper.
  • At least one compound, selected from between the ammonia and ammonium salt, and the ⁇ -amino acid are contained as the complexing agent in the polishing composition.
  • ⁇ -amino acids are neutral amino acids such as glycine, alanine, valine, leucine, isoleucine, alloisoleucine, serine, threonine, allothreonine, cysteine, methionine, phenylalanine, tryptophan, thyrosin, proline, and cystine; acidic amino acids such as glutamic acid and aspartic acid; and basic amino acids such as arginine and histidine. At least one compound is used among these. Especially, since procurement is easy and moreover the polishing rate of the conductor layer 13 is improved well, glycine and a-alanine acid are preferable, and glycine is more preferable.
  • the ⁇ -amino acid may be any of an L-enantiomer and a D-enantiomer.
  • the content of the ⁇ -amino acid in the polishing composition is preferably 0.01 mass % or more, and more preferably 0.1 mass % or more.
  • the content of the ⁇ -amino acid is preferably 20 mass % or less, and is more preferably 10 mass % or less.
  • ammonium salts are ammonium salts of inorganic acids such as ammonium carbonate, ammonium hydrogencarbonate, ammonium phosphate, ammonium nitrate, ammonium sulfate, and ammonium chloride; and ammonium salts of organic acids such as ammonium oxalate, ammonium citrate, succinic acid ammonium, and ammonium tartrate. At least one compound is used among these. Since ammonia has an action of polishing an object chemically and does not contain metal impurities, ammonia is preferable to be contained in the polishing composition as the complexing agent.
  • sum of the content of the ammonia and ammonium salts in the polishing composition is preferably 0.1 mass % or more, and more preferably 1 mass % or more.
  • the content is preferably 10 mass % or less, and more preferably 5 mass % or less.
  • An oxidizing agent in the polishing composition makes the operation of enhancing the polishing of the conductor layer 13 by chemical polishing.
  • An oxidizing agent to be contained in the polishing composition may be at least one compound selected from persulfuric acid, periodic acid, perchloric acid, peracetic acid, performic acid, nitric acid and a salt thereof, and hydrogen peroxide. Among them, hydrogen peroxide is preferable because hydrogen peroxide little contaminated with metal impurities is inexpensively and easily available.
  • the content of the oxidizing agent in the polishing composition is preferably 0.01 mass % or more, more preferably 0.1 mass % or more, and further preferably 0.3 mass % or more.
  • the content of the oxidizing agent is preferably 10 mass % or less, more preferably 6 mass % or less, and further preferably 3 mass % or less.
  • Water in the polishing composition acts as a medium for dispersing or dissolving components in the polishing composition.
  • Water to be contained in the polishing composition preferably contains as little impurity as possible so as not to hinder the actions of each component in the polishing composition, and preferably is deionized water, ultra pure water, or distilled water.
  • the pH of the polishing composition is preferably 7 or more, more preferably 8.5 or more, and further preferably 9 or more.
  • the pH is preferably less than 12, more preferably less than 11.5, and further preferably less than 11.
  • the polishing composition contains at least one compound, selected from ammonia and ammonium salt, and an ⁇ -amino acid as the complexing agent, it is preferable to set the content of the complexing agent in consideration of the above-mentioned range of the pH.
  • alumina sol may be added to the polishing composition according to this embodiment, as an aggregation restrainer.
  • alumina sol is added to the polishing composition, it is possible to suppress the generation of hard caking, which becomes a cause of lowering the redispersibility of alumina, and the aggregation of alumina, which causes scratches generated on the polished object, because of an action of alumina sol dispersed colloidally in the polishing composition.
  • alumina sol by dispersing hydrated alumina, such as boehmite, pseudo-boehmite, diaspore, gibbsite, and bayerite, or aluminum hydroxide colloidally in an aqueous acid.
  • alumina sol obtained by dispersing boehmite or pseudo-boehmite in the aqueous acid is preferable.
  • the content of alumina sol in the polishing composition is preferably 0.05 mass % or more, or preferably 0.1 mass % or more, and further preferably 0.5 mass % or more.
  • the content of alumina sol is preferably 5 mass % or less, more preferably 3 mass % or less, and further preferably 2 mass % or less.
  • the conductor layer 13 and resin layer 11 are mechanically polished by action of alumina in the polishing composition at a high stock removal rate.
  • the polishing of the conductor layer 13 is performed at an especially high stock removal rate. Therefore, according to the polishing composition, it is possible to raise the polishing rate of the conductor layer 13 and the polishing rate of the resin layer 11 , and the efficiency of the polishing for forming the conductor wiring 14 improves.
  • the polishing composition may be prepared by diluting a stock solution with water at the time of use.
  • the stock solution is easy in storage and transportation.
  • the polishing composition may be stored in the state where an oxidizing agent is separated from the other components.
  • the polishing composition is provided for use after the oxidizing agent has been mixed with the other components. According to this, the oxidizing agent is prevented from decomposing in the polishing composition during storage.
  • a well-known additive such as a surfactant, a thickener, an emulsifier, a antirust agent, a preservative, an antifungal agent, an antifoaming agent, and a pH adjuster may be added.
  • the conductor layer 13 may be provided on a resin substrate (resin section) instead of being provided on the resin layer 11 provided on the substrate 10 .
  • Each of an abrasive, a complexing agent, an oxidizing agent, and alumina sol was mixed to water as required in order to prepare polishing compositions according to Examples 1 to 22 and Comparative Examples 1 to 8.
  • the detail of the abrasive, complexing agent, oxidizing agent, and alumina sol in each polishing composition is as being shown in Table 1.
  • measurements of pH of respective polishing compositions are -shown in Table 1.
  • the unit of a value which indicates the content of each component in Table 1 is mass %.
  • the average particle diameter of alumina was measured by the electric resistance method using “Coulter Multisizer” made by Beckman Coulter Inc., and the average particle diameters of colloidal alumina, fumed alumina, colloidal silica, and fumed silica were measured by the laser diffraction method using “N4 Plus Submicron Particle Sizer” made by Beckman Coulter Inc.
  • G denotes glycine
  • NH 3 denotes ammonia
  • H 2 O 2 denotes hydrogen peroxide
  • APS denotes ammonium sulfite
  • a copper blanket-wafer and an epoxy resin blanket-wafers were polished for 1 minute under the following polishing conditions using respective polishing compositions according to Examples 1 to 22 and Comparative Examples 1 to 8. Then, the polishing rate of copper and the polishing rate of epoxy resin were found on the basis of the following formulae. The results are shown in the column entitled “Polishing rate” of Table 2.
  • each copper blanket-wafer has a copper film formed on an 8-inch silicon wafer with an electroplating method
  • each epoxy resin blanket-wafer has a film consisting of an epoxy resin (ABF by Ajinomoto Co., Inc.) on an 8-inch silicon wafer with spin coating.
  • Polishing apparatus single-sided CMP polishing machine, “ARW” made by MAT Corporation,
  • Polishing pad multilayered polishing pad “IC-1000/Suba400” made of polyurethane and made by Rodel Corporation,
  • Polishing pressure 28 kPa (about 6 psi)
  • Feed rate of polishing composition 140 mL/min
  • Rotational frequency of carrier for supporting wafer 95 min ⁇ 1
  • Polishing rate of copper [ ⁇ m/min] (thickness of copper blanket-wafer before polishing [ ⁇ m] ⁇ thickness of copper blanket-wafer after polishing [ ⁇ m])/polishing time [min].
  • the thickness of the copper blanket-wafers before and after polishing was measured using a sheet resistance measuring instrument, “VR-120” made by Kokusai Electric system service Co., Ltd.
  • Polishing rate of epoxy resin [ ⁇ m/min] (weight of epoxy resin blanket-wafer before polishing [g] ⁇ weight of epoxy resin blanket-wafer after polishing [g])/specific gravity of epoxy resin [g/cm 3 ]/polishing area of epoxy resin blanket-wafer [cm 2 ]/polishing time [min]
  • Patterned wafers which each had a copper conductor layer on a resin layer which was made of an epoxy resin and had trenches were prepared.
  • the trenches include a trench with the depth of 20 ⁇ m and the width of 85 ⁇ m, a trench with the depth of 20 ⁇ m and the width of 300 ⁇ m, and a trench with the depth of 20 ⁇ m and the width of 500 ⁇ m.
  • the patterned wafers were polished under the above-mentioned polishing conditions until a top face of a portion of each resin layer between adjacent trenches was exposed using each of the polishing compositions according to Examples 1 to 22 and Comparative Examples 1 to 8. The time taken for the top face of the portion of each resin layer to be exposed is shown in the column entitled “Removing time” of Table 2.
  • Dishing depth was measured in a region (W 85 ), in which a trench with the width of 85 ⁇ m is formed, a region (W 300 ), in which a trench with the width of 300 ⁇ m is formed, and a region (W 500 ), in which a trench with the width of 500 ⁇ m is formed, in each of the patterned wafers after polished using each polishing composition according to Examples 1 to 22 and Comparative Examples 1 to 8.
  • the results are shown in the column entitled “Dishing depth” of Table 2.
  • the measurement of the dishing depth was performed using a profiler “HRP340” which is a contact type surface measurement apparatus made by KLA-Tencor Corporation.
  • the plus value of the dishing depth means that the portion of the conductor layer positioned inside the trench is depressed
  • the minus value of the dishing depth means that the portion of the conductor layer positioned inside the trench protrudes.
  • the redispersibility of abrasives was evaluated as follows using each of the polishing compositions according to Examples 1 to 22 and Comparative Examples 1 to 8 which were charged in vessels made of polypropylene, and which were left as it is for ten days. Thus, they were evaluated to be excellent (E) when there was no precipitate or when precipitates disappeared by shaking within 1 minute even if the precipitates were in each polishing composition after having been left as it is for ten days, to be good (G) when the precipitates disappeared by shaking for 1 to 10 minutes, and to be defective (D) when the precipitates did not disappear even by shaking for 10 minutes or more. The results are shown in the column entitled “Redispersibility” of Table 2.
  • the polishing rate of copper was high, that is, 3.0 ⁇ m/min or more, and the polishing rate of epoxy resin was also high, that is, 2.0 ⁇ m/min or more.
  • the polishing rate of copper was less than 3.0 ⁇ m/min, or the polishing rate of epoxy resin was less than 2.0 ⁇ m/min.
  • a reason why the polishing rate is low in Comparative Examples 1 and 2 is that the content of alumina in each polishing composition of Comparative Examples 1 and 2 is small.
  • a reason why the polishing rate is low in Comparative Examples 3 to 8 is that each polishing composition of Comparative Examples 3 to 8 does not contain at least one among an abrasive, a complexing agent, and an oxidizing agent.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Disintegrating Or Milling (AREA)
  • Weting (AREA)
US11/083,565 2004-03-19 2005-03-18 Polishing composition and polishing method Abandoned US20050204638A1 (en)

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US20090140199A1 (en) * 2006-05-31 2009-06-04 Asahi Glass Company, Limited Polishing compound and polishing method
US20090291620A1 (en) * 2008-05-22 2009-11-26 Jsr Corporation Chemical mechanical polishing aqueous dispersion, chemical mechanical polishing method, and chemical mechanical polishing aqueous dispersion preparation kit

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US7897061B2 (en) * 2006-02-01 2011-03-01 Cabot Microelectronics Corporation Compositions and methods for CMP of phase change alloys
JP5459466B2 (ja) * 2008-06-05 2014-04-02 Ｊｓｒ株式会社 回路基板の製造に用いる化学機械研磨用水系分散体、回路基板の製造方法、回路基板および多層回路基板
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US20120003834A1 (en) * 2010-07-01 2012-01-05 Koo Ja-Ho Method Of Polishing Chalcogenide Alloy
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JP2015203080A (ja) * 2014-04-15 2015-11-16 株式会社フジミインコーポレーテッド 研磨用組成物
JP6924616B2 (ja) * 2017-05-25 2021-08-25 ニッタ・デュポン株式会社 研磨用スラリー
JP7057662B2 (ja) * 2017-12-26 2022-04-20 ニッタ・デュポン株式会社 研磨組成物、及び、研磨速度を調整する方法
JP7064870B2 (ja) * 2017-12-26 2022-05-11 ニッタ・デュポン株式会社 研磨組成物
CN109015204B (zh) * 2018-08-29 2020-11-27 包头市利晨科技有限公司 一种适用于cr39树脂镜片的抛光方法
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CN1670117A (zh) 2005-09-21
CN100516159C (zh) 2009-07-22
ATE431389T1 (de) 2009-05-15
EP1580243B1 (en) 2009-05-13
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US20080132156A1 (en) 2008-06-05
SG115787A1 (en) 2005-10-28
KR20060044392A (ko) 2006-05-16

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